horiba SEC-E431X User manual

MASS FLOW CONTROLLER
MASS FLOW METER
SEC/SEF-E431X/E441X (PTFE TYPE)
Instruction Manual
CODE: I031150800

Jun, 2012
©
2007
–
2012 HORIBA STEC, Co., Ltd.

1
CONTENTS
1. INTRODUCTION
2. SPECIFICATIONS
3. PRINCIPLEOFFUNCTIONING
4. EXTERNAL DIMENSIONS
5. CONNECTOR
6. HOWTOUSE
7. CONNECTIONS
8. PRECAUTIONSFORHANDLING
9. PRODUCTWARRANTY
10. CHEMICAL CONTENT INFORMATION
(THE SIX CHINA RoHS RESTRICTED MATERIALS)
2
2
3
4
5
6
7
8
9
10

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1. Introduction
Thank you for purchasing our mass flow controller SEC(SEF) -E400X series. Prior to using it,
please read this manual thoroughly to use it properly for a long period of time.
2. Specifications
2-1 Mass flow controller (SEC-E431X/SEC-E441X)
Type *1 SEC-E431X SEC-E441X
Standard flow rate range *2
(Full scale flow rate equivalent to N2) 50 / 100 SLM 200 SLM
Valve structure Closed when power is not supplied
Control range 5〜100% F.S.
Accuracy *3,*4 ±1.0% F.S.
Operating temperature 5〜45℃
Responsibility (T98) *5 Within 1second (typical)
Linearity *3 Within ±0.5% of F.S.
Repeatability *3 Within ±0.5% of F.S.
Operating differential pressure *6,*7 100〜300 kPa (D) 200〜350 kPa (D)
Maximum operating pressure *6 350 kPa (G)
Pressure resistance *6 1000 kPa (G)
Leak integrity *8 1×10-9 Pa･m3/sec (He) or less
Setting signal 0.25〜5V DC (Input impedance1 MΩor more)
Output signal 0〜5V DC (Minimum load resistance 2kΩ)
Power source +15V DC±5% 50mA , –15V DC±5% 200mA
Wetted material Stainless steel, Magnetic stainless steel,
Fluoro rubber, PTFE
Standard fittings 3/8inch Swagelok or equivalent
*1:This product is in conformity with RoHS directives.
*2:SLM denotes gas flow rate in l/min.
*3:Accuracy, linearity and repeatability are guaranteed for the calibration gas.
*4:Temperature for accuracy guarantee is in accordance with SEMI standard E56−1296.
*5:A time required to stay within the full scale ±2% from the minimum controllable flow rate.
*6:(D) indicates differential pressure. (G) indicates gauge pressure.
*7:The operation differential pressure may differ depending on the specifications.
*8:Mechanical leak rate (SEMI standard E16−90).

3
2-2 Mass flow meter(SEF-E431X/SEF-E441X)
Type *1 SEF-E431X SEF-E441X
Standard flow rate range *2
(Full scale flow rate equivalent to N2)50 / 100 SLM 200 SLM
Accuracy *3,*4 ±1.0% F.S.
Operating temperature 5〜45℃
Linearity *3 Within ±0.5% of F.S.
Repeatability *3 Within ±0.5% of F.S.
Operating differential pressure *5 Less than 300 kPa (D)
Maximum operating pressure *5 350 kPa (G)
Pressure resistance *5 1000 kPa (G)
Leak integrity *6 1×10-9 Pa･m3/sec (He) or less
Output signal 0〜5V DC (Minimum load resistance 2kΩ)
Power source +15V DC±5% 50mA , –15V DC±5% 200mA
Wetted material Stainless steel, Fluoro rubber
Standard fittings 3/8inch Swagelok or equivalent
*1:This product is in conformity with RoHS directives.
*2:SLM denotes gas flow rate in l/min.
*3:Accuracy, linearity and repeatability are guaranteed for the calibration gas.
*4:Temperature for accuracy guarantee is in accordance with SEMI standard E56−1296.
*5:(D) indicates differential pressure. (G) indicates gauge pressure.
*6:Mechanical leak rate (SEMI standard E16−90).
3. Principle of Functioning
The mass flow controller consists of a flow rate sensor, control valve, control circuit, etc.
If the gas flows, there will be a temperature difference between the upstream and down stream
of the sensor section, providing an output proportional to a mass flow rate.
Comparing this output with an external setting signal, the mass flow controller automatically
adjusts the opening of the valve so that the signal will match.
Sensor
Control Valve
Flow Rate Signal Output
(0〜5V DC ) Flow Rate Setting Signal
Input ( 0.25〜5V DC )
Comparison Control Circuit
Bridge Circuit
Bypass
Gas
A
mplifier Circuit
Correction Circuit Power source of
Control Valve

4
4. External Dimensions SEC(SEF)-E431X/E441X
【Top Connector Type】
【Side Connector Type】

5
5. Connector
Connector type : D-Subminiature 9-pin connector(M3 fitting screw type)
Connector Pin Connections List
PIN No. Signal
1 Valve opening/closing input *1
2 Flow rate output 0 to 5 VDC
(Min. load resistance 2kΩ)
3 +15VDC Power
4 Power COMMON *2
5 -15VDC Power
6 Setting input 0.25 to 5 VDC *1
(Input impedance 1MΩor more)
7 Signal COMMON *2
8 Valve test point *1,*3
9 N.C. *4
*1:N.C.(no connection) for SEF-E431X/E441X.
*2:In order to prevent COMMON voltage fluctuations due to a valve drive current, the power
COMMON terminal(Pin No.4) and signal COMMON terminal(Pin No.7) shall be
connected on the power supply side. Since they are not connected inside the MFC, be sure
to wire them separately and make them common on the power supply side.
*3:The valve test point(Pin No.8) is the terminal to monitor the voltage applied to the valve.
*4:No connection
*5:In order to prevent noise influence, use shielded cable.

6
6. Howtouse
1) Connect a gas line in the arrow direction given on the main body.
2) Make electrical connection in accordance with the Connector Pin Connections List. For
the DC power, use the following capacity:
+15V , 50mA and –15V , 200mA or more
3) After turning on the power, stop the gas and warm up the apparatus for about 5 minutes.
4) Start a gas supply a set voltage. Flow rate control will start according to the set voltage.
5) The set voltage to obtain a required flow rate value can be calculated by linear
conversion. Required flow rate
Setvoltage = ×5.000V
Full-scaleflowrate
6) Forced full opening(purging) / closing of the SEC-E400X main body control valve: The
valve is fully opened by connecting the supply voltage of +15V to the No.1 pin(valve
opening / closing input) of the main body connector, and fully closed by connecting the
supply voltage of –15V.
※In the normal state, open the No.1 pin(nothing connected).
Otherwise, flow rate control may fail if a certain signal is input.
7) Full closing function
The control valve of the SEC-E400X is fully closed by setting the voltage to 0(50mV or
less). Control is resumed by applying the set voltage of 200mV or more.
※An input from the No.1 pin has the highest priority.
8) Valve Test Point ( Valve Voltage Monitor)
The voltage applied to the control valve of the mass flow controller is output to between
the No.8 and No.5 pins of the connectors. Note that the minus(-) side of the valve voltage
monitor has the potential of –15V with respect to the power COMMON terminal.
An output voltage range is 0V(fully closed) to +15V(fully opened).
If the No.8 pin is monitored, referencing the power COMMON terminal, the difference
between +15V and the valve applied voltage will be output in terms of negative polarity.
An output voltage range is –15V(fully closed) to 0V(fully opened).
Since this voltage differs depending on the pressure or temperature used, monitor it as
just a guideline. A monitor output is not linear to a flow rate since the control valve has
hysterisis characteristics.
The voltage does not show an absolute amount. Assume that 0 to 15V correspond to 0 to
100% of the voltage applied to the control valve.
Note: Description 4) to 8) are not applied to SEF-E431X/E441X.
Valve Test Point
8
−15V
5
4 Power COMMON
Control Valve
Valve Voltage Monitor
(+)
(-)
-15V Valve
Applied Voltage

7
7. Connections
If the HORIBA STEC ’s peripheral devices are not used, connect according to the figure
below.

The connections marked with ※are necessary only when the respective functions are
required.
A control valve driving current(max 200mA) flows to the power COMMON line.
In order to prevent a voltage drop due to wiring be sure to wire the power COMMON line
and signal COMMON line separately and connect them on the power supply side.
Note: Pins no.1,6 and 8 are N.C. for SEF-E431X/E441X.
Open
Control
Close
※
SET
+15V
Power COMMON
-15V
1
2
3
4
5
6
7
8
9
Signal COMMON
Valve Test Point
N. C. ※
※
OUT

8
8. Precaution for Handling
1) Use the clean piping and make sure that it has no leak.
2) Supply the clean gas to the MFC, free from dust, mist, etc.
Dust and mist could cause a control failure due to deteriorated accuracy or clogging.
Use a filter of 0.1μm or less.
3) When attaching or removing the joint, fix the main body with a spanner, vice etc.
4) The internal valve of the MFC cannot provide complete shut off.
When complete shut off is required, install a shut off valve separately.
5) When the control valve in the MFC is fully open or when it’s out of control, the flow rate
of gas exceeds the indicated F.S. value.
6) A storage temperature range is 0 to 50℃. Do not store beyond these limits.
7) Do not disconnect/ reconnect a cable with the power turned on. It could cause a trouble.
8) Do not apply an excessive force to the main body or cable.
9) Do not apply an excessive pressure to the main body.
10) The withstand voltage for the set input is ±15V. Never apply a voltage beyond these
limits.
11) Never remove the MFC case especially while power is supplied.
12) The flow rate output of the SEC may be transitionally made within a range of the supply
voltage. Note the withstand voltage of the input device.
13) Do not turn on and off the power repeatedly in a short period. More than three seconds
should be kept before turning on the power again. Each 15v power source should be
turned on/off simultaneously. Partial power supply or signal input and
plugging/unplugging while power is supplied may cause trouble.
14) HORIBA STEC converts a flow rate value into 25℃,1013hPa(1atm) or
0℃,1013hPa(1atm) to calibrate.
Gas flow rate in the following states:
CCM, LM : 25℃, 1013hPa(1atm)
SCCM, SLM : 0℃, 1013hPa(1atm)
15) When you want to use non-calibration gas, consult us.

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9. Product Warranty
1) Warranty period
One year after shipment from HORIBA STEC. If the product has a trouble
and is returned to us within this period, we will repair it free from charge.
2) The scope of warranty is limited to the main body of the mass flow controller.
We are not responsible for the damages resulting from any trouble of the main body.
3) Warranty of the replacement parts.
90 days after replacement or the warranty period mentioned in 1), whichever is longer.
4) Exclusions from the warranty.
The following cases are excluded from the warranty :
①Troubles resulting from the irresistible forces such as natural disasters, and so on.
②Troubles resulting from wrong handling.
③When the apparatus is used or stored in an inadequate environment.
④When the apparatus is used beyond the rated specifications or remodeled.
⑤When it is determined that the trouble is not attributable to HORIBA STEC
responsibility.
Examples :
With highly corrosive gas used, when the facility has not been fully purged or
there is a leak from the gas line.
When the MFC is contaminated or clogged by the particle, mist, etc.
HORIBA STEC will disassemble and inspect the returned apparatus to determine
whether a repair should be charged or free from charge.
5) Where to contact
Contact our dealer or HORIBASTEC.
The information herein is subject to change without prior notice.

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10. Chemical Content Information(The Six China RoHS Restricted Materials)
产品中有毒有害物质或元素的名称及含量
Name and amount of toxic/hazardous substance or element used in a product
有毒有害物质或元素
Toxic/hazardous substance or element
部件名称
Unit name 铅
Lead
(Pb)
汞
Mercury
(Hg)
镉
Cadmium
(Cd)
六价铬
Hexavalent
chromium
(Cr (VI))
多溴联苯
Polybromo-
biphenyl
(PBB)
多溴二苯醚
Polybromo-
diphenyl ether
(PBDE)
印刷电路板
Printed board ×○×○○○
箱
Case ○○○○○○
机械零件部
Machine parts ×○○×○○
○:表示该有毒有害物质在该部件所有均质材料中的含量均在SJ/T11363-2006 标准规定的限量要求以下。
Denotes that the amount of the toxic or hazardous substance contained in all of the homogeneous
materials used in the component is below the limit on the acceptable amount stipulated in the
SJ/T11363-2006 standard.
×:表示该有毒有害物质至少在该部件的某一均质材料中的含量超出SJ/T SJ/T11363-2006 标准规定的
限量要求。
Denotes that the amount of the toxic or hazardous substance contained in any of the homogeneous
materials used in the component is above the limit on the acceptable amount stipulated in the
SJ/T11363-2006 standard.
环境保护使用期限标记的意义
Meaning of Environmental Protection Use Period Marking
本标记适用在中华人民共和国销售电子信息产品，标记中央的数字表示环境保护使用
期限的年数。(不是表示产品质量保证期间。) 只要遵守这个产品有关的安全和使用注
意事项，从制造日开始算起在这个年限内，不会给环境污染、人体和财产带来严重的影
响。