Granville-Phillips 830 VQM User manual

Components of the Filament Replacement Kit
Figure 1 Replacement Kit
WARNING
Turn OFF and disconnect power to the VQM®Controller before
beginning this filament replacement procedure.
CAUTION
1. The components of the MS Gauge are fragile. Be especially
careful when disassembling and reassembling the gauge.
2. Do NOT scratch the ConFlat knife edge on the gauge.
3. The components of the filament replacement kit are UHV
compatible − perform the replacement procedure in a proper
cleanroom environment.
NOTE: The filament replacement kit includes a custom pair of
tweezers that are notched to grasp the retaining ring.
Tweezers to grasp the
retaining ring
Copper
Gasket
Filament
Assembly
Plasma
Screen
Retaining
Ring
Filament Replacement Instructions
NOTE:
Use clean, vacuum component compatible gloves while replacing the
filament.
1. Turn OFF power to the VQM System and vent the vacuum chamber to
atmosphere. Disconnect the cable from the MS Gauge and remove the 6
bolts that attach the MS Gauge to the vacuum chamber. See Figure 2.
Figure 2 Remove the MS Gauge from the Vacuum Chamber
2. Look closely at the port of the MS Gauge and make note of the position of
the components as shown in Figure 3. Orient the gauge as shown in
Figure 3.
CAUTION
Be sure to read through and understand the scope of this procedure
before beginning.
Figure 3 MS Gauge Components - Viewed from the Port End of the Gauge
3. Remove the retaining ring. Use the tweezers provided in the kit to squeeze
the tabs together and carefully lift the retaining ring from the gauge. Be
careful not to scratch the ConFlat knife edge when removing the retaining
ring.
4. Remove the plasma screen.
Figure 4 Retaining Ring and Plasma Screen Removed
Retaining Ring
Plasma Screen
Alignment Pin
See Figure 5
Filament Latch
See Figure 5
NOTE: The filament
assembly is under the
plasma screen.
5. Use tweezers or small needle nose pliers to rotate the latch
counterclockwise and unlatch the filament assembly so it can be removed
from the gauge. Do not use excessive force when unlocking or locking the
filament latch.
Figure 5 Filament Assembly Latch
6. Use tweezers or small needle nose pliers to carefully lift the filament
assembly from the gauge. Note the position of the alignment pin and the
center pin (latch pin). Also note the position of the filament (which is near
the alignment pin hole in the ceramic disk) and the filament port which is
in the gauge assembly. Figure 6.
Figure 6 Position of the Filament and Alignment Pins
Filament Latch
Locked (Closed)
Filament Latch
Unlocked (Open)
Filament Assembly
Alignment Pin
Latch Pin
Filament
Assembly
Latch
Latch Pin
Alignment Pin Filament
Ceramic Disk
NOTE:
The Filament
Assembly is
shown upside
down in this
illustration.
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Granville-Phillips®VQM®Mass
Spectrometer Gauge Filament Replacement Instructions
© 2014 MKS Instruments, Inc. All rights reserved.
Granville-Phillips®and VQM®are registered
trademarks of MKS Instruments, Inc. Vacuum Quality MonitorTM is a trademark of MKS
Instruments, Inc.
Instruction manual part number 830233 Rev. F- August 2014
Instruction manual part number 830233 Rev. F- August 2014
Series 835
Series 835
Replacement Instructions
Replacement Instructions
More detailed instructions regarding installation, operation, and service of the Series 835 VQM System are provided in the Instruction Manual (part number 835000) which can be downloaded at: www.mksinst.com
Granville-Phillips®VQM®Mass Spectrometer Gauge Filament Replacement Instructions
6450 Dry Creek Parkway Longmont, CO 80503 USA Phone: [phone] email: [email protected]
7. Insert the replacement filament assembly. See Figure 5 and Figure 6.
Make sure the ceramic disk of the filament assembly fits
down onto the latch pin so the latch closes easily.
Note that the filament assembly is shown upside down in
Figure 6. Be sure to insert the new filament in the exact
position as the one you just removed. See Figure 5.
8. Rotate the latch clockwise to lock the replacement filament in place. Use
tweezers or small needle nose pliers. Make sure the latch is in the closed
position as shown in Figure 5.
9. Install the new plasma screen. Be careful to not damage the plasma screen
or scratch the ConFlat knife edge on the gauge.
10. Install the new retaining ring. Use the tweezers provided in the kit to
squeeze the retaining ring together and carefully place the retaining ring in
the groove above the plasma screen.
11. Install the gauge on the vacuum chamber. Be sure to use the new copper
gasket provided in the kit.
12. Connect the gauge interconnect cable.
CAUTION
Trying to insert the replacement filament when not properly
oriented will cause damage to the replacement filament.
If the ceramic disk becomes trapped in the notch of the latch pin,
the latch will not close. Do NOT force the latch to close. Carefully
reposition the ceramic disk so it is properly seated at the bottom of
the latch pin.
13. Connect power to the VQM Controller.
14. Turn ON power to VQM Controller and perform the Initial Operation
Procedures outlined below. Refer to Chapter 8 of the Instruction Manual for
the VQM System.
The Instruction Manual can be downloaded at: www.mksinst.com
a. Pump down the vacuum chamber to <1x10-5 Torr. See Initial Pumpdown,
Section 8.3.1.
b. Perform the Filament Outgassing procedure.
c. Perform the Electron Multiplier Preconditioning procedure.
d. Perform the Auto Tune procedure.
e. Perform the Electron Multiplier Gain Adjustment procedure. See Section
8.3.5.
f. Perform the Mass Axis Calibration procedure.
g. Use the Tune screen to flash (save) the new settings to the EEPROM in the
VQM Controller.
h. The VQM System is now ready to perform Mass Scanning.
CAUTION
Be sure to pump down the vacuum chamber to 1x10−5 Torr or
lower before turning ON the VQM Controller. The MS Gauge
filament may be damaged at system pressures higher than 1x10−5
Torr.
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