Kanomax FMT 9310 User manual

Part Number: 1979310 Version 1.0.1
Liquid NanoParticle Sizer System
Model 9310: User Manual

Liquid NanoParticle Sizer User Guide i Version 1.0.1
Liquid NanoParticle Sizer Model 9310: User Manual
Copyright © Kanomax FMT, Inc. 2020. All rights reserved.
Address:
Kanomax FMT, Inc.
4104 Hoffman Road
White Bear Lake, MN 55110-3708
USA
Phone Number:
651-762-7762
Fax Number:
651-762-7763
URL:
www.kanomaxfmt.com
The following is a history of the Liquid NanoParticle Sizer Model 9310 User Manual
(part number 1979310):
Version
Date
Change
Version 1.0
February, 2020
Version 1.0.1
May, 2020
Changed “network router” to Ethernet switch”
Added note about contacting network admin when
connecting to existing network
All trademarks appearing in this manual are the property of their respective owners
Kanomax FMT, Inc. may have patents or pending patent applications, trademarks,
copyrights, or other intellectual property rights covering subject matter in this
document. Providing you with this document does not give license to these patents,
trademarks, copyrights or the intellectual property except as expressly provided in a
written agreement from Kanomax FMT, Inc.
Kanolysis Download Access Passcode

Liquid NanoParticle Sizer User Guide ii Version 1.0.1
Limitation of Warranty and Liability
Kanomax FMT, Inc. offers a full 12-month repair or replacement warranty on all
products sold. Warranty covers defects resulting from design or manufacturing. If any
such product proves defective during this warranty period, Kanomax FMT, Inc., at its
option, either will repair the defective product without charge for parts and labor, or
will provide a replacement in exchange for the defective product. This warranty is
offered on a return to factory basis, with return shipping expense expressly at the cost of
the customer. Kanomax FMT, Inc. will pay the return shipping on any materials
repaired or replaced. Any repaired or replaced item assumes the remainder of the initial
warranty period. Kanomax FMT, Inc. warrants only to the extent of replacement or
repair of our products, and does not assume any responsibility for consequential
damages. No warranty is offered on accounts with past due balances. In order to obtain
service under this warranty, Customer must notify Kanomax FMT, Inc., of the defect
before the expiration of the warranty period and make suitable arrangements for the
performance of service. The Customer shall be responsible for packaging and shipping
the defective product to the service center designated by Kanomax FMT, Inc. with
shipping charges prepaid.
This warranty shall not apply to any defect, failure or damage caused by improper use
or improper or inadequate maintenance and care. Kanomax FMT, Inc. shall not be
obligated to furnish service under this warranty a) to repair damage resulting from
attempts by personnel other than Kanomax FMT, Inc. representatives to install, repair or
service the product; b) to repair damage resulting from improper use or connection to
incompatible equipment; or c) to service a product that has been modified or integrated
with other products when the effect of such modification or integration increases the
time or difficulty of servicing the product.
THIS WARRANTY IS GIVEN BY KANOMAX FMT, INC. WITH RESPECT TO THE
LISTED PRODUCTS IN LIEU OF ANY OTHER WARRANTIES, EXPRESS OR IMPLIED.
KANOMAX FMT, INC.AND ITS VENDORS DISCLAIM ANY IMPLIED WARRANTIES
OF MERCHANTABILITY OR FITNESS FOR APARTICULAR PURPOSE. KANOMAX
FMT, INC.RESPONSIBILITY TO REPAIR OR REPLACE DEFECTIVE PRODUCTS IS
THE SOLE AND EXCLUSIVE REMEDY PROVIDED TO THE CUSTOMER FOR
BREACH OF THIS WARRANTY. KANOMAX FMT, INC.AND ITS VENDORS WILL NOT
BE LIABLE FOR ANY INDIRECT, SPECIAL, INCIDENTAL, OR CONSEQUENTIAL
DAMAGES IRRESPECTIVE OF WHETHER KANOMAX FMT, INC.OR THE VENDOR
HAS ADVANCE NOTICE OF THE POSSIBILITY OF SUCH DAMAGES.
Service Policy
Knowing that inoperative or defective instruments are a detriment to our customers’
satisfaction, our service policy is to give prompt attention to any known problems. If
you discover any malfunction of the Liquid NanoParticle Sizer, contact Kanomax FMT,
Inc. at 651-762-7762 (USA). If you are outside of the USA, please call your authorized
distributor.

Liquid NanoParticle Sizer User Guide iii Version 1.0.1
Table of Contents
About This Manual.................................................................................................................1
Intended Audience ..............................................................................................................1
Scope of User Manual..........................................................................................................1
Definitions ............................................................................................................................1
Safety and Handling Procedures...........................................................................................2
Safety Signals........................................................................................................................2
Warnings...............................................................................................................................3
How the Liquid NanoParticle Sizer Works..........................................................................4
Applications .........................................................................................................................5
Acknowledgement...............................................................................................................5
How to Install the Liquid NanoParticle Sizer Model 9310 ................................................7
Installation Overview ..........................................................................................................7
Unpacking the NanoParticle Nebulizer .............................................................................7
Unpacking the Annular Flow Ion Mobility Classifier.......................................................8
Unpacking the Fast CPC......................................................................................................9
Unpacking the LNS Accessory Kit .....................................................................................9
Equipment You Need ........................................................................................................11
Flaring a Tube.....................................................................................................................12
Installing the NanoParticle Nebulizer..............................................................................12
Connecting the Water Drain ...................................................................................................... 13
Connecting the Compressed Air or Nitrogen Supply.............................................................. 14
Connecting the Power ................................................................................................................ 15
Connecting the Ultrapure Water Supply .................................................................................. 15
Connecting the Sample Inlet...................................................................................................... 16
Controlling the External Injection Pump with the NanoParticle Nebulizer ........................... 18
Warming Up the Nebulizer ....................................................................................................... 19
Installing the Annular Flow Ion Mobility Classifier .......................................................20
Connecting Gas Port B to Gas Port C ........................................................................................ 22
Connecting CDA to Gas Port A ................................................................................................. 22
Connecting the Exhaust.............................................................................................................. 23
Connecting the Power ................................................................................................................ 23
Connecting the Aerosol Input.................................................................................................... 24
Connecting the Aerosol Outlet .................................................................................................. 25
Installing the Fast CPC ......................................................................................................27
Connecting the AFIMC .............................................................................................................. 29
Connecting the n-Butanol Supply ............................................................................................. 30
Connecting the Exhaust.............................................................................................................. 31
Connecting Make-Up Air........................................................................................................... 32
Connecting the Power ................................................................................................................ 34
Connecting the BNC Cable ........................................................................................................ 34
Warming Up the Fast CPC......................................................................................................... 36
Installing the Kanolysis Model S330 Software.................................................................37
Installing the Kanolysis Software .............................................................................................. 37
Upgrading the Kanolysis Software............................................. Error! Bookmark not defined.

Liquid NanoParticle Sizer User Guide iv Version 1.0.1
Installing the Local Network.............................................................................................40
Operation Instructions..........................................................................................................44
Checking the Status ...........................................................................................................44
Changing the NanoParticle Nebulizer Settings...............................................................44
Changing the Date and/or Time ................................................................................................ 45
Changing the NanoParticle Nebulizer Network Settings........................................................ 47
Setting Control for the Injection Pump ..................................................................................... 48
Changing the AFIMC Settings ..........................................................................................50
Changing the Device Settings .................................................................................................... 50
Changing the Date and/or Time ................................................................................................ 52
Changing the AFIMC Network Settings................................................................................... 53
Turning AFIMC Data Logging On ............................................................................................ 54
Changing the Fast CPC Settings .......................................................................................55
Changing the Date and/or Time ................................................................................................ 55
Changing the Fast CPC Network Settings ................................................................................ 57
Changing the Fast CPC Flow Settings....................................................................................... 58
Configuring Kanolysis Software for LNS Measurements...............................................60
Adding Liquid NanoParticle Sizer Devices .............................................................................. 61
Adding an LNS System for Measurements............................................................................... 65
Adding Samples for LNS Analyses ........................................................................................... 68
Defining Methods for LNS Analyses......................................................................................... 70
Creating a New Experiment for LNS Analyses ........................................................................ 73
Editing an Existing Experiment for LNS Analyses................................................................... 78
Performing a Volume Standard Calibration for LNS Analyses............................................... 79
How to Shut Down the Liquid NanoParticle Sizer System for Moving or Shipping ..87
Preparing the NanoParticle Nebulizer for Shipping.......................................................87
Preparing the AFIMC for Shipping ..................................................................................88
Preparing the Fast CPC for Shipping ...............................................................................88
Appendix A: Liquid NanoParticle Sizer Model 9310 Specifications ..............................89
Index .......................................................................................................................................91

About This Manual
Liquid NanoParticle Sizer User Guide 1 Version 1.0.1
About This Manual
Intended Audience
The Liquid NanoParticle Sizer Model 9310 User Manual is intended to be
used by qualified personnel (such as technicians and engineers) in a
laboratory setting.
Scope of User Manual
This user manual contains detailed instructions for the installation and set up
of the Liquid NanoParticle Sizer Model 9310. The manual also contains an
explanation of how the nebulizer works.
Definitions
▪AC: Alternating Current
▪AFIMC: Annular Flow Ion Mobility Classifier
▪CDA: Clean Dry Air
▪CMP: Chemical Mechanical Planarization
▪DNVR: Dissolved Non-volatile Residue
▪EU: European Union
▪FCPC: Fast Condensation Particle Counter
▪IPv4: Internet Protocol Version 4
▪kPa: Kilo Pascals
▪LNS: Liquid NanoParticle Sizer
▪mA: Milliamperes
▪NPN: NanoParticle Nebulizer
▪NVR: Non-volatile Residue
▪PEEK: Polyether Ether Ketone (high purity, chemical resistant plastic)
▪PFA: Perfluoralkoxy (high purity, chemical resistant plastic)
▪PLC: Programmable Logic Controller
▪PNVR: Precipitated Non-volatile Residue
▪PSD: Particle Size Distributions
▪psi: Pounds per Square Inch
▪PTFE: Polytetrafluoroethylene (high purity, chemical resistant plastic)
▪TCP: Transmission Control Protocol
▪UPW: Ultrapure Water
▪USB: Universal Serial Bus
▪VAC/VDC: Volts Alternating Current/Volts Direct Current

Liquid NanoParticle Sizer: Safety and Handling Procedures
Liquid NanoParticle Sizer User Guide 2 Version 1.0.1
Safety and Handling Procedures
Read this section to learn safe handling procedures for the Liquid
NanoParticle Sizer.
There are limited user-serviceable parts inside the Liquid NanoParticle Sizer:
all repair and maintenance must be performed by a qualified service
technician.
When working with the Liquid NanoParticle Sizer:
▪Do not remove any parts from the instrument unless this manual tells
you to do so.
▪Do not remove the instrument housing or covers while power is
supplied to the instrument.
Safety Signals
The following warning symbols and labels are used in the documentation
and on the Liquid NanoParticle Sizer. Follow the procedures described in
this manual to use the instrument safely.
Warning
Warnings are used for the following purposes:
▪To indicate that unsafe use of the instrument could result in serious
injury to you or cause irrevocable damage to the instrument.
▪To indicate that if you do not follow the procedures described in this
manual, you may damage the instrument.
▪To draw attention to important information about the operation and
maintenance of the Liquid NanoParticle Sizer.
High Voltage Sticker
A High Voltage warning sticker attached to the Liquid NanoParticle Sizer
warns you that un-insulated voltage within the instrument may be sufficient
to give you an electric shock. Do not make contact with any part inside the
instrument.
Grounding Connection Sticker
A Grounding Connection sticker attached to the Liquid NanoParticle Sizer
indicates that the nebulizer is connected to earth ground and cabinet ground.

Liquid NanoParticle Sizer: Safety and Handling Procedures
Liquid NanoParticle Sizer User Guide 3 Version 1.0.1
Warnings
Please familiarize yourself with the following warnings before operating the
Liquid NanoParticle Sizer:
▪The Liquid NanoParticle Sizer must be used following manufacturer’s
specifications otherwise safety cannot be guaranteed.
▪All service work must be performed by qualified service technicians -
only qualified service technicians should remove the cover.
▪When the nebulizer is running, there are hot surfaces inside the
device. Do not remove the cover at any time unless you are a qualified
service technician.
▪To prevent electric shocks, ensure that all electrical outlets are
grounded.
▪The aerosol particles created by the Model 9310 Liquid NanoParticle
Sizer may pose a health risk if inhaled. If not connected to other
instrumentation, vent the aerosol output to a fume hood.
▪Follow the instructions for all inlet and outlet connections. Incorrect
connections will cause the nebulizer to malfunction.
▪The air or nitrogen supplied to the nebulizer must be clean, dried, oil-
free and regulated at 50-60 psi.
▪During normal operation, do not tilt the nebulizer at angles >10.
▪You must drain the nebulizer before you move or ship it. Do not ship
an undried/undrained nebulizer back to Kanomax FMT, Inc.: doing so
might damage the device and invalidate the warranty.
▪Do not subject an undrained nebulizer to freezing temperatures:
doing so might damage the device and invalidate the warranty.

Liquid Nanoparticle Sizer: How It Works
Liquid NanoParticle Sizer User Guide 4 Version 1.0.1
How the Liquid NanoParticle Sizer Works
The LNS is a fully integrated three-stage system incorporating a NanoParticle
Nebulizer (NPN), an Annular Flow Ion Mobility Classifier (AFIMC) and a
Fast Condensation Particle Counter (Fast CPC) to measure particles as small
as 5 nm.
A sample of a liquid colloid suspension is introduced to the NPN through an
online direct-feed method or using a peristaltic pump or autosampler. The
sample can be diluted before introduction to reduce coagulation time and
minimize contamination. The sample is nebulized and the largest droplets,
which may contain multiple particles, are removed. The nebulized sample is
heated to evaporate the water leaving an aerosol of particles suspended in
the carrier gas. The aerosol is then combined with clean, dry air. Up to 1.5
L/min of dry aerosol flow can be drawn from the aerosol outlet.
The aerosol particles are electrically charged using a safe and reliable soft x-
ray charger. The AFIMC sorts the particles by size in an electric field and is
capable of classifying particles from 5-500 nm in size. Using varying electric
field strength, the AFIMC systematically selects particles of a narrow size
band and passes them on to a Fast CPC.
The Fast CPC immediately counts the concentration of particles in selected
size bands and detects individual particles with a dynamic concentration
range over three orders of magnitude. Unlike competing particle
measurement technologies, the LNS provides actual, not relative, particle
concentration.
Figure 1: Aerosolization coupled with Ion Mobility Spectrometry to measure
nanoparticle size distribution in liquid.

Liquid Nanoparticle Sizer: How It Works
Liquid NanoParticle Sizer User Guide 5 Version 1.0.1
The Liquid NanoParticle Sizer system offers the following advantages over
existing liquid particle size distribution characterization technology:
▪Combines proven techniques (used by NIST and AIST, Japan) for
counting and sizing aerosol size distributions with a unique nebulizer
technology to successfully measure particle size and number
concentration in concentrated liquid suspensions.
▪Offers greater accuracy, better precision, and improved resolution in
CMP slurry size-measurement results (used extensively in the
semiconductor industry).
▪Straightforward data inversion without complex inversion routines,
assumptions or size calibrations. The software can identify each
particle-size mode and assigns a cumulative size at 10%, 50% and 90%
of the distribution. Changes in the size of a specific mode can be
easily monitored with these size statistics.
▪Does not make assumptions about the shape of the particle size
distributions and measures actual number concentrations not relative
particle concentrations. (Instruments that provide relative particle
concentrations can lead to significant misinterpretations when
comparing different samples because they only provide
measurements of relative concentrations within each sample.)
▪Cited in three SEMI Guides. In SEMI C92 the LNS is used to
determine the quality of ion exchange resin. In SEMI C79 the LNS
evaluates the efficiency of sub-15 nanometer filters used in ultrapure
water distribution systems. No other particle instrumentation is
capable of making the required measurements described by SEMI
C79. In SEMI C98 the LNS, as a system consisting of nebulization and
particle counting after electrical mobility size classification, is
recommended for its accuracy in characterizing particle size
distributions (PSD) for chemical mechanical planarization (CMP)
slurries.
Applications
▪Analyzing Chemical-Mechanical Polishing (CMP) slurries.
▪Characterizing the filtration performance of liquid filter media.
▪Analyzing drugs and other medical nanoparticles in water.
▪Analyzing environmental water samples.
Acknowledgement
The ultrafine nebulization method used in this device is based on technology
licensed from CT Associates, Inc. (CTA). We offer our sincere thanks to Don
Grant, Gary Van Schooneveld, and Mark Litchy for their invention, their