Kofloc 3660 User manual

MJ400010H1
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MassFlowController
MODEL3660
InstructionManual
KOJIMA INSTRUMENT INCORPORATION

MJ400010H1
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Read this page before proceeding!
Read this instruction manual fully before installation and application so as to maintain the
performance and safety of the product – Model3660 Series mass flow controller. This enables
preventing accidents and breakages of the product due to an erroneous application method. If
the product has a malfunction or its readjust is required, please notify our branch or agent
near to you of the con- tent of your requirements. As the skilled service men properly
correspond to your requirements, please be sure to obey their instructions. If you make a
repair or remodeling by yourself, a critical accident may occur and together it turns difficult to
secure the normal warranty. So pay particular attention to it. This manual may be partially
varied in future without prior notice for improvements. For delivery of the products, all possible
cautions have been paid. Should any defective points, errors or description omissions exist in
the manual, notify us of them.
The following are picture indications for cautions to be noted-observed before application or
for safe application of the product. They have been made in the instruction manual and on the
specific portions of the product so as to ensure correct application of the product and prevent
injuries to you or other workers or damages to the properties.
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DANGER
:INDICATES AN IMMINENT HAZARDOUSNESS WHICH, IF NOT AVOIDED, WILL RESULT IN DEATH OR SERIOUS
INJURY. THIS SIGNAL WORD IS TO BE LIMITED TO THE
MOST EXTREME SITUATION.
WARNING
:INDICATES A POTENTIAL HAZARDOUSNESS WHICH, IF NOT AVOIDED, COULD RSSULT IN DEATH OR SERIOUS
INJURY.
CAUTION
:INDICATES A POTENTIAL HAZARDOUSNESS WHICH, IF NOT AVOIDED, MAY RESULT IN
MINOR OR MODERATE INJURY. IT MAY ALSO BE USED
TO ALERT AGAINST UNSAFE PRACTICES.
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CONTENTS: Page
1. Specifications ------------------------------------------------------------------
1-1. Specifications --------- ---------------------------------------------------
1-2. Unit of Flow-----------------------------------------------------------------
2. Principle of Operation ---------------------------------------------------------
3. Standard Configuration and Wiring Connection -------------------------
3-1. Standard Configuration --------------------------------------------------
3-2. Electric Connection Diagram -------------------------------------------
3-3. Cautions for Wiring Connection ---------------------------------------
4. Installation and Piping --------------------------------------------------------
4-1. Storage and Application Environment --------------------------------
4-2. Piping System Washing -------------------------------------------------
4-3. In-line Filter ----------------------------------------------------------------
4-4. Securing of The Operational Pressure -------------------------------
4-5. Combined Use of The Stop Value -------------------------------------
4-6. Installation -----------------------------------------------------------------
5. Operational Procedure --------------------------------------------------------
6. Troubleshooting ---------------------------------------------------------------
7. Dimensions ----------------------------------------------------------------------
8. Cautions for Handling ---------------------------------------------------------
9. Product Warranty -------------------------------------------------------------
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1. Specifications
Model 3660 series Mass Flow Controller accurately measures and controls gas flow. This
instrument is used for flow control in a wide range of application including various analyzers,
combustion, and biotechnology.
1-1. Specifications
Model Model 3660 Model 3665
Flow Ranges 50SCCM〜5SLM N2 at 0℃
10〜20 SLM N2at 0℃30〜150 SLM N2at 0℃
Settling Time Within 98%F.S., 2 seconds Within 98%F.S., 3 seconds
Accuracy Within±1.5%F.S. Within±2%F.S.
Repeatability Within±0.5%F.S. Within±0.5%F.S.
Control Range 2 – 100% 5 – 100%
Differential Pressure 49kPa – 294kPa
(F.S. 10SCCM - 5SLM)
98kPa – 294kPa
(F.S. 10SLM - 20SLM)
148kPa – 343kPa
(F.S. 30SLM - 150SLM)
Pressure Resistance 980kPa
Leak Integrity 1 x 10-8 Pam3/s He
Ambient Temperature Within 5 – 45℃
(Accuracywarranty:15 –35℃)
Storing Temperature 60℃(Max.)
Command Input 0.01- 5VDC
(Valve is fully closed at setting input of F.S.2% or less).
Output Signal 0 – 5V DC
PowerSupply
Sensitivity +15V DC 100mA
-15VD 200mA
Electrical Connections Dsub-9Pin Male SEMI standard Reference pin arrangement
Valve Type Normally-closedtype (Solenoid)
Configuration material SUS316,SUS316L, VITON,TEFLON
1-2. Unit of Flow
Our mass flow controller is based on the SEMIE12-91(Semi-standard).
The applied unit is SLM (Standard Liter per Minute) or SCCM (Standard Cubic per Minute).The
status of this gas is the same as the reference(normal) conditions of 0℃, 101.325kPa(abs). If the
applied flow unit and definition thereon differ, inquire us of it or give us your instructions. If the unit
you require is a SI unit or unit approved by the current measuring law, we will make a production
on the basis of the unit you require.

MJ400010H1
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2. Principal of Operational
The detection sensor for Mass Flow is wound
thermo-resistance wires on the outsides of the
two positions (upstream and downstream) of the
metal tubing. Flowing a certain quantity of
current into its wires and self-heating them allow
the thermo-resistance wires on the two positions
to have a balance at the same temperature
during gas with no flow in the metal tubing. When
gas flows in this metal tubing, the
thermo-resistance wires on the up- per flow side
is deprived of heat by the gas, thereby lowering
the temperature. The downstream is conveyed
the heat of the upstream. This raises the
temperature and breaks the initial balance, thus
also causing a difference between the
resistances. The temperature difference of
these positions grows in proportion to the gas
flow amount and a volume of the heat capacity
specified with the specific gravity and specific
heat determines the ratio of the temperature
difference change. The change of the gas flow
amount is caught as a temperature change, that
is, a change of the resistance value, thus
detecting the Mass Flow. (=Principal of the
thermal flow sensor).
Principal of Operation
The change of the Mass Flow is represented as
a change of the voltage signal by the electronic
circuit, through utilization of this principal.
Selecting-mounting a bypass capillary for making
the flow detecting sensor bypass the flow limits
the gas flow in this section, thus enabling the
flow rating to be determined. In addition, mount a
comparative control circuit onto the combination
of the flow detection sensor and control valve for
this Mass Flow, thereby providing it with signals
for setting the flow detection sensor and flow.
The comparative control circuit compares these
two signals. Then if the output signal is smaller
than the setting signal, turn the opening of the
control valve greater, thus changing the current
added to the solenoid valve. The standard valve
is of normal closing type. With the power
not-being ON, the flow route is closed.
Flow Control System Block Diagram
Rus Rds
SENSOR RESISTOR
FLOW
ZERO POINT ⊿T
PROFILE
TEMPERATURE
Bridge circuit
Comparison
Control cicuit
Amplifying
Circuit
Setter
Indicator
Power supply
Gas IN Gas OUT
Solenoid valve
(or piezo valve)
Sensor
±15V
Flow signal
0〜5V
Setting signal
0〜5V
Bypass capillary

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Dsub9S
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Dsub9S
CK-1A
open/close
MFCOUT
POWER+15VDC
POWER-15VDC
POWER COM
FLOW SET Hi
FLOW SET Lo
MFC OUT COM
open/close
MFC OUT
POWER +15VDC
POWER-15VDC
POWER COM
FLOW SET Hi
FLOW SET Lo
MFC OUT COM
VALVE MONITOR
FLOW SET SIG.COM
open/closeSIG.INPUT
VALVE MONITOR
Ｄｓｕｂ１５Ｓ
PSK-FB SERIES
MODEL3440
MFC OUT
MFC OUT COM
POWER +5VDC
POWER COM
Ref+5V
FLOW SET SIG.
POWER +15VDC
POWER -15VDC
VALVE MONITOR
DPM-3
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MASS FLOW CONTROLLER
POWER SUPLY
DISPLAY
COMMAND
open
close
SWTCH
3. Standard Configuration and Wiring Connection
3-1. Standard Configuration
Voltage and capacity required for operating model 3660 series controller.
DC constant voltage and power source: ±15V DC +100mA -200mA
Peripheral appliances (Basic examples)
①DC power source : PSK-1FB 85-132V AC(50/60Hz) 1.0A
②Flow indicator : DPM-3 +5V(±5%) DC 0.12A
③Flow setting appliance : CK-1A(Resistance:10kohm)
④Special-purpose : One(1) set(If 1m or longer cables are
required, cable contact us.)
3-2. Electric Connection Diagram
Example) In the case of a combination of the PSK-1FB and DPM-3;
MODEL 3660 SERIES
Details of the 3660 SERIES controller ready access terminal:
Pin 1(Valve opening-closing input terminal) :
Pin 2(Flow signal output terminal) :
Pin 3(Power input terminal) :
Pin 4(Power input terminal) :
Pin 5(Power input terminal) :
Pin 6(Flow setting signal input terminal Hi) :
Pin 7(Flow output COM terminal) :
Pin 8(Flow setting input LO terminal) :
Pin 9(Valve voltage monitor terminal) :
Full open (For short-circuit with 15V)
Flow control (For opening)
Full closed (For short-circuit with –15V)
0 – 5V (For flow controlling)
+15VDC ±5%
COM
-15VDC ±5%
0.01 – 5V
COM
COM (Isolated from Pins 4 and 7)
0 – 15V

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3-3. Cautions for Wiring Connection
CAUTION
:
The flow setting input of this instrument Model 3660 Series is
ordinarily a differential input. Pin 8 is not connected to other COM line
in the MFC interior. When operating the setting input signal on the
signal end for the purpose other than the use of the appliance, be
sure to connect Pin 8 with other common line (Pin 4 or 7).
CAUTION :
The flow signal output from this instrument Model 3660 Series
reaches +15V DC near the power voltage during valve full
opening. So the circuit to be connected shall be
its-point-considered.
CAUTION
:
The pin arrangement of this instrument Model 3660 Series is in
conformity with the SEMI standards. Our old types (models 3650 and
3750) and other corporations’ types exist, which have connectors on
the same D-sub 9 pin standards, but do not conform to the SEMI
standards.As the erroneous connection causes a critical malfunction,
please check for it.
4. Installation and Piping
For design and piping construction of the instrument and piping of the system including the mass flow
controller, fully read the following matters and perform job with particular attention being paid.
4-1. Storage and Application Environments
Applying this instrument near the equipment such as high frequency induction furnace or in the place in
which various power systems are concentrated may easily intrude noise into the Mass Flow Controller,
thereby interfering normal operation.
Eliminate the noise and prevent its intrusion before application. Avoid application in a place having a
difficulty in maintaining such normal operation.
Avoid storage or application outdoor in direct contact with wind-rain or dusts.
Avoid application under the environment in which drops of water directly fall, or dusts has been
accumulated, or in the atmosphere having a high temperature or corrosive gases. The application in these
places may deteriorate or corrode the electronic parts or cause a connection fault of the cable connection
unit.
Avoid storage or application in a place in which the ambient temperature exceeds 60℃or vibrations occur.
When using the controller with gas being actually flowed, the gas temperature and ambient temperature
must be within 10 – 50℃.
Application out of this range may cause damages of the performance. So pay particular attention to it.
CAUTION
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When installing this instrument, avoid the environment in which an
ambient noise generating source exists, and drops of water or dusts
have accumulated, or the atmosphere in which a high temperature
and corrosive gas exist. Ignoring it may cause a critical malfunction.
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4-2. Washing of The Piping System
Fully internally wash the pipes and appliances (such as the pressure regulator, pressure gauge and stop
valve) used for piping system before the applications there- of. Mixing of dusts, rusts, oil and water makes
an intrusion of their substances into the mass flow controller, thus causing an internal clogging,
deterioration in performance and erroneous operation.
CAUTION
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Never wash the piping system after incorporation of this instrument.
Ignoring it may cause a critical malfunction.
4-3. In-line Filter
It is recommend that an In-Line be installed upstream from the controller to prevent the possibility of any
foreign material entering the flow sensor or control valve. The filtering element should be replaced
periodically or ultrasonically cleaned.
When applying the air fed out of the compressor or fan, a large quantity of oil mist or drops of water may
intrude. So mount an oil filter or water-eliminating filter on the front stage.
Recommended filter size
Maximum flow Filter size
10 – 20SLM 15µ
Up to 30SLM 30µ
4-4. Securing of The Operational Pressure
When operating Model 3660 SERIES Mass Flow Controller correctly, design the piping system so that the
pressure difference between the inlet and outlet sides is always in the range of 49kPa - 294kPa(F.S.10 –
20SLM model: 98 – 294kPa, F.S.30 – 150SLM model: 148 – 343kPa) and additionally gets stable. It is
necessary to mount a pressure regulator on the proper portion of the piping reaching the inlet side of this
instrument, thereby enabling adjustment of the pressure on the inlet side of this instrument. It may also get
necessary to mount a backpressure regulator on the proper portion of the piping on the outlet side of this
instrument so as to keep the differential pressure between the inlet and outlet securely in the range
mentioned-above. In this case, it is recommended to mount a bypass between the inlet and outlet sides.
4-5. Combined Use of The Stop Valve
The control valve of the Mass Flow Controller is intended for minute flow control，not-functioning as a
complete shut-off valve(stop valve). Even when turning the flow setting to zero (0), a small quantity of gas
may flow via the orifice of the control valve. In order to stop the gas flow, additionally mount a stop valve
(solenoid type or manual type) on the proper portion of the piping on the inlet side or outlet side of the
Mass Flow Controller.
4-6. Installation
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When designing the piping system employing the Mass Flow Controller, pay particular attention to that this
instrument may have to be removed for maintenance jobs such as inspection and disassembling washing.
Take into full consideration the arrangement having a space enabling easy removing and reinstallation
piping jobs. During installing this instrument, pay particular attention so that no foreign matters intrude from
the inlet or outlet. Hold attaching the protective caps on the both ends until the installation.
[Installation procedure]
a. Install Model 3660 Series Mass Flow Controller in a clean-dried place in which no impacts and
vibrations occur.
b. Secure a sufficient space allowing span or zero-point adjustments.
c. Perform piping so that it can be easily removed for request for maintenance service to us.
Note): Applying toxic gas may cause a contamination or corrosion in
the Mass Flow Controller due to a piping leak or inproper purging.
Before the application, fully check to ensure that no leaks exist in
the piping, and perform purging with dried N2gas.
d. There exist no limits for installation posture. However, apply Model 3660 Series Mass Flow Controller at
the physically no forcible status. Install it levelly. In the case of other installation postures, perform
zero-point adjustment after the warming-up.
d. When installing Model 3660 Series controller,
existence of an angle piping just in front
of the controller worsens the accuracy a little.
CAUTION
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The valve control of model 3660 series controller is intended for
accurate control, not-having been designed for complete shutting-off.
If a complete shutting-off is required, it is recommended to mount a
shutting-off valve on the inlet or outlet.
CAUTION :
The flow signal output from this instrument Model 3660 series
reaches +15V DC near the power voltage during valve full
opening. So the circuit to be connected shall be
its-point-considered.
CAUTION
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As Model 3660 series Mass Flow Controller does not have a
complete shutting-off valve, a solenoid valve may be separately
mounted. At that time, a small quantity of gas is confined between the
down-flow of the controller and the solenoid valve, thereby causing a
surging during driving of the controller. Pay particular attention to it.
The surging can be weakened by placing the controller closer to the
solenoid valve, or by placing the solenoid valve on the upper-flow
side of the controller.
5. Operation Procedure
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□ Check to ensure that the piping system connection, cable connection and wirings are correct.
□ Securely close the mass flow controller with the solenoid valve and manual stop valve so that gas will
not flow into there.
□ Turn ON the power switch and perform warming-up at least for 15 minutes. This is intended to make
thermal and electric balances of the sensor, thus creating the stable status.
□ When no gases flow, the warming-up is sufficiently conducted and the flow instruction output gets
stable, once clockwise turn the knob on the upper portion of MFC with a small female driver so that the
indicated valve changes by around 20%F.S and the output changes by around 1V. Next,
counterclockwise turn it so that the indicated value gets 0% or 0V. For the adjustment
mentioned-above, be sure to make a zero-point adjustment from the plus side so that the indicated
value or output gets a minus value.
□ If a compensation for errors between our reference calibrator and reference flow meter or a span
periodical calibration is required, perform calibration in the following procedure. Ordinarily the
calibration is not required. If you don’t have a reference flow meter, never move the span pot.
[SPAN CALIBRATION PROCEDURE]:
Connect a reference flow meter to the gas outlet side of the main machine. Add a gas pressure within
the range of the applied pressure to the inlet side and set the flow at 100%(5V DC) F.S. After the
indicated value gets stable at its status, measure the flow. Turn the span pot so that the indication of
the flow meter gets a full-scale flow.
It may take times until the flow gets completely stable. So if the span pot was operated intentionally,
waiting for about 5 minutes until measurement of the flow leads to a calibration with a higher accuracy.
□ Turn the setting of the pressure regulator to zero (0) and open the stop valve. If the working pressure
(inlet side) is below 294kPa, raise it to 294kPa with a pressure regulator. When applying the pressure
regulator in combination with the backpressure regulator, beforehand open the bypass valve or set the
command at around 10%. Then, raise the pressure, while adjusting the inlet pressure regulator and
backpressure regulator together. At this time, adjust the backpressure regulator to a higher value.
When the pressure reaches the working pressure, fix the inlet pressure regulator, set the command to
zero (0) and then, close the bypass valve.
Set the differential pressure between the inlet and outlet sides within the prescribed range, with the
backpressure regulator.