Preiffer HiPace 3400 MC User manual

Translation of the original instructions
Operating Instructions
EN
PT 0191 BEN/E (1208)
HiPace 3400 MC
Turbopump

2
Contents
Page Page
1. Safety Instructions .......................... 3
1.1. For Your Orientation........................................................... 3
1.2. Pictograph Definitions....................................................... 3
2 Understanding The
HiPace 3400 MC Pump .....................4
2.1. Main Features..................................................................... 4
Proper Use .......................................................................... 5
Improper Use ...................................................................... 5
2.2. Scope Of Delivery .............................................................. 5
3. Installation ....................................... 6
3.1. Preparations For Installation............................................ 6
3.2. Connecting The High Vacuum Side ................................ 6
Use A Pfeiffer Vacuum Splinter Shield
Or Protective Screen......................................................... 6
Flanging The Pump Directly ............................................. 6
Earthquake Safety.............................................................. 7
Installing The High Vacuum Flange ................................ 7
3.3. Connecting The Fore-Vacuum Side ................................ 8
3.4. Connecting The Cooling Unit............................................ 8
3.5. Electronic Drive Unit And
Magnetic Bearing Controller TM 3000 ........................... 9
General Unit Description .................................................. 9
Connecting The TM 3000 To The
Power Supply TPS 1400/1401 ......................................... 10
3.6. Connecting The Venting Valve
And Sealing Gas Valve.................................................... 10
3.7. Connecting The Remote Control.................................... 10
Plug Arrangement REMOTE ........................................... 11
3.8. Connecting The Serial Interface RS-485...................... 12
Electrical Connection ...................................................... 12
Bus Operating Via RS-485 Interface ............................. 12
3.9. Connection Diagram........................................................ 13
4. Operations...................................... 14
4.1. General Operating Information...................................... 14
4.2. Operating Modes ............................................................. 14
4.3. Before Switching ON....................................................... 14
4.4. Switching ON.................................................................... 14
4.5. Normal Operation Of The Turbopump .......................... 15
4.6. Standby Rotation Speed ON/OFF................................... 15
4.7. Turbo Drive ON/OFF......................................................... 15
4.8. Rotation Speed Switch Point ......................................... 15
4.9. Rotation Speed Set Mode............................................... 15
4.10. Backing Pump Operation................................................ 15
4.11. Gas Type Dependent Operation .................................... 16
4.12. Switching OFF And Venting............................................ 17
4.13. Emergency Stop ...............................................................17
4.14. Safety Bearings................................................................ 18
4.15. Monitoring Of The Balancing Condition....................... 18
4.16. Emergency Power Operation......................................... 18
4.17. Shut Down For Longer Periods...................................... 18
4.18. Remote Control Operation .............................................. 19
Operating Modes With Remote Control ....................... 19
4.19. Venting Modes ................................................................. 20
4.20. Configuration Of The Analog Output............................. 20
4.21. Switching Outputs............................................................ 20
4.22. Configuration Of The Maximum Drive Power.............. 20
5. Error Messages And
Warnings......................................... 21
5.1. Error Messages / Status Messages ............................. 21
5.2. Warnings ........................................................................... 22
6. Parameters ..................................... 23
6.1. General .............................................................................. 23
6.2. Setting Commands........................................................... 23
6.3. Status Requests ............................................................... 24
6.4. Set Points .......................................................................... 25
7. Monitoring The
Operating Conditions.................... 26
7.1. Operating Mode Display Via LED .................................. 26
7.2. Temperature Monitoring Of The Turbopump ............. 26
8. What To Do In Case
Of Breakdowns ............................. 27
9. Service ............................................ 28
10. Maintenance .................................. 29
11. Technical Data ................................ 30
11.1. Dimensions........................................................................ 31
12. Accessories .................................... 32
Declaration of conformity ..... (last page)
PPlleeaasseennoottee::Current operating instructions are available via
www.pfeiffer-vacuum.com
For information about certifications, if applicable, please see
the signet on the pump or:
☞www.tuvdotcom.com
☞TUVdotCOM-ID 0000021320

3
☞Please read and follow all items in these instructions.
☞Please familiarize yourself with:
– Hazards associated with the turbopump
– Hazards associated with your system
– Hazards associated with the pumped media
☞Ensure that no body parts are exposed to the vacuum.
☞Follow all safety and accident prevention instructions.
☞The turbopump, magnetic bearing controller and power
supply have no lock-out/tag-out device and no emergency
stop, since they are designated for use on process tools.
Therefore they must be properly included in the higher-
level equipment control.
☞Regularly check for proper observance of all safety
measures.
☞Do not operate the turbopump with an open high vacuum
flange.
☞Do not make any alterations or modifications to the Turbo-
pump HiPace 3400 MC with Magnetic Bearing Controller
TM 3000.
☞Follow all shipping instructions when returning the
turbopump.
☞In order to put the turbopump, magnetic bearing controller
and power supply in a safe condition for installation and
maintenance, the power supply must be completely
disconnected from the mains.
☞The installation instructions in Section 3. must be followed
when installing the turbopump.
☞Do not remove the plug between the TM 3000 and the
accessories during operation.
☞Before opening the turbopump, make sure that the
TM 3000 is disconnected from the mains.
☞When working on the turbopump, open the high vacuum
flange only after the rotor has come to a complete stop.
☞When using sealing gas, limit the pressure in the hose
connection to 3 bar using the relief pressure valve.
☞The housing can reach temperatures of up to 100 °C.
Caution – danger of burns!
☞During operations temperatures of up to 65 °C can arise in
the lower part of the turbopump. Caution – danger of
burns!
☞Keep wiring and cables away from hot surfaces (>70 °C).
☞The turbopump with TM 3000 should only be operated with
the relevant connecting cables and power supply (please
see Section 12. Accessories).
☞The Turbopump HiPace 3400 MC and Magnetic Bearing
Controller TM 3000 should never be separated.
☞The unit has an IP 54 protection class. Appropriate
measures should be taken in environments that require a
different protection class.
☞The mains connection must always be grounded (PE)
(Protection class 1).
☞The turbopump can reach temperatures of up to 150 °C
during operation. If the pump is vented with flammable
gases with pressures over approximately 100 mbar in this
state, there is a risk of combustion.
☞Keep the operating instructions readily available at all
times.
☞Always use suitable aids for transporting the pump.
Modifications reserved.
1. Safety Instructions
1.1. For Your Orientation
Instructions in the text
➡Indicates an action to be taken.
Symbols used
The following standard symbols are used in all figures:
High vacuum flange
Fore-vacuum flange
Venting connection
Cooling water connection
Electrical connection
Sealing gas connection
Abbreviations used
DCU = Display and control unit
HPU = Handheld programming unit
TM = Electronic drive unit
and magnetic bearing controller
TMP = Turbomolecular pump
Item numbers
All units and accessories have the same item numbers in all
figures.
1.2. Pictograph Definitions
Warning, risk of personal injury.
Caution, risk of damage to the pump or system.
Warning, risk of injury from rotating
components.
Please note, important information about the
product, handling of the product or part of the
documentation requiring special attention.
☞
PLEASE NOTE
WARNING
CAUTION
WARNING

4
2.1. Main Features
The Turbopump HiPace 3400 MC constitutes a complete unit
with the Electronic Drive Unit and Magnetic Bearing Control-
ler TM 3000. The Power Supply TPS 1400/1401 provides the
voltage (see Section 12. Accessories).
Cooling
Water cooling
Internal protective measures for excess temperatures:
TM 3000 electronic drive unit and magnetic bearing
controller reduces rotor speed.
Bearings
Two non-wearing, electromagnetic
radial and axial bearings.
Plus: dry-running safety bearing
2. Understanding The HiPace 3400 MC Pump
Transportation
The protective cover on the high vacuum flange
locks the rotor to protect the safety bearings
during transportation. Protective cover and
blind flanges ensure that no contaminants can
enter into the turbopump and must only be
removed immediately before installing the
pump.
During transportation and installation work do
not expose the Electronic Drive Unit and
Magnetic Bearing Controller TM 3000 to
mechanical stress.
➡The turbomolecular pump must be lifted out of the
packaging and transported by making use of the two eye
bolts fitted at the bottom side of the turbomolecular pump
into which one crane hook each is inserted.
When transporting the turbomolecular pump, under all
circumstances observe the following:
– Always use both eye bolts.
– The angle of the crane's chains must not exceed 45° with
respect to the longitudinal axis of the pump.
– With the crane hooks, additional weights (for example a
vacuum chamber) must never be lifted simultaneously.
CAUTION
CAUTION
max. 45°
2
8
9
3
1
Turbomolecular Pump HiPace 3400 MC
1 High vacuum flange
2 Fore-vacuum flange
3 Cooling water connection
8 Electronic Drive Unit and Magnetic Bearing Controller TM 3000
9 Sealing gas and venting connection (DN 10 ISO-KF)
G

5
Ambient conditions
The turbomolecular pump needs to be installed in compliance
with the following ambient conditions:
IInnssttaallllaattiioonnllooccaattiioonn::protected against the weather
(rooms within buildings)
TTeemmppeerraattuurree::+5 °C to +40 °C
RReellaattiivveehhuummiiddiittyyoofftthheeaaiirr::max. 80 % at T ≤31 °C
up to max. 50% at T ≤40 °C
AAiirrpprreessssuurree::77 kPa - 106 kPa
IInnssttaalllla
attiioonnaallttiittuuddee::2000 m max.
PPoolllluuttiioonnddeeggrreeee::2
OOvveerrvvoollttaaggeeccaatteeggoorryy::II
CCoonnnneeccttiioonnvvoollttaaggee::208–240 V AC (±10%)
Proper Use
– The Turbopump HiPace 3400 MC may only be used to
generate a vacuum.
– The turbopump is intended for pumping corrosive gases
and vapors. During corrosive gas processes, gaseous
compounds and particles that can damage the pump
surfaces are generated. The motor and bearing chamber
must be protected with sealing gas.
– Only media to which the turbopump is chemically resistant
may be pumped. The user must qualify the pump for the
process if other media are to be used.
– If process dust occurs, process-specific maintenance
intervals should be arranged with the manufacturer and
sealing gas should be used.
– Sealing gas should be used to guarantee cooling if the
pump is operated at maximum gas load. Otherwise
automatically a power reduction takes place (see Section
4.11.).
– The turbopump must be connected to a fore-vacuum pump
as described in Section 3.3..
– Only Pfeiffer Vacuum power supplies may be used to
operate the TM 3000. Other power supplies may only be
used with the manufacturer’s approval and if they comply
with the appropriate specifications.
– The turbopump may only be operated using the
appropriate Pfeiffer Vacuum cables.
– The pump should only be installed in compliance with the
environmental conditions of protection class IP 54.
Improper Use
The following are considered improper use:
– Pumping of explosive gases.
– Using the pump in areas with a risk of explosion.
– Operating the pump in radioactive areas.
– Pumping gases and vapors that harm the materials of the
pump.
– Pumping corrosive gases without sealing gas.
– Pumping condensing vapors.
– Operation at unacceptably high gas loads.
– Operation at unacceptably high fore-vacuum pressure.
– Operation with incorrect gas mode.
– Operation with excessive heat radiation power.
(see Section 11. Technical Data).
– Installation in environments requiring a protection class
higher than IP 54.
– Installation of the pumps in systems where the turbomole-
cular pumps are subjected to impact-like stress and vibra-
tions or the effect of periodically occurring forces.
– Use of power supplies or accessories not mentioned in
these instructions or not approved by the manufacturer.
The turbopumps and flange connections must not be used to
tread on when climbing onto the system.
Unauthorized use renders all liability and guarantee claims
void.
2.2. Scope Of Delivery
– Turbopump HiPace 3400 MC with integrated Electronic
Drive Unit and Magnetic Bearing Controller TM 3000
– Protective covering for high vacuum flange and fore-
vacuum flange
– Two pieces of eye bolts for transportation of the pump

6
3.1. Preparations For Installation
Do not carry out any unauthorised conversions
or alterations to the turbopump.
The protective cover on the high vacuum flange
locks the rotor to protect the safety bearings
during transportation. Protective cover and
blind flanges ensure that no contaminants can
enter into the turbopump and must only be
removed immediately before installing the
pump.
In case the rotor blocks suddenly, torque levels
up to 5555,,000000NNmmcan occur which need to be
absorbed by the system and the high vacuum
flange.
– The high vacuum side of the pump may not be flanged on
via a vibration compensator, since thereby no safe
connection is to be ensured.
– If the turbopump is to be operated with the DCU 002 or
HPU 001, then proceed in accordance with the correspon-
ding operating instructions (please see Section 12. Acces-
sories).
– The maximum permissible rotor temperature is 120 °C. If
the vacuum chamber or parts in the vacuum chamber are
heated, the values stated in the technical data relating to
the level of heat which may be radiated into the pump must
not be exceeded. If necessary, suitable shielding must be
fitted in the vacuum chamber before the turbopump
(constructional suggestions available on request).
– Always retain the protective covers for transportation
purposes.
– Where magnetic fields of > 10 mT are involved suitable
shielding must be provided (available on request).
– Floor mounting of the turbomolecular pump is not
permissible.
The person responsible for commissioning must
ensure that the installation is carried out in
accordance with the legal regulations and the
pertinent industrial standards. All work on the
pump must be performed only by qualified
personnel who are familiar with all warnings
and safety measures of this operating manual.
3.2. Connecting The High Vacuum Side
The utmost cleanliness must be observed
when fitting all high vacuum parts. Unclean
components prolong the pumping time.
All installation units for the flange must be dry
and free of grease and dust.
☞
PLEASE NOTE
☞
PLEASE NOTE
WARNING
CAUTION
WARNING
To reliably prevent the pump from twisting if the
rotor suddenly blocks, it is absolutely prohibited
to secure a pump on a vacuum chamber with
any other flange type. Both flanges mmuussttbe of
the same type. Installation with different flange
types is carried out at the user's own risk.
Pfeiffer Vacuum shall assume no liability what-
soever for any damage or injuries resulting from
this kind of attachment.
Use A Pfeiffer Vacuum Splinter Shield Or
Protective Screen
The use of a Pfeiffer Vacuum centering ring with splinter
shield or protective mesh in the high vacuum flange protects
the turbopump against foreign bodies coming from the
vacuum chamber but does reduce the volume flow rate as
followed:
WARNING
3. Installation
Flanging The Pump Directly
The pump can have any mounting position. If you use a hori-
zontal mounting position for the turbopump, Pfeiffer Vacuum
recommends installing the fore-vacuum flange towards the
bottom to avoid polluting the turbopump.
Max. axial loading capacity of the high vacuum
flange 3000 N (corresponding to 300 kg). No one-
sided loads on the high vacuum flange.
Vibration of the pump can lead to overloading of the magnetic
bearing and require the safety bearing. Try to avoid vibrations
as much as possible! System-specific excitations, e.g.
through a high vacuum valve, require the pump to be fastened
in such a way that it cannot move and particularly cannot tip.
For anchored turbopumps, forces from the
piping should not affect the pump. All piping
should be supported or uncoupled in front of the
pump.
CAUTION
CAUTION
Reduced volume flow rate [%]
N2He H2
Splinter shield DN 320 22 9 6
Protective mesh DN 320 6 2 2

7
➡Take care that the sealing surface is not damaged.
➡Flange the turbopump with 1122screws and 1122nuts.
➡For a flange material having a strength of > 270 N/mm2and
a stud screw with through hole, the nuts must be tightened
crosswise in three steps.
Tightening torque: 10 Nm, 20 Nm, 33 ± 3 Nm
➡Take care that the sealing surface is not damaged.
➡Flange the turbopump with 1122hexagon screws according
to drawing
➡For a flange material having a strength of > 270 N/mm2
and with a blind hole the hexagon screw must be screwed
in 1.5 d. The hexagon screws must be tightened crosswise
in three steps.
Tightening torque: 10 Nm, 20 Nm, 33 ± 3 Nm
Variant 2 - Hexagon screw and clearance hole
Installing The High Vacuum Flange
– In case the rotor blocks suddenly, torque levels up to
5555,,000000NNmmcan occur which need to be absorbed by the
system and the high vacuum flange.
– The turbopump should be flanged directly to the vacuum
chamber or with a small space between them. This minimi-
zes the force on the vacuum chamber flange in case of
seizing. Connecting parts must transfer this force on the
vacuum chamber or absorb it themselves.
– For installing the turbomolecular pumps to the high
vacuum flange, the components listed in the following
mmuussttbe used exclusively. Otherwise the turbomolecular
pump may twist or tear off. The clamps, bolts, nuts and
centering rings are special designs from Pfeiffer Vacuum.
– The minimum strength of 270 N/mm2of the flange material
needs to be observed.
Earthquake Safety
An earthquake can result in contact with the safety bearings;
see Section 4.14. All forces occurring thereby are safely
absorbed by the previously described flange connections.
The vacuum chamber, in turn, must be secured against
shifting and tipping.
SC SC
SC
SC SC
SC = Safety Connection
Vacuum chamber
Example: How to secure against shifting and tipping
Installation is done as follows:
ISO-F to an ISO-F flange
M12 hexagon screws used must meet the stan-
dards IISSOO44001177(DIN 933). Nuts used must meets
the standards IISSOO44003322(DIN 934). Only use
mounting material once and in original condition.
RReeppllaacceebbyynneewwppaarrttssaafftteerrddiissaasssseemmbblliinngg!!
For installing there exist two variants.
Variant 1 - Hexagon screw and blind hole
ACHTUNG
A
B
D
E
C
A'
1.5 d
Hexagon screw and blind hole
A ISO-F flange
A’ Counter flange
B Hexagon screw
C Deformation cylinder
D Clamping ring
E Sealing ring
A
B
B'
C
E
D
A'
Stud screw and through hole
A ISO-F flange
A’ Counter flange
B Hexagon screw
B’ Nut with washer
C Deformation cylinder
D Clamping ring
E Sealing ring

8
Oxygen content: max. 4 mg/kg
Chloride content: max. 100 mg/kg
Carbonate hardness: max. 10 ° dH
Potassium permanganate consumption: max. 10 mg/kg
Carbonic acid: not detectable
Ammonia: not detectable
pH value: 7 – 9
Flow pipe excess pressure: max. 6 bar
Minimum flow rate at max. gas load: 100 l/h
Connection to cooling water net
➡Unscrew locking screws from the cooling water
connections.
➡Screw in hose adapters (torque max. 10 Nm).
➡Install dirt trap (see “Accessories”) in the flow line.
➡Connect flow line to the upper (high vaccum side) cooling
water connection.
➡Connect return line to the lower cooling water connection
on the turbopump.
➡Tighten all hose clamps and check for tight fitting of the
hoses.
Interchanging of cooling water feed and return
will reduce the maximum motor power
available (see Section. 4.11.).
☞
PLEASE NOTE
31
32
3
33
Cooling from cooling water net
3 Cooling water connection
31 Flow line
32 Return line
33 Dirt trap
3.3. Connecting The Fore-Vacuum Side
Fore-vacuum pump: See Section 11. Technical Data for
fore-vacuum pressure
Recommendation: Dry fore-pump or dry pumping station
from the Pfeiffer Vacuum range.
Connecting the fore-vacuum pump
All connections on the fore-vacuum line: conventional small-
flange components or hose connections.
Securely divert the gas exhaust from the
backing pump! Do not restrict the open cross-
section of the fore-vacuum flange with
additional components!
The exhausted process gases and vapors can
be dangerous to health and the environment.
Observe all safety recommendations from the
gas manufacturer.
Check the tightness of the fore-vacuum line
before commissioning.
➡For rigid pipe connections: Install bellows to attenuate
vibrations in the connection line.
➡A valve is required for the fore-vacuum line to protect the
turbopump from reverse venting in the case of uncon-
trolled switching off of the backing pump.
➡A relay box (see Section 12. Accessories) can be used for
the fore-vacuum pump’s electrical connection. The relay
box control line should be connected to the “Remote”
connector (Pin 11/Pin 26) of the Magnetic Bearing
Controller TM 3000 in accordance with the connection
diagram (see Section 3.9.).
For more detailed information about the fore-vacuum pump
relay box and its installation, see Operating Instructions
PT 0030 BN.
3.4. Connecting The Cooling
The Turbopump HiPace 3400 MC must be operated with water
cooling. For cooling water connections, see Section 11.1.
Dimension Diagram)
Water cooling
Cooling water either
– from cooling water net or
– from Recycled Water Cooling Unit TZK (see section 12,
“Accessories”) with closed circulation.
Cooling from cooling water net
The cooling water must be filtered to avoid deposits in the
pump!
Minimum requirements for the cooling water:
Mechanically pure, optically clear, no cloudiness, no
sediment, chemically neutral, temperature > dew point.
WARNING
CAUTION

9
3.5. Electronic Drive Unit And Magnetic
Bearing Controller TM 3000
General Unit Description
The Electronic Drive Unit And Magnetic Bearing Controller
TM 3000 is always used in combination with the turbopump
and form a single unit. All functions necessary to operate the
turbopump are preprogrammed on delivery. The factory
settings can only be changed via the RS-485 serial interface
(DCU/HPU or PC). When the power supply is switched on, the
pump is ready for operation. The operating mode is indicated
through three LEDs at the Magnetic Bearing Controller TM
3000 (see Section 7.).
538 DC Input 105
51
8a AC In
DC Out
(140 V)
Connecting the TM 3000 to the Power Supply TPS 1400/1401
AC In Mains connection
DC Out Power Supply TPS 1400/1401; DC output
DC Input TM 3000; DC input
8 Electronic Drive Unit And Magnetic Bearing Controller TM 3000
8a TM 3000 - TPS 1400/1401 connecting cable
105 Power Supply TPS 1400/1401
51 Plug (male)
53 Plug (female)
1
9
1926
1
2
345
7
8
1
4
3
1
2
3
4
5
6
7
PG
Remote
Optional slot
(e.g.for Profibus
or DeviceNet)
Service
(only for
Pfeiffer Vacuum
service)
Interface
RS 485
DC Input
(140 VDC)
88
96
2
Plug arrangement on the Electronic Drive Unit And
Magnetic Bearing Controller TM 3000

10
3.7. Connecting The Remote Control
Remote control options are accessible for various functions
via the “REMOTE” connection on the TM 3000 using a 26-pin
D-Sub (high density). A screened cable should be used. The
screen should be placed on the plug housing. A distinction is
made between digital and analog inputs and outputs.
Digital Inputs
Inputs adjusted to the level of SPS controls
Logic 0 = Function OFF level (-33 V to +7 V)
Logic 1 = Function ON level (+13 V to +33 V)
Digital Outputs
Potential-free relay contacts or active outputs
(see “Plug Arrangement REMOTE” table)
Analog Inputs and Outputs
(See “Plug Arrangement REMOTE” table).
Pin Arrangement and Remote Plug Function
(See “Plug Arrangement REMOTE” table)
The active outputs deliver a signal of between 0 and 24 V DC
and can handle current loads ≤ 50 mA. An external relay can
be connected to the active switching outputs 1 and 2
between Pin 8Pin 26 and Pin 9Pin 26. Pin 26 is the comple-
te mass GND* (see “Plug Arrangement REMOTE” table).
89(DN 10 ISO-KF)
F
G
V
Venting valve and sealing gas valve
8 Electronic Drive Unit And Magnetic Bearing Controller TM 3000
9 Venting valve/sealing gas valve
with DN 10 ISO-KF small flange connection
3.6. Connecting The Venting Valve and
Sealing Gas Valve
The venting valve and the sealing gas valve form a single unit.
They are a standard component of the turbopump and they
are delivered already mounted and connected . The inlet is a
shared DN 10 ISO-KF small flange connection. Permissible
pressure on the venting valve: 3 bar absolute.
Connecting The TM 3000 To The Power
Supply TPS 1400/1401
Make sure that the power supply is completely
disconnected from the mains during electrical
connection.
For supply disconnect, it is required to power
the pump via a lockable main circuit breaker or
switch rated 12A minimum, with a minimum
ampere interrupting capability of 5000 AIC.
Pump, TM 3000 and power supply do not have an
emergency-stop device. Make sure that they are
properly included in the emergency stop system
of the higher-level equipment control.
The turbopump and TM 3000 are always used in
combination and should never be separated.
The connecting cable 8a can be ordered
separately in any desired length (see Section
12. Accessories).
Only the Pfeiffer Vacuum Power Supply TPS
1400/1401 (see Section 12. Accessories) should
be used. Other power supplies must be
approved by the manufacturer and meet the
necessary specifications (power supply specifi-
cations on request).
As a precaution please check that the grub screws are far
enough unscrewed from the nut before connecting the cable.
➡For details regarding the Power Supply TPS 1400/1401, see
the Operating Instructions PT 0111 BN.
➡Insert plug 53 at the connecting cable 8a into the
connection DC In at the TM 3000 and screw tight.
➡Connect plug 51 at the connecting cable 8a to the Power
Supply TPS 1400/1401 at the connection "DC Out" and
screw tight.
➡To ensure the protection class IP 54 of the connection the
cap nuts of the plugs 51 and 53 must cover the O-rings of
their counterpart completely.
➡Secure the plugs 51 and 53 with the grub screws present.
The TM 3000 will perform a self-test and calibra-
tes the magnetic bearing sensors when the
operating voltage is connected. During the self-
test sounds from the sensor calibration can
occur. After that the turbopump is ready to
operate. The supply voltage for the turbopump is
140 V DC ±3% as per the EN 60 742 standard.
The mains connection must be freely accessible
at all times.
CAUTION
CAUTION
CAUTION
☞
PLEASE NOTE
WARNING
WARNING
WARNING

11
PPiinnDDeessccrriippttiioonn//EExxppllaannaattiioonnFFuunnccttiioonnTTyyppee
1 + 24 V DC Reference voltage for all remote inputs and outputs
(potential free) -
2 Venting release Release “vent pump” Digital input
ON/OFF Pump is vented according to the “Venting mode P030” setting (static signal)
3 Motor TMP Switches the turbopump drive on Digital input
ON/OFF (is only switched on if the function (static signal)
“pumping station P010” is also ON)
4 Pumping station Switches on pumping station Digital input
ON/OFF (rotor lifted from its rest position. When [P:023] “Motor TMP” (static signal)
is set to ON, the rotor accelerates.)
5 Standby rotation speed Rotor speed is limited to n% as per [P:717] Digital input
ON/OFF (factory setting 66%) (static signal)
6 not occupied
7 Rotation speed preset Rotation speed preset value in the range of 50-100% Analog voltage
0-10 V DC of the “nominal rotation speed”[P:315] input 5-10 V DC; 0-5 V=fnom
8 Switching output 1 Function configurable with «024:Conf. Out1»; Active digital output
(Switch point) factory setting [P:701] “rotation speed switch point” exceeded (Imax = 50 mA/24 V)
9 Switching output 2 Function configurable with «019: Conf.Out2»; Active digital output
(error) factory setting “error output 24 V = no error (Imax = 50 mA/24 V)
10 Sealing gas The sealing gas valve is switched directly. Digital input
ON/OFF (static signal)
11 Backing pump control 24 V = Backing pump on Active digital output
(Imax = 50 mA/24 V)
12 Uf/Ui/Up Output voltage 0-10 V DC proportional; Analog voltage output
voltage output Rotor speed, motor current or drive power configurable 0-10 V DC / RL> 10 kΩ
with «055: Conf A01»
13 Malfunction acknowledgment Deleting an error message Digital input (pulse 500-1000 ms)
14 Remote priority Remote functions have priority over operation Digital input
ON/OFF via RS-485. Must be activated with parameter [P:028] (static signal)
15 Relay contact Pin 15 and 16 connected Relay contact
switch point when the rotor speed is above switch point Umax = 50 V DC
16 Relay contact Pin 16 and 17 connected I max = 1 A
Switch point when rotor speed is below switch point
17 Relay contact
Switch point
18 Relay contact Pin 18 and 19 connected Relay contact
Error if there is no error Umax = 50 V DC
19 Relay contact Pin 19 and 20 connected Imax = 1 A
Error if there is an error
20 Relay contact (For additional information see Section 4.21. Switching Outputs)
Error
21 Relay contact Relay contact
Message Umax = 50 V DC
22 Relay contact not assigned/reserve Imax = 1 A
Message
23 Relay contact
Message
24 Relay contact Pin 24 and 25 connected Relay contact
Warning if there is no warning Umax = 50 V DC
25 Relay contact
Warning Imax = 1 A
26 GND* Ground potential for all remote inputs and outputs
(potential free)
25
24
powerless condition
21
23
22
powerless condition
18
20
19
powerless condition
15
17
16
powerless condition
Plug Arrangement REMOTE

12
3.8. Connecting The Serial Interface.
Using A DCU Or HPU
Electrical Connection
The “RS-485” connection on the TM 3000 can be used to con-
nect an operating component (DCU 002 oorrHPU 001) with a
screened 5-pin connecting cable in a point to point connec-
tion oorrvia a computer (PC).
Pin Arrangement
1 RS-485: D+ (DO / RI)
2 +24 V output
(≤ 210 mA loading capacity)
3 Gnd
4 RS-485: D- (DO / RI )
5 not connected
1:D+, 4:D
RTRT
evel converter
TIC 001
Master
(e.g. PC, SPS)
RS 232
Slave
(TM 3000) (TM .... (TM .... Slave
(TM 3000)
All devices connected to the bus must have different
interface addresses [[PP::779977]].
The TM 3000 group address is 940.
Only safe low voltages can be connected to the
RS-485 serial interface. Pin 2 (+24V output)
cannot be connected.
All remote functions switched on have priority
over the interface functions if [[PP::002288]]is
set to “0”.
Detailed information regarding operation via
the RS-485 interface and the electrical data
can be found in the separate Operating
Instructions PM 0488 BN.
Bus operation via the optional slot
For the connection and operation of a bus system via the
optional slot on the TM 3000 a respective gateway must be
pre-installed in the works (according to customer order). A
retrofitting is not possible.
☞
PLEASE NOTE
WARNING
1
4
2
3
1 ... 4
RS-485
DDeessccrriippttiioonnVVaalluuee
Interface type: RS-485
Baud rate: 9600 baud
Data word length: 8 bit
Parity: No parity
Start bits: 1
Stop bits: 1..2
RS-485 plug arrangement
An RS-232 (e.g. PC) can be connected via a
TIC 001 level converter (see Section 12.
Accessories).
Bus Operation Via RS-485 Interface
Only one master can access the slaves in bus
mode.
Connection to a fixed bus system:
➡Connect all devices with D+ (Pin 1 / RS-485) and D- (Pin 4 /
RS-485) to the bus.
➡The bus must be closed at both ends.
The RTconnections and bus connections should meet the
RS-485 interface specifications.
☞
PLEASE NOTE
☞
PLEASE NOTE
(view from the
plug side of the
TM 3000)
The interface is safely electrically isolated from the maximum
supply voltage occurring in the TM 3000.
Data transfer format
DCU 001
HPU 001
RS 485
RS 485
RS 485 TM 3000
RS 485
1
4
2
3
1
2
3
4
5
9876
26
19
1
9
1
2
3
4
5
6
7
PO
COM 1/2
PC
TIC 001
RS 232
X3
Connecting the RS-485

13
3.9. Connection Diagram
TM 3000
SERVICE DC Input
140 VDC
RS485
+24VDC* GND* D- D+ n.c.
1
2 3 4
5
1 2 3 4 5 6 7 8 9
GND n.c. PE +140V DC 1
2 3 4 5 6 7
REMOTE
+24VDC* Venting on MotorTMP on Pumping Station on Standby on Uf/ Ui/ Up voltage Set rot speed 0-10V Switching output 1 Switching output 2 Error Acknowledge Remote priority
1
2
3 4 5 6 7 8 9
10 12
11
13 14
15
16 17
18 19
20
21
22 23 24
26
25
Seal gas open Backing pump
1
4
3
2
1
2
3
4
5
6
7
P0
12345
67
8 9
1
9
1926
Optional slot
GND*
switching point error not assigned/ reserve warning
potential free
contacts
} }
}
}
}
1)
electrically insulated
optically insulated

14
4. Operations
4.1. General Operating Information
Magnetic bearings are non-wearing but have limited load
capacity. Therefore, the HiPace 3400 MC is equipped with dry
running safety bearings, which prevent contact between the
rotor and stator in the event of strong vibrations, rapid high
pressure changes, power failure and magnetic bearing
defects. The safety bearings are subject to wear. To achieve
the longest possible life for the safety bearings, you are urged
to observe the following:
– Do not expose the pump to shocks, vibrations or other
movements during operation. In particular, tilting of the
pump causes contact between the rotor and safety
bearings.
– Do not expose the pump to sudden pressure changes on
the high vacuum or fore vacuum side during operation.
– Never stop the pump by turning off the mains voltage.
4.2. Operating Modes
RS-485 Serial Interface
The turbopump can be operated using the Display And Opera-
ting Units DCU 002 or HPU 001, or using a PC via the
RS-485 interface (see also Section 3.8.). The procedure is
described in the accompanying operating instructions (see
Section 12. Accessories).
Bus operation via RS-485 Interface
The group address for the Magnetic Bearing Controller
TM 3000 is 940. This address allows you to simultaneously
transfer control commands or reference value inputs to all
TM 3000 units. In this case, the TM 3000 units do nnoottsend
reception acknowledgement to the master via the data bus.
A description of the data communication can be found in the
PM 0488 BN operating instructions.
Bus operation via option slot / gateway
Operation according to the operating instructions of the
corresponding gateway (e.g. TIC 253, PT 0138 BN).
Remote control operation
(see Section 4.18.)
4.3. Before Switching ON
The turbopump rotor rotates at high speeds. An
open high vacuum flange can lead to injury and
carries the risk of destroying the pump through
objects falling into the pump.
Therefore never operate the pump with an
open high vacuum flange.
Exercise care when pumping hazardous gases!
Observe all safety recommendations from the
gas manufacturer!
WARNING
WARNING
➡For sealing gas operation: Sealing gas supply open.
➡Open cooling water inlet and monitor flow.
The following iimmppoorrttaannttfactory settings are programmed on
delivery in the turbopump and can only be changed via the
RS-485 serial interface:
[[PP::770000]]Starting time 15 min
[[PP::770011]]Rotation speed switch point 80%
[[PP::003300]]Automatic venting 0
[[PP::770077]]Rotation speed set value
in rotation control operation 50%
[[PP::770088]]Maximum Drive Power 100%
[[PP::771177]]Rotation inputs in standby operation 66,7%
[[PP::779977]]Unit address 1
[[PP::005500]]Sealing gas off
[[PP::002277]]Gas mode 0
4.4. Switching ON
➡The turbopump is ready to operate by connecting the
Power Supply TPS 1400/1401 to the mains voltage.
If after applying the mains voltage the error message E777
is displayed, then proceed as follows:
➡In the case of the DCU 002 or HPU 001 select
«777777::PPuummppRRoottMMaaxx».
➡Enter the nominal speed for the connected pump once
(see Section 11. Technical Data). The error message E777
is erased, the pump is ready for operation.
This procedure is part of a redundant safety
system for avoiding excessively high speeds.
➡Switching on with one operating mode as described in
section 4.2.
– After the self-test of the drive has been completed
successfully, the rotor of the turbopump begins to rotate.
The rotation speed switch point [[PP::770011]]must be reached
within the preset startup time [[PP::770000]].
If the rotation speed switch point is not reached in this time,
the turbopump is shut down. The red LED lights up
(aggregated error message).
After malfunction acknowledgment, the startup time is reset
to the initial value and the rotor is accelerated again.
☞
HINWEIS

15
4.5. Normal Operation Of The
Turbopump
The turbopump is started up with maximum drive power.
When the set rotation speed [[PP::331155]]is reached, the pump is
switched to rotation speed control and the motor current
[[PP::331100]]is set to a value dependent on the gas throughput and
fore-vacuum pressure.
4.6. Standby Rotation Speed ON/OFF
➡Select «000022::SSttaannddbbyy» with DCU 002/HPU 001.
➡Select «OOFFFF» or «OONN».
“Standby mode” means operation of the turbopump at 66.7%
of the final rotation speed [[PP::331155]](factory setting).
This value can be changed as follows:
➡Select «771177::SSttbbyyrroottsseett»
➡Set standby rotation speed in the range 50-100%.
The standby function can be activated via remote control or
the serial interface.
Standby mode is not possible in rotation speed set mode
([[PP::002233]]“ON”) (see Section 4.7.).
4.7. Turbo Drive ON/OFF
The rotor drive can be turned on and off separately via the
DCU 002/HPU 001 during operation of the pumping station :
➡Select «002233::MMoottoorrTTMMPP».
➡Select« OOFFFF»»or ««OONN».
The rotor accelerates to the nominal rotation speed or shuts
down.
4.8. Rotation Speed Switch Point
The calculation of the rotation speed switch point always
relates to the set rotation speed [[PP::330088]].
It is influenced by the settings of the parameters
[[PP::000022]]”Standby”
[[PP::771177]]”Stbyrotset”
[[PP::002266]]”OpMode TMP”
[[PP::770077]]”TMProt set”
and the remote analog input Pin 7 “Set rot speed 0-10 V”.
The following always applies:
Rotation speed switch point [Hz] = [[PP::330088]]⋅[[PP::770011]]
100
4.9. Rotation Speed Set Mode
The rotation speed set mode is selected if the gas throughput
of the turbopump is to be modified. The pressure ratio and
pumping speed of the pump fall with the rotation speed.
Rotation speed preset in rotation speed set mode
➡Select «770077::TTMMPPrroottsseett» with DCU 002/HPU 001.
➡Set rotation speed in the range of 50-100%.
Operating mode of the turbopump
➡Select «002266::OOppMMooddeeTTMMPP» with DCU 002/HPU 001.
➡Select «11» for rotation speed set mode.
Standby mode is ineffective in rotation speed
set mode. Rotation speed set mode can also be
set and activated via remote control or the
serial interface.
4.10. Backing Pump Operation
The “remote” output Pin 11 can be used for drive control a
backing pump.
The backing pump is switched on or off at the same time with
the turbopump using «001100::PPuummppssttaatt».
The backing pump also is switched off when turbopump
errors occur.
☞
PLEASE NOTE

16
0
10
20
30
40
50
60
0,2 0,3 0,4 0,5 0,6 0,7 0,8 0,9 1,0 1,1 1,2 1,3 1,4 1,5 1,6
Fore-vacuum pressure [mbar]
Gas throughput [mbarl/s]
0
550
1100
1650
2200
2750
3300
Gas throughput [sccm]
3
5
˚
C
c
o
o
l
i
n
g
w
a
t
e
r
t
e
mp
e
r
a
t
u
r
e
(
[
P
3
1
6
]
≈
7
9
0
W
)
2
5
˚C
c
o
o
l
i
n
g
w
a
t
e
r
t
e
m
p
e
r
a
t
u
r
e
(
[
P
3
1
6
]
≈
8
5
0
W
)
1
5
˚
Cc
o
oli
n
g
w
a
t
e
r
t
em
p
e
r
at
u
r
e
(
[P
3
1
6
]
≈
9
30
W
)
Ratation speed 400 Hz,
cooling water flow rate 100 l/h
4.11. Gas Type Dependent Operation
With high gas loads and high rotation speeds, gas friction
causes the rotor to heat up. To prevent overheating, a power-
rotation speed characteristic is implemented in the TM 3000,
which allows the pump to be operated at any rotation speed
with the maximum permissible gas load with no risk of dama-
ge. The maximum power will depend on the type of gas and
cooling power available. In order to fully utilise the power of
the pump irrespective of the type gas, two characteristics are
available.
«002277::GGaassMMooddee» (selectable with DCU001/HPU 001)
– “Gas Mode 0” for gases with molecular mass ≥40 such as
argon (factory setting);
– “Gas Mode 1” for all lighter gases.
Pumping gases with a molecular mass ≥40 in
the incorrect gas mode can damage the pump.
When pumping noble gases heavier than Argon
it can come to the destruction of the pump.
Please contact the manufacturer before using
such gases.
The rotor is always accelerated with maximum drive power
when the turbopump is started up in order to minimize the
run-up time. After the set rotation speed is reached, it
switches automatically to the selected power characteristic.
If the gas type dependent drive power is exceeded, the rotor
speed is reduced until equilibrium between the permissible
power and the gas friction is reached .
To avoid fluctuations in the rotation speed, we recommend
setting an equilibrium frequency or a somewhat lower
frequency in rotation speed set mode.
WARNING
The indicated power characteristics lines
apply only with opened sealing gas valve.
The maximum power is reduced if the sealing
gas valve is closed. With the sealing gas valve
closed, the maximum power in “Gas Mode 0”
is reduced by 20%.
In the event of gas throughput changes, the system will attain
new temperatures after a transitional period. During this tran-
sitional period, the maximum gas throughput is different
compared to the steady state. In particular, in the case of a
cold pump it will be possible to pump briefly a higher gas
throughput compared to continuous operation.
During operation close to the respective limits, a speed drop
of 2-3 % may occur. This is absolutely normal and is not
indicative of a fault.
Due to the distance between the cooling water
and the point at which the cooling plate tempe-
rature is measured, the difference between the
two temperature values may amount to up to
12° C, in particular at high drive powers.
☞
HINWEIS
☞
PLEASE NOTE
Power
Frequency
DB
C
A
D-C = Gas mode «0»
B-A = Gas mode «1»
Run up
fnom
Measurement of the cooling surface temperature
The temperature of the cooling surface «332233::TT__CCllggppllaattee» is
measured in the TM 3000 in the vicinity of the cooling water
supply connection. The measured value is utilised directly in
the calculation of the current maximum motor power.
From the motor power and the in each case prevailing fore-
vacuum pressure, the maximum gas throughput can be taken
from the following diagrams:
Basic power/speed characteristic
0
10
20
30
40
50
60
70
80
90
100
0,2 0,3 0,4 0,5 0,6 0,7 0,8 0,9 1,0 1,1 1,2 1,3 1,4 1,5 1,6
Fore-vacuum pressure [mbar]
Gas throughput [mbarl/s]
0
550
1100
1650
2200
2750
3300
3850
4400
4950
5500
Gas throughput [sccm]
3
5
˚
C
co
o
l
i
n
g
w
a
t
er
t
e
m
p
e
r
at
u
r
e
([
P
316
]≈
8
70
W
)
2
5
˚
Cc
o
oli
n
gwa
t
er
t
em
p
e
r
a
t
u
r
e
(
[P
3
1
6
]
≈
9
30
W
)
1
5
˚
Cc
o
o
l
in
g
w
a
t
e
rte
m
p
e
r
a
t
u
r
e
(
[P
3
1
6
]
≈
1
0
00
W)
Rotation speed 400 Hz,
sealing gas 20 sccm, air
cooling water flow rate 100 l/h
Gas type characteristics lines “Gas Mode 0”
Gas type characteristics lines “Gas Mode 1”

17
4.12. Switching Off And Venting
To prevent contamination of the turbopump after switching
off, the pump should always be vented before shut-down (see
also Section 4.19. Venting Modes).
Only dry gases can be used for venting. Avoid humidity in the
pump as it can affect the corrosion protection of the rotor
coating.
Uncontrolled venting can lead to overloading of
the axial bearing and require use of the safety
bearing.
The HiPace 3400 MC can only be vented using
the pre-mounted venting valve. This cannot be
replaced by other venting equipment.
Maximum pressure of the venting valve: 3 bar absolute.
If a higher venting rate is required, additional venting
equipment can be opened as soon as the rotation speed of
the pump is less than 100 Hz.
In this case, the venting valve on the turbopump must be
opened ffiirrssttso that no process gas gets into the motor
chamber.
We do not recommend venting above
atmospheric pressure, otherwise there is a risk
when opening the system and a risk of
leakages.
If the pump is to be vented with equipment other than that
installed from the outset, the pressure rise on the HV flange
must be limited to 0.5 mbar/s until the rotation speed is less
than 100 Hz.
Switching OFF
➡Switching off the turbopump and backing pump together,
e.g. via Remote / Pin4.
With corrosive gas processes, the sealing gas
supply shall be closed and the backing pump
switched off only when no more corrosive gas
is in the pump. Our recommendation is to main-
tain the sealing gas feed and the operation of
the HiPace 3400 MC and the backing pump for
an appropriate time period after the end of the
process gas feed.
WARNING
WARNING
CAUTION
➡After the rotation speed has reached 0 Hz, disconnect the
power supply from the mains. Since the turbopump,
magnetic bearing controller and power supply have no
lock-out/tag-out device, only disconnecting the power
supply completely from the mains puts the system in a safe
condition.
Wait at least one minute, if the connection
cable between power supply and TM 3000 is to
be removed. Otherwise, there is the danger of
an electric shock.
➡Close the water supply.
Hot surfaces cool off very slowly. To accelerate
the cooling process, the cooling water should
have a follow-up-time.
Electrical brake
When shutting down the turbopump without venting, with an
electrical brake the rotor can be braked rapidly from the rated
rotation speed to 0 Hz.
➡Set «001133::BBrraakkeeeennaabb» to «11».
The activation of brake and venting is independent on each
other.
4.13. Emergency Stop
In case of an emergency stop, the pump shall be stopped
according to chap. 4.12, preferably with venting the pump and
using the electrical brake. After standstill, the power supply
must be disconnected from the mains. If stopping the pump
regularly should not work, the power supply can be
disconnected from the mains regardless of the rotor speed. In
both cases, the main circuit breaker or switch in the higher-
level equipment must be locked and it must not be possible to
unlock unless the cause is corrected and the fault is cleared.
WARNING
WARNING

18
4.16. Emergency Power Operation
If the power supply fails during operation of the turbopump,
the pump motor works as a generator and supplies the power
for the electronics.
The power failure is indicated by a flashing signal of the
green LED on the housing.
The turbopump energy is insufficient to run the magnetic
bearing at a rotor speed below approximately 50 Hz. The
TM 3000 magnetic bearing controller is shut down completely
and the rotor winds down in the safety bearings.
Once power returns, the turbopump automatically restarts at
the set rotation speed.
If a mains power failure occurs while the pump is running
down with the electric brake active, this condition cannot be
detected by the controller and is therefore not indicated.
Otherwise the system will behave in the same way as in the
case of a mains power failure during normal operation, but
the system will not run up automatically as soon as the mains
power returns.
4.17. Shut Down For Longer Periods
If aggressive or hazardous gases are pumped
occasionally, there is a risk of injury from
contact with process gases. Before removing
the turbopump from the system, first:
– Vent the turbopump with inert gas or dry air;
– Ensure that no process gases remain in the system or
supply lines.
If the turbopump is to be shut down for longer than one year:
➡Remove the turbopump from the system.
➡Close the high vacuum flange and evacuate the turbopump
using the fore-vacuum flange.
➡Vent the turbopump with dry air or nitrogen via the venting
connection.
➡Close the fore-vacuum and venting connections with blank
flanges.
➡Place the pump in a vertical position
➡The pump must be stored in buildings within a temperature
range of -25 °C to +55 °C.
➡In rooms with a humid or aggressive atmosphere: Seal the
pump in an airtight synthetic bag with a bag of drying
agent.
WARNING
1) depending on the speed at the beginning of the contact with the safety bearings
At a level of 75 % the warning F890 is output,
from 100 % onwards the error message E890 is output and
operation of the pump will no longer be possible.
To repair the turbopump, please contact your nearest Pfeiffer
Vacuum Sevice Center.
4.15. Monitoring Of The Balancing
Condition
The current balancing condition of the rotor is constantly
monitored through sensors on the magnetic bearings. The
balancing condition can be queried through DCU 002 or
HPU 001 under [[PP::335588]]"UnBal Ch_A" and [[PP::335599]]"UnBal Ch_B"
for both radial bearing planes in percent of the maximum per-
missible imbalance. If the value in at least one of the planes
reaches 75 % or more, then the warning F891 will be output.
From 100 % onwards, the error message E891 will be output
and the pump will be shut down.
EEvveennttSSaaffeettyybbeeaarriinnggSShhaarreeiinn
ssttrreesssswweeaarr
ppeerreevveenntt
Power failure with the rotors low 0.33 %
running into the safety
bearings
Uncontrolled venting with medium 2.5 %
overloading the magnetic
bearings
Impacts with safety bearing medium 2 %
contact, rotor is
stabilised again
Running down of the rotor high 5 - 10 %1)
in the safety bearings
4.14. Safety Bearings
During strong external vibrations or improper operation, the
rotor is supported by dry running safety bearings (see also
Section 4.1.).
The safety bearings are subject to wear. The current wear
status [[PP::332299
]]“Bearg Wear”
as a % of the maximum wear
can be accessed via the DCU 002 or HPU 001.
Different events can cause different degrees of safety
bearing wear. These are assessed as follows:

19
The following functions are activated with “SPS High Level”
and deactivated with “SPS Low Level”:
– Motor TMP ON/OFF
– Heating ON/OFF
– Standby rotation speed ON/OFF
– Pumping station ON/OFF
– Venting release ON/OFF
– Sealing gas ON/OFF
– Malfunction acknowledgment
Remote control priority “OFF”
➡➡«028: Opmode Rem» remains set to «1»..
➡Set Pin 14 to ”SPS Low” on remote or connect to Pin 26.
–> Operation only possible via interface (remote control
inactive).
–> Set values are saved.
Remote Pin 7 “set rotation speed preset”
always has priority when there is a voltage
signal in the range 5 - 10 V DC.
☞
PLEASE NOTE
4.18. Remote Control Operation
If power failure occurs during operation, the
turbopump automatically restarts once power
returns.
The following functions can be controlled using remote
control (see also “Plug Arrangement REMOTE” table):
– Heating ON/OFF
– Standby rotation speed ON/OFF
– Pumping station ON/OFF
– Motor TMP ON/OFF
– Venting release ON/OFF
– Sealing gas ON/OFF
– Remote priority ON/OFF
– Rotation speed input (50-100% of the nominal rotation
speed [[PP::331155]]corresponds to 5 - 10 V DC voltage)
– Malfunction acknowledgment
Operating Modes With Remote Control
There are three different options for remote control with
different priorities for the functions:
Standard remote control
➡Set «002288::OOppmmooddeeRReemm» to «00».
The digital switching functions are activated through “SPS
High Level” 1).
Activated individual functions cannot be changed via the
interface. Individual functions deactivated with remote
control can be operated using the interface.
–> The settings are saved.
1) SPS-High Level: +13 V to +33 V
SPS-Low Level: -33 V to +7 V
Ri: 7 kΩ
Remote control priority “ON”
For certain applications, such as SPS control, the remote
control functions can be set to have priority.
➡Set «002288::OOppmmooddeeRReemm» to «11», prepare priority function
➡Set connection between Pin 1 and Pin 14 to “remote” or
“SPS High”.
The priority for remote control is now active.
The unit can now only be controlled via “Remote”.
Equivalent functions can no longer be operated via the
RS-485 interface.
–>The settings are saved.
CAUTION

20
4.19. Venting Modes
Venting is only possible after turning off the pumping station.
[[PP::001100]]Pumping station “OFF”
The venting valve is closed without current. In case of error,
the pump is vented in accordance with the selected venting
mode.
Three venting modes can be selected using the DCU 002 or
HPU 001:
➡Select «001122::VVeenntteennaabb»; Select «OONN», release venting
mode.
➡Select «003300::VVeennttmmooddee»; Select «00», «11» or «22».
Venting mode «0»: Automatic venting
Automatic venting means that venting begins when pumping
station is “OFF” [[PP::001100]], in case of power failure or error.
Venting occurs below a set rotor speed [[PP::772200]]for a set
duration [[PP::772211]]after an additional delay of 6 seconds.
During this time, a high vacuum valve can be closed if
installed.
The venting valve closes when the pumping station is turned
on, [[PP::0
01100]]pumping station “ON”.
The set duration cannot be guaranteed in case of power
failure.
➡Select «772200::VVeennttffrreeqq»
➡Rotor speed between 40-80% of the final rotation speed
[[PP::331155]]selectable.
➡Select ««772211::VVeennttttiimmee»»
➡Set venting duration in seconds between 6 and 3600.
Venting mode «1»: Venting OFF
–> The pump is not vented.
Venting mode «2»: Venting ON
–>If “Pumping station OFF” [[PP::001100]]or in case of error, the
pump is vented after a delay of 6 s. During this time, an
available high vacuum valve can be closed. The venting
valve closes when the pumping station is switched on,
[[PP::001100]]pumping station “ON”.
4.20. Configuration Of The Analog
Output
An analog signal (0-10 V DC) can be received on “Remote”
Pin 12 with the following information:
– Rotation speed of the turbopump or
– Drive power or
– Motor current
The analog output must be configured according to its
function.
➡Select «005555::CCoonnffAAOO11»
➡Select function «00», «11» or «22»:
0 = Rotation signal, 0 - 10 V DC 0 - 100 % · fend
1 = Power signal, 0 - 10 V DC 0 - 100 % · Pmax
2 = Current signal, 0 - 10 V DC 0 - 100 % · Imax
4.21. Switching Outputs
The following functions are assigned to the switching
outputs:
SSwwiittcchhiinnggoouuttppuutt11::(Remote: PPiinn88and
rreellaayyccoonnttaaccttsswwiittcchhppooiinntt)
Active high after rotation speed switch point is reached.
The turbopump switch point is factory set to 80 % of the set
rotation speed [[PP::330088]]. For example, it can be used for a
“Pump Ready” message.
SSwwiittcchhiinnggoouuttppuutt22: (Remote: PPiinn99and
rreella
ayyccoonnttaacctteerrrroorr)
The output function can be configured using the parameter
«001199::CCoonnff..OOUUTT22».
[[PP::001199]]RReemmootteePPiinn99
0
(factory low: in case of error, power off
set) high: unit ready for operation
1 low: in case of error, warning or power off
high: unit ready for operation
2 low: in case of error, power off or drive off [[PP::002233]]
high: Pump in operation
4.22. Configuration Of The Maximum
Drive Power
The maximum drive power of the TM 3000 can be limited via
parameter [[PP::770088]].
➡Select «770088::DDrrvvPPwwrrsseett».
➡Set the drive power according to the used power supply.
[[PP::770088]]PPoowweerrSSuuppppllyy
100 % TPS 1400
(ex factory)
69 % OPS 900