Brooks On-Board 8F User manual

On-Board®GLE Cryopump
Installation and Maintenance
Instructions
8040564 Revision AA

On-Board®GLE Cryopump
Installation and Maintenance Instructions
Brooks Automation
8040564 Revision AA
Information provided within this document is subject to change without notice, and although believed to be
accurate, Brooks Automation assumes no responsibility for any errors, omissions, or inaccuracies.
AcuLigner™, Align™, AquaTran™, AutoTeach™, ATR™, AXM™, Basic Blue™, BiSymmetrik™,
CenterSmart™, Cool Solutions™, Crate to Operate™, e-RMA™, e-Spares™, e-Volution™, FastRegen™,
FIXLOAD™, FrogLeg™, InLigner™, InCooler™, Interface™, Jet Engine™, LowProfile™, M2 Nano™,
Mini-Ion™, PASIV™, PowerPak™, PerformanceBlue™, PowerPak™, PowerTools™, QuadraFly™, Radius™,
Radient™, Radient Express™, Reliance™, Reliance ATR™, RetroEase™, SCARA™, SmartPM™,
SPOTLevel™, Synetics™, The New Pathway to Productivity™, Time Optimized Trajectory™, Time Optimal
Trajectory™, Time Optimized Path™, TopCooler™, TopLigner™, Ultimate Blue™, VAC-407™, VacuTran™,
Vacuum Quality Monitor™, VQM™, Vacuum Quality Index™, VQI™, and the Brooks logo are trademarks of
Brooks Automation, Inc.
AcuTran®, AquaTrap®, Conductron®, Convectron®, the Cool Solutions logo, Cryodyne®, Cryotiger®,
Cryo-Torr®, Fusion®, GOLDLink®, Granville-Phillips®, Guardian®, GUTS®, Helix®, Jet®, Leapfrog®,
MagnaTran®, MapTrak®, Marathon®, Marathon 2®, Marathon Express®, Micro-Ion®, MiniConvectron®,
On-Board®, Polycold®, Razor®, Simplicity Solutions®, the Simplicity Solutions logo, Stabil-Ion®, TrueBlue®,
TurboPlus®, Vision®, Zaris®, and the Brooks Automation logo are registered U.S. trademarks of Brooks
Automation, Inc.
All other trademarks are properties of their respective owners.
© 2013 Brooks Automation, Inc. All Rights Reserved. The information included in this manual is Proprietary
Information of Brooks Automation and is provided for the use of Brooks Automation customers only and cannot
be used for distribution, reproduction, or sale without the express written permission of Brooks Automation.
This information may be incorporated into the user documentation, however any changes made by the user to
this information is the responsibility of the user.
For Technical Support:
Visit us online: www.brooks.com
January 15, 2013 Part Num 8040564 Revision AA
This technology is subject to United States export Administration Regulations and authorized to the destination
only; diversion contrary to U.S. law is prohibited.
Printed in the U.S.A.
Location GUTS®Contact Number
North America +1-800-FOR-GUTS (1-800-367-4887)
[phone]
Europe +49-1804-CALL-GUTS ([phone])
Japan [phone]
China [phone]
Taiwan [phone]
Korea [phone]
Singapore [phone]

Cryo-Torr 8600 Compressor Operation, Installation and Maintenance Guide
©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 v
Table of Contents
Safety Conventions
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-1
Signal Word Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-1
Safety Shape Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-2
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-2
Section 1 - On-Board GLE Cryopump Description
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Installation, Operation, and Maintenance Instructions . . . . . . . . . . . . . . . . . . . . . . 1-1
Microprocessor-Based Control System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Power Conditioning Module Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
On-Board Vacuum Network Controller Module Option . . . . . . . . . . . . . . . . . . 1-6
Remote Operation Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Cold Head . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Vacuum Vessel and Arrays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Compressor Gas and Oil Flows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Section 2 - Installation
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
On-Board GLE Cryopump Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Vent Pipe Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Roughing Pump Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Rough Valve Gas Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Purge Gas Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
Helium Line Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
Auxiliary (AUX) TC Gauge Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
Setpoint Relays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
Remote Keypad/Display Installation (Optional) . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
Section 3 - Troubleshooting
Technical Inquiries . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Section 4 - Maintenance
Helium Circuit Decontamination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Background . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Equipment/Tools Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Method 1 - Decontaminate all On-Board GLE Cryopumps . . . . . . . . . . . . . . . 4-6

Cryo-Torr 8600 Compressor Operation, Installation and Maintenance Guide
vi ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541
Decontamination Alternatives . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
Method #1 Decontaminate All Cryopumps . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
Method # 2 Decontamination of Only Cold Cryopumps . . . . . . . . . . . . . . . . 4-11
Method # 3 Grouped Decontamination using Manifold . . . . . . . . . . . . . . . . . 4-11
On-Board GLE Cryopump Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14
Appendix A - Customer Support Information
Customer Support Center Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1
Guaranteed Up-Time Support (GUTS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1
Product Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1
E-mail . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1
Index
List of Figures
List of Tables

©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 vii
.
List of Figures
Figure 1-1: On-Board 8 and On-Board 8 GLE Cryopumps . . . . . . . . . . . . . . . . . . . 1-3
Figure 1-2: On-Board 8F GLE Cryopump with PCM . . . . . . . . . . . . . . . . . . . . . . . 1-5
Figure 1-3: On-Board 8F GLE Cryopump with Optional On-Board Vacuum Network
Controller Module. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
Figure 1-4: Typical On-Board 8 GLE Cryopump System . . . . . . . . . . . . . . . . . . . 1-12
Figure 1-5: Cutaway View of a Typical On-Board 8F GLE Cryopump Vessel. . . 1-13
Figure 1-6: Typical Flat On-Board 8 GLE Cryopump Component Identification . 1-14
Figure 1-7: Cutaway View of a Typical On-Board 8 GLE Cryopump Vessel. . . . 1-15
Figure 1-8: Typical On-Board 8 Cryopump Component Identification . . . . . . . . . 1-16
Figure 2-1: Block Diagram for On-Board GLE Cryopump Installation . . . . . . . . . 2-1
Figure 2-2: Setpoint Relays Connector Pin Identification . . . . . . . . . . . . . . . . . . . . 2-6
Figure 4-1:Decontamination Flowchart . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
Figure 4-2: On-Board GLE Cryopump Helium Supply and Return Lines. . . . . . . . 4-8
Figure 4-3: Maintenance Manifold Part Number 8032051G001 . . . . . . . . . . . . . . 4-13
Figure 4-4: Proper Helium Line Coupling Disconnection/Connection . . . . . . . . . 4-14

This Page Left Intentionally Blank

©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 ix
List of Tables
Table 1-1:On-Board 8 GLE Cryopump Specifications . . . . . . . . . . . . . . . . . . . . . . 1-8
Table 1-2:On-Board 8F GLE Cryopump Specifications . . . . . . . . . . . . . . . . . . . . . 1-9
Table 3-1:Cryopump Troubleshooting Procedures. . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Table 3-1:Troubleshooting Procedures (continued) . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Table 4-1:Methods of Decontamination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Table 4-2:Decontamination Tools and Equipment. . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

This Page Left Intentionally Blank

©2013 Brooks Automation Inc. Part Number 8040564, Revision AA, 01/15/13, ECO Number 64541 S-1
Safety Conventions
Introduction
Follow all safety precautions during installation, normal operation, and when
servicing CTI-Cryogenics products.
This chapter explains the safety conventions used throughout this manual.
CTI-Cryogenics uses a specific format for cautions and warnings, which includes
standard signal words and safety shapes.
See also the Customer Support appendix or call your local Customer Support
Center for assistance.
Signal Word Descriptions
CAUTION
A signal word accompanied by a safety shape
that indicates a potentially hazardous situation
or unsafe practice.
If not avoided, the action may result in minor
or moderate personal injury or equipment
damage. A CAUTION is highlighted in
yellow.
CAUTION
A signal word that indicates a situation or
unsafe practice, which if not avoided may
result in equipment damage. A CAUTION is
highlighted in yellow.
WA R N I N G
A signal word accompanied by a safety shape
that indicates indicates a potentially hazardous
situation.
If not avoided, the action may result in serious
injury or death. A WARNING is highlighted
in orange.
All cautions and warnings contain signal words, which call attention to safety
messages and designate the degree of hazard seriousness. The following table
shows the signal words and their meanings that may be used in this document.
Term Example Definition

Safety Shape Descriptions
S-2 Part Number 8040564, Revision AA, 01/15/13, ECO Number 64541 ©2013 Brooks Automation Inc.
Safety Shape Descriptions
Indicates a general hazard. Details about this
hazard appear in the safety notice explanation.
Indicates a high voltage hazard.
Indicates a surface is hot enough to cause
discomfort or a burn.
All cautions and warnings contain safety shapes, which have specific safety
meanings. The following table shows some of the safety shapes used in this
document and their meanings.
References
For more information about safety standards, see the following documents:
• ISO 7010: 2003(E), Graphic symbols - Safety colours and safety
signs - Safety signs used in workplaces and public areas
• ISO 3864-1: 2002(E), Graphic symbols - Safety colours and safety
signs - Part 1: Design principles for safety signs in workplaces and
public areas
Example Term Shape Definition
General Warning
High Voltage
Hot Surface

Cryo-Torr 8600 Compressor Operation, Installation and Maintenance Guide
©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 1-1
Section 1 - On-Board GLE Cryopump
Description
Introduction
On-Board GLE Cryopumps provide fast, clean pumping of all gases in the
10-3 to 10-9 torr range. They are available in two configurations; On-Board
8F (Flat) and On-Board 8 (Straight) as shown in Figure 1-1.
On-Board Cryopumps operate on the principle that gases can be condensed
and held at extremely low vapor pressures, achieving high speeds and
throughputs as described in Table 1-1.
On-Board Cryopumps are highly-reliable and rugged units that require
little maintenance. Since the On-Board Cryopump exposes no moving
parts, operating fluids, or backing pumps to the vacuum, the possibility of
system or process contamination from the On-Board Cryopump is
eliminated.
Installation, Operation, and Maintenance Instructions
On-Board 8 GLE Cryopump Installation, Operation, and Maintenance
Instructions provide easily accessible information. All personnel with
installation, operation, and maintenance responsibilities should become
familiar with the contents of these instructions to ensure safe, reliable, and
high performance.
Microprocessor-Based Control System
The On-Board 8 GLE Cryopump is equipped with a microprocessor-based
control system that allows you to both monitor and control a wide range of
important vacuum system functions. Operations are performed from either
a remote keypad control/display panel that can be connected to the
cryopump or from the production tool host computer. You can monitor and
control cooldown, warm-up, regeneration, etc.
Refer to the On-Board GLE Cryopump Module Programming and
Operation Instructions P/N 8040574 that came with your On-Board 8

1-2 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541
GLE Cryopump, for a complete description of the numerous operational
functions that are available.

Cryo-Torr 8600 Compressor Operation, Installation and Maintenance Guide
©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 1-3
Figure 1-1:
ON-BOARD 8F CRYOPUMP
ON-BOARD 8 CRYOPUMP
On-Board 8 and On-Board 8 GLE Cryopumps

1-4 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541
Power Conditioning Module Option
The Power Conditioning Module (PCM) provides power to the On-Board
GLE Cryopump from a customer provided 208 VAC, 50/60 Hz, single
phase power source. The PCM provides constant 3 phase 60 Hz power to
the On-Board GLE Cryopump regardless of input AC line voltage and
frequency fluctuations. The PCM is typically mounted under the
On-Board 8 GLE Cryopump Module to minimize the space required for
installation.

Cryo-Torr 8600 Compressor Operation, Installation and Maintenance Guide
©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 1-5
Figure 1-2: On-Board 8F GLE Cryopump with PCM
PCM
ON-BOARD 8F
GLE CRYOPUMP

1-6 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541
On-Board Vacuum Network Controller Module Option
The On-Board Vacuum Network Controller Module provides monitor and
control capability of multiple On-Board Pumps, turbo pumps, valves and
gauges from the production facility host computer.
The On-Board Vacuum Network Controller Module is typically mounted
on either side of the On-Board 8 GLE Cryopump Module to minimize the
space required for installation.
Refer to the On-Board Vacuum Network Controller Module
Installation and Operation Instructions, Helix Technology Corporation
P/N 8040565 for more information.
Figure 1-3: On-Board 8F GLE Cryopump with Optional On-Board Vacuum Network
Controller Module
ON-BOARD
PCM
ON-BOARD 8F
GLE CRYOPUMP
VACUUM
NETWORK
CONTROLLER
MODULE

Cryo-Torr 8600 Compressor Operation, Installation and Maintenance Guide
©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 1-7
Remote Operation Option
On-Board 8 GLE Cryopumps can be controlled remotely using either a
BITBUS™ or RS-232 protocol. The most common implementation, used
in multiple On-Board 8 GLE Cryopump process tools, is to network the
On-Board 8 GLE Cryopumps using the BITBUS™ protocol. In this
configuration, the networked On-Board 8 GLE Cryopumps are managed as
a group by the On-Board Vacuum Network Controller Module, which
coordinates group regeneration cycles and provides a standardized
communication link to the process tool host controller. Using this
approach, control of the networked On-Board 8 GLE Cryopumps is fully
integrated with process tool control.

1-8 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541
Specifications
Table 1-1: On-Board 8 GLE Cryopump Specifications
Parameter Specifications
Input Power 208 VAC 50/60 Hz
Rough Pump Connection NW 25 ISO KF
Integrated Hardware Keypad/Display
Roughing Valve
Purge Valve
Cryopump TC Gauge
1st Stage Diode
2nd Stage Diode
1st Stage Heater
2nd Stage Heater
2 Setpoint Relays
RS-232 Interface
Pumping Speeds:
Water
Air
Hydrogen
Argon
4000 liters/sec
1500 liters/sec
2200 liters/sec
1200 liters/sec
Argon Throughput 700 sccm (9 torr-liters/sec)
Capacity:
Argon
Hydrogen
1000 std. liters
12 std. liters @ 5 x 10-6 torr
Crossover 150 torr-liters
Cooldown Time 2 hours nominal
Dimensions Refer to Installation/Interface Drawing
Weight 63 lbs.

Cryo-Torr 8600 Compressor Operation, Installation and Maintenance Guide
©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 1-9
Theory of Operation
Each On-Board GLE Cryopump consists of a cold head and a vacuum
vessel as shown in Figure 1-4 or Figure 1-5. An 80K condensing array, a
15K array, cold head station heaters, and an 80K radiation shield are
located in the vacuum vessel. The cold station heaters and 15K array are
secured to the cold head, which is welded to the vacuum vessel. The cold
Table 1-2: On-Board 8F GLE Cryopump Specifications
Parameter Specifications
Input Power 208 VAC 50/60 Hz
Rough Pump Connection NW 25 ISO KF
Integrated Hardware Keypad/Display
Roughing Valve
Purge Valve
Cryopump TC Gauge
1st Stage Diode
2nd Stage Diode
1st Stage Heater
2nd Stage Heater
2 Setpoint Relays
RS-232 Interface
Pumping Speeds:
Water
Air
Hydrogen
Argon
4000 liters/sec
1500 liters/sec
2500 liters/sec
1200 liters/sec
Argon Throughput 700 sccm (9 torr-liters/sec)
Capacity:
Argon
Hydrogen
1000 std. liters
17 std. liters @ 5 x 10-6 torr
Crossover 150 torr-liters
Cooldown Time 2 hours nominal
Dimensions Refer to Installation/Interface Drawing
Weight 60 lbs.

1-10 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541
head provides cooling to the three arrays. Gases are removed from your
vacuum chamber, thereby creating a vacuum when they are condensed or
adsorbed on the cryogenically-cooled arrays.
Cold Head
The cold head consists of a two-stage cold head cylinder (part of the
vacuum vessel) and drive unit displacer assembly, that together produce
closed-cycle refrigeration at temperatures that range from 60 to 120K for
the first-stage cold station and 10 to 20K for the second-stage cold station,
depending on operating conditions. Within the drive unit displacer
assembly, the drive unit actuates the displacer-regenerator assembly
located in the cold head cylinder and thereby controls the flow of helium
into the cold head. Within the drive unit are located the crankcase and drive
motor, which is a direct-drive constant-speed motor, operating at 72 rpm on
60 Hz power and 60 rpm on 50 Hz power.
During operation, high pressure helium from the compressor enters the
cold head at the helium supply connector, and flows through the displacer-
regenerator assembly, crankcase, and motor housing before exiting through
the helium gas return connector and returning to the compressor. Helium
expansion in the displacer-regenerator assembly provides cooling at the
first and second stage cold stations.
Vacuum Vessel and Arrays
The 80K array, as shown in Figure 1-4 or Figure 1-5, condenses water and
hydrocarbon vapors. The 15K array condenses nitrogen, oxygen, and argon
while the specially processed charcoal of this array traps helium, hydrogen,
and neon. The temperature of the cold head stations to which the 15K array
and 80K radiation shield are attached, is measured by temperature sensors
and transmitted to the On-Board controller for display.
Compressor Gas and Oil Flows
Helium returning from the cryopump cold head enters the compressor, and
a small quantity of oil is injected into the gas stream, thereby overcoming
helium's low specific heat and inability to carry heat produced during
compression. Helium is then compressed and passed through a heat
exchanger for removal of compression-caused heat.
The helium continues its flow through an oil-mist separator and a charcoal
filter adsorber (cartridge), within the compressor, where oil and
contaminants are removed. A differential pressure relief valve in the
compressor limits the operating pressure differential between the helium
supply and return lines, thereby allowing compressor operation without