Kanomax FMT 9310 User manual

Part Number: 1979310 Version 1.0.1
Liquid NanoParticle Sizer System
Model 9310: User Manual

Liquid NanoParticle Sizer User Guide i Version 1.0.1
Liquid NanoParticle Sizer Model 9310: User Manual
Copyright © Kanomax FMT, Inc. 2020. All rights reserved.
Address:
Kanomax FMT, Inc.
4104 Hoffman Road
White Bear Lake, MN 55110-3708
USA
Phone Number:
651-762-7762
Fax Number:
651-762-7763
URL:
www.kanomaxfmt.com
The following is a history of the Liquid NanoParticle Sizer Model 9310 User Manual
(part number 1979310):
Version
Date
Change
Version 1.0
February, 2020
Version 1.0.1
May, 2020
Changed “network router” to Ethernet switch”
Added note about contacting network admin when
connecting to existing network
All trademarks appearing in this manual are the property of their respective owners
Kanomax FMT, Inc. may have patents or pending patent applications, trademarks,
copyrights, or other intellectual property rights covering subject matter in this
document. Providing you with this document does not give license to these patents,
trademarks, copyrights or the intellectual property except as expressly provided in a
written agreement from Kanomax FMT, Inc.
Kanolysis Download Access Passcode

Liquid NanoParticle Sizer User Guide ii Version 1.0.1
Limitation of Warranty and Liability
Kanomax FMT, Inc. offers a full 12-month repair or replacement warranty on all
products sold. Warranty covers defects resulting from design or manufacturing. If any
such product proves defective during this warranty period, Kanomax FMT, Inc., at its
option, either will repair the defective product without charge for parts and labor, or
will provide a replacement in exchange for the defective product. This warranty is
offered on a return to factory basis, with return shipping expense expressly at the cost of
the customer. Kanomax FMT, Inc. will pay the return shipping on any materials
repaired or replaced. Any repaired or replaced item assumes the remainder of the initial
warranty period. Kanomax FMT, Inc. warrants only to the extent of replacement or
repair of our products, and does not assume any responsibility for consequential
damages. No warranty is offered on accounts with past due balances. In order to obtain
service under this warranty, Customer must notify Kanomax FMT, Inc., of the defect
before the expiration of the warranty period and make suitable arrangements for the
performance of service. The Customer shall be responsible for packaging and shipping
the defective product to the service center designated by Kanomax FMT, Inc. with
shipping charges prepaid.
This warranty shall not apply to any defect, failure or damage caused by improper use
or improper or inadequate maintenance and care. Kanomax FMT, Inc. shall not be
obligated to furnish service under this warranty a) to repair damage resulting from
attempts by personnel other than Kanomax FMT, Inc. representatives to install, repair or
service the product; b) to repair damage resulting from improper use or connection to
incompatible equipment; or c) to service a product that has been modified or integrated
with other products when the effect of such modification or integration increases the
time or difficulty of servicing the product.
THIS WARRANTY IS GIVEN BY KANOMAX FMT, INC. WITH RESPECT TO THE
LISTED PRODUCTS IN LIEU OF ANY OTHER WARRANTIES, EXPRESS OR IMPLIED.
KANOMAX FMT, INC.AND ITS VENDORS DISCLAIM ANY IMPLIED WARRANTIES
OF MERCHANTABILITY OR FITNESS FOR APARTICULAR PURPOSE. KANOMAX
FMT, INC.RESPONSIBILITY TO REPAIR OR REPLACE DEFECTIVE PRODUCTS IS
THE SOLE AND EXCLUSIVE REMEDY PROVIDED TO THE CUSTOMER FOR
BREACH OF THIS WARRANTY. KANOMAX FMT, INC.AND ITS VENDORS WILL NOT
BE LIABLE FOR ANY INDIRECT, SPECIAL, INCIDENTAL, OR CONSEQUENTIAL
DAMAGES IRRESPECTIVE OF WHETHER KANOMAX FMT, INC.OR THE VENDOR
HAS ADVANCE NOTICE OF THE POSSIBILITY OF SUCH DAMAGES.
Service Policy
Knowing that inoperative or defective instruments are a detriment to our customers’
satisfaction, our service policy is to give prompt attention to any known problems. If
you discover any malfunction of the Liquid NanoParticle Sizer, contact Kanomax FMT,
Inc. at 651-762-7762 (USA). If you are outside of the USA, please call your authorized
distributor.

Liquid NanoParticle Sizer User Guide iii Version 1.0.1
Table of Contents
About This Manual.................................................................................................................1
Intended Audience ..............................................................................................................1
Scope of User Manual..........................................................................................................1
Definitions ............................................................................................................................1
Safety and Handling Procedures...........................................................................................2
Safety Signals........................................................................................................................2
Warnings...............................................................................................................................3
How the Liquid NanoParticle Sizer Works..........................................................................4
Applications .........................................................................................................................5
Acknowledgement...............................................................................................................5
How to Install the Liquid NanoParticle Sizer Model 9310 ................................................7
Installation Overview ..........................................................................................................7
Unpacking the NanoParticle Nebulizer .............................................................................7
Unpacking the Annular Flow Ion Mobility Classifier.......................................................8
Unpacking the Fast CPC......................................................................................................9
Unpacking the LNS Accessory Kit .....................................................................................9
Equipment You Need ........................................................................................................11
Flaring a Tube.....................................................................................................................12
Installing the NanoParticle Nebulizer..............................................................................12
Connecting the Water Drain ...................................................................................................... 13
Connecting the Compressed Air or Nitrogen Supply.............................................................. 14
Connecting the Power ................................................................................................................ 15
Connecting the Ultrapure Water Supply .................................................................................. 15
Connecting the Sample Inlet...................................................................................................... 16
Controlling the External Injection Pump with the NanoParticle Nebulizer ........................... 18
Warming Up the Nebulizer ....................................................................................................... 19
Installing the Annular Flow Ion Mobility Classifier .......................................................20
Connecting Gas Port B to Gas Port C ........................................................................................ 22
Connecting CDA to Gas Port A ................................................................................................. 22
Connecting the Exhaust.............................................................................................................. 23
Connecting the Power ................................................................................................................ 23
Connecting the Aerosol Input.................................................................................................... 24
Connecting the Aerosol Outlet .................................................................................................. 25
Installing the Fast CPC ......................................................................................................27
Connecting the AFIMC .............................................................................................................. 29
Connecting the n-Butanol Supply ............................................................................................. 30
Connecting the Exhaust.............................................................................................................. 31
Connecting Make-Up Air........................................................................................................... 32
Connecting the Power ................................................................................................................ 34
Connecting the BNC Cable ........................................................................................................ 34
Warming Up the Fast CPC......................................................................................................... 36
Installing the Kanolysis Model S330 Software.................................................................37
Installing the Kanolysis Software .............................................................................................. 37
Upgrading the Kanolysis Software............................................. Error! Bookmark not defined.

Liquid NanoParticle Sizer User Guide iv Version 1.0.1
Installing the Local Network.............................................................................................40
Operation Instructions..........................................................................................................44
Checking the Status ...........................................................................................................44
Changing the NanoParticle Nebulizer Settings...............................................................44
Changing the Date and/or Time ................................................................................................ 45
Changing the NanoParticle Nebulizer Network Settings........................................................ 47
Setting Control for the Injection Pump ..................................................................................... 48
Changing the AFIMC Settings ..........................................................................................50
Changing the Device Settings .................................................................................................... 50
Changing the Date and/or Time ................................................................................................ 52
Changing the AFIMC Network Settings................................................................................... 53
Turning AFIMC Data Logging On ............................................................................................ 54
Changing the Fast CPC Settings .......................................................................................55
Changing the Date and/or Time ................................................................................................ 55
Changing the Fast CPC Network Settings ................................................................................ 57
Changing the Fast CPC Flow Settings....................................................................................... 58
Configuring Kanolysis Software for LNS Measurements...............................................60
Adding Liquid NanoParticle Sizer Devices .............................................................................. 61
Adding an LNS System for Measurements............................................................................... 65
Adding Samples for LNS Analyses ........................................................................................... 68
Defining Methods for LNS Analyses......................................................................................... 70
Creating a New Experiment for LNS Analyses ........................................................................ 73
Editing an Existing Experiment for LNS Analyses................................................................... 78
Performing a Volume Standard Calibration for LNS Analyses............................................... 79
How to Shut Down the Liquid NanoParticle Sizer System for Moving or Shipping ..87
Preparing the NanoParticle Nebulizer for Shipping.......................................................87
Preparing the AFIMC for Shipping ..................................................................................88
Preparing the Fast CPC for Shipping ...............................................................................88
Appendix A: Liquid NanoParticle Sizer Model 9310 Specifications ..............................89
Index .......................................................................................................................................91

About This Manual
Liquid NanoParticle Sizer User Guide 1 Version 1.0.1
About This Manual
Intended Audience
The Liquid NanoParticle Sizer Model 9310 User Manual is intended to be
used by qualified personnel (such as technicians and engineers) in a
laboratory setting.
Scope of User Manual
This user manual contains detailed instructions for the installation and set up
of the Liquid NanoParticle Sizer Model 9310. The manual also contains an
explanation of how the nebulizer works.
Definitions
▪AC: Alternating Current
▪AFIMC: Annular Flow Ion Mobility Classifier
▪CDA: Clean Dry Air
▪CMP: Chemical Mechanical Planarization
▪DNVR: Dissolved Non-volatile Residue
▪EU: European Union
▪FCPC: Fast Condensation Particle Counter
▪IPv4: Internet Protocol Version 4
▪kPa: Kilo Pascals
▪LNS: Liquid NanoParticle Sizer
▪mA: Milliamperes
▪NPN: NanoParticle Nebulizer
▪NVR: Non-volatile Residue
▪PEEK: Polyether Ether Ketone (high purity, chemical resistant plastic)
▪PFA: Perfluoralkoxy (high purity, chemical resistant plastic)
▪PLC: Programmable Logic Controller
▪PNVR: Precipitated Non-volatile Residue
▪PSD: Particle Size Distributions
▪psi: Pounds per Square Inch
▪PTFE: Polytetrafluoroethylene (high purity, chemical resistant plastic)
▪TCP: Transmission Control Protocol
▪UPW: Ultrapure Water
▪USB: Universal Serial Bus
▪VAC/VDC: Volts Alternating Current/Volts Direct Current

Liquid NanoParticle Sizer: Safety and Handling Procedures
Liquid NanoParticle Sizer User Guide 2 Version 1.0.1
Safety and Handling Procedures
Read this section to learn safe handling procedures for the Liquid
NanoParticle Sizer.
There are limited user-serviceable parts inside the Liquid NanoParticle Sizer:
all repair and maintenance must be performed by a qualified service
technician.
When working with the Liquid NanoParticle Sizer:
▪Do not remove any parts from the instrument unless this manual tells
you to do so.
▪Do not remove the instrument housing or covers while power is
supplied to the instrument.
Safety Signals
The following warning symbols and labels are used in the documentation
and on the Liquid NanoParticle Sizer. Follow the procedures described in
this manual to use the instrument safely.
Warning
Warnings are used for the following purposes:
▪To indicate that unsafe use of the instrument could result in serious
injury to you or cause irrevocable damage to the instrument.
▪To indicate that if you do not follow the procedures described in this
manual, you may damage the instrument.
▪To draw attention to important information about the operation and
maintenance of the Liquid NanoParticle Sizer.
High Voltage Sticker
A High Voltage warning sticker attached to the Liquid NanoParticle Sizer
warns you that un-insulated voltage within the instrument may be sufficient
to give you an electric shock. Do not make contact with any part inside the
instrument.
Grounding Connection Sticker
A Grounding Connection sticker attached to the Liquid NanoParticle Sizer
indicates that the nebulizer is connected to earth ground and cabinet ground.

Liquid NanoParticle Sizer: Safety and Handling Procedures
Liquid NanoParticle Sizer User Guide 3 Version 1.0.1
Warnings
Please familiarize yourself with the following warnings before operating the
Liquid NanoParticle Sizer:
▪The Liquid NanoParticle Sizer must be used following manufacturer’s
specifications otherwise safety cannot be guaranteed.
▪All service work must be performed by qualified service technicians -
only qualified service technicians should remove the cover.
▪When the nebulizer is running, there are hot surfaces inside the
device. Do not remove the cover at any time unless you are a qualified
service technician.
▪To prevent electric shocks, ensure that all electrical outlets are
grounded.
▪The aerosol particles created by the Model 9310 Liquid NanoParticle
Sizer may pose a health risk if inhaled. If not connected to other
instrumentation, vent the aerosol output to a fume hood.
▪Follow the instructions for all inlet and outlet connections. Incorrect
connections will cause the nebulizer to malfunction.
▪The air or nitrogen supplied to the nebulizer must be clean, dried, oil-
free and regulated at 50-60 psi.
▪During normal operation, do not tilt the nebulizer at angles >10.
▪You must drain the nebulizer before you move or ship it. Do not ship
an undried/undrained nebulizer back to Kanomax FMT, Inc.: doing so
might damage the device and invalidate the warranty.
▪Do not subject an undrained nebulizer to freezing temperatures:
doing so might damage the device and invalidate the warranty.

Liquid Nanoparticle Sizer: How It Works
Liquid NanoParticle Sizer User Guide 4 Version 1.0.1
How the Liquid NanoParticle Sizer Works
The LNS is a fully integrated three-stage system incorporating a NanoParticle
Nebulizer (NPN), an Annular Flow Ion Mobility Classifier (AFIMC) and a
Fast Condensation Particle Counter (Fast CPC) to measure particles as small
as 5 nm.
A sample of a liquid colloid suspension is introduced to the NPN through an
online direct-feed method or using a peristaltic pump or autosampler. The
sample can be diluted before introduction to reduce coagulation time and
minimize contamination. The sample is nebulized and the largest droplets,
which may contain multiple particles, are removed. The nebulized sample is
heated to evaporate the water leaving an aerosol of particles suspended in
the carrier gas. The aerosol is then combined with clean, dry air. Up to 1.5
L/min of dry aerosol flow can be drawn from the aerosol outlet.
The aerosol particles are electrically charged using a safe and reliable soft x-
ray charger. The AFIMC sorts the particles by size in an electric field and is
capable of classifying particles from 5-500 nm in size. Using varying electric
field strength, the AFIMC systematically selects particles of a narrow size
band and passes them on to a Fast CPC.
The Fast CPC immediately counts the concentration of particles in selected
size bands and detects individual particles with a dynamic concentration
range over three orders of magnitude. Unlike competing particle
measurement technologies, the LNS provides actual, not relative, particle
concentration.
Figure 1: Aerosolization coupled with Ion Mobility Spectrometry to measure
nanoparticle size distribution in liquid.

Liquid Nanoparticle Sizer: How It Works
Liquid NanoParticle Sizer User Guide 5 Version 1.0.1
The Liquid NanoParticle Sizer system offers the following advantages over
existing liquid particle size distribution characterization technology:
▪Combines proven techniques (used by NIST and AIST, Japan) for
counting and sizing aerosol size distributions with a unique nebulizer
technology to successfully measure particle size and number
concentration in concentrated liquid suspensions.
▪Offers greater accuracy, better precision, and improved resolution in
CMP slurry size-measurement results (used extensively in the
semiconductor industry).
▪Straightforward data inversion without complex inversion routines,
assumptions or size calibrations. The software can identify each
particle-size mode and assigns a cumulative size at 10%, 50% and 90%
of the distribution. Changes in the size of a specific mode can be
easily monitored with these size statistics.
▪Does not make assumptions about the shape of the particle size
distributions and measures actual number concentrations not relative
particle concentrations. (Instruments that provide relative particle
concentrations can lead to significant misinterpretations when
comparing different samples because they only provide
measurements of relative concentrations within each sample.)
▪Cited in three SEMI Guides. In SEMI C92 the LNS is used to
determine the quality of ion exchange resin. In SEMI C79 the LNS
evaluates the efficiency of sub-15 nanometer filters used in ultrapure
water distribution systems. No other particle instrumentation is
capable of making the required measurements described by SEMI
C79. In SEMI C98 the LNS, as a system consisting of nebulization and
particle counting after electrical mobility size classification, is
recommended for its accuracy in characterizing particle size
distributions (PSD) for chemical mechanical planarization (CMP)
slurries.
Applications
▪Analyzing Chemical-Mechanical Polishing (CMP) slurries.
▪Characterizing the filtration performance of liquid filter media.
▪Analyzing drugs and other medical nanoparticles in water.
▪Analyzing environmental water samples.
Acknowledgement
The ultrafine nebulization method used in this device is based on technology
licensed from CT Associates, Inc. (CTA). We offer our sincere thanks to Don
Grant, Gary Van Schooneveld, and Mark Litchy for their invention, their

Liquid Nanoparticle Sizer: How It Works
Liquid NanoParticle Sizer User Guide 6 Version 1.0.1
clever insights to this unique technology, and the gracious feedback they
have provided during the development of this product. Patent numbers
8,272,253 and 8,573,034 have been issued to CTA and licensed by Kanomax
FMT, Inc. Patent number 7,852,465 has been issued to Kanomax FMT, Inc.

NanoParticle Nebulizer: Operation
Liquid NanoParticle Sizer User Guide 7 Version 1.0.1
How to Install the Liquid NanoParticle Sizer Model 9310
The Liquid NanoParticle Sizer can be operated directly from the
Programmable Logic Controller (PLC) screens or the Kanolysis Model S330
software, which is a designated software platform for Kanomax instruments.
Installation Overview
Following is an overview of the steps required to get your Liquid
NanoParticle Sizer up and running. Please read the detailed instructions
(beginning below) for each step before you set up the instrument.
▪Unpacking the NanoParticle Nebulizer Model 9110.
▪Unpacking the Annular Flow Ion Mobility Classifier Model 3660.
▪Unpacking the Fast Condensation Particle Counter Model 3650.
▪Installing the NanoParticle Nebulizer Model 9110.
▪Installing the Annular Flow Ion Mobility Classifer Model 3660.
▪Installing the Fast Condensation Particle Counter Model 3650.
▪Installing the Kanolysis Model S330.
▪Installing the local network connections.
Unpacking the NanoParticle Nebulizer
To unpack the NanoParticle Nebulizer, follow these instructions:
1. Carefully remove the nebulizer from its shipping container. Save the
original packing materials for use when shipping the nebulizer back to
Kanomax FMT, Inc. for service, or for moving the nebulizer to a different
location.
Warning. If the NanoParticle Nebulizer is returned to Kanomax FMT, Inc.
in anything other than the original shipping container, you will be
charged for any damage that occurs during shipping. If you do not have
the original shipping container, contact Kanomax FMT Inc. at 651-762-
7762. (Customers in Asia please call [phone].)
2. Place the nebulizer on a level surface.
3. Make sure there is an unrestricted air flow around the device. Kanomax
FMT, Inc. recommends at least a 2-inch air gap on both sides and the top
of the instrument.
4. Allow the nebulizer to reach ambient temperature, if necessary.
5. Make sure all the items listed in Table 1, were included in the
NanoParticle Nebulizer shipment. If any of the items are missing, or
damaged, please call Kanomax FMT, Inc. at 651-762-7762. (Customers in
Asia please call [phone].)
Table 1: NanoParticle Nebulizer Model 9110 Packing List

NanoParticle Nebulizer: Operation
Liquid NanoParticle Sizer User Guide 8 Version 1.0.1
Part Number
Description
Quantity
Model 9310
NanoParticle Nebulizer
1
1021000
Ismatec Precision Metering Peristaltic
Pump, Cassette Cartridge, Cassette
Cartridge with Pressure Lever, power
cord, and Instruction Manual
1
2679001
NanoParticle Nebulizer User Manual,
Printed
1
1330001
Power Supply Cable (USA only)
1
1022495
CDA/N2Adapter Fitting
1
2002020
125mL Wash Bottle
1
1021049
0.64 Tygon Tubing
1
1610085
Particle Inlet Fitting
1
1330004
RS 232 Serial Cable
1
Unpacking the Annular Flow Ion Mobility Classifier
To unpack the Annular Flow Ion Mobility Classifier, follow these
instructions:
1. Carefully remove the AFIMC from its shipping container. Save the
original packing materials for use when shipping the ion mobility
classifier back to Kanomax FMT, Inc. for service, or for moving the ion
mobility classifier to a different location.
Warning. If the AFIMC is returned to Kanomax FMT, Inc. in anything
other than the original shipping container, you will be charged for any
damage that occurs during shipping. If you do not have the original
shipping container, contact Kanomax FMT Inc. at 651-762-7762.
(Customers in Asia please call [phone].)
2. Place the AFIMC on a level surface. Make sure there is an unrestricted air
flow around the device. Kanomax FMT, Inc. recommends at least a 2-inch
air gap on both sides and the top of the instrument.
3. Make sure all the items listed in Table 2, were included in the AFIMC
shipment. If any of the items are missing, or damaged, please call
Kanomax FMT, Inc. at 651-762-7762
Table 2: AFIMC Model 3660 Packing List
Part Number
Description
Quantity
Model 3660
Annular Flow Ion Mobility Classifier
1
AFIMC Gas
Port Coupler
Gas Port Coupler Assembly (Swagelok)
1

NanoParticle Nebulizer: Operation
Liquid NanoParticle Sizer User Guide 9 Version 1.0.1
Unpacking the Fast CPC
To unpack the Fast CPC, follow these instructions:
1. Carefully remove the Fast CPC from its shipping container. Save the
original packing materials for use when shipping the Fast CPC back to
Kanomax FMT, Inc. for service, or for moving the Fast CPC to a different
location.
Warning. If the Fast CPC is returned to Kanomax FMT, Inc. in anything
other than the original shipping container, you will be charged for any
damage that occurs during shipping. If you do not have the original
shipping container, contact Kanomax FMT Inc. at 651-762-7762.
(Customers in Asia please call [phone].)
2. Place the Fast CPC on a level surface.
3. Make sure there is an unrestricted air flow around the device. Kanomax
FMT, Inc. recommends at least a 2-inch air gap on both sides and the top
of the instrument.
4. Allow the Fast CPC to reach ambient temperature, if necessary.
5. Make sure all the items listed in
6. Table 3, were included in the Fast CPC shipment. If any of the items are
missing, or damaged, please call Kanomax FMT, Inc. at 651-762-7762.
(Customers in Asia please call [phone].
Table 3: Fast CPC Model 3650 Packing List
Part Number
Description
Quantity
FCPC 3650
Fast CPC
1
1973650
Fast CPC User Manual, Printed
1
1330001
Power Supply Cable (USA only)
1
1611049
Quick Disconnect 1/8 in barbed tube
1
1600009
Fast CPC fill bottle bracket
1
1023650
Fast CPC Fill bottle
1
Unpacking the LNS Accessory Kit
To unpack the LNS Accessory Kit, follow these instructions:
1. Carefully remove the LNS Accessory Kit from its shipping container.
Save the original packing materials for use when shipping the LNS back
to Kanomax FMT, Inc. for service, or for moving the LNS to a different
location.
Warning. If the LNS is returned to Kanomax FMT, Inc. in anything other
than the original shipping container, you will be charged for any damage
that occurs during shipping. If you do not have the original shipping
container, contact Kanomax FMT Inc. at 651-762-7762. (Customers in Asia
please call [phone].)

NanoParticle Nebulizer: Operation
Liquid NanoParticle Sizer User Guide 10 Version 1.0.1
2. Make sure all the items listed in Table 4, were included in the LNS
shipment. If any of the items are missing, or damaged, please call
Kanomax FMT, Inc. at 651-762-7762. (Customers in Asia please call +81 6-
6877-0183.)
Table 4: LNS Accessory Kit Packing List
Part Number
Description
Quantity
1330010
BNC cable
1
1979310
LNS User Manual, Printed
1
2671002
LNS QuickInstall Guide printed
1
LNS Transport
Flow Coupler
Transport Flow Coupler assembly
1
1611063
Classifier Aerosol Coupler assembly
1
LNS Volume
Standard
LNS Volume Standard, 5E17 nm3/ml
1
3020035
Aerosol sample tube
1
1330011
Ethernet switch
1
1330005
Ethernet cable
4
1320004
USB to Ethernet adapter
1
2605004
USB Flash Drive containing the User
Manuals, QuickInstall Guide, and
Kanolysis Software Installer
1

NanoParticle Nebulizer: Operation
Liquid NanoParticle Sizer User Guide 11 Version 1.0.1
Equipment You Need
To install the Liquid NanoParticle Sizer, you will require the following items:
▪9/16 wrench.
▪A length of ¼ inch OD tubing sufficient to reach from the instrument
to your waste drain (12 ft maximum length).
▪A length of ¼ inch OD polyethylene tubing sufficient to reach from
the instrument to your air supply.
▪For online sample introduction:
▪A length of ¼ inch OD x 0.156” ID High Purity PFA tubing sufficient
to reach from the instrument to your water supply.
▪PFA tubing flaring tool, tube gripper, and heat gun.
▪Ultrapure Water supply. Note: Water pressure should be 20-70 psi at
100 ml/min.
▪Conductive tubing for transporting the generated aerosol (shipped
with the LNS aerosol size spectrometer).
▪A supply of clean, dry, compressed air at 2 slpm. Note: The air
pressure should be 50-60 psi.
▪Access to a suitable liquid waste outlet.
▪A clean tube cutter.
▪120-240 VAC power at 50/60 Hz.
Note: No PFA tubing is supplied with the Liquid NanoParticle Sizer.

NanoParticle Nebulizer: Operation
Liquid NanoParticle Sizer User Guide 12 Version 1.0.1
Flaring a Tube
The installation procedure for online analysis requires you to flare a PFA
tube. You can either use a heat flaring tool provided by Entegris (customer
service numbers: 952-556-4196 or 800-394-4083) or a cold flaring tool
provided by Saint Gobain Performance Plastics (customer service numbers:
714-630-5818 or 800-833-5661). The following instructions describe the hot-
flare method:
1. Place a flare nut onto the end of a length of PFA tubing.
2. Hold the tubing with a tube gripper.
3. Rotate one end of the tubing evenly over the heat gun.
4. As soon as the end of the tubing becomes clear, push it onto a flaring tool
in your required size. Note: If you remove the tubing from the flaring tool
too soon, the end shrinks. If you overheat the tube, the tubing will buckle.
5. Hold in place until the tubing is cool (at least two minutes).
6. Pull the tubing from the flare. It is now ready to attach to a fitting.
Installing the NanoParticle Nebulizer
Figures Figure 2 and Figure 3 show the front and back panels of the
NanoParticle Nebulizer.
Figure 2: Front Panel of the NanoParticle Nebulizer.
Aerosol
Output
Sample
Selector
Valve
Sample
Inlet
Display
Screen

NanoParticle Nebulizer: Operation
Liquid NanoParticle Sizer User Guide 13 Version 1.0.1
Figure 3: Back Panel of the NanoParticle Nebulizer.
Connecting the Water Drain
Excess sample from the nebulization module is removed from the instrument
using a solenoid pump. For online sampling, the excess total flow that is not
delivered to the nebulization module is combined inside the device
downstream of the pump.
Follow these instructions to connect the water drain:
1. Remove the protective cap from the Waste Outlet on the back panel.
2. Using a 6 ft length of ¼ inch OD polyethylene tubing with a Swagelok
fitting on one end, insert the tubing into the Waste Outlet fitting on the
back panel.
Dilution
Flow
Flowmeter
UPW Inlet
Power
Socket
Ethernet
Port
(inactive)
Air
Inlet
Serial Port
USB Port
Waste Outlet
Shipping
Drain
Nebulizer Pressure
Regulator
Cooling
Fan
Power
Switch
Front
Ferrule
Backing
Ferrule

NanoParticle Nebulizer: Operation
Liquid NanoParticle Sizer User Guide 14 Version 1.0.1
3. Using an adjustable wrench, tighten the Swagelok nut one turn past
hand-tight to swage the ferrules onto the tubing. Once the ferrules have
been swaged the fitting only requires slight tightening upon reassembly.
Warning: Do not over-tighten the fitting or you will damage the tube
and/or fitting.
4. Place the other end of the tube over your drain. Do not connect the waste
line to a container in tight coupling manner where the pressure will
fluctuate beyond ambient conditions.
Connecting the Compressed Air or Nitrogen Supply
The air or nitrogen supplied to the NanoParticle Nebulizer must be clean,
dried, oil-free and regulated at 345-414 kPa (50-60 psi) at 2 slpm. Follow
these instructions to connect the compressed air supply:
1.Remove the protective cap from the Air Inlet on the back panel.
2. Using a length of ¼ inch OD polyethylene tubing with a Swagelok fitting
on one end, insert the tubing into the Air Inlet fitting on the back panel.
Waste
Outlet
Air Inlet

NanoParticle Nebulizer: Operation
Liquid NanoParticle Sizer User Guide 15 Version 1.0.1
3. Using an adjustable wrench, tighten the Swagelok nut one turn past hand
tight to swage the ferrules onto the tubing. Once the ferrules have been
swaged, the fitting only requires slight tightening upon reassembly.
4. Connect the other end of the tube to your air supply.
5. Turn on the air at the source. The incoming pressure must be regulated at
345-414 kPa (50-60 psi).
Connecting the Power
To connect the power supply, follow these instructions:
1. Plug the supplied power cable into the AC power socket on the back
panel of the nebulizer.
Plug the cord into an earth-grounded AC power source (100 to 240 VAC, 50
to 60 Hz, 0.6 A).
Warning: Ensure that the ground is secure. Connection to an improperly
grounded electrical source is a severe shock hazard.
Connecting the Ultrapure Water Supply
Ultrapure water must be supplied to the nebulizer through a ¼-inch diameter
Teflon PFA tube specially adapted to fit the UPW Inlet fitting on the front
panel of the nebulizer. To prepare the PFA tube for attachment to the UPW
Inlet fitting, take the following precautions:
▪Make sure your hands are clean.
▪Do not touch the end of the water supply tube - you may contaminate
it.
To connect the ultrapure water supply, follow these instructions:
1. Cut the end of the PFA tubing evenly with a clean tube cutter.
2. Place a Flaretek nut over the end of the PFA tube before attempting to
flare the end.
3. Flare the tube (see instructions on page 12).
4. Flush ultrapure water through the tube for several minutes to remove any
debris created by the flaring process.
Power socket