Physik Instrumente E-625 User manual

PZ167E User Manual
E-625 LVPZT Controller/Amplifier
Release: 1.4.0 Date: 2009-04-14
This document describes the
following product(s)*:
E-625.SR
LVPZT Controller/Amplifier, Single Channel, for
Strain Gauge Sensors
E-625.LR
LVPZT Controller/Amplifier , Single Channel, for
LVDT Sensors
Capacitive sensor E-625 versions are described in a
separate manual, PZ 166E. The E-625.C0 is described
in PZ187.
[email protected]
© Physik Instrumente (PI) GmbH & Co. KG
Auf der Römerstr. 1 ⋅76228 Karlsruhe, Germany
Tel. [phone] ⋅Fax: [phone]
s ⋅www.pi.ws

Physik Instrumente (PI) GmbH & Co. KG is the owner of the following company names and
trademarks:
PI®, PIC®, PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®, NanoCube®,
NanoAutomation®
The following designations are protected company names or registered trademarks of third
parties:
Microsoft, Windows, LabView
The products described in this manual are in part protected by the following patents:
US-Patent No. 6,950,050
Copyright 1999–2009 by Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany.
The text, photographs and drawings in this manual enjoy copyright protection. With regard
thereto, Physik Instrumente (PI) GmbH & Co. KG reserves all rights. Use of said text,
photographs and drawings is permitted only in part and only upon citation of the source.
First printing 2009-04-14
Document Number PZ167E Eco, BRo, Release 1.4.0
E-625UserPZ167E140.doc
Subject to change without notice. This manual is superseded by any new release. The newest
release is available for download at www.pi.ws (http://www.pi.ws).

About This Document
Users of This Manual
This manual is designed to help the reader to install and operate the E-625 LVPZT
Controller/Amplifier. It assumes that the reader has a fundamental understanding of basic servo
systems, as well as motion control concepts and applicable safety procedures.
The manual describes the physical specifications and dimensions of the E-625 LVPZT
Controller/Amplifier as well as the hardware installation procedures which are required to put
the associated motion system into operation.
This document is available as PDF file on the product CD. Updated releases are available for
download from www.pi.ws or via email: contact your Physik Instrumente Sales Engineer or write
[email protected].
Conventions
The notes and symbols used in this manual have the following meanings:
WARNING
Calls attention to a procedure, practice or condition which, if not
correctly performed or adhered to, could result in injury or death.
DANGER
Indicates the presence of high voltage (> 50 V). Calls attention to
a procedure, practice or condition which, if not correctly
performed or adhered to, could result in injury or death.
!
CAUTION
Calls attention to a procedure, practice, or condition which, if not
correctly performed or adhered to, could result in damage to
equipment.
NOTE
Provides additional information or application hints.
Related Documents
The hardware components and the software tools which might be delivered with E-625 LVPZT
Controller/Amplifiers are described in their own manuals. All documents are available as PDF
files on the product CD. Updated releases are available for download from www.pi.ws or via
email: contact your Physik Instrumente Sales Engineer or write [email protected]..
E-801 User Manual, PZ117E
E-802 User Manual, PZ150E
E-816 User Manual, PZ116E
E-816 DLL Software Manual, PZ120E
E-816 LabVIEW Software Manual, PZ121E
Analog Controller LabView Driver Library Software Manual, PZ181E
PIMikroMove™Software Manual, SM148E

Contents
1Introduction 3
1.1 Model Survey .............................................................................3
1.2 Prescribed Use...........................................................................3
1.3 Safety Precautions .....................................................................4
1.4 Unpacking ..................................................................................6
1.5 Additional Components ..............................................................7
2Quick Start 8
2.1 Supply Power Connection ..........................................................8
2.2 First Steps ..................................................................................9
3Operation 11
3.1 Front and Rear Panel Elements ...............................................11
3.1.1 Front Panel Elements............................................................... 11
3.1.2 Rear Panel Elements ............................................................... 14
3.2 Modes of Operation..................................................................15
3.2.1 Control Modes.......................................................................... 15
3.2.2 Servo Modes (ON / OFF) ......................................................... 16
3.3 Networking on I2C Bus .............................................................18
3.4 User Electronics and Sensor Monitor Signal............................19
4Calibration 21
4.1 Opening the Case ....................................................................21
4.2 Sensor Connection and Adjustment.........................................22
4.2.1 Open-Loop Zero-Point Adjustment .......................................... 23
4.2.2 Open-Loop Sensor Range Adjustment .................................... 24
4.2.3 Servo-Control Static Gain Calibration ...................................... 26
4.3 Servo-Control Dynamic Characteristics ...................................28
5Electronics Details 29
5.1 E-625 Block Diagram ...............................................................29
5.2 Components and Adjustment Elements ...................................30
5.2.1 Jumpers.................................................................................... 31
5.2.2 Switches ................................................................................... 32
5.2.3 Potentiometers ......................................................................... 32
5.3 E-801 Sensor Processing Submodule .....................................32
5.4 E-802 Position Servo-Control Board ........................................33

Contents
6Troubleshooting 34
7Customer Service 38
8Old Equipment Disposal 39
9Technical Data 40
9.1 Specifications ...........................................................................40
9.2 Frequency Response Diagram.................................................42
9.3 Dimensions ..............................................................................43
9.4 Pin Assignments ......................................................................44
9.4.1 Network .................................................................................... 44
9.4.2 Power Connector ..................................................................... 44
9.4.3 Strain Gauge Sensor Wiring .................................................... 45
9.4.4 Linear Variable Differential Transformer (LVDT) Sensor
Wiring ....................................................................................... 45
10 Appendix 47
10.1 Internal 32-Pin Connector ........................................................47

Introduction
1Introduction
1.1 Model Survey
The E-625 amplifier/controller is a stand-alone desktop device
designed to drive and control the displacement of a low-voltage
piezoelectric stage or actuator (LVPZT). The following models
are described in this manual; each supporting a different
position-sensor type:
E-625.LR LVPZT controller, provides AC sensor
processing for usage with LVDT sensors
(equipped with E-801.2x sensor submodule)
E-625.SR LVPZT controller, provides DC sensor
processing for usage with strain gauge sensors
(SGS; equipped with 801.1x sensor submodule)
Both models come with an E-802 Servo-Controller and an E-
816 Computer Interface and Command Interpreter installed as
standard.
Networking of E-625’s with each other allows controlling up to
12 devices over a single RS-232 or USB computer interface.
Networking requires additional wiring and setup.
E-625s for use with capacitive sensors are described in detail in
their own manual, PZ166. The E-625.C0 is the same as the E-
625.CR, except that it has the analog control interface only. It is
described in User Manual PZ187.
1.2 Prescribed Use
Based on their design and realization, the E-625 LVPZT
Controller/Amplifier is intended to drive capacitive loads, in the
present case, piezoceramic actuators. The E-625 must not be
used for applications other than stated in this manual,
especially not for driving ohmic (resistive) or inductive loads.
E-625s can be operated in closed-loop mode using position
sensors. The type of position sensor used must be compatible
with the E-625 model to which it is attached: in particular linear
variable differential transformers (LVDT) require the AC
excitation provided by the E-625.LR, and strain gauge sensors
(SGS) require DC exitation provided by the E-625.SR.
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Introduction
Appropriate sensors are provided by PI and integrated in the
mechanics according to the mechanics product specifications.
Other sensors may be used as position sensors only with
permission of PI.
Observe the safety precautions given in this User Manual.
E-625s meet the following minimum specifications for
operation*:
Indoor use only
Altitude up to 2000 m
Ambient temperature from 5°C to 40°C
Relative humidity up to 80% for temperatures up to 31°C,
decreasing linearly to 50% relative humidity at 40°C
Line voltage fluctuations of up to ±10% of the line voltage
Transient overvoltages as typical for public power supply
Note: The nominal level of the transient overvoltage is the standing surge
voltage according to the overvoltage category II (IEC 60364-4-443).
Degree of pollution: 2
1.3 Safety Precautions
DANGER
High Voltage: Read This Before Operation:
E-625 LVPZT Controller/Amplifiers generate voltages up to
120 V for driving LVPZTs. The output power may cause
serious injury.
When working with these devices or using PZT products
from other manufacturers we strongly advise you to follow
general accident prevention regulations.
All work done with and on the equipment described here
requires adequate knowledge and training in handling High
Voltages. Any cabling or connectors used with the system
*Any more stringent specifications in the Technical Data table are, of course,
also met.
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Introduction
must meet the local safety requirements for the voltages
and currents carried.
Be sure to connect the grounding stud on the rear panel to
a protective ground!
Procedures which require opening the case should be
carried out by authorized, qualified personnel only.
Disconnect unit from power when opening the case, and
when resetting internal switches or jumpers.
When the unit must be operated with the case open,
voltages of up to 120 V can be exposed. Do not touch
internal conductors.
WARNING
Connect the AC power cord of the external power supply to
the wall socket (100 to 240 VAC).
To disconnect the system from the supply voltage
completely, remove the power plug from the wall socket, or
remove the power supply connector from the E-625.
Install the system near the AC outlet and such that the AC
power plug can be reached easily.
!
CAUTION
Place the system in a location with adequate ventilation to
prevent internal heat build-up. Allow at least 10 cm
(4 inches) clearance from the top and the rear of the unit
and 5 cm (2 inches) from each side.
! CAUTION
Calibration should only be done after consultation with PI,
otherwise the internal configuration data may be destroyed
by erroneous operation.
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Introduction
!
CAUTION
Thermally stable systems have the best performance. For
a thermally stable system, switch on the E-625 at least one
hour before you start working with it.
!
CAUTION
If the piezo stage starts oscillating (humming noise):
In closed-loop operation, switch off the servo immediately.
The load and / or the dynamics of operation probably differ
too much from the setup for which the system was
calibrated.
In open-loop operation, stop the motion immediately. Do
not operate the piezo stage at its resonant frequency even
though the notch filter by default is also active in open-loop
operation.
Otherwise the piezo stage could be irreparable damaged.
1.4 Unpacking
Unpack the E-625 LVPZT Controller/Amplifier with care.
Compare the contents against the items ordered and against
the packing slip. The following items should be included:
Controller unit (E-625)
Separate power supply C-890.PS, wide-range (100-240
VAC), 15 V, with barrel connector
K050B0002 Barrel-to-Switchcraft adapter for power
supply connection
3763 line cord
RS-232 null-modem cable for PC connection (C-815.34)
000014651 USB cable (USB-A (m)/USB Mini-B (m)) for
PC connection
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Introduction
SMB/BNC adapter cables (E-692.SMB) 1.5 m, two units
User Manual for E-625 (PZ167E), this document
User Manual for E-816 Computer Interface and
Command Interpreter Submodule (PZ116E)
User Manual for E-802 Servo-Control Submodule
(PZ150E)
User Manual for E-801 Sensor Excitation and Readout
Submodule (PZ117E)
CD for E-816-interface devices with software and
documentation (E-816.CD)
Inspect the contents for signs of damage. If parts are missing or
you notice signs of damage contact PI immediately.
Save all packing materials in the event the product needs to be
shipped elsewhere.
1.5 Additional Components
Contact your PI Sales Engineer or write [email protected], if you need
the following accessory:
E-665.CN network cable, 0.3 m, for interlinking multiple E-625s
(I2C bus), see “Networking on I C Bus
2” on p. 18 for details.
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Quick Start
2Quick Start
2.1 Supply Power Connection
WARNING
Connect the AC power cord of the external power supply to
the wall socket (100 to 240 VAC).
To disconnect the system from the supply voltage
completely, remove the power plug from the wall socket, or
remove the power supply connector from the E-625.
Install the system near the AC outlet and such that the AC
power plug can be reached easily.
Be sure to connect the GND stud on the E-625 rear panel
to a protective ground!
The E-625 comes with a 15 V wide-range-input power supply
that can be used with line voltages from 100 VAC to 240 VAC
at 50 or 60 Hz.
To power on the E-625, proceed as follows:
1 Because grounding is not assured over the power
connection, connect the E-625 chassis to a protective
ground via the grounding pin on the rear panel (see
Fig. 2 on p. 14)
2 Connect the included Barrel-to-Switchcraft adapter
(K050B0002, see figure below) to the "DC IN 12-30 V"
Switchcraft socket of the E-625
3 Connect the included wide-range power supply to the
barrel socket of the adapter on the E-625
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Quick Start
4 Connect the AC power cord of the power supply to the
wall socket. When the green “Power” LED glows, the
E-625 is ready for operation
2.2 First Steps
!
CAUTION
Thermally stable systems have the best performance. For
a thermally stable system, switch on the E-625 at least one
hour before you start working with it.
!
CAUTION
If the piezo stage starts oscillating (humming noise):
In closed-loop operation, switch off the servo immediately.
The load and / or the dynamics of operation probably differ
too much from the setup for which the system was
calibrated.
In open-loop operation, stop the motion immediately. Do
not operate the piezo stage at its resonant frequency even
though the notch filter by default is also active in open-loop
operation.
Otherwise the piezo stage could be irreparable damaged.
1 Make sure the E-625 is switched off
2 Make the DIP switch settings required for the control
mode (analog or computer-controlled) and the servo
mode (ON or OFF) you wish to use. See “Front Panel
Elements” on p. 11 and "Modes of Operation” on p. 15
for details.
Notes:
The servo must be ON in analog mode, when you want
to work with a computer-generated signal (e.g. from a
DAQ board) and the analog LabVIEW driver set from
PI (see step 4 below).
To give the E-816 computer interface submodule
complete control over the servo mode selection, DIP
switch 3 on the E-625 front panel must be set to open-
loop operation (= up).
3 Connect the piezo stages/actuators to the proper E-625
units. If your system was calibrated by PI, the
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Quick Start
controllers and stages are not interchangeable.
Respect the assignment given by the serial numbers
marked on the calibration label of the controller
4 Connect a suitable signal source to the “ANALOG
IN/WTT” SMB socket. Depending on the control-mode
selection, this input signal is either used as control
input (in analog mode), or as trigger signal for wave
table output and triggered motion (in computer-
controlled mode). See “Front Panel Elements” on p. 11
for signal details.
In analog mode, the control input voltage can also be a
computer-generated analog signal (e.g. from a DAQ
board). You can use the PI LabVIEW Analog Driver set
provided on the included E-816 CD to generate that
analog signal. Install that driver set by running Setup
on the E-816 CD. See the driver documentation on the
E-816 CD for operation
5 Optional: Connect a suitable measurement device to
the “SENSOR MONITOR” SMB socket. This socket
carries the filtered and processed sensor output value,
with 0 to 10 V representing nominal travel range. See
“User Electronics and Sensor Monitor Signal” on p. 19
for further specifications
6 Optional: If you want to work with multiple E-625s,
interconnect their I2C bus lines. See “Networking on I C
Bus
2
” on p. 18 for details
7 Switch on the E-625 as described in “Supply Power
Connection” on p. 8
8 Command motion of the connected piezo
stage/actuator:
Analog mode: Change the control input signal on
“ANALOG IN/WTT” in the range of 0 to 10 V
Computer-controlled mode: Follow the instructions in
“First Steps” in the E-816 Computer Interface
Submodule User Manual
If at the yellow “Overflow” LED glows in closed-loop operation
(servo ON), then a zero-point adjustment is necessary. Follow
the instructions for zero-point adjustment given in Section
on p. .
4.2.1
23 To avoid an overflow of the amplifier in open-loop
operation, do not exceed the allowable control input range (-2 to
+12 V).
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Operation
3Operation
The E-625 amplifier/controller is a stand-alone desktop device
designed to drive and control the displacement of a low-voltage
piezoelectric stage or actuator (LVPZT) in a system with sensor
position feedback (LVDT or SGS sensors, depending on model
type).
Operation involves the user commanding a motion and the E-
625 supplying the required voltage on the piezo output line for
the piezo to execute the commanded motion.
E-625s can be used for both static and dynamic applications.
High output stability and low noise assures stable
nanopositioning. Because LVPZT translators have high
capacitances, the amplifier is designed to supply appropriately
high peak currents for dynamic applications. Excellent linearity
and stability allows the use of E-625s in precision measurement
and control systems.
3.1 Front and Rear Panel Elements
3.1.1 Front Panel Elements
Fig. 1: E-625 Front Panel, no difference between .LR and .SR
models
ANALOG IN/WTT
SMB coaxial, GND on outer line. Usage of this input line
depends on the mode settings made with the “Settings” DIP
switches (see below):
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Operation
Analog mode: ANALOG IN/WTT is used as control input
voltage which gives the target (either as voltage or
position, depending on the servo mode; see below). The
input signal should always be in the range of 0 to 10 V
(excursions to -2 or +12 V may cause overflow,
especially with servo on, and reduce actuator lifetime).
The control input voltage can also be a computer-
generated analog signal (e.g. from a DAQ board). You
can use the PI LabVIEW Analog Driver set provided on
the E-816 CD to generate that analog signal. See
“Control Modes” on p. 15 for details
Computer-controlled mode: ANALOG IN/WTT is used as
trigger input signal for wave table operation and
triggered motion (Active HIGH; LOW: 0 to 0.5 V, HIGH:
3.0 to 5.0 V, maximum 10 V; max. freq. 400 Hz; min.
width: 5 μs). See the User Manual for E-816 Computer
Interface and Command Interpreter Submodule
(PZ116E) for more information
SENSOR MONITOR
SMB coaxial, GND on outer line, 0 to 10 V on inner line
Filtered and processed sensor output value, 0 to 10 V
representing nominal travel range.
RS-232
Serial connection to host PC. Sub-D 9 male, industry-standard
RS-232. See the User Manual for E-816 Computer Interface
and Command Interpreter Submodule (PZ116E) for more
information.
USB socket
Universal Serial Bus (USB Mini-B (m) socket) for connection to
host PC. See the User Manual for E-816 Computer Interface
and Command Interpreter Submodule (PZ116E) for more
information.
On Target LED, green
On target signal from E-802 servo-control submodule, indicates
distance from target less than ±0.19% of range.
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Overflow LED, yellow
Overflow signal, indicates power amplifier is so near the end of
its range that it is no longer able to follow input changes
properly (piezo voltage output outside of -20 V to 120 V range).
If this LED glows in closed-loop operation (servo ON), a zero-
point adjustment is necessary. Follow the instructions for zero-
point adjustment given in Section on p. .4.2.1 23 To avoid an
overflow of the amplifier in open-loop operation, do not exceed
the allowable control input range.
Power LED, green
Permanent glow indicates that the E-625 is powered on.
Settings DIP switch block
The ON position is down.
Switch Function
Usage of ANALOG IN/WTT socket as control input
1
Control input given by the E-816 computer interface
submodule installed in E-625
2
Servo mode selection:
OFF (up) = servo off (open-loop operation)*
ON (down) = servo on (closed-loop operation)
3
Usage of ANALOG IN/WTT socket as trigger input
4
*To give the E-816 computer interface submodule complete control
over the servo mode selection, DIP switch 3 must be set to open-loop
operation (= up).
Switches 1, 2 and 4 determine the control mode (computer-
controlled or analog) of the E-625 and hence the applicable
control sources. See “Control Modes” on p. 15 for details
Switch Computer-Controlled
Mode Analog Mode
1OFF ON
2ON OFF
4ON OFF
Unpredictable behavior may result if sw 1, 2 and 4 are set
incompatibly.
Zero potentiometer
Trim pot accessible with small screwdriver for sensor zero-point
adjustment. Readjustment may become necessary with time or
if the load is changed. Do the adjustment with Servo OFF! See
Section “Open-Loop Zero-Point Adjustment” on p. 23 for more
details.
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Operation
PZT
2-conductor coaxial LEMO ERA.00.250 for piezo actuator drive
voltage output. PZT ground is on the outer conductor (tied to
case), PZT+ on the inner conductor. The drive voltage output is
in the range of -20 to 120 V.
SENSOR
4-conductor LEMO EPL.0S.304.HLN for sensor input. Wiring
depends on sensor type. See Section 9.4.3 on p. 45 (.SR
models) or 9.4.4 on p. 45 (.LR models)
3.1.2 Rear Panel Elements
Fig. 2: E-625 Rear Panel Elements
Network
Sub-D 9f socket with lines for networking (I2C bus). For pinout
see p. 44.
Ground stud
Because grounding is not assured over the power connection,
the ground stud must be connected to a protective ground. Note
that it, the metal case, and the piezo output ground are the
same, but are not tied directly to the DC in or logic grounds.
DC IN 12-30 V
Socket for power supply; use Barrel-to-Switchcraft adapter
(K050B0002) with C-890.PS wide-range (100-240 VAC) 15 V
power supply (both included with E-625). For pinout see p. 44.
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Operation
3.2 Modes of Operation
Control modes: The E-625 can be operated in either analog
mode or computer-controlled mode. The active mode
determines the applicable control sources for the output
voltage. See "Control Modes" below for more information.
Servo modes: The current servo mode determines if the
motion axis is driven in open-loop (servo OFF) or closed-loop
(servo ON) operation. In closed-loop operation a servo loop
participates in the generation of the control value for the output
voltage. The servo loop thus maintains the current axis position,
based on a given target position and the position feedback of
the corresponding sensor. See "Servo Modes (ON / OFF)"
below for more information.
The individual control and servo modes can be combined
arbitrarily.
3.2.1 Control Modes
The current control mode of the E-625 determines the
applicable control sources for the output voltage and hence for
the axis motion. It is selected with the “Settings” DIP switches
on the E-625 front panel.
Analog mode:
Activated with the following settings (ON position is down):
1 = ON, 2 = OFF, 4 = OFF
The output voltage depends on the input voltage applied to
the “ANALOG IN/WTT” SMB socket of the E-625.
Control input from the E-816 computer interface submodule
is ignored (i.e. move commands received via computer
interface or from a running macro, trigger input or wave
table output).
The nominal input voltage range is 0 to +10 V for a 0 to
100 V output voltage swing. For some applications, where
the full expansion capability of the piezo translators is
needed, the full output voltage range of -20 to +120 V can
be used. The equivalent input voltage range is then -2 to
+12 V. For maximum piezo lifetime, excursions above
100 V and below -10 V should be kept as short and as
infrequent as possible.
The analog control input can be a computer-generated
analog signal (e.g. from a DAQ board). You can use the PI
LabVIEW Analog Driver set provided on the E-816 CD to
generate that analog signal. This driver set also includes
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Operation
the Hyperbit™ drivers which make possible position
resolution higher than that of the DAQ board used. New
releases of the LabVIEW Analog Driver set are available
from the download area at www.pi.ws. See the E500T0011
Technical Note and the manual of the LabVIEW Analog
Driver set provided on the E-816 CD for instructions. For
the Hyperbit™ extension, contact your PI Sales Engineer.
Computer-controlled mode:
Activated with the following settings (ON position is down):
1 = OFF, 2 = ON, 4 = ON
The E-816 computer interface module installed in the E-625
controls the generation of the output voltage. Target values
for the axis motion can be given by move commands
(received via computer interface or from a running macro),
trigger input or wave table output. The analog control input
voltage on the “ANALOG IN/WTT” socket is ignored.
Notes
In analog mode, the E-816 accepts all commands just as in
computer-controlled mode. The only difference between
the modes is the control source selection.
3.2.2 Servo Modes (ON / OFF)
The current servo mode determines if a motion axis is driven in
open-loop (servo OFF) or closed-loop (servo ON) operation.
The servo mode can be set as follows:
Using DIP switch 3 on the E-625 front panel:
OFF (up) = servo off (open-loop operation)
ON (down) = servo on (closed-loop operation)
Via axis-specific SVO commands sent over the
communications interface or received from a macro running
on the E-816.
Using the SVO? command, you can check the last sent
SVO settings on a per-axis basis
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