NT-MDT NTEGRA Solaris Probe NanoLaboratory User manual

NTEGRA Solaris
Probe NanoLaboratory
(configuration based on inverted optical
microscope Olympus X-71)
Instruction Manual
2012
Copyright © “NT-MDT”
Web Page: http://www.ntmdt.com
General Information: [email protected]
Technical Support: [email protected]
NT-MDT Co., building 100,
Zelenograd, 124482, Moscow, Russia
Tel.: [phone]
Fax: [phone]

Read me First!
Observe safety measures for operation with devices containing sources of laser radiation.
Do not stare into the beam. A label warning about the presence of laser radiation is
attached to the laser sources (Fig. 1).
Fig. 1
Before you start working with the instrument, get acquainted with the basic safety
measures and the operation conditions for the instrument!
If you are a beginner in scanning probe microscopy, we recommend you to familiarize with
basic SPM techniques. “Fundamentals of Scanning Probe Microscopy” by V.L. Mironov
gives a good introduction to the subject. This book is available free of charge at
http://www.ntmdt.com/manuals.
Feedback
Should you have any questions, which are not explained in the manuals, please contact the
Service Department of the company ([email protected]) and our engineers will give you
comprehensive answers. Alternatively, you can contact our staff on-line using the ask-on-
line service (http://www.ntmdt.com/online).

User’s documentation set
The following manuals are included into the user‟s documentation set:
●Instruction Manual –is the guidance for the preparation of the instrument and other
equipment for operation on various techniques of Scanning Probe Microscopy. The
contents of the user‟s documentation set may differ in dependence on the delivery set
of the instrument.
●SPM Software Reference Manual –is the description of the control program
interface functions, all commands and functions of the menu and, also a description of
the Image Analysis module and the Macro Language “Nova PowerScript”.
●Control Electronics. Reference Manual –is the guide to SPM controller,
Thermocontroller and Signal Access module.
Some equipment, which is described in the manuals, may not be included into your
delivery set. Read the specification of your contract for more information.
The manuals are updated regularly. Their latest versions can be found in the site of the
company, in the section “Customer support” (http://www.ntmdt.com/support).

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NTEGRA Solaris Probe NanoLaboratory
Table of Contents
1. BASIC INFORMATION ......................................................................................................................... 5
1.1. PURPOSE OF THE NTEGRA SOLARIS................................................................................................ 5
1.2. DESCRIPTION OF MAIN COMPONENTS .............................................................................................. 6
1.2.1. Inverted Optical Microscope Olympus IX71......................................................................... 7
1.2.2. NTEGRA Base Unit............................................................................................................... 8
1.2.3. XY Scanning Exchangeable Mount ....................................................................................... 9
1.2.4. SNOM Measuring Head...................................................................................................... 11
1.2.5. Optical Fiber Probe ............................................................................................................ 13
1.2.6. Laser Module ...................................................................................................................... 14
1.2.7. Photomultiplier Modules..................................................................................................... 15
1.2.8. SPM Controller ................................................................................................................... 17
1.2.9. Vibration Isolation Table .................................................................................................... 17
1.2.10. Optical Viewing System.................................................................................................. 18
1.3. THEORY OF OPERATION OF NTEGRA SOLARIS.............................................................................. 18
1.4. SAFETY MEASURES ........................................................................................................................ 23
1.5. OPERATING CONDITIONS ................................................................................................................ 25
1.6. STORAGE AND TRANSPORT INSTRUCTIONS ..................................................................................... 27
2. FIRST TIME INSTALLATION ........................................................................................................... 28
2.1. ASSEMBLY OF MAIN MODULES ...................................................................................................... 28
2.2. INSTALLATION OF INTERCONNECTIONS BETWEEN PARTS OF THE INSTRUMENT .............................. 32
3. PREPARATION OF THE NTEGRA SOLARIS PNL FOR OPERATION ..................................... 33
3.1. MAIN STEPS OF PREPARATION FOR OPERATION ............................................................................. 33
3.2. CABLE CONNECTIONS..................................................................................................................... 33
3.3. INSTALLATION OF THE PROBE INTO THE MEASURING HEAD ........................................................... 36
3.4. ASSEMBLY OF THE LASER MODULE................................................................................................ 39
3.5. PREPARATION AND INSTALLATION OF THE OPTICAL FIBER IN THE LASER MODULE ....................... 42
3.6. LOADING THE SAMPLE.................................................................................................................... 44
3.7. INSTALLATION OF THE MEASURING HEAD ON THE SCANNING MOUNT .......................................... 44
3.8. ASSEMBLY OF OPTICAL SCHEME FOR TRANSMISSION MODE.......................................................... 46
3.9. ASSEMBLY OF OPTICAL SCHEME FOR REFLECTION MODE.............................................................. 49
4. MEASUREMENT PROCEDURE ........................................................................................................ 54
4.1. SETTING OF THE INSTRUMENT CONFIGURATION ............................................................................. 54
4.2. LOADING SCANNER CALIBRATION PARAMETERS ........................................................................... 55
4.3. SETTING OF THE PHOTOMULTIPLIER MODULE PARAMETERS .......................................................... 57
4.4. SEARCH FOR RESONANCE FREQUENCY........................................................................................... 59
4.5. PROBE LANDING ............................................................................................................................. 62
4.6. SCANNING....................................................................................................................................... 64
4.6.1. Setting of Scanning Parameters .......................................................................................... 64
4.6.2. Triggering of Scanning ....................................................................................................... 66
4.6.3. Methods of Improving Image Quality ................................................................................. 67
4.7. SAVING OF MEASUREMENT RESULTS ............................................................................................. 68
4.8. TERMINATION OF MEASUREMENTS................................................................................................. 68
5. MAINTENANCE.................................................................................................................................... 70
5.1. ADJUSTING THE DISPLACEMENT SENSORS...................................................................................... 70
5.2. SCANNER CALIBRATION.................................................................................................................. 73

Chapter 1. Basic Information
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1. Basic Information
1.1. Purpose of the NTEGRA Solaris
The NTEGRA Solaris PNL is a specialized SPM measurement system built on the
NTEGRA platform. A SNOM measuring head lies in the basis of this system.
SNOM techniques are used to study near-surface optical characteristics (including
luminescent and spectral) of various objects with resolution much greater than the
diffraction limit. The higher resolution is gained by exposing samples with light going
through a diaphragm whose aperture is much less than the wavelength of the radiation
detected. The surface under study lies in the near field of the diaphragm (at distances of
about 10 nm).
The most advanced technologies used in the design of the system and the powerful
software make the NTEGRA Solaris PNL easy to adapt it to a broad variety of research
tasks and to use it in research laboratories, universities and scientific centers. For example,
to study biological objects, for optics quality control, to study light emitting semiconductor
structures, properties of nano-optical and integrated optics components, to investigate
characteristics of nano-electronic elements and quantum dots spectra, in particular.
The NTEGRA Solaris PNL can be used to solve the following problems:
●Measure surface topography of the sample under investigation;
●Measure surface optical properties (reflection and transmission coefficients,
distributions of luminescent characteristics);
●Carry out measurements for local spectral characteristics;
●Perform nano-lithography operations (including optical lithography on photosensitive
samples and thermo-lithography).

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1.2. Description of Main Components
Main components of the NTEGRA Solaris PNL
The following parts are included in the basis configuration of the NTEGRA Solaris PNL:
1. Inverted Optical Microscope Olympus IX71 (item. 1.2.1 on page 7).
2. NTEGRA Base Unit (item. 1.2.2 on page 8).
3. XY Scanning Exchangeable Mount (item. 1.2.3 on page 9).
4. SNOM Measuring Head (item. 1.2.4 on page 11).
5. Optical Fiber Probe (item. 1.2.5 on page 13).
6. Laser Module (item. 1.2.6 on page 14).
7. Photomultiplier Modules (item. 1.2.7 on page 15).
8. SPM Controller (item. 1.2.8 on page 17).
9. Vibration Isolation Table (item. 1.2.9 on page 17).
10. Optical Viewing System (item. 1.2.10 on page 18).
An overall view of the NTEGRA Solaris PNL in given in Fig. 1-1.
Fig. 1-1. Overall view of the NTEGRA Solaris PNL
1 –microscope Olympus IX71; 2 –NTEGRA base unit; 3 –scanning mount;
4 –scanning measuring head; 5 –optical viewing system; 6 –laser module

Chapter 1. Basic Information
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Investigation of optical characteristics with resolution better than the diffraction limit is
performed with a SNOM scanning measuring head equipped with an optical fiber probe.
The probing beam is coupled into the probe by means of a laser module. An optical
viewing system is employed both to select an area of the sample for investigation and to
control the approach of the probe to the sample. The scanning mount of an original design
makes it possible to obtain both SMOM images of the sample under study and its optical
images using the inverted microscope. The objective of the inverted microscope is located
in the scanning mount, which incorporates systems of coarse and fine focusing. This gives
the opportunity to use high-resolution objectives (including immersion ones). In addition to
the system of coarse manual positioning of the sample, the scanning mount incorporates a
system of precision XY positioning, which can be used for XY scanning. A vibration
isolation table equipped with a dynamic vibration protection system also contributes to
getting high resolution during measurements.
1.2.1. Inverted Optical Microscope Olympus IX71
The inverted optical microscope Olympus IX71 is used to obtain both SNOM (or other
SPM) images and ordinary optical images. This microscope incorporates an optical system,
which, in the case of transparent samples, can be used for visual control of the approach
process and to read optical signals by means of a photomultiplier unit.
Fig. 1-2. Inverted optical microscope Olympus IX71

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1.2.2. NTEGRA Base Unit
The NTEGRA base unit is used to install the scanning mount on it. In addition,
the measuring head and the scanning mount are connected to the controller by means of
this unit.
The base unit accommodates the approach system, which is used to perform both the
motorized approach of the objective to the sample by means of a stepper motor and manual
using the drive knob 1.
Fig. 1-3. Main components of the base unit
1 –approach system drive knob; 2 –approach lever;
3 –temperature and humidity sensor; 4 –LC-display,
The LC-display 4 contains information about ambient temperature and humidity, which is
measured by sensor 3.
Connectors of the base unit
Connectors for the devices mounted on the base unit:
HEAD –two identical connectors for connecting measuring heads;
SCANNER –for connecting scanners. It is used for connecting either
changeable scanners or the measuring head scanner;
SCAN+SENSOR –for connecting scanners / scanners with built-in sensors. It is used
for connecting either changeable scanners or the measuring head
scanner;
T–for connecting the heater. It is used to connect heating stages, liquid flow cells
with heaters etc;
SM –for connecting the stepper motor of the measuring head motorized stage;
AFAM –for connecting the ultra-sonic transducer;
BV –for feeding the bias voltage.

Chapter 1. Basic Information
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Connectors for connecting the base unit with the controllers of the control system:
CONTROLLER 1 –for connecting the SPM controller;
CONTROLLER 2 –for connecting the SPM controller;
CONTROLLER T–for connecting the thermo-controller.
NOTE. Connectors BV, SCANNER and HEAD (located closer to the central aperture of
the base unit) are not used in this configuration due to specifics of the design of the
instrument.
1.2.3. XY Scanning Exchangeable Mount
The XY scanning exchangeable mount (further in the text called “scanning mount”)
(Fig. 1-4) is installed on the NTEGRA base unit. The measuring head is, in turn, mounted
on the scanning mount.
PNL NTEGRA Solaris is supplied with a scanning mount of one of two modifications
providing different XY scan ranges, 50×50 mm or 100×100 mm.
a) with the sample holder
б) without the sample holder
Fig. 1-4. XY scanning optical exchangeable mount
1 –measuring head seats; 2 –measuring head positioning screws;
3 –XY positioner microscope screws; 4 –sample holder; 5 –spring clips;
6 –auxiliary mirror slots; 7 –XY scanner; 8 –spring stops;
9 –inside “cup”; 10 – outside “cup”
When setting the scanning mount on the inverted optical microscope for optical
measurements on transparent samples, a microscope objective is placed into the scanning
mount.

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The objective is placed into the inside “cup” 9 of the scanning mount, which is a part of the
approach system. Coarse focus of the objective on the area of interest is adjusted by means
of the approach system of the base unit. Fine focus of the objective is adjusted by means of
the Z-scanner of the scanning mount. Such a system makes it possible to employ high-
resolution objectives, including immersion ones. To achieve high resolution, it is essential
to integrate the objective and the sample holder into a single mechanical system so as to
reduce relative vibrations and drifts.
The sample is placed on a microscope slide, which in turn is fixed on the sample holder 4
(Fig. 1-4) by means of spring clips 5. The measuring head is placed on seats 1 of the
scanning mount. Translation of the sample with respect to the objective in the XY plane is
done by means of the microscope screws 3 and spring stops 8. Screws 2 are used to
translate the measuring head in the XY plane with respect to the sample surface. The
optical viewing system, whose auxiliary mirror is fixed in slots 6, is recommended for
more accurate selection of an area for investigation.
The scanning mount is used to solve the following problems:
●Translate the sample with respect to the probe and the objective (if available) to select
an area for investigation;
●Scanning;
●Focus the objective onto the sample surface.
The XY scanner 7 is employed to translate the sample of interest in the XY plane under the
measuring head probe to select an area for investigation, and also during scanning. The
built-in position sensors make it possible to move the sample with high linearity and
repeatability as they minimize the influence of piezo-ceramics hysteresis and creep.
Scanning by means of the XY scanner is more linear compared with scanning-by-probe,
especially when using SNOM techniques as the scanned area can be always kept in the
focus of the objective.
Scanning mount technical specifications
Measuring head travel, XY 5×5 mm;
Sample travel 5×5 mm;
Sample minimum step resolution 5 µm;
Scanning range, XY 50×50 µm/100×100 μm;
Objective travel by means of the Z-scanner 45 µm.