Preifer Vaccum MDP 5011 User manual

User’s manual
User’s manual
Original/ Translated from original version
Original/ Translated from original version
MDP 5011
Molecular pump
EN
EN

G 02594 - Edition 03 - July 11
1/2
MDP 5011
Molecular pumps
ApplicAtions:
Fast evacuation of small volumes – Interseal pumping –
Regeneration of cryopumps – Leak detection – Spectrometry –
Production of electronic tubes.
INSTRUMENTATION: Mass spectrometry, Surface analysis...
Benefits:
The design of the MDP pump offers the reliable and the robustness
with performances adapted to numerous applications.
controller:
The MDP 5011 works with the ACT 100 or ACT 200 TH controller (refer
to the ACT User’s manual).
Dear customer,
You have just purchased an
adixen Molecular pump.
We would like to thank you
and are proud to count you
as one of our customers.
This product has benefited
from adixen Vacuum
Produst’s many years of
experience in the field of
molecular pump design.
To guarantee high
performances and full
satisfaction from this
equipment, we suggest
that you study this
manual before any
intervention on your
pump, particularly the
chapter on installation
and start-up.
This product is designed to gererate vacuum by pumping on gases, but
no liquids neither solids. It is dedicated for running in industrial and
laboratory environments.
The products must not operate in an area with risk of explosion. Consult
us to study a solution.
This user’s manual includes only the instructions to connect the hybrid
turbo pump to the equipment. Refer to the controller user’s manual to
power and use the pump (chapter B, C and D).
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MDP 5011
Molecular pumps
G 02594 - Edition 03 - July 11
Copyright/Intellectual property:
The use of adixen products are subject to copyright and
intellectual property rights in force in any jurisdiction.
All rights reserved, including copying this document in whole
or any part without prior written authorization from adixen
Vacuum Products.
Specifications and information are subject to change without
notice by from adixen Vacuum Products.
This product complies with requirements of European Directives, listed in
the Declaration of Conformity contained in G 100 of controller’s manual.
adixen Vacuum Products - MDP 5011 User's Manual

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Manual Part nuMber : 062 199
edition:14 - July 11 Contents
User’s manual
Molecular pumps MDP 5011
Translated from original
version
Chapter A INTRODUCTION
A 200 - MDP 5011 molecular pump overview
A 210 - The different version operating principle
A 400 - MDP 5011 technical characteristics
A 401 - Pump dimensions
A 510 - MDP 5011 accessories
Chapter B START-UP
B 100 - Safety instructions
B 300 - Pump connection to an installation
B 320 - Nitrogen purge connection (MDP5011CP)
B 330 - Venting valve connection
B 340 - Water cooling connection
B 350 - Air cooling kit connection
Chapter C OPERATION
C 100 - Safety instructions for product use
C 150 - Molecular pump operation in a pumping application
Chapter D MAINTENANCE
D 100 - Precautions before maintenance
D 300 - MDP 5011 pump maintenance frequency
Chapter E MAINTENANCE INSTRUCTIONS
E 200 - MDP 5011 pump lubrication
Chapter F MAINTENANCE COMPONENTS
F 000 - Spare parts - Instruction of use
F 100 - MDP 5011 first level of maintenance
Chapter G APPENDIX
G 010 - MDP 5011 pumping curves
G 200 - Safety questionnaire
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Contents
User’s manual
Molecular pumps MDP 5011
G 02617 - Edition 03 - July 11
Manual Part nuMber : 062 199
edition:14 - July 11
Translated from original
version
Before switching on the product, study the user’s manual and make
sure you follow the safety instructions. You can recognise these by the
‘Caution’, ‘Warning’ and ‘Danger’ symbols.
Good practice tips and manufacturer’s recommendations are in a blue
box.
The performance and operational safety of this product are guaranteed
provided it is used normally in the operating conditions defined in this
manual.
It is the customer’s task to:
– train operators to use the product if they do not speak the language
the manual is written in,
- ensure operators know the safe practices to apply when using the
product.
Indicates an imminently hazardous situation that, if not avoided, will
result in death or severe injury (extreme situations).
Indicates a potentially hazardous situation which, if not avoided, could
result in death or severe injury.
Indicates a potentially hazardous situation which, if not avoided, could
result in property damage.
Indicates a potentially hazardous situation which, if not avoided, could
result in moderate or minor injury. It may also be used to alert against
unsafe practices.
adixen Vacuum Products - MDP 5011 User's Manual

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A 200
MDP 5011 molecular pump overview
1/1
Two pump versions The standard version: MDP 5011 pump.
The version for corrosive gases: MDP 5011CP pump.
The MDP 5011 offers high pumping performances between 10 mbar
and 10-5 mbar and a maximum flowrate fo 400 sccm.
With a simple construction but robust rotor and low rotational
speed (27,000 rpm), the MDP is robust against accidental air in-rush,
shock venting and gyroscopic effects.
Including built in ceramic ball bearings, The MDP is easily field
maintainable.
At the pump exhaust, the gases are evacuated to the atmosphere
by a roughing pump. Since the MDP compression rate is set by the
design, the MDP limit pressure is given by that of the roughing
pump used.
The MDP 5011 pump work with the ACT 100 or ACT 200 TH
controller. Refer to the corresponding Controller User’s Manual to
used the pump.
Main characteristics
The molecular pump
in an installation
Inlet
pressure
Chamber to
be pumped
High
pumping
Rough
pumping
Atmospheric
pressure
High vacuum Rough vacuum
Controller
adixen Vacuum Products - MDP 5011 User's Manual

G 02596 - Edition 02 - March 06
A 210
The different version operating
principle
1/2
MDP 5011 The rotor, a smooth drum with a row of blades at the top, is
mounted at the end of a shaft turning in two high-precision ball
bearings lubricated with grease, and located in the low-vacuum
area. All pumping elements are aluminium.
The pump is rotated by a single-phase electronically controlled
electric motor. The rotor is mounted directly on the shaft, while the
stator is attached to the pump body.
MDP 5011 standard molecular pump
Cross section drawing
SHAFT
ROTOR
DYNAMIC SEAL
ELECTRICAL CONNECTOR
IMPELLER
BALL BEARING
MOTOR
HOUSING
MOTOR HOUSING
EXHAUST
DRAG PUMP
INLET
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A 210
The different version operating
principle
G 02596 - Edition 02 - March 06
MDP 5011 CP
version for
corrosive gases
The MDP 5011 CP is specially designed for aggressive environments.
Ball bearings and motor are isolated from process gases by a
dynamic inert gas purge system.
MDP 5011 CP can operate with the same controller than the
MDP 5011 standard.
MDP 5011 CP Molecular pump
Cross section drawing
SHAFT
ROTOR
DYNAMIC SEAL
ELECTRICAL CONNECTOR
IMPELLER
BALL BEARING
MOTOR
HOUSING
MOTOR
HOUSING
PURGE SYSTEM
DN 16
DRAG PUMP
INLET
EXHAUST
adixen Vacuum Products - MDP 5011 User's Manual

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A 400
Technical characteristics
Characteristics Units MDP 5011 MDP 5011 CP
Inlet flange DN 63 ISO-K
Exhaust flange DN 16 ISO-KF
Rotation speed tr/mn 27,000
Starting time (0 to 27000 tr/mn) mn < 1
Pumping speed
N2
L/s
7.5
He 4
H2 3
Compression rate
N2 1x1091x106
He 2x104250
H2 1x10350
Ultimate pressure (CP with purge 50 sccm)* mbar 1x10-6 1x10-5
Maximum pressure at inlet
in continuous operation**
Natural convection
mbar
1x10-1
Air cooling 10
Water cooling 10
Maximum pressure at
exhaust in continuous
operation**
Natural convection
mbar 40 5
Air cooling
Water cooling
Ambient operating
temperature
Natural convection
°C
5 to 35°C (41 to 95 °F)
Air cooling 5 to 35°C (41 to 95 °F)
Water cooling 5 to 50°C (41 to 122 °F)
Recommanded primary pump Ultimate pressure < 20 mbar
Weight
Natural convection
kg
2.3
Air cooling 3
Water cooling 2.5
Environmental conditions:
Ingress Protection
Use of the product
Altitude
Maximum relative humidity
Pollution degree





IP 20
indoor use
up to 2000m (6562 pied)
80 % for temp. up to 31°C (87°F)
decreasing linearly to 50 % at 40°C (104°F)
rate 2
* According to Pneurop Specifications.
**The 2 maximum pressures can not occur at the same time.
Note: the MDP 5011 pump must not be baked.
The compression rate of the MDP 5011 CP is lower than this of the standard MDP 5011 pump.
A part of the dynamic seal allows the protection against corrosion.
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A 401
Pump dimensions
MDP 5011 DN 63 ISO-K
cooled by natural
convection
Power supply - Connector
Screwing by 4 threaded holes
diam. 0.16 (4) on diam.3.46 (88)
+ 12 mm (0.47)
for disassembling
Exhaust
DN 16 ISO-KF
Ø95 h11 (Ø3.75 h0.43)
Ø95 (Ø3.75)
Ø86.2
(Ø3.39)
INLET DN 63 ISO-KF
30
1.18
30
1.18
52
(2.05)
27.7 1.09
27.3 1.07
17 0.67
143
5.63
12 0.47
Dimensions mm/inch
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A 401
Pump dimensions
G 02600 - Edition 01 - Sept. 04
MDP 5011 DN 63 ISO-K
water cooling
Water cooling connections for
0.23 x 0.31 (6 x 8 mm) plastic
tubing or copper tubing
E
FA
D
C
B
Exhaust
DN 16 ISO-KF
Orientable 360 °
Power supply - Connector
Screwing by 4 threaded holes
diam. 0.16 (4) on diam.3.46 (88)
+ 12 mm (0.47)
for disassembling
Ø95 h11 (Ø3.75 h0.43)
Ø95 (Ø3.75)
Ø106.5 (Ø4.19)
Ø86.2
(Ø3.39)
INLET DN 63 ISO-KF
30
1.18
109.1
4.30
101
3.98
30
1.18
52
(2.05)
27.7 1.09
20
0.78
27.3 1.07
17 0.67
143
5.63
12 0.47
Dimensions mm/inch
adixen Vacuum Products - MDP 5011 User's Manual

G 02600 - Edition 01 - Sept. 04
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A 401
Pump dimensions
MDP 5011 DN 63 ISO-K
Air cooling
Power supply - Connector
Exhaust
DN 16 ISO-KF
E
FA
D
C
B
Fan
Screwing by 4 threaded holes
diam. 0.16 (4) on diam.3.46 (88)
+ 12 mm (0.47)
for disassembling
Ø95 h11 (Ø3.75 h0.43)
Ø95 (Ø3.75)
Ø86.2
(Ø3.39)
INLET DN 63 ISO-KF
30
1.18
30
1.18
52
(2.05)
98
(3.86)
27.7 1.09
80
3.15
27.3 1.07
80
3.15
84.5 3.33
17 0.67
143
5.63
12 0.47
Dimensions mm/inch
adixen Vacuum Products - MDP 5011 User's Manual

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A 510
Pump accessories
Description P/N
DN 63 ISO-K 063117
Screen filter 2.5 mm This filter protects the pump
against solid particles 2.5 mm.
Description P/N
DN 63 ISO-K 062912
Compact filter The filter stops particles
20 microns and is used in the
event of high densities of dust or
risk of implosion when pumping
tubes or lamps.
Description P/N
Electrical venting valve DN16- ISO-KF 100 V - 50/60 Hz 063165
Electrical venting valve DN16- ISO-KF 115 V - 50/60 Hz 063171
Electrical venting valve DN16- ISO-KF 200 V - 50/60 Hz 063173
Electrical venting valve DN16- ISO-KF 220 V - 50/60 Hz 063169
Electrical venting valve DN16- ISO-KF 240 V - 50/60 Hz 063172
Electrical
venting valve
This valve is used to refill the pump with air after pump stopping
or after a power failure.
P/N of electrical venting valve compatible with ACT 100.
Description P/N
Water cooling kit 062184
Air cooling kit 110 V (ACT 100) 062187
Air cooling kit 220 V (ACT 100) 062186
Air cooling kit 12 V (ACT 200 TH) 118809
Cooling kit It is easy to install or replace a cooling kit by another :
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B 100
Safety instructions for pump and
controller installation
GB 00725 - Edition 04 - Aug 11
Indicates a potentially hazardous situation which, if not avoided, could
result in moderate or minor injury. It may also be used to alert against
unsafe practices.
Indicates a potentially hazardous situation which, if not avoided, could
result in property damage.
Indicates an imminently hazardous situation that, if not avoided, will result
in death or severe injury (extreme situations).
Before switching on the product, study the user’s manual and make
sure you follow the safety instructions. You can recognise these by the
‘Caution’, ‘Warning’ and ‘Danger’ symbols.
Good practice tips and manufacturer’s recommendations are in a blue
box.
For emergencies and breakdowns, contact the manager of your local
service center (see addresses at back of manual).
We took care to provide you with a clean product. To keep it in this
condition, unpack it only in contamination free area and at final place of
use.
The performance and operational safety of this product are guaranteed
provided it is used normally in the operating conditions defined in this
manual.
It is the customer’s task to:
train operators to use the product if they do not speak the language
the manual is written in,
ensure operators know the safe practices to apply when using the
product.
–
–
Make sure the equipment shows no sign of transport damage. If it has
been damaged, take the necessary steps to record this with the carrier
and inform the manufacturer. In all cases, we recommend keeping the
packaging (reusable materials) for further transport of the equipment or
for prolonged storage.
Indicates a potentially hazardous situation which, if not avoided, could
result in death or severe injury.
Overview
For emergencies
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B 100
Safety instructions for pump and
controller installation
GB 00725 - Edition 04 - Aug 11
Our products are designed to comply with current EEC regulations. Users
making their own modifications to the product are liable to break its
compliance with these regulations, degrade its EMC (electromagnetic
compatibility) rating, and make it unsafe to use. The manufacturer
declines all liability for the consequences of such operations.
The product’s EMC rating is obtained on the understanding that it is
installed in compliance with EMC rules.
Specially in environments that are prone to emit interference, use
shielded cables and connections on interfaces.
This pump is not equipped with an emergency stop EMO device because
it is designed for use on process tools and integration with the process
tool EMO.
Check that the pump is correctly connected to the equipment emergency
stop device.
Fire protection:
The pump is not intended to be installed on process containing flammable
materials or in hazardous atmosphere.
The pump body is made of aluminium. The main part enclosure and the
majority of the non metallic parts (mainly electrical components and
frequency converter) have a fire rating of UL94V0 and/or are UL approved.
Smoke hazard due to the presence of electrical components.
The smoke hazard is low due to the use of approve components and the
containment smoke in the pump cover.
When units containing control circuits are equipped with dry contact
outputs, it is the responsability of the customer to use these outputs in
compliance with extra low voltage installation and security standards.
Ensure that the product is connected to an electrical installation:
in compliance with the local and national safety requirements,
equipped with electrical protection (fuses, circuit breaker, …) which
has a suitable earth (ground) point, properly connected.
–
–
Electric shock hazard.
Some components have capacitors charged to over 60VDC, or motor
operating as generator. When power is switched off, they keep their
charge for a time. Take precautions concerning the access to the connector
pins. Wait at least 5 minutes after the turbopump comes to complete stop
before starting any work on the product.
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B 100
Safety instructions for pump and
controller installation
GB 00725 - Edition 04 - Aug 11
The units containing control circuits are designed to guarantee normal
safety conditions taking their normal operating environment into account
(use in rack).
In specific cases of use on tables, make sure that no objects enter the
ventilation openings or block the openings when handling the units.
Pump connection to the installation:
It is strongly recommended to secure the turbopump installation to
prevent any safety hazard to the user in standard operating conditions :
(B 300).
The user and /or OEM are ultimately responsible for operating the
equipment in a safe manner. The manufacturer has no control over the
types of gases exposed to this pump. This is the user and/or the OEM’s
responsibility to follow the necessary safety requirements.
Frequently process gases are toxic, flammable, corrosive, explosive and/or
otherwise reactive.
Toxic gases can cause serious injury or death. Operators and users must
take the appropriate safety recommendations to prevent injury. Consult
the responsible department for instructions and safety information.
Hazardous gases through the pump can cause serious injury or death.
It’s mandatory by regulations to connect the turbomolecular pump’s
exhaust to a rough pumping line compatible with the process gases.
Check that pump is correctly connected to the equipment (B300).
This label informs the user that moving parts present inside the pump
coud cause personal injury, like crushing or cutting.
The user must keep all body parts away from moving parts.
MOVING PARTS PRESENT
Moving parts can crush and cut.
Keep hands or feet away from moving parts.
WARNING
Do not operate the pump until it is securely fixed. If the pump seizes,
the stored energy of the rotor can cause rapid movement of the pump,
which may cause further damage and injury to people. It is mandatory to
respect installation instructions described in the pump user’s manual.
The adixen constructor declines any responsibility if the pump installation
is not made in accordance with the installation specifications.
Operation
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B 100
Safety instructions for pump and
controller installation
GB 00725 - Edition 04 - Aug 11
Do not expose any part of the human body to vacuum. The product is
supplied with the inlet and exhaust sealed. Remove these blanking plates
when you are ready to connect the product on your vacuum system.
As well as, don’t operate the product unless the inlet and exhaust are
connected to a vacuum and exhaust pumping line.
Risk of cut injury:
The access to the rotor of a turbomolecular pump with an unconnected inlet
port is dangerous. In the meantime, if the pump is not switched on, it may
be driven by another pump in operation.
Always connect the pump inlet port before starting the pump.
Storage
The products are factory tested to ensure they will not leak in normal
operating conditions. It is the user’s responsibility to ensure this level of
leak tightness is maintained.
Risk of tilting: although the product meets EEC safety regulations (topple
angle ± 10 °), it is advisable to guard against the risk of tilting during
handling, installation, and use.
The product is supplied with the inlet and exhaust sealed. These are to
prevent foreign bodies entering the pump during transport and storage.
Do not remove these blanking plates until you are ready to install the
product on the vacuum line.
When the pump is new, if it is going to be put into storage, keep it in its
packaging in the following conditions:
in a clean and dry environment,
at an ambient temperature between -5°C and +40°C,
for a period of 2 years maximum with a running period every 6 months
(refer to C100).
If you need to store a pumping unit which has run on clean process, don’t
forget to purge the pump with N2. Seal the inlet, exhaust and purge ports
with blanking plates (refer to F100). Don’t store the pump more than 6
months in a clean and dry environment.
Never store a pump which has been used on corrosive process. Return it
to an adixen repair service center (refer to G200).
–
–
–
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B 300
Pump connection to an installation
b
a
c
The connection of the
pump to the
installation must be
sufficiently rigid
The dimensions of the connection parts should be study carefully:
reduce the following as much as possible:
dimensions aand bthe flexibility of the connection plate
the overhang cbetween the pump and its anchor point.
–
–
Some examples of unrecommanded conncections:
Support plate
Spacer
Rigid support
Bellows
It is absolutely necessary to install the pump according to the following
installation specifications to secure the user and the equipment.
The adixen constructor declines any responsibility if the pump
installation is not designed in accordance with the installation
specifications described in this section.
The equipment attachment devices should be sufficiently rigid to prevent
potential risks in the event of failure of a rotary component or a violent
shock on the pump (exceptional phenomena). For this use the rotary
flange attachment holes.
If the inlet flange is attached with claw clamps, use:
– 6 claw clamps for flange < DN 100
– 8 claw clamps for flange ≥DN 100.
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B 300
Pump connection to an installation
G 02602 - Edition 02 - July. 11
The pump can operate
in any position
In.
In.
In.
In.
Cooling
recommendations and
temperature limits
Ambient operating temperature:
MDP with natural convection or air cooled T < 35°C (95°F)
MDP water cooled T < 50°C (122°F)
Pumping conditions In cases of high pressure pumping or frequent cycling, the pump
temperature is higher, so water or air cooling are recommended.
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B 300
Pump connection to an installation
Pump line
connections
Do not expose any part of the human body to vacuum.
The product is supplied with the inlet and exhaust sealed. Remove
these blanking plates when you are ready to connect the product on
your vacuum system.
As well as, don’t operate the product unless the inlet and exhaust are
connected to a vacuum and exhaust pumping line.
Pollution risk:
Unclean and contaminated component can increase the pumping down
time. Use only dry and clean pipe lines, and wear glooves to make the pump
connections.
Make sure all parts and chambers connected to the inlet, exhaust and
purge of the maglev pump can withstand a negative pressure of 1 bar
below atmospheric pressure and that they are impervious to damage
from vacuum (seals, etc.).
Materials in direct contact with process gases
COMPONENTS IN THE PUMP MATERIALS
From inlet to exhaust Stainless steel, aluminium alloy
O-ring Fluorinated elastomers, FPM
After connecting the product to the pumping line, check for leaks along
the entire to ensure proper connections.
Risk of injury by cutting.
Contact with the pump rotor cell may cause cuts. Alternatively, protective
gloves may be worn when servicing the product.
For safety reasons, use accessories on the inlet and exhaust lines whose
materials and sealing properties are compatible with the gases being used.
adixen Vacuum Products - MDP 5011 User's Manual