OSAKA VACUUM TG390M/420M Series User manual

Document No.: STME-PU-TG390M-2400M-R04
Instruction Manual
Magnetically Suspended
Compound Molecular Pump
TG390M/420M Series
TG900M/1300M Series
TG2400M Series
It is mandatory to read and understand all the ‘Important warning’ and ‘Important
caution’ in this manual before using the product.
Keep this manual at hand in order to read it at any time.
Osaka Vacuum, Ltd.
Original instructions

Document No.: STME-PU-TG390M-2400M-R04
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Introduction
TG390M/420M, TG900M/1300M, TG2400M series are the magnetically suspended compound
molecular pump which is controlled with the exclusive digital controller.
Hereinafter, these magnetically suspended compound molecular pump referred to as ‘the pump’.
The pump transports gas molecules from the inlet port to the outlet port by the high speed rotation
of the rotor in the pump. This rotor is suspended by five-axis active control magnetic bearing with no
contact.
This instruction manual (hereinafter, ‘this manual’) provides safety notes, appropriate operational
procedures and check/maintenance of the pump for customer.
Before operation of the pump, be sure to read and understand the contents of this manual.
In addition, be sure to read the instruction manual of the controller (hereinafter, ‘controller manual’)
and understand various functions and a right handling method.
Keep this manual readily available for reference and troubleshooting.
Features of Pump
The pump is only for vacuum exhaust. Do not exhaust liquid and solid.
The available length of the cables which connects the controller to the pump is from 3m to 30m.
(Extra-cost option)
The operation of the pump is available only by the exclusive controller. The operation of the pump
is available not only by pressing the switch on the front panel of the controller (Local mode), but also
by the remote control based on the contact signal from the device side (Remote mode) or by the
serial communication (Serial mode). For the pump operation, refer to not only this manual, but also
"controller manual".
The LCD and LED on the front panel of the controller show a wide variety of information (e.g. the
operational status of the pump and the controller, the setting of function, parameter, etc.)
The conformity directives and standards with regard to the combination of the pump and the
controller are shown in Table1.

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Table1 Conformity Directives and Standards
The combination of the pump and the controller The conformity directives and
standards, etc.
Controller model Pump model 1)
TC011M 2) TG390Mxyz, TG420Mxyz,
TG900Mxyz, TG1300Mxyz,
TG2400Mxyz,
TG390Mxyz-90, TG420Mxyz-90,
TG900Mxyz-90, TG1300Mxyz-90,
TG900Mxyz-91, TG1300Mxyz-91,
TG900MUCyB, TG1300MUCyB
- UL61010-1:2004 2)
- SEMI S2-0709 2)
- CE marking 3)
TC011MT 2) TG390MIxWC, TG420MIxWC,
TG900MIxWC, TG1300MIxWC,
TG2400MIxWC
- UL61010-1:2004 2)
- SEMI S2-0709 2)
- CE marking 3)
TC011MT-13 2) TG900MIxWC-71, TG1300MIxWC-71,
TG2400MIxWC-71
- UL61010-1:2004 2)
- CE marking 3)
TC010M
TC010M-30
TC010MA
TG390Mxyz, TG420Mxyz,
TG900Mxyz, TG1300Mxyz,
TG2400Mxyz,
TG1300MBAC-89,
TG390Mxyz-90, TG420Mxyz-90,
TG900Mxyz-90, TG1300Mxyz-90,
TG900Mxyz-91, TG1300Mxyz-91,
TG900MUCyB, TG1300MUCyB
- UL61010-1:2012
- SEMI S2-0715
- CE marking 3)
TC010M-10
TC010MA-10
TG390MLxyz, TG420MLxyz,
TG900MLxyz, TG1300MLxyz
TC010MT
TC010MT-11
TC010MAT
TG390MIxWC, TG420MIxWC,
TG900MIxWC, TG1300MIxWC,
TG2400MIxWC,
TG390MIxWC-89, TG420MIxWC-89,
TG900MIxWC-20, TG1300MIxWC-20,
TG900MIxWC-89, TG1300MIxWC-89,
TG2400MIxWC-89
- UL61010-1:2012
- SEMI S2-0715
TC010M-80 TG900MxWC-80, TG1300MxWC-80
TC010MT-30 TG1300MBAC-82, TG1300MBAC-88 - CE marking 3)
1) Refer to "12.2 Model Code Explanation" about the pump model.
2) Conformity of TC011M series are only in the old version.
3) EC directive applied to the pump and the controller are as follows.
- Machinery Directive (2006/42/EC)
- EMC Directive (2014/30/EU)
- RoHS Directive (2011/65/EU)
4) In case of the other models (e.g. '-nn (n is a number)' is added on the end of model name) or
the different combination, inquire of us about the conformity directives and standards.

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Notation in this Manual
The following symbols and notations are used in this manual.
Notation Contents
Indicates the useful information on using the pump.
[START] switch
[STOP] switch
Indicates switches on the front panel of the controller.
“ ***** ”
Indicates the references.
(E.g. the other item in this manual, other relevant instruction
manual, other attached document, etc.)
Safety
●The following ‘Important warning’ and ‘Important caution’ provide safety information.
Be sure to read them before using the pump.
In addition, be sure to follow ‘Important warning’ and ‘Important caution’.
●Note that all ‘Important warning’ and ‘Important caution’ in this manual are limited to the range
of our expectation.
For your safety, follow all general rules (laws and regulations) in addition to the instructions
provided in this manual.
●Osaka Vacuum holds the right to modify the product specifications without prior notice in order
to maintain and improve the quality of the product.
For this reason, the contents of this manual may not match exactly with the actual product.

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Mark and Symbol
The following marks and symbols are used for ‘Important warning’ and ‘Important caution’ in this
manual.
Mark Definition
WARNING Important warning
This indicates the hazard which results in death and/or serious injury.
CAUTION Important caution
This indicates the hazard which results in injury.
NOTICE This indicates the matter that the protective function of the pump is
activated and/or the property damage including the pump happens.
Symbol Definition
Fire or explosion hazard.
Gas hazard.
Beware of electric hazard.
Hot surface.
Do not disassemble.
Do not touch.
Prohibited.
Mandatory.

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Warranty and Liability
Osaka vacuum warrants the quality of its pumps, controllers, and their accessories as described in
the included "Standard Warranty Certificate".
Note, however, that using the pump in manners not described in this manual will void all warranty.
Use of the pumps under atypical conditions without prior consent from Osaka Vacuum will also void
the warranty.
Copyright and Responsibilities
Osaka Vacuum, Ltd. holds the copyright of this manual.
This manual is provided solely for the purpose of providing support for the use of the pump, and
must not be used for any other purpose.
It is strictly prohibited to quote, reproduce, falsify, and translate the entire or partial contents of this
manual.
The original language of this manual is the English. (Other languages are translated based on this
manual.)
Any information contained in this manual is subject to change without notice.

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Definition of Eligible Worker
Although this manual has been written for all the people handling the pump, for safety, the eligible
workers are defined as follows.
■Handling worker
Handling worker indicates a worker performing the receiving, unpacking, transportation, packing and
shipment for the pump.
Handling worker must read this manual thoroughly and fully understand the work and safety related
to handling of the pump before starting work.
■Installation worker
Installation worker indicates a worker who has the knowledge and experience related to the
installation of the pump and performs installing the pump and/or connecting the cable and/or
installing the peripheral devices.
Installation worker must read this manual thoroughly and fully understand the work and safety
related to installing of the pump before starting work.
■Operator
Operator indicates a worker operating the pump via the controller.
Operator must read this manual thoroughly and fully understand the work and related to operating
of the pump before starting work.
■Maintenance worker
Maintenance worker indicates a worker who has the specialized knowledge of the electrotechnics
and mechanical engineering and who has the experience of maintaining of the pump.
The maintenance worker performs checking and/or maintaining and/or removing and/or storing
and/or disposing the pump.
Maintenance worker must read this manual thoroughly, and fully understand the work and safety
related to the check, maintenance, removal, storage, disposal of the pump before starting work.

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Eligible Worker for Each Chapter
WARNING
Equip each worker with the appropriate personal protective equipment.
The personal protective equipment shown in this manual are things which are
expected typically.
Add the appropriate personal protective equipment as necessary.
CAUTION
Only the eligible worker shall perform the work in each chapter.
Confirm the safety of nearby other workers and/or outsiders before starting the
work in each chapter.
Hereinafter, personal protective equipment is referred to as the ‘PPE’.
The eligible worker and recommended PPE in each chapter of this manual are as follows.
Chapter Handling
worker
Installation
worker Operator Maintenance worker
Introduction 
1 Workflow from Unpacking
to Operation 
2 Unpacking and Carriage  
3 Handling of Pump  
4 Connecting the Peripheral
Devices  
5 Connecting of Controller
and Cables 
6 Operation 
7 Various Operation 
8 Emergency OFF (EMO)
System 
9 Troubleshooting  
10 Check / Maintenance  
11 Storage / Scrap 
12 Specification 
PPE; Protective gloves 
Safety shoes 
Helmet 
Goggle 
Gas mask 

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Contents
Introduction ----------------------------------------------------------------------------------------------1
Features of Pump .....................................................................................................1
Notation in this Manual.............................................................................................3
Safety........................................................................................................................3
Mark and Symbol......................................................................................................4
Warranty and Liability ...............................................................................................5
Copyright and Responsibilities.................................................................................5
Definition of Eligible Worker .....................................................................................6
■Handling worker ...........................................................................................6
■Installation worker ........................................................................................6
■Operator .......................................................................................................6
■Maintenance worker.....................................................................................6
Eligible Worker for Each Chapter .............................................................................7
Contents---------------------------------------------------------------------------------------------------8
1 Workflow from Unpacking to Operation --------------------------------------------------- 10
2 Unpacking and Carriage ------------------------------------------------------------------------ 11
2.1 Unpacking......................................................................................................... 11
■Checking of Pump Weight.......................................................................... 11
■Checking of Contents.................................................................................12
2.2 Carriage............................................................................................................13
3 Handling of Pump --------------------------------------------------------------------------------- 14
3.1 Using Gas.........................................................................................................14
3.2 Usage Environment..........................................................................................15
3.3 External View and Dimensions.........................................................................16
3.4 Name of Pump Part..........................................................................................18
3.5 Labels ...............................................................................................................20
3.6 Preparations before Installation .......................................................................23
■Strength of Equipment (Rapid Shutdown Torque) .....................................23
■Design of Chamber and Vacuum Piping....................................................23
3.7 Fixing Method and Process..............................................................................24
■Pump Fixing Bolts ......................................................................................25
■Fixing Method.............................................................................................26
4 Connecting the Peripheral Devices --------------------------------------------------------- 29
4.1 Connecting of Exhaust Piping ..........................................................................29
■Selection of Backing Pump ........................................................................29
■Installation of Backing Pump......................................................................29
■Connecting of Exhaust Piping....................................................................29
4.2 Connecting of Purge Gas Piping......................................................................30
4.3 Connecting of Cooling Water Piping ................................................................31
5 Connecting of Controller and Cables------------------------------------------------------- 32
6 Operation --------------------------------------------------------------------------------------------- 33
6.1 Confirmation before Operation.........................................................................33
6.2 Notice during Operation ...................................................................................34
■Touchdown .................................................................................................34
6.3 Pump Start-up / Stop........................................................................................34
7 Various Operation --------------------------------------------------------------------------------- 35
7.1 Putting Gas into Vacuum Device......................................................................35
7.2 Start-up Simultaneous with Backing Pump......................................................36
7.3 Bake-out ...........................................................................................................36
7.4 Using of Metal Band Heater (TG-MI series).....................................................37
8 Emergency OFF System ------------------------------------------------------------------------ 38
■Emergency Off (EMO) Circuits...................................................................38
■Protection signal.........................................................................................38
9 Troubleshooting------------------------------------------------------------------------------------ 39

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10 Check / Maintenance---------------------------------------------------------------------------- 40
10.1 Daily Check ....................................................................................................40
10.2 Recommended Overhaul Interval ..................................................................41
■Low Speed Mode (TC011M series) ...........................................................41
10.3 Protective Bearing ..........................................................................................42
10.4 Removal of Pump...........................................................................................43
10.5 Request of Overhaul / Repair.........................................................................45
11 Storage / Scrap------------------------------------------------------------------------------------ 46
11.1 Storage ...........................................................................................................46
11.2 Disposal ..........................................................................................................46
12 Specification--------------------------------------------------------------------------------------- 47
12.1 Specification ...................................................................................................47
12.2 Model Code Explanation ................................................................................50
Appendix : Contact information----------------------------------------------------------------- 58

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1 Workflow from Unpacking to Operation
The workflow from unpacking of pump to operation is as follows.
Unpacking ●Keeping of packing materials. (For reuse.)
●Checking of pump weight
●Checking of contents
Carriage ●Notice of carriage
Check before Installation ●Confirming of using gas
●Confirming of usage environment
●Confirming of pump dimensions and parts name
●Confirming of warning label and name plate
Installation of Pump ●Confirming and performing of fixing method
●Connection of inlet port
●Selection and installation of backing pump
●Connection of purge gas piping
●Connection of cooling water piping
Connecting the
Controller and the Cables
●Connecting of controller and cables
Operation ●Checking before operation
●Notice during operation
●LOCAL operation mode
●REMOTE operation mode

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2 Unpacking and Carriage
2.1 Unpacking
Be careful not to damage contents.
And, keep the packing materials and inlet/outlet flange for shipping to reuse.
■Checking of Pump Weight
The pump weighs about 14 - 56 kg. Check the pump weight, before unpacking.
The weight of each model is shown in Table2.
Table2 Weight of Pump
Model Weight
TG390MVyB / MByB / MLVyB / MLByB
TG420MVyB / MByB / MLVyB / MLByB About 14kg (31lb)
TG390MCyB / MLCyB
TG420MCyB / MLCyB About 17kg (37lb)
TG390MxyC / MLxyC
TG420MxyC / MLxyC
TG390MIxWC
TG420MIxWC About 18kg (40lb)
TG900MVyB / MByB / MLVyB / MLByB
TG1300MVyB / MByB / MLVyB / MLByB About 34kg (75lb)
TG900MCyB / MLCyB / MUCyB
TG1300MCyB / MLCyB / MUCyB
About 42kg (93lb)
TG900MxyC / MLxyC
TG1300MxyC / MLxyC
TG900MIxWC
TG1300MIxWC
TG900MxWC-80, TG1300MxWC-80,
TG1300MBAC-82, TG1300MBAC-88 About 42kg (93lb)
TG2400MxyB About 45kg (99lb)
TG2400MxyC About 54kg (119lb)
TG2400MIxWC About 56kg (123lb)

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■Checking of Contents
The components and attachments of standard package is shown below.
Some parts may be different depending on the specifications of the pump.
If any of the contents are different from the expected contents, and/or if any of the contents have
abnormality and/or damage, contact us immediately.
Name Quantity
Pump
(For TG-MI series, the metal band heater, heater cover and resistance bulb are
incorporated.)
1 set
Inlet flange for shipping and its peripheral parts (attached to inlet port)
Temporary blank flange (with bolt and nut x 4set) 1 pc.
TG390MV, TG420MV O-ring x 1 1 set
TG390MB, TG420MB Center ring with O-ring x 1
TG390MC, TG420MC Temporary O-ring x 1
TG900MV, TG1300MV,
TG2400MV
O-ring x 1, and Eye-nut x 2
TG900MB Center ring with O-ring x 1, and Eye-nut x 2
TG1300MB,
TG2400MB
Center ring with O-ring x 1, Temporary packing x 1,
and Eye-nut x 2
TG900MC, TG1300MC Temporary O-ring x 1, and Eye-nut x 2
Protective mesh screen (incorporated into inlet port) 1 sheet
Outlet flange for shipping and its peripheral parts (attached to outlet port)
TG390M, TG420M
(KF25)
Temporary blank flange x 1, Center ring with O-ring x 1,
Fixture x 1, and Bolt x 4
1 set
TG900M, TG1300M,
TG2400M (KF40)
Temporary blank flange x 1, Center ring with O-ring x 1,
and Clamp
Cooling fan with fan guard (For forced air cooling type only, incorporated into pump) 1 set
Water cooling pipe (For water cooling type only, incorporated into pump) 1 set
Mating connecter for cooling fan (For water cooling type and natural air cooling type) 1 set
Cooling jacket (For TG-MI series only, incorporated into pump) 1 set
Outlet port heater
(For TG900MI and TG1300MI series only, incorporated into that port)
1 set
Instruction manual (this manual) 1 copy
Inspection certificate 1 copy
Standard warranty conditions 1 copy
Inspection order form 1 copy

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2.2 Carriage
WARNING
Do not get under the lifted pump.
The pump is about 14 to 56kg in weight.
CAUTION
Use the lifter and/or crane and/or handcart when lifting the pump and/or
carrying the pump.
And, be careful that the pump does not turn over and/or does not fall down.
The pump is about 14 to 56kg in weight.
In case of lifting up the pump less than 18kg in weight, lift it with both hands
tightly and do not take an unnatural posture.
Use the eye-nut attached to the inlet flange of the pump when lift up the pump.
Do not carry the pump whose weight is heavier than 18kg by human power.
NOTICE Do not inflict an excessive vibration and/or shock to the pump.

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3 Handling of Pump
WARNING
Do not expose the worker to the vacuum.
3.1 Using Gas
WARNING
Obtain the each SDS from the gas supplier before using the gases, and be
sure to confirm the characteristics of the each gas.
Take necessary protection measures according to the characteristics of the
gas in order to secure the safety of the workers.
When the explosiveness and/or flammable gases are used,
prevent an explosion and/or a fire.
When the poisonous and/or reactive gases are used,
prevent these gases from leakage.
If the workers are exposed to the hazardous gases, give a first aid and see a doctor
immediately.
The pump varies in usable gases depending on the model (specifications).
Refer to the “12.2 Model Code Explanation” for the pump model.
NOTICE Do not use the following gases for the pump of the basic type.
Corrosive gas which corrodes aluminum alloy such as chlorine (Cl), and/or
gallium (Ga), and/or mercury (Hg).
Reactive gas which the reaction products deposit inside the pump.
In case of using corrosive gases (exclude Ga and/or Hg), designate the pump of the corrosion
resistant type.
NOTICE Do not use the gases including the gallium (Ga), and/or mercury (Hg), even if the
pump is the corrosion resistant type.
When use of these gases is not avoided, consult us.
For the application that the reaction products deposit inside of the pump, we propose the special
specifications pump that has the corrosion resistant specifications and temperature control function.
Contact us for details.

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3.2 Usage Environment
The pump can be used in the following environment.
Usage environment Contents
Location Indoor
Ambient temperature 10 to 40 °C (50 to 104 °F) ; Water cooling type
10 to 32 °C (50 to 90 °F) ; Forced air cooling type and
Natural air cooling type
Ambient relative humidity 5 to 80 %RH (No condensation)
Altitude 2000 m or below.
Magnetic field 2 mT (20 Gauss) or below.
NOTICE Do not use the pump in the following environment.
An area which is exposed to reactive and/or corrosive and/or poisonous
gases.
An area which is exposed to explosiveness and/or flammable gases.
An area which is exposed to radiation.
An area which is exposed to high temperature and/or high humidity.
An area which is exposed to strong magnetic field and/or electric field.
An area where a lot of vibration exists.
An area which is exposed to direct sunlight.
An area which is exposed to sea breeze.
An area where dew condensation happens.
An area where water drops.
An area where a lot of dust exists.
NOTICE Do not exceed the permission ambient temperature.
If an ambient temperature exceeds the permission level, the maximum throughput
should decrease.
NOTICE Use the pump in 2000m or less altitude.
If altitude exceeds 2000m, the insulation performance of the pump deteriorates,
and the pump may break down.
NOTICE When the pump is operated in magnetic field higher than permissible level, design
the magnetic shield. In addition, consult us before use.
If the pump is operated in strong magnetic field, the temperature of the rotor rises,
and the pump may break down.
NOTICE Do not inflict an excessive vibration and/or shock to the pump.
If the pump inflict an excessive vibration and/or shock, the pump will stop by
protective functions.

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3.3 External View and Dimensions
The external view and dimensions are shown in Fig.1 - Fig.3 and Table3.
B
φ180
φ180
86
C
104
45ﾟ
49
4-M8 DP18
φ160
TG390M / 420M series
(Natural Air cooling type)
D
～110
100
φ186
189
11
89
119
Center of Gravity
TG-MI type
A
KF25
41.5
Air cooling type
Water cooling type
ISO-G1/4
103
80 89
131
11
ISO-Rc1/4
89
125
ISO-Rc1/4
125
Fig.1 External View and Dimensions for TG390M / TG420M series
TG900M / 1300M series
(Natural Air cooling type)
TG-MI type
Air cooling type
Water cooling type
51
B
φ264
D
53
51
A
C
Center of Gravity
165
φ245
60ﾟ
8-M12 DP23
134
φ220
ISO-G1/4
127
180
120
168
11
54
ISO-Rc1/4
φ272
180
240
11
168
54
54
ISO-Rc1/4
KF40
Fig.2 External View and Dimensions for TG900M / TG1300M series
Forced air cooling type
Natural air cooling type
Forced air cooling type
Natural air cooling type
TG-MI series
Water cooling type
Water cooling type
TG-MI series

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TG2400M series
(Air cooling type)
TG-MI type
Water cooling type
12
φ255
6-M16 DP25
φ286
185.5
154.5
φ310
120
B
ISO-G1/4
96
47.5
C
A
KF40
202
35ﾟ
52.5
200
54
ISO-Rc1/4
φ324
250
200
233.5
12
ISO-Rc1/4
54
Center of Gravity
D
~170
127
Fig.3 External View and Dimensions for TG2400M series
Table3 Dimensions of Pump
Unit: mm
Model 1) A B C D
TG390MaVyz VG100 Φ185 15 263
TG390MaCyz CF100 Φ152 21 269
TG390MaByz ISO-B100 Φ165 12 260
TG420MaVyz VG150 Φ235 16 225
TG420MaCyz CF160 Φ203 22 230
TG420MaByz ISO-B160 Φ225 16 230
TG900MaVyz VG150 Φ235 16 376
TG900MaCyz CF160 Φ203 22 382
TG900MaByz ISO-B160 Φ225 16 390
TG1300MaVyz VG200 Φ300 16 324
TG1300MaCyz CF200 Φ253 25 385
TG1300MaByz ISO-B200 Φ285 16 359
TG2400MaVyz VG250 Φ350 16 340
TG2400MaByz ISO-B250 Φ335 16 340
1) Refer to "12.2 Model Code Explanation" about the pump model.
Forced air cooling type
Water cooling type
TG-MI series

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3.4 Name of Pump Part
The name of each pump purt is shown in Fig.4 - Fig.6 and Table4.
(Air Cooling Type)
(Water Cooling Type)
(TG-MI series)
TG390M / TG420M series
Fig.4 Name of Pump Part for TG390M / TG420M series
(Air Cooling Type)
(Water Cooling Type)
(TG-MI series)
TG900M / TG1300M series
Fig.5 Name of Pump Part for TG900M / TG1300M series
Fig.6 Name of Pump Part for TG2400M series
Forced air cooling type
Water cooling type
TG-MI series
Forced air cooling type
Forced air cooling type
Water cooling type
Water cooling type
TG-MI series
TG-MI series
TG2400M series

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Table4 Name of Pump Part and Each Function
No. Name of pump part Function
Pump
①Inlet port Connects to chamber (vacuum devices).
②Outlet port Connects to backing pump.
③Power input connector Connects to output cable.
④Purge port Connects to purge gas piping.
⑤Inlet/Outlet port of cooling water (Only for water cooling type)
Connects to water cooling piping.
The flow direction of the cooling water is arbitrary.
⑥Cooling fan (Only for forced air cooling type)
Cooling the pump.
During supplying input power, it always fans.
⑦Cooling jacket (Only for TG-MI series)
Cooling the pump.
⑧Inlet/Outlet port of cooling jacket (Only for TG-MI series)
Connects to water cooling piping.
The flow direction of the cooling water is arbitrary.
⑨Heater cover (Only for TG-MI series)
Metal band heater is installed inside.
⑩Outlet port heater (Only for TG900MI / TG1300MI)
Heating the outlet port.
⑪Metal band heater connector (Only for TG-MI series)
Connects to heater cable.
⑫Outlet port heater connector (Only for TG900MI / TG1300MI)
Connects to heater cable.
⑬Temp. sensor connector (Only for TG-MI series)
Connects to thermo sensor cable.
⑭Thermal switch (Only for TG-MI series)
The switch for overheat protection of
metal band
heater.
For TG900MI / TG1300MI / TG2400MI series, it is
located inside of the heater cover.