Osaka TG220F Series User manual

H06533-R06
OPERATION MANUAL
COMPOUND MOLECULAR PUMP
TG220F series
Before using the pump, read carefully and understand thoroughly the caution in
this operation manual.
Save this operation manual for feature use and reference.
OSAKAVACUUM, LTD.

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Definitions and Symbols
In this operation manual, “Warning” and “Caution” are defined as follows:
Warning: To prevent an accident resulting in injury or death.
If you don’t follow it, it will cause an accident resulting in injury or death.
Caution: To prevent damage to the pump.
If you don’t follow it, it will cause damage to the pump and injury.
Warning
Important description for preventing accidents resulting in injury or death when you use
the pump.
Caution
Important description for safe operation of the pump.
Warning
Before using the pump, be sure to read this operation manual for safe operation of the
pump. Operation not following the procedure in this operation manual may cause a failure
or an accident resulting in injury etc.
Warning
1) Pump installation
Secure the pump onto the frame or onto the floor before use.
When the pump is used in a system, read and understand this operation manual
thoroughly before designing the system.
2) Inspection
Do NOT put your hand or foreign object in the pump.
3) Process gas
Do NOT evacuate gallium or its compounds with the pump. It may damage the pump.
4) Overhaul and repair
If the pump has been used to evacuate toxic or reactive gas, purge the pump with inert
gas before removing it from the equipment. Take protective measures not to expose any
part of your body to the toxic gas, the reactive gas or its products.
Before transporting the pump, cover the inlet, the outlet, the leak port and the purge gas
inlet firmly so that reactive products do NOT leak out of the pump in transport.
5) Disassembly and retrofit
Do NOT disassemble and/or retrofit the pump. It will cause a failure or an accident.
6) Temporary inlet flange
The temporary inlet flange is only for shipping. Do NOT use it for any other purpose.
7) Air inrush
Do NOT rush air into the pump in operation. It may cause a failure or damage to the
pump. Take care not to rush air into the pump.
8) Heat emission
The pump generates heat in operation. Do NOT touch the pump in operation, or you
may get burned.

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Caution
1) Compatibility of the pump and the power supply
A proper combination between the pump model and the power supply model is
required.
Use the same model of power supply as specified on the caution plate attached at the
connectors of the pump.
2) Start and Stop
To start/stop the pump, use the START/STOP button on the front panel of the power
supply, or send Start/Stop signal through the REMOTE connector on rear panel of the
power supply.
Do NOT turn the input power ON/OFF to start/stop the pump operation.
In repeating a start/stop operation, start or stop the pump at intervals of 5 seconds or
longer.
Do NOT disconnect the cable while the pump is in operation.
3) Gas purge
Purge the pump in operation with inert gas when evacuating dust.
4) Backing pump
Always connect the backing pump to the pump before using the pump.
5) Maximum throughput
Maximum throughput of this pump is approximately as follows. It depends on backing
pressure and ambient temperature.
Nitrogen: 730 Pa·L/s [400sccm]
Argon: 730 Pa·L/s [400sccm]
Before using the pump with a higher throughput than the above, consult OSAKA
VACUUM, Ltd.

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CONTENTS
Page
1. Preface -------------------------------------------------------------------------5
1-1. Warranty
1-2. Dimensions
1-3. Name of pump parts
1-4. Name plates
2. Opening the crate ----------------------------------------------------------- 8
3. Preparation ------------------------------------------------------------------- 9
3-1. Transportation
3-2. Compatibility of the pump and power supply
3-3. Pump installation
3-4. Maintenance space
3-5. External effect on the pump
3-6. Cooling of pump
4. Vacuum piping ---------------------------------------------------------------12
4-1. Inlet port piping
4-2. Selection of backing pump
4-3. Foreline piping
4-4. Purge gas line piping
5. Cable connection ------------------------------------------------------------ 14
6. Operation --------------------------------------------------------------------- 15
6-1. Precautions before operation
6-2. Starting/stopping the pump
6-3. Starting/stopping the pump during operation
7. Baking ------------------------------------------------------------------------- 18
8. Maintenance ------------------------------------------------------------------18
8-1. Vibration
8-2. Reactive products
8-3. Replacement of bearings
8-4. Air inrush
8-5. Precaution of operation in winter
9. Storing the pump ------------------------------------------------------------20
10. Recommended overhaul and service ----------------------------------- 20
11. Discarding -------------------------------------------------------------------- 21
12. Specifications ---------------------------------------------------------------- 22

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1. Preface
1-1. Warranty
The warranty on the pump and the peripherals is specified in the attached document, “Standard
Warranty Conditions” published by Osaka Vacuum, Ltd.
1-2. Dimensions
1) TG220F series
A B C D E F G H
ISO-R100 130 12 200 157.5 145.5 182.5 141
CF100 152 21 220 177.5 165.5 202.5 161
TG220F VG100 185 15 200 157.5 145.5 182.5 141
(Water-cooling type)

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(Air-cooling type)

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1-3. Name of pump parts
1) Inlet flange
2) Outlet flange
3) Cooling-water inlet/outlet
4) Connector
5) Purge gas inlet
6) Leak port
7) Fan
Figure 1. Name of pump parts
1-4. Name plates
Figure 2. Name plates
1) Main plate 2) Power Supply model plate
Specifies pump type, manufacturing Specifies the type of power supply to be used
number, and manufacturing date
Prior to opera
t
ion, make sure that
the model of the POWER SUPPLY is
TC223
Air-cooling type
Water-cooling type

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3) Caution plate 4) Caution plate
Specifies the weight of pump Connect the cooling-water line
5) Caution plate 6) Caution plate
Connect to the backing pump During operation, the pump is hot.
Do NOT touch the pump
7) Caution plate 8) Caution plate
Connect to the leakage line Connect to the purge gas line
2. Opening the crate
Confirm the following items when opening the crate.
A: Opening the crate
Table 1 shows pump weight.
Table 1. Pump weight
Pump Inlet flange Weight
ISO-R100 6kg [13lb]
CF100 8kg [18lb]
TG220F VG100 6kg [13lb]
B: Damage to the contents
If any damage to the contents is found, notify Osaka Vacuum, Ltd. of the damage before use.
C: Components
Standard components are as follows.
(1) Inlet flange gasket (O-ring) 1 pc.
(2) Inlet protective screen 1 pc.
(3) Temporary inlet blank flange with bolts & nuts 1 set
(4) Outlet port blank flange with clamp and centering ring 1 set
(5) Operation manual 1 set
WEIGHT
a
pp
rox.**k
g(
lb
)
WATER
FORELINE
LEAKPORT PURGEPORT

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3. Preparation
3-1. Transportation
Use a truck or a lift etc. in transportation, installation to or removal from system. Protect the pump
from impact.
3-2. Compatibility of the pump and power supply
Confirm both the pump model and the power supply model before installation. The caution plate
at the pump connector on the pump shows the power supply model to be used.
Caution
The compatibility of the pump model and the power supply model is as follows.
Pump model Power supply model
TG220F series -------------------------------------- TC221, TC222, TC223
3-3. Pump installation
Caution
Be careful not to contaminate and/or scratch the inlet flange and do not touch inside the
pump, because the pump may not be able to get sufficient performance by leak and/or
contamination.
Secure the pump to the system or the frame not only at the inlet flange but also at the bottom
utilizing the threaded holes prepared for securing the pump. Do not use the legs for shipping to
secure the pump.

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Be sure to use the bolts listed in table 3 to secure the pump.
When the inlet flange of the pump installs to the rigid
system, secure the pump with the bolts listed in table 3
firmly.
Securing method A
When the chamber installs to the inlet flange of the pump,
secure the pump to the pump stand with the bolts listed in
table 3 and also secure the pump stand to the rigid floor or
the frame firmly.
Securing method B
When the inlet flange of the pump installs to soft system
such as bellows, secure the pump to the pump stand with
the bolts listed in table 3 and also secure the pump stand to
the rigid floor or the frame firmly.
Securing method C
Figure 3. Example of pump installation
Warning
If an accident happens to the rotor during the pump operation, damage to the rotor will
generate a large torque. This torque will try to make the entire pump rotate. Be sure to
secure the pump to the frame firmly, in order to avoid any danger caused by this torque.
Use the securing bolts listed in table 3 to secure the pump. If you could not prepare the
securing bolts listed in table 3, consult to Osaka Vacuum, Ltd. before installation.
Do not use the legs for shipping to secure the pump.
Use metal flexible tubing or bellows to isolate the vibration of the backing pump that
conducts to the pump.Also, install the backing pump separately from the pump or use a
vibration absorber if the pump and the backing pump are installed in the same frame.

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When planning how to secure the pump to the system, the frame or the floor, take into consideration
the rotation torque listed in table 2. Make sure the pump is secured strong enough to withstand the
torque.
Table 2. Torque that can be generated when the pump is damaged
Pump model Rotation torque [N·m]
TG220F series 390
Table 3 shows the size and the quantity of securing bolts of the pump at the bottom of the pump and
the inlet flange. Be sure to tighten all the bolts equally and firmly.
Table 3. Securing bolts of the pump
Securing bolts location Securing bolts (qty & size) P.C.D. Bolt material
(Property class)
TG220F
ISO-R100 8 x clamp –
CF100 16 x M8 130.2
Inlet flange VG100 8 x M10 160
Bottom of the pump 4 x M8 78
SUS304 (70 or higher)
or
SCM435 (8.8 or higher)
3-4. Maintenance space
Keep an adequate space around the pump.
3-5. External effect on the pump
1) Ambient temperature
Ambient temperature of the water-cooling (air-cooling) pump in operation must not exceed
40°C [104°F](32°C [90°F]). If the temperature rises, the maximum throughput will decrease.
Caution
The pump generates heat in operation. If the ambient temperature exceeds 40°C [104°F]
in water-cooling type (32°C [90°F] in air-cooling type), it will cause a failure.
2) Magnetic field
Do not operate the pump in magnetic field. The permissible magnetic field of the pump is
2.5mT [25 Gauss] for horizontal direction and 15mT [150 Gauss] for vertical direction. When
the pump will operate in stronger magnetic field than the limit, prepare magnetic shield or
special pump. Consult with Osaka Vacuum, Ltd. before operation.
Caution
The temperature of the rotor rises when the pump operates in magnetic field, and it will
cause damage of the rotor.
3) External shock and vibration
Do not give an external shock or a vibration to the pump during operation.

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3-6. Cooling of pump
The pump should be cooled during operation.
For water-cooling type:
1) Set the power supply for water-cooling type. See the operation manual of the power supply.
2) Connect the cooling water pipes to the cooling water inlet and outlet ports (ISO Rc 1/8
female screw). There are two openings and either can be applied as inlet/outlet.
3) Make sure that cooling water supply pressure is 0.6 MPa [5kgf/cm2G, 72.5psiG] or lower.
The minimum required flow rate of cooling water is 1.5 L/min. Use as clean water as
possible.
4) Control the temperature of cooling water in the range of 10°C [50°F] to 35°C [95°F] at inlet.
5) Be careful that cooling water does not freeze in winter.
6) The pump can be stopped when the cooling water is interrupted by application of flow
switch to the cooling water outlet. Connect the contact (normally closed) of the flow switch
to the protection terminal of the control connector of the power supply. Refer to the
operation manual of the power supply.
For air-cooling type:
1) Set the power supply for air-cooling type. See the operation manual of the power supply.
2) Connect the fan cable to the fan.
4. Vacuum piping
4-1. Inlet port piping
1) Use materials for the piping with a small out gassing rate such as stainless steel or aluminum
alloy.
2) Take the piping conductance into consideration when designing the piping.
3) Minimize the leak rate at the piping and the system. Degrease the wall surface of the vacuum
piping in order to minimize the out gas.
4) When the pump is installed in a system, do not remove the protective screen at the inlet. The
protective screen prevents foreign objects from falling into the pump.
Caution
Even with a protective screen, foreign objects may fall into the pump. It will cause trouble
or damage.
4-2. Selection of backing pump
1) The performance of the pump depends on the capacity of the backing pump. Refer to table 4
for the backing pump selection. Recommended backing pump capacity is shown in the table.
Use a backing pump that has a capacity at this level or higher.
Table 4. Recommended backing pump capacity
Pump model Recommended backing pump capacity
TG220F series 80L/min [2.8cfm] or higher
Caution
If the performance of the backing pump deteriorates, the performance of the pump also
deteriorates.

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4-3. Foreline piping
1) Use stainless steel, aluminum or metal flexible tubing etc. for piping to connect the pump to
the backing pump.
2) The length and diameter of the piping will affect the pump performance. Minimize the piping
length and maximize the diameter for a larger conductance.
3) Use metal flexible tubing or bellows to isolate the vibration of the backing pump that
conducts to the pump. Also, install the backing pump separately from the pump or use a
vibration absorber if the pump and backing pump are installed in the same frame.
4-4. Purge gas line piping
When pumping a dust, purge the inside of the pump from the purge gas inlet. Refer to figure 4.
Nitrogen is commonly used as purge gas. Set the flow rate to 9.2 Pa·L/min [5sccm].
When the pump is not being purged, shut the purge gas inlet with a blank plug.
Caution
Excessive or insufficient purge gas flow rate causes failure or deterioration of the pump
performance.
Figure 4. An example of purge gas line piping

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5. Cable connection
Figure 5. Connection of power supply
Warning
Be sure to shut the input power off to the power supply before connecting the cables.
Otherwise, you may get an electric shock.

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Be sure to confirm the combination between the pump model and power supply model.
Connect the connector on the pump and “MOTOR” connector or “OUTPUT” connector on the rear
panel of the power supply with motor cable. Connect the connector on the fan and “FAN” connector
on the rear panel of the power supply with fan cable.
Caution
When connecting the motor cable, set the pins to correct position, plug in the connector at
a straight angle and fasten the coupling nut to the end.
6. Operation
6-1. Precautions before operation
1) Be sure to confirm the combination of the pump model and the power supply model.
2) Make electrical connection of the pump and the power supply. Refer to the operation manual
of the power supply.
3) The pump needs to be cooled during operation. See also section 3-6.
For water-cooling type:
Connect the cooling water line to the cooling water inlet/outlet at the pump. Use as clean
water as possible. Be sure that the interlock is operating so that the pump will stop
automatically if the cooling water flow stops or the flow rate becomes too low. The
minimum required flow rate of cooling water is 1.5 L/min, and acceptable temperature
range is 10 - 35°C [50 - 95°F] and water pressure is below 0.6 MPa [5kgf/cm2G,
72.5psiG].
For air-cooling type:
Connect the fan cable to the fan.
Caution
If cooling is insufficient, it will cause a failure.
4) The pump and backing pump can be started up together. However, the pump may have a
failure of “oL1” which means acceleration time over during acceleration and the pump may
stop, if the volume of the chamber is very large. In this case, follow the next procedure.
If the chamber pressure does not reach 260 Pa [2.0 Torr] within 1.2 minutes only with the
backing pump, continue to pump the chamber only with the backing pump. Once the chamber
pressure reaches 260 Pa [2.0 Torr], then start the pump.
5) When pumping dust, purge the inside of the pump from the purge gas inlet. Set the purge gas
flow rate 9.2 Pa·L/min [5sccm].
Caution
Excessive or insufficient purge gas flow may cause deterioration or failure of the pump.

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6-2. Starting /stopping the pump
The pump can be operated with signal from the START/STOP button on the front panel of the
power supply for LOCAL operation or can be controlled remotely with signals from the system
for REMOTE operation. Refer to the operation manual of the power supply for operation in detail.
Refer to the following two examples of start/stop procedure.
a. Example 1 (with main and foreline valves)
Start Stop
.(5sccm)
9.2PaL/min
Chamber
MV LV *2
Pump
FV *3
RP
~1SLM
PV
N
2
N
2
Power supply
Close LV
Start RP
Open FV
Open PV*1
Open MV
Start pump
Close MV
Stop pump
Close FV
Open LV
Stop RP
Close LV
Close PV *1
2 min *4
*1
0.15MPa
(0.5kgf/cm2G)
(7.3psiG)
Pump: TG220F series
RP: Rotary pump
MV: Main valve
LV: Leak valve
FV: Fore valve
PV: Purge valve *1
*1 In case the pump is gas-purged.
*2 Install LV between FV and Pump on some system.
*3 It is possible to remove FV if RP has shut-off valve.
*4 Leakage time to avoid the back streaming from lubricant.
Figure 6. Example 1 of start/stop procedure

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b. Example2 (without main valve or foreline valve)
Start Stop
N
29.2PaL/min
(5sccm)
Chamber
LV
Pump
RP
Power Supply
Close LV
Start RP
Start Pump
Stop Pump
Open LV
Stop RP
5 min *5
*5 Deceleration time for rotational speed of the rotor.
Figure 7. Example 2 of start/stop procedure
Warning
Leak the inside of the pump to atmosphere when the pump stops completely. Oil vapor
may flow back to whole inside of the pump if the pump is kept in vacuum. Backflow like
this case may cause deterioration.
Do not exceed pressure inside the pump to 0.17 MPa [0.7 kgf/cm2G, 10.2psiG]. Otherwise,
the pump may damage.
6-3. Starting/stopping the pump during operation
The pump can be stopped during acceleration or can be re-accelerated during deceleration.
However, leave at least 5 seconds between each start and stop operation.

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7. Baking
It can reach better ultimate pressure when the pump and the chamber are baked.
Mount a baking heater on top of the pump casing for baking of the pump as shown below:
Keep baking temperature below 120°C [248°F]. The baking heater is provided as the option.
Figure 8. Position of the heater
Caution
Awrong position of a baking heater or an excessive baking temperature may result in the
pump failure. Do not exceed 120°C [248°F] of the baking temperature at inlet flange.
8. Maintenance
8-1. Vibration
If the level of pump vibration increases abnormally during normal operation, which you can feel
by hand or measured full amplitude of the vibration is 1 µm or more with vibration meter, contact
Osaka Vacuum, Ltd.
Figure 9. Measurement of vibration at inlet flange and/or bottom of casing
Heater
Measuring point

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8-2. Reactive products
If a lot of reactive products deposits on inside the pump, it will make the pump unable to start or
will cause a more serious problem. Overhaul the pump periodically.
Caution
If reactive products are left inside the pump, the parts will be corroded, and the pump will
be unable to be overhauled.
8-3. Replacement of bearings
The lifetime of the bearing varies with process. Periodical overhaul is recommended to replace the
bearings, every 20,000 hours with non-reactive gas. Consult with Osaka Vacuum, Ltd. about
replacement of the bearing if the pump needs to evacuate dust.
8-4. Air inrush
The pump can be restarted easily after an accidental air inrush. Contact with Osaka Vacuum, Ltd.
if you experience any difficulties.
8-5. Precaution of operation in winter
Be careful not to freeze the cooling water in winter.
It is possible that the pump gets failure of “oL1”, acceleration time over, during acceleration when
operating the pump in winter. Because the viscosity of the lubricant rises by low temperature and
it requires larger torque. In this case, re-start the pump after resetting the failure.

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9. Storing the pump
Cover the inlet flange, the outlet flange and the purge gas inlet with blank flanges and plugs before
storing the pump for a long time.
Purge the pump with an inert gas such as nitrogen, so as not to leave any reactive or corrosive gas in
the pump.
If the reactive products deposits inside the pump, overhaul the pump before storing.
Do not store the pump in the following environments.
1) High temperature and/or high humidity
2) In strong electric and/or magnetic field
3) Near reactive and/or corrosive gas
4) Near radioactive substance
5) Under dripping water
6) Near strong vibrations
7) Dusty place
It is possible to get failure caused by bad lubrication when the pump is stored more than 6 months. If
the pump occurs any problem, contact with Osaka Vacuum, Ltd.
It is available for operation check of the pump at Osaka Vacuum, Ltd. service center. Or operate the
pump every 6 months for lubrication of the bearing.
10. Recommended Overhaul and service
The mean time of overhaul of the pump varies in applications and natures of gases pumping.
Be sure to overhaul the pump before 20,000 hours operation, which is lifetime of bearing when the
pump evacuates non-reactive gas only. The pump has to be overhauled, even with no problem when
operation time reaches 20,000 hours. Consult with Osaka Vacuum, Ltd. about replacement of the
bearings when the pump needs to evacuate corrosive gas, reactive gas or dust.
Contact Osaka Vacuum, Ltd. or a service agent contracted with Osaka Vacuum, Ltd. when the pump
needs overhaul or repair.
Be sure to disclose all the evacuated gases that are harmful and/or reactive, and even non-harmful
and non-reactive gases before shipping back to Osaka Vacuum, Ltd. or service agent. Otherwise, the
pump cannot be overhauled or repaired.
Purge inside the pump with non-reactive gas before sending back. Cover the inlet flange, the outlet
flange, the leak port and the purge gas inlet firmly to avoid leaking the reactive products from the
pump.
OSAKA VACUUM, LTD. Hachioji factory (Japan) Phone: [phone]
Fax: [phone]
OSAKAVACUUM, LTD. Nabari factoruy (Japan) Phone: [phone]
Fax: [phone]
OSAKAVACUUM, LTD. California office (USA) Phone: [phone]
Fax: [phone]
Shinwon Tech Co., Ltd. (Korea) Phone: [phone]
Fax: [phone]
Cutes Corporation (Taiwan) Phone: [phone]
Fax: [phone]