Boston Multi-DM User manual

Multi-DM™ Deformable Mirror System
User Manual, Rev. 5.2
This document describes the following products:
Multi-DM – Continuous Deformable Mirror
1.5 µm, 3.5 µm, & 5.5 µm Strokes
Multi-SLM – Segmented Deformable Mirror
1.5 µm & 3.5 µm Strokes
Control Electronics
Multi Driver Control Drive Electronics P/N DRV00120-03
Software
Deformable Mirror Software Development Kit (DM SDK)

Boston Micromachines Corp.
30 Spinelli Place, Suite 103
Cambridge, MA 02138
USA
Tel: [phone]
Fax: [phone]
WWW: http://www.bostonmicromachines.com
Email: moreinfo@ bostonmicromachines.com
BMC Document Number: DOC-0009 Rev. 5.2
Boston Micromachines Corp, Multi-DM, Multi-SLM, Multi Driver, and the Boston Micromachines
Corp. logo are trademarks of Boston Micromachines Corp. All other trademarks used herein
are property of their respective holders.
© Copyright 2009-2020 Boston Micromachines Corp. All rights reserved.
No part of this manual may be reproduced in any form or by any means, electronic or
mechanical (including photocopying), nor may its contents be communicated to a third party
without prior written permission of the copyright holder.
The contents are subject to change without prior notice.

Multi-DM™ User Manual Table of Contents
BMC Document Number: DOC-0009 Rev. 5.2 Page i
Table of Contents
1. Multi-DM Quick Start..........................................................................................................1
1.1 New -AND- Experienced Users.............................................................................................. 1
1.2 For Users New to Deformable Mirrors ................................................................................... 1
1.3 For Users Experienced with Deformable Mirrors and Ready to Start.................................... 1
2. Declarations, Certifications, and Warranty......................................................................2
2.1 About this Document.............................................................................................................. 2
2.2 Product Certification ............................................................................................................... 2
2.3 Warranty................................................................................................................................. 2
2.4 Limitations of Warranty........................................................................................................... 2
3. Safety Information..............................................................................................................3
3.1 Types of Warnings in this Document ..................................................................................... 3
3.2 Specific Warnings to Observe................................................................................................ 4
4. Introduction ........................................................................................................................5
4.1 About Boston Micromachines Deformable Mirrors ................................................................ 5
4.2 Included Components ............................................................................................................ 5
4.3 Specifications ......................................................................................................................... 6
4.4 System Requirements ............................................................................................................ 8
5. System Components Overview ........................................................................................9
5.1 System Diagram..................................................................................................................... 9
5.2 Multi-DM Deformable Mirror ................................................................................................. 10
5.3 Multi Driver Electronics......................................................................................................... 11
5.4 SDK and Demonstration Software ....................................................................................... 15
5.5 USB Cable............................................................................................................................ 16
5.6 ESD Wrist Strap ................................................................................................................... 16
5.7 Optical Mount (Optional, Customer-Supplied) ..................................................................... 16
6. BMC SDK Software Installation ......................................................................................17
6.1 BMC SDK Software Installation Instructions........................................................................ 18
6.2 Device-Specific File Installation ........................................................................................... 20
7. Hardware Installation.......................................................................................................21
8. Verifying the DM Installation...........................................................................................23
8.1 Verification Tools.................................................................................................................. 24
8.2 Verifying the Installation ....................................................................................................... 26
8.3 Performing Angular Alignment ............................................................................................. 28
8.4 Performing Positional Alignment .......................................................................................... 28
9. DMShapes Software Overview........................................................................................29
9.1 The DMShapes Window....................................................................................................... 30
9.2 Using the DMShapes Application......................................................................................... 37
9.3 Using DMShapes with Multiple DMs.................................................................................... 42
10. Reference Information .....................................................................................................43
10.1 Glossary ............................................................................................................................... 44
10.2 Help File Locations............................................................................................................... 47
10.3 Multi-DM Mechanical Drawing ............................................................................................. 48
10.4 Mirror Mapping for Multi Driver DRV00120-03..................................................................... 49
10.5 DM Apertures ....................................................................................................................... 51
10.6 Multi Driver DRV00120-03 Mechanical Drawing.................................................................. 55
10.7 Multi Driver Auxiliary Output DE-9 Details ........................................................................... 56
10.8 Multi Driver Dataflow and Error Detection............................................................................ 58
10.9 System Performance............................................................................................................ 60
10.10 Deflection and Inter-Actuator Coupling ................................................................................ 65

Multi-DM™ User Manual Section 1 - Multi-DM Quick Start
BMC Document Number: DOC-0009 Rev. 5.2 Page 1
1. Multi-DM Quick Start
1.1 New -AND- Experienced Users
READ, UNDERSTAND, AND FOLLOW the Operator Safety and System Damage
Warnings in Section 3, Safety Information.
1.2 For Users New to Deformable Mirrors
To learn what Deformable Mirrors are and how they are used
oRead through Section 5, System Components Overview
oRead through some of the technical information in
Section 10, Reference Information
oVisit the Boston Micromachines website: www.bostonmicromachines.com
Follow the “Education” link at the top of the page
Follow the “Want to Learn More?” link at the bottom of the page
1.3 For Users Experienced with Deformable Mirrors and Ready to Start
TO GET READY to install your Deformable Mirror:
oFollow Section 3, Safety Information
oFollow Section 4, Introduction
oFollow Section 5, System Components Overview
TO INSTALL your Deformable Mirror:
oFollow Section 6, BMC SDK Software Installation
oFollow Section 7, Hardware Installation
oFollow Section 8, Verifying the DM Installation

Multi-DM™ User Manual Section 2 - Declarations, Certifications, and Warranty
BMC Document Number: DOC-0009 Rev. 5.2 Page 2
2. Declarations, Certifications, and Warranty
2.1 About this Document
This manual is designed to help the reader understand, install, and operate the Multi-DM
and Multi Driver. It assumes that the reader has a fundamental understanding of electronic
components, electronic instruments, optics, and applicable safety procedures.
The manual describes the physical specifications of the Multi-DM and Multi Driver as well
as the installation procedures that are required to use the system.
This document is available as a PDF file. Updated releases may be available by
contacting [email protected].
2.2 Product Certification
Boston Micromachines Corporation certifies that the Multi-DM, Multi Driver, and all related
components, are fully functional at time of shipment.
The Multi-DM included in this system has been tested and certified to function beyond the
hardware limits set on the Multi Driver. Therefore, a “safety factor” need not be applied to
the commands which send voltage to the mirror during normal operation.
2.3 Warranty
Any software or hardware failures due to manufacturing or inherent defects will be
repaired or replaced (at Boston Micromachines’ discretion) for a period of 1 year from
delivery.
For warranty questions or to initiate the warranty process, contact Boston Micromachines’
technical support at [phone] or [email protected].
2.4 Limitations of Warranty
Warranty does not cover any damage incurred from mishandling or misuse of the DM
or driver including failure due to electrostatic discharge (ESD), excessive optical intensity,
or by not following the instructions included in this document.
Warranty does not cover any damage resulting from a customer’s decision to purchase
or use nonstandard equipment, including but not limited to a removable window or drive
electronics not sold by Boston Micromachines.

Multi-DM™ User Manual Section 3 - Safety Information
BMC Document Number: DOC-0009 Rev. 5.2 Page 3
3. Safety Information
3.1 Types of Warnings in this Document
The following types of warnings are used in this document.
3.1.1 Operator Safety Warning
Failure to observe the stated precaution(s) or perform the procedural step(s)
exactly as defined, may cause serious injury or death to the operator.
3.1.2 System Damage Warning
Failure to observe the stated precaution(s) or perform the procedural step(s)
exactly as defined, may cause irreparable damage to the DM, the Driver Electronics,
or associated equipment.
3.1.3 Important Information
Take particular care to read and understand this information.
It will save you time and effort and help avoid preventable errors.

Multi-DM™ User Manual Section 3 - Safety Information
BMC Document Number: DOC-0009 Rev. 5.2 Page 4
3.2 Specific Warnings to Observe
The following warnings apply in a general sense throughout this document.
Additional warnings can be found at critical points in this document.
SHOCK HAZARD
Voltages up to 300V can be present on the deformable mirror (DM), packaging,
electrodes, cable, and electronics driver.
DO NOT come into contact with these items when the system is powered on.
DEFORMABLE MIRROR ESD DAMAGE
The DM is highly sensitive to electrostatic discharge.
Always handle the DM in an electrostatically sensitive environment
while wearing a Grounding Wrist Strap (shipped with system).
MULTI DRIVER ESD DAMAGE
The Multi Driver is highly sensitive to electrostatic discharge.
Always handle the Driver in an electrostatically sensitive environment
while wearing a Grounding Wrist Strap.
Avoid touching any electrical interconnections.
MULTI-DM HAS NO USER SERVICEABLE PARTS
Do not open or disassemble in any way.
Contact Boston Micromachines for any service required.
MULTI DRIVER HAS NO USER SERVICEABLE PARTS
Do not open or disassemble in any way.
Contact Boston Micromachines for any service required.

Multi-DM™ User Manual Section 4 - Introduction
BMC Document Number: DOC-0009 Rev. 5.2 Page 5
4. Introduction
4.1 About Boston Micromachines Deformable Mirrors
Boston Micromachines (BMC) Deformable Mirrors (DMs) are advanced wavefront control
devices that consist of a mirror membrane supported by an underlying actuator array.
•Each actuator can be individually deflected by electrostatic actuation,
thus changing the shape of the mirror, to achieve the desired pattern of deformation.
•BMC DMs are capable of achieving high spatial resolution shapes
due to high actuator count and low to no inter-actuator coupling.
•BMC DMs are available with continuous or segmented mirror surfaces.
•BMC DMs exhibit highly stable operation with no hysteresis.
•BMC provides compact, high resolution DM drive electronics
that are suitable for bench-top or OEM integration.
•BMC's DM Software Development Kit (SDK), including Windows and Linux hardware
drivers, software drivers for C/C++, Python, MathWorks MATLAB and National
Instruments LabVIEW software, and command line and GUI based DM control
applications.
•BMC's DM software is capable of operating multiple DM systems simultaneously.
4.2 Included Components
All Multi- series DMs are supplied with the following items:
•The Multi-DM Deformable Mirror.
For detailed specifications see Section 4.3.1, Multi Deformable Mirrors.
For detailed description see Section 5.1, System Diagram.
•The Multi Driver Control Electronics.
For detailed specifications see Section 4.3.2, Multi Driver.
For detailed description see Section 5.3, Multi Driver Electronics.
•The BMC Deformable Mirror Software Development Kit (SDK).
For detailed information see Section 5.4, SDK and Demonstration Software.
•A DM- and Driver-specific configuration file.
•A DM-specific half bias flat shape data file.
•A DM- and Driver-specific System Data Sheet file.
•A USB Male A to Male Mini-B cable for connecting the Multi Driver to a PC.
•An ESD wrist strap.
•A complete set of hardware and software documentation.

Multi-DM™ User Manual Section 4 - Introduction
BMC Document Number: DOC-0009 Rev. 5.2 Page 6
4.3 Specifications
4.3.1 Multi Deformable Mirrors
DM Model Number
Multi-1.5 *
Multi-3.5
Multi-3.5L
Multi-5.5
Multi-1.5-
SLM
Multi-3.5-
SLM
Maximum Stroke (µm) 1.5 3.5 3.5 5.5 1.5 3.5
Actuator Pitch (µm) 300 400 450 450 300 400
Full Aperture Dia. (mm) 4.50 6.00 6.75 6.75 4.80 6.40
Active Aperture Dia. (mm)
3.30
4.40
4.95
4.95
3.60
4.80
Recommended Optical
Aperture Dia. (mm)
2.70 3.60 4.05 4.05 3.60 4.80
Inter-Actuator Coupling
15%
13%
13%
22%
0%
0%
Mechanical Response
time for a 100 nm step
10% - 90% deflection
(μs) **
<40 <75 <75 <100 <35 <80
Avg. Step Size (nm)
< 1
< 1
< 1
< 3
< 1
< 1
Mirror Surface Continuous Membrane Surface Segmented Mirror
Surface
Actuator Count
140
Actuator Layout 12 x 12 square without corners
See Section 10.4, Mirror Mapping for Multi Driver DRV00120-03
Actuator Count
Across Aperture
12
Mirror Coating Aluminum, Gold, or Protected Silver
Surface Quality
(when driven flat)
< 30 nm RMS
< 40 nm RMS
Protective Window
(with Anti-Reflective
Coating)
350-700nm, 650-1050nm, 1050-1700nm, 400-1100nm,
or 550-2400nm
Recommended Operating
Temperature (°C)
-10 – 30
Recommended Storage
Temperature (°C)
-10 – 80
Recommended Relative
Humidity (%RH)
< 30
* The Multi-1.5 is not available for new designs. New optical designs should use the Multi-C-1.5.
** High speed X-Driver option available, contact BMC for more information.

Multi-DM™ User Manual Section 4 - Introduction
BMC Document Number: DOC-0009 Rev. 5.2 Page 7
Every deformable mirror can be safely actuated to the maximum stroke specified.
No safety factor is necessary to safeguard proper function of the mirror.
Throughout this document, unless otherwise noted, all references to,
and descriptions of, the Multi-DM also apply to the Multi-SLM version.
4.3.2 Multi Driver
BMC Part Number
DRV00120-03
Computer Interface: USB 2.0
Max Frame Rate: 8 kHz (125 μs USB packet size)
Voltage for Max Deflection Up to 300V (device-specific)
Slew Rate 2V/μs
Slew Time to Max Deflection
Up to 150 μs (device-specific based on Max Voltage)
Resolution:
14-Bit
Dimensions (W x D x H):
9 in. x 7 in. x 2.5 in.
Power Requirements: Chassis requires 24V, 2A Max
which is supplied by AC\DC converter requiring
100-240 Volt, 1.6 A, 50-60 Hz
Output Voltage Limit In hardware to ensure safe mirror operation
Driver Voltage limits are specific to the specified Boston Micromachines DM.
If multiple systems are ordered, DO NOT mix and match DMs and driver electronics.

Multi-DM™ User Manual Section 4 - Introduction
BMC Document Number: DOC-0009 Rev. 5.2 Page 8
4.4 System Requirements
•Power Source for Multi Driver Power Adapter.
NEMA 5-15R receptacle supplying 100-240 Volt, 1.6 A, 50-60 Hz
Contact Boston Micromachines for non-North American inputs.
•PC with the following minimum requirements:
o64-bit Intel-compatible CPU
oMicrosoft Windows 7 or 10 (64-bit) or Linux Operating System
o160 MB free disk space on the Operating System drive
oIf using MathWorks MATLAB, then 64-bit Version 2008a or newer.
oIf using National Instruments LabVIEW, then Version 2012 SP1 or newer.
oIf using Python, then Version 3.5 or newer.
oIf C/C++, an integrated development environment (IDE)
such as Microsoft Visual Studio 2010 or newer, is recommended but not
required.
•Mounting for the DM Housing.
For optical bench top setup, an optical mount for 2-inch diameter component
is required. Suggested compatible mounts are listed in Section 5.7,
Optical Mount (Optional, Customer-Supplied).

Multi-DM™ User Manual Section 5 - System Components Overview
BMC Document Number: DOC-0009 Rev. 5.2 Page 9
5. System Components Overview
5.1 System Diagram
The Multi-DM System consists of the following components.
Figure 1 - Multi-DM System Diagram
Details on each of these components are in the rest of this section.

Multi-DM™ User Manual Section 5 - System Components Overview
BMC Document Number: DOC-0009 Rev. 5.2 Page 10
5.2 Multi-DM Deformable Mirror
The Multi-DM is a microelectromechanical systems (MEMS) device
that is fabricated using polysilicon surface micromachining methods.
The Multi-DM starts with an array of electrodes on the base silicon. Over each electrode
is a flexure element that is attached to a post that is attached to the underside
of a floating flexible mirror surface. Each electrode and flexure element taken together are
known as an actuator.
Mirror surfaces can be either continuous (without any breaks) over the entire actuator
array, or segmented, with an individual segment over each actuator.
A voltage applied to the electrode will attract the flexure element, pulling on the post
and the mirror directly above it, thus changing the height of the mirror surface
above the actuator. Acting in concert, the actuator array can control the mirror surface to
create shapes from flat to complex 3D surfaces.
Figure 2 - Deformable Mirror Cross Sections
The DM silicon device is packaged and wire bonded to a ceramic chip carrier and the chip
carrier is sealed into a windowed enclosure. The sealed chip carrier enclosure is further
integrated into a rugged aluminum enclosure. Four ribbon cables extend from the rear of
this outer enclosure, each terminating in DC-37 male connectors that mate to the Multi
Driver electronics.
For a dimensional drawing of the DM enclosure see Section 10.3,
Multi-DM Mechanical Drawing.
The DM enclosure is easily mounted in most standard 2-inch optical mounts.
A sample mounting configuration is shown in Figure 3 - Multi-DM in Customer-Supplied
Thorlabs KS2 Kinematic Mirror Mount. For a list of compatible optical mounts,
see Section 5.7, Optical Mount (Optional, Customer-Supplied).

Multi-DM™ User Manual Section 5 - System Components Overview
BMC Document Number: DOC-0009 Rev. 5.2 Page 11
Front (Mirror) Side Rear (Cable) Side
Figure 3 - Multi-DM in Customer-Supplied Thorlabs KS2 Kinematic Mirror Mount
For installation and setup instructions of the DM enclosure see Section 7,
Hardware Installation.
5.3 Multi Driver Electronics
The Multi-DM drive electronics provide 14-bit digital control of 140 high-voltage
output channels. A host PC, connected with a USB 2.0 interface, controls each
output channel independently.
For a dimensional drawing of the Multi Driver Electronics
see Section 10.6, Multi Driver DRV00120-03 Mechanical Drawing.
For installation and setup instructions of the Multi Driver Electronics
see Section 7, Hardware Installation.
The following sections describe the connectors, displays, and controls
on the front and the rear of the unit.

Multi-DM™ User Manual Section 5 - System Components Overview
BMC Document Number: DOC-0009 Rev. 5.2 Page 12
5.3.1 Multi Driver Electronics Front Panel
Figure 4 - Front Panel of Multi Driver
Table 1 - Front Panel Connections
Label
Type
Function
USB 2.0 Mini-B Data connection to the control PC.
AUX
DE-9 female
Provides timing, low voltage output, and status signals.
Table 2 - Front Panel Indicator LEDs
Label
Color
Function
PWR Green When lit solid green, indicates that the power cable is plugged in
and the system is turned on.
SNC Green When lit solid green, indicates frame synchronization
and that data is being sent from the computer.
ERR Red When lit solid red, indicates a USB input buffer error.
This is usually caused and cleared by the host software.
When lit blinking red, indicates that the temperature in the Multi Driver
enclosure has exceeded 50° C and the high voltage supply in the Multi
Driver will automatically shut off.
For additional details on the ERR LED see Section 10.8, Multi Driver
Dataflow and Error Detection.

Multi-DM™ User Manual Section 5 - System Components Overview
BMC Document Number: DOC-0009 Rev. 5.2 Page 13
5.3.2 Multi Driver Electronics Rear Panel
Figure 5 - Rear Panel of Multi Driver
Table 3 - Rear Panel Switches
Label
Type
Function
I O
Toggle
Press I to turn the Multi Driver on
Press O to turn the Multi Driver off
Table 4 - Rear Panel Connections
Label
Type
Function
J1-J4 DC-37 Female Outputs to the Multi-DM.
24VDC 6mm Coax 24VDC input from external power supply.
HV
2mm Safety
Sheathed Jack
High voltage output terminal.
Use to measure Driver maximum voltage.
GND Ground terminal.
Use to measure Driver maximum voltage.

Multi-DM™ User Manual Section 5 - System Components Overview
BMC Document Number: DOC-0009 Rev. 5.2 Page 14
J1 through J4 connectors:
High voltages may be present.
Only make connections with the Multi Driver off.
DO NOT use the HV and GND connections unless specifically instructed
to do so by a Boston Micromachines technical representative.
HV and GND connectors:
High voltages may be present.
Only make connections with the Multi Driver off.
Table 5 - Rear Panel Adjustments
Label
Type
Function
VB
Pot
Amplifier Bias Current Limit Adjustment
VR
Pot
Voltage Reference Adjustment (Range of Digital to Analog Converters)
VP Pot High Voltage Output Rail Adjustment (Maximum Voltage Supplied to DM)
DO NOT adjust the VB, VR, or VP controls unless specifically instructed
to do so by a Boston Micromachines technical representative.

Multi-DM™ User Manual Section 5 - System Components Overview
BMC Document Number: DOC-0009 Rev. 5.2 Page 15
5.4 SDK and Demonstration Software
Along with the DM and Multi Driver, a USB flash drive is supplied
that includes the following files:
By default, the DM and Multi Driver system ships with an SDK and applications
for Microsoft Windows 64-bit operating systems.
A Linux SDK is also available, contact Boston Micromachines for details.
•DMSDK-Setup-<version number>.exe, a self-executing installation program
that installs the following components:
oSoftware drivers for programming the DM in the C or C++ programming
language.
oSoftware drivers for programming the DM on the MathWorks MATLAB
and National Instruments LabVIEW platforms.
oDMShapes, a graphical user interface application that can load a shape
from a Command Map file, set the entire DM to a particular value (piston),
or set actuators individually (poke) or sequentially (play).
oBMCLoadShape, a command line application that reads a shape from a
Command Map file and applies it to the DM.
oA full set of documentation in PDF and HTML format.
oHardware drivers for the Multi Driver so that it will be recognized by Windows
when it is connected to the PC.
•The DM Profile file, a configuration file that is matched to
a unique DM and Driver combination.
•The DM Half Bias Flat Map file, a Command Map that drives
the Deformable Mirror surface to a plane.
•The User Manual for the DM (this document) in PDF format.
•A DM- and Driver-specific System Data Sheet file in PDF format.
This contains full system specifications, system test results,
command vs. deflection curves, and interferometric surface data.
For software installation instructions see Section 6, BMC SDK Software Installation.

Multi-DM™ User Manual Section 5 - System Components Overview
BMC Document Number: DOC-0009 Rev. 5.2 Page 16
5.5 USB Cable
A 6.5 ft (2 m) long USB 2.0 Type A male to Type Mini-B Male cable
is supplied for connecting the Multi Driver to the control PC.
5.6 ESD Wrist Strap
An ESD wrist strap is supplied with all systems.
To prevent electrostatic damage, a properly grounded ESD wrist strap
MUST be worn at all times while handling the DM or Multi Driver electronics.
5.7 Optical Mount (Optional, Customer-Supplied)
The Multi DM must be rigidly mounted in your optical system.
If you are not designing a custom mounting in your system, note that
the Multi DM housing fits many standard 2-inch optical mounts from select manufacturers.
Several optical equipment manufacturers produce mounts that are well suited
for the Multi- DM. The following mounts are known to work well.
•Thorlabs KS2 - Ø2" Precision Kinematic Mirror Mount, 3 Adjusters
http://www.thorlabs.com/thorproduct.cfm?partnumber=KS2
•Thorlabs KS2D - Ø2" Precision Kinematic Mirror Mount,
2 Differential Adjusters, 1 1/4"-80 Adjuster
http://www.thorlabs.com/thorproduct.cfm?partnumber=KS2D

Multi-DM™ User Manual Section 6 - BMC SDK Software Installation
BMC Document Number: DOC-0009 Rev. 5.2 Page 17
6. BMC SDK Software Installation
Make sure to complete the BMC SDK software installation per this section
BEFORE attaching the Multi Driver.
Installing the Multi Driver first can result in errors during installation.
This section contains the following topics:
Section 6.1, BMC SDK Software Installation Instructions
Section 6.2, Device-Specific File Installation
Follow the procedures in each section in the order shown.
The procedures in this section describe installation of the Windows version
of the BMC SDK.
If you have the Linux version of the SDK, refer to the installation instructions
that were supplied with it.
As with all software installations, before starting make a drive image,
backup the operating system configuration, or set a Windows Restore Point
to aid in recovery in case of any errors during the installation.