Kofloc 5100 Series User manual

MJ400195C1
Thermal Mass Flow Controller
MODEL 5100
Instruction Manual

MJ400195C1
1
1. Overview
Thank you very much for selecting the KOFLOC Corp. Mass Flow Controller MODEL5100 series.
Read this manual completely and carefully before handling, installation and operation, in order to avoid
injury or serious damage to this equipment and/ or surrounding equipment.
Sincerely,
KOFLOC Corp.
【1-1 Principle of Operation】
The flow detect sensor is wound by heating wires on the outside of the metallic capillary in two places.
When gas flows to this capillary, the heat of the heating wire in the upstream is removed by the gas and
its temperature drops. The heat in the upstream is conducted to the downstream to cause a difference
in the resistance values of these heating wires.
The difference in temperature in these two places is proportional to the flow rate of the gas. This
temperature difference is used to calculate a flow rate, which is converted to an electric signal.
When a bypass capillary to bypass the flow to the sensor pipe is incorporated, the gas flow to the sensor
is restricted to enable the equipment to be used for a wide range of flow rates.
Mass flow controller is additionally attached with valve. The flow signal set by the flow setting
appliance is compared with the flow signal of the sensor. This comparison allows controlling of the
current on the solenoid valve. The valve is normally closing-type. When the power switch is OFF, the
flow path is held closing.

MJ400195C1
2
【1-2 Standard Specifications】
Flow Range
（at Ｎ2 Calibration conditions）
1SCCM-20SLM
Valve type
Normally close/solenoid/ diaphragm seat valve
Control range
2～100%F.S.
Response
0-100% response 1sec.（within±2%，typical）
Accuracy
±1.0%(F.S.)
Linearity
±0.5%(F.S.)
Repeatability
±0.2%(F.S.)
Operating differential pressure
F.S.≦5SLM 50kPa-300kPa
Low differential pressure specification depends on types of
gas and flow rates to be used.
5＜F.S.≦20SLM 100kPa-300kPa
Proof pressure
980kPa
Working temperature range
0～50℃
Materials of parts in contact w/gases
Body: SUS316L
Diaphragm: SUS316L
Valve seat: PTFE
Flow rate input signals
0～5VDC
Flow rate output signals
0～5VDC
Required power supply
+15VDC 100mA,-15VDC 200mA(Model5100:100mA)
Connector
D-sub 9P male connector KFC standard
(SEMI standard Reference pin arrangement)

MJ400195C1
3
【1-3 Outline】
MODEL5100

MJ400195C1
4
2. Configuration
【2-1 Configuration of the Thermal Mass Flow Controller】
Required power supply to operate the mass flow Controller (Model 5100).
DC constant voltage power supply: ±15 VDC±2%, +100 mA/-200 mA
1) Peripheral equipment of Model5100
①DC power supply: PSK-1FB, AC85-132V(50/60Hz) 0.2A
②Flow rate indicator: DPM-3 +5 VDC±5% 120 mA
③Flow Setting Device: CK-1A (Resistance 10kΩ)
④One set of special connecting cables (If a cable longer than 1 m is required, please contact KOFLOC.)
＊With peripheral equipment, there are type CR-400/CR-300 that, in addition, ①~③become one unit.
【2-2 Precautions】
1) Use clean and dry gas with the mass flow Controller. The dryness condition must be a dew point below
–20℃at atmospheric pressure.
2) A 100-micron filter is installed at the gas inlet. However, if the meter is to be used in a line where dust
and mist might be produced, install a filter of about 10-micron in front of the meter to remove them.
3) Install a stop valve for gas stop completely.
A control valve of mass flow controller is “normally close” , but cannot completely shut off it. Please
avoid using it as a substitute of a stop valve.
3. Installation
【3-1 Installation Site】
1) The mass flow Controller is designed for indoor use.
Never install the meter in a place where it may be wetted. The meter may fail.
Install the meter in a place that is well ventilated and has little change in humidity.
2) Install the meter in a place free of vibration and impact.
3) Do not install the meter in a place that is under direct sunlight or very hot or humid.
4) Install the meter in a place free of dust.
5) Install the meter in a place free of corrosive gases.
6) Install the meter in a place free of strong electric or magnetic field.
7) Be sure to conduct leak tests of the piping after installation.
8) Always use the special connecting cables.
Note that the use of the meter out of the specifications is a cause of failure.

MJ400195C1
5
【3-2 Contamination of the Piping System】
Be sure to use well-cleaned pipes and joints for piping. A standard filter has been installed. However, if
a large amount of dust adheres, the gas flow will be disturbed. In particular, if air from a compressor or
blower fan is used, it is likely that a large amount of oil mist and water may enter the meter. In such a case,
always install an oil filter or water removing filter in front of the meter.
【3-3 Installation Method】
1) For installation, utilize the mounting threaded holes (M4) on the bottom of the meter block.
2) The standard piping connection is VCR. Use suitable joints and be sure that they will not leak.
【3-4 Wiring】
Be sure to use suitable connecting cables.
4. Operation
【4-1 Warming Up】
After the power was turned on, warm up the meter for 15 minutes or longer with the supply of gas stopped.
If the meter is not warmed up, the measuring accuracy will deteriorate.
【4-2 Zero/Span Calibration】
If the user has the reference flow meter, the span may be calibrated. If no reference meter is available,
conduct the zero calibration only.
1) Zero calibration
When the indication has become stable with gas shut off after the meter was warmed up, using a small
screwdriver, adjust the “ZERO” variable resistor installed on the top of the case to zero. Be sure that
the indicated value or the output becomes zero.
2) Span calibration
If the reference meter is not available, never tinker with the “SPAN” variable resistor.
In case of Model 5100, make the gas flow in full scale flow rate, and adjust “SPAN”volume as output
flow signal voltage becomes DC5V.
In case of Model5100, set flow-setting command to 10.00 (or adjust flow set voltage to 5V), and
adjust “SPAN”volume as the reference flow meter shows full scale.
If the user does not have the reference flow meter, never tinker with the “SPAN” variable resistor. Please avoid
calibration with user as much as possible, and please send it back to Kofloc.

MJ400195C1
6
【4-3 Run】
Model 5100 has been set ready for measurement
■Flow rate setting
1) When using power supply PSK-FB, DPM-3, CK-1A doing it at a dial scale of them.
2) When using read out unit CR-400/CR-300 etc, please refer to the instruction manual of them.
【4-4 Caution for using】
1) Working Pressure
Working differential pressure of MODEL5100 is decided with a flow range. (The details please refer to 1-2
“Standard Specifications”.
Please use it in this range by all means.
2) Calibration of actual gases
Mass flow controller are calibrated with N2gas basically and shipping it. For O2, H2, He, CO2, Ar gas
calibration with actual gas are possible.
Other gases are calibrated by use of a conversion factor.
If gases mot listed in the specifications are to be used, always test the corrosion resistance of the areas in
contact with gas.
【4-5 Gases Not Listed in Specifications (Conversion Factor)】
If the thermal mass flow controller that has been calibrated with one type of gas is used for other gas, the
indicated value does not match the actual flow rate.
For example, if Helium is let flow to the meter that has been calibrated with Nitrogen, the actual flow rate is
1.40 times the indicated flow rate.
For detailed data of the conversion factors, please contact KOFLOC.

MJ400195C1
7
5. Troubleshooting
【5-1 No Output】
１
No power
Check the output of the DC power supply.
２
Connector connection failure
Check to see if the connectors are fitted correctly.
３
Cable breakage
Check the continuity with a tester.
４
No gas flow
Check the gas source pressure and gas flow.
５
Clogged piping
Check the solenoid valve, etc. after the outlet.
６
Clogged sensor pipe
Please contact KOFLOC.
７
Sensor amp. failure
Please contact KOFLOC.
８
Indication meter failure
Replace the meter.
【5-2 Unstable Flow Rate Indication】
１
Source pressure valve faulty
Check the supply adjust valve.
２
Constant flow valve faulty
Please contact KOFLOC.
３
Sensor amp. failure
Please contact KOFLOC.
４
Power supply faulty
Please contact KOFLOC.
【5-3 Significantly Different Flow Rate Indication】
２
Gas leak
Piping ･････････････････ Stop the leak.
Sensor, valve ･･････････ Contact KOFLOC.
【5-4 Significantly Different Zero】
１
Incorrect power supply voltage
Replace the power supply.
２
Sensor faulty
Please contact KOFLOC.
3
valve faulty
Please contact KOFLOC.
6. Maintenance
Clean the inlet and outlet joints. They should be removed in a clean place where dust will not enter the
block. During maintenance, never disassemble the sensor.
If it is disassembled, the initial performance cannot be guaranteed.

MJ400195C1
8
7. Product warranty
1. The contents of warranty
①Warranty period
The warrant period shall be one year after the shipment.
②Warranty range
If a malfunction of the product you purchased occurs because of our responsible reasons, offer of substitute
or it will be charge-free repaired in our factory. But if a malfunction of the machine occurs due to the
following reasons, even within the warrant period, it becomes the outside for a warranty.
(a) Malfunctions due to erroneous applications, repairs or remodeling.
(Including the case in which the manufacturing specification differs from the application conditions.)
(b) Malfunctions due to the falling after the purchase.
(c) Malfunctions caused by natural disasters such as fire, earthquake, water disaster and lightning stoke, or
riots or wars.
(d) Malfunctions caused by mixing-in of foreign matters out of the piping.
(e) Malfunctions caused by the peculiar problems due to combinations with other built in equipment.
In addition, a warranty here means the warranty of the product simple substance of our company. So the
damage induced by failure of the products of our company shall be eliminated from the object of
warranty.

MJ400195C1
9
URL：http://www.kofloc.co.jp