Granville-Phillips 500 CCG Series User manual

Granville-Phillips®Series 500 Cold Cathode
Gauge with Analog Output, 2 Setpoint Relays,
and optional RS-485 Digital Interface
Instruction manual part number 500001
Revision F - November 2016
Series 500
Instruction Manual

Granville-Phillips Series 500 CCG Module

© 2016 MKS Instruments, Inc. All rights reserved.
Granville-Phillips®is a registered trademark, and mksinstTM is a trademark of
MKS Instruments, Inc. All other trademarks and registered trademarks are the
properties of their respective owners.
Instruction Manual
Series 500
This instruction manual is for use with Granville-Phillips
Series 500 Cold Cathode Gauge with RS-485 Digital
Interface. A list of applicable catalog numbers is provided
on the following page.
Granville-Phillips®Series 500 Cold Cathode
Gauge with Analog Output, 2 Setpoint Relays,
and optional RS-485 Digital Interface
Customer Service / Technical Support:
MKS Pressure and Vacuum Measurement Solutions
MKS Instruments, Inc., Granville-Phillips®Division
6450 Dry Creek Parkway
Longmont, Colorado 80503 USA
Tel: [phone]
Fax: [phone]
Email: [email protected]
MKS Corporate Headquarters
MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, MA 01810 USA
Tel: [phone]
Fax: [phone]
Email: [email protected]

Granville-Phillips®Series 500 Cold Cathode Gauge
with optional RS-485 Digital Interface
Catalog numbers for Series 500 Cold Cathode Gauges
Gauge Assembly
Gauge with analog output, 2 setpoints, no display 500100 - ## - ### - #
Gauge with analog output, 2 setpoints, digital display 500101 - ## - ### - #
UHV Gauge with analog output, 2 setpoints, digital display 500501 - ## - ### - #
Setpoint Relays
2 relays 2
Calibration
Calibrated (Higher Accuracy) C
Standard S
Interface
RS-485 R4
Vacuum Connection
NW25KF E
NW40KF K
NW35CF (2.75 inch Conflat-type) G
Measurement Units
Torr T
mBar M
Pascal P
Replacement Gauge (Sensor) 500200- # #
Calibration
Calibrated (Higher Accuracy) C
Standard S
Vacuum Connection
NW25KF E
NW40KF K
NW35CF (2.75 inch Conflat-type) G
Gauge Repair Kit (Field replaceable maintenance kit) 500600- K

Series 500 Cold Cathode Vacuum Gauge
Instruction Manual - 500001
5
Chapter 1 General Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.1 Receiving Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.2 International Shipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.3 Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.4 Certification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.5 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Chapter 2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.1 Safety Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.2 Magnets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.3 Grounding Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
2.4 High Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
2.5 Over Pressure Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
2.6 System and Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
2.7 Safety Interlocks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
2.8 Responsibility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
2.9 Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Chapter 3 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
3.1 General Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
3.2 Intended Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
3.2.1 Improper Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
3.3 Transportation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
3.4 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
3.5 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
3.5.1 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
3.6 Electronics Enclosure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
3.6.1 Control Panel LEDs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
3.6.2 Input/Output Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.6.3 USB Service Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Chapter 4 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
4.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
4.2 Vacuum Gauge Connection (mechanical) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
4.2.1 Mounting Location and Orientation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
4.2.2 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
4.2.3 Attach the Gauge to the Vacuum Chamber . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
4.3 Power and Input/Output Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
4.3.1 Power & Communications Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
4.3.2 Process Control & Diagnostics Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
4.4 Grounding the Gauge to the Vacuum Chamber . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Chapter 5 Initial Activation of the Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
5.1 Activating the Cold Cathode Gauge/Electronics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
5.2 On-Board Diagnostics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
5.2.1 Diagnostic Test Details . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
5.2.2 Power-On Self-Test (POST) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
5.2.3 High-Voltage Timeout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
5.2.4 Diagnostic Digital Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
Chapter 6 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
6.1 Basic Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
6.2 Starting the Plasma . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
6.3 Starting at Low Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
6.4 Contamination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . . . . . . . . . . . 41
6.4.1 Process Gas Contamination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
6.4.2 Line of Site By-Products . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
6.4.3 Pressure Dose and Gauge Lifetime . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
6.5 Electronics Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
Table of Contents

6Series 500 Cold Cathode Vacuum Gauge
Instruction Manual - 500001
6.5.1 High Voltage Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
6.5.2 Electrometer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
6.5.3 Calculating Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
6.5.4 Analog I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
6.5.4.1 Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
6.5.5 Digital I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
6.5.6 Setpoint Relays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
6.5.7 Microprocessor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
6.6 Pressure Correction Factors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
6.6.1 Gas Species Correction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
6.6.2 Pressure Correction Factor Multiplier . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
6.6.3 Sensitivity Factor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
Chapter 7 G-P Connect Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
7.1 GP Connect Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
7.2 GP Connect Software Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
7.3 Starting the GP Connect Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
7.4 Connecting to the CCG Electronics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
7.5 Getting CCG Electronics Status Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
7.6 Configuring the CCG Electronics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
7.6.1 Changing the Communication Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
7.6.2 Setting Pressure Units and Factors: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
7.6.3 Naming the Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
7.6.4 Setting the Gauge Auto ON Behavior . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
7.6.5 Setting the Gauge Auto Off Behavior . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
7.6.6 Setting the Date and Time on the Electronics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
7.6.7 Disabling Further Commands or Disabling HV button presses . . . . . . . . . . . . . . . . . . . . . . . . . 60
7.6.8 Configuring the Analog Output Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
7.6.9 Configuring the Relays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
7.6.9.1 Manual Control of Relays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
7.6.9.2 Automatic Relay Based on Internal Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
7.6.9.3 Automatic Relay Based on External Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
7.6.9.4 Automatic Relay Based on Service Error . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63
7.6.9.5 Digital IN Disable of Automatic Relay Set Points . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
7.6.9.6 Restoring Factory Defaults . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
7.7 Turning the Cold Cathode Gauge ON or OFF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
7.8 Resetting the Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
7.9 Viewing the Pressure Trend . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
7.10 Viewing VacTrac Statistics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
7.10.1 VacTrac Simple Statistics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
7.10.1.1 Event Counts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
7.10.1.2 Duration Times . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
7.10.1.3 Pressure Dose . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
7.10.1.4 Ranges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
7.10.2 VacTrac Histograms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
7.11 Saving VacTrac Statistics to a File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69
7.12 Saving the Device Configuration to a File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
7.13 Downloading the Settings in the File to the Device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
7.14 Entering Commands Directly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
7.15 Updating the Cold Cathode Gauge Electronics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
7.15.1 Update Firmware Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
7.15.2 Update Specific Calibration Curve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
7.15.3 New Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72

Series 500 Cold Cathode Vacuum Gauge
Instruction Manual - 500001
7
Chapter 8 Service & Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
8.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
8.2 Gauge Bake-out Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
8.3 Replace the Components of the Cold Cathode Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
8.4 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
Chapter 9 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
9.1 Troubleshooting Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
Chapter 10 Digital Interface Specifications and Protocol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89
10.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89
10.2 Power and RS-485 Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89
10.3 RS-485 Serial Protocols . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
10.3.1 RS-485 Command Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
10.3.2 RS-485 Response Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
10.3.3 USB Command and Response Structures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
10.4 Communication Setup Command Effect . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
10.5 Error Responses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
10.6 General Responses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
10.7 List of Series 500 CCG Module User Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
10.8 User Command Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94
Chapter 11 Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 131

8Series 500 Cold Cathode Vacuum Gauge
Instruction Manual - 500001

1 General Information
9
Series 500 Cold Cathode Gauge
Instruction Manual - 500001
Chapter 1
1General Information
1.1 Receiving Inspection
On receipt of the equipment, inspect all material for damage. Confirm that the shipment includes
all items ordered. If items are missing or damaged, submit a claim as stated below for a domestic or
international shipment, whichever is applicable.
If materials are missing or damaged, the carrier that made the delivery must be notified within 15
days of delivery, or in accordance with Interstate Commerce regulations for the filing of a claim.
Any damaged material including all containers and packaging should be held for carrier inspection.
Contact MKS, Granville-Phillips Division Customer Support for assistance if your shipment is not
correct for reasons other than shipping damage.
1.2 International Shipment
Inspect all materials received for shipping damage and confirm that the shipment includes all items
ordered. If items are missing or damaged, the airfreight forwarder or airline making delivery to the
customs broker must be notified within 15 days of delivery. The following illustrates to whom the
claim is to be directed.
• If an airfreight forwarder handles the shipment and their agent delivers the shipment to customs,
the claim must be filed with the airfreight forwarder.
• If an airfreight forwarder delivers the shipment to a specific airline and the airline delivers the
shipment to customs, the claim must be filed with the airline.
Any damaged material including all containers and packaging should be held for carrier inspection.
Contact MKS, Granville-Phillips Division Customer Support for assistance if your shipment is not
correct for reasons other than shipping damage.
1.3 Warranty
MKS Instruments, Inc. provides an eighteen (18) month warranty from the date of shipment for new
Granville-Phillips Products. The MKS Instruments, Inc. General Terms and Conditions of Sale
provides the complete and exclusive warranty for Granville-Phillips products. This document is
located on our web site at www.mksinst.com, or may be obtained by contacting an MKS, Granville-
Phillips Division Customer Service Representative.
1.4 Certification
MKS, Granville-Phillips Division certifies that this product met its published specifications at the
time of shipment from the factory.

1 General Information
10 Series 500 Cold Cathode Gauge
Instruction Manual - 500001
1.5 Service Guidelines
Some minor problems are readily corrected on site. If the product requires service, contact the MKS,
Granville-Phillips Division Technical Support Department at 1-303-652-4400 or 1-800-776-6543
for troubleshooting help over the phone.
If the product must be returned to the factory for service, request a Return Material Authorization
(RMA) from Granville-Phillips. Do not return products without first obtaining an RMA. In some
cases a hazardous materials disclosure form may be required. The MKS/Granville-Phillips Customer
Service Representative will advise you if the hazardous materials document is required.
When returning products to Granville-Phillips, be sure to package the products to prevent shipping
damage. Shipping damage on returned products as a result of inadequate packaging is the Buyer's
responsibility.
For Customer Service / Technical Support:
MKS Pressure and Vacuum Measurement Solutions
MKS Instruments, Inc., Granville-Phillips®Division
6450 Dry Creek Parkway
Longmont, Colorado 80503 USA
Tel: [phone]
Fax: [phone]
Email: [email protected]
MKS Corporate Headquarters
MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, MA 01810 USA
Tel: [phone]
Fax: [phone]
Email: [email protected]

2 Safety
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Series 500 Cold Cathode Gauge
Instruction Manual - 500001
Chapter 2
2Safety
2.1 Safety Introduction
START BY READING THESE IMPORTANT SAFETY INSTRUCTIONS AND NOTES collected here
for your convenience and repeated with additional information at appropriate points throughout
this instruction manual.
These safety alert symbols in this manual or on the Product mean caution - personal safety, property
damage or danger from electric shock. Read these instructions carefully.
This product was designed and tested to offer reasonably safe service provided it is installed,
operated, and serviced in strict accordance with these safety instructions.
Danger indicates a hazardous situation which, if not
avoided, will result in death or serious injury.
Warning indicates a hazardous situation which, if not
avoided, could result in death or serious injury.
Caution indicates a hazardous situation or unsafe
practice which, if not avoided, may result in minor or
moderate personal injury.
Indicates a situation or unsafe practice which, if not
avoided, may result in equipment damage.
Notice
These instructions do not and cannot provide for every contingency that
may arise in connection with the installation, operation, or maintenance of
this product. If you require further assistance, contact MKS, Granville-
Phillips Division at the address on the title page of this instruction manual.
Safety Precautions
Failure to comply with these instructions may result in serious
personal injury, including death, or property damage.
Always observe and follow all safety notices that are
provided throughout this instruction manual and on the
product.

2 Safety
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Instruction Manual - 500001
These safety precautions must be observed during all phases of operation, installation, and service
of this product. Failure to comply with these precautions or with specific warnings elsewhere in this
manual violates safety standards of design, manufacture, and intended use of the instrument. MKS
Instruments, Inc./Granville-Phillips disclaims all liability for the customer's failure to comply with
these requirements.
•Read Instructions – Read all safety and operating instructions before operating the product.
•Retain Instructions – Retain the Safety and Operating Instructions for future reference.
•Heed Warnings – Adhere to all warnings on the product and in the operating instructions.
•Follow Instructions – Follow all operating and maintenance instructions.
•Accessories – Do not use accessories not recommended in this manual as they may be
hazardous.
2.2 Magnets
The Series 500 Cold Cathode Gauge assembly contains a very strong rare-Earth magnet assembly.
Keep it away from magnetic storage material, pacemakers, credit cards, metal objects, or any
material sensitive to magnetic fields. Care and caution must be used when handling, installing,
removing or storing the magnets as they may attract metal objects or damage material sensitive to
magnetic fields.
Electrical Shock or Personal Injury
The service and repair information in this manual is for the use
of Qualified Service Personnel. To avoid possible electrical
shock or personal injury, do not perform any procedures in
this manual or perform any servicing on this product unless
you are qualified to do so.
Electrical Shock or Fire
To reduce the risk of fire or electric shock, do not expose this
product to rain or moisture.
Objects and Liquid Entry - Never push objects of any kind into
this product through openings as they may touch dangerous
voltage points or short out parts that could result in a fire or
electric shock. Be careful not to spill liquid of any kind onto the
products.

2 Safety
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Series 500 Cold Cathode Gauge
Instruction Manual - 500001
The following Safety Warning is used throughout this instruction manual where exposure to the
magnet assembly could possibly affect persons that are subject to the effects of magnets.
Figure 2-1: Magnet Assembly and Product Label
2.3 Grounding Requirements
See Grounding, Section 4.2 in the Installation chapter for more detailed requirements regarding
gauge and system grounding.
Strong Magnetic Field
Strong magnetic fields can disturb electronic devices like heart
pacemakers, or can impair their function. Maintain a safe
distance of >10 cm between the magnet and a heart
pacemaker.
Keep tools and other metallic objects away from the magnet.
Proper Grounding
All components of a vacuum system used with this or any
similar high voltage product must be maintained at Earth
ground for safe operation.
Be aware that grounding this product does not guarantee that
other components of the vacuum system are maintained at
Earth ground.
Verify that the vacuum port to which the Series 500 Cold
Cathode Gauge is mounted is electrically grounded. It is
essential for personnel safety as well as proper operation that
the envelope of the gauge be connected to a facility ground.
See Section 4.4 for detailed grounding instructions.
Connect power cords only to properly grounded outlets or
sources.

2 Safety
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Instruction Manual - 500001
2.4 High Voltage
High Voltage is present in the unit when the electronics enclosure is connected to the Cold Cathode
Gauge, powered ON, and the HV ON/OFF LED is flashing or steady green. Hazardous voltages
may still be present in the module for some time after disconnecting power to the electronics
enclosure. Refer to the Installation and Service chapters for more information.
2.5 Over Pressure Conditions
Suppliers of pressure relief valves and pressure relief disks can be located via an online search, and
are listed on ThomasNet.com under “Relief Valves” and “Rupture Discs. Confirm that these safety
devices are properly installed before installing and operating the product.
High Voltage
Be aware that when high voltage is present in any vacuum
system, a life threatening electrical shock hazard may exist
unless all exposed conductors are maintained at Earth ground.
This hazard is not unique to this product.
High Voltage
All conductors in, on, or around the vacuum system that are
exposed to potential high voltage electrical discharges must
either be shielded at all times to protect personnel or must be
connected to Earth ground at all times.
High Voltage
Be aware that an electrical discharge through a gas may
couple dangerous high voltage directly to an ungrounded
conductor almost as effectively as would a copper wire
connection. A person may be seriously injured or even killed
by merely touching an exposed ungrounded conductor at high
potential.
This hazard is not unique to this product.
Notice
These instructions do not and cannot provide for every contingency that
may arise in connection with the installation, operation, or maintenance of
this product. If you require further assistance, please contact MKS,
Granville-Phillips Division at the address on the title page of this instruction
manual.

2 Safety
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Series 500 Cold Cathode Gauge
Instruction Manual - 500001
Ensure the following precautions are complied with at all times:
(1) the proper gas cylinders are installed
(2) the gas cylinder valve positions are correct on manual systems
(3) the automation is correct on automated gas delivery systems
Vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is
pressurized.
2.6 System and Environment
Explosive Environment
Do not use the Series 500 Cold Cathode Gauge in an
environment of explosive or combustible gases or gas
mixtures. Operation of any electrical instrument in such an
environment constitutes a definite safety hazard. Do not use
the product to measure the pressure of explosive gases or gas
mixtures.
Chemical Fumes / Explosive Environment
The fumes from solvents such as trichloroethylene,
perchloroethylene, toluene, and acetone can be dangerous to
health if inhaled. Use only in well ventilated areas exhausted
to the outdoors.
Acetone and toluene are highly flammable and should not be
used near an open flame or energized electrical equipment.
Potential Automatic Operation
It is the installer's responsibility to ensure that the automatic
signals provided by the product are always used in a safe
manner. Carefully check the system programming before
switching to automatic operation.
Vacuum Chamber High Pressures
Where an equipment malfunction could cause a hazardous
situation, always provide for fail-safe operation. As an
example, in an automatic backfill operation where a
malfunction might cause high internal pressures, provide an
appropriate pressure relief device.

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Instruction Manual - 500001
2.7 Safety Interlocks
Safety interlocks protect personal safety.
The 500 Series Cold Cathode Gauge electronics are designed with a safety interlock to prevent
activation of the high voltage supply until the cold cathode sensor is installed in the electronics
enclosure. A gauge detection circuit is internal to the electronics enclosure.
During installation or maintenance of the Cold Cathode Gauge, it is important to fully engage the
interlock to allow the electronics to operate the gauge. See Section 4.2.3 and Section 8.3 for
detailed instructions regarding the safety interlock.
2.8 Responsibility
It is the responsibility of the Customer to comply with all local, state, and federal ordinances,
regulations, and laws applicable to the installation, operation and service of this equipment.
It is the responsibility of the end user to provide sufficient lighting at work to meet local regulations.
Operation and Service of this equipment in strict accordance with the methods and procedures
supplied by MKS, Granville-Phillips Division is the responsibility of the Customer.
MKS Instruments, Inc. assumes no liability, whatsoever, for any personal injuries or damages
resulting from the operation or service of this equipment in any manner inconsistent or contrary to
the methods supplied in Granville-Phillips literature including, but not limited to, manuals,
instructions, bulletins, communications, and recommendations.
For emergencies and for product safety related matters, contact the MKS, Granville-Phillips Division
Customer Service Department. See Section 1.5 or Section 8.4 for detailed information regarding
how to contact MKS, Granville-Phillps Division Customer Service Representatives.
2.9 Damage Requiring Service
Disconnect the product from all power sources and refer servicing to Qualified Service Personnel
under the following conditions:
a. When any cable or plug is damaged.
b. If any liquid has been spilled onto, or objects have fallen into the product.
c. If the product has been exposed to rain or water.
d. If the product does not operate normally even if you follow the operating instructions.
Adjust only those controls that are covered by the operation instructions. Improper
adjustment of other controls may result in damage and will often require extensive work
by a qualified technician to restore the product to its normal operation.
High Voltage
Do not attempt to defeat the safety interlock that disables the
high voltage when the electronics and sensor are not
assembled together.
High voltage is supplied to the gauge during operation.

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Instruction Manual - 500001
e. If the product has been dropped or the enclosure has been damaged.
f. When the product exhibits a distinct change in performance. This indicates a need for
service.
See Service Guidelines, Section 1.5 for detailed information regarding how to contact MKS,
Granville-Phillps Division Customer Service Representatives.
Notice
Do not substitute parts or modify the instrument.
Because of the danger of introducing additional hazards, do not install
substitute parts or perform any unauthorized modification to the product.
Return the product to a service facility designated by Granville-Phillips for
service and repair to ensure that safety features are maintained. Do not use
this product if it has unauthorized modifications.
Notice
Safety Check - Upon completion of any service or repairs to this product,
ask the Qualified Service Person to perform safety checks to determine that
the product is in safe operating order.
Notice
Finite Lifetime - After ten years of normal use or even non-use, the electrical
insulation in this product may become less effective at preventing electrical
shock. Under certain environmental conditions which are beyond the
manufacturer’s control, some insulation material may deteriorate sooner.
Therefore, periodically inspect all electrical insulation for cracks, crazing, or
other signs of deterioration. Do not use if the electrical insulation has
become unsafe.

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Notes:

3 Introduction
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Series 500 Cold Cathode Gauge
Instruction Manual - 500001
Chapter 3
3Introduction
3.1 General Description
The Series 500 Cold Cathode Gauge (CCG) Module, shown on page 2 and in Figure 3-1, is a
modular instrument consisting a cold cathode gauge and electronics enclosure capable of
measuring vacuum pressures from 1 x 10-9 Torr to 1 x 10-2 Torr.
Benefits of the design include:
• Compact, Convenient, Cost Saving Vacuum Measurement
• No hot filament, eliminating filament burnout
• Designed for simple disassembly and cleaning or replacement of key components
• Cool, low-power operation
• Easily removable electronics and magnets for bake out
• Optional Digital I/O or optional RS-485 compatibility with computer controlled processes
• USB service port interface for offline programming and diagnostics download
• An internal guard ring provides longer life by reducing contamination on critical components
and isolating leakage current from the measurement.
• Field emission starter provides faster and more predictable start times.
• Lifetime reading that indicates when gauge maintenance is needed.
The RS-485 digital interface version provides industry-standard digital RS485 communications over
networks as well as direct connections to a personal computer. The setpoint relays can be easily
controlled via the RS-485 digital interface.
The setpoint relays can be used to control various devices such as safety interlock, valve, digital
input for a scanner, or programmable logic controller. The setpoint relay trip points can be set to
customized pressure settings to turn power ON or OFF to the appropriate device.
3.2 Intended Use
The intended use of this instrument is to measure vacuum pressure in the range of 1 x 10-9 Torr
to 1 x 10-2 Torr. This device is to be used only in accordance with the instructions in this operation
manual.
3.2.1 Improper Use
• Removal of any factory installed components.
• Modifying any factory installed components.
• Removal of any labeling or warranty seals.
• Using any of the individual components outside the Series 500 Cold Cathode Gauge.
• Operation of this device in any condensing vapor or liquid.
• CE Conformity: The manufacturer’s declaration becomes invalid if the operator modifies the
original product or installs additional components.

3 Introduction
20 Series 500 Cold Cathode Gauge
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3.3 Transportation
• Reuse the original shipping container.
• Replace all of the dust caps on all ports prior to shipping.
3.4 Storage
• Store the CCG Module assembly indoors between -25 0C and 55 0C.
• Bag the CCG Module assembly in a sealed or shrink wrapped bag with desiccant.
• All of the components should be bagged and boxed together along with the instructions for
future reference.
3.5 Specifications
Table 3-1 Specifications for the Series 500 CCG Modules
Parameter Specification
Measurement Range for N2/ Air 1,2 See notes 1 and 2, below
Torr 1x10-10 to 1x10-2 Torr (UHV #500501: 5x10-11)
mbar 1.33x10-10 to 1.33x10-2 mbar (UHV #500501: 6.67x10-11)
pascal 1.33x10-8 to 1.33 pa (UHV #500501: 6.67x10-9)
Accuracy - standard (typical) +/- 30% (1x10-8 to 1x10-4 Torr)
Accuracy - calibrated gauge +/- 10% (1x10-8 to 1x10-4 Torr)
Repeatability - (typical) +/- 5% (1x10-8 to 1x10-4 Torr)
Display Vacuum Fluorescent
Update rate Every 0.5 sec.
Input power 3, 4 13.5 to 36 Vdc, 2 W continuous (see note 3, below)
Weight 4652 gr. (23 oz.)
Operating temperature 0 oC to +50 oC (32 0F to 122 0F) ambient, indoor use only,
ordinary protection from moisture
Operation humidity 0 to 90% (accuracy may be affected below 1x10-8 Torr)
Non-operating temperature -40 oC to +70 oC (-40 0F to 158 0F)
Gauge bake out temperature with
magnet and electronics removed 250 oC maximum (482 0F)
Mounting orientation Any. However, avoid mounting the gauge directly below the
chamber to prevent sputtered material or other debris falling into
the gauge.
CE Compliance
EMC EN61326-1
Safety EN61010-1
Environmental RoHS and REACH
Setpoint relays Two, single-pole, double-throw (SPDT)
Contact rating 1 A @ 30 Vdc, Min. 5ma at 5 Vdc, max. ripple 1 Vpp
RS-485 Communication Interface