Table of Contents
EQ-77X LDLS® Operation Manual 3of31
Contents
Contents.................................................................................................................................................................. 3
Chapter 1. Introduction ........................................................................................................................................... 5
Chapter 2. Safety and Compliance ........................................................................................................................... 6
2.1 General Precautions ..................................................................................................................................... 6
2.2 Definition of Equipment and Document Symbols and Designations .............................................................. 7
2.3 Laser Information ......................................................................................................................................... 8
2.4 EMC Compliance Standards .......................................................................................................................... 9
2.5 Labels and Safety Notification....................................................................................................................... 9
2.6 Safety Interlocks ......................................................................................................................................... 10
2.7 External Interlocks ...................................................................................................................................... 11
2.8 Correct Disposal of the Unit........................................................................................................................ 11
Chapter 3. Preparation of System .......................................................................................................................... 12
3.1 Unpacking Guide ........................................................................................................................................ 12
3.2 System Description ..................................................................................................................................... 12
3.3 Physical Specifications ................................................................................................................................ 15
3.4 Utility Requirements................................................................................................................................... 15
3.5 Environmental Requirements ..................................................................................................................... 15
3.6 Remote Interface ........................................................................................................................................ 15
3.7 External Interlock Connection..................................................................................................................... 16
Chapter 4. EQ-77X Setup........................................................................................................................................ 17
4.1 Connections................................................................................................................................................ 17
4.1.1 Electrical Power ........................................................................................................................................... 17
4.1.2 Purge Gas..................................................................................................................................................... 17
4.1.3 Cooling Fluid ................................................................................................................................................ 17
4.1.4 Optical Interface .......................................................................................................................................... 18
4.1.5 Signal Connections ...................................................................................................................................... 18
4.1.6 Lamp House I/O........................................................................................................................................... 19
4.1.7 RS-485 Interface .......................................................................................................................................... 19
4.2 Installation Procedure................................................................................................................................. 19
4.3 Chiller Information ..................................................................................................................................... 20
Chapter 5. EQ-77X Operation................................................................................................................................. 21
5.1 Startup ....................................................................................................................................................... 21
5.2 Stopping ..................................................................................................................................................... 21
