Nagano Keiki ZT11 User manual

Doc. No: TY-ZT11-004A Ver. 3
User's Manual for ZT11 Pressure Sensor
for Semiconductor Industry
8.1

2 TY-ZT11-004A Ver. 3
FOR PROPER AND SAFE USE
Thank you for purchasing the ZT11 Pressure Sensor for the Semiconductor Industry. To use this
product properly and safely, read this User's Manual carefully. This pressure sensor is for a gas supply
system and equipment for semiconductor manufacturing. Incorrect use of the product may cause
malfunction, resulting in failures or accidents.
After reading this Manual, keep it in a safe place for future reference.
■Definition of Safety Terms
The safety precautions in this manual are classified according to the following definitions.
Indicates an imminently hazardous situation which, if not avoided,
may result in death or serious injury.
Indicates the risk that users may suffer from damage including death
or serious injury.
Indicates the risk that users may suffer from minor injury and the risk
that only property damage may be caused.
■Description of Graphic Symbols
Graphic
symbols
Meaning
●Generally prohibited activities
Indicates prohibited activities in handling the product.
●General instructions
Indicates activities based on instructions that users are forced to
conduct.
●Other information
Indicates precautions, special operating methods, and other important
information.
WARNING
DANGER
CAUTION

3 TY-ZT11-004A Ver. 3
■Precautions for Handling Product
●Do not apply excessive load, vibration or shock. Damage to the
product and release of measuring fluid may be caused, which
results in injury or damage to the surrounding environment.
●Repeated applied pressure shall be within the rated pressure
range and shall not exceed the maximum allowable pressure.
Damage to pressure elements may be caused, which results in
injury or damage to the surrounding environment.
●This gauge is NOT an explosion-proof structure. Do not use the
product in Hazardous Areas where flammable gases or liquids
may be present.
●Do not use the product for measuring fluid corrosive to materials
of wetted parts or gas contact areas.
●Do not use batteries or power supplies not specified.
They may cause failure, fire or electric shock.
●Do not use the product if its failure or malfunction poses a direct
threat to human life or may cause personal injury.
●Do not modify the product. Disassembly or modification of the
product, or modification by adding new functions may cause harm
to human bodies.
●For applications where serious damage or accidents may occur
due to malfunction or failure of this product, use several units to
configure various protection circuits according to the degree of
seriousness of such damage or accidents, such as "1 out of 2",
"2 x (1 out of 2)", "2 out of 3", etc.
●When measuring fluid is oxygen, use a degreased product.
Oil may be left in general products, reacting with oxygen, and
causing fire or explosion.
!
WARNING

4 TY-ZT11-004A Ver. 3
●Conduct wiring correctly according to the
wiring procedure
described in the User's Manual.
Incorrect wiring may cause failures or fires.
●Use the product within the operating temperature range.
Otherwise, the product fails or is damaged, which causes injury or
damage to the surrounding environment.
●Install the product in accordance with the installation instructions in
the User's Manual.
●For repair, please contact us.
Disassembly or modification of the product on your own may cause
failures.
* These precautions are selected from our common safety precautions for all products that correspond to this
product. ZT11-specific precautions are further described in detail in the following sections.
CAUTION

5 TY-ZT11-004A Ver. 3
TABLE OF CONTENTS
FOR PROPER AND SAFE USE............................................................. 2
■Definition of Safety Terms ................................................................................................... 2
■Description of Graphic Symbols ........................................................................................ 2
■Precautions for Handling Product...................................................................................... 3
TABLE OF CONTENTS.......................................................................... 5
1. INTRODUCTION ................................................................................ 7
2. PRODUCT OVERVIEW ...................................................................... 7
■2.1 Overview.......................................................................................................................... 7
■2.2 Features........................................................................................................................... 7
■2.3 Operating Principle ........................................................................................................ 7
3. SPECIFICATIONS .............................................................................. 8
■3.1 Common Specifications ................................................................................................ 8
■3.2 Specifications for Each Grade...................................................................................... 9
4. DIMENSIONS ................................................................................... 10
■4.1 Typical Dimensions...................................................................................................... 10
5. TRANSPORTATION AND UNPACKING .......................................... 11
■5.1 Precautions for Transportation................................................................................... 11
■5.2 Precautions for Unpacking.......................................................................................... 11
6. INSTALLATION AND REMOVAL ..................................................... 11
■6.1 Installation..................................................................................................................... 11
7. WIRING AND CONNECTION ........................................................... 12
■7.1 Example of Wiring and External Connection ............................................................ 12
■7.2 Load Resistance........................................................................................................... 14
■7.3 Specifications of M12-connector Cable (option) ...................................................... 15
8. OPERATION (ENERGIZATION) ....................................................... 16
9. MEASURES AGAINST NOISE......................................................... 17
■9.1 Effects of Noise ............................................................................................................ 17
10. STORAGE ...................................................................................... 17
11. MAINTENANCE.............................................................................. 18
■11.1 Maintenance................................................................................................................ 18
■11.2 Zero Adjustment ......................................................................................................... 19

6 TY-ZT11-004A Ver. 3
12. PRODUCT WARRANTY/ EXPORT ADMINISTRATION REGULATIONS ........ 22
■12.1 Product Warranty ....................................................................................................... 22
■12.2 Export Administration Regulations.......................................................................... 22
13. OTHER ........................................................................................... 22

7 TY-ZT11-004A Ver. 3
1. INTRODUCTION
Check the specifications of the delivered model. Incorrect pressure range, power supply or output may
cause an accident. Make sure to use a model of the designated specifications in a location that meets
your use conditions and that it is properly wired and installed.
2. PRODUCT OVERVIEW
■2.1 Overview
This pressure sensor for the semiconductor industry converts pressure into an electrical signal for
transmission by means of a detector with an evaporated semiconductor strain gauge and a built-in
electronic circuit.
It has better temperature characteristics compared to those of the conventional one, and improves the
ease of use through a zeroing mechanism installed on the case side.
■2.2 Features
It is excellent in durability and stability due to use of a widely-proven vapor deposited (SS) sensor
element as well as an integrated structure design from the semiconductor strain gauge, pressure
sensor to pressure connection.
Design to greatly reduce the external leakage with a small dead zone where gas resides.
Absolute pressure range is available in addition to the gauge pressure range for a wide range of
applications.
■2.3 Operating Principle
The pressure receiving part of this instrument converts pressure into strain as a diaphragm and the
amount of strain is detected by the semiconductor strain gauge. The detection circuit is a full-bridge
type in which all four sides of the bridge consist of semiconductor strain gauges. The bridge circuit
gives an electric signal proportional to the strain, which is then amplified to a constant value in the
electric circuit and transmitted as direct current.
< Fig. 2-1 >
Detector
Amplifier
Circuit

8 TY-ZT11-004A Ver. 3
3. SPECIFICATIONS
■3.1 Common Specifications
Measuring fluid Various semiconductor process gases
Fitting type Single end and flow through integrated (forged)
Thread 1/4VCR®and 1/2 (3/8) VCR®compatible, 1/4UJR™
Dead volume Approx. 0.9 cm3
(will vary for single end and 1/4UJR™depending on the fitting type)
Pressure sensor sealing by welding
Pressure range
Gauge
pressure
0 to 0.3, 0.5, 1, 2, 3.5, 5, 10 and 20 MPa
- 0.1 to 0.3, 0.5, 1, 2, 3.5, 5, 10 and 20 MPa
Absolute
pressure 0 to 0.3, 0.5, 1, 2, 3.5, 5, 10, 20 MPa abs.
Supply voltage
10 to 30V DC
*See the following equation for the relationship bet. the supply voltage
and load resistance.
Load resistance R max. (Ω) = 50E − 500 (E: supply voltage)
Output 4 to 20 mA DC
Transmission system 2-wire system
Accuracy +/- 0.25%F.S. (at 23 deg. C)
(including linearity, hysteresis and repeatability)
Temperature Coefficient
(Zero/ Span)
+/- 0.02%F.S./ deg. C
Operating temp. range - 20 to 70 deg. C (no freezing or condensation)
Storage temp. range - 30 to 80 deg. C (no freezing or condensation)
Insulation resistance 100 MΩ or more (50V DC collectively for fitting to input-output terminal)
CE marking EMC Directive *1, RoHS Directive
UKCA marking EMC SI 2016 No.1091 *1, RoHS SI 2012 No.3032
Electrical connection M12 connector (4 pins)
Case material SUS305, PBT
Protection class IP67 (IEC 60529) *M12-connector cable in a mated state
Zeroing mechanism Side access (at case side surface)
Mass Approx. 70 g (will vary for single end depending on the fitting type)
< Table 3-1 >

9 TY-ZT11-004A Ver. 3
■3.2 Specifications for Each Grade
Grade EP GP
Surface roughness of
gas contact area
0.18 μm Ra Avg. 0.5 μm Ra Avg.
Gas
contact
material
Pressure
sensor
SUS316L
Fitting SUS316L
Max. allowable pressure
*2
150% of pressure range
Air-tightness (helium-
vacuum system) 5 × 10- 12Pa•m3/s or less
Particle Zero-count particles: 0.1 μm or more
(based on our inspection standards)
None
Cleaning Ultra-clean (cleaning) Degreasing cleaning
Recommended gas *3 High-purity gas, gas for
semiconductor materials, etc. Purge gas, exhaust gas, etc.
*1 Before use, connect the product to an indoor power distribution network that is not affected by lightning surge
voltages and power system switching transients.
*2 The maximum allowable pressure is the upper limit of pressure value which may safely be applied to the product
and remain in specification once pressure is returned to the rated range with a couple of times over-pressurization
for about 10 minutes. Effects of continuous over-pressure are not guaranteed.
*3 Make sure that the gas-contact material is suitable for the fluid to be measured.
●Using a device not specified in the User's Manual for electrical
connection requires confirmation with the manufacturer or expert of
such device to ensure its safety when used with other electrical devices.
< Table 3-2 >
WARNING

10 TY-ZT11-004A Ver. 3
4. DIMENSIONS
■4.1 Typical Dimensions
Single End Flow Through
* 2D matrix codes and alphabets laser-marked on the fitting or nut are used for the purpose of process control during
production at our factory and does not have an impact on product specifications.
* Type of pressure (gauge or absolute) can be easily identified by the color of the product label.
・Gauge pressure: Green
・Absolute pressure: Yellow-green
* QR code on the product label stores model and serial number information.
< Fig. 4-1 >
D=5
Air Inlet
(with filter)
One M12 In/out
connector
Zero Trimmer
HEX.
Zero Trimmer
Air Inlet
(with filter)
One M12 In/out
connector