Newport Elite 3 User manual

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Instra

O PERATOR ' S
M ANUAL
EliteTM 3 Active Isolation Workstation/
Active Isolation Module Instruction Manual
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Notes:
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Section 1 — Introduction i
© Newport Corporation
Irvine, California, USA
Part No. 23666, Rev D
IN-12971 (10-98)
EliteTM 3 Active Isolation Workstation/
Active Isolation Module Instruction Manual
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ii
Warranty
Newport Corporation warrants the active isolators and controller to be
free of defects in materials and workmanship for a period of two years
from date of shipment. In the case of OEM applications, this warranty
period is extended to twenty-six (26) months to allow time for integration
of the isolation system into the OEM’s product and shipment to the final
end user. Workstation frames are warranted to be free from defects in
material and workmanship for a period of one year from the date of
shipment. In addition, the laminated honeycomb tops have a lifetime
performance and delamination warranty under normal use and proper
handling. If found to be defective during the warranty period, the product
will either be repaired or replaced at Newport’s option.
To exercise this warranty, write or call your local Newport representative
or contact Newport headquarters in Irvine, California. You will be given
prompt assistance and return instructions.
Repaired or replaced products are warranted for the balance of the original
warranty period or 90 days, which ever is longer.
This warranty does not apply to defects resulting from modifications or
improper use of the system or its component parts.
This warranty is in lieu of all other warranties, expressed or implied,
including any implied warranty of merchantability or fitness for a particular
use. Newport Corporation shall not be liable for any indirect, special, or
consequential damages.
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iii
Contents
Section 1 — General Information .................................................... 1-1
1.0 Specifications ...................................................................................... 1-1
1.1 Introduction .......................................................................................... 1-2
1.2 Getting Started...................................................................................... 1-4
1.3 Unpacking and Inspection .................................................................. 1-4
1.4 Safety Terms.......................................................................................... 1-6
1.5 Workstation Placement........................................................................ 1-6
1.6 Warranty Information .......................................................................... 1-7
1.7 Options and Accessories .................................................................... 1-7
Section 2 — System Assembly............................................................ 2-1
2.1 AIW Frame Installation ........................................................................ 2-1
2.2 Installing the Table Top or Customer Payload ................................ 2-1
2.3 Leveling the Frame .............................................................................. 2-2
2.4 Installing the Horizontal Damping Oil .............................................. 2-4
2.5 Installing the Controller and Cabling ................................................ 2-4
2.6 Options Installation ............................................................................ 2-7
Support Ring ........................................................................................ 2-7
Equipment Shelves .............................................................................. 2-8
Monitor Arm and Base Clamp ............................................................ 2-8
Cable Manager...................................................................................... 2-9
Static Dissipative Table Tops............................................................ 2-10
2.7 Retro-Fitting AIM to the VH IsoStation .......................................... 2-10
Section 3 — Operation............................................................................ 3-1
3.1 Power Up: Systems Integrated by Newport Corporation.............. 3-1
3.2 Power Up: Systems Integrated By the Customer............................ 3-2
3.3 Controller Front Panel Controls..........................................................3-2
3.4 Technician interface to controller .................................................... 3-4
3.4.1 Setting system gains ................................................................ 3-4
3.5 Interface Connections.......................................................................... 3-7
3.6 High Voltage Safety Interlock.............................................................. 3-8
3.7 Serial Communication Connector Pin Connections ........................ 3-8
3.8 Docking Feature Alignment Procedure ..............................................3-8
Section 4 — Troubleshooting.............................................................. 4-1
4.1 Interpretation of Indicator Lights ...................................................... 4-1
4.2 Troubleshooting Tips .......................................................................... 4-1
Section 5 — Service and Maintenance .......................................... 5-1
5.1 Factory Service .................................................................................... 5-1
5.2 Service Form ........................................................................................ 5-1
5.3 Cleaning ................................................................................................ 5-2
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iv
Contents
Section 6 — Spare Parts ........................................................................ 6-1
6.1 Spare Parts List .................................................................................... 6-1
Isolators:................................................................................................ 6-1
Cables:.................................................................................................... 6-1
Controller: ..............................................................................................6-1
Section 7 — Elite 3 Firmware and Software .............................. 7-1
7.1 Scope .................................................................................................... 7-1
7.2 Firmware and Software Installation into PC .................................... 7-1
7.3 Firmware Selection .............................................................................. 7-2
7.4 Firmware Downloading........................................................................ 7-3
7.5 Firmware and Software Upgrading .................................................... 7-4
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v
List of Figures
Figure Page
1.1 Isolator Module ..........................................................................................1-3
1.2 Assembly Orientation................................................................................1-5
1.3 Workstation Shelves & Support Ring ......................................................1-8
1.4 Caster Installation......................................................................................1-9
2.1 Leveling Pad Adjustment..........................................................................2-2
2.2 Shipping Locks ..........................................................................................2-3
2.3 Horizontal Damping Oil Installation........................................................2-4
2.4 Elite 3 – Controller Rear Panel ................................................................2-5
2.5 Installing the Controller and Cabling ......................................................2-6
2.6 Cable Manager Installation ......................................................................2-9
2.7 Ground Strap Attachment ......................................................................2-10
3.1 Elite 3 Front Panel Controls......................................................................3-3
3.2 Interface Software — Main Screen ..........................................................3-4
3.3 Interface Software — Gain Setting Screen ..............................................3-6
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vi
Notes:
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Section 1 — Introduction 1-1
Section 1 — General Information
1.0 Specifications
System Includes: Active Isolation Workstation (AIW):
Frame with independent leveling feet for each
leg, three (or four) Active Isolation Modules
with selection of load range, DSP (Digital Signal
Processor) controller and power supply, and a
selection of table tops and work surfaces.
Active Isolation Modules (AIM):
Three or four Active Isolation Modules with
selection of load range and DSP controller and
power supply.
Isolator Performance Vertical: Active Isolation.
Transmissibility better than –15 dB at 1 Hz,
–30 dB at 10 Hz, –20 dB at 15 to 35 Hz,
–30 dB at frequencies over 40 Hz.
Active vertical isolator travel ±0.0004 inches.
Horizontal: Passive Isolation.
Natural frequency 1.0 Hz. Transmissibility 0
dB at ≤1.6 Hz rolling off at –40 dB per decade
above 1.6 Hz to –30 dB or better. Passive hori-
zontal isolator travel ±0.125 inches.
Maximum Floor Motion Vertical floor motion: Less than 20 microns
peak to peak from DC to 200 Hz.
Horizontal floor motion: Less than 500 microns
peak to peak at any frequency.
Power Requirements 90-250 vac, 50-60 Hz, 4 amps max
Recommended Load must be matched to isolators for optimum
Operating Load performance.
Standard Load 25–250 lb. (11–120 kg) per isolator.
Heavy Load 250–500 lb. (114–227 kg) per isolator.
Docking System Push button from controller front panel.
Control Options TTL level interface from customer system
controller through sync connector on rear panel.
Docking Accuracy < ±0.002 inches (0.05 mm)
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1-2
Dock/Undock time <0.75 sec to actuate.
Settling time after undock is a function of
system leveling. Time is <100 ms seconds for a
perfectly leveled system.
Shipping Locks Integral with Isolation Modules. 3⁄16 inch Allen
wrench implementation. Rated at >1 g horizontal
with maximum per isolator load of 500 lb.
(227 kg).
Vertical deflection Less than 0.0002 inches per lb. of load change at
under changing loads nominal operating load.
Isolator Module Size 12.00 high x 4.00 x 4.00 inches nominal overall.
See figure 1.1.
Controller Size 11.13 wide x 6.50 high x 16.82 deep
Controller Mounting On edge within the AIW frame, rack mount, or
bench mount as customer requires.
Front Panel Controls On/Off, System Reset, Dock/Undock
Front Panel Indicators Power on, Fault, Docked. See Section 4,
Troubleshooting, for complete indicator
definition.
Technician Interface Through RS232 Interface using terminal software
supplied with each system. See Sections 3.3 and
3.3.1. Dock/Undock is customer controllable
through both the TTL Sync interface, Section
3.4, and the front panel switch. The system
responds to whichever signal is the last sensed
Operating Environment Temperature 5-40˚C humidity 90% RH, noncon-
densing.
Storage Environment Temperature -10-60˚C Humidity 90% RH, non-
condensing
1.1 Introduction
The AIW Series Active Isolation Workstation and AIM Series Active Isolation
Modules combine the best features of active and passive vibration isolation
systems. In the vertical direction geophones sense the motion of the iso-
lator modules. The resulting velocity signal is compensated as a function
of frequency by the DSP based controller and fed back through a high
voltage amplifier to a
piezo-electric actuator which lengthens or shortens as required to cancel
ground motion. Maximum gain of the active system is at about 20 Hz.
Mounted between the geophone and the payload is a passive elastomer
isolator with a natural frequency of about 20 Hz depending on payload
weight. As the ground vibration frequency increases above 28 Hz, the elas-
tomer isolator provides increasing isolation at the rate of –40 dB per
decade. Thus, as the active system effectiveness decreases as frequency
increases over 28 Hz, the passive isolator compensates to provide very
good overall system isolation performance.
In contrast to active isolation systems based on pneumatic isolators to
support the payload weight, the AIM/AIW Isolation system offers two
primary advantages:
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Section 1 — Introduction 1-3
• The system is relatively immune to oscillation caused by mechanical
resonances in the payload. The elastomer isolator effectively filters
out most on-board vibration before it can be sensed by the geophone.
• The isolated payload is very stiff vertically. Changes in load center of
gravity have little effect on the levelness of the payload during or after
stage movement. There is no added complexity of air isolators and air
control systems.
Figure 1.1 — Isolator Module
In the horizontal plane isolation is provided by a 1 Hz passive damped
pendulum system. Isolation starts at 1.4 Hz. Since most applications are
more sensitive to vertical vibration than horizontal vibration, this system
provides economical isolation suitable for most applications. Because the
pendulum has a relatively large horizontal travel, ±0.125 inches, it is well
suited for use on the upper floors of multi-story buildings where the hori-
zontal floor motion may be many times the vertical floor motion.
For industrial applications where there is robotic transfer of parts from a
Shipping
Lock
Elastomer
Geophone
Piezo
Pendulum
Top Plate
Stepper
Motor
Docking
Assembly
12.05±.05
Unloaded
Oil Fill
Oil Drain
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1-4
non-isolated base to isolated fab or inspection stations, the AIM and AIW
offer electronically controlled docking. This system restrains the payload
horizontally, under manual or software control, during the time parts are
placed on or picked up from the isolated platform.
The Active Isolation Workstation provides an ideal working platform for
vibration influenced devices such as interferometers, microscopes, and
balances. Because of its extraordinary very low frequency isolation
capability (–15 dB @ 1 Hz) it is particularly well suited for scanning profiling
microscopy applications. Sensitive instruments such as these will show
significant improvements in resolution and repeatability when isolated
from floor motion by the AIW Active Isolation System. This versatile
workstation is available in a broad range of sizes, working surfaces,
isolator capacities, and accessory options.
Special care was taken to ensure excellent performance in the 20–50 Hz
floor vibration frequency range corresponding to dominant ambient
vibration frequencies, especially those common to multifloor buildings.
The modular isolators provide excellent protection against both vertical
and horizontal floor motions. They can be removed for service from the
Active Isolation Workstation without removing the customer payload if
provision is made to support the payload when the isolators are removed.
These workstations integrate Newport’s rigid, laminated honeycomb panel
technology and active isolation systems to provide a custom configurable
isolation system for a variety of applications. The system accommodates
high center of gravity loads with exceptional stability. Equipped with
optional casters, the system is easy to move without heavy equipment and
may be safely lifted by building elevators.
It is possible to tailor the system to a wide variety of applications using
the range of sizes and available working surfaces.
1.2 Getting Started
Please read and understand this instruction manual thoroughly before
beginning the assembly of the AIW Series Workstation. The components
have been partially assembled at the factory and only require final assembly
and performance adjustment tasks. A bubble level is provided to aid in
leveling the system.
The Active Isolation Systems on Workstations integrated at Newport
Corporation are set to a nominal gain level which is suitable for the majority
of applications. Small footprint systems where the payload is very high
may require gain adjustment to optimize performance. See Section 3.3.1.
1.3 Unpacking and Inspection
The AIW Series Workstation and AIM Active Isolation Module components
are packed in labeled boxes. Make sure the total number of delivered
boxes equals the total number listed on the labels. The components are
also labeled for better identification during assembly. Go over the assembly
orientation diagram (figure 1.2) while unpacking and verify the presence of
all ordered parts. Carefully inspect all components for any damage that
may have occurred during shipping. Report any such damage to the
shipping agent at once.
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Section 1 — Introduction 1-5
Figure 1.2 — Assembly Orientation
Support Ring with Armrests
The support ring encircles the top, providing
a mounting surface for shelves and support
ring mounts. Two armrests are included with
the support ring.
Equipment Shelves
One or two equipment shelves attach to the optional support
ring, providing extra storage space without transmitting
vibrations to the work surface.
Sliding Shelves
Available in 6, 10, 14 and 21-inch
widths, these durable laminated
shelves rest on the optional sup-
port ring. Be sure to order one for a
handy place to keep essential
tools, samples or documents close
at hand. Or, for maximum shelf
space, order two — one on each
side of your system.
Support Ring Mounts
Mounts may be moved
anywhere around the
support frame for secure
attachment for virtually
any type of special
equipment. A generous
array of tapped holes
on the top and side sur-
faces permits secure
mounting. Many cus-
tomers order an extra
mount for last-minute
equipment additions.
Casters
With these heavy-duty casters, a
workstation can be quickly and
easily moved by one person.
Elite 3 is also compact enough to
fit in most elevators.
Front Support Bar
Includes two armrests for comfortable
all-day operation of equipment. Also
allows attachment of movable support
ring mount. [Note: Back support bar
without armrests also available.]
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1-6
1.4 Safety Terms
The following safety terms are used in this manual.
The term “Warning” used in the text indicates dangers that could result
in personal injury.
The term “Caution” indicates situations that may result in damage to the
AIM or AIW components.
The following International Symbols are used on the Elite 3 controllers.
Power on
Power off
Protective ground
Caution- refer to accompanying documentation
Alternating current
1.5 Workstation Placement
To ensure optimal performance from the AIW Series Workstation it is
necessary to consider where you place it. Attempt to locate the unit on as
level a surface as possible. Placement on an uneven floor may make
proper frame leveling more difficult. If the unit will be located on floors
other than the ground floor, attempt to place it near primary vertical
building structures such as exterior walls or support columns. This will
minimize the possibility of lower frequency floor motion affecting the
isolation performance. The active vertical isolation system may interact
with floor resonances in the 20 Hz range and may not deliver satisfactory
isolation performance. It is also advisable to avoid locations adjacent to
major sources of floor vibration such as operating machinery.
The AIW only minimally attenuates vibrations which originate on the
isolated platform. Mechanical disturbances, such as cooling fans in
equipment mounted on the isolated platform, will reduce the apparent
performance of the AIW. Likewise, because sound pressure waves imping-
ing on the isolated platform will degrade isolation quality. Very noisy envi-
ronments should be avoided.
WARNING
If installation site is susceptible to earthquakes it is recommended
that the legs be securely fastened to the floor. The Newport
Earthquake Restraint Kit can be used for this purpose. Instructions
are included with the Earthquake Restraint Kit.
!
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Section 1 — Introduction 1-7
1.6 Warranty Information
Warranty information may be found on the page preceding the Table of
Contents of this manual. Should it be necessary to exercise the warranty,
contact your Newport representative to determine the correct course of
action. Newport Corporation maintains offices in the United States and
worldwide. Check the back cover of this manual for the addresses and
phone numbers of these offices.
1.7 Options and Accessories
Options and Accessories for the AIW Series Workstations include the
following:
Controller Support Bracket Figure 2.5
Support Ring with Armrests Figures 1.2 & 1.3
Support Ring Mounts Figure 1.2
Equipment Shelves Figures 1.2 & 1.3
Sliding Shelves Figure 1.2
Casters Figures 1.2 & 1.4
Clamp Kit Not Shown
Earthquake Restraint Kit Not shown
Elite Cleat (P/N 25177-01) Not shown
Cable Manager Figure 2.6
Monitor Arm Section 2.6
Ground Strap Figure 2.7
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1-8
Figure 1.3 — Workstation Shelves and Support Ring
1 P/N 20387 Front uprights
2 P/N 20385 Mount brackets
3 P/N 21252 Brace
4 P/N 20657 H-shaped rear frame
5 P/N 20380 Shelf assembly
6 P/N 20305 Support arm corners
7 P/N 20306 Support ring tubes
8 P/N 3847-BA-252 Cup pt. set
1
2
34
5
8
9
7
10 11
12
13
15 14
6
9 P/N 20389-01 Washer, neoprene
10 P/N 3664-BA-244 Screw, button HD
11 P/N 20308 Support arm bracket
12 P/N 3941-JO-0905-060 Flat washer
13 P/N 3751-AF-248 Hex head screw
14 P/N 3941-0829-048 Flat washer
15 P/N 17054-03 Screw, hex head (thread cutting)
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Section 1 — Introduction 1-9
Figure 1.4 — Caster Installation
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1-10
Notes:
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Section 2 — System Assembly 2-1
Section 2 — System Assembly
2.1 AIW Frame Installation
Adjust the leveling pads on the bottoms of the legs as shown in figure 2.1.
Rotate the pads until approximately 3⁄8inch (9 mm) of thread remains out-
side the leg and jam nut.
If casters have been ordered, extend the leveling pads to provide floor
clearance and fasten the caster assemblies to the frame legs at the
pre-drilled and tapped locations on the lower legs (figure 1.4) using the
supplied hardware. Transfer the load to the casters by simply retracting
the leveling pads into the legs once assembly is completed. Before operating
the workstation, adjust the leveling feet as described above.
2.2 Installing the Table Top or Customer Payload
WARNING
The unloaded table top can weigh as much as 250 lb. (114 kg) and cus-
tomer payloads as much as 1500 lb. (680 kg). It is important to ensure
that adequate personnel are available when installing the table top or
employ the use of a forklift or hoist
Lift the table top and carefully place it on the frame. Use a ruler to ensure
that the top is approximately centered on the frame . The AIW and AIM hor-
izontal isolators do not incorporate a self centering device so it is neces-
sary to keep the shipping locks engaged when placing the table top or
payload to ensure all isolators are centered and work together.
As total payload weight approaches the specified limit per isolator (250 or
500 lbs), it is critical that the payload be positioned so that the isolators
are equally loaded. In four isolator systems, the payload should be centered
over the four isolators. In three isolator systems, the payload must be
positioned off-center towards the two-isolator side of the triangle formed
by the three isolators. If any of the isolators are overloaded, the system
may drag and isolate poorly.
CAUTION
If the Isolation modules contain the docking feature, additional proce-
dures must be followed to insure correct docking alignment.
See section 3.5 procedures
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