Granville-Phillips Mini-Convectron 275 Series Manual

®
GRANVILLE-PHILLIPS
Series 275
Mini-Convectron®Vacuum
Gauge Module with
DeviceNet®Digital Interface
Installation, Operation and Service Instructions

®
GRANVILLE-PHILLIPS
To order products online, visit www.brooks.com
For customer service, 24 hours per day, 7 days per week,
every day of the year including holidays, toll-free within the U.S.A.,
phone [phone]
For customer service within the U.S.A., 8 AM to 5 PM, weekdays
excluding holidays:
■Toll-free, phone: [phone]
■Phone: [phone]
■FAX: [phone]
■Email: [email protected]
© 2003, 2006, Brooks Automation. All rights reserved. Granville-Phillips, Micro Ion, Conductron,
Convectron, and Stabil-Ion are registered trademarks of Brooks Automation. All other trademarks
and registered trademarks are the properties of their respective owners.
Series 275
Mini-Convectron®Vacuum
Gauge Module with
DeviceNet®Digital Interface
Installation, Operation, and Maintenance Instructions
Instruction manual part number 275563, Revision 01, November 2006
This manual is for use only with the following part numbers:
275538 and 275553

Mini-Convectron®Module with DeviceNet®Digital Interface i
Table of Contents
Chapter 1 Before You Begin . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.1 Receiving Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.2 International Shipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.3 Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.4 Certification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.5 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
1.6 FCC Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
1.7 UL Listed . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Chapter 2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Chapter 3 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
3.1 General Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
3.2 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.3 Power Supply Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.4 Component Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
3.5 Front Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Digital Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Relay ON LEDs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
3.6 Side Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Process Control Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Communications Connector . . . . . . . . . . . . . . . . . . . . . . . . . . 10
3.7 Rear Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Data Rate Switch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Node/Address MAC ID Switches . . . . . . . . . . . . . . . . . . . . . . . 11
MOD/NET Status LEDs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
3.8 Mounting Flange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
3.9 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

ii Mini-Convectron®Module with DeviceNet®Digital Interface
Table of Contents
Chapter 4 Installation, Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
4.1 Introdution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
4.2 Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
4.3 Installation Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
4.4 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Compression Mount . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
1/8 NPT Mount . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Other Mounts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Trip Point Cable Installation . . . . . . . . . . . . . . . . . . . . . . . . . . 19
4.5 DeviceNet Digital Interface Installation . . . . . . . . . . . . . . . . . 20
4.6 Configuring Polled I/O Data Format . . . . . . . . . . . . . . . . . . . . 21
4.7 Trip Point Relays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
4.8 Checking Module Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
4.9 Measuring N2or Air . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Vacuum Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Atmospheric Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Using Input Polled I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Use with Gases other than N2or Air . . . . . . . . . . . . . . . . . . . . 26
Indicated versus True Pressure Curves . . . . . . . . . . . . . . . . . . 26
Example 1 – Maximum Safe Indicated Pressure . . . . . 27
Example 2 – Indicated To True Pressure Conversion . 27
Example 3 – True To Indicated Pressure Conversion . 27
Example 4 – True To Indicated Pressure Conversion . 27
4.10 Vacuum Gauge Module Process Chamber Baking . . . . . . . . . 31
Chapter 5 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
5.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
5.2 Troubleshooting Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . 33
5.3 Status Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Chapter 6 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
6.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
6.2 Mini-Convectron Gauge Tube Cleaning . . . . . . . . . . . . . . . . . 37
6.3 Mini-Convectron Gauge Tube Test and Replacement . . . . . . . 40
Figures
Figure 3-1 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Figure 3-2 275 Mini-Convectron Vacuum Gauge
Module End Plate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Figure 3-3 Process Control Connector Pin Assignments . . . . . . . . . . . 10
Figure 3-4 Communications Connector Pin Assignment . . . . . . . . . . 10
Figure 3-5 Gauge Tube Schematic . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Figure 4-1 275 Mini-Convectron Vacuum Gauge Module
Installation (DeviceNet Digital Interface) . . . . . . . . . . . . . 17
Figure 4-2 Gas Pressures, 1 x 10–4 to 1 Torr . . . . . . . . . . . . . . . . . . . 28
Figure 4-3 Gas Pressures, 1 x 10–2 to 1000 Torr, First Gas Set . . . . . . 29
Figure 4-4 Gas Pressures, 1 x 10–2 to 1000 Torr, Second Gas Set . . . 30
Figure 4-5 Module Removal for Baking the Process Chamber . . . . . . 32
Figure 6-1 Gauge Tube Removal from Module . . . . . . . . . . . . . . . . . 38
Figure 6-2 Adding and Draining Solvent . . . . . . . . . . . . . . . . . . . . . . 39
Figure 6-3 Mini-Convectron Gauge Tube Pin Identification . . . . . . . . 40

Table of Contents
Mini-Convectron®Module with DeviceNet®Digital Interface iii
Tables
Table 3-1 Vacuum Connection Height Dimensions . . . . . . . . . . . . . 6
Table 3-2 Performance Specifications . . . . . . . . . . . . . . . . . . . . . . . 7
Table 3-3 Physical Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Table 3-4 Gauge Powered by DeviceNet . . . . . . . . . . . . . . . . . . . . . 8
Table 3-5 DeviceNet/422 Communication Parameters . . . . . . . . . . . 11
Table 3-6 275 Mini-Convectron Vacuum Gauge Module
(MOD) LED States . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Table 3-7 DeviceNet Network (NET) LED States . . . . . . . . . . . . . . . . 12
Table 4-1 Trip Point Connector Pin Assignments . . . . . . . . . . . . . . . 19
Table 4-2 Network Master Connection . . . . . . . . . . . . . . . . . . . . . . . 20
Table 4-3 Allocation Choice Byte Contents . . . . . . . . . . . . . . . . . . . 20
Table 4-4 Disabling the Expected Packet Rate . . . . . . . . . . . . . . . . . 20
Table 4-5 Configuring Polled I/O Data Format . . . . . . . . . . . . . . . . . 21
Table 4-6 Configuring Trip Point Relays . . . . . . . . . . . . . . . . . . . . . . 22
Table 4-7 Checking 275 Mini-Convectron Vacuum Gauge
Module Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Table 4-8 Zero Vacuum Adjust Example . . . . . . . . . . . . . . . . . . . . . 23
Table 4-9 1x10-2 Vacuum Adjust Example . . . . . . . . . . . . . . . . . . . . 23
Table 4-10 Atmospheric Adjustment Parameters . . . . . . . . . . . . . . . . 24
Table 4-11 760 Torr Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Table 4-12 Input polled I/O for pressure values . . . . . . . . . . . . . . . . . 24
Table 4-13 UINT Counts versus Pressure . . . . . . . . . . . . . . . . . . . . . . 25
Table 4-14 Indicated Versus True Pressure Information . . . . . . . . . . . 26
Table 5-1 DeviceNet Digital Interface Troubleshooting
Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Table 5-2 Analog Sensor Status, Class 31hex
Instance 1, Attribute 7 34
Table 5-3 Analog Sensor Reading Valid, Class 31hex Attribute 5 . . . 34
Table 5-4 Identity Object Status, Class 1, Instance 1, Attribute 5 . . . 35
Table 5-5 I/O Status Byte and Device Supervisor Exception Status,
Class 30hex Instance 1, Attribute 0hex . . . . . . . . . . . . . . . . 35
Table 6-1 Mini-Convectron Gauge Tube Pin Test
Resistance Values . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40

iv Mini-Convectron®Module with DeviceNet®Digital Interface

Mini-Convectron®Module with DeviceNet®Digital Interface 1
Chapter 1 Before You Begin
1.1 Receiving
Inspection
On receipt of the equipment, inspect all material for damage. Confirm that
the shipment includes all items ordered. If items are missing or damaged,
submit a claim as stated below for a domestic or international shipment,
whichever is applicable.
If materials are missing or damaged, the carrier that made the delivery must
be notified within 15 days of delivery, or in accordance with Interstate
Commerce regulations for the filing of a claim. Any damaged material
including all containers and packaging should be held for carrier inspection.
Phone customer service at 1–303–652–4400 or 1–800–776–6543 for
assistance if your shipment is not correct for reasons other than shipping
damage.
1.2 International
Shipment
Inspect all materials received for shipping damage and confirm that the
shipment includes all items ordered. If items are missing or damaged, the
airfreight forwarder or airline making delivery to the customs broker must be
notified within 15 days of delivery.
If an airfreight forwarder handles the shipment and their agent delivers the
shipment to customs, the claim must be filed with the airfreight forwarder.
If an airfreight forwarder delivers the shipment to a specific airline and the
airline delivers the shipment to customs, the claim must be filed with the
airline.
Any damaged material including all containers and packaging should be
held for carrier inspection. Phone customer service at 1–303–652–4400 or
1–800–776–6543 for assistance if your shipment is not correct for reasons
other than shipping damage.
1.3 Warranty GRANVILLE-PHILLIPS CONDITIONS OF SALE ARE INCORPORATED BY
REFERENCE HEREIN.
1.4 Certification Granville-Phillips certifies that this product met its published specifications
at the time of shipment from the factory. Granville-Phillips further certifies
that its calibration measurements are traceable to the National Institute of
Standards and Technology to the extent allowed by the Institute’s calibration
facility.

2Mini-Convectron®Module with DeviceNet®Digital Interface
Chapter 1
1.5 Service Guidelines Some minor problems are readily corrected on site. For customer service,
phone [phone] or 1–800–776–6543 within the U.S.A., or email
[e-mail]. If the product must be returned for service, request a
Return Authorization (RA) from Granville- Phillips. See the Service Form at
the end of Chapter 6. Do not return products without first obtaining an RA.
Shipping damage on returned products as a result of inadequate packaging
is the Buyer’s responsibility.
When returning equipment to Granville-Phillips, please use the original
packing material whenever possible. Otherwise, contact your shipper or
Granville-Phillips for safe packaging guidelines. Circuit boards and modules
separated from the controller chassis must be handled using proper anti-
static protection methods and must be packaged in anti-static packaging.
Granville-Phillips will supply return packaging materials at no charge upon
request.
1.6 FCC Verification This equipment has been tested and found to comply with the limits for a
Class A digital device, pursuant to Part 15 of the FCC Rules. These limits are
designed to provide reasonable protection against harmful interference
when the equipment is operated in a commercial environment. This
equipment generates, uses, and can radiate radio frequency energy and, if
not installed and used in accordance with this instruction manual, may
cause harmful interference to radio communications. However, there is no
guarantee that interference will not occur in a particular installation.
Operation of this equipment in a residential area is likely to cause harmful
interference in which case the user will be required to correct the
interference at his own expense. If this equipment does cause harmful
interference to radio or television reception, which can be determined by
turning the equipment off and on, the user is encouraged to try to correct the
interference by one or more of the following measures:
• Reorient or relocate the receiving antenna.
• Increase the separation between the equipment and the receiver.
• Connect the equipment into an outlet on a circuit different from that to
which the receiver is connected.
• Consult the dealer or an experienced radio or television technician for
help.
1.7 UL Listed This product, when labeled, is listed to UL 3101 Standard for Safety,
Laboratory Equipment by Underwriters Laboratories Inc. (UL).