Granville-Phillips Convectron 275 series User manual

Series 275
Instruction Manual
Granville-Phillips®Convectron®
Vacuum Gauge Bridge Amp PC
Board with Analog Output Signal
Instruction manual part number 275331
Revision D - November 2016

Instruction Manual
Series 275
Granville-Phillips®Convectron®
Vacuum Gauge Bridge Amp PC
Board with Analog Output Signal
© 2016 MKS Instruments, Inc. All rights reserved.
Granville-Phillips®and Convectron®are registered trademarks, and mksinstTM is a
trademark of MKS Instruments, Inc. All other trademarks and registered trademarks are the
properties of their respective owners.
Customer Service / Technical Support:
MKS Pressure and Vacuum Measurement Solutions
MKS Instruments, Inc., Granville-Phillips®Division
6450 Dry Creek Parkway
Longmont, Colorado 80503 USA
Tel: [phone]
Fax: [phone]
Email: [email protected]
MKS Corporate Headquarters
MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, MA 01810 USA
Tel: [phone]
Fax: [phone]
Email: [email protected]

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Series 275 Convectron Gauge Bridge Amp PC Board
Instruction Manual - 275331
Chapter 1 Safety Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.1 Safety Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.2 Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.3 Overpressure Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.4 System Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.5 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.6 Warranty Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Chapter 2 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.1 General Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.2 Convectron Gauge Tube Construction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.3 Convectron Gauge Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.4 Bridge Amplifier PC Board . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Chapter 3 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
3.1 Install the Convectron Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
3.1.1 Mounting Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
3.1.2 Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
3.2 Install the Bridge Amplifier PC Board . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
3.2.1 Install the Interconnect Cable. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Chapter 4 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
4.1 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
4.1.1 General Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
4.2 Preparing for Pressure Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
4.3 Gas Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
4.4 Preparing For Convectron Gauge Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
4.5 Understanding Convectron Gauge Pressure Measurement In Gases Other Than Nitrogen or Air . . . . . . . 23
4.5.1 Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
4.6 Analog Output Voltage Signal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Chapter 5 Service and Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
5.1 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
5.2 Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
5.3 Troubleshooting and Repair . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
5.3.1 Symptoms and Possible Causes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
5.3.2 Convectron Gauge Calibration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
5.3.3 Convectron Gauge Test Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
5.3.4 Cleaning a Contaminated Convectron Gauge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
5.3.5 Baking the Vacuum Chamber with the Convectron Gauge Attached . . . . . . . . . . . . . . . . . . . . . . . 38
Table of Contents

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Instruction Manual - 275331
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Series 275 Convectron Gauge Bridge Amp PC Board
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Chapter 1
1Safety Instructions
1.1 Safety Introduction
BEGIN BY READING THESE IMPORTANT SAFETY INSTRUCTIONS AND NOTES collected here for
your convenience and repeated with additional information at appropriate points in these
instructions.
NOTE: These instructions do not and cannot provide for every contingency that may arise in
connection with the installation, operation, or maintenance of this product. If you require further
assistance, contact MKS, Granville-Phillips Division at the address on page 2 or the back cover of this
instruction manual.
This product is designed and tested to offer reasonably safe service provided it is installed, operated, and serviced in strict
accordance with these safety instructions.
These safety precautions must be observed during all phases of operation, installation, and service
of this product. Failure to comply with these precautions or with specific warnings elsewhere in this
manual violates safety standards of design, manufacture, and intended use of the instrument. MKS
Instruments, Inc. disclaims all liability for the customer's failure to comply with these requirements.
•Read Instructions – Read all safety and operating instructions before operating the product.
•Retain Instructions – Retain the Safety and Operating Instructions for future reference.
•Heed Warnings – Adhere to all warnings on the product and in the operating instructions.
•Follow Instructions – Follow all operating and maintenance instructions.
•Accessories – Do not use accessories not recommended in this manual as they may be hazardous.
These safety alert symbols in this manual or on the Product rear
panel mean possible danger of electric shock or caution − personal
safety or property damage. Read these instructions carefully.
Failure to comply with these instructions may result in serious personal injury,
including death, or property damage.
The service and repair information in this manual is for the use of Qualified
Service Personnel. To avoid shock, do not perform any procedures in this
manual or perform any servicing on this product unless you are qualified to do
so.
To reduce the risk of fire or electric shock, do not expose this product to rain
or moisture.
Objects and Liquid Entry − Never push objects of any kind into this product
through openings as they may touch dangerous voltage points or short out
parts that could result in a fire or electric shock. Be careful not to spill liquid of
any kind onto the products.

1 Safety Instructions
6Series 275 Convectron Gauge Bridge Amp PC Board
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1.2 Damage Requiring Service
Disconnect the product from all power sources and refer servicing to Qualified Service Personnel
under the following conditions:
a. When any cable or plug is damaged.
b. If any liquid has been spilled onto, or objects have fallen onto, the product.
c. If the product has been exposed to rain or water.
d. If the product does not operate normally even if you follow the operating instructions. Adjust
only those controls that are covered by the operation instructions. Improper adjustment of other
controls may result in damage and will often require extensive work by a qualified technician to
restore the product to its normal operation.
e. If the product has been dropped or damaged.
f. When the product exhibits a distinct change in performance. This indicates a need for service.
Do not substitute parts or modify instrument.
Because of the danger of introducing additional hazards, do not install
substitute parts or perform any unauthorized modification to the product.
Return the product to a service facility designated by Granville−Phillips for
service and repair to ensure that safety features are maintained. Do not use this
product if it has unauthorized modifications.
Replacement Parts − When replacement parts are required, be certain to use
the replacement parts that are specified by Granville−Phillips or that have the
same characteristics as the original parts. Unauthorized substitutions may
result in fire, electric shock or other hazards.
Safety Check − Upon completion of any service or repairs to this product, ask
the Qualified Service Person to perform safety checks to determine that the
product is in safe operating order.
Be aware that when high voltage is present in any vacuum system, a
life threatening electrical shock hazard may exist unless all exposed
conductors are maintained at Earth ground.
This hazard is not peculiar to this product.
Be aware that an electrical discharge through a gas may couple dangerous
high voltage directly to an ungrounded conductor almost as effectively as
would a copper wire connection. A person may be seriously injured or even
killed by merely touching an exposed ungrounded conductor at high potential.
This hazard is not unique to this product.
Install suitable devices that will limit the pressure to the level that the vacuum
system can safely withstand. In addition, install suitable pressure relief valves
or rupture disks that will release pressure at a level considerably below the
pressure that the system can safely withstand.

1 SafetyInstructions
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1.3 Overpressure Conditions
Series 275 instruments are furnished calibrated for N2. They also measure the pressure of air correctly
within the accuracy of the instrument. Do not attempt to use a Series 275 Gauge calibrated for N2to
measure or control the pressure of other gases such as argon or CO2, unless accurate conversion data
for N2to the other gas is properly used. See Section 4.5
Vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is
pressurized. A pressure relief valve should be installed in the system if the possibility of exceeding
1000 Torr (1333 mbar, 133 kPa, 19 psi) exists.
Suppliers of pressure relief valves and pressure relief disks are listed in the Thomas Register under
“Valves, Relief” and “Discs, Rupture.”
Confirm that these safety devices are properly installed before installing the product. In addition,
check that:
a. The proper gas cylinders are installed,
b. Gas cylinder valve positions are correct on manual systems, and
c. The automation is correct on automated gas delivery systems.
Where an equipment malfunction could cause a hazardous situation, always provide for fail-safe
operation. As an example, in an automatic backfill operation where a malfunction might cause high
internal pressures, provide an appropriate pressure relief device.
Series 275 Gauges should not be used above 1000 Torr (1333 mbar, 133 kPa, 19
psi) true pressure.
If accurate conversion data is not used, or is improperly used, a potential
overpressure explosion hazard can be created under certain conditions.
Using the N2calibration to pressurize a vacuum system above about 1 Torr
with certain other gases can cause dangerously high pressures which may cause
explosion of the system. See Section 4.5 in the Operation Chapter before using
with gases other than N2or air.
Warning − If used improperly, Convectron Gauges can supply misleading
pressure indications that can result in dangerous overpressure conditions
within the system.
Do not operate in an explosive atmosphere.
Do not operate the product in the presence of flammable gases or fumes.
Operation of any electrical instrument in such an environment constitutes a
definite safety hazard.
Do not use the product to measure the pressure of explosive or combustible
gases or gas mixtures. The sensor wire of the Convectron Gauge normally
operates at only 125 ˚C, but it is possible that a malfunction could raise the
sensor temperature above the ignition temperature of combustible mixtures.
Danger of explosion or inadvertent venting to atmosphere exists on all vacuum
systems which incorporate gas sources or involve processes capable of
pressurizing the system above safe limits.

1 Safety Instructions
8Series 275 Convectron Gauge Bridge Amp PC Board
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1.4 System Grounding
Be certain that ground circuits are correctly used on vacuum chambers and components, regardless
of their manufacturer. Safe operation of vacuum equipment, including the Convectron Gauge,
requires grounding of all exposed conductors of the vacuum system.
.
1.5 Service Guidelines
Some minor problems are readily corrected on site. If the product requires service, contact the
MKS/Granville-Phillips Technical Support Department at 1-303-652-4400 for troubleshooting help
over the phone.
If the product must be returned to the factory for service, request a Return Material Authorization
(RMA) from Granville-Phillips. Do not return products without first obtaining an RMA. In some cases
a hazardous materials disclosure form may be required. The MKS/Granville-Phillips Customer
Service Representative will advise you if the hazardous materials document is required.
When returning products to Granville-Phillips, be sure to package the products to prevent shipping
damage. Shipping damage on returned products as a result of inadequate packaging is the Buyer's
responsibility.
For Customer Service / Technical Support:
MKS Pressure and Vacuum Measurement Solutions
MKS Instruments, Inc., Granville-Phillips®Division
6450 Dry Creek Parkway
Longmont, Colorado 80503 USA
Tel: [phone]
Fax: [phone]
Email: [email protected]
MKS Corporate Headquarters
MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, MA 01810 USA
Tel: [phone]
Fax: [phone]
Email: [email protected]
Proper Grounding:
All components of a vacuum system must be maintained at Earth ground for
safe operation. The power supply of this product must be connected only to a
properly grounded outlet. Be aware, however, that grounding this product does
not guarantee that other components of the vacuum system are maintained at
Earth ground.
Complying with the usual warning to connect the power supply cable only to a
properly grounded outlet is necessary but not sufficient for safe operation of a
vacuum system with this or any similar high voltage producing product.
Verify that the vacuum port to which the Convectron Gauge is mounted is
electrically grounded. It is essential for personnel safety as well as proper
operation that the envelope of the gauge be connected to a facility ground.

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1.6 Warranty Information
MKS Instruments, Inc. provides an eighteen (18) month warranty from the date of shipment for new
Granville-Phillips Products. The MKS Instruments, Inc. General Terms and Conditions of Sale
provides the complete and exclusive warranty for MKS, Granville-Phillips Division products. This
document may be located on our web site at www.mksinst.com, or may be obtained by contacting
an MKS, Granville-Phillips Division Customer Service Representative.

1 Safety Instructions
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Chapter 2
2Specifications
2.1 General Specifications
• Do not use the Convectron Gauge or control electronics in an area of high vibration, extreme
shock, or an environment that exceeds +50 °C during operation.
• Do not use the Convectron Gauge to measure pressures of explosive gases.
• Always be sure that all components of the vacuum system are properly grounded.
2.2 Convectron Gauge Tube Construction
All materials are compatible for ultra high vacuum service, corrosion resistance and bakeability to
150 °C. The gauge tube envelope is type 304 stainless steel. All metallic joints in the envelope are
welded. No solder is used within the envelope. The following materials are exposed to the vacuum:
Type 304 stainless steel, Carpenter Alloy 52, Kovar, Kapton®, gold-plated Tungsten, and borosilicate
glass.
Table 2-1 Specifications
Function Description
System
Measuring range for Air or N2
(See the Operation Chapter of this
instruction manual for correction
curves for other gases.)
1 mTorr to 1000 Torr N2or equivalent
Resolution 1 x 10-4 Torr
Bridge Amplifier PC Board
Power required +12 Vdc, 200 mA max
Connector 15-pin "D" connector
Ambient operating temperature
range +15 °C to +50 °C (+59 °F to +122 °F)
Non-operating temperature range -40 °C to +70 (-40 °F to 158 °F)
Dimensions 2.47 x 3.00 inches. See Figure 2-2.
Analog (Recorder) output voltage 0 to 9 volts, +5%, +0.05 v, non-linear, monotonically increasing with
pressure. See Section 4.6 in the Operation Chapter.
Convectron Gauge
Gauge tube internal volume 40 cc (2.5 cu in.)
Weight 340 gm (12 oz) with 1/8 NPT fitting
Sensor wire Gold-plated Tungsten
Gauge mounting position Horizontal preferred. See Figure 3-1.
Gauge tube temperature
compensation range +15 to +50 °C (+59 °F to +122 °F)
Bakeout temperature (non-operating) +150 °C max. (+302 °F)

2 Specifications
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2.3 Convectron Gauge Dimensions
Figure 2-1 Convectron Gauge Dimensions
Table 2-2 Fitting/Flange Dimensions
Fitting Description Dimension H
1/8 NPT pipe thread
1/2 inch compression fitting
1/8 NPT pipe thread /
1/2 inch tubulation
6.4 cm (2.52 in.)
VCR-type female fitting 1/4 inch VCR-type female
fitting (standard)
1/2 inch VCR-type female
fitting
7.2 cm (2.83 in.)
8.1 cm (3.19 in.)
ConFlat-type flange 1.33 inch (NW16CF)
ConFlat-type
2.75 inch (NW35CF)
ConFlat-type
8.0 cm (3.15 in.)
8.0 cm (3.15 in.)
KF flange NW16KF flange
NW25KF flange
NW40KF flange
7.3 cm (2.87 in.)
7.3 cm (2.87 in.)
7.9 cm (3.11 in.)

2 Specifications
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2.4 Bridge Amplifier PC Board
Figure 2-2 Bridge Amplifier PC Board

2 Specifications
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Chapter 3
3Installation
3.1 Install the Convectron Gauge
For proper operation above about 1 Torr, install Convectron gauges with the gauge axis horizontal.
To minimize pressure indication errors, avoid installing the Convectron gauge where it will vibrate.
Vibration causes convection cooling of the sensor and will cause the pressure indication to be high.
For proper operation of the module above 1 Torr, orient the module so the axis is horizontal (see
Figure 3-1). Although the Convectron gauge will read correctly below 1 Torr with the module
mounted in any position, inaccurate readings will result at pressures above 1 Torr if the module axis
is not horizontal.
3.1.1 Mounting Options
• Compression Mount/Quick Connect
Do not use for positive pressure applications. The gauge may be forcefully ejected.
The gauge port is designed to fit a standard 1/2 in. compression/quick connect mounting such
as an Ultra-Torr fitting.
Remove the caplug from the gauge tube port, insert the gauge tube port into the compression
fitting and finger tighten the press ring. If a seal is not achieved it may be due to extreme
cleanliness of the O-ring. A light film of vacuum grease will ensure sealing and is normally
preferable to the use of pliers or pipe wrench to further tighten the press ring. You may point
the electrical pins of the gauge tube anywhere you wish in a 360° horizontal circle for
optimum routing of the gauge tube cable.
•1/8NPTMount
Fits standard 1/8 NPT female fitting. Wrap the threads of the gauge port with thread seal tape
and hand tighten. Do not use a wrench or tool. Tighten only sufficiently to achieve a seal.
• VCR/VCO Mount
Remove the plastic or metal bead protector cap from the bead. When using gasket, place it
into the female nut where applicable. Assemble components and snug finger-tight. While
holding a backup wrench stationary, tighten the female nut 1/8 turn past finger-tight for 316
stainless steel and nickel gaskets; or 1/4 turn past finger-tight for copper and aluminum gaskets.
• NW10KF, NW16KF, NW25KF and NW40KF Flange Mount
The KF mounting system requires an O-ring and centering ring to be placed between the
mating flanges. The flanges are then held together with the aluminum flange clamp by
tightening the wing nut. Maximum pressure for this style mounting system is 1000 Torr
absolute.
• ConFlat Flange Mount
To minimize possibility of leaks with ConFlat flanges, use high strength stainless steel bolts and
a new, clean OFHC copper gasket. Avoid scratching the seal surfaces. To avoid contamination,
do not use nonmetal gaskets.
After finger tightening all bolts, continue tightening about 1/8 turn in crisscross order, e.g., 1,
4, 2, 5, 3, 6, 4 . . . until the flanges are in contact. After contact, further tighten each bolt about
1/16 turn.

3 Installation
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3.1.2 Grounding
If the fitting allows continuous metal-to-metal contact between the housing base and the vacuum
chamber, the module is properly grounded via the fitting. If the fitting requires a rubber gasket,
rubber O-ring, pipe sealing tape, or other material that prevents metal-to-metal contact between the
Convectron Gauge and the vacuum chamber, refer to Figure 3-2 and follow these instructions to
ground the module to the vacuum chamber:
1. Attach a metal hose clamp or other metal clamp to the gauge stem.
2. Install a 3.31 mm2 (12 AWG) or larger copper wire between the clamp and a metal ground
lug, bolt, or stud on the vacuum chamber.
Figure 3-1 Recommended Convectron Gauge Installation
Improper grounding could cause product failure, property damage, or serious
personal injury.
To reduce the risk of product failure, property damage, or serious personal
injury, follow ground network requirements for the facility.
Maintain all exposed conductors at Earth ground.
Ground the Convectron Gauge to the vacuum chamber as instructed below.
Make sure the vacuum port to which the Convectron Gauge is mounted is
properly grounded.

3 Installation
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3.2 Install the Bridge Amplifier PC Board
Install the bridge amplifier PC board in your existing enclosure. Dimensions are given in Figure 3-3.
Figure 3-2 Ground Wire Attached to the Convectron Gauge
Figure 3-3 Convectron Gauge Bridge Amplifier PC Board

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3.2.1 Install the Interconnect Cable
1. Connect the cable between the bridge amplifier PC board and the Convectron Gauge. See
Figure 3-4.
2. Connect +12 Vdc power to the PCB (pins 13, 14, and 15). See Figure 3-4.
3. Connect the analog output wires to monitor pressure output (pins 11 and 12).
Figure 3-4 Convectron Gauge to Bridge Amplifier Interconnect Cable

3 Installation
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Figure 3-5 Convectron Gauge Bridge Amplifier Schematic

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Notes: