THORLABS EXLUS-HD1 User manual

SPATIAL LIGHT MODULATORS
Applications
Wavefront Correction
Optical Trapping
Beam Steering
Pulse Shaping
Adaptive Optics
Holography
Laser Processing
Lithography
Click to Enlarge
Each Exulus SLM features multiple 8-
32 (M4) taps for post mounting. For a
list of items used in this setup, see the
App Note
tab.
Click to Enlarge
The Exulus SLMs (excluding the high-
power SLMs) are provided with a
magnetic cover; when the SLM is in
use, the cover can be attached to the
designated area on the housing (sides
for the HD1 models and back for the
Features
Liquid Crystal on Silicon (LCoS) with Reflective Coating
Panel Resolutions: 1920 x 1080 or 1920 x 1200
Operating Wavelengths: 400 - 850 nm, 650 - 1100 nm, or
1550 nm
High-Power Models Available for 400 - 850 nm or 650 - 1100 nm Operating Ranges
All-in-One and Separate-Panel Mounting Configurations
Liquid Cooling Module Included on SLM Head
Fill Factor: >90% (Varies by Model)
Independent Horizontal and Vertical SLM Panel Tilt Adjustments (Standard SLM
Models Only)
Trigger Output for Timing Control of Other Devices (All Models Except
EXULUS-HD1)
Fast Frame/Refresh Rates up to 180 Hz (EXULUS-HD1 Only, Using
Frame Boost)
Customizations Available:
Panel and Controller in Separate Units (Standard SLM Models
Only)
Other Retardance Ranges (Contact Tech Support for Details)
Thorlabs' Exulus® Spatial Light Modulators (SLMs) employ Liquid Crystal on
Silicon (LCoS) technology to produce high-resolution, high-speed reflective
phase modulation with individually addressable pixels. This phase control is
OVER VIEW
Reflective 2D Phase Only Spatial Light Modulators (SLMs)
400 - 850 nm, 650 - 1100 nm, or 1550 nm Operating Wavelengths
Available Resolutions: 1920 x 1080 or 1920 x 1200
Highly Stable Phase Control with Minimal Flickering
►
►
►
►
EXULUS-HD3HP
Removable SLM Head,
1920 x 1200 (WUXGA),
650 - 1100 nm
Image Generated by SLM Using Computer-
Generated Hologram Projection. For Details, See
EXULUS-HD1
1920 x 1080 (Full HD),
400 - 850 nm
EXULUS-HD1 - November 22, 2023
Item EXULUS-HD1 was discontinued on November 22, 2023. For informational purposes, this is a copy of
the website content at that time and is valid only for the stated product.

HD2, HD3, and HD4 models).
Video Insight: Calibrate a Spatial Light Modulator (SLM) for Phase Delay
Watch a demonstration of an interferometric method for calibrating the phase delay of reflective SLMs.
Key Specificationsa
Item #
Suffix
Operating
Wavelength
Panel
Resolution
Fill
Factor
Phase / Retardance
Rangeb
Frame
Rate
Output
Trigger
Liquid Cooling
Module
Separable SLM
Panel
HD1 400 - 850 nm 1920 x 1080
(Full HD) >93% 2π at 633 nm (Standard)
4.7π at 532 nm (Extended)
60 Hz or
180 HzcN/A - -
HD2 400 - 850 nm 1920 x 1200
(WUXGA) >92% π or 2π at 633 nmd60 Hz
Yes
(SMA)
- -
HD3 650 - 1100 nm 1920 x 1200
(WUXGA) >92% π or 2π at 1064 nmd60 Hz - -
HD4 1550 nm 1920 x 1200
(WUXGA) >92% π or 2π at 1550 nmd60 Hz - -
HD2HP 400 - 850 nm 1920 x 1200
(WUXGA) >92% π or 2π at 633 nmd,e 60 Hz
HD3HP 650 - 1100 nm 1920 x 1200
(WUXGA) >92% π or 2π at 1064 nmd,e 60 Hz
Complete specifications may be found on the Specs tab.
highly stable with minimal fluctuations and minimal crosstalk with adjacent
pixels. For maximum phase shift values, refer to the
table to the upper right. These spatial light modulators
provide far more pixels than lower-order phase
modulators such as segmented or deformable mirrors.
For applications requiring improved thermal stability
and high-power handling (≤200 W/cm) in the 400 nm to
850 nm or 650 nm to 1100 nm wavelength ranges, high-power SLMs are available.
Exulus spatial light modulators are driven by an input video signal and operate as a general Full HD or WUXGA. They are bundled with a software GUI that
provides complete control over the device. Different driving modes are supported by the software, including full frame, image input, video input, Fresnel lens,
diffraction, and computer-generated holography (CGH). The CGH mode also allows tilting and focusing effects to be overlaid onto a pattern. The GUI enables
quick switching between operating modes, as well as allowing images, videos, and patterns to be uploaded to the panel. For more details on the operating
modes, please see the Software and App Note tabs.
Standard Models
Each standard spatial light modulator (EXULUS-HD1, -HD2, -HD3, and -HD4) includes a built-in SLM panel with independent horizontal and vertical tilt
adjustment of ±3.2°. Locking rings are installed to fix the adjustment settings, as well as provide extra stability. Customized versions are also available with the
panel separated from the control unit; contact Tech Support for details.
These Exulus spatial light modulators have input ports compatible with HDMI* connectors and ship with two corresponding cables: one for connecting to an
HDMI-compatible output, and one for connecting to a DisplayPort*-compatible output. Also included are a mini-USB cable for connecting to a PC, a power supply
with a location-specific power cord and a HKTS-5/64 hex key thumbscrew for adjusting the horizontal and vertical tilt adjusters.
High-Power Models
Each high-power SLM (EXULUS-HD2HP and EXULUS-HD3HP) features a liquid-cooled SLM head and adapter board, which can be mounted directly on the
controller or positioned separately from the main housing. The SLM head includes two preinstalled 1/4" hoses with CPC®† valved quick-connect coupling inserts
for easy connection to a chiller, and the adapter board houses the FPC connectors and a circuit board that connects the controller and SLM head. We
recommend using Thorlabs' LK220 chiller (sold below) for full compatibility with the Thorlabs EXULUS software package.
These high-power spatial light modulators have input ports compatible with HDMI* connectors and ship with two corresponding cables: one for connecting to an
HDMI-compatible output, and one for connecting to a DisplayPort*-compatible output. A mini-USB cable is also included for connecting to a PC. To aid in
connecting to a liquid chiller, two CPC valved quick-connection fittings for both 4.3 mm (0.17") and 6.0 mm (0.24") inner diameter hoses are included with the
unit, as well a 2.5 mm stereo cable for thermistor compatibility. A power supply with a location-specific power cord, a USB drive with the software and manual,
and a BD-2M 2 mm balldriver for removing the adapter board and SLM head from the main unit are also shipped with these Exulus models.
*HDMI is a trademark or registered trademark of HDMI Licensing Administrator, Inc. DisplayPort is a trademark owned by the Video Electronics Standards
Association (VESA) in the United States and other countries. The use of such trademarks by Thorlabs does not constitute or imply any affiliation with or
endorsement or sponsorship by their respective trademark owners.
†CPC® is a registered trademark of Colder Products Company.
a.

Angles of incidence other than 0° will result in phase shifts that differ from the programmed pattern. Angles of up to 10° are possible without significantly
affecting performance.
Frame Boost Mode (referred to as Triple Mode in the software) plays the R, G, and B channels of the video signal in succession, for an overall frame rate
of 180 Hz.
These retardance ranges are achievable by setting the phase stroke mode to half wave or full wave in the software.
HD2HP and HD3HP phase/retardance range values are for 30 °C when used with the LK220 liquid chiller.
Item # EXULUS-HD1(/M)
Panel Resolution 1920 x 1080 (Full HD)
Type Liquid Crystal on Silicon (LCoS) with Reflective Coating
Operating Wavelength 400 - 850 nm
Panel Active Area 12.5 mm x 7.1 mm
Pixel Pitch 6.4 µm
Fill Factor >93%
Reflective Coating Aluminum
Average Reflectance 75% (Typical)
Phase / Retardance Range 2π at 633 nm (Standard Mode); 4.7π at 532 nm (Extended Mode)
Angle of Incidencea0°
Optic Axis 45°
Reflected Wavefront Distortion <λ/7 @ 633 nm
Damage Threshold
CWb5 W/cm (532 nm, Ø0.0107 mm)
Pulsed (ns) 0.63 J/cm2 (532 nm, 8.6 ns, 10 Hz, Ø203 µm)
Pulsed (fs) 0.138 J/cm2 (535 nm, 59.4 fs, 100 Hz, Ø188 µm)
Frame Rate 60 Hz (Standard Mode); 180 Hz (Frame Boost/Triplec)
Fluctuation / Flickering (RMS)d<1% (Standard Mode); <5% (Extended Mode)
Beam Deviation Using Panel Tip / Tilt ±3.2°
Trigger OutputeNone
Trigger Output High Voltage Level N/A
Trigger Output Pulse Width N/A
Dimensions (L x W x H)f172.0 mm x 110.0 mm x 81.6 mm (6.77" x 4.33" x 3.21")
Weight 1.24 kg (2.73 lbs)
Storage Temperature 0 °C to 60 °C (32 °F to 140 °F)
Operating Temperatureg10 °C to 40 °C (50 °F to 104 °F)
PC Connection HDMI-Compatible Connector
USB 2.0 Connector
Bit Depth 8 Bit, 0 - 255 Gray Level
Other angles of incidence will result in phase shifts that differ from the programmed pattern. Angles of
up to 10° are possible without significantly affecting performance.
The power density of your beam should be calculated in terms of W/cm. For an explanation of why the
linear power density provides the best metric for long pulse and CW sources, please see the Damage
Thresholds tab.
Frame Boost Mode (referred to as Triple Mode in the software) plays the R,G, and B channels of the
video signal in succession, for an overall frame rate of 180 Hz.
Fluctuation / Flickering is the phase fluctuation as the percentage of the entire phase range and is
dependent on current phase setting. The value stated is the maximum fluctuation and typically occurs at
half of the phase range.
For more details on the external trigger output, please refer to the product manuals accessible through
the red Docs ( ) icons below.
The reported height dimension includes the maximum travel range of the adjuster knob.
SPECS
c.
b.
d.
e.
a.
b.
c.
d.
e.
f.

Ambient temperature fluctuations may cause the characteristics of your SLM to change. Using it at an
ambient temperature of 25 °C is recommended.
Item # EXULUS-HD2 EXULUS-HD3 EXULUS-HD4
Panel Resolution 1920 x 1200 (WUXGA)
Type Liquid Crystal on Silicon (LCoS) with Reflective Coating
Operating Wavelength 400 - 850 nm 650 - 1100 nm 1550 nm
Panel Active Area 15.42 mm x 9.66 mm
Pixel Pitch 8 µm
Fill Factor >92%
Reflective Coating Aluminum Dielectric
Average Reflectance 80% (Typical) 82% (Typical)
Phase / Retardance Range 2π at 633 nm (Full Wave Mode)
π at 633 nm (Half Wave Mode)
2π at 1064 nm (Full Wave Mode)
π at 1064 nm (Half Wave Mode)
2π at 1550 nm (Full Wave Mode)
π at 1550 nm (Half Wave Mode)
Angle of Incidencea0°
Optic Axis 0°
Reflected Wavefront Distortion <λ/2 @ 633 nm <0.4λ @ 633 nm
Damage Threshold
Pulsed (ns) 0.22 J/cm2
(532 nm, 6.8 ns, 10 Hz, Ø200.5 µm)
0.15 J/cm2
(1064 nm, 10 ns, 100 Hz, Ø235 µm)
0.187 J/cm2
(1550 nm, 6.0 ns, 10 Hz, Ø230.6 µm)
Pulsed (fs) 0.0935 J/cm2
(515 nm, 203.3 fs, 100 Hz, Ø108.2 µm)
0.03 J/cm2
(1030 nm, 200 fs, 100 Hz, Ø135 µm)
0.076 J/cm2
(1550 nm, 55.6 fs, 100 Hz, Ø143.1 µm)
Frame Rate 60 Hz
Fluctuation / Flickering (RMS)b<0.01% <0.05% <0.15%
Beam Deviation Using Panel Tip / Tilt ±3.2°
Trigger OutputcSMA Female
Trigger Output High Voltage Level 5 V (TTL)
Trigger Output Pulse Width 54 µs
Dimensions (L x W x H)d155.9 mm x 104.3 mm x 42.0 mm (6.14" x 4.11" x 1.65")
Weight 0.76 kg (1.68 lbs)
Storage Temperature 0 °C to 60 °C (32 °F to 140 °F)
Operating Temperaturee10 °C to 40 °C (50 °F to 104 °F)
PC Connection HDMI-Compatible Connector
USB 2.0 Connector
Bit Depth 8 Bit, 0 - 255 Gray Level
Other angles of incidence will result in phase shifts that differ from the programmed pattern. Angles of up to 10° are possible without significantly
affecting performance.
Fluctuation / Flickering is the phase fluctuation as the percentage of the entire phase range and is dependent on current phase setting. The value stated
is the maximum fluctuation and typically occurs at half of the phase range.
For more details on the external trigger output, please refer to the product manuals accessible through the red Docs ( ) icons below.
The reported length dimension includes the maximum travel range of the adjuster knob. The specified height does not include the dust cover; when
included, this dimension is nominally 46 mm.
Ambient temperature fluctuations may cause the characteristics of your SLM to change. Using it at an ambient temperature of 25 °C is recommended.
Item # EXULUS-HD2HP EXULUS-HD3HP
Panel Resolution 1920 x 1200 (WUXGA)
Type Liquid Crystal on Silicon (LCoS) with Reflective Coating
Operating Wavelength 400 - 850 nm 650 - 1100 nm
Panel Active Area 15.42 mm x 9.66 mm
Pixel Pitch 8 µm
Fill Factor >92%
Reflective Coating Aluminum
g.
a.
b.
c.
d.
e.

Average Reflectance 80% (Typical)
Phase / Retardance Rangea2π at 633 nm (Full Wave Mode)
π at 633 nm (Half Wave Mode)
2π at 1064 nm (Full Wave Mode)
π at 1064 nm (Half Wave Mode)
Angle of Incidenceb0°
Optic Axis 0°
Reflected Wavefront Distortion <λ/2 @ 633 nm <0.4λ @ 633 nm
Frame Rate 60 Hz
Optical Power Handlingc≤200 W/cm
Damage Threshold
Pulsed (ns) 0.22 J/cm2
(532 nm, 6.8 ns, 10 Hz, Ø200.5 µm)
0.15 J/cm2
(1064 nm, 10 ns, 100 Hz, Ø235
µm)
Pulsed (fs)
0.0935 J/cm2
(515 nm, 203.3 ns, 100 Hz, Ø108.2
µm)
0.03 J/cm2
(1030 nm, 200 fs, 100 Hz, Ø135
µm)
Fluctuation / Flickering (RMS)d<0.01% <0.15%
Beam Deviation Using Panel Tip /
Tilt N/A
Trigger OutputeSMA Female
Trigger Output High Voltage
Level 5 V (TTL)
Trigger Output Pulse Width 54 µs
Connector Type (for Tubing) CPC® Valved Thumb Latch Quick-Disconnect Fitting
Tubing Dimensions 0.17" (4.3 mm) Inner Diameter (Pre-Installed)
0.24" (6 mm) Inner Diameter (Optional)
Dimensions (L x W x H)
220.0 mm x 104.0 mm x 68.0 mm (8.66" x 4.09" x 2.68") All-in-One Mode
420.0 mm x 104.0 mm x 42.0 mm (16.54" x 4.09" x 1.65") Separate-
Panel Mode
Weight 0.7 kg (1.54 lbs)
Storage Temperature 0 °C to 60 °C (32 °F to 140 °F)
Operating Temperaturee10 °C to 40 °C (50 °F to 104 °F)
PC Connection HDMI-Compatible Connector
USB 2.0 Connector
Bit Depth 8 Bit, 0 - 255 Gray Level
SLM Head Thermistor
Type VISHAY NTC LE413 (R0 = 10 kΩ @ T0 = 25 °C, B = 3435 K)
Accuracy ±0.5 °C (@ 25 °C)
Phase/retardance range values are for 30 °C when used with the LK220 liquid chiller.
Other angles of incidence will result in phase shifts that differ from the programmed pattern. Angles of
up to 10° are possible without significantly affecting performance.
Specification with the LK220 Liquid Chiller
Fluctuation / Flickering is the phase fluctuation as the percentage of the entire phase range and is
dependent on current phase setting. The value stated is the maximum fluctuation and typically occurs at
half of the phase range.
For more details on the external trigger output, please refer to the product manuals accessible through
the red Docs ( ) icons below.
Ambient temperature fluctuations may cause the characteristics of your SLM to change. Using it at an
ambient temperature of 25 °C is recommended.
Diffraction Efficiency
DIFFRACTION EFFICIENCY
a.
b.
c.
d.
e.
f.

Phase Patterns Used to Measure Diffraction Efficiency
Click to Enlarge Click to Enlarge
Click to Enlarge Click to Enlarge
When a repeating, linear phase pattern is displayed on the SLM, it will function similarly to a blazed diffraction grating. The diffraction efficiency is the power in
the first-order of the diffraction pattern divided by the zero-order when the phase of the SLM is set to zero across the panel. These measurements were made at
633 nm, 1064 nm, or 1550 nm for several test patterns with varying phase steps, effectively creating gratings with varying line spacing (denoted as line pair
/ mm). The measured results and patterns used are plotted below.

Click to Enlarge
Frame Tab in Standard Frame Rate Mode:
Setting a specific gray level from 0 to 255 will set
the entire panel to a certain phase level.
"Spatial Light Modulator" Software Package for EXULUS-HD1
Each Exulus® SLM comes with a software interface that provides complete control of the SLM panel as well as
device settings. Users can input a specific phase level (gray level) over the entire panel, import a custom image,
produce a computer generated holography (CGH) pattern, and other patterns such as Fresnel lenses and
diffraction gratings. All the patterns can be saved into a sequence list and played with a predefined interval of
16.7 ms (60 Hz frame rate, EXULUS-HD1, EXULUS-HD2, EXULUS-HD3, EXULUS-HD4, EXULUS-HD2HP, and
EXULUS-HD3HP). The EXULUS-HD1 also features a triple mode; if RGB images are used then the RGB channels
will be played in succession for an overall frame rate of 180 Hz. The software also supports video input at 1080p or
4K resolution with the H.264 video codec (supported file formats: MP4, M4V, and MOV).
Note: There are two separate software packages for our Exulus spatial light modulators:
The "Spatial Light Modulator" software package is designed for use with our EXULUS-HD1.
The "Thorlabs EXULUS" software package is designed for use with our EXULUS-HD2, EXULUS-HD3,
EXULUS-HD4, EXULUS-HD2HP, and EXULUS-HD3HP SLMs.
Click the yellow bars below for screenshots highlighting various software features and capabilities:
SOFTWARE
Software
"Spatial Light Modulator" Software
Version 1.0.12
This software package is designed for use
with our EXULUS-HD1 SLMs.
"Thorlabs EXULUS" Software Version
2.5.1
This software package is designed for use
with our EXULUS-HD2, EXULUS-HD3,
EXULUS-HD4, EXULUS-HD2HP, and
EXULUS-HD3HP SLMs.
Click the button below to visit the software
page.

Click to Enlarge
Frame Tab in Triple Frame Rate Mode (EXULUS-HD1):
Each of three successive frames (at 180 fps) can have a
different gray level.
Click to Enlarge
File Tab: Upload a user-defined pattern in PNG,
JPEG, or BMP format.
Click to Enlarge
CGH Tab: Convert a user-defined image into a
holographic pattern. For more details, please see
the
App Note
tab.
Click to Enlarge
Pattern Tab for Fresnel Lens Generation: Sets
the SLM panel to focus the reflected light at a
user-selected wavelength and focal length.
Click to Enlarge
Pattern Tab for Diffraction Grating Generation:
Sets the SLM panel to diffract the reflected light with
user-selected wavelength, deviation angle, and
grating rotation angle. For more infromation about
the diffraction efficiency of different patterns, please
see the
Specs
tab.
Click to Enlarge
Video Tab: User-uploaded video can be played on
the SLM panel. In standard mode, grayscale video
can be played at a 60 Hz (EXULUS-HD1, EXULUS-
HD2, and EXULUS-HD4) frame rate. In triple mode
(EXULUS-HD1 only), a color video will play the R,
G, B channels in succession at a 180 Hz frame
rate.
Click to Enlarge
Frame Tab in Standard Frame Rate Mode:
Click to Enlarge
File Tab: Upload a user-defined pattern in PNG,
"Thorlabs EXULUS" Software Package for EXULUS-HD2, EXULUS-HD3, EXULUS-HD4,
EXULUS-HD2HP, and EXULUS-HD3HP

Setting a specific gray level from 0 to 255 will set
the entire panel to a certain phase level.
JPEG, or BMP format.
Click to Enlarge
CGH Tab: Convert a user-defined image into a
holographic pattern. For more details, please see
the
App Note
tab.
Click to Enlarge
Pattern Tab for Fresnel Lens Generation: Sets
the SLM panel to focus the reflected light at a
user-selected wavelength and focal length.
Click to Enlarge
Pattern Tab for Diffraction Grating Generation:
Sets the SLM panel to diffract the reflected light with
user-selected wavelength, deviation angle, and
grating rotation angle. For more infromation about
the diffraction efficiency of different patterns, please
see the
Diffraction Efficiency
tab.
Click to Enlarge
Pattern Tab for Vortex Generation: This
pattern creates a helical output beam and contains
a characteristic donut beam profile. The mode
contains two parameters: wavelength and pattern
order m.
Click to Enlarge
Pattern Tab for Cubic Phase Generation: This
pattern generates a non-diffracted beam with self-
recovery characteristics, commonly called an airy
beam. The mode contains two parameters:
wavelength and alpha.
Click to Enlarge
Sensor Setting: When a high-power SLM is
connected to the LK220 chiller, the temperature
sensor can be set to internal or external mode. The
internal sensor measures the output coolant
temperature, while the external sensor gives the
thermistor temperature reading from the LK220
chiller.
Polarization Dependence of Phase-Only Spatial Light
Modulators (SLMs)
The optical working principles of liquid crystal on silicon SLMs that
provide phase-modulated output beams are illustrated.
Click to Enlarge
Figure 1: A schematic diagram of the SLM LCoS
panel.
Overview
Two-
dimensional
spatial light
modulators
(SLMs) offer
individually
addressable
pixels of phase
shift. Thorlabs' Exulus® 2D SLM is fabricated with liquid crystal on silicon (LCoS) technology, which is based on display technology. This allows it to provide far
more pixels than lower-order phase modulators such as segmented or deformable mirrors. Also, the phase shift of one pixel has little crosstalk with other pixels.
Therefore, the Exulus 2D SLM is perfect for many beam manipulation applications including optical trapping, beam steering and shaping, femtosecond pulse
shaping, adaptive optics, imaging applications, and holography.
APP NOTE

Click to Enlarge
Figure 2: Setup for CGH using the EXULUS-HD1 SLM. In this case, the
focusing effect added to the CGH is set to a 100 000 mm focal length.
[APPLIST] [APPLIST]
These product lists do not include the optical breadboard, laptop, or
screws used to mount the post holders to the breadboard.
Click to Enlarge
Figure 4: CGH projection of an image using the setup
shown in Figure 2 and the image shown in Figure 3.
The central bright spot is a zero-order diffraction spot
due to the gaps between the SLM pixels.
Click for Full-Resolution Example Image
a.
Click to Enlarge
b.
c.
Figure 3: a. The image used to generate the holographic projection.
b. The corresponding CGH pattern generated by the Exulus software.
The main component of the Exulus® is the 2D SLM LCoS panel. Figure 1 shows a basic schematic of the LCoS panel. The liquid crystal layer is sandwiched
between the top transparent and conductive ITO electrode, and the reflective electrode on the bottom. Each pixel on the SLM panel corresponds to individually
addressable electrodes on the bottom. Together with the ITO layer on top, an electric field is built up by applying a voltage between the two electrodes. The liquid
crystal modules line up according to the direction and strength of the electric field. Since liquid crystal is a birefringent material, the alignment of the liquid crystal
molecules in turn controls the retardance or phase shift of each pixel. A wavefront that is incident on the panel reflects with its phase or wavefront being shifted
according to the signal that is sent to the SLM panel. With a properly calculated pattern on the SLM panel, the reflected wavefront results in different optical
effects in the far field. These effects typically include diffraction, tilt, focus, and holographic image formation.
Holographic Projection
We show here a holographic projection as one of the applications of the Exulus SLM.
Figure 2 shows a typical setup required to realize a 2D holographic projection using the
EXULUS-HD1. A collimated laser beam is incident on the SLM panel; best results for
holographic projection are obtained using a beam size just smaller than Ø7 mm. The
incident beam passes through a polarizer and a half-wave plate such that it is polarized
at 45°, the direction of the optical axis of the panel. The target projection image is first
converted into a computer generated holography (CGH) pattern that is calculated by
the bundled software (accessed through the CGH tab in the software). The output
beam is separated from the incident beam with a beam splitter. Within the SLM
software, a focusing effect is added to the CGH pattern; if you do not desire to have
the SLM provide focusing, set the focal length to an extremely long value. In this
example, we have set the focal length to 100 000 mm (at the laser wavelength of 635 nm), checked the "Invert Image" box to set the image outline to be bright in
the projected pattern, and set the position to "Fit" so that the entire image is visible on the preview. Since CGH relies on far-field diffraction, a set of imaging
lenses is required to produce a sharp holographic image on a screen (in this example, first lens: f = 50 mm, second lens: f = 75 mm). Figure 3 shows the
holographic image to be projected and the corresponding CGH pattern, which is calculated using the bundled software. The resulting holographic projection is
shown in Figure 4.
c. The CGH settings tab in the Exulus software.

Click to Enlarge
a.
Click to Enlarge
b.
Click to Enlarge
Figure 6: Setup used for removing the focused zero-
order spot from the CGH projection. Note that the
lenses are in different locations than in Figure 2.
Effects of Focusing and Tilt
Due to the fill factor of the SLM panel, there is a small gap between the pixels. This in turn causes higher diffraction orders and a high-energy zero-order spot
which is unaffected by the SLM, but inherently exists at the output. The center bright spot often overlaps with the holographic projection on the same image
plane, as is visible in Figure 4. It is highly preferable to remove this zero-order-spot in many applications.
In order to further enhance the holographic image, one can adjust the focusing effect added to the CGH pattern. This causes the CGH projection to focus itself
without the requirement of imaging lenses. Since the zero-order spot is not affected by the focusing parameter, the CGH projection will form an image while the
zero-order spot remains collimated at the original beam size. Figure 5 shows the focusing effect that is added to the CGH as well as the final processed CGH
pattern sent to the SLM panel; in this example, the focal length was changed to 100 mm in the software; the other software settings remained unchanged.
Figure 5: a. The 100 mm Fresnel lens focusing effect added to the CGH pattern. b. The resultant CGH pattern of the image in Figure 3 a, including
the 100 mm focus, generated by the EXULUS software.
If the imaging lenses used in the first example above are inserted into the beam path again, then the
center bright spot can be made to diverge while the holographic projection is refocused. This can be
accomplished by following these steps:
1. Generate a CGH pattern using a short focal length setting (here, we use 100 mm; other settings
remained unchanged from the first example).
2. Find the location where the CGH pattern is in focus, which should be at the distance set in the
SLM software (100 mm).
3. Put the first lens a short distance after this focused spot (here, we used an f = 50 mm lens).
4. Fix the location of the viewing screen at the desired location, and then insert the second lens into the beam path (here, we used an f = 75 mm lens).
Adjust the position of this lens until an image begins to form on the screen.
5. Once the image of the CGH projection is found, make small adjustments to the position of both lenses to optimize the size and clarity of the image.
The experimental setup is shown in Figure 6; note the lenses are in different positions than they are in Figure 2. The resulting holographic projection is shown in
Figure 7.
Additionally, the Exulus software allows an X and/or Y tilt to be added to the CGH pattern; this can be used to displace the CGH projection from the central zero-
order spot.

Click to Enlarge
Figure 8: An optical tweezers system incorporating
an EXULUS-HD1 SLM.
Video showing trapped particles moving due to the changing SLM pattern.
Click to Enlarge
Figure 7: CGH projection of the CGH pattern shown in Figure 5 and the setup shown in Figure 6.
Optical Tweezers Application
In optical tweezers systems, an SLM can be used to generate several focused spots at different locations in the sample volume. By using the video or sequence
features in the Exulus software package, a moving pattern of focal points can be generated to move trapped particles within a sample volume. In the video to the
lower right, several trapped beads are moved continuously in a circle. The tweezers system incorporating the EXULUS-HD1 is shown in Figure 8.
Damage Threshold Specifications
Item # Type Damage Threshold
EXULUS-HD1
CWa5 W/cm (532 nm, Ø0.0107 mm)
Pulsed
(ns) 0.63 J/cm2 (532 nm, 8.6 ns, 10 Hz, Ø203 µm)
Pulsed
(fs) 0.138 J/cm2 (535 nm, 59.4 fs, 100 Hz, Ø188 µm)
EXULUS-HD2
EXULUS-
HD2HP
Pulsed
(ns) 0.22 J/cm2 (532 nm, 6.8 ns, 10 Hz, Ø200.5 µm)
Pulsed
(fs)
0.0935 J/cm2 (515 nm, 203.3 fs, 100 Hz, Ø108.2
µm)
EXULUS-HD3
EXULUS-
Pulsed
(ns) 0.15 J/cm2 (1064 nm, 10 ns, 100 Hz, Ø235 µm)
Damage Threshold Data for Thorlabs' Exulus Spatial Light
Modulators
The damage threshold provided in the table to the right are measured data for
Thorlabs' family of Exulus® Spatial Light Modulators.
DAMAGE THRESHOLDS

HD3HP
Pulsed
(fs) 0.03 J/cm2 (1030 nm, 200 fs, 100 Hz, Ø135 µm)
EXULUS-HD4
Pulsed
(ns)
0.187 J/cm2 (1550 nm, 6.0 ns, 10 Hz, Ø230.6
µm)
Pulsed
(fs)
0.076 J/cm2 (1550 nm, 55.6 fs, 100 Hz, Ø143.1
µm)
The power density of your beam should be calculated in terms of W/cm.
For an explanation of why the linear power density provides the best
metric for long pulse and CW sources, please see the "Continuous
Wave and Long-Pulse Lasers" section below.
The photograph above is a protected aluminum-
coated mirror after LIDT testing. In this particular
test, it handled 0.43 J/cm2 (1064 nm, 10 ns pulse, 10
Hz, Ø1.000 mm) before damage.
Example Test Data
Fluence
# of Tested
Locations
Locations with
Damage
Locations Without
Damage
1.50 J/cm210 0 10
1.75 J/cm210 0 10
2.00 J/cm210 0 10
2.25 J/cm210 1 9
3.00 J/cm210 1 9
5.00 J/cm210 9 1
Laser Induced Damage Threshold Tutorial
The following is a general overview of how laser induced damage thresholds are measured and how the values may be utilized in determining the
appropriateness of an optic for a given application. When choosing optics, it is important to understand the Laser Induced Damage Threshold (LIDT) of the optics
being used. The LIDT for an optic greatly depends on the type of laser you are using. Continuous wave (CW) lasers typically cause damage from thermal effects
(absorption either in the coating or in the substrate). Pulsed lasers, on the other hand, often strip electrons from the lattice structure of an optic before causing
thermal damage. Note that the guideline presented here assumes room temperature operation and optics in new condition (i.e., within scratch-dig spec, surface
free of contamination, etc.). Because dust or other particles on the surface of an optic can cause damage at lower thresholds, we recommend keeping surfaces
clean and free of debris. For more information on cleaning optics, please see our Optics Cleaning tutorial.
Testing Method
Thorlabs' LIDT testing is done in compliance with ISO/DIS 11254 and ISO 21254 specifications.
First, a low-power/energy beam is directed to the optic under test. The optic is exposed in 10 locations to this laser beam for 30 seconds (CW) or for a number of
pulses (pulse repetition frequency specified). After exposure, the optic is examined by a microscope (~100X magnification) for any visible damage. The number
of locations that are damaged at a particular power/energy level is recorded. Next, the power/energy is either increased or decreased and the optic is exposed at
10 new locations. This process is repeated until damage is observed. The damage threshold is then assigned to be the highest power/energy that the optic can
withstand without causing damage. A histogram such as that below represents the testing of one BB1-E02 mirror.
According to the test, the damage threshold of the mirror was 2.00 J/cm2 (532 nm,
10 ns pulse, 10 Hz, Ø0.803 mm). Please keep in mind that these tests are
performed on clean optics, as dirt and contamination can significantly lower the
damage threshold of a component. While the test results are only representative of
one coating run, Thorlabs specifies damage threshold values that account for
coating variances.
Continuous Wave and Long-Pulse Lasers
When an optic is damaged by a continuous wave (CW) laser, it is usually due to
the melting of the surface as a result of absorbing the laser's energy or damage to
the optical coating (antireflection) [1]. Pulsed lasers with pulse lengths longer than 1 µs can be treated as CW lasers for LIDT discussions.
When pulse lengths are between 1 ns and 1 µs, laser-induced damage can occur either because of absorption or a dielectric breakdown (therefore, a user must
a.

LIDT in linear power density vs. pulse length and spot size. For long
pulses to CW, linear power density becomes a constant with spot size.
This graph was obtained from [1].
check both CW and pulsed LIDT). Absorption is either due to an intrinsic property of the optic or due to surface irregularities; thus LIDT values are only valid for
optics meeting or exceeding the surface quality specifications given by a manufacturer. While many optics can handle high power CW lasers, cemented (e.g.,
achromatic doublets) or highly absorptive (e.g., ND filters) optics tend to have lower CW damage thresholds. These lower thresholds are due to absorption or
scattering in the cement or metal coating.
Pulsed lasers with high pulse repetition frequencies (PRF) may behave similarly to CW
beams. Unfortunately, this is highly dependent on factors such as absorption and
thermal diffusivity, so there is no reliable method for determining when a high PRF
laser will damage an optic due to thermal effects. For beams with a high PRF both the
average and peak powers must be compared to the equivalent CW power.
Additionally, for highly transparent materials, there is little to no drop in the LIDT with
increasing PRF.
In order to use the specified CW damage threshold of an optic, it is necessary to know
the following:
1. Wavelength of your laser
2. Beam diameter of your beam (1/e2)
3. Approximate intensity profile of your beam (e.g., Gaussian)
4. Linear power density of your beam (total power divided by 1/e2 beam
diameter)
Thorlabs expresses LIDT for CW lasers as a linear power density measured in W/cm. In this
regime, the LIDT given as a linear power density can be applied to any beam diameter; one does
not need to compute an adjusted LIDT to adjust for changes in spot size, as demonstrated by the
graph to the right. Average linear power density can be calculated using the equation below.
The calculation above assumes a uniform beam intensity profile. You must now consider hotspots
in the beam or other non-uniform intensity profiles and roughly calculate a maximum power
density. For reference, a Gaussian beam typically has a maximum power density that is twice that of the uniform beam (see lower right).
Now compare the maximum power density to that which is specified as the LIDT for the optic. If the optic was tested at a wavelength other than your operating
wavelength, the damage threshold must be scaled appropriately. A good rule of thumb is that the damage threshold has a linear relationship with wavelength
such that as you move to shorter wavelengths, the damage threshold decreases (i.e., a LIDT of 10 W/cm at 1310 nm scales to 5 W/cm at 655 nm):
While this rule of thumb provides a general trend, it is not a quantitative analysis of LIDT vs wavelength. In CW applications, for instance, damage scales more
strongly with absorption in the coating and substrate, which does not necessarily scale well with wavelength. While the above procedure provides a good rule of
thumb for LIDT values, please contact Tech Support if your wavelength is different from the specified LIDT wavelength. If your power density is less than the
adjusted LIDT of the optic, then the optic should work for your application.
Please note that we have a buffer built in between the specified damage thresholds online and the tests which we have done, which accommodates variation
between batches. Upon request, we can provide individual test information and a testing certificate. The damage analysis will be carried out on a similar optic
(customer's optic will not be damaged). Testing may result in additional costs or lead times. Contact Tech Support for more information.
Pulsed Lasers
As previously stated, pulsed lasers typically induce a different type of damage to the optic than CW lasers. Pulsed lasers often do not heat the optic enough to
damage it; instead, pulsed lasers produce strong electric fields capable of inducing dielectric breakdown in the material. Unfortunately, it can be very difficult to
compare the LIDT specification of an optic to your laser. There are multiple regimes in which a pulsed laser can damage an optic and this is based on the laser's
pulse length. The highlighted columns in the table below outline the relevant pulse lengths for our specified LIDT values.
Pulses shorter than 10-9 s cannot be compared to our specified LIDT values with much reliability. In this ultra-short-pulse regime various mechanics, such as
multiphoton-avalanche ionization, take over as the predominate damage mechanism [2]. In contrast, pulses between 10-7 s and 10-4 s may cause damage to an

LIDT in energy density vs. pulse length and spot size. For short pulses,
energy density becomes a constant with spot size. This graph was
obtained from [1].
optic either because of dielectric breakdown or thermal effects. This means that both CW and pulsed damage thresholds must be compared to the laser beam to
determine whether the optic is suitable for your application.
Pulse Duration t < 10-9 s 10-9 < t < 10-7 s 10-7 < t < 10-4 s t > 10-4 s
Damage Mechanism Avalanche Ionization Dielectric Breakdown Dielectric Breakdown or
Thermal Thermal
Relevant Damage
Specification No Comparison (See Above) Pulsed Pulsed and CW CW
When comparing an LIDT specified for a pulsed laser to your laser, it is essential to know the following:
1. Wavelength of your laser
2. Energy density of your beam (total energy divided by 1/e2 area)
3. Pulse length of your laser
4. Pulse repetition frequency (prf) of your laser
5. Beam diameter of your laser (1/e2 )
6. Approximate intensity profile of your beam (e.g., Gaussian)
The energy density of your beam should be calculated in terms of J/cm2. The graph to
the right shows why expressing the LIDT as an energy density provides the best metric
for short pulse sources. In this regime, the LIDT given as an energy density can be
applied to any beam diameter; one does not need to compute an adjusted LIDT to
adjust for changes in spot size. This calculation assumes a uniform beam intensity
profile. You must now adjust this energy density to account for hotspots or other
nonuniform intensity profiles and roughly calculate a maximum energy density. For
reference a Gaussian beam typically has a maximum energy density that is twice that
of the 1/e2 beam.
Now compare the maximum energy density to that which is specified as the LIDT for
the optic. If the optic was tested at a wavelength other than your operating wavelength,
the damage threshold must be scaled appropriately [3]. A good rule of thumb is that the damage threshold has an inverse square root relationship with
wavelength such that as you move to shorter wavelengths, the damage threshold decreases (i.e., a LIDT of 1 J/cm2 at 1064 nm scales to 0.7 J/cm2 at 532 nm):
You now have a wavelength-adjusted energy density, which you will use in the following step.
Beam diameter is also important to know when comparing damage thresholds. While the LIDT, when expressed in units of J/cm², scales independently of spot
size; large beam sizes are more likely to illuminate a larger number of defects which can lead to greater variances in the LIDT [4]. For data presented here, a <1
mm beam size was used to measure the LIDT. For beams sizes greater than 5 mm, the LIDT (J/cm2) will not scale independently of beam diameter due to the
larger size beam exposing more defects.
The pulse length must now be compensated for. The longer the pulse duration, the more energy the optic can handle. For pulse widths between 1 - 100 ns, an
approximation is as follows:
Use this formula to calculate the Adjusted LIDT for an optic based on your pulse length. If your maximum energy density is less than this adjusted LIDT
maximum energy density, then the optic should be suitable for your application. Keep in mind that this calculation is only used for pulses between 10-9 s and 10-7
s. For pulses between 10-7 s and 10-4 s, the CW LIDT must also be checked before deeming the optic appropriate for your application.
Please note that we have a buffer built in between the specified damage thresholds online and the tests which we have done, which accommodates variation
between batches. Upon request, we can provide individual test information and a testing certificate. Contact Tech Support for more information.
[1] R. M. Wood, Optics and Laser Tech. 29, 517 (1998).
[2] Roger M. Wood, Laser-Induced Damage of Optical Materials (Institute of Physics Publishing, Philadelphia, PA, 2003).

[3] C. W. Carr et al., Phys. Rev. Lett. 91, 127402 (2003).
[4] N. Bloembergen, Appl. Opt. 12, 661 (1973).
A Gaussian beam profile has about twice the maximum
intensity of a uniform beam profile.
Suppose that a CW laser system at 1319 nm produces a 0.5 W Gaussian beam that has a 1/e2
diameter of 10 mm. A naive calculation of the average linear power density of this beam would
yield a value of 0.5 W/cm, given by the total power divided by the beam diameter:
However, the maximum power density of a Gaussian beam is about twice the maximum power
density of a uniform beam, as shown in the graph to the right. Therefore, a more accurate
determination of the maximum linear power density of the system is 1 W/cm.
An AC127-030-C achromatic doublet lens has a specified CW LIDT of 350 W/cm, as tested at 1550 nm. CW damage threshold values typically scale directly with
the wavelength of the laser source, so this yields an adjusted LIDT value:
The adjusted LIDT value of 350 W/cm x (1319 nm / 1550 nm) = 298 W/cm is significantly higher than the calculated maximum linear power density of the laser
system, so it would be safe to use this doublet lens for this application.
Pulsed Nanosecond Laser Example: Scaling for Different Pulse Durations
Suppose that a pulsed Nd:YAG laser system is frequency tripled to produce a 10 Hz output, consisting of 2 ns output pulses at 355 nm, each with 1 J of energy,
in a Gaussian beam with a 1.9 cm beam diameter (1/e2). The average energy density of each pulse is found by dividing the pulse energy by the beam area:
As described above, the maximum energy density of a Gaussian beam is about twice the average energy density. So, the maximum energy density of this beam
is ~0.7 J/cm2.
The energy density of the beam can be compared to the LIDT values of 1 J/cm2 and 3.5 J/cm2 for a BB1-E01 broadband dielectric mirror and an NB1-
K08 Nd:YAG laser line mirror, respectively. Both of these LIDT values, while measured at 355 nm, were determined with a 10 ns pulsed laser at 10 Hz.
Therefore, an adjustment must be applied for the shorter pulse duration of the system under consideration. As described on the previous tab, LIDT values in the
nanosecond pulse regime scale with the square root of the laser pulse duration:
LIDT CALCULATIONS
In order to illustrate the process of determining whether a given laser system will damage an optic, a number of
example calculations of laser induced damage threshold are given below. For assistance with performing similar
calculations, we provide a spreadsheet calculator that can be downloaded by clicking the button to the right. To use the
calculator, enter the specified LIDT value of the optic under consideration and the relevant parameters of your laser
system in the green boxes. The spreadsheet will then calculate a linear power density for CW and pulsed systems, as well as an energy density value for pulsed
systems. These values are used to calculate adjusted, scaled LIDT values for the optics based on accepted scaling laws. This calculator assumes a
Gaussian beam profile, so a correction factor must be introduced for other beam shapes (uniform, etc.). The LIDT scaling laws are determined from empirical
relationships; their accuracy is not guaranteed. Remember that absorption by optics or coatings can significantly reduce LIDT in some spectral regions. These
LIDT values are not valid for ultrashort pulses less than one nanosecond in duration.
CW Laser Example

Click to Enlarge
The back panel of the EXULUS-
HD1(/M) provides HDMI-
compatible and USB 2.0 ports for
connecting the SLM to a PC, a
power supply input, and an on/off
switch.
Key Specificationsa
Item # Operating
Wavelength
Panel
Resolution
Fill Factor Panel Active Area Pixel
Pitch
Phase / Retardance
b
Frame Rate Fluctuation/
Flickering (RMS)
Output
Trigger
Exulus Spatial Light Modulator with Full HD Resolution
Liquid Crystal on Silicon (LCoS) with Aluminum Coating for 400 - 850 nm
1920 x 1080 (Full HD) Resolution
HDMI*-Compatible and USB 2.0 Input Connectors
Optic Axis: 45°
Housing Dimensions: 172.0 mm x 110.0 mm x 81.6 mm
The EXULUS-HD1(/M) Spatial Light Modulator has a 1920 x 1080 (Full HD) LCoS panel with an
aluminum reflective coating for operation over the 400 - 850 nm wavelength range. It also features four operation modes
including extended phase shift range and a high frame rate mode (up to 180 Hz). The bottom and two sides of the housing each
offer two 8-32 (M4) tapped holes for post mounting. The front panel includes four 4-40 taps for 30 mm cage system
compatibility; we do not recommend connecting this spatial light modulator to a cage system for applications that require precise
alignment.
*HDMI is a trademark or registered trademark of HDMI Licensing Administrator, Inc. The use of such trademark by Thorlabs does not constitute or imply any affiliation
with or endorsement or sponsorship by such trademark owner.
This adjustment factor results in LIDT values of 0.45 J/cm2 for the BB1-E01 broadband mirror and 1.6 J/cm2 for the Nd:YAG laser line mirror, which are to be
compared with the 0.7 J/cm2 maximum energy density of the beam. While the broadband mirror would likely be damaged by the laser, the more specialized laser
line mirror is appropriate for use with this system.
Pulsed Nanosecond Laser Example: Scaling for Different Wavelengths
Suppose that a pulsed laser system emits 10 ns pulses at 2.5 Hz, each with 100 mJ of energy at 1064 nm in a 16 mm diameter beam (1/e2) that must be
attenuated with a neutral density filter. For a Gaussian output, these specifications result in a maximum energy density of 0.1 J/cm2. The damage threshold of an
NDUV10A Ø25 mm, OD 1.0, reflective neutral density filter is 0.05 J/cm2 for 10 ns pulses at 355 nm, while the damage threshold of the similar NE10A absorptive
filter is 10 J/cm2 for 10 ns pulses at 532 nm. As described on the previous tab, the LIDT value of an optic scales with the square root of the wavelength in the
nanosecond pulse regime:
This scaling gives adjusted LIDT values of 0.08 J/cm2 for the reflective filter and 14 J/cm2 for the absorptive filter. In this case, the absorptive filter is the best
choice in order to avoid optical damage.
Pulsed Microsecond Laser Example
Consider a laser system that produces 1 µs pulses, each containing 150 µJ of energy at a repetition rate of 50 kHz, resulting in a relatively high duty cycle of 5%.
This system falls somewhere between the regimes of CW and pulsed laser induced damage, and could potentially damage an optic by mechanisms associated
with either regime. As a result, both CW and pulsed LIDT values must be compared to the properties of the laser system to ensure safe operation.
If this relatively long-pulse laser emits a Gaussian 12.7 mm diameter beam (1/e2) at 980 nm, then the resulting output has a linear power density of 5.9 W/cm
and an energy density of 1.2 x 10-4 J/cm2 per pulse. This can be compared to the LIDT values for a WPQ10E-980 polymer zero-order quarter-wave plate, which
are 5 W/cm for CW radiation at 810 nm and 5 J/cm2 for a 10 ns pulse at 810 nm. As before, the CW LIDT of the optic scales linearly with the laser wavelength,
resulting in an adjusted CW value of 6 W/cm at 980 nm. On the other hand, the pulsed LIDT scales with the square root of the laser wavelength and the square
root of the pulse duration, resulting in an adjusted value of 55 J/cm2 for a 1 µs pulse at 980 nm. The pulsed LIDT of the optic is significantly greater than the
energy density of the laser pulse, so individual pulses will not damage the wave plate. However, the large average linear power density of the laser system may
cause thermal damage to the optic, much like a high-power CW beam.

Range
EXULUS-
HD1(/M)
400 -
850 nm
1920 x 1080
(Full HD) >93% 12.5 mm x 7.1 mm 6.4 µm 2π at 633 nm (Std.)
4.7π at 532 nm (Ext.)
60 Hz (Standard) or
180 Hz (Frame Boostc)
<1% (Standard)
<5% (Extended) N/A
Complete specifications may be found on the Specs tab.
Angles of incidence other than 0° will result in phase shifts that differ from the programmed pattern. Angles of up to 10° are possible without significantly
affecting performance.
Frame Boost Mode (referred to as Triple Mode in the software) plays the R, G, and B channels of the video signal in succession, for an overall frame rate of
180 Hz.
Click to Enlarge
The top panels of the EXULUS-HD2,
EXULUS-HD3 (shown), and EXULUS-HD4
provide HDMI-compatible and USB 2.0
ports for connecting the SLM to a PC, SMA
trigger output, power supply input, and an
on/off switch.
Key Specificationsa
Item # Operating
Wavelength
Panel
Resolution Fill Factor Panel Active Area Pixel Pitch Phase / Retardance
RangebFrame Rate Fluctuation/
Flickering (RMS)c
Output
Trigger
EXULUS-HD2 400 - 850 nm
1920 x 1200
(WUXGA) >92% 15.42 mm x 9.66 mm 8 µm
2π at 633 nm
60 Hz
<0.01%
Yes
(SMA)
EXULUS-HD3 650 - 1100 nm 2π at 1064 nm <0.05%
EXULUS-HD4 1550 nm 2π at 1550 nm <0.15%
Complete specifications may be found on the Specs tab.
Angles of incidence other than 0° will result in phase shifts that differ from the programmed pattern. Angles of up to 10° are possible without significantly
affecting performance.
Fluctuation / Flickering is the phase fluctuation as the percentage of the entire phase range and is dependent on the current phase setting. The value stated is
the maximum fluctuation and typically occurs at half of the phase range.
Part Number Description Price Availability
EXULUS-HD1/M Spatial Light Modulator, 1920 x 1080, 400 - 850 nm, M4 Taps $17,314.50 Lead Time
EXULUS-HD1 Spatial Light Modulator, 1920 x 1080, 400 - 850 nm, 8-32 Taps $17,314.50 Lead Time
Exulus Spatial Light Modulators with WUXGA Resolution
Liquid Crystal on Silicon (LCoS) with One of Two Coatings:
Aluminum Coating for 400 - 850 nm (EXULUS-HD2)
Aluminum Coating for 650 - 1100 nm (EXULUS-HD3)
Dielectric Coating for 1550 nm (EXULUS-HD4)
1920 x 1200 (WUXGA) Resolution
HDMI*-Compatible and USB 2.0 Input Connectors
SMA Trigger Output
Optic Axis: 0°
Housing Dimensions: 155.9 mm x 104.3 mm x 42.0 mm
The EXULUS-HD2, EXULUS-HD3, and EXULUS-HD4 Spatial Light Modulators (SLMs) are designed to operate at 400 - 850 nm, 650 - 1100 nm, and 1550 nm,
respectively. Each SLM has an LCoS panel with a resolution of 1920 x 1200 in a compact housing. They also feature high phase stability and SMA trigger outputs for
synchronized applications. Two sides of the housing each offer two universal mounting holes that accept both 8-32 and M4 threads; please note that these threads
are separated by 50 mm. The front panel includes four 4-40 taps for 30 mm cage system compatibility; we do not recommend connecting these spatial light
modulators to a cage system for applications that require precise alignment.
*HDMI is a trademark or registered trademark of HDMI Licensing Administrator, Inc. The use of such trademark by Thorlabs does not constitute or imply any affiliation
with or endorsement or sponsorship by such trademark owner.
Part Number Description Price Availability
EXULUS-HD2 Spatial Light Modulator, 1920 x 1200, 400 - 850 nm, Universal 8-32 / M4 Taps $13,302.45 Today
EXULUS-HD3 Customer Inspired! Spatial Light Modulator, 1920 x 1200, 650 - 1100 nm, Universal 8-32 / M4 Taps $16,143.75 Today
EXULUS-HD4 Customer Inspired! Spatial Light Modulator, 1920 x 1200, 1550 nm, Universal 8-32 / M4 Taps $18,845.14 Today
a.
b.
c.
a.
b.
c.

Click to Enlarge
The adapter board and SLM head
include 8-32
(M4 x 0.7) threads for mounting in the
separate-panel configuration. Mounting
the SLM head in a kinematic mirror
mount provides tip and tilt adjustments.
Click to Enlarge
The High-Power SLM housing
features two 8-32 (M4 x 0.7)
taps for mounting in the all-in-
one configuration.
Click to Enlarge
The LK220 liquid chiller can be easily
connected to a High-Power SLM using
the valved CPC quick-disconnect
fittings and a 2.5 mm stereo jack.
Key Specificationsa
Item # Operating
Wavelength
Panel
Resolution Fill Factor Panel Active Area Pixel Pitch Phase / Retardance
Rangeb,c Frame Rate Fluctuation/
Flickering (RMS)d
Output
Trigger
EXULUS-HD2HP 400 - 850 nm 1920 x 1200
(WUXGA) >92% 15.42 mm x 9.66 mm 8 µm 2π at 633 nm 60 Hz <0.01% Yes
(SMA)
EXULUS-HD3HP 650 - 1100 nm 2π at 1064 nm <0.15%
Complete specifications may be found on the Specs tab.
Angles of incidence other than 0° will result in phase shifts that differ from the programmed pattern. Angles of up to 10° are possible without significantly
affecting performance.
The phase/retardance range values are for 30 °C when used with the LK220 liquid chiller.
Fluctuation / Flickering is the phase fluctuation as the percentage of the entire phase range and is dependent on the current phase setting. The value stated is
the maximum fluctuation and typically occurs at half of the phase range.
Exulus Spatial Light Modulators with WUXGA Resolution, High Power
Liquid Crystal on Silicon (LCoS) with an Aluminum
Coating for
400 - 850 nm or 650 - 1100 nm
1920 x 1200 (WUXGA) Resolution
High Power Handing: ≤200 W/cm
Liquid Cooling Module Included on SLM Head
Compatible with LK220 Thermoelectric Liquid Chiller
HDMI*-Compatible and USB 2.0 Input Connectors
SMA Trigger Output
Optic Axis: 0°
Housing Dimensions:
All-in-One: 220.0 mm x 104.0 mm x 68.0 mm
Separate-Panel: 420.0 mm x 104.0 mm x 42.0 mm
Thorlabs' High-Power Spatial Light Modulators (SLMs) are designed for applications requiring highly stable phase operation,
which include interferometry, quantum orbital angular momentum, and laser processing. To improve thermal stability and
allow for high-power handling (≤200 W/cm), these SLM units feature liquid cooling modules, which are compatible with the
Thorlabs LK220 Thermoelectric Liquid Chiller (sold below) or an equivalent chiller.
These Exulus models consist of three main parts: the main unit, an adapter board, and the SLM head. Each SLM head contains a liquid cooling module and an
integrated NTC thermistor, as well as two pre-installed 1/4" hoses with CPC®† valved quick-connect coupling inserts for connecting to the LK220 chiller. If additional
coupling inserts are needed, Thorlabs offers replacement items that are compatible with the high-power SLMs. The FPC connectors and a circuit board that connects
the main unit to the SLM head are housed in the adapter board.
As shown in the images above, these SLM devices can be mounted in either the All-in-One or Separate-Panel configuration. A Quick Start Guide with detailed
instructions on switching between the two modes is included with each unit. For mounting the Exulus in the All-in-One configuration, two sides of the housing each
offer two universal mounting holes that accept both 8-32 and M4 x 0.7 threads; please note that these mounting holes are separated by 75 mm. The adapter board
and SLM head each feature one universal mounting hole that accepts both 8-32 and M4 x 0.7 threads to accommodate mounting in the Separate-Panel configuration.
For tip and tilt adjustments of the SLM panel, the head can be mounted in a kinematic mount with a flat face plate, such as the POLARIS-K1E Ø1" Mirror Mount, using
the Ø1.00" (Ø25.4 mm) smooth mounting surface of the housing.
The SLM software (Thorlabs EXULUS software package) features temperature read out options when the Thorlabs LK220 chiller is connected. The sensor setting
can be set to internal or external, which reads the temperature of the output coolant or the thermistor in the SLM head, respectively. A status bar at the bottom of the
main software GUI displays the actual temperature reading from the chiller. Note that these functions are not available for third-party chillers, but the thermistor can be
read out by the TSP01 temperature logger or a third-party temperature reader with a compatible 2.5 mm stereo connector. If additional remote controls are needed for
operating the chiller, the LK220 Thermoelectric Liquid Chiller software should be used. Detailed performance specifications for the LK220 thermoelectric liquid chiller
can be found in the full web presentation.
*HDMI is a trademark or registered trademark of HDMI Licensing Administrator, Inc. The use of such trademark by Thorlabs does not constitute or imply any affiliation
with or endorsement or sponsorship by such trademark owner.
†CPC® is a registered trademark of Colder Products Company.
Part Number Description Price Availability
EXULUS-HD2HP Customer Inspired! Spatial Light Modulator, 1920 x 1200, 400 - 850 nm, Universal 8-32 / M4 Taps, High Power $16,713.09 Today
EXULUS-HD3HP Customer Inspired! Spatial Light Modulator, 1920 x 1200, 650 - 1100 nm, Universal 8-32 / M4 Taps, High Power $19,951.52 Today
LK220 Thermoelectric Liquid Chiller, 200 W $2,690.63 Today
a.
b.
c.
d.

EXULUS-HD1
First-Order Diraction E,iciency at 633 nm
0
■-
■-
■-
c 0
0
I
■
2StE
�
■
Line Pair/ mm
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