Advanced Energy Industries MDX Series User manual
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SM
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Instra
THE
ADVANCED
ENERG~
MDX MAGNETRON DRIVE
Version: domestic input voltage (200/208 V ac)
ADVANCED ENERGY
INDUSTRIES, INC
1600 Prospect Parkway
Fort Collins, Colorado 80525
(303)221-4670
Telex #45-0938
PN: 5700092-D
March 1993
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
To
ensure
years
of
dependable
service,
Advanced
Energy® products
are
thoroughly tested
and
designed
to
be
among
the most reliable
and
highest
quality systems
available
wor1dwide.
All parts
and
labor cany our
standard
1-yearwarranty.
For CustomerService,
call:
AE,
Colorado
office
AE,
California
office
AE,
Northeast
office
AE,
Japanese
office
AE,
German
office
all
others
(303)
221-0108 (24-hour
line)
Fax:
(303)
221-5583
(408)
263-8784
(8
a.m.
to
5
p.m.
Pacific
Standard
Time
-California
only)
Fax:
(408)
263-8992
(508)
371-1381
Fax:
(508)
369-1305
81
(03)
3222-1311
Fax:
81
(03)
3222-1315
49
(0711)
777-87-18
Fax:
49
(0711)
777-87-00
contact your
local
service
center-see
the
list
on
the next
page
©1991,
Advanced
Energy
Industries,
Inc
All
rights
reserved.
Printed
in
the
United
States
ofAmerica. This
manual
is
supplied
to
enable
the
reader to safely install,
operate,
and
service
the
equipment
described
herein.
Making
copies
of
any
part ofthis
manual
for
any
purpose
other
than
these
is
a violation of
U.S.
copyright
law.
In
the
interest of
providing
even
better
equipment,
Advanced
Energy
Industries,
Inc.,
reserves
the
right
to
make
product
changes
without notification or
obligation.
To
the
best
ofour
knowledge,
the
information contained
in
this
manual
is
the
most
accurate
available
as
of
the
date
on
the title
page.
For
more
information,
write
Advanced
Energy
Industries,
Inc.,
1600
Prospect
Parkway,
Fort
Collins,
CO
80525.
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
AE Service Centers
Company Name
Vacutec AB
Sweden
Gambetti Kenologia snc
Italy
Segen Technologies, Ltd.
Israel
Zeus Co., Ltd.
Korea
Schmidt Scientific
Taiwan
Returning Units for Repair
Phone/Fax Numbers
46 (0) 40-437270
Fax: 46 (0) 40-435538
39 (02) 9055660
Fax: 39 (02) 9052778
972 (03) 9363106
Fax: 972 (03) 9362030
82 (02) 577-3181
Fax: 82 (02) 576-3199
886 (02) 5013468
Fax: 886 (02) 25029692
Before returning any product for repair and/oradjustment, call AE Customer
Service and discuss the problem with them. Be prepared to give them the serial
number
of
the unit and the reason forthe proposed return. This consultation
call will allow Customer Service to determine
if
the unit must actually be
returned forthe problem to be corrected. Such technical consultation is always
available at
no
charge.
Ifyou return a unit without first getting authorization from Customer Service,
and that unit
is
found to
be
functional, you will have to pay a retest and
calibration fee, and all shipping charges.
Upgrading Units
AE will upgrade older units for a fee (a percentage
of
the current list price,
based
on
the age
of
the unit. Such
an
upgraded unit will carry a 6-month
warranty (which will be added to any time remaining on the original warranty).
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SAFETY
WARNING
SAFE OPERATING
PROCEDURES
AND PROPER USE
OF
THE
EQUIPMENTARE
THE
RESPONSIBILITY
OF
THE
USER
OF
THIS
SYSTEM.
Advanced Energy Industries,
Inc.,
provides infonnation
on
its
products
and
associated harzards,
but
it
assumes
no
responsibility forthe after-sale
operation
of
the equipment orthe safety practices ofthe owner or
operator.
This
equipment
produces
potentially lethal high-voltage
and
high-current
energy.
You
should
read
this
manual
and
understand its contents before
you
attempt
to
hook
up
or
operate
the equipment
it
describes. Follow all safety
precautions. Neverdefeat interlocks
or
grounds.
DANGER! All personnel who
work
with
or
who are exposed
to
this
equipment
must
take precautions
to
protectthemselves
againstserious
or
possiblyfatal bodily
injury.
DO
NOT BE CARELESS AROUND
THIS
EQUIPMENT.
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CONGRATULATIONS
...
On
your
purchase
of
AE's
MDX
magnetron
drive,
which
is
designed
for
continuous
hard
use
into
a
vacuum
environment.
Advanced
circuit
design
and
calibrated
instrumentation
make
these
units
the
most
accurate,
most
efficient,
and
most
versatile
in
the
world
today.
The
Advanced
Energy®
MDX
magnetron
drive
provides
exceptional
efficiency
from
line
to
load,
quick
response
to
changes
in
the
load,
and
extremely
low
stored
energy
in
the
the
output
filter.
Its
many
optional
configurations
and
standard
features
also
make
it a
highly
adaptable
power
supply.
With
an
MDX
you
can
regulate
power,
current,
or
voltage.
You
can
choose
any
of
these
methods
of
output
regulation
at
any
time
without
turning
the
output
off.
Three
interfaces
are
available:
a
control
panel
(connected
or
remote),
an
analog/digital
port,
and
an
RS-232
port.
Control
can
be
given
exclusively
to
any
or1e
interface
or
distributed
among
two
or
three
ofthem.
Each
MDX
is
equipped
with
a
built-in
impedance-matching
transformer.
These
transformers
are
available
in
low-impedance,
standard-impedance,
and
high-impedance
configurations.
The
standard
ARC-OUTJ'M
arc-suppression
circuitry
provides
outstanding
suppression
and
quenching
of
arcs,
cutting
off
the
energy
that
feeds
hot
spots.
The
ARC-CHECK™
option
goes
one
step
further
and
eliminates
destructive
short-inducing
flakes.
Typical
applications
include
de
sputtering
with
RF
bias,
basic
magnetron
sputtering,
cathodic-arc
deposition
(sputter
etching),
and
de-biased
RF
sputtering.
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CONTENTS
INTRODUCTION
Read This Page!
.....................................
vii
Overview
of
the Manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
ix
Interpreting the Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
xi
PART I GETTING TO KNOWYOUR MDX MAGNETRON DRIVE
1. WHAT
IT
IS
Table
of
Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
General Description
...................................
1-5
Typical Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-17
2.
HOW
IT WORKS
Table
of
Contents
....................................
2-1
Theory
of
Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Connectors
..........................................
2-7
Status Information
....................................
2-13
Interfacing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25
PART
II
OPERATING YOUR MDX MAGNETRON DRIVE
3.
PREPARING FOR USE
Table
of
Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Setting Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
Making Rear Panel Connections. . . . . . . . . . . . . . . . . . . . . . . . . 3-13
First-time Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3-31
4. CHOOSING MODES/SETTINGS
Table
of
Contents
....................................
4-1
Output Regulation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Program Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Lock Mode
..........................................
4-19
Remotes
............................................
4-21
Tap Selection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-27
Impedance Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-45
Line Voltage Changes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-47
Master/Slave Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-49
5. USING THE SPECIAL FEATURES/OPTIONS
Table
of
Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5-1
ARC-CHECK™. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
Fast Ramp . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5
Contactor Hold
.......................................
5-7
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A2·-------------------------------
PART
Ill
LEARNING
MORE
ABOUT
YOUR
MAGNETRON
DRIVE
6.
OPERATING
NOTES
DC
Bias
..........•..•..•...................•........
DC-1
7.
HOOK-UP
NOTES
Grounding
.........••.....••...•.....••.•.......•....
Gmd-1
TROUBLESHOOTING
GUIDE
APPENDIX
warranty
and
claims
infonnation
Index
Schematics
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INTRODUCTION
READ THIS PAGEl
We
know
that
some
of
you
want
to
start
the
magnetron
drive
now
and
that
you
don't
feel
you
have
time
to
read
the
entire
manual.
Below
is a list of
the
subsections
you
will
need
to
read
in
order
to
get
started.
We
also
think
that
you
will
find
Overview
of
the
Manual
(page
ix)
and
Interpreting
the
Manual
(page
XI)
useful.
They
are
very
short
sections,
and
are
intended
to
guide
you
through
the
manual.
Overview
of
the
Manual
explains
the
organization
of
the
manual,
so
that
you
can
more
quickly
find
what
you
need.
Interpreting
the
Manual
explains
the
type
conventions
(what
it
means
when
a
word
appears
in
capitalized
italic
type,
for
instance),
and
what
the
five
icons
(symbols)
mean.
• Physical specifications
• Connectors
• Setting
up
• Start-up procedures
• Control
panel
switches
and
LEOs
•
Line
voltage
changes
vii
page
1-19
page
2-7
page
3-5
page
3-29
page
2-15, 2-17, 2-21,
2-25
page
4-47
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INTRODUCTION
OVERVIEW
OF THE MANUAL
The
main
table
of
contents
is
a
general
outline
ofmajor
topics
covered
in
the
manual.
It
contains
only
the
main
headings
within
each
chapter
so
that
you
can
skim
it
and
get
a
general
idea
of
what
is
contained
here,
without
having
to
look
at
a
lot
of
headings.
When
you
tum
to
one
ofthe six
chapters,
you
will
find
a
detailed
table
of
contents
that
lists
every
heading
in
that
particular
chapter.
This
will
help
you
to
quickly
decide
which
page
contains
the
information
you
are
looking
for.
Throughout
the
manual,
the
chapter
titles
are
printed
at
the
top
right-hand
comer of
each
odd-numbered
page.
Part
I
contains
two
chapters:
What
It
Is,
and
How
It
Works.
What
It
Is
gives
a
general
overview
of
the
MDX
magnetron
drive,
its
various
features
and
configurations,
and
typical
applications.
A
detailed
description
of
the
functional
specifications
and
a
list
of
the
physical
specifications
are
also
included.
How
It
Works
contains
a
functional
block
diagram
and
important
information
on
connections,
including
listings
of
all
input,
output,
and
reference
pins.
Status
indicators
and
messages
(and
suggested
responses)
are
briefly
discussed,
and
functions
that
are
available
through
each
of
the
interfaces
are
described.
The
transmission
parameters
for
the
Host
(RS-232)
port
are
also
included
in
this
section,
as
are
several
tables
detailing
recognized
commands
and
explaining
possible
responses
to
those
commands.
Part
II
consists
of
three
chapters:
Preparing
for
Use,
Choosing
Modes/Settings,
and
Using
the
Special
Features.
Preparing
for
Use
provides
information
on
connection
and
wiring
options,
spacing
and
cooling
requirements,
and
start-up
procedures.
Choosing
Modes/Settings
contains
information
on
selecting
one
of
the
three
methods
of
output
regulation:
power,
current,
or
voltage.
The
subsection
on
"program"
mode
describes
the
target
controls
and
various
programmable
setpoints
and
timers.
Accessing
functions
through
the
analog/digital
("User')
interface
is
discussed.
Step-by-step
procedures
are
provided
for
changing
taps
and
line
voltage
settings.
Also
included
is
an
explanation
of
the
impedance
options
and
a
table
that
shows
the
maximum
output
current
for
various
MDX
models.
Special
considerations
for
systems
that
use
both
"master"
and
"slave"
MDX
units
are
briefly
examined.
ix
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82~----------------
Using
the
Special
Features
describes
the contactor hold
function,
which
is
standard,
and
the
optional
ARC-CHECKN
and
fast ramp
features.
Part
Ill
contains
two
technical
operating
notes:
one
on
de
bias
and
one
on
grounding
considerations.
X
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INTRODUCTION
INTERPRETING THE MANUAL
Type Conventions
To help you quickly pick out what is being discussed, the manual presents
certain words and phrases in type that is different from the rest
of
the text.
Pin and line names appear in capitalized italics (RAMP IN.A). Labels that are
on
the MDX (switches, indicators, etc.) generally appear
in
boldface capital
letters (MODIFY). Exceptions are port names, which simply begin with a
capital letter (User port).
Specific messages that will appear on the control panel meters are indicated
by quotation marks ("E-02'1. Functions are printed in boldface lowercase
letters
(contactor
hold).
How to Use the Symbols
~-YO-U
__
_.
SHOULD
KNOW
•••
Safety notes. Important notes concerning potential harm to
people.
Warning
notes. Important notes concerning possible harm to
this unit or associated equipment.
Operating notes. More thoughts on howto use the extended
features provided.
xi
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d2®---------------------------------
li9J-vou
_
___,
SHOUW
KNOW
..•
~-YOU----'
SHOULD
KNOW
...
Hook-up and interfacing notes.
General
practices
concerning
input
and
output
power
connections,
or
used
in
connecting
communication
and
control
interfaces.
Service notes.
General
practices
to
be
used
in
maintaining
this
equipment
in
top
running
condition.
xii
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
PART I
GETTING TO KNOW YOUR
MDX MAGNETRON DRIVE
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WHAT IT
IS
CONTENTS
General
Description
. . . . . . . . . . . . . ••. .. . ••. . . . . . . . . . . . .
1-5
Output
Impedance
Range
. . •. .. . ••. . . . . . . . . . . . .
1-5
Output
Regulation
.....•...••..................
1-5
Interfaces
...•.•..••.............•.•.........
1-5
Microprocessor
Advantages
. . . . . . . . •••. . •. . . . . . .
1-6
Displays . . •. . . . . . . . . •. .. . . . •. . . •. . . . . . . . . . . .
1-6
Built-in
Protection
•. . . . . . . . . •. . •••. . . . . . . . . . . . .
1-6
Arc-suppression
Circuitry
.....•......•..........
1-6
Sophisticated
Options. . . . . . •. . . . . . . . •. •. . . . . . . .
1-6
Typical
Applications
. . . . . . . . . . . . . . . . . . . . . . . . •. . . . •. . . .
1-9
Basic
Magnetron
Sputtering
. . . . . . . •. . . . . . . . . . . . . . . .
1-9
Factory
Configuration
(Negative
Output)
.....
~
.....
1-9
Optimum
Configuration
(Positive
or
Negative
Output).
1-10
Optimum
Configuration
(Floating
Output)
•.........
1-12
DC
Sputtering
with
RF
Bias
. . . . . . •. . . . . •. . . . . . . . . . .
1-13
De-biased
RF
Sputtering
..........................
1-15
Specifications
.•..........•.•................••...•..
1-17
Functional
Specifications
.......•.....•.............
1-17
Physical
Specifications
...........................•
1-19
1
-3
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WHAT IT
IS
GENERAL
DESCRIPTION
The
de
magnetron
drives
in
the
MDX
series
prove
just
how
convenient
and
efficient
advanced
high-frequency
switchmode
power supplies
are.
They
...
•
are
light
and
compact
•
are
highly efficient (low heat emission)
• provide excellent regulation
and
stability
•
have
a highly reliable solid state design
•
are
modular
• store
very
little energy
in
the output filter
These
magnetron
drives
exhibit
superior
output
response
time,
low
output
ripple
voltage,
and
considerable
space
savings
over lower frequency
designs.
The
internal
microprocessor
ensures
ease
of
use,
and
the modular
design
allows
the
supplies
to
be
easily
serviced.
Output Impedance Range
Each
MDX
is
equipped
with
a
built-in
impedance-matching
transformer.
These
tap-selectable
transformers
are
available
in
high
Z,
standard
Z,
or
low
Z
configurations.
With
the
proper
transformer
and
tap
(see
pages
4-27
and
4-45),
load
impedances
requiring
voltages
from
400
V
to
1250
V
can
be
accomodated.
Plasma
strike
voltages
are
available
on
all
taps -
levels
reach
as
high
as
1500
V,
depending
on
the
model.
The
full
rated
power output for
each
MDX
is
available
throughout
the
range
of
each
tap.
Output Regulation
The
MDX
can
be
used
as
a
power,
current,
or
voltage
source,
depending
on
the
method
of
output
regulation
selected.
Since
setpoint
levels
are
stored
in
nonvolatile
memory,
they
can
be
used
in
recovering
from
input
power
interruptions
and
to
ensure
repeatability
from
run
to
run.
Interfaces
The
MDX
can
be
controlled
from
a variety of
attached
or
remote
control
panels,
an
analog/digital
connector,
or
an
RS-232
serial data
port.
The
RS-232
(Host)
interface
provides
access
to
all
operating
parameters
and
control
functions.
The
analog/digital
(User)
interface
provides
data
logging
capability
and
access
to
a
number
of
features.
1 - 5
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dE®
___
PA_R_T
__
I
____________________
_
Microprocessor Advantages
The
internal
microprocessor
checks
for proper circuit
operation
while
supervising
all
operating
parameters.
System
diagnostics
run
when
the
unit
is
initially
powered
up.
Messages
are
di~pl~yed
in
response
to
errors.
The
most
recent
power
settings
and
conditions
(such
as
target
life
remaining
and
amount
of
time
that
the
MDX
has
been
producing
output),
are
retained
in
nonvolatile
memory.
Displays
Instrumentation
and
status
readings
are
taken
and
interpreted
by
the
internal
microprocessor,
then
displayed
on
digital front
panel
displays
and
LED
indicators.
Power,
voltage,
current,
ramp
time,
run
time,
target
selection,
target
life,
and
interlock
status
are
examples
of
the
parameters
that
are
displayed.
Built-in Protection
The
MDX
has
complete
internal
protection
for
output
overvoltage,
over-
current,
and
overpower
conditions.
The
key
switch
on
the
front
panel
can
be
used
to
restrict
access
to
adjustable
pa~ameters.
Three
separate
pins
on
the
User
port,
and
corresponding
front-panel
indicators,
are
provided
for
safety-related
inputs
such
as
vacuum,
water,
and
auxiliary
(user-specified)
interlocks.
Arc-suppression Circuitry
ARC-OUTTM
provides
multilevel
suppression
and
quenching
ofdifferent
types
of
arcs.
An
added
advantage
is
that
ARC-OUT
reduces
target
burn-in
time
and
material
loss.
This
feature
also
prevents
energy
from
being
dumped
into
hot
spots
by
sensing
a
drop
in
impedance
and
immediately
shutting
the
power
off.
Start-up
after
an
arc
is
controlled
so
that
the
hot
spots
cool
before
power
is
reapplied,
thus
preventing
repeated
arcing.
Sophisticated Options
Fast
Ramp.
This
feature
reduces
the
minimum
time
for
the
power
supply
to
ramp
to
the
setpoint,
a
major
benefit
for
applications
with
very
short
cycles.
Control Panels.
The
MDX
is
available
with
a
standard
control
panel,
passive
front
panel,
or a
combination
ofa
passive
front
panel
and
remote
control
panel
(standard
or
minipaneQ.
Foldout
illustrations
ofthe
controVfront
panels
appear
at
the
end
of
the
second
chapter.
ARC
CHECK™.
This
proprietary
feature
eliminates
continuous
low-
impedance
conditions
in
certain
vacuum
environments,
such
as
those
in
1
-6
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WHAT IT
IS
cathodic
arc
processes.
When
recovering
from
a low-impedance
condition,
the
MDX
automatically
ramps
up
slowly
in
current
regulation.
As
the
chamber
impedance
increases
(with
the
removal
of
excess
ions),
the power supply
automatically
crosses
over
to
the
previously
selected
method
ofoutput
regulation
(power or
voltage).
TimiQg
and
current magnitudes
can
be
adjusted
to
protect
sensitive targets
and
system
components.
1 - 7
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WHAT IT
IS
TYPICAL APPLICATIONS
Basic Magnetron Sputtering
Three
output
configurations
are
possible
for
the
MDX:
negative
output
voltage,
positive
output
voltage,
and
floating
ground.
Provisions
within
the
MDX
chassis
allow
you
to
tie
either
the
anode
or
the
cathode
to
ground;
alternatively,
you
can
let
the
output
float
with
respect
to
ground
by
not
grounding
either
the
anode
or
the
cathode.
Danger! An understanding
of
grounding and
the proper hookup
of
grounds is essential
to
personnel safety and is necessary
for
the
proper operation
of
your system. In all cases
you must connect the chassis ground stud
on the rear
of
the
MDX
to
earth-ground with
the lowest possible impedance (see
operating note on grounding methods and
definitions,
page
7-1).
Factory Configuration (negative output)
Most
MDX
applications
require
a
negative
output
voltage,
which
in
tum
requires
that
the
anode
be
connected
to
ground.
The
MDX
is
shipped
with
a
safety
jumper
installed
as
shown
in
Fig.
1-1
to
make
this
ground
connection,
although
this
is
not
the
optimum
configuration.
The
reason
is
related
to
safety
-
most
people
associate
the
braided
shield
layer ofa
coaxial
cable
with
a
ground
connection.
If
we
shipped
products
with
no
internal
ground,
it
is
conceivable
that a
system
could
be
configured
with
a
lethal
voltage
on
the
coaxial
cable's
sheath.
This
would
be
extremely
dangerous
because
of
the
possibility
that
people
could
unknowingly
be
exposed
to
such
a
voltage
at
the
connectors.
The
disadvantage
of
having
an
installed
ground
is
that
additional
grounds
invariably
do
exist
in
the
system.
This
means
that
there
are
two or
more
ground
paths
in
the
system.
VVhen
multiple
ground
paths
exist,
the
chassis
is
made
to
conduct
some
of
this
current.
This
current
flow
can
cause
a
loss
of
instrumentation
accuracy,
electrical
noise,
and
heating
ofthe
chassis
or
connectors
and
joints;
it
may
even
raise
the
ground-reference
voltage
level
so
that
external
and
internal
control
signals
either
control
the
MDX
erratically or
not
at
all.
Thus
the
best
system
performance
is
obtained
using
the
"optimum
configuration
(positive
or
negative
output)"
described
next.
1 - 9
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di:e_P_A_R_T_I
___________
_
Insulated
.------------~/
Feedthrough
Factory-installed
...........
.._--t
fSofoty
J"mP"
MDX
Chamber
,.-,r-
Substrate
Optional
'-----
Grounded
Substrate
Rgure
1-1.
Factory
configuration
(factory-installed safetyjumper).
Optimum Configuration (positive
or
negative output)
The
configuration
that
AE
recommends
is
illustrated
in
Fig.
1-2,
which
shows
an
independently
grounded
anode
at
the
chamber,
forcing
all
return
current
through
the
anode
return
path.
The
design
of
the
chamber
may
use
the
chamber
wall,
special
internal
shielding
structure,
or
the
substrate
holder
as
the
actual
anode.
With
this
setup,
·only
one
current
path
will
exist,
thus
eliminating
the
problems
caused
by
multiple
returns.
Make
certain
that
you
have
established
a
good
ground
at
the
chamber
anode
or
the
ground
reference
will
be
lost.
The
integrity
of
this
ground
connection
should
be
checked
as
part
ofa
periodic
maintenance
schedule
to
ensure
continued
optimum
performance
and
safety.
Whenever
a
system
is
configured
in
this
manner,
it
is
recommended
that
secondary
dielectric
shielding
be
installed
over
all
parts
of
the
coaxial
cable
and
connectors
that
are
exposed.
When
this
connection
degrades,
as
it
will
over
time,
the
system
could
become
unsafe
(as
described
in
the
two
preceding
paragraphs);
more
likely,
performance
will
be
lost.
This
slow
loss
of
performance
can
be
subtle
and
very
difficult
to
detect.
Some
indications
of
ground
degradation
are
loss
of
instrumentation
accuracy,
symptoms
of
increased
noise
such
as
display flicker
and
jittery
data-logging
lines,
secondary
plasma
development
between
the
target
and
the
closest
point
at
ground
potential,
change
in
the
appearance
of
the
chamber
plasma
at
known
power
levels,
and
increasingly
erratic
behavior
of
the
power
supply
or
the
system
controller.
1 - 10
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This manual suits for next models
6
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