PI S-314.10 User manual

User Manual
S310T0001, valid for S-310, S-311, S-314, S-315 and S-316
KSch, 10/15/2019
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone [phone]
-0, Fax [phone], Email inf[email protected]s, www.pi.ws
S-310 and S-314 Lift Platforms, and S-311,
S-315 and S-316 Lift and Tip/Tilt Platforms,
with Clear Aperture

User Manual
S310T0001, valid for S-310, S-311, S-314, S-315 and S-316
KSch, 10/15/2019
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 2 / 36
Phone [phone]
-0, Fax [phone], Email inf[email protected]s, www.pi.ws
Contents
About this Document 4
Symbols and Typographic Conventions............................................................................................................... 4
Other Applicable Documents .............................................................................................................................. 5
Downloading Manuals......................................................................................................................................... 5
Safety 6
Intended Use ....................................................................................................................................................... 6
General Safety Instructions ................................................................................................................................. 7
Organizational Measures..................................................................................................................................... 7
Product Description 7
Model Overview .................................................................................................................................................. 7
Product View ....................................................................................................................................................... 8
Product Labeling.................................................................................................................................................. 9
Scope of Delivery............................................................................................................................................... 10
Suitable Electronics ........................................................................................................................................... 11
S-310.10, S-314.10 ........................................................................................................................................................ 11
S-311.10, S-315.10 ........................................................................................................................................................ 11
S-316.10 ........................................................................................................................................................................ 11
S-316.10H...................................................................................................................................................................... 12
Control............................................................................................................................................................... 12
Dynamic Behavior.............................................................................................................................................. 15
Calculating Moments of Inertia for Mirror and Mirror Mount .....................................................................................15
Calculating the Resonant Frequency of the Tip/Tilt Platform.......................................................................................17
Installation 19
General Notes on Installation............................................................................................................................ 19
Grounding the S-31x.......................................................................................................................................... 20
Attaching the Mirror onto the S-31x ................................................................................................................. 21
Mounting the S-31x ........................................................................................................................................... 24
Connecting the S-31x to the Electronics............................................................................................................ 25
Start-Up and Operation 26
General Notes on Start-Up and Operation........................................................................................................ 26
Starting Up and Operating the S-31x................................................................................................................. 27
Discharging the S-31x ........................................................................................................................................ 27

User Manual
S310T0001, valid for S-310, S-311, S-314, S-315 and S-316
KSch, 10/15/2019
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 3 / 36
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Maintenance 28
Cleaning the S-31x 28
Customer Service 29
Technical Data 29
Data Table.......................................................................................................................................................... 29
Maximum Ratings.............................................................................................................................................. 31
Ambient Conditions and Classifications ............................................................................................................ 32
Dimensions 33
Pin Assignment 34
Voltage Connection of S-31x.10 ........................................................................................................................ 34
Sensor Connection of S-316.10 ......................................................................................................................... 34
Voltage and Sensor Connection of S-316.10H................................................................................................... 34
Old Equipment Disposal 36
EU Declaration of Conformity 36

User Manual
S310T0001, valid for S-310, S-311, S-314, S-315 and S-316
KSch, 10/15/2019
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 4 / 36
Phone [phone]
-0, Fax [phone], Email inf[email protected]s, www.pi.ws
About this Document
This user manual contains information necessary for the intended use of the S-31x platforms. It
assumes that the reader has a fundamental understanding of basic servo systems as well as
motion control concepts and applicable safety procedures.
This user manual is valid for the following products:
S-310.10 lift platform
S-314.10 lift platform
S-311.10 lift and tip/tilt platform
S-315.10 lift and tip/tilt platform
S-316.10 and S-316.10H lift and tip/tilt platforms
Symbols and Typographic Conventions
CAUTION
Dangerous situation
If not avoided, the dangerous situation will result in minor injury.
Actions to take to avoid the situation.
NOTICE
Dangerous situation
If not avoided, the dangerous situation will result in damage to the equipment.
Actions to take to avoid the situation.
INFORMATION
Information for easier handling, tricks, tips, etc.
The following symbols and markings are used in the user manuals of PI:
Symbol Meaning
1.
2.
Action consisting of several steps whose sequential order must be
observed
Action consisting of one or several steps whose sequential order is
irrelevant
List item
S. 5 Cross-reference to page 5

User Manual
S310T0001, valid for S-310, S-311, S-314, S-315 and S-316
KSch, 10/15/2019
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 5 / 36
Phone [phone]
-0, Fax [phone], Email inf[email protected]s, www.pi.ws
Warning signs affixed to the product that refer to detailed information
in this document.
Other Applicable Documents
Product Document
E-727.3SD/E-727.3SDA digital multi-channel piezo controllers
for SGS
E727T0005 technical note
E-509.S3 sensor/servo controller module PZ77E user manual
E-503.00S piezo amplifier module PZ62E user manual
E-505.00 piezo amplifier module
E-501.00 9.5’’ chassis for modular piezo controller system
E-500.00 19" chassis for modular piezo controller system,
1 to 3 Channels
E-518.I3 interface module E518T0001 technical note,
PZ214E user manual
E-610.S0 piezo controller/amplifier PZ70E user manual
E-625.SR piezo servo controller for strain gauge sensors PZ167E user manual
The current versions of the user manuals are available for download on our website.
Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 29).
INFORMATION
For products that are supplied with software (CD in the scope of delivery), access to the
manuals is protected by a password. Protected manuals are only displayed on the
website after
entering the password.
The password is included on the CD of the product.
For products with CD: Identify the password
1. Insert the product CD into the PC drive.
2. Switch to the Manuals directory on the CD.
3. In the Manuals directory, open the Release News (file including releasenews in the file
name).
4. Find the user name and the password in the section "User login for software download"
in the Release News.

User Manual
S310T0001, valid for S-310, S-311, S-314, S-315 and S-316
KSch, 10/15/2019
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 6 / 36
Phone [phone]
-0, Fax [phone], Email inf[email protected]s, www.pi.ws
Downloading Manuals
1. Open the website www.pi.ws.
2. If access to the manuals is protected by a password:
a) Click Login.
b) Log in with the user name and password.
3. Click Search.
4. Enter the product number up to the period (e.g., P-882) or the product family (e.g.,
PICMA® Bender) into the search field.
5. Click Start search or press the Enter key.
6. Open the corresponding product detail page in the list of search results:
a) If necessary: Scroll down the list.
b) If necessary: Click Load more results at the end of the list.
c) Click the corresponding product in the list.
7. Scroll down to the Downloads section on the product detail page.
The manuals are displayed under Documentation.
8. Click the desired manual and save it to the hard disk of your PC or to a data storage
medium.
Safety
Intended Use
Both S-310 and S-314 platforms provide motion along the Z axis, whereas S-311, S-315 and
S-316 offer tip/tilt motion additionally. For details regarding travel ranges refer to “Model
Overview” (p. 7).
Based on its design and realization, an S-31x platform is intended to position an optical
component, as for example, a mirror with a typical load of 3 g to 6.5 g.
The S-31x platform can be mounted horizontally or vertically. It is a laboratory device as defined
by DIN EN 61010-1. It is intended to be used in interior spaces and in an environment which is
free of dirt, oil and lubricants.
The intended use of the S-31x platform is only possible in combination with suitable electronics
that is available from PI.

User Manual
S310T0001, valid for S-310, S-311, S-314, S-315 and S-316
KSch, 10/15/2019
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 7 / 36
Phone [phone]
-0, Fax [phone], Email inf[email protected]s, www.pi.ws
General Safety Instructions
The S-31x is built according to state-of-the-art technology and recognized safety standards.
Improper use can result in personal injury and/or damage to the S-31x.
Only use the S-31x for its intended purpose, and only use it if it is in a good working order.
Read the user manual.
Immediately eliminate any faults and malfunctions that are likely to affect safety.
The operator is responsible for the correct installation and operation of the S-31x.
Organizational Measures
User manual
Always keep this user manual available with the S-31x.
The latest versions of the user manuals are available for download (p. 5) on our website.
Add all information from the manufacturer to the user manual, for example supplements
or technical notes.
If you give the S-31x to other users, also include this user manual as well as other relevant
information provided by the manufacturer.
Only use the device on the basis of the complete user manual. Missing information due to
an incomplete user manual can result in minor injury and damage to equipment.
Only install and operate the S-31x after you have read and understood this user manual.
Personnel qualification
The S-31x may only be installed, started up, operated, maintained, and cleaned by authorized
and appropriately qualified personnel.
Product Description
Model Overview
Model Description
S-310.10 Piezo actuator, clear aperture, 6 μm, LEMO connectors
S-311.10 Piezo Z/ tip/tilt platform, clear aperture, 600 μrad, 6 μm, LEMO connectors
S-314.10 Piezo actuator, clear aperture, 12 μm, LEMO connectors
S-315.10 Piezo Z/ tip/tilt platform, clear aperture, 1.2 mrad, 12 μm, LEMO connectors
S-316.10 Piezo Z/ tip/tilt platform, clear aperture, 1.2 mrad, 12 μm, SGS, LEMO
connectors
S-316.10H Piezo Z/ tip/tilt platform, clear aperture, 1.2 mrad, 12 μm, SGS,
Sub-D 37-pin (m)

User Manual
S310T0001, valid for S-310, S-311, S-314, S-315 and S-316
KSch, 10/15/2019
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 8 / 36
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INFORMATION
The open-loop models (S-310 to S-315) are ideal for applications where the position is
controlled by an external loop based on data provided by a sensor (e.g. quad cell, CCD chip).
Product View
Figure 1: Example view of an S-316.10H
1Axis X (corresponds to channel 1 on the E-727.3SD/A controller)*
2Axis Y (corresponds to channel 2 on the E-727.3SD/A controller)*
3Base body
4Piezo voltage cable
5Sensor cable (only S-316)
6Housing
7Motion platform with aperture
* The assignment of the axes X and Y in Figure 1 only applies under the following conditions:
It applies to the S-311, S-315, and S-316 models
This lift and tip/tilt platform was calibrated at PI with electronics that can perform
coordinate transformation (E-727.3SD/A)
Tilting is not possible with the S-310 and S-314 models.
If electronics are used that cannot perform coordinate transformation (e.g. E-509.S3 with
E-503.00), the user must determine the assignment of axes himself and perform coordinate
transformation separately.

User Manual
S310T0001, valid for S-310, S-311, S-314, S-315 and S-316
KSch, 10/15/2019
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 9 / 36
Phone [phone]
-0, Fax [phone], Email inf[email protected]s, www.pi.ws
Product Labeling
Labeling Description
S-316.10H Product name (example), the characters following the period refer to the
model
116010244
Serial number (example), individual for each S-31x
Meaning of the places (counting from left):
1 = internal information
2 and 3 = year of manufacture
4 to 9 = consecutive numbers
Manufacturer's logo
Country of origin:
Germany Country of origin
Warning sign "Observe manual!"
Old equipment disposal (p. 36)
CE conformity mark
WWW.PI.WS Manufacturer's address (website)
Symbol for the protective earth conductor
S-31x.10: Labeling of the LEMO connections
Figure 2: LEMO connections of the models without sensor
1 Piezo connection labeled PZT1
2Piezo connection labeled PZT2
3Piezo connection labeled PZT3

User Manual
S310T0001, valid for S-310, S-311, S-314, S-315 and S-316
KSch, 10/15/2019
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 10 / 36
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-0, Fax [phone], Email inf[email protected]s, www.pi.ws
Figure 3: LEMO connections of S-316.10, model with sensor
1 Sensor connection labeled
CH1
2Sensor connection labeled CH2
3Sensor connection labeled CH3
4Piezo connection labeled PZT1
5Piezo connection labeled PZT2
6Piezo connection labeled PZT3
S-316.10H: Labeling of the Sub-D 37 (m) connector
Figure 4: Sub-D 37 (m) connector on the connection cable of the S-316.10H
1 Warning sign "Residual Voltage": Notice of risk of electric shock
(p. 7)
Scope of Delivery
Item ID Components
S-31x Lift platform or lift and tip/tilt platform as specified in the order
PZ277EK Short instructions for S-3xx piezo tip/tilt platforms

User Manual
S310T0001, valid for S-310, S-311, S-314, S-315 and S-316
KSch, 10/15/2019
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 11 / 36
Phone [phone]
-0, Fax [phone], Email inf[email protected]s, www.pi.ws
Suitable Electronics
S-310.10, S-314.10
Amplifier Dimensions Interfaces
E-505.00 piezo amplifier module,
2 A, -30 to 130 V, 1 channel
E-500.00 19" chassis for
modular piezo controller
system, 1 to 3 channels
Optional: E-518.I3 interface
module, 3 channels, TCP/IP, USB
and RS-232 interfaces
E-610.00 piezo amplifier, 1 channel,
OEM module, -30 to 130 V
7 HP / 3RU -
S-311.10, S-315.10
Amplifier Dimensions Interfaces
E-503.00 piezo amplifier module,
-30 to 130 V, 3 channels
E-501.00 9½'' chassis for
modular piezo controller
system, 1 to 3 channels
Optional: E-518.I3 interface
module, 3 channels, TCP/IP, USB
and RS-232 interfaces
3 x E-505.00 piezo amplifier module,
2 A, -30 to 130 V, 1 channel
E-500.00 19" chassis for
modular piezo controller
system, 1 to 3 channels
Optional: E-518.I3 interface
module, 3 channels, TCP/IP, USB
and RS-232 interfaces
3 x E-610.00 piezo amplifier,
1 channel, OEM module,
-30 to 130 V
7 HP / 3RU -
S-316.10
Controller Amplifier Dimensions Interfaces
E-509.S3 sensor / piezo
servo-control module,
strain gauge sensors,
3 channels
E-503.00 piezo
amplifier module,
-30 to 130 V,
3 channels
E-501.00 9½'' chassis for
modular piezo controller
system,
1 to 3 channels
Optional: E-518.I3 interface
module, 3 channels, TCP/IP,
USB and RS-232 interfaces
E-509.S3 sensor / piezo
servo-control module,
strain gauge sensors,
3 channels
3 x E-505.00 piezo
amplifier module,
2 A, -30 to 130 V,
1 channel
E-500.00 19" chassis for
modular piezo controller
system,
1 to 3 channels
Optional: E-518.I3 interface
module, 3 channels, TCP/IP,
USB and RS-232 interfaces
3 x E-610.S0 piezo controller/amplifier,
OEM module, 1 channel, -30 to 130 V, SGS
sensor
7 HP / 3 RU -
3 x E-625.SR piezo amplifier / servo controller ,
1 channel, -30 to 130 V,
SGS sensor, USB, RS-232
205 mm × 105 mm ×
60 mm
-

User Manual
S310T0001, valid for S-310, S-311, S-314, S-315 and S-316
KSch, 10/15/2019
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 12 / 36
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S-316.10H
Controller Dimensions Interfaces
E-727.3SD digital multi-channel piezo
controller, 3 channels, -30 to 130 V,
sub-D 37 socket, strain gauge sensors
221 mm × 240.10 mm ×
116.60 mm
-
E-727.3SDA digital multi-channel piezo
controller, 3 channels, -30 to 130 V,
sub-D 37 socket, strain gauge sensors, analog
inputs
221 mm × 240.10 mm ×
116.60 mm
-
Control
S-310 to S-316 tilt platforms are equipped with three low-voltage (0 to 100 V) piezo actuators
spaced at 120° intervals.
With the S-310 and S-314 platforms only motion in Z axis is possible. Their three PZTs are
electrically connected in parallel.
In addition, the S-311, S-315 and S-316 platforms provide tip/tilt motion. With these platforms
all three PZTs can be driven individually.
Control of the tip/tilt versions is complicated because expansion of an individual piezo actuator
can affect both θX and θY rotation. Therefore the linear travel in Z and the tip/tilt angles in θX
and θY are interdependent.
External coordinate transformation (software or hardware) is required to allow platform
position commands in θX and θY coordinates.
An example for how to calculate the linear travel and the tip/tilt angles depending on the linear
displacements of the piezo actuators is given below.
Example calculation of linear travel and tip/tilt angles
There are many ways to define the axes and tip/tilt angles. The definitions you use will depend
on the geometry of your application.
The geometry shown in Figure 5 and the calculation of distance aand the diameter Øare based
on a system with the Y-axis passing through one of the actuators (designated PZT3).
See also “Product View” on p. 8 for more information on assignment of axes.

User Manual
S310T0001, valid for S-310, S-311, S-314, S-315 and S-316
KSch, 10/15/2019
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 13 / 36
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Figure 5: Triple-piezo-drive tip/tilt platform geometry, viewed from above.
1 Cable exit
X X axis as defined by the calibration at PI
Y Y axis as defined by the calibration at PI
PZT1 to PZT3 Piezo actuators
a Distance between PZT3 and PZT2/PZT1 along the Y axis
b Distance between PZT1 and PZT2
Ø Diameter of circle of centers of the piezo actuators
αTilt angle around X axis, depending on linear displacement of the
piezo actuators
βTilt angle around Y axis, depending on linear displacement of the
piezo actuators
Calculation of distance a and diameter Ø
Calculation of tip/tilt angles α and β and linear travel in Z
The following formulas show the relationship between the displacement of each piezo actuator
(from the bottom limit of the travel range = extension at 0 V) and the tip/tilt angles (in radians).
The formulas use the sin α = α approximation, making it valid for small angles, covering the full
travel range of the lift and tip/tilt platform.

User Manual
S310T0001, valid for S-310, S-311, S-314, S-315 and S-316
KSch, 10/15/2019
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 14 / 36
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with:
α= Tip/tilt angle in θX, measured around axis X as defined by the calibration at PI [mrad]
β= Tip/tilt angle in θY, measured around axis Y as defined by the calibration at PI [mrad]
A = Linear displacement of PZT3 [µm]
B = Linear displacement of PZT2 [µm]
C = Linear displacement of PZT1 [µm]
Z = Linear displacement of the platform center (i.e. travel in Z axis)
Example calculation for S-315 and S-316 lift and tip/tilt platforms
Ø = 13.9 mm
a = 10.4 mm
b = 12.0 mm
A, B, C: 0 to 12 µm (range of linear displacement of the piezo actuators)

User Manual
S310T0001, valid for S-310, S-311, S-314, S-315 and S-316
KSch, 10/15/2019
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 15 / 36
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Dynamic Behavior
The maximum operating frequency of a piezo tip/tilt platform depends on the following factors:
Bandwidth of amplifier, controller, and sensor
Resonant frequency of the tip/tilt platform including mirror and where appropriate,
mirror mount
The resonant frequency is estimated in two steps:
a) Calculating the moments of inertia for mirror and mirror mount (p. 15)
b) Calculating (p. 17) resonant frequency of the tip/tilt platform including mirror and
mirror mount.
Calculating Moments of Inertia for Mirror and Mirror Mount
Calculating the distance from the axis through the center of gravity of the mirror to
the rotational axis
Before the moment of inertia of the mirror is calculated, it is necessary to calculate the distance
from the axis through the center of gravity of the mirror to the rotational axis of the platform.
When a mirror mount is used, it must be included in the calculation.
Figure 6: Example diagram: Platform with mirror mount and mirror
1 Mirror
2Axis through the center of gravity of the mirror
3Axis through the center of gravity of the mirror mount
4Mirror mount (example of a geometry)
5Axis through the pivot point of the platform of the S-335 ("rotational axis")
6Platform

User Manual
S310T0001, valid for S-310, S-311, S-314, S-315 and S-316
KSch, 10/15/2019
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 16 / 36
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Figure 7: Example diagram: Platform with mirror mount and mirror; here with variables required for
calculating the moments of inertia
dSDistance from the axis through the center of gravity of the mirror to the rotational axis
dH Distance from the axis through the center of gravity of the mirror mount to the rotational axis
H/2 Half the mirror thickness
hHThickness of the mirror mount
T Distance from the rotational axis to the platform surface (see "Data Table" (p. 29))
H Mirror thickness
Formula for calculating the distance from the axis through the center of gravity of the mirror to
the rotational axis of the platform:
When a mirror is attached without a mirror mount:
When a mirror is attached with a mirror mount:
with:
dS= Distance from the axis through the center of gravity of the mirror to the rotational axis
[mm]
H = Mirror thickness [mm]
hH= Thickness of the mirror mount [mm]
T = Distance from the rotational axis to the platform surface [mm], see "Data Table" (p. 29)

User Manual
S310T0001, valid for S-310, S-311, S-314, S-315 and S-316
KSch, 10/15/2019
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 17 / 36
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Calculating the moment of inertia of the mirror
Formula for calculating the moment of inertia of a rotationally symmetric mirror:
Formula for calculating the moment of inertia of a rectangular mirror:
with:
IS,P = Moment of inertia of the mirror, in relation to the rotational axis [g•mm2]
mS= Mirror mass [g]
R = Mirror radius [mm]
L = Mirror length perpendicular to the rotational axis [mm]
H = Mirror thickness [mm]
dS= Distance from the axis through the center of gravity of the mirror to the rotational axis
[mm]; for calculation see separate formulas (p. 15)
Calculating the moment of inertia of the mirror mount
with:
IH,P = Moment of inertia of the mirror mount, in relation to the rotational axis [g•mm2]
IH= Moment of inertia of the mirror mount, dependent on the geometry of the mirror mount
[g•mm2]
mH= Mass of the mirror mount [g]
dH= Distance from the axis through the center of gravity of the mirror mount to the rotational
axis of the platform [mm], see above illustration (p. 15)
Calculating the Resonant Frequency of the Tip/Tilt Platform
Mirror without mirror mount
When the mirror is mounted without a mirror mount, the resonant frequency of the system is
calculated with the following formula:

User Manual
S310T0001, valid for S-310, S-311, S-314, S-315 and S-316
KSch, 10/15/2019
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 18 / 36
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with:
f' = Resonant frequency of the S-335 with mirror [Hz]
f0= Resonant frequency of the unloaded S-335 [Hz]; see "Data Table" (p. 29)
I0= Moment of inertia of the platform of the S-335 [g•mm2], see "Data Table" (p. 29)
IS,P = Moment of inertia of the mirror, in relation to the rotational axis, [g•mm2]; calculation see
separate formulas (p. 17)
Mirror with mirror mount
When the mirror is mounted with a mirror mount, the resonant frequency of the tip/tilt
platform is calculated with the following formula:
with:
f' = Resonant frequency of the S-335 with mirror and mirror mount [Hz]
f0= Resonant frequency of the unloaded S-335 [Hz], see "Data Table" (p. 29)
I0= Moment of inertia of the platform of the S-335 [g•mm2], see "Data Table" (p. 29)
IS,P = Moment of inertia of the mirror, in relation to the rotational axis, [g•mm2]; for calculation
see separate formulas (p. 17)
IH,P = Moment of inertia of the mirror mount, in relation to the rotational axis, [g•mm2];
calculation see separate formula (p. 17)
Further information on dynamic or static operation can be found in the PI catalog (CAT 130), in
the section "Fundamentals of Piezo Technology". The catalog can be downloaded from our
website http://www.pi.ws under Service > Downloads > Catalogs, Brochures & Certificates.

User Manual
S310T0001, valid for S-310, S-311, S-314, S-315 and S-316
KSch, 10/15/2019
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 19 / 36
Phone [phone]
-0, Fax [phone], Email inf[email protected]s, www.pi.ws
Installation
General Notes on Installation
CAUTION
Dangerous voltage and residual charge on piezo actuators!
The S-31x is driven by piezo actuators. Mechanical shock, temperature changes and
compressive stresses will cause high voltages to be developed. Touching the contacts of the
S-31x can lead to minor injuries. In addition, the piezo actuators can be destroyed by an abrupt
contraction.
Do not open the S-31x.
Discharge the piezo actuators of the S-31x before installation:
Connect the S-31x to the switched-off PI controller for 10 seconds.
Do not pull out the connector from the electronics during operation.
NOTICE
Unsuitable cables!
Unsuitable cables can damage the electronics.
Only use cables from PI for connecting the S-31x to the electronics.
NOTICE
Warping of the S-31x due to mounting on uneven surfaces!
Mounting the S-31x on an uneven surface can warp the S-31x. Warping reduces the accuracy.
Mount the S-31x on an even surface. The recommended evenness of the surface
is ≤30 µm.
For applications with large temperature changes:
Only mount the S-31x on surfaces that have the same or similar thermal expansion
properties as the S-31x.
INFORMATION
Extended cables can affect the performance of the S-31x.
If you need longer cables, contact our customer service department (p. 29).

User Manual
S310T0001, valid for S-310, S-311, S-314, S-315 and S-316
KSch, 10/15/2019
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 20 / 36
Phone [phone]
-0, Fax [phone], Email inf[email protected]s, www.pi.ws
Grounding the S-31x
The S-31x does not feature a separate protective earth connection but must be connected
conductively with a surface that is connected to a protective earth conductor.
Requirements
You have read and understood the safety precautions (p. 19).
Tools and accessories
Screws and alignment pins of suitable length, for details see “Mounting the S-31x”
(p. 24)
Suitable tool
Figure 8: The three M2.5 through holes and the through holes with a Ø of 2.7 mm are to be used to
mount the S-31x onto a surface that is connected to a protective earth conductive
Grounding the S-31x
Attach the S-31x to a surface which is connected to a protective earth conductor:
1. Make sure that the contact resistance is <0.1 ohm at 25 A at all connection points
relevant for mounting the protective earth conductor.
2. Tighten the used M2.5 screws to the surface using the threaded mounting holes with at
least three rotations and a torque of 0.6 Nm.
For further details refer to “Mounting the S-31x” (p. 24)