CENTROTHERM E1200 HT 260-3 User manual

Operating Instructions
for Horizontal Furnace Equipment
E1200 HT 260-3
Version 1.0
1_41087.11

E1200 HT 260-3
23.04.07
00401010_41087

E1200 HT 260-3
Document Information
23.04.07
00401010_41087
Document Information
Type: Operating Instructions
Author: Barbara Abe
Document: 00401010_41087
Created on: 4/16/2007
Current version: 23.04.07 15:28
Legend of Amendments
Version Date Name Description of Amendments
V 1.0 04/16/07 Bangert Manual based on Master Document 1.9
Project-spedific changes:
Cpt 3.7.5 "Gas"
Cpt 3.8 "Safety Labeling on the Equipment"
Cpt 4, Figure "Overall View"
Cpt 4.3 "TEOS Cabinet", completely new
Cpt 9.2, deleted error messages for stacks 4 and
5

E1200 HT 260-3
Document Information
23.04.07
00401010_41087

E1200 HT 260-3
Table of Contents
23.04.07
00401010_41087
Table of Contents
1 Operating Instruction Remarks .............................................................................................. 1-1
1.1 Description of Symbols and Notes............................................................................................. 1-2
1.2 Definitions................................................................................................................................... 1-4
1.2.1 Operating Company.............................................................................................................. 1-4
1.2.2 Trained Workers ................................................................................................................... 1-4
1.2.3 Operating Personnel .............................................................................................................1-4
1.3 Copyright.................................................................................................................................... 1-4
1.4 Liability for Material Defects....................................................................................................... 1-5
2 Introduction .............................................................................................................................. 2-1
2.1 Technical Data ........................................................................................................................... 2-1
2.1.1 Dimensions and Weight ........................................................................................................ 2-1
2.1.2 Media Supply Connections ................................................................................................... 2-1
2.1.2.1 Cooling Water .................................................................................................................. 2-1
2.1.2.2 Compressed Air ............................................................................................................... 2-2
2.1.2.3 Nitrogen ........................................................................................................................... 2-2
2.1.2.4 Oxygen and Other Gases (Option) .................................................................................. 2-2
2.1.2.5 Exhaust Air Removal ....................................................................................................... 2-2
2.1.2.6 Electricity.......................................................................................................................... 2-2
2.1.3 Operating Data...................................................................................................................... 2-3
2.1.3.1 Ambient Air ...................................................................................................................... 2-3
2.1.3.2 Wafers.............................................................................................................................. 2-3
2.1.3.3 Thermocouples ................................................................................................................ 2-3
2.1.3.4 Process Boat....................................................................................................................2-3
2.1.3.5 Process Tube................................................................................................................... 2-4
2.1.3.6 Heating Cassette with Water Cooled Jacket ................................................................... 2-4
2.1.3.7 Control System ................................................................................................................ 2-4
2.2 Process Overview ...................................................................................................................... 2-5
2.2.1 Diffusion ................................................................................................................................ 2-5
2.2.2 Oxidation ............................................................................................................................... 2-5
2.2.3 Chemical Vapor Deposition .................................................................................................. 2-5
2.2.4 Plasma Enhanced Chemical Vapor Deposition .................................................................... 2-6
2.3 Safety Concept........................................................................................................................... 2-6
2.3.1 Safety-relevant Aspects of the Mechanical Construction ..................................................... 2-6
2.3.2 Safety-relevant Aspects of the System Functions ................................................................ 2-7
3 Safety......................................................................................................................................... 3-1
3.1 Correct Use ................................................................................................................................ 3-1
3.2 Incorrect Use.............................................................................................................................. 3-1
3.3 General Safety Instructions........................................................................................................ 3-1
3.4 Safety Devices ........................................................................................................................... 3-2
3.4.1 Emergency Stop Switch........................................................................................................ 3-3
3.4.2 Security System Functions ................................................................................................... 3-3
3.5 Notes on the Software for Equipment Operation ....................................................................... 3-6
3.6 Workstations of the Operating and Service Personnel .............................................................. 3-6
3.7 Safety Notes............................................................................................................................... 3-7
3.7.1 Operation and Handling ........................................................................................................ 3-7
3.7.2 Maintenance and Preventive Maintenance........................................................................... 3-8
3.7.3 Electrical Engineering ........................................................................................................... 3-9
3.7.4 Pneumatic System .............................................................................................................. 3-10
3.7.5 Gas...................................................................................................................................... 3-10
3.8 Safety Labeling on the Equipment ........................................................................................... 3-12
3.9 Firefighting................................................................................................................................ 3-15
4 Functional Description............................................................................................................ 4-1
4.1 Loading Station .......................................................................................................................... 4-2

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4.1.1 Transport Box Storage.......................................................................................................... 4-3
4.1.2 Loading Box .......................................................................................................................... 4-3
4.1.3 Wafer Transfer System (WTS).............................................................................................. 4-3
4.1.4 Loading Trolley ..................................................................................................................... 4-4
4.1.5 Slider ..................................................................................................................................... 4-4
4.1.6 Lift and Storage..................................................................................................................... 4-4
4.1.7 Loading Machine................................................................................................................... 4-5
4.1.8 Process Boat......................................................................................................................... 4-5
4.1.9 Laminar Flow Box ................................................................................................................. 4-5
4.2 Horizontal Furnace..................................................................................................................... 4-6
4.2.1 Heating Cassette .................................................................................................................. 4-6
4.2.2 Process Tube........................................................................................................................ 4-8
4.2.3 Tube Closure......................................................................................................................... 4-8
4.2.4 Power Electronics ................................................................................................................. 4-8
4.2.5 Cooling System..................................................................................................................... 4-9
4.3 TEOS Cabinet .......................................................................................................................... 4-11
4.4 Gas Cabinet ............................................................................................................................. 4-13
4.4.1 Synthesis Steam Generator................................................................................................ 4-13
4.4.2 Bubbler System................................................................................................................... 4-14
4.4.3 Flaring Unit.......................................................................................................................... 4-14
4.4.4 Control Elements in the Door.............................................................................................. 4-14
4.5 Distributor Cabinet ................................................................................................................... 4-15
4.6 Vacuum System ....................................................................................................................... 4-15
4.7 Transformer Box ...................................................................................................................... 4-16
4.8 Exhaust System ....................................................................................................................... 4-16
4.8.1 Toxic Gas Exhaust.............................................................................................................. 4-16
4.8.2 Exhaust Suction Box in the Gas Cabinet............................................................................ 4-16
4.9 Display and Operating Elements ............................................................................................. 4-16
4.9.1 Signal Lamp and Horn ........................................................................................................ 4-16
4.9.2 Operating Panel .................................................................................................................. 4-18
4.9.3 Buttons on the Touchscreen ............................................................................................... 4-19
4.9.4 User Interface of the CMI Computer................................................................................... 4-20
4.9.4.1 CESAR Control Computer ............................................................................................. 4-21
4.9.4.2 centrotherm Machine Safety (CMS) .............................................................................. 4-21
4.9.5 Cell Controller ..................................................................................................................... 4-22
4.9.5.1 centrotherm cell control Recipe Manager (CCC-RM).................................................... 4-22
4.9.5.2 ProtGraf ......................................................................................................................... 4-22
4.10 Process Description ................................................................................................................. 4-23
4.10.1 Process Flow Oxidation/Diffusion/Annealing ...................................................................... 4-23
4.10.2 Process Flow LPCVD/PECVD ............................................................................................ 4-24
5 Transport................................................................................................................................... 5-1
5.1 Special Safety Measures ........................................................................................................... 5-1
5.2 Packaging................................................................................................................................... 5-1
5.3 Technical Instructions for Transport........................................................................................... 5-2
5.4 Incoming Inspection ................................................................................................................... 5-3
5.4.1 Scope of Delivery.................................................................................................................. 5-3
5.4.2 Transport Damages .............................................................................................................. 5-3
5.5 Storage Measures...................................................................................................................... 5-3
6 Assembly .................................................................................................................................. 6-1
6.1 Preparing the Installation Site .................................................................................................... 6-1
6.2 Equipment Check....................................................................................................................... 6-1
6.3 Installation .................................................................................................................................. 6-2
7 Commissioning and Decommissioning................................................................................. 7-1
7.1 Preparation for Initial Startup ..................................................................................................... 7-1
7.2 Initial Startup .............................................................................................................................. 7-1
7.3 Startup........................................................................................................................................ 7-2

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7.3.1 Conditioning and Test Process Runs ................................................................................... 7-3
7.3.2 Tests with Handling System while Operating ....................................................................... 7-4
7.4 Putting out of Operation ............................................................................................................. 7-5
7.4.1 Switching Off the Equipment................................................................................................. 7-5
7.4.2 Shutting Down the Equipment .............................................................................................. 7-6
7.5 Waste Disposal .......................................................................................................................... 7-6
8 Operation .................................................................................................................................. 8-1
8.1 User Interface Arrangement of the CMI Computer .................................................................... 8-1
8.1.1 Title Bar................................................................................................................................. 8-2
8.1.2 Command Bar....................................................................................................................... 8-4
8.1.3 Navigation Bar....................................................................................................................... 8-5
8.1.4 "Jobs" Information Field ........................................................................................................8-6
8.1.4.1 "Job List" Area .................................................................................................................8-6
8.1.4.2 "Process Tubes" Area...................................................................................................... 8-7
8.1.4.3 Process Capability ........................................................................................................... 8-7
8.1.4.4 Status of Process Tubes.................................................................................................. 8-8
8.2 User Login.................................................................................................................................. 8-9
8.3 Startup...................................................................................................................................... 8-10
8.3.1 Startup from "Pause" Status ............................................................................................... 8-10
8.3.2 Startup from "Break" Status ................................................................................................ 8-10
8.3.3 Startup from "Empty" Status ............................................................................................... 8-10
8.4 Shutdown ................................................................................................................................. 8-11
8.4.1 Running the Equipment to "Pause" Status ......................................................................... 8-11
8.4.2 Running the Equipment to "Break" Status .......................................................................... 8-11
8.4.3 Running the Equipment to "Empty" Status ......................................................................... 8-11
8.5 Toggling the Process Capability .............................................................................................. 8-12
8.6 Alarm Handling......................................................................................................................... 8-13
8.6.1 Alarm Display ...................................................................................................................... 8-13
8.6.2 Responding to an Alarm ..................................................................................................... 8-14
8.6.2.1 CESAR Control System Alarm Message....................................................................... 8-14
8.6.2.2 Lift Alarm Message ........................................................................................................ 8-14
8.7 CESAR Control Computer User Interface................................................................................ 8-15
9 Maintenance ............................................................................................................................. 9-1
9.1 Safety Notes............................................................................................................................... 9-1
9.2 Disturbance Diagnosis for Displays at the System Computer ................................................... 9-3
9.2.1 ID 1000 – 3000 Error Messages CMI ................................................................................... 9-4
9.2.2 ID 3001 – 3050 Error Messages CMS.................................................................................. 9-6
9.2.3 ID 3051 – 3100 Error Messages CMS.................................................................................. 9-9
9.2.4 ID 3101 – 3150 Error Messages CMS................................................................................ 9-11
9.2.5 ID 3151 – 3200 Error Messages CMS................................................................................ 9-13
9.2.6 ID 3201 – 3250 Error Messages CMS................................................................................ 9-14
9.2.7 ID 3251 – 3512 Error Messages CMS................................................................................ 9-16
9.2.8 Error Messages from Lift at CMI ......................................................................................... 9-19
9.2.9 Error Messages from Slider and Wafer Handler at the CMI ............................................... 9-25
9.2.10 Error Messages from the External Wafer Handler (EWH) at the CMI ................................ 9-26
9.2.11 Faulty Displays at the CESAR Control Computer............................................................... 9-28
9.2.11.1 Heating Zone Display of 0 °C ........................................................................................ 9-28
9.2.11.2 Heating Zone Display of 3000 °C .................................................................................. 9-28
9.2.11.3 Heating Zone Display of 3003 °C .................................................................................. 9-28
9.2.11.4 Several Zones Display Values which Differ from Setpoint ............................................ 9-28
9.2.11.5 Reference Point Temperature Inside and/or Outside is Displayed at 0.0 °C ................ 9-28
9.2.11.6 Deviation of Temperature Actual Value to Old Setpoint ................................................ 9-28
9.2.11.7 Position Display Bar of Process Boat has ??? .............................................................. 9-29
9.2.11.8 SLS Display Remains Undefined................................................................................... 9-29
9.2.11.9 Incorrect Gas Flow Velocity, Insufficient Actual Value .................................................. 9-29
9.2.11.10 Incorrect Gas Flow Velocity, Actual Value is Zero......................................................... 9-30

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9.2.11.11 Actual Gas Flow Value Display without Setpoint........................................................... 9-30
9.3 Disturbance Diagnosis for Assembly Groups of the Equipment.............................................. 9-31
9.3.1 Laminar Flow Box Disturbances ......................................................................................... 9-31
9.3.1.1 Illumination Cannot Be Switched On ............................................................................. 9-31
9.3.1.2 Laminar Flow Box has Shut Down................................................................................. 9-31
9.3.2 Disturbances in the Loading Box ........................................................................................ 9-31
9.3.2.1 Inoperative Loading Machine (EFM).............................................................................. 9-31
9.3.2.2 Incorrect Loading Machine Operating Speed ................................................................ 9-31
9.3.2.3 Incorrect Loading Machine Positioning.......................................................................... 9-32
9.3.2.4 Inoperative Limit Switch at the Loading Machine .......................................................... 9-32
9.3.2.5 Loading Machine Operation in One Direction Only ....................................................... 9-32
9.3.2.6 Inoperative Lift Up Motor of the Soft Landing System (SLS)......................................... 9-32
9.3.3 Disturbances in the Toxic Gas Exhaust.............................................................................. 9-33
9.3.3.1 Tube Door Will Not Open............................................................................................... 9-33
9.3.3.2 Tube Door Will Not Close .............................................................................................. 9-33
9.3.3.3 Compressed Air Disturbances ....................................................................................... 9-33
9.3.4 Horizontal Furnace Disturbances........................................................................................ 9-34
9.3.4.1 Overheating of Heating Cassette Casing ...................................................................... 9-34
9.3.4.2 Inoperative Heating Cassette Zone ............................................................................... 9-34
9.3.4.3 Entire Heating Cassette Inoperative .............................................................................. 9-34
9.3.5 Disturbances in the Gas Cabinet including the Door.......................................................... 9-35
9.3.5.1 No Gas Flow in Gas Line............................................................................................... 9-35
9.3.5.2 Frozen Setpoint/Actual Value Display at the MFC Rack (Option) ................................. 9-36
9.3.5.3 Inoperative MFC ............................................................................................................ 9-36
9.3.5.4 Pneumatic Valves Do Not Switch (CAN Control) .......................................................... 9-36
9.3.5.5 Pneumatic Valves Do Not Switch (19" Rack) ................................................................ 9-36
9.3.5.6 Bubbler System Disturbance ......................................................................................... 9-37
9.3.5.7 Incorrect Gas Flow Velocity Ratios................................................................................ 9-37
9.3.5.8 Overheating of Control Cabinet Interior ......................................................................... 9-37
9.3.6 Cell Controller Disturbances ............................................................................................... 9-38
9.4 Replacing the Assembly Groups at the Horizontal Furnace .................................................... 9-39
9.4.1 Replacing the Heating Cassette ......................................................................................... 9-40
9.4.2 Installing the Process Tube................................................................................................. 9-41
9.4.2.1 Installing the Quartz Process Tube................................................................................ 9-41
9.4.2.2 Installing the SiC Process Tube..................................................................................... 9-42
9.4.2.3 Installing the Vacuum Process Tube without Back Flange............................................ 9-44
9.4.2.4 Installing the Vacuum Process Tube with Back Flange................................................. 9-46
9.4.2.5 Installing the Vacuum Process Tube in PECVD Systems ............................................. 9-48
9.4.3 Mounting the Tube Closures............................................................................................... 9-50
9.4.3.1 Installing the Tube Closure – Standard Equipment ....................................................... 9-50
9.4.3.2 Installing the Tube Closure - Closed Tube System ....................................................... 9-51
9.4.3.3 Installing the Tube Closure - Vacuum System .............................................................. 9-52
9.5 Installing/Replacing a Thermocouple....................................................................................... 9-53
9.5.1 Installing a Profiling Thermocouple with Welded Tube Case ............................................. 9-53
9.5.2 Installing a Profiling Thermocouple with Inserted Tube Case ............................................ 9-53
9.5.3 Installing a Profiling Thermocouple in Vacuum Systems.................................................... 9-54
9.5.4 Installing the Spike Thermocouple...................................................................................... 9-54
9.6 Connecting Gas System and Process Tube ............................................................................ 9-54
9.6.1 Installing the Synthesis Steam Generator (Option) ............................................................ 9-54
9.6.2 Installing the Bubbler (Option) ............................................................................................ 9-55
9.7 Adjusting the Loading Machine Coupling................................................................................. 9-56
9.8 Aligning Light Barrier and Limit Switch .................................................................................... 9-57
9.8.1 Setting the Compressed Air (Option).................................................................................. 9-57
9.8.2 Adjusting the Swivel Motion of the Port Cover (Compressed Air, Option).......................... 9-57
9.8.3 Adjusting the Swivel Motion of the Port Cover.................................................................... 9-57
9.8.4 Port Travel Alignment (Compressed Air, Option) ............................................................... 9-57
9.8.5 Port Travel Alignment ......................................................................................................... 9-58

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9.8.6 Adjusting the Flat Aligner .................................................................................................... 9-58
9.8.7 Adjusting the Slider ............................................................................................................. 9-59
9.8.8 Adjusting the Grip Head...................................................................................................... 9-60
9.8.9 Adjusting Light Sensors and Limit Switches (Built up to 05/2003) ..................................... 9-61
9.8.10 Adjusting Light Sensors and Limit Switches (Built later than 06/2003) .............................. 9-62
9.9 Aligning the Softlanding-System (SLS).................................................................................... 9-63
9.10 Working on the Gas System .................................................................................................... 9-65
9.10.1 Flushing Process Gas Lines for Atmospheric Processes................................................... 9-66
9.10.2 Flushing Process Gas Lines for Vacuum Processes.......................................................... 9-67
9.10.3 Replacing Assembly Groups in the Gas System ................................................................ 9-68
9.11 Leak Test.................................................................................................................................. 9-69
9.11.1 Pressure Test for Closed Tube Systems ............................................................................ 9-69
9.11.2 Leakage Test for Vacuum Systems.................................................................................... 9-69
9.11.2.1 Test for External Leaks.................................................................................................. 9-69
9.11.2.2 Test for Internal Leaks ................................................................................................... 9-70
9.12 Temperature Profiling............................................................................................................... 9-71
9.12.1 Setting for the Temperature Profiling.................................................................................. 9-71
9.12.2 Manual Control of Temperature Profiling............................................................................ 9-72
9.12.3 Temperature Profiling with a Recipe................................................................................... 9-73
9.12.4 Checking the Profiling Table ............................................................................................... 9-73
9.12.5 Checking the Calibration Points of the Thermocouple ....................................................... 9-74
9.12.6 Entering the Calibration Points of the Thermocouple ......................................................... 9-75
10 Preventive Maintenance........................................................................................................ 10-1
10.1 Safety Notes............................................................................................................................. 10-1
10.2 Notes on Cleaning and Preventive Maintenance..................................................................... 10-3
10.3 Preventive Maintenance Checklist........................................................................................... 10-4
10.4 Furnace Logbook ..................................................................................................................... 10-5
10.5 Preventive Maintenance Intervals............................................................................................ 10-5
10.6 Daily Procedures...................................................................................................................... 10-7
10.6.1 Checking the Process Boat Contacts ................................................................................. 10-7
10.6.2 Removing Broken Wafer Parts ........................................................................................... 10-7
10.6.3 Checking the Protocol Entries at the Cell Controller........................................................... 10-7
10.6.4 Checking the Zone Heating Current on the CMI Operating Panel ..................................... 10-7
10.7 Weekly Procedures .................................................................................................................. 10-8
10.7.1 Checking the Distributor Cabinet Overtemp and Fan Function (CAN Control) ................ 10-10
10.7.2 Checking the Distributor Cabinet Overtemp. and Fan Function (19"-Rack)..................... 10-10
10.7.3 Comparing Actual and Setpoint Temp Display at CESAR Control Computer.................. 10-11
10.7.4 Checking the Assembly Groups of the Loading Box ........................................................ 10-12
10.7.5 Checking the Filter of the Laminar Flow Box .................................................................... 10-12
10.7.6 Checking the Toxic Gas Exhaust...................................................................................... 10-12
10.7.7 Checking the Horizontal Furnace...................................................................................... 10-13
10.7.8 Checking the Gas Cabinet ................................................................................................ 10-13
10.7.9 Checking the Pneumatic Equipment................................................................................. 10-14
10.8 Procedures Every Two Weeks............................................................................................... 10-14
10.8.1 Cleaning the Condensate Line.......................................................................................... 10-15
10.8.1.1 Dismounting Components ........................................................................................... 10-16
10.8.1.2 Cleaning the Components .......................................................................................... 10-20
10.8.1.3 Installing the Components ........................................................................................... 10-21
10.9 Monthly Procedures ............................................................................................................... 10-22
10.9.1 Checking the Pneumatic Functions .................................................................................. 10-22
10.9.2 Checking the Process Tube.............................................................................................. 10-22
10.9.3 Checking the Vertical Lift Axes (Built up to 05/2003) ....................................................... 10-23
10.9.4 Carrying Out Temperature Profiling of the Heating Cassette ........................................... 10-25
10.10 Eight Weeks Procedures........................................................................................................ 10-25
10.10.1 Replacing the Condensate Line Components .................................................................. 10-25
10.11 Quarterly Procedures ............................................................................................................. 10-26
10.11.1 Checking the Sensors of the Loading Box........................................................................ 10-26

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10.11.2 Cleaning the Riser of the Exhaust Suction Box POCL3-Systems..................................... 10-26
10.12 Semi-Annual Procedures ....................................................................................................... 10-27
10.12.1 Checking the CMS Function ............................................................................................. 10-27
10.12.2 Checking the Vertical Lift Axes (Built starting 06/2003).................................................... 10-28
10.12.3 Checking the Lift Arm........................................................................................................ 10-29
10.12.4 Checking the Lift Grip ....................................................................................................... 10-30
10.12.5 Checking the Lift Interlocks............................................................................................... 10-31
10.12.6 Checking the WTS/WHS................................................................................................... 10-31
10.12.7 Checking the Paddle......................................................................................................... 10-31
10.12.8 Checking the Loading Machine (EFM) ............................................................................. 10-32
10.12.9 Checking the Tube Closure .............................................................................................. 10-33
10.12.10 Checking the Process Tube.............................................................................................. 10-34
10.12.11 Checking the Cooling Water System ................................................................................ 10-34
10.12.12 Checking the Gas System ................................................................................................ 10-35
10.12.13 Checking the Synthesis Steam Generator........................................................................ 10-37
10.12.14 Checking the PECVD Vacuum System ............................................................................ 10-37
10.12.14.1 Checking the HF Lances ............................................................................................. 10-38
10.12.14.2 Checking the Main, Butterfly and Softpump Valve ...................................................... 10-39
10.12.14.3 Checking the O-rings ................................................................................................... 10-40
10.12.14.4 Checking the Vacuum Pump ....................................................................................... 10-40
10.12.14.5 Carrying out a Function Test ....................................................................................... 10-40
10.12.15 Cleaning the Water Cooler, Power and Control Electronics............................................. 10-40
10.12.16 Checking the Safety Labels .............................................................................................. 10-41
10.13 Procedures for Every 4 Years................................................................................................ 10-41
10.13.1 Inspections according to BGV, ch. A3 §5 ......................................................................... 10-41
10.13.2 Inspections According to EN 60204-1 .............................................................................. 10-41
10.14 Process Dependent Measures............................................................................................... 10-42
10.14.1 Cleaning resp. Replacing SiC / Quartz Process Tubes.................................................... 10-42
10.14.2 Cleaning resp. Replacing SiC / Quartz Process Boats..................................................... 10-43
10.14.3 Cleaning Titanium Process Boats..................................................................................... 10-43
10.14.4 Cleaning Graphite Process Boats..................................................................................... 10-44
10.14.5 Checking the Dry-Running Vacuum Pump (Option) ......................................................... 10-44
10.14.6 Cleaning Vacuum Tubing, Cold and Particle Trap (Option) ............................................. 10-45
10.14.7 Cleaning the Condensation Bottle and the Teflon Tubing ................................................ 10-46
10.15 Measures after a Fire ............................................................................................................. 10-46
11 Spare and Wearing Parts....................................................................................................... 11-1
11.1 Ordering Spare Parts ............................................................................................................... 11-1
11.2 List of Spare and Wearing Parts .............................................................................................. 11-1
11.3 Waste Disposal ........................................................................................................................ 11-1
12 Appendix................................................................................................................................. 12-1
12.1 Declaration of Conformity, Nameplate, Test Report ................................................................ 12-1
12.2 Drawings, Circuit Diagrams, Overviews................................................................................... 12-1
12.3 Information on the Control System .......................................................................................... 12-2
12.4 Information on the Load Unit....................................................................................................12-2
12.5 Information on the Gas System ............................................................................................... 12-2
12.6 Information on Process Technology ........................................................................................ 12-2
12.7 Spare and Wearing Parts.........................................................................................................12-3
12.8 DIN Safety Datasheets............................................................................................................. 12-3
12.9 Declaration of Contamination................................................................................................... 12-3
12.10 Suppliers' Documents .............................................................................................................. 12-4
12.11 Licenses ................................................................................................................................... 12-5

E1200 HT 260-3
List of Abbreviations
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List of Abbreviations
Abbreviation Meaning
A/D analog-digital-converter
CAN bus controller area network bus
CCC centrotherm cell control
CMS central machine safety (corresponding to SIKOS)
CMI central machine interface
COM serial interface
CT centrotherm
CZ cold zone
D/A analog-digital-converter
DCE dichlorethane C2H2C12, DCE bubbler liquid
DLV data link variable
I/O input/output
EFM loading machine
EWH external wafer handler
DMC d.c. motor controller
I/O input/output
IHS integrated handling system
LAN local area network
MFC mass flow controller
NO normally open
NV-RAM non volatile RAM
OS2 operating system of the control computer
PPS8 pulse package control system
ProtGraf CESAR protocol analysis software on the CCC cell controller
RCC Remote Control CESAR Software, with which the control computer
can be remote controlled.
REG64, REG97 temperature controller of the horizontal furnace
sccm standard cubic centimeters per minute
SIKOS safety information and control system (corresponding to CMS)
slm standard liters per minute
slm/min change of ramp; standard cubic centimeters per minute
SLS soft landing system

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List of Abbreviations
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Abbreviation Meaning
PLC programmable logic controller
SSR solid state relay, power circuit breaker
TGA toxic gas exhaust
TMM temperature measuring module
UPS uninterrupted power supply
WTS wafer transfer system

E1200 HT 260-3
Index
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Index
A
alarm display............................................. 8-13
alarm message ......................................... 8-13
ambient air .................................................. 2-3
ambient temperature................................... 5-2
ammonia ................................................... 3-10
antifreeze ....................................................7-6
assembly.....................................................6-1
automatic loading........................................ 4-4
automatic operation .................................... 8-4
B
back flange.................................................. 4-8
breakdown
power supply ........................................ 4-15
bubbler system..........................................4-14
button
alarms............................................8-5, 8-13
datalog.................................................... 8-5
help......................................................... 8-5
jobs......................................................... 8-5
setup....................................................... 8-5
system ...........................................8-5, 8-15
C
cell control computer................................. 4-22
CCC-RM............................................... 4-22
Protgraf................................................. 4-22
centrotherm machine safety...................... 4-21
CESAR control computer.................4-21, 8-15
CESAR control system ............................... 8-8
CESAR
ALARM button ...................................... 8-16
ENTER button ...................................... 8-17
ESC button ...........................................8-17
INS button ............................................8-17
OPTION button.....................................8-16
STANDBY button ................................. 8-16
START button ...................................... 8-16
STATUS button .................................... 8-16
STOP button......................................... 8-16
TAB button ........................................... 8-17
chemical vapor deposition .......................... 2-5
CMI ...........................................................4-18
CMS .................................................4-18, 4-21
command bar .....................................4-20, 8-4
commissioning ............................................7-2
computer state .......................................... 8-18
condensation bottle................................. 10-15
conditioning ................................................ 7-3
connection state ......................................... 8-4
control system ............................................ 2-4
cooling system
heating cassette..................................... 4-9
horizontal furnace .................................. 4-9
power electronics ................................... 4-8
air cooling............................................. 4-10
copyright ..................................................... 1-4
CVD ............................................................ 2-5
D
date............................................................. 8-2
DCE .......................................................... 3-10
decommissioning........................................ 7-5
diffusion ...................................................... 2-5
disposal ...................................................... 7-6
distributor cabinet ..................................... 4-15
disturbance ............................................... 8-13
door .......................................................... 4-14
E
emergency cooling shutter ......................... 3-3
emergency inert gas purging ...................... 3-4
emergency stop pushbutton ..................... 4-18
emergency stop switch ...................... 3-3, 4-15
exhaust lance ......................................... 10-15
exhaust system......................................... 4-16
F
F1 STATUS .............................................. 8-18
F2 MANUAL ............................................. 8-18
F3 STOP................................................... 8-18
F4 RECIPE ............................................... 8-18
F5 PROTOCOL ........................................ 8-18
F6 USER .................................................. 8-18
F7 SERVICE............................................. 8-18
F8 LOGOUT ............................................. 8-18
filter............................................................. 4-5
fire extinguisher ........................................ 3-15
fire extinguishing substances ................... 3-15
firefighting ................................................. 3-15
flaring unit ................................................. 4-14
function key bar ........................................ 8-18
fuses ......................................................... 4-15

E1200 HT 260-3
Index
23.04.07
00401010_41087
G
gas cabinet................................................ 4-13
H
handling stop......................................3-4, 4-18
heating zone ............................................... 4-7
horizontal furnace .......................................4-6
heating cassette ..............................4-6, 4-7
cooling system........................................ 4-9
process tube........................................... 4-8
tube closure............................................ 4-8
back flange .............................................4-8
horn..................................................4-16, 8-13
I
information field........................................... 8-5
installation site ............................................6-1
J
job list.......................................................... 8-6
L
laminar flow box .......................................... 4-5
liability .........................................................1-5
lift ..............................................................4-4
list of figures................................................. 17
loading box.................................................. 4-3
loading machine.......................................... 4-5
loading process...........................................4-3
loading station.............................................4-2
loading trolley.............................................. 4-4
login/logout button....................................... 8-3
M
main power switch .............................3-3, 4-15
manipulating variable of the heating zone .. 8-7
manual operation ........................................8-4
manual/auto switch ................................... 4-18
means of transport ...................................... 5-2
media supply connection ............................ 2-1
exhaust air removal ................................ 2-2
compressed air....................................... 2-2
electricity ................................................ 2-2
cooling water .......................................... 2-1
oxygen....................................................2-2
nitrogen .................................................. 2-2
N
navigation bar ....................................4-20, 8-5
O
online help................................................... 8-5
operating company ..................................... 1-4
operating instruction remarks ..................... 1-1
operating panel......................................... 4-18
operating personnel............................. 1-4, 8-1
operation
alarm handling ..................................... 8-13
startup .................................................. 8-10
shutdown.............................................. 8-11
process capability ................................ 8-12
responding to an alarm ........................ 8-14
oxidation ..................................................... 2-5
P
packaging ................................................... 5-1
paddle......................................................... 4-5
PECVD ....................................................... 2-6
plasma enhanced chemical vapor deposition .. 2-6
POCl3 ....................................................... 3-10
port ............................................................. 4-3
power supply unit...................................... 4-15
precipitation container ............................ 10-15
preventive maintenance interval............... 10-5
every eight weeks .............................. 10-25
semi-annual ....................................... 10-27
monthly .............................................. 10-22
process dependant ............................ 10-42
daily...................................................... 10-7
every four years ................................. 10-41
quarterly ............................................. 10-26
weekly .................................................. 10-8
every two weeks ................................ 10-14
process boat .................................2-3, 4-3, 4-5
process capability ....................................... 8-7
process overview........................................ 2-5
process sequence
diffusion................................................ 4-23
LPCVD ................................................. 4-24
oxidation............................................... 4-23
PECVD................................................. 4-24
annealing ............................................. 4-23
process tube status .................................... 8-8
process tube ........................................ 2-4, 8-7
process ..................................................... 4-23
pushbutton................................................ 4-18

E1200 HT 260-3
Index
23.04.07
00401010_41087
R
recipe ..............................................8-16, 8-18
recipe name ................................................ 8-7
recipe organization.................................... 8-16
risk assessment .......................................... 2-7
running time meter .................................... 4-15
S
safety concept............................................. 2-6
safety device ...............................................3-2
safety labeling ........................................... 3-12
signal lamp................................................ 4-16
silane......................................................... 3-10
simulation mode.......................................... 8-4
slider ...........................................................4-4
soft landing system ..................................... 4-5
spare parts ................................................11-1
spherical sleeve ...................................... 10-15
stack gas supply system ........................... 4-13
state of the tubes ........................................ 8-7
storage place .............................................. 7-6
storage ........................................................ 4-4
storage ........................................................ 5-3
symbols....................................................... 1-2
synthesis steam generator ........................ 4-13
system mode............................................... 8-4
system name............................................... 8-2
system ON ................................................4-18
system status .................. 8-3, 8-16, 8-17, 8-18
system status .............................................. 8-6
T
TAB key ....................................................8-18
temperature control..................................... 4-7
temperature monitoring............................... 3-4
TEOS cabinet............................................ 4-11
TEOS ........................................................3-10
thermocouples ............................................ 2-3
time ............................................................. 8-2
title bar ...............................................4-20, 8-2
toxic gas exhaust (TGA) ............................. 3-3
toxic gas exhaust ...................................... 4-16
trained workers ....................................1-4, 8-1
transformer box......................................... 4-16
transport box storage .................................. 4-3
transport carrier........................................... 4-3
transport...................................................... 5-1
tube closure ................................................ 4-8
tube door..................................................... 4-5
U
USB socket ............................................... 4-18
user interface..................................... 4-18, 8-1
user login .................................................... 8-9
user............................................................. 8-3
V
vacuum system......................................... 4-15
W
wafer........................................................... 2-3
wafer-transfer-system................................. 4-3
wearing parts ............................................ 11-1
WHS ........................................................... 4-3
workstation ................................................. 3-6
WTS............................................................ 4-3

E1200 HT 260-3
Index
23.04.07
00401010_41087

E1200 HT 260-3
List of Figures
23.04.07
00401010_41087
List of Figures
Figure 3-1: Main Power Switch............................................................................................................. 3-3
Figure 3-2: Workstations for Operation and Preventive Maintenance.................................................. 3-6
Figure 3-3: Safety Labeling, View 1.................................................................................................... 3-12
Figure 3-4: Safety Labeling, View 2.................................................................................................... 3-13
Figure 3-5: Safety Labeling, View 3.................................................................................................... 3-14
Figure 4-1: Schematic Total View......................................................................................................... 4-1
Figure 4-2: Loading Station Example CVD System.............................................................................. 4-2
Figure 4-3: Loading Trolley for CVD Processes ................................................................................... 4-4
Figure 4-4: Schematic Heating Cassette without Water Cooled Jacket ............................................... 4-6
Figure 4-5: Schematic Heating Cassette with Water Cooled Jacket .................................................... 4-7
Figure 4-6: Water Cooling with Stack Heat Exchanger ........................................................................ 4-9
Figure 4-7: Air Cooling ........................................................................................................................ 4-10
Figure 4-8: TEOS Cabinet .................................................................................................................. 4-11
Figure 4-9: Components of the TEOS Cabinet................................................................................... 4-12
Figure 4-10: Buttons on the Touchscreen ............................................................................................ 4-19
Figure 4-11: Basic User Interface Layout ............................................................................................. 4-20
Figure 8-1: Basic User Interface Layout ............................................................................................... 8-1
Figure 8-2: Title Fields in the Title Bar.................................................................................................. 8-2
Figure 8-3: Information Field Buttons on the Navigation Bar................................................................ 8-5
Figure 8-4: Example Display: "Jobs" Information Field......................................................................... 8-6
Figure 8-5: Status of Process Tubes and Recipes ............................................................................... 8-7
Figure 8-6: Buttons for Process Capability ........................................................................................... 8-7
Figure 8-7: "User Login" Dialog Box ..................................................................................................... 8-9
Figure 8-8: Blocking a Process Tube.................................................................................................. 8-12
Figure 8-9: Releasing a Process Tube ............................................................................................... 8-12
Figure 8-10: Alarm List.......................................................................................................................... 8-13
Figure 8-11: Example CESAR Control Computer User Interface......................................................... 8-16
Figure 8-12: Example Status and Function Key Bar ............................................................................ 8-17
Figure 10-1: Overview of the Condensate Line .................................................................................. 10-16
Figure 10-2: Connections of the Precipitation Container and the Exhaust Lance.............................. 10-17
Figure 10-3: Connection between Condensation Bottle and Precipitation Container ........................ 10-18
Figure 10-4: Exhaust Lance and Precipitation Container Support ..................................................... 10-19
Figure 10-5: Back flange with HF lances ............................................................................................ 10-38

E1200 HT 260-3
List of Figures
23.04.07
00401010_41087

E1200 HT 260-3
List of Tables
23.04.07
00401010_41087
List of Tables
Table 3-1: Safety Devices.................................................................................................................... 3-5
Table 4-1: Display of Signal Lamp and Horn..................................................................................... 4-17
Table 8-1: System Status Display ....................................................................................................... 8-3
Table8-2: Function of the Login/Logout-Button .................................................................................. 8-3
Table 8-3: Function of the Command Bar ........................................................................................... 8-4
Table 8-4: Description of Job List ........................................................................................................ 8-6
Table 8-5: Status of Process Tubes .................................................................................................... 8-8
Table 8-6: Function of the Login/Logout-Button .................................................................................. 8-9

E1200 HT 260-3
List of Tables
23.04.07
00401010_41087