CyberOptics WaferSense User manual
CyberOptics
Semiconductor
WaferSense™
ATS User’s
Guide
ii
General
Information
WaferSense Teaching Wafer and Link
Changes or modifications not expressly approved by CyberOptics Semiconductor, Inc., may
void your authority to operate the WaferSense ATS.
The radio contained in the WaferSense ATS meets all the applicable FCC requirements for RF
Safety. While in operation, the FCC requires users and nearby persons to maintain a minimum
separation distance of 20 cm (8 inches) or farther from the WaferSense ATS.
The WaferSense Teaching Wafer and Link have been tested and found to comply with the
limits for a Class B digital device, pursuant to Part 15 of the FCC Rules. These limits are
designed to provide reasonable protection against harmful interference in a residential
installation. This equipment generates, uses and can radiate radio frequency energy and, if not
installed and used in accordance with the instructions, may cause harmful interference to radio
communications. However, there is no guarantee that interference will not occur in a particular
installation. If this equipment does cause harmful interference to radio or television reception,
which can be determined by turning the equipment off and on, the user is encouraged to try to
correct the interference by one or more of the following measures:
• Reorient or relocate the receiving antenna.
• Increase the separation between the equipment and receiver.
• Connect the equipment into an outlet on a circuit different from that to which the
receiver is connected.
• Consult the dealer or an experienced radio/TV technician for help.
This device complies with part 15 of the FCC Rules. Operation is subject to the following two conditions: (1)
This device may not cause harmful interference, and (2) this device must accept any interference received, including
interference that may cause undesired operation.
This ISM device complies with Canadian ICES-001.
Cet appareil ISM est conforme à la norme NMB-001 du Canada.
iii
WaferSense Technical Support
Technical support is available from CyberOptics Semiconductor Monday through Friday,
8:00 A.M. to 5:00 P.M. Pacific Time.
WaferSense, TeachView, and TeachTarget are trademarks of CyberOptics Semiconductor, Inc.
Third-party brands and names are the property of their respective owners.
Copyright © 2006 - 2007, CyberOptics Semiconductor, Inc. All rights reserved.
CyberOptics Semiconductor, Inc.
13555 S.W. Millikan Way
Beaverton, OR 97005
P/N 920-0503-01
E-mail: [email protected]
Phone: (503) 495-2200
800-366-9131 (US and Canada only)
Fax: (503) 495-2201
iv
Table of
Contents
General Information ......................................................ii
Chapter 1
Introduction....................................................................................1.1
Chapter 2
Installing Your ATS....................................................................... 2.1
Installing the Software....................................................................2.1
Installing the Wireless Link............................................................2.3
Checking Communications Between the Link and the Wafer ......2.5
Registering Your Teaching Wafer for Calibration Service.............2.6
Running the TeachView Application.............................................2.7
Technical Support ..........................................................................2.9
Chapter 3
Using Your ATS............................................................................. 3.1
Using the ATS Teaching Wafer Buttons and Status Lights ..........3.2
Finding a Target.............................................................................3.3
Using the Target Overlay ...............................................................3.8
Using Find Once and Continuous Find.........................................3.9
Taking a Single Reading...........................................................................3.9
Taking Continuous Readings..................................................................3.9
Setting the Target Criteria............................................................ 3.10
Logging Your Readings ...............................................................3.12
Logging a Reading..................................................................................3.13
Including User-Specified Information in the Log File .....................3.14
Changing the Log File............................................................................3.15
Displaying Readings from a Log File ..................................................3.15
Printing the TeachView Window ................................................. 3.15
Monitoring the Operating Temperature ...................................... 3.16
Table of Contents
v
Using the Rechargeable Battery................................................... 3.17
Monitoring the Battery Level................................................................3.17
Charging the Battery ..............................................................................3.17
Monitoring the Wireless Connection to the Teaching Wafer ...... 3.18
Changing the Pairing Between the Teaching Wafer and Link.... 3.19
Saving Your Settings.....................................................................3.20
Loading Settings from a File.................................................................3.20
Chapter 4
Creating Target Configuration Files ............................................. 4.1
Choosing a Target ..........................................................................4.1
Measuring the Target .....................................................................4.2
Running TeachTarget ....................................................................4.2
Chapter 5
Maintaining Your ATS .................................................................. 5.1
Annual Factory Calibration and Battery Replacement ..................5.2
Battery Use and Disposal ...............................................................5.2
Updating Your ATS Wafer Firmware.............................................5.3
Chapter 6
Specifications................................................................................. 6.1
System Requirements .....................................................................6.1
ATS Hardware ................................................................................6.1
Environmental ..........................................................................................6.1
Power..........................................................................................................6.1
Range and Accuracy.................................................................................6.1
Index.....................................................................Index.1
vi
List of
Illustrations
Chapter 2
Figure 2.1: The InstallShield Wizard.......................................................2.2
Figure 2.2: Found New Hardware Wizard..............................................2.3
Figure 2.3: Installing the WaferLink Device...........................................2.4
Figure 2.4: Starting the TeachView Application.....................................2.7
Figure 2.5: Calibration Registration Dialog............................................2.8
Figure 2.6: The About TeachView Dialog ..............................................2.9
Figure 2.7: The About your ATS Wafer Dialog.......................................2.9
Chapter 3
Figure 3.1: The TeachView Application .................................................3.3
Figure 3.2: Aligning the Teaching Wafer................................................3.4
Figure 3.3: Target Configuration List .....................................................3.5
Figure 3.4: Numeric Readouts................................................................3.5
Figure 3.5: Target Centered in the Sight Ring........................................3.7
Figure 3.6: Target Overlay ......................................................................3.8
Figure 3.7: Set Target Criteria Dialog................................................... 3.11
Figure 3.8: Logging a Reading ............................................................. 3.13
Figure 3.9: Set Station Information Dialog ........................................... 3.14
Figure 3.10: Temperature Monitoring Gauge ....................................... 3.16
Figure 3.11: Battery Monitor.................................................................. 3.17
Figure 3.12: Wireless Connection Monitor............................................ 3.19
Chapter 4
Figure 4.1: Aligning the Teaching Wafer ................................................4.2
Figure 4.2: Step 1. Position the Wafer .....................................................4.3
Figure 4.3: Step 2. Optimize Lighting.....................................................4.4
Figure 4.4: Step 3. Acquiring Image .......................................................4.5
Figure 4.5: Step 4. Secondary Target Parameter.....................................4.6
Figure 4.6: Step 5. Overlay Alignment, Primary Target..........................4.7
Figure 4.7: Step 5. Overlay Alignment, Secondary Target......................4.8
Figure 4.8: Step 6. Generating Target Parameters..................................4.9
1.1
Chapter 1
Introduction
The CyberOptics Semiconductor WaferSense™ Automatic Teaching System (ATS) measures
three-dimensional offsets to teach wafer handoff positions. Using machine vision technology, it
“sees” targets inside semiconductor equipment. The TeachView™ software application makes
it easy to precisely adjust equipment. The large display and wireless link let you place the
computer at a convenient distance from the teaching wafer.
ATS consists of the following components:
•Teaching wafer. The ATS is designed with a wafer-like form factor, so it can fit in
most wafer-handling equipment. The teaching wafer is also vacuum compatible.
•TeachView and TeachTarget™software. The TeachView software application
monitors the teaching wafer and displays X, Y, and Z offsets and other status
information in real time. TeachTarget creates target configuration files needed by
TeachView. Both applications run on most personal computers that use the
Microsoft Windows operating system.
•Wireless link. The software communicates with the teaching wafer by using a
Bluetooth wireless link that attaches to a USB port on a personal computer.
•Charging clean box. The teaching wafer is powered by an internal rechargeable
battery, which you recharge by placing the teaching wafer into the charging clean box.
•Carrying case. The carrying case makes it easy to take your complete ATS system
with you in the plant or on the road.
The following chapter gives you instructions for installing your ATS system.
2.1
Chapter 2
Installing Your ATS
This chapter describes the procedures you need to perform to install your ATS and get it ready
for use. For best results, perform the procedures in the order they are presented in this chapter:
1. Installing the software
2. Installing the wireless link on the USB port
3. Checking communications between the link and the teaching wafer
4. Registering your teaching wafer
5. Running the TeachView application
Installing the Software
To run the WaferSense ATS software, your computer must have the following:
• Windows 2000, Windows XP, or Windows Vista operating system
• One free high-power USB 1.1 or USB 2.0 port
To install the WaferSense ATS software:
1. Log on using an account with Administrator privileges.
Caution
Dropping the teaching wafer or hitting it against a hard object can bend, break, or chip
the housing; damage the internal components; or knock the teaching wafer out of
calibration. While it is not as fragile as an actual silicon wafer, handle the teaching wafer
with care, as you would any precision instrument. If the teaching wafer is damaged or in
need of calibration, see Chapter 5, “Maintaining Your ATS.”
Chapter 2. Installing Your ATS
2.2
2. Insert the WaferSense ATS Installation Disk into the CD drive.
The InstallShield Wizard starts automatically, as shown in Figure 2.1. If the wizard doesn’t
start automatically, use Windows Explorer to view the contents of the CD and double-
click the setup.exe program.
Figure 2.1: The InstallShield Wizard
3. Follow the instructions provided by the wizard to install the software.
4. After you complete the instructions for all of the wizard screens, click Finish. If
Windows notifies you that the drivers have not passed Windows logo testing, just click
Continue Anyway to complete the installation.
By default, the Setup program installs the TeachView and TeachTarget applications in a new
program group called WaferSense ATS. Setup also installs an online copy of this user’s guide,
which is available from the TeachView and TeachTarget Help menus and in the WaferSense
ATS program group in the Windows Start menu.
Chapter 2. Installing Your ATS
2.3
Installing the Wireless Link
To install the wireless link:
1. Turn on your computer.
2. Locate an unused, high-power USB port on your computer. The ATS wireless link
module requires a high-power USB port, such as the built-in ports on your computer and
ports on USB hubs that have power cords. Unpowered USB hubs won’t work.
3. The USB cable provided with your ATS has a different plug on each end. Locate the end
with the plug that matches the USB port on your computer and plug the cable into
the port.
4. Plug the other end of the cable into the link module.
The Windows operating system recognizes the new link module hardware and displays
the Found New Hardware Wizard, as shown in Figure 2.2. If the wizard your system
displays doesn’t offer to check with Windows Update, skip to step 6.
Figure 2.2: Found New Hardware Wizard
5. Choose No, not this time and click Next.
Chapter 2. Installing Your ATS
2.4
The wizard offers to help you install software for the CyberOptics WaferSense link
device, as shown in Figure 2.3.
Figure 2.3: Installing the WaferLink Device
6. Choose Install the software automatically and click Next.
If you already installed the WaferSense ATS software (see “Installing the Software,” on
page 2.1), Windows will automatically find the drivers. If not, the drivers are located in the
Utilities folder on the installation CD-ROM.
7. After you complete the instructions for all of the wizard screens, click Finish.
The Power light on the module turns on indicating that the module is getting power from
the USB port. Ignore the Pair Status and Connection Status lights for now.
Chapter 2. Installing Your ATS
2.5
Checking Communications Between the Link
and the Wafer
To complete the installation, verify that the teaching wafer and link can communicate:
1. The teaching wafer operates from an internal rechargeable battery. Before using the
teaching wafer for the first time, charge it for two hours. For information on checking the
charge on the battery and the procedure for recharging, see “Using the Rechargeable
Battery,” on page 3.17.
2. Remove the teaching wafer from the charging clean box and press the ON OFF button
to turn on the teaching wafer.
The On light on the teaching wafer turns on.
3. Verify that the Pair Status lights on both the teaching wafer and link module are on. If
either light is not on, your teaching wafer and link might not be paired with each other. To
reset the pairing, see “Changing the Pairing Between the Teaching Wafer and Link,” on
page 3.19.
4. Immediately after turning on the teaching wafer, the Connection Status lights on the
teaching wafer and link will blink slowly. After a few seconds the teaching wafer and link
will connect and both lights will be on and no longer blinking. If the lights continue to
blink, see “Monitoring the Wireless Connection to the Teaching Wafer,” on page 3.18.
5. After starting the TeachView application (see “Running the TeachView Application,” on
page 2.7), you can verify the connection to the teaching wafer by comparing the serial
number printed on the teaching wafer to the serial number shown in the About Your ATS
Wafer dialog, which is available in the TeachView application by choosing the Help >
About your ATS Wafer menu item.
That completes the installation of your ATS.
Chapter 2. Installing Your ATS
2.6
Registering Your Teaching Wafer for Calibration
Service
To maintain optimum performance, every twelve months you should have your teaching wafer
calibrated and the battery replaced. These services can be performed only at the factory.
To help you keep track of the next service date so you can schedule this service when it is
convenient, register your WaferSense ATS teaching wafer with the factory. When you start the
TeachView application (see “Running the TeachView Application,” on page 2.7), it prompts
you to register your teaching wafer for calibration. You can also register your teaching wafer in
any of the following ways:
• On the Internet: www.CyberopticsSemi.com/ws_register.html
• By phone: 800-366-9131 (US and Canada only)
• By faxing the WaferSense ATS Calibration Registration to: (503) 495-2201
• By sending an e-mail message containing the information specified on the WaferSense
ATS Calibration Registration to: register@cyberoptics.com.
Chapter 2. Installing Your ATS
2.7
Running the TeachView Application
To start the TeachView application:
1. From the Windows Start > All Programs menu, choose WaferSense ATS >
TeachView.
The TeachView application starts, as shown in Figure 2.4. Initializing communications
usually takes less than a second. For information on using TeachView, see Chapter 3,
“Using Your ATS.” If you haven’t registered your teaching wafer, TeachView also displays
the Calibration Registration dialog. To complete the registration, proceed to the next step.
Figure 2.4: Starting the TeachView Application
Chapter 2. Installing Your ATS
2.8
2. If TeachView displays the WaferSense ATS Calibration Registration dialog, as shown in
Figure 2.5, you haven’t registered your teaching wafer. Follow the instructions in the
dialog to complete the registration.
Figure 2.5: Calibration Registration Dialog
The TeachTarget application is described in Chapter 4, “Creating Target Configuration Files.”
Chapter 2. Installing Your ATS
2.9
Technical Support
CyberOptics Semiconductor offers free technical support to customers. If the ATS hardware or
software appear to be malfunctioning, please contact us, and we’ll be happy to assist you.
When you contact us, please make sure that you have the following information available:
• A detailed description of the problem you are having, including the exact text of any
error messages and a list of steps to reproduce the problem.
• Information about your computer, including manufacturer, CPU type, version of
Windows, and memory size.
• The version of the TeachView application. The software version is available in the
TeachView application by choosing the Help > About TeachView menu item.
Figure 2.6: The About TeachView Dialog
If you are using TeachTarget, a similar dialog is available from the Help > About
TeachTarget menu item.
• The serial number of your teaching wafer. The serial number of the teaching wafer is
printed on a label on the top of the teaching wafer. The serial number is also available
in the TeachView application by choosing the Help > About your ATS Wafer menu
item.
Figure 2.7: The About your ATS Wafer Dialog
3.1
Chapter 3
Using Your ATS
This chapter gives you instructions for performing the following tasks with the ATS:
• Using the ATS teaching wafer buttons and indicators
• Performing a basic target measurement
• Using the target overlay
• Using find once and continuous find
• Setting the target criteria for measurements
• Logging your readings
• Printing the TeachView window
• Monitoring the operating temperature
• Using the rechargeable battery
• Monitoring the connection between the teaching wafer and link module
• Changing the pairing between the teaching wafer and link module.
• Saving your settings
Chapter 3. Using Your ATS
3.2
Using the ATS Teaching Wafer Buttons and
Status Lights
ATS teaching wafers have two buttons:
•ON OFF. Turns the teaching wafer on and off.
•NEW PAIR. Changes the pairing between a teaching wafer and a link (see “Changing
the Pairing Between the Teaching Wafer and Link,” on page 3.19).
ATS teaching wafers also have the following status lights:
•On. Glows red while the teaching wafer is turned on.
•Charging. Glows red when the teaching wafer is being charged in the charging case.
•Charging Done. Glows red when the battery has reached at least 90% of full charge.
•Connection Status. Glows red when the teaching wafer has established
communication with the link. Blinks slowly while the teaching wafer is trying to
establish a connection with the link.
•Pair Status. Glows red when the teaching wafer is paired with a link (see “Changing
the Pairing Between the Teaching Wafer and Link,” on page 3.19).
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