MKS Granville-Phillips 835 VQM Series User manual

Instruction manual part number 835007
Revision F - November 2016
Series 835
Instruction Manual
Granville-Phillips®Series 835 VQM®
Differential Pump System

This Instruction Manual is for use with all Series 835 VQM®
Differential Pump Systems with Edwards vacuum pumps.
A list of applicable catalog numbers is provided on the
following page.
This product is RoHS compliant.
Granville-Phillips®Series 835 VQM®
Differential Pump System
Series 835
Instruction Manual
© 2016 MKS Instruments, Inc. All rights reserved.
Granville-Phillips®, VQM®, VQI®, and Micro-Ion®are registered trademarks of MKS Instruments, Inc.
Vacuum Quality IndexTM, Vacuum Quality MonitorTM and mksinstTM are trademarks of MKS Instruments,
Inc. All other trademarks and registered trademarks are the properties of their respective owners.
Customer Service / Technical Support:
MKS Pressure and Vacuum Measurement Solutions
MKS Instruments, Inc., Granville-Phillips®Division
6450 Dry Creek Parkway
Longmont, Colorado 80503 USA
Tel: [phone]
Fax: [phone]
Email: [email protected]
MKS Corporate Headquarters
MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, MA 01810 USA
Tel: [phone]
Fax: [phone]
Email: [email protected]

Catalog numbers for Series 835 VQM®Differential Pump Systems
835 VQM Differential Pump System
Product/Description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Catalog Number
Differential Pump System, MS Gauge, Total Pressure Gauge, Cross Fitting, 835901- DPS -#(a) # # - #(b)
Roughing Pump, Turbo Pump, Orifice, Power Supply & Cord
Pressure Range: 90 mTorr to 3000 mTorr . . . . . . . . . . . . . . . . . . . Orifice Size 1
Pressure Range: 9 mTorr to 350 mTorr . . . . . . . . . . . . . . . . . . . . . Orifice Size 2
Pressure Range: 1 mTorr to 45 mTorr . . . . . . . . . . . . . . . . . . . . . . Orifice Size 3
Pressure Range: .05 mTorr to 2.2 mTorr . . . . . . . . . . . . . . . . . . . . Orifice Size 4
Pressure Range: .02 mTorr to 1 mTorr . . . . . . . . . . . . . . . . . . . . . Orifice Size 5
No Bypass Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . N
Manual Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . M
Pneumatic Valve (24 Vdc) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . P
Mass Range AMU 1-145 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Mass Range AMU 1-300 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Power Cord (b) (see below) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . #
(a) = Size of Orifice (1 through 5) - see above.
(b)= Power Cord: -1 = North American 115 VAC & Japan 100 VAC, -2 = North American 240 VAC,
-3 = Universal European 220 VAC, -4 = United Kingdom 240 VAC
835 VQM Controller and Software
NOTE: The following items are required for system operation, but are not
included with the Differential Pump System catalog number listed above.
Controller, Single Gauge, Benchtop Mount, USB 2.0, Power Supply & Cord . . . . . . . . . . 835500-U#- #
Mass Range AMU 1-145 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Mass Range AMU 1-300 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Power Cord for VQM Controller (b) (see above) . . . . . . . . . . . . . . . . . . . . . . . . . #
Cable - VQM Controller to VQM Gauge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 835300-##M
1 meter (3.28 ft) long . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 01
3 meters (9.84 ft) long . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 03
Cable - VQM Controller to 390 Micro-Ion ATM Module. . . . . . . . . . . . . . . . . . . . . . . . . 802301-##M
1 meter (3.28 ft) long . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 01
3 meters (9.84 ft) long . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 03
10 meters (32.8 ft) long . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
CD- 835 VQM Software Suite (Viewer Application Software, LabVIEW VI) . . . . . . . . . . . . . . . 835400
835 VQM Differential Pumping Options / Replacements
KF40 Adapter Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 801210-K
Isolation Valve Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 801700-#-K
Manual Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . M
Pneumatic Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . P
Orifice Valve Hardware Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 801701-#-K
Manual Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . M
Pneumatic Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . P
Hardware/Bolt Kit - includes 6 flange bolts & washers, 3 plate nuts, & 1 copper gasket . . . 801274-1
Bolt Kit for Orifice when no Gate Valve is used . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 801207-K
Field Replaceable Filament Assembly Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 830105-Y-K
Field Replaceable Electron Multiplier Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 835110-K
Orifice for Gate Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 801211-#(a)
Orifice for when no Gate Valve is used . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 801212-#(a)
#(a) = Size of Orifice (1 through 5) - see above.
Windows, Windows XP, and Windows 7 are registered trademarks of Microsoft Corporation.
LabVIEW is a registered trademark of National Instruments Corporation.

5
Series 835 VQM Differential Pump System
Instruction Manual - 835007
Chapter 1 Safety Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.1 Safety Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.2 Equipment Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.3 Implosion / Explosion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.4 Hot Surfaces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
1.5 Mounting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
1.6 Pneumatic Valve Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
1.7 User’s Responsibility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
1.8 Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
1.9 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
1.10 FCC Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
1.11 Warranty Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
1.12 Declaration of Incorporation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Chapter 2 Introduction & Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
2.1 General Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
2.1.1 Intended Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
2.1.2 Proper Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
2.1.3 Improper Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
2.1.4 Transportation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
2.1.5 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
2.1.6 Rough Vacuum Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
2.1.7 Turbomolecular Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
2.1.8 Pressure Reduction and Isolation Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
2.1.9 Series 390 Total Pressure Measurement Gauge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
2.1.10 Series 835 Vacuum Quality Monitor (VQM). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
2.2 Receiving Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
2.3 Compliance & Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
2.3.1 Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
2.3.2 Dimensional Illustration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
2.3.3 VQM Differential Pump System Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
2.3.4 Host/PC Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Chapter 3 Hardware Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.2 Unpacking the Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.2.1 Before Opening the Boxes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.3 Install the Differential Pressure System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.3.1 Preparing for Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.3.2 Vacuum Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
3.3.3 Electrical Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
3.4 System Grounding Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
3.4.1 System Ground Test Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
3.5 Pneumatic Valve Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
3.6 Install the VQM Viewer Application Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
3.7 Initial Power-up Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
3.8 Power-down Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
Table of Contents

6
Series 835 VQM Differential Pump System
Instruction Manual - 835007
Chapter 4 Software Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
4.1 Introduction to the Software Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
4.1.1 Installation Issues . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
4.2 Install the Viewer Application Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
4.3 Install the USB Driver . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
4.3.1 Installing the 835 Driver from the CD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
4.3.2 Installing the GP Device Driver after a Software Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
4.4 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
4.4.1 Installation Does Not Complete. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
Chapter 5 System Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
5.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
5.2 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
5.3 Selecting the Required Orifice Size . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
5.4 Operation Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
5.4.1 Startup Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
5.4.2 Power-down Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
5.5 Changing the Orifice in the Gate Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
5.6 Bakeout Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
Chapter 6 Service & Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
6.1 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
6.2 Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
6.3 General Repair Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
6.4 MS Gauge Repair . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
Chapter 7 Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51

7
Series 835 VQM Differential Pump System
Instruction Manual - 835007
Chapter 1
1Safety Instructions
1.1 Safety Introduction
BEGIN BY READING THESE IMPORTANT SAFETY INSTRUCTIONS AND NOTES collected here
for your convenience and repeated with additional information at appropriate points throughout
this instruction manual.
These safety alert symbols in this manual or on the Product mean caution - personal safety, property
damage or danger from electric shock. Read these instructions carefully.
This product was designed and tested to offer reasonably safe service provided it is installed,
operated, and serviced in strict accordance with these safety instructions.
Danger indicates a hazardous situation which, if not
avoided, will result in death or serious injury.
Warning indicates a hazardous situation which, if not
avoided, could result in death or serious injury.
Caution indicates a hazardous situation or unsafe
practice which, if not avoided, may result in minor or
moderate personal injury.
Indicates a situation or unsafe practice which, if not
avoided, may result in equipment damage.
Notice
These instructions do not and cannot provide for every contingency that
may arise in connection with the installation, operation, or maintenance of
this product. If further assistance is needed, contact MKS/Granville-Phillips.
See Section 1.9 or Section 6.1 of this instruction manual.
Safety Precautions
Failure to comply with these instructions may result in serious
personal injury, including death, or property damage.
Always observe and follow all safety notices that are
provided throughout this instruction manual and on the
product.

1 Safety Instructions
8Series 835 VQM Differential Pump System
Instruction Manual - 835007
These safety precautions must be observed during all phases of operation, installation, and service
of this product. Failure to comply with these precautions or with specific warnings elsewhere in this
manual violates safety standards of design, manufacture, and intended use of the instrument.
MKS/Granville-Phillips disclaims all liability for the customer's failure to comply with these
requirements.
•Read Instructions – Read all safety and operating instructions before operating the product.
•Retain Instructions – Retain the Safety and Operating Instructions for future reference.
•Heed Warnings – Adhere to all warnings on the product and in the operating instructions.
•Follow Instructions – Follow all operating and maintenance instructions.
•Accessories – Do not use accessories not recommended in this manual as they may be
hazardous.
High Voltage
Be aware that when high voltage is present in any vacuum
system, a life threatening electrical shock hazard may exist
unless all exposed conductors are maintained at Earth ground.
This hazard is not unique to this product.
High Voltage
Be aware that an electrical discharge through a gas may
couple dangerous high voltage directly to an ungrounded
conductor almost as effectively as would a copper wire
connection. A person may be seriously injured or even killed
by merely touching an exposed ungrounded conductor at high
potential.
This hazard is not unique to this product.
High Voltage
To reduce the risk of fire or electric shock, do not expose this
product to rain or moisture.

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Replacement Parts
Do not substitute parts or modify the instrument.
If replacement parts are required, be certain to use the
replacement parts that are specified by Granville-Phillips or
that have the same characteristics as the original parts.
Unauthorized substitutions may result in fire, electric shock or
other hazards.
Return the product to a service facility designated by
Granville-Phillips for service and repair to ensure that safety
features are maintained. Do not use this product if it has
unauthorized modifications.
Objects and Liquid Entry
Never push objects of any kind into this product through
openings as they may touch dangerous voltage points or short
out parts that could result in a fire or electric shock.
Be careful not to spill liquid of any kind onto the products
Finite Lifetime
After ten years of normal use or even non-use, the electrical
insulation in this product may become less effective at
preventing electrical shock. Under certain environmental
conditions which are beyond the manufacturer’s control, some
insulation material may deteriorate sooner. Therefore,
periodically inspect all electrical insulation for cracks, chafing,
or other signs of deterioration. Do not use if the electrical
insulation has become unsafe.
Safety Check
Upon completion of any service or repairs to this product, ask
the Qualified Service Person to perform safety checks to
determine that the product is in safe operating order.

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1.2 Equipment Grounding
All components of the Vacuum System MUST be properly grounded. See Section 3.4 and
Figure 3-6 in the Hardware Installation chapter of this instruction manual.
User’s Responsibility
It is the user's responsibility to ensure that the automatic
signals provided by the product are always used in a safe
manner. Carefully check the system programming before
switching to automatic operation.
Proper Grounding
All components of a vacuum system used with this or any
similar high voltage product must be maintained at Earth
ground for safe operation. The power cord of this product
MUST be connected only to a properly grounded outlet. Be
aware, however, that grounding this product does not
guarantee that other components of the vacuum system are
maintained at Earth ground. Have a licensed electrician check
the entire system to assure proper and safe grounding of all
electrical components.
Complying with the usual warning to connect the power cable
only to a properly grounded outlet is necessary but not
sufficient for safe operation of a vacuum system with this or
any similar high voltage producing product.
Verify that the vacuum port to which the MS Gauge and all
vacuum gauges are mounted are electrically grounded. It is
essential for personnel safety as well as proper operation that
the envelope of the gauge be connected to a facility ground.
Use a ground lug on a flange bolt if necessary.

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1.3 Implosion / Explosion
Danger of injury to personnel and damage to equipment exists on all vacuum systems that
incorporate gas sources or involve processes capable of pressurizing the system above the limits it
can safely withstand.
For example, danger of explosion in a vacuum system exists during backfilling from pressurized gas
cylinders because many vacuum devices such as ionization gauge tubes, glass windows, glass bell
jars, etc., are not designed to be pressurized.
Install suitable devices that will limit the pressure from external gas sources to the level that the
vacuum system can safely withstand. In addition, install suitable pressure relief valves or rupture
disks that will release pressure at a level considerably below that pressure which the system can
safely withstand.
Suppliers of pressure relief valves and pressure relief disks can be located via an online search, and
are listed on ThomasNet.com under “Relief Valves” and “Rupture Discs. Confirm that these safety
devices are properly installed before installing the product. In addition, check that:
a. The proper gas cylinders are installed,
b. Gas cylinder valve positions are correct on manual systems, and
c. The automation is correct on automated gas delivery systems.
It is the installer's responsibility to ensure that the automatic signals provided by the product are
always used in a safe manner. Carefully check manual operation of the system and the set point
programming before switching to automatic operation.
Where an equipment malfunction could cause a hazardous situation, always provide for fail-safe
operation. As an example, in an automatic backfill operation where a malfunction might cause high
internal pressures, provide an appropriate pressure relief device.
Implosion / Explosion
Do not use the Product in an environment of explosive or
combustible gases or gas mixtures. Operation of any electrical
instrument in such an environment constitutes a definite safety
hazard. Do not use the product to measure the pressure of
explosive gases or gas mixtures.
Install suitable devices that will limit the pressure to the level
that the vacuum system can safely withstand. In addition,
install suitable pressure relief valves or rupture disks that will
release pressure at a level considerably below the pressure
that the system can safely withstand.

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1.4 Hot Surfaces
1.5 Mounting
The pressure reduction vacuum system requires support to be mounted to a port on a main
chamber. A mounting bracket is provided to aid in supporting the pressure reduction system. Failure
to use the provided bracket may damage the port or the vacuum system to which it is attached.
1.6 Pneumatic Valve Safety
The pneumatic valve, if used on the pressure reduction system, must be powered and pressurized
properly to the manufacturer’s specifications. The input voltage is 24 Vdc, and the supply air for
actuation of the gate is 70 psi. The valve is a normally-closed valve, single action. In the event of
either power loss or air pressure loss, the valve will return to a closed state. Prior to any
maintenance or removal from the system, the valve must be de-energized and de-pressurized to
prevent potential pinching danger.
CAUTION
Hot Surface
Equipment surfaces become hot, up to approximately 200 oC during
bakeout of the MS Gauge. Do not touch hot surfaces of the system.
Touching a hot surface may result in serious personal injury, including
burning of skin or flesh.
CAUTION
Hot Surface
Do not touch hot surfaces of the system. Touching a hot surface may
result in serious personal injury, including burning of skin or flesh.

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1.7 User’s Responsibility
It is the responsibility of the Customer to comply with all local, state, and federal ordinances,
regulations, and laws applicable to the installation, operation and service of this equipment.
It is the responsibility of the end user to provide sufficient lighting at work to meet local regulations.
Operation and Service of this equipment in strict accordance with the methods and procedures
supplied by MKS/Granville-Phillips is the responsibility of the Customer.
MKS/Granville-Phillips assumes no liability, whatsoever, for any personal injuries or damages
resulting from the operation or service of this equipment in any manner inconsistent or contrary to
the methods supplied in Granville-Phillips literature including, but not limited to, manuals,
instructions, bulletins, communications, and recommendations.
For emergencies and for product safety related matters, contact the MKS /Granville-Phillips
Customer Service Department. See Section 1.9 or Section 6.1 for detailed information regarding
how to contact MKS /Granville-Phillps Customer Service Representatives.
1.8 Damage Requiring Service
Disconnect the product from all power sources and refer servicing to Qualified Service Personnel
under the following conditions:
a. When any cable or plug is damaged.
b. If any liquid has been spilled onto, or objects have fallen into the product.
c. If the product has been exposed to rain or water.
d. If the product does not operate normally even if you follow the operating instructions. Adjust
only those controls that are covered by the operation instructions. Improper adjustment of other
controls may result in damage and will often require extensive work by a qualified technician
to restore the product to its normal operation.
e. If the product has been dropped or the enclosure has been damaged.
f. If the product exhibits a distinct change in performance, service may be required.
User’s Responsibility
It is the user's responsibility to ensure that the automatic
signals provided by the product are always used in a safe
manner. Carefully check the system programming before
switching to automatic operation.

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1.9 Service Guidelines
If the product requires service, contact the MKS/Granville-Phillips Customer Service Department at
1-303-652-4400 for troubleshooting help over the phone.
If the product must be returned to the factory for service, request a Return Material Authorization
(RMA) from MKS/Granville-Phillips. Do not return products without first obtaining an RMA. In
some cases a hazardous materials document may be required. The MKS/Granville-Phillips
Customer Service Representative will advise you if the hazardous materials document is required.
When returning products to Granville-Phillips, be sure to package the products to prevent shipping
damage. Circuit boards and modules separated from the gauge assembly must be handled using
proper anti-static protection methods and must be packaged in anti-static packaging. Shipping
damage on returned products as a result of inadequate packaging is the Buyer's responsibility.
Customer Service / Technical Support:
MKS Pressure and Vacuum Measurement Solutions
MKS Instruments, Inc., Granville-Phillips®Division
6450 Dry Creek Parkway
Longmont, Colorado 80503 USA
Tel: [phone]
Fax: [phone]
Email: [email protected]
MKS Corporate Headquarters
MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, MA 01810 USA
Tel: [phone]
Fax: [phone]
1.10 FCC Verification
This equipment has been tested and found to comply with the limits for a Class A digital device,
pursuant to Part 15 of the FCC Rules. These limits are designed to provide reasonable protection
against harmful interference when the equipment is operated in a commercial environment. This
equipment generates, uses, and can radiate radio frequency energy and, if not installed and used in
accordance with this instruction manual, may cause harmful interference to radio communications.
However, there is no guarantee that interference will not occur in a particular installation.
Operation of this equipment in a residential area is likely to cause harmful interference in which
case the user will be required to correct the interference at his own expense. If this equipment does
cause harmful interference to radio or television reception, which can be determined by turning the
equipment off and on, the user is encouraged to try to correct the interference by one or more of the
following measures:
• Reorient or relocate the receiving antenna.
• Increase the separation between the equipment and the receiver.
• Connect the equipment into an outlet on a circuit different from that to which the receiver is
connected.

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1.11 Warranty Information
MKS Instruments, Inc. warrants that new 835 Series VQM Products shall be free of defects in
material and workmanship for a period of 12 months (excluding consumables) from the date of
shipment from the manufacturer or from an MKS Instruments, Inc. regional office or supply center.
The gauge filament and electron multiplier are consumables and are not warranted against wear
due to use, accelerated failures in harsh environments, or misuse through improper handling or
configuration.
1.12 Declaration of Incorporation

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Notes:

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Chapter 2
2Introduction & Specifications
2.1 General Description
The 835 VQM (Vacuum Quality Monitor) Differential Pump System by Granville-Phillips is a
bolt-on vacuum system that allows sampling from a high pressure process chamber into a lower
pressure sampling chamber suitable for operation of the 835 VQM by using a small orifice and a
compact pumping system.
The system includes a 70Lit/sec turbomolecular pump, and an oil-free rough pump that provides
the necessary vacuum to operate the 835 series ion trap mass spectrometer at a lower pressure than
the process vacuum chamber. The included Series 390 Micro-Ion total pressure measurement gauge
protects the VQM MS Gauge from accidental overpressure that may damage the mass spectrometer.
The pressure reduction is produced by having a small orifice between the process chamber and the
differential pump system. The orifice is installed in either a gate valve that can be opened for <10-5
Torr operation or as a fixed orifice in a double-sided conflat-type flange.
2.1.1 Intended Use
The intended use of this system is to sample and analyze gases in a vacuum process chamber.
Figure 2-1 835 VQM Differential Pump System
NOTE: Shown with the VQM
Gauge cover removed.

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2.1.2 Proper Use
• CE conformity: The manufacturer’s declaration becomes invalid if the operator modifies the
original product or installs additional components. Following installation, and before
commissioning, the operator must check the entire system for compliance with the valid EU
directives and reassert it accordingly.
• This device is to be used only in accordance with the instructions in this operation manual.
2.1.3 Improper Use
• Removal of any factory installed components
• Modifying factory installed components
• Pumping any corrosive or explosive media
• Pumping any condensing vapors or liquids
• Operation of this device in radioactive areas
• Pumping any media containing particulates
• Removal of any labeling or warranty seals
• Using this vacuum system to generate pressure
• Using any of the individual components outside of the differentially pumping system
• Using any modified or non-factory approved orifices
• Exceeding the manufacturer’s specifications on any individual component
2.1.4 Transportation
• Reuse the original shipping container. The main chamber and rough pump should be
shipped only in the original shipping containers. Contact Granville-Phillips for a
replacement if the original containers are no longer available.
• The mass of the main differential pumping chamber is 25-35lbs (10-14Kgs) depending on the
options installed. Use the supplied lifting handle to carry the chamber.
• Replace all dust caps on open vacuum housings prior to shipping.
• Bag the system in suitable material and seal it as best as possible.
2.1.5 Storage
• Close the bypass valve (if manual), replace all protective covers on open vacuum ports (turbo
pump rough, and main 2.75 CF connection.
• Store the system indoors between -25C and 55C.
• If the system is in a high dust environment, store it in a sealed or shrink-wrapped bag with
desiccant.
• All system components should be bagged and boxed together along with the instructions for
future reference.

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2.1.6 Rough Vacuum Pump
The rough vacuum pump provided is a diaphragm based oil-free roughing pump. The pump is
operated by plugging in the line cord and using the built in power switch.
For pump operation and maintenance instructions, refer to the manufacturer’s instruction manual.
2.1.7 Turbomolecular Pump
The turbomolecular pump used in this instrument is a 70lit/sec molecular drag pump. Refer to the
manufacturer’s instruction manual for specific operation instructions for the turbo pump.
2.1.8 Pressure Reduction and Isolation Valves
Depending on which version of the instrument purchased, it will have a manual or pneumatic
valve. The system performance is the same. Refer to the operation manual provided by the
manufacturer. This is very important for operation of the pneumatic type valve.
2.1.9 Series 390 Total Pressure Measurement Gauge
The operation of the 390 Micro-Ion total pressure measurement gauge is described in the
instruction manual (390001) which can be downloaded from the MKS website, www.mksinst.com.
For this application, make sure the supplied gray cable is connected firmly to both the 390
Micro-Ion Module and the 835 VQM Controller.
2.1.10 Series 835 Vacuum Quality Monitor (VQM)
The operation and service of the 835 VQM (a small, low-power ion trap mass spectrometer) is
explained in detail in the 835000 Instruction Manual which can be downloaded from the MKS
website, www.mksinst.com. Refer to this instruction manual before operating the Differential Pump
System.
2.2 Receiving Inspection
Inspect all received materials for shipping damage. Confirm that your shipment includes all the
materials and options that were ordered. If materials are missing or damaged, the carrier that made
the delivery must be notified within 15 days of delivery in accordance with Interstate Commerce
regulations to file a valid claim with the carrier. Any damaged material, including all containers and
packaging, should be held for carrier inspection.
If your shipment is not correct for reasons other than shipping damage, contact Granville-Phillips
Customer Service Department, 6450 Dry Creek Parkway, Longmont, Colorado 80503,
phone [phone], email [email protected].
High Voltage
Check to be sure the line voltage at your installation site
matches the requirements for the equipment being installed.
Damage to the equipment my occur if they are different.

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Figure 2-2 Components of the VQM Differential Pump System
Figure 2-3 Electrical Diagram of the VQM Differential Pump System
45
6789
1) Differential Pump Assy (Turbo Pump, Mass
Spec Gauge, Micro-Ion Gauge, Gate Valve) (Shown
with the manual valve.)
2) Rough Pump
3) Hose - Rough Pump to Turbo Pump
4) Rough Pump Hose Kit
5) Vacuum Connection Hardware Kit
6) Turbo Pump Power Cord & Controller
7) Micro-Ion Gauge Interconnect Cable
8) Mass Spec Gauge Interconnect Cable
9) AC Power Cords (3)
10) VQM Controller
11) VQM Power Supply & Ground Wire
12) USB Cable
12
10 11
3
2
1