CTI-CRYOGENICS CRYO-TORR 4F Manual

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HELIX TECHNOLOGY CORPORATION
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TI CRYOGENICS
HELIX TECHNOLOGY CORPORATION
http://www.helixtechnology.com
Cryo-Torr® High-Vacuum Pump Installation,
Operation and Maintenance Instructions
8040613
Rev. A (4/2001)

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Cryo-Torr High-Vacuum Pump Installation, Operation and Maintenance Instructions
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Table of Contents
Section 1 - Cryo-Torr Cryopump Description
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Installation, Operation, and Service Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
Cold Head . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
Vacuum Vessel and Arrays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
Compressor Gas and Oil Flows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
Cryo-Torr Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
Section 2 - Installation
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Vent Pipe Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Roughing Pump Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Helium Return and Supply Line Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
Power Cable Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
Crossover Pressure Calculations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Optimizing Crossover Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
Cryo-Torr Cryopump Capacity Calculations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
Crossover Cycle Calculations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
Cryopump Start-up Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
Cryopump Shutdown Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
Cryopump Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
Section 3 - Regeneration
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
When to Regenerate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Assisted Regeneration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Section 4 - Troubleshooting
Troubleshooting the Cryopump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Technical Inquiries . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Section 5 - Maintenance Procedures
Helium Circuit Decontamination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
Cryo-Torr Cryopump Decontamination Procedures . . . . . . . . . . . . . . . . . . . . . . . . 5-1
Cleaning the Cryo-Torr Cryopump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3

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Table of Contents (continued)
Appendix A - Customer Support Centers
Figures
Figure 1-1: Cryo-Torr High-Vacuum Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
Figure 1-2: Cryo-Torr High-Vacuum Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Figure 1-3: Cutaway View of a Typical Cryo-Torr High-Vacuum Pump . . . . 1-13
Figure 1-4: Cryo-Torr Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
Figure 1-5: Typical Cryo-Torr System with 9000 Series Compressor . . . . . . 1-15
Figure 1-6: Typical Cryo-Torr System with 8200 Compressor . . . . . . . . . . . . 1-16
Figure 2-1: Block Diagram for Cryo-Torr System Installation . . . . . . . . . . . . . 2-1
Figure 2-2: Gas and Electrical Component Location on a Typical
Cryo-Torr Cryopump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
Tables
Table 1-1: Cryo-Torr 4F Cropump Specifications . . . . . . . . . . . . . . . . . . . . . . 1-4
Table 1-2: Cryo-Torr 8 Cryopump Specifications . . . . . . . . . . . . . . . . . . . . . . . 1-5
Table 1-3: Cryo-Torr 8F Cryopump Specifications . . . . . . . . . . . . . . . . . . . . . 1-6
Table 1-4: Cryo-Torr 10 Cryopump Specifications . . . . . . . . . . . . . . . . . . . . . . 1-7
Table 1-5: Cryo-Torr 100 Cryopump Specifications . . . . . . . . . . . . . . . . . . . . . 1-8
Table 1-6: Cryo-Torr 250F Cryopump Specifications . . . . . . . . . . . . . . . . . . . 1-9
Table 1-7: Cryo-Torr 400 Cryopump Specifications . . . . . . . . . . . . . . . . . . . . 1-10
Table 1-8: Cryo-Torr 500 Cryopump Specifications . . . . . . . . . . . . . . . . . . . . 1-11
Table 2-1: Crossover Values . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Table 2-2: Condensable Gases Capacity (Argon, Nitrogen, Oxygen, etc.) . . . . 2-7
Table 3-1: Required Accessories for Assisted Regeneration . . . . . . . . . . . . . . . 3-2
Table 4-1: Troubleshooting Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Table 5-1: Indium Gasket Screw Torque Specifications . . . . . . . . . . . . . . . . . . 5-4
Table A-1: Customer Support Centers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-2

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Section 1 - Cryo-Torr Cryopump Description
Introduction
Cryo-Torr High-Vacuum Pumps, shown in Figures 1-1 and 1-2, are one of
the two major components that make up the Cryo-Torr High-Vacuum
Pumping System. The second component is the Compressor. Instructions
for the compressor are contained in each compressor manual.
The Cryo-Torr High-Vacuum Pump provides fast, clean pumping of all
gases in the 10-3 to 10-9 torr range. The cryopump operates on the principle
that gases can be condensed and held at extremely low vapor pressures,
achieving high speeds and throughputs, as described in Tables
1-1 - 1-8.
Your Cryo-Torr High-Vacuum Pump is a highly-reliable and rugged unit
that requires a minimum of servicing. Since the cryopump exposes no
moving parts, operating fluids, or backing pumps to the vacuum, the
possibility of system or process contamination from the cryopump itself is
eliminated.
Installation, Operation, and Service Instructions
Installation, Operation and Maintenance Instructions for your Cryo-Torr
vacuum pump provides easily accessible information. All personnel with
installation, operation, and servicing responsibilities should become
familiar with the contents of these instructions to ensure safe, reliable
cryopump performance.

Cryo-Torr Cryopump Description
1-2 P/N8040613
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Figure 1-1: Cryo-Torr High-Vacuum Pumps
CRYO-TORR 8
CRYO-TORR 8F
CRYO-TORR 4F
CRYO-TORR 10

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Figure 1-2: Cryo-Torr High-Vacuum Pumps
CRYO-TORR 250F
CRYO-TORR 400
CRYO-TORR 100
CRYO-TORR 500

Cryo-Torr Cryopump Description
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Specifications
Table 1-1: Cryo-Torr 4F Cropump Specifications
Parameter Specifications
Rough Pump Connection NW 25 ISO KF
Integrated Hardware Second Stage Diode
Pumping Speeds: Water
Air
Hydrogen
Argon
1100 liters/sec
370 liters/sec
370 liters/sec
310 liters/sec
Argon Throughput 300 scc/min. (4 torr liters/seccond)
Capacity: Argon
Hydrogen 100 std. liters
3 std. liters @ 5 x 10-6 torr
Crossover 100 torr-liters
Cooldown Time 75 minutes nominal
Dimensions Length - 21.9 inches (556 mm)
Weight 46 lbs. (101.2 kg)

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Table 1-2: Cryo-Torr 8 Cryopump Specifications
Parameter Specifications
Rough Pump Connection NW 25 ISO KF
Integrated Hardware Second Stage Diode
Pumping Speeds: Water
Air
Hydrogen
Argon
4000 liters/sec
1500 liters/sec
2500 liters/sec
1200 liters/sec
Argon Throughput 700 scc/min. (8.9 torr liters/seccond)
Capacity: Argon
Hydrogen 1000 std. liters
12 std. liters @ 5 x 10-6 torr
Crossover 150 torr-liters
Cooldown Time 1.5 hours nominal
Dimensions Length - 20.7 inches (525.8mm)
Weight 45 lbs. (20.4 kg)

Cryo-Torr Cryopump Description
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Table 1-3: Cryo-Torr 8F Cryopump Specifications
Parameter Specifications
Rough Pump Connection NW 25 ISO KF
Integrated Hardware Second Stage Diode
Pumping Speeds: Water
Air
Hydrogen
Argon
4000 liters/sec
1500 liters/sec
2200 liters/sec
1200 liters/sec
Argon Throughput 700 scc/min. (8.9 torr liters/second)
Capacity: Argon
Hydrogen 1000 std. liters
8 std. liters @ 5 x 10-6 torr
Crossover 150 torr-liters
Cooldown Time 1.5 hours nominal
Dimensions Length - 22.6 inches (574 mm)
Weight 42 lbs. (19 kg)

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Table 1-4: Cryo-Torr 10 Cryopump Specifications
Parameter Specifications
Rough Pump Connection NW 25 ISO KF
Integrated Hardware Second Stage Diode
Pumping Speeds: Water
Air
Hydrogen
Argon
9000 liters/sec
3000 liters/sec
5000 liters/sec
2500 liters/sec
Argon Throughput 1500 scc/min. (19 torr liters/second)
Capacity: Argon
Hydrogen 2000 std. liters
24 std. liters @ 5 x 10-6 torr
Crossover 300 torr-liters
Cooldown Time 45 minutes nominal
Dimensions Length - 23.9 inches (607.1 mm)
Weight 85 lbs. (39 kg)

Cryo-Torr Cryopump Description
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Table 1-5: Cryo-Torr 100 Cryopump Specifications
Parameter Specifications
Rough Pump Connection NW 25 ISO KF
Integrated Hardware Second Stage Diode
Pumping Speeds: Water
Air
Hydrogen
Argon
1100 liters/sec
350 liters/sec
480 liters/sec
285 liters/sec
Argon Throughput 75 scc/min. (1 torr liter/second)
Capacity: Argon
Hydrogen 90 std. liters
2 std. liters @ 5 x 10-6 torr
Crossover 40 torr-liters
Cooldown Time 75 minutes nominal
Dimensions Length - 12.9 inches (328 mm)
Weight 22 lbs. (10 kg)

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Table 1-6: Cryo-Torr 250F Cryopump Specifications
Parameter Specifications
Rough Pump Connection NW 25 ISO KF
Integrated Hardware Second Stage Diode
Pumping Speeds: Water
Air
Hydrogen
Argon
9500 liters/sec
4000 liters/sec
6800 liters/sec
3300 liters/sec
Argon Throughput 1500 scc/min.
Capacity: Argon
Hydrogen 2000 std.
18 std. liters @ 5 x 10-6 torr
Crossover 300 torr-liters
Cooldown Time 1 hour, 40 minutes nominal
Dimensions Length - 12.21 in.
Maximum Width from Center Line - 22.49 in.
Weight 90 lbs.

Cryo-Torr Cryopump Description
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Table 1-7: Cryo-Torr 400 Cryopump Specifications
Parameter Specifications
Rough Pump Connection NW 25 ISO KF
Integrated Hardware Second Stage Diode
Pumping Speeds: Water
Air
Hydrogen
Argon
16,000 liters/sec
6000 liters/sec
12,000 liters/sec
5000 liters/sec
Argon Throughput 500 scc/min. (6.3 torr liters/second)
Capacity: Argon
Hydrogen 2500 std.
30 std. liters @ 5 x 10-6 torr
Crossover 300 torr-liters
Cooldown Time 2.5 hours nominal
Dimensions Length - 24.00 inches (328 mm)
Weight 160 lbs. (72.5 kg)

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Table 1-8: Cryo-Torr 500 Cryopump Specifications
Parameter Specifications
Rough Pump Connection NW 25 ISO KF
Integrated Hardware Second Stage Diode
Pumping Speeds: Water
Air
Hydrogen
Argon
30,000 liters/sec
10,000 liters/sec
10,000 liters/sec
8400 liters/sec
Argon Throughput 500 scc/min. (6.3 torr liters/second)
Capacity: Argon
Hydrogen 3000 std. liters; 1,500,000 torr-liters
16 std. liters @ 5 x 10-6 torr
Crossover 500 torr-liters
Cooldown Time 3 hours nominal
Dimensions Length - 23.84 inches (605.54 mm)
Weight 205 lbs. (93.0 kg)

Cryo-Torr Cryopump Description
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Theory of Operation
Your Cryo-Torr Cryopump consists of a cold head and a vacuum vessel. An
80K condensing array, a 15K array, cold head station heaters, and an 80K
radiation shield are located in the vacuum vessel. The cold station heaters
and 15K array are secured to the cold head, which is welded to the vacuum
vessel. The cold head provides cooling to the three arrays. Gases are
removed from your vacuum chamber, thereby creating a vacuum when
they are condensed or adsorbed on the cryogenically-cooled arrays.
Cold Head
The cold head consists of a two-stage cold head cylinder (part of the
vacuum vessel) and drive unit displacer assembly, that together produce
closed-cycle refrigeration at temperatures that range from 60 to 120K for
the first-stage cold station to 10 to 20K for the second-stage cold station,
depending on operating conditions. Within the drive unit displacer
assembly, the drive unit actuates the displacer-regenerator assembly
located in the cold head cylinder and thereby controls the flow of helium
into the cold head. Within the drive unit are located the crankcase and drive
motor, which is a direct-drive constant-speed motor, operating at 72 rpm on
60Hz power and 60 rpm on 50 Hz power.
During operation, high pressure helium from the compressor enters the
cold head at the helium supply connector, and flows through the displacer-
regenerator assembly, crankcase, and motor housing before exiting through
the helium gas return connector and returning to the compressor. Helium
expansion in the displacer-regenerator assembly provides cooling at the
first and second stage cold stations.
Vacuum Vessel and Arrays
The 80K condensing array, as shown in Figure 1-3, condenses water and
hydrocarbon vapors. The 15K array condenses nitrogen, oxygen, and argon
while the specially processed charcoal of this array traps helium, hydrogen,
and neon.

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Figure 1-3: Cutaway View of a Typical Cryo-Torr High-Vacuum Pump
GAS FLOW FROM USER’S
VACUUM SYSTEM INTO
INLET OF CRYOPUMP
MOUNTING FLANGE
80K CONDENSING
15K ARRAY
80K RADIATION SHIELD
VACUUM VESSEL
COLD HEAD CYLINDER
STANDPIPE FILTER
ARRAY

Cryo-Torr Cryopump Description
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Compressor Gas and Oil Flows
Helium returning from the cryopump cold head enters the compressor, and
a small quantity of oil is injected into the gas stream, thereby overcoming
helium’s low specific heat and inability to carry heat produced during
compression. Helium is then compressed and passed through a heat
exchanger for removal of compression-caused heat.
The helium continues its flow through an oil-mist separator and a charcoal
filter adsorber (cartridge), within the compressor, where oil and
contaminants are removed. A differential pressure relief valve in the
compressor limits the operating pressure differential between the helium
supply and return lines, thereby allowing compressor operation without
cold head operation. When cold head operation reaches a steady-stage
condition, further pressure regulation is unnecessary.
Cryo-Torr Interface
The Cryo-Torr Interface, shown in Figure 1-3, is required when;
connecting more than one Cryo-Torr Cryopump to a variety of
CTI-CRYOGENICS Compressors, or when connecting a single Cryo-Torr
Cryopump to the 9000 Series of compressors.
The Cryo-Torr Interface accepts input cryopump power from the
compressor and distributes it to a maximum of three Cryo-Torr
Cryopumps. The Cryo-Torr Interface also supports a Compressor Remote
feature which can be used to turn the Cryo-Torr Cryopumps off when the
compressor is turned off.
Figure 1-4: Cryo-Torr Interface

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Figure 1-5: Typical Cryo-Torr System with 9000 Series Compressor
USER’S
VACUUM
CHAMBER
CRYO-TORR POWER CABLE
HELIUM RETURN LINE
HELIUM SUPPLY LINE
9600 COMPRESSOR
CRYO-TORR 10
CRYOPUMP
ON-BOARD POWER CABLE
INTERFACE
CRYO-TORR
208 VAC
COOLING
WATER

Cryo-Torr Cryopump Description
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Figure 1-6: Typical Cryo-Torr System with 8200 Compressor
USER’S
VACUUM
CHAMBER
CRYO-TORR POWER CABLE
HELIUM RETURN LINE
HELIUM SUPPLY LINE
8200 COMPRESSOR
CRYO-TORR 8F
CRYOPUMP
208 VAC