COXEM SPT-20 User manual

Ion Coater
SPT-20 Operating Manual
COXEM Co., Ltd.

Ion Coater SPT-20 Operating Manual
2
Contents
1. Introduction.................................................................................................................. 4
1.1 Descriptions on Instrument Parts.............................................................................................4
1.1.1 Main Unit of SPT-20................................................................................................................................... 4
1.1.2 View from Back of SPT-20....................................................................................................................... 5
1.2 Cautions before Use ....................................................................................................................6
1.2.1 Precautions on Handling ......................................................................................................................... 6
1.2.2 Permission by Operation.......................................................................................................................... 7
1.2.3 Safety Guidelines.......................................................................................................................................... 8
2. Specification ................................................................................................................. 9
2.1 Rotary vacuum pump.................................................................................................................9
2.2 Ion Coater .....................................................................................................................................9
2.3 Composition ...............................................................................................................................10
2.4 Installation Requirement..........................................................................................................10
3. Operation .................................................................................................................... 11
3.1 Power On ....................................................................................................................................11
3.2 Set-up ..........................................................................................................................................12
3.3 Coating Thickness .....................................................................................................................13
4. Measurement ............................................................................................................. 14
4.1 Measurement of sample due to target.................................................................................14
4.2 Measurement of variety samples through Au coating ......................................................15
5. Maintenance ............................................................................................................... 16
5.1 Error List......................................................................................................................................16
5.2 Replacing Target ........................................................................................................................16
5.3 Cleaning of chamber ................................................................................................................17

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⚫Before using the instrument, please read this manual carefully and understand the
directions. Keep the manual in a conspicuous place.
⚫Some devices or functions in the manual may not be provided and can be different
depending on relevant accessories.
⚫Images on the cover page or in the manual are for illustration, which may look different
from actual instruments.
⚫The instrument and contents in this manual may be revised for improvement without
prior notice.

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1. Introduction
1.1 Descriptions on Instrument Parts
Names and functions of the parts of SPT-20 are described as follows.
1.1.1 Main Unit of SPT-20
No.
Items
Descriptions
①
Vacuum Chamber
Target inside
- Standard: Au / Pt
- Option: Cu, Pd, Pt-Pd, Ag, Al
②
Display LCD Screen
Indicated operation
③
Power
Display screen and operation turning ON/OFF
④
START
Operation starts
⑤
SET
Setting a value for coating
⑥
UP/DOWN
Change a value for coating
①
②
③
④
⑥
⑤

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1.1.2 View from Back of SPT-20
No.
Items
Descriptions
①
Main Power
Main system and rotary pump turning ON/OFF
②
System Power cable plug
Connection for system power cable
③
Fuse Holder
Fuse(1.5A) inside
④
Vacuum pump power cable
plug
Connection for power cable of vacuum pump
⑤
Vacuum valve connector
Connects to the vacuum pump
-Should use the provided NW16 clamp
①
②
③
④
⑤

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1.2 Cautions before Use
1.2.1 Precautions on Handling
If fine dust or debris gets inside the microscope, the instrument may not function properly.
Wear gloves and do not touch the parts inside the vacuum area with hands directly.
Example of Proper Attire

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1.2.2 Permission by Operation
Following operations should be entrusted to specific personnel as described below.
Division of operations
Detailed performances
General operation
System operator
Calibration
Certified engineer from maker
Hardware replacement
Certified engineer. From maker
General maintenance
Certified engineer or person who completed maintenance
training.

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1.2.3 Safety Guidelines
Before using SPT-20, review the following instructions carefully
Items
Descriptions
WARNING
Instructions which, if not followed, can cause severe injuries to user
CAUTIONS
Instructions which, if not followed, can cause moderate injuries or
damage to the instrument.
CAUTIONS
⚫Excessively high surrounding temperature can cause defects or malfunction of the
instrument. Please maintain a proper instrument installation environment.
(Temperature 20±5°C, humidity: Less than 60%)
⚫When placed in excessively low temperature, the instrument may experience reduced
vacuum performance due to the changing oil viscosity of the rotary pump. Be sure to
keep the instrument above the optimum temperature.
(Normal operating temperature: 20±5°C)
⚫Do not install the instrument on the floor with excessive external vibration (Recommended
vibration level is below 35 dB, but there is no trouble to operate)
⚫When the rotary pump operates, its surface temperature rises. To prevent high heat from
causing fire, do not place ignitable or combustible substances near the pump during
operation.
⚫When opening or closing the vacuum chamber, do it slowly to prevent injuries.
⚫To assure proper operation of the instrument, follow the directions described in this
manual.
⚫Contact the maker’s service representative when moving the instrument. Arbitrary moving
or installing can cause failure or damage of the instrument, which will result in additional
expenses for after-sales service.
⚫Do not revise or remodel the hardware arbitrarily. Doing so can cause fire or electric
shock, which will result in additional expenses for after-sales service.
⚫Do not off main power during “Emergency Stop”

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2. Specification
2.1 Rotary vacuum pump
Descriptions
Electronic
AC 110V or 220V, 50/60 Hz, 0.12 kW
Dimension
120(W) X 373.5(D) X 200(H) mm
Motor Speed
1,700 rpm
Ultimate Pressure
≤3 X 10-3 Torr (4.0 X 10-1 Pa)
Oil Capacity
0.2L
Inlet, Outlet port
NW16
Weight
14.2 kg
2.2 Ion Coater
Descriptions
Power
AC 110/220V, 50/60 Hz, 50W
Dimension
420(W) X 220(D) X 230(H) mm
Target
- Standard: Au / Pt
- Option: Cu, Pd, Pt-Pd, Ag, Al
Size(d)
Chamber
100 mm
Target
50 mm
Stage
60 mm
Current Range
0 ~ 9 mA
Coating Time Range
10 ~ 300 sec

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2.3 Composition
Item
Number(ea)
Main unit
1
Rotary Pump
1
Au Target
1
Power Cable
1
Vacuum Hose
1
Operation Manual
1
2.4 Installation Requirement
Clean, Dry, Dust Free surface,
Factor
Requirement
Temperature
15 ~ 30℃(59 ~ 86℉)
Humidity
Less than 60%
Electronic
Voltage
Single Phase, 220V ±10%,
Power consumption
1 kW
Frequency
50 ~ 60 Hz

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3. Operation
3.1 Power On
①Switch on back side from SPT-20. At this time, Rotary vacuum pump’s power must be plugged
in SPT-20
②After press a power in up-side, Vacuum Begins immediately that reaches to 0.1 torr within 3min
③Then Self Diagnosis starts
- POWER OK!
- V-Sensor OK!
- Touch SW OK!
Main Power (SPT-20 w/ Rotary vacuum pump)

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3.2 Set-up
①After Self-Diagnosis, displayed a coating set-up mode
②Set points are,
- Target: Au, Pt, Cu, Pd, Pt-Pd, Ag, Al (STD: Au / Pt)
- Current: 1 ~ 9 mA
- Time: 10 ~ 300 Sec
➢General: 3mA / 120 sec
➢It depends on sample’s properties
③After set on, press “START”2 ~ 3 sec
④Starts coating progress after vacuum level reached 100% (0.1 Torr)
⑤After setting time, Displayed “Complete!!”
⑥Emergency Stop: Press a “START”about 2 ~ 3 sec in progress. After then stopped progress with
displaying “CANCEL”
Display

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3.3 Coating Thickness
①Au Target
②Pt Target
0
2
4
6
8
10
12
14
16
020 40 60 80 100 120 140 160 180 200 220 240 260 280 300
Thickness (nm)
Time (sec)
3mA
5mA
7mA
0
2
4
6
8
10
12
14
16
020 40 60 80 100 120 140 160 180 200 220 240 260 280 300
Thickness (nm)
Time (sec)
3mA
5mA
7mA

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4. Measurement
4.1 Measurement of sample due to target
Au
Pt
Test condition
WD
4.3mm
HV
10.0kV
Mag
x200k
Instrument
FE-SEM by FEI

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4.2 Measurement of variety samples through Au coating
Carbon Powder
Membrane
Si fiber

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5. Maintenance
5.1 Error List
①“V-sensor error”: Normally occur by vacuum →Request SVC
②“Touch SW error”: Normally occur by touch program →Request SVC
5.2 Replacing Target
①First, Wearing poly gloves then remove
insulation support of the electrode
②After tilting the upper with target 45°then
remove a nut of high voltage electrode plate. It
should tilt 45°also when re-assemble
③It should be checked target and nut tightening
when you re-assembling the target

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5.3 Cleaning of chamber
- Required item: wipes for laboratory, methyl-alcohols, blowing air
①Wet wipes by methyl-alcohols
②Cleaning inside of chamber, rubber pad that wrapped around chamber and flange surface
inside chamber
Request SVC: Migun Techno World #201, Migun Technoworld, 199
Techno2-ro, Yuseong-gu, Daejeon, Korea
Tel. [phone]~8
Fax. [phone]
Email. [email protected]