Keithley 4200-SCS User manual

User Manual
4200-900-01 Rev. K / February 2017
*P4200-900-01K*
4200-900-01K
www.tek.com/keithley
Model 4200-SCS
Semiconductor Characterization System

Model 4200-SCS
Semiconductor Characterization System
User’s Manual
KTE Interactive Version 9.1SP2
©2000-2017, Keithley Instruments
All rights reserved.
Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in
part, without the prior written approval of Keithley Instruments. is strictly prohibited.
All Keithley Instruments product names are trademarks or registered trademarks of Keithley
Instruments. Other brand names are trademarks or registered trademarks of their respective
holders.
4200-900-01 Rev. K / February 2017
Document Number:

Safety Precautions
The following safety precautions should be observed before using this product and any associated instrumentation. Although some
instruments and accessories would normally be used with non-hazardous voltages, there are situations where hazardous conditions may
be present.
This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required
to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the product. Refer
to the user documentation for complete product specifications.
If the product is used in a manner not specified, the protection provided by the product warranty may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the equipment is
operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the instrument.
They must be protected from electric shock and contact with hazardous live circuits.
Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line voltage or
replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures explicitly state if the
operator may perform them. Otherwise, they should be performed only by service personnel.
Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained service
personnel may perform installation and service procedures.
Keithley Instruments products are designed for use with electrical signals that are rated Measurement Category I and Measurement
Category II, as described in the International Electrotechnical Commission (IEC) Standard IEC 60664. Most measurement, control, and
data I/O signals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with high transient
over-voltages. Measurement Category II connections require protection for high transient over-voltages often associated with local AC
mains connections. Assume all measurement, control, and data I/O connections are for connection to Category I sources unless otherwise
marked or described in the user documentation.
Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test fixtures. The
American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30V RMS, 42.4V peak,
or 60VDC are present. A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring.
Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators are
prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential human contact.
Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If the circuit is capable of
operating at or above 1000V, no conductive part of the circuit may be exposed.
Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited sources. NEVER
connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current
and voltage to the card.
Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the connecting
cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.
When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input power
disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under test.
ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting cables or jumpers,
installing or removing switching cards, or making internal changes, such as installing or removing jumpers.
Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth) ground. Always
make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the voltage being measured.

The instrument and accessories must be used in accordance with its specifications and operating instructions, or the safety of the
equipment may be impaired.
Do not exceed the maximum signal levels of the instruments and accessories, as defined in the specifications and operating information,
and as shown on the instrument or test fixture panels, or switching card.
When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard.
Chassis connections must only be used as shield connections for measuring circuits, NOT as safety earth ground connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use of a lid
interlock.
If a screw is present, connect it to safety earth ground using the wire recommended in the user documentation.
The symbol on an instrument means caution, risk of danger. The user should refer to the operating instructions located in the user
documentation in all cases where the symbol is marked on the instrument.
The symbol on an instrument means caution, risk of danger. Use standard safety precautions to avoid personal contact with these
voltages.
The symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.
The symbol indicates a connection terminal to the equipment frame.
If this symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be properly
disposed of according to federal, state, and local laws.
The WARNING heading in the user documentation explains dangers that might result in personal injury or death. Always read the
associated information very carefully before performing the indicated procedure.
The CAUTION heading in the user documentation explains hazards that could damage the instrument. Such damage may invalidate the
warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and all test cables.
To maintain protection from electric shock and fire, replacement components in mains circuits - including the power transformer, test leads,
and input jacks - must be purchased from Keithley Instruments. Standard fuses with applicable national safety approvals may be used if
the rating and type are the same. Other components that are not safety-related may be purchased from other suppliers as long as they
are equivalent to the original component (note that selected parts should be purchased only through Keithley Instruments to maintain
accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley Instruments
office for information.
To clean an instrument, use a damp cloth or mild, water-based cleaner. Clean the exterior of the instrument only. Do not apply cleaner
directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with no case or chassis
(e.g., a data acquisition board for installation into a computer) should never require cleaning if handled according to instructions. If the
board becomes contaminated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.
!

Model 4200-SCS User’s Manual Table of Contents
4200-900-01 Rev. K / February 2017 i
Section Topic Page
1 Getting Started............................................................................................ 1-1
Installation and system connections ............................................................... 1-3
Unpacking the Model 4200-SCS .............................................................. 1-3
Shipment contents .................................................................................... 1-3
Environmental considerations................................................................... 1-4
Powering up the 4200-SCS ...................................................................... 1-5
System connections.................................................................................. 1-6
Model 4200-SCS Hardware Overview .......................................................... 1-10
DC source-measure unit (SMU) ............................................................. 1-10
DC preamp ............................................................................................. 1-14
Multi-frequency capacitance / voltage unit (CVU) ......................................... 1-16
Model 4210-CVU card ............................................................................ 1-16
Force-measure timing............................................................................. 1-20
Pulse cards ................................................................................................... 1-20
About the pulse cards............................................................................. 1-21
Firmware upgrade for the 4200-PG2 ...................................................... 1-22
Standard pulse........................................................................................ 1-22
Segment ARB waveform ........................................................................ 1-23
Remote bias tee (RBT) and 3-port power divider ................................... 1-26
SCP2 (Oscilloscope)............................................................................... 1-28
Ground unit (GNDU) ............................................................................... 1-32
Basic circuit configurations ..................................................................... 1-32
Ground unit terminals and connectors.................................................... 1-34
Connecting DUTs .......................................................................................... 1-36
Test fixtures............................................................................................. 1-36
Probers ................................................................................................... 1-37
Advanced connections............................................................................ 1-37
How to run a basic test.................................................................................. 1-38
Boot the system and log in ..................................................................... 1-38
Open KITE.............................................................................................. 1-38
Locate and run the vds-id test module.................................................... 1-40
Test definition.......................................................................................... 1-41
Run vds-id test........................................................................................ 1-42
View and save the sheet data................................................................. 1-42
View and save the graph data ................................................................1-43
Firmware upgrade ......................................................................................... 1-45
Accessing the release notes ......................................................................... 1-46
2 Model 4200-SCS Software Environment .............................................. 2-1
Understanding KITE........................................................................................ 2-3
KITE project structure ..................................................................................... 2-3
KITE interface........................................................................................... 2-3
Project navigator....................................................................................... 2-5
Project defined.......................................................................................... 2-7
Project components .................................................................................. 2-7
ITMs versus UTMs .......................................................................................... 2-8
Defining an ITM ........................................................................................ 2-9
Defining a UTM....................................................................................... 2-10
Using the UTM GUI view ........................................................................ 2-11
How to create your own ITMs ....................................................................... 2-13
Understanding the ITM definition tab...................................................... 2-13
Understanding the ITM forcing functions ................................................ 2-13
Understanding dual sweep ..................................................................... 2-15
Understanding pulse mode..................................................................... 2-16
How to use the definition tab to configure ITM parameters .................... 2-17
Basic test execution ...................................................................................... 2-21
Table of Contents

Table of Contents Model 4200-SCS User’s Manual
ii 4200-900-01 Rev. K / February 2017
Project navigator check boxes................................................................2-21
Executing an individual test .................................................................... 2-23
How to display and manage test results ....................................................... 2-24
Data file management............................................................................. 2-24
How to manage numeric test results in Sheet tab .................................. 2-32
How to manage graphical test results in the Graph tab.......................... 2-38
KITE library management ............................................................................. 2-45
Submitting devices, ITMs, and UTMs to libraries ................................... 2-45
Submitting tests to a library .................................................................... 2-48
3 Common Device Characterization Tests .............................................. 3-1
How to perform an I-V test on my device ........................................................ 3-4
Default project overview ........................................................................... 3-4
How to perform a C-V test on my device ...................................................... 3-13
KITE ITM configuration........................................................................... 3-13
Definition tab........................................................................................... 3-13
Forcing functions and measure options.................................................. 3-16
Selecting the forcing function ................................................................. 3-16
CVU ITM examples ................................................................................ 3-21
CVU Voltage Sweep ............................................................................... 3-22
CVU Voltage List Sweep......................................................................... 3-23
CVU Frequency Sweep (bias) ................................................................3-24
CVU Frequency Sweep (step)................................................................3-26
How to perform a Pulsed I-V test on my device ............................................ 3-27
Introduction (PIV-A and PIV-Q)............................................................... 3-27
Pulse IV for CMOS: 4200-PIV-A............................................................. 3-29
4200-PIV-A test connections .................................................................. 3-30
Using the PulseIV-Complete project for the first time ............................. 3-38
Pulse IV UTM descriptions ..................................................................... 3-49
cal_pulseiv.............................................................................................. 3-50
vdsid_pulseiv .......................................................................................... 3-51
VdId_Pulse_DC_Family_pulseiv ............................................................ 3-53
vgsid_pulseiv .......................................................................................... 3-57
VgId_DC_Pulse_pulseiv......................................................................... 3-59
scopeshot_cal_pulseiv ........................................................................... 3-63
scopeshot_pulseiv .................................................................................. 3-64
vdsid_pulseiv_demo ............................................................................... 3-66
vgsid_pulseiv_demo ............................................................................... 3-66
scopeshot_pulseiv_demo ....................................................................... 3-66
How to perform a Quiescent-point Pulsed I-V test (PIV-Q) on my device..... 3-66
Q-Point Pulse IV – Model 4200-PIV-Q ................................................... 3-66
What is the PIV-Q package..................................................................... 3-67
How to perform reliability (stress-measure) tests on my device.................... 3-68
Connecting devices for stress / measure cycling.................................... 3-68
Overview of the cycling-related tabs....................................................... 3-69
Configuring subsite cycling ..................................................................... 3-69
Configuring device stress properties ...................................................... 3-74
How to perform AC stress for wafer level reliability (WLR) ........................... 3-78
Segment Stress / Measure Mode ........................................................... 3-85
Segment ARB stressing ......................................................................... 3-86
Segment Stress / Measure Mode configuration...................................... 3-87
Executing subsite cycling ....................................................................... 3-91
Subsite cycling data sheets .................................................................... 3-91
Subsite cycling graphs............................................................................ 3-96
Configuration sequence for subsite cycling ............................................ 3-98
How to perform a flash memory test on my device..................................... 3-100
Introduction........................................................................................... 3-100
Theory of operation .............................................................................. 3-100
Flash connections................................................................................. 3-115
Direct connection to single DUT ........................................................... 3-120
Direct connection to array DUT for disturb testing................................ 3-121
Switch matrix connection to array DUT ................................................ 3-122
Memory projects ................................................................................... 3-124
NVM_examples .................................................................................... 3-126
Flash-NAND tests ................................................................................. 3-126

Model 4200-SCS User’s Manual Table of Contents
4200-900-01 Rev. K / February 2017 iii
Flash-NOR tests ................................................................................... 3-130
Flash-switch tests ................................................................................. 3-130
Running any Flash Project for the first time.......................................... 3-133
Running the Flash-NAND, Flash-NOR or Flash-Switch Project ........... 3-133
Running the Program or Erase UTM .................................................... 3-134
Running the Fast-Program-Erase UTM................................................ 3-136
Running the SetupDC UTM .................................................................. 3-137
Running the Vt-MaxGm ITM ................................................................. 3-137
Running the ConPin-Pulse or ConPin-DC UTM (Switch projects only)3-138
FlashEndurance-NAND tests................................................................3-139
Running a FlashEndurance or FlashDisturb project ............................. 3-146
Running endurance or disturb looping.................................................. 3-148
FlashDisturb tests ................................................................................. 3-149
Explanation of flash UTM parameters .................................................. 3-151
Error codes ........................................................................................... 3-153
Troubleshooting .................................................................................... 3-154
How to perform Charge Pumping................................................................3-155
How to perform a Charge Trapping test...................................................... 3-156
Slow single pulse charge trapping high K gate stack ........................... 3-156
Charge trapping procedure................................................................... 3-157
4 How to Control Other Instruments with the Model 4200-SCS......... 4-1
How to control external equipment.................................................................. 4-2
Controlling external equipment overview.................................................. 4-2
Keithley Configuration Utility (KCON) ............................................................. 4-5
How to control a switch matrix ........................................................................ 4-7
KCON setup.............................................................................................. 4-9
Open KITE and the ivswitch project........................................................ 4-11
Running test sequences ......................................................................... 4-12
The connect test ..................................................................................... 4-14
How to control a probe station ...................................................................... 4-15
Prober control overview.......................................................................... 4-16
Test system connections......................................................................... 4-18
KCON setup............................................................................................ 4-19
Probe station configuration ..................................................................... 4-21
Open the probesubsites project.............................................................. 4-21
Open the project plan window ................................................................4-22
Test descriptions ..................................................................................... 4-22
Running the test sequence ..................................................................... 4-25
Test data ................................................................................................. 4-26
Running individual plans or tests ............................................................ 4-27
How to control an external pulse generator .................................................. 4-27
Test system connections......................................................................... 4-28
KCON setup............................................................................................ 4-28
Open the ivpgswitch project.................................................................... 4-31
Description of tests ................................................................................. 4-32
First id-vg test ......................................................................................... 4-32
pgu-trigger test........................................................................................ 4-34
Compare the test results......................................................................... 4-35
How to control an external CV analyzer........................................................ 4-37
Connections............................................................................................ 4-38
KCON setup............................................................................................ 4-38
Create a new project............................................................................... 4-39
Add a subsite plan .................................................................................. 4-40
Add a device plan ................................................................................... 4-41
Add a UTM.............................................................................................. 4-42
Modifying the cvsweep UTM................................................................... 4-43
Executing the test ................................................................................... 4-43
What if my equipment is not listed in KCON ................................................. 4-44
5 How to Generate Basic Pulses ............................................................... 5-1
KPulse: Getting started............................................................................. 5-2
Triggering.................................................................................................. 5-3
Standard pulse waveforms ....................................................................... 5-4
Segment ARB waveforms......................................................................... 5-6

Table of Contents Model 4200-SCS User’s Manual
iv 4200-900-01 Rev. K / February 2017
Custom file arb waveforms (full-arb)......................................................... 5-8
Index .............................................................................................................................. I-1

4200-900-01 Rev. K / February 2017 Return to Section Topics 1-1
Model 4200-SCS User’s Manual Section 1: Getting Started
In this section:
Installation and system connections . . . . . . . . . . . . . . . . 1-3
Unpacking the Model 4200-SCS . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Inspection for damage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Shipment contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Manuals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Repacking for shipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Environmental considerations . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
Shipping and storage environment . . . . . . . . . . . . . . . . . . . .1-4
Operating environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
Powering up the 4200-SCS . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
Line power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
Line power connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
Line frequency setting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
Warm-up period . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
System connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
Connecting the keyboard and mouse . . . . . . . . . . . . . . . . . . .1-7
Connecting GPIB instruments . . . . . . . . . . . . . . . . . . . . . . . . .1-8
Connecting a probe station . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9
Connecting a printer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10
Connecting a LAN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10
Model 4200-SCS Hardware Overview . . . . . . . . . . . . . . . . 1-11
DC source-measure unit (SMU) . . . . . . . . . . . . . . . . . . . . . . . . .1-13
Models 4200-SMU and 4210-SMU overview . . . . . . . . . . . . . .1-13
Basic characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-13
Basic SMU circuit configuration . . . . . . . . . . . . . . . . . . . . . . .1-14
SMU terminals and connectors . . . . . . . . . . . . . . . . . . . . . . . .1-16
SMU with Model 4200-PA overview . . . . . . . . . . . . . . . . . . . . .1-17
Basic characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-17
Basic SMU/preamp circuit configuration . . . . . . . . . . . . . . . .1-18
DC preamp . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-19
PreAmp terminals and connectors . . . . . . . . . . . . . . . . . . . . .1-19
FORCE terminal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-20
SENSE terminal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-21
PreAmp CONTROL connector . . . . . . . . . . . . . . . . . . . . . . . . .1-21
Multi-frequency capacitance / voltage unit (CVU) . . . . . . . 1-21
Model 4210-CVU card . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-21
Measurement overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-21
Measurement functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-22
Test signal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-23
DC bias function and sweep characteristics . . . . . . . . . . . . .1-23
Force-measure timing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-24
Bias function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-24
Sweep function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-25
Pulse cards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-25
About the pulse cards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-26
Firmware upgrade for the Model 4200-PG2 . . . . . . . . . . . . . . . .1-27
Topic Page
Section 1
Getting Started

1-2 Return to Section Topics 4200-900-01 Rev. K / February 2017
Section 1: Getting Started Model 4200-SCS User’s Manual
Standard pulse . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-27
Segment ARB waveform . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-27
Full arb . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-29
Pulse card settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-30
Remote bias tee (RBT) and 3-port power divider . . . . . . . . . . 1-30
RBT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-30
3-port power divider . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-31
Using an RBT and power divider . . . . . . . . . . . . . . . . . . . . . . 1-31
SCP2 (Oscilloscope) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-32
Digital storage oscilloscope card . . . . . . . . . . . . . . . . . . . . . 1-32
Scope card settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-33
Ground unit (GNDU) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-36
Basic characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-36
Basic circuit configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-37
Ground unit connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-37
Ground unit DUT connections . . . . . . . . . . . . . . . . . . . . . . . . 1-38
Ground unit terminals and connectors . . . . . . . . . . . . . . . . . . 1-39
FORCE terminal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-39
SENSE terminal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-39
COMMON terminal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-40
Chassis ground . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-40
Connecting DUTs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-40
Test fixtures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-40
Testing with less than ±20 V . . . . . . . . . . . . . . . . . . . . . . . . . . 1-41
Testing with more than ±20 V . . . . . . . . . . . . . . . . . . . . . . . . . 1-41
Probers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-42
Advanced connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-42
How to run a basic test . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-42
Boot the system and log in . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-42
Open KITE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-43
Locate and run the vds-id test module . . . . . . . . . . . . . . . . . . . 1-44
Test definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-45
Run vds-id test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-46
View and save the sheet data . . . . . . . . . . . . . . . . . . . . . . . . . . 1-46
View and save the graph data . . . . . . . . . . . . . . . . . . . . . . . . . . 1-47
Firmware upgrade . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-49
Accessing the release notes . . . . . . . . . . . . . . . . . . . . . . . . 1-50

4200-900-01 Rev. K / February 2017 Return to Section Topics 1-3
Model 4200-SCS User’s Manual Section 1: Getting Started
Section 1
Getting Started
Installation and system connections
Unpacking the Model 4200-SCS
Inspection for damage
After unpacking the Keithley Instruments Model 4200 Semiconductor Characterization System
(SCS), carefully inspect the unit for any shipping damage. Report any damage to the shipping
agent, because such damage is not covered by the warranty.
Shipment contents
The following items are included with the 4200-SCS:
• 4200-SCS with any ordered source-measure units (SMUs) factory-installed.
• Ordered 4200-PA modules factory-installed.
• Ordered 4220-PGU pulse generator cards factory-installed.
• Ordered 4225-PMU pulse/measure cards factory-installed.
• Ordered 4225-RPM remote pulse (and switch) modules.
• Ordered pulse application packages.
• Cables, connectors, adapters and other accessories that are supplied with the pulse
generator, scope, and pulse application packages.
• Line cord.
• Miniature triaxial cables, two per 4200-SMU or 4210-SMU, 2 m (6 ft). These are not
included when the SMU is ordered with with a 4200-PA.
• Triaxial cables, two per 4200-PA, 2 m (6 ft).
• Interlock cable.
• Keyboard with integrated pointing device.
• System software and manuals on CD-ROM.
•Microsoft
® Windows®.
• Ordered 4200-Compiler factory-installed.
Manuals
All 4200 manuals are provided on a CD-ROM and are preinstalled on the hard drive. Because the
manuals are provided in PDF format, they can be printed from any computer that is connected to a
printer by using Adobe® Reader®.
Repacking for shipment
Should it become necessary to return the 4200-SCS for repair, carefully pack the entire unit in its
original packing carton or the equivalent, and follow these instructions:
• Call Keithley Instruments’ repair department at 1-800-935-5595 for a Return Material
Authorization (RMA) number.
• Let the repair department know the warranty status of the 4200-SCS.
• Write ATTENTION REPAIR DEPARTMENT and the RMA number on the shipping label.

1-4 Return to Section Topics 4200-900-01 Rev. K / February 2017
Section 1: Getting Started Model 4200-SCS User’s Manual
Environmental considerations
Shipping and storage environment
To avoid possible damage or deterioration, the 4200-SCS should be shipped and stored within the
following environmental limits:
• Temperature: -10 °C to +60 °C
• Relative humidity: 5 % to 90 %, non-condensing
Operating environment
Temperature and humidity
The 4200-SCS should be operated within the following environmental limits:
• Temperature: +15 °C to +40 °C
• Relative humidity: 5 % to 80 %, non-condensing
NOTE SMU and preamp accuracy specifications are based on operation at 23 °C ±5 °C and
between 5 % and 60 % relative humidity. See the product specifications for additional
temperature and humidity derating factors outside these ranges.
Proper ventilation
To avoid overheating, the 4200-SCS should be operated in an area with proper ventilation. Allow
at least eight inches of clearance at the back of the mainframe to assure sufficient airflow.
CAUTION To prevent damaging temperatures and other harmful environmental
conditions that could degrade specified performance, follow these
precautions:
•Keep the venting holes and fan free of dust, dirt, and contaminants, so that
the unit’s ability to dissipate heat is not impaired.
•Keep the fan vents and cooling vents from becoming blocked.
•Do not position any devices that force air (heated or unheated) adjacent to
the unit into cooling vents. This additional airflow could compromise
accuracy performance.
•When rack mounting the unit, make sure there is adequate airflow around
the sides, bottom, and back to ensure proper cooling.
•Rack mounting high-power dissipation equipment adjacent to the Model
4200-SCS could cause excessive heating to occur.
•To ensure proper cooling in rack situations with convection cooling only,
place the hottest equipment (the, power supply) at the top of the rack.
Precision equipment, such as the 4200-SCS, should be placed as low as
possible in the rack where temperatures are the coolest.
•Add spacer panels below the unit will help ensure adequate airflow.

4200-900-01 Rev. K / February 2017 Return to Section Topics 1-5
Model 4200-SCS User’s Manual Section 1: Getting Started
CAUTION A large system (for example, multiple SMUs, multiple pulse generators,
and a scope) draws more power than a small system, causing the internal
power supply to generate more heat. Because of this, it is imperative that
systems of any size have proper ventilation. Even a small system with
inadequate ventilation can be damaged by excess heat.
Cleanliness
To avoid internal dirt buildup that could degrade performance and affect longevity, the
4200-SCS should be operated in a clean, dust-free environment.
Powering up the 4200-SCS
The following information covers power requirements for the 4200-SCS power connections,
power-up characteristics, and warm-up requirements.
Line power
The 4200-SCS operates from a line voltage in the range of 100 V to 240 V at a frequency of 50 Hz
or 60 Hz. Line voltage is automatically sensed, but line frequency is not (For more information see
the Reference Manual, Line frequency setting, page 2-16. Check to ensure the operating voltage
in your area is compatible.
CAUTION Operating the instrument on an incorrect line voltage may cause damage,
possibly voiding the warranty.
NOTE To avoid possible problems caused by electrical transients or line voltage
fluctuations, the 4200-SCS should be operated from a dedicated power source.
Line power connection
To connect the unit to line power and turn it on:
1. Before plugging in the power cord, make sure the front panel power switch is in the off
position.
2. Connect the female end of the supplied power cord to the AC receptacle on the rear panel
(see Figure 1-1).
WARNING The large diameter line cord (supplied) must be used to power the 4200-SCS.
Do not use a different line cord. Using a different line cord may result in
personal injury or death due to electric shock.
3. Connect the other end of the supplied line cord to a grounded AC line power receptacle.

1-6 Return to Section Topics 4200-900-01 Rev. K / February 2017
Section 1: Getting Started Model 4200-SCS User’s Manual
WARNING The power cord supplied with the unit contains a separate ground for use with
grounded outlets. When proper connections are made, the instrument chassis
is connected to power line ground through the ground wire in the power cord.
Failure to use a grounded outlet may result in personal injury or death due to
electric shock.
Figure 1-1
Line power receptacle and line fuses location
Line frequency setting
The 4200-SCS can be operated either from 50 Hz or 60 Hz power line sources, but it does not
automatically sense the power line frequency when it is powered up. You can change the line
frequency setting using the KCON utility. See the Reference Manual, Keithley CONfiguration Utility
(KCON), page 7-1 for details.
NOTE Operating the 4200-SCS with the wrong line frequency setting may result in noisy
readings because the line frequency setting affects SMU line frequency noise
rejection.
Warm-up period
The 4200-SCS can be used immediately after being turned on. However, the unit should be
allowed to warm up for at least 30 minutes to achieve rated measurement accuracy.
System connections
Connecting the keyboard and mouse
The keyboard is connected to the 4200-SCS with a USB, and can be plugged into any of the four
USB ports (two in front and two in back; see Figure 1-3). The keyboard is shown in
Figure 1-2. To ensure proper operation, make sure the keyboard is connected to one of the four
USB ports prior to power up. Figure 1-3 shows the keyboard connections to the rear panel of the
4200-SCS.
Power
Receptacle
Line
Fuses
(2)

4200-900-01 Rev. K / February 2017 Return to Section Topics 1-7
Model 4200-SCS User’s Manual Section 1: Getting Started
Figure 1-2
Model 4200-SCS keyboard
To use an optional mouse, connect a USB mouse into any of the four 4200-SCS USB ports.
Figure 1-3
Keyboard connections
Connecting GPIB instruments
The 4200-SCS can control one or more external instruments by way of the IEEE-488 General
Purpose Instrument Bus (GPIB). Instruments typically used in a test system with the 4200-SCS
include a switch matrix and a C-V meter. Figure 1-4 shows how to connect GPIB instruments to
the 4200-SCS.

1-8 Return to Section Topics 4200-900-01 Rev. K / February 2017
Section 1: Getting Started Model 4200-SCS User’s Manual
Figure 1-4
GPIB instrument connections
Connecting a probe station
A probe station can be controlled through the RS-232 interface connected to the 4200-SCS, as
shown in Figure 1-5.
Figure 1-5
Probe station connections
GPIB Connector
GPIB Instrument GPIB Instrument
7007
GPIB Cable
7007 GPIB Cable
Model 4200-SCS
INSTRUMENT
CONNECTIONS
SMU ONLY
SMU AND GNDU
GNDU
COM 1
LPT 1
S
E
N
S
E
F
O
R
C
E
C
O
M
M
O
N
SENSE LO
GUARD
SENSE LO
COMMON
COMMON
FORCE
SENSE
GUARD
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
4200
TM
INTLK
IN
OUT
KEITHLEY
Channel 2
Channel 1
Trgger
Out
Channel 1
Channel 2
Ext
Trg
Ext
Clk
PG2 SCP2HR
Tr gger
In
CVU
HCUR
LPOT
HPOT
LCUR
KEITHLEY
INSTRUMENTS
SLOT
8
SLOT
7
SLOT
6
SLOT
5
SLOT
4
SLOT
3
SLOT
2
SLOT
1
4200
KEITHLEY
4200
KEITHLEY
4210
KEITHLEY
4210
KEITHLEY
KEITHLEY
KEITHLEY
4205 4200 4200
KEITHLEY
28775 AURORA RD.
CLEVELAND, OH 44139
MADE N
USA
Probe Station
Shielded Serial Cable RS-232 Connector
RS-232 Connector
INSTRUMENT
CONNECTIONS
SMU ONLY
SMU AND GNDU
GNDU
COM 1
LPT 1
S
E
N
S
E
F
O
R
C
E
C
O
M
M
O
N
SENSE LO
GUARD
SENSE LO
COMMON
COMMON
FORCE
SENSE
GUARD
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
4200
TM
INTLK
IN
OUT
KEITHLEY
Channel 2
Channel 1
Tr gger
Out
Channel 1
Channel 2
Ext
Trg
Ext
Clk
PG2 SCP2HR
Tr gger
In
CVU
HCUR
LPOT
HPOT
LCUR
KEITHLEY
INSTRUMENTS
SLOT
8
SLOT
7
SLOT
6
SLOT
5
SLOT
4
SLOT
3
SLOT
2
SLOT
1
4200
KEITHLEY
4200
KEITHLEY
4210
KEITHLEY
4210
KEITHLEY
KEITHLEY
KEITHLEY
4205 4200 4200
KEITHLEY
28775 AURORA RD.
CLEVELAND, OH 44139
MADE N
USA
Model 4200-SCS

4200-900-01 Rev. K / February 2017 Return to Section Topics 1-9
Model 4200-SCS User’s Manual Section 1: Getting Started
Connecting a printer
As shown in Figure 1-6, you can connect a printer to one of the v2.0 USB connectors.
Figure 1-6
Printer connections
Connecting a LAN
The two LAN connectors on the 4200-SCS are standard RJ-45 connectors intended for use with
unshielded twisted pair (UTP) cable. For best results, use only CAT 5 UTP cables equipped with
RJ-45 connectors to connect your LANs, as shown in Figure 1-7. If IP addresses are statically
assigned, a different IP address will be needed for each of the two LAN ports.
Figure 1-7
LAN connections
LA Junction
Box or Hub
CAT 5 UTP Cable
LA Connectors
Model 4200-SCS
INSTRUMENT
CONNECTIONS
SMU ONLY
SMU AND GNDU
GNDU
COM 1
LPT 1
S
E
N
S
E
F
O
R
C
E
C
O
M
M
O
N
SENSE LO
GUARD
SENSE LO
COMMON
COMMON
FORCE
SENSE
GUARD
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
4200
TM
INTLK
IN
OUT
KEITHLEY
Channel 2
Channel 1
Tr gger
Out
Channel 1
Channel 2
Ext
Trg
Ext
Clk
PG2 SCP2HR
Tr gger
In
CVU
HCUR
LPOT
HPOT
LCUR
KEITHLEY
INSTRUMENTS
SLOT
8
SLOT
7
SLOT
6
SLOT
5
SLOT
4
SLOT
3
SLOT
2
SLOT
1
4200
KEITHLEY
4200
KEITHLEY
4210
KEITHLEY
4210
KEITHLEY
KEITHLEY KEITHLEY
4205 4200 4200
KEITHLEY
28775 AURORA RD.
CLEVELAND, OH 44139
MADE N
USA

1-10 Return to Section Topics 4200-900-01 Rev. K / February 2017
Section 1: Getting Started Model 4200-SCS User’s Manual
Model 4200-SCS Hardware Overview
DC source-measure unit (SMU)
This section provides detailed information about several 4200-SCS hardware components, and is
arranged as follows:
•Models 4200-SMU and 4210-SMU overview: Discusses 4200-SMU and 4210-SMU basic
source and measure characteristics, basic circuit configurations, operating boundaries, and
connectors.
•SMU with Model 4200-PA overview: Describes how the 4200-PA extends 4200-SMU and
4210-SMU dynamic range, and covers source and measure characteristics, basic circuit
configurations, operating boundaries, connectors, and mounting methods.
•Ground unit (GNDU): Provides basic information about using the ground unit, including
basic characteristics and connectors.
Models 4200-SMU and 4210-SMU overview
The following paragraphs discuss the basic characteristics of the 4200-SMU and 4210-SMU.
Basic SMU circuit configuration
The basic SMU circuit configuration is shown in Figure 1-8. The SMU operates as a voltage or
current source (depending on source function) in series with an I-Meter, and connected in parallel
with a V-Meter. The voltage limit (V-limit) and current limit (I-limit) circuits limit the voltage or
current to the programmed compliance value. In this local sensing example, the SMU FORCE
terminal is connected to device-under test (DUT) HI, while the DUT LO is connected to COMMON.
See the Reference Manual, Connections and Configuration, page 4-1, and Reference Manual,
Source-Measure Concepts, page 5-1, for details.