Raith ELPHY Quantum User manual

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Hardware Operation Manual
ELPHY Quantum and ELPHY Plus

Product: ELPHY Quantum and ELPHY Plus
Document number: 07-8-9911-101-1.00
Date generated: Thursday, August 16, 2007
Statement All information in this document has been carefully prepared and are
believed to be accurate and complete. If doubts exist about any detail
or additional information is necessary, please inquire Raith GmbH or
their accredited representative.
Copyright © 2007 by Raith GmbH. All rights reserved.
Trademarks
Microsoft, Windows,
and Windows 2000,
Windows XP
are the registered trademarks of Microsoft,
Inc.
AutoCAD, DXF are the registered trademarks of Autodesk,
Inc.
GDSII is the registered trademark of Calma GE.
Addresses
Raith GmbH Tel.: [phone] – 0
Hauert 18 Fax.: [phone] – 5
44227 Dortmund WWW: www.raith.com
Germany Email: [email protected]m
Raith USA, Inc. Tel.: [phone]
2805 Veterans Hwy Fax.: [phone]
Suite 23 WWW: www.raith.com
Ronkonkoma, New York Email: [email protected]

1 Introduction 5
1.1 Using this manual 5
1.2 Notes, cautions, and warnings 5
1.3 Navigating through the manuals 6
2 ELPHY Plus and ELPHY Quantum Hardware
Guide 7
2.1 Overview 7
2.2 Connection Overview 12
2.3 General Installation Considerations 14

5
1 Introduction
1.1 Using this manual 5
1.2 Notes, cautions, and warnings 5
1.3 Navigating through the manuals 6
1.1 Using this manual
Make sure that you use the system correctly by reading the operation
manual before usage carefully.
Keep the operation manual on hand to read it whenever necessary.
Contact directly Raith or your local representative whenever you are
uncertain about operating your system.
1.2 Notes, cautions, and warnings
Stickers on the left column provide you with the following messages:
A note emphasizes information requiring special attention.
A caution message appears when special handling is necessary to
prevent product damage.
A dedicated warning message appears when special handling is
necessary to prevent personal injury or death.
The same stickers are displayed at the instrument. Should any of the
stickers be missing please notify Raith. Raith will send a replacement.

1 Introduction
6
1.3 Navigating through the manuals
This manual provides information about
• safety and handling procedure for system and personal safety,
• startup, standby, shutdown, and bakeout procedures
Information on the task-oriented operation of the system as well as the
user interface is given in separate documents.
You can read the manual from beginning to end. This is highly
recommended but rarely done. Be sure to read the safety remarks.

7
2 ELPHY Plus and ELPHY Quantum
Hardware Guide
2.1 Overview 7
2.2 Connection Overview 12
2.3 General Installation Considerations 14
The following guide describes the basic components of the ELPHY
Plus and the ELPHY Quantum attachment systems.
2.1 Overview
A system consists of the following:
•A high end PC computer system with software;
•PCI pattern generator card or one electronics 19'' rack;
•Interface cables.
Options include:
•Beam blanker electronic control unit;
•Beam blanker hardware for the SEM column;
•Universal sample holder;
•Picoammeter;
•Motorized stage controller.
2.1.1 PC System
A high end PC system is supplied with the system. The ELPHY Plus
will have a PCI SCSI card installed for communication with the
pattern generator. The ELPHY Quantum will have PCI pattern
generator installed. The PC may have a GPIB (IEEE-488) interface
card for communication with a Keithley Picoammeter. An additional
network card is installed for communication with certain SEM
models. An onboard network interface can be used for connection to
an in-house LAN.

2 ELPHY Plus and ELPHY Quantum Hardware Guide
8
2.1.2 ELPHY Quantum
The ELPHY Quantum is a full length PCI multi layer card. The card
requires one PCI slot and two access slots at the rear of the PC.
The PCI card provides the following interface:
•X DAC scan output;
•Y DAC scan output;
•TTL level beam blank control signal output;
•Video input from the SEM;
•TTL level SEM external control switching signal;
•IO port for Raith use.
The input and output levels are factory set to match the users SEM.
Figure 1
ELPHY Quantum
board connections
at the rear of the
PC.
TTL BEAM BLANK
Y DAC OUTPUT
X DAC OUTPUT
VIDEO IN EXTERNAL/INTERNAL
I/O-PORT
2.1.3 ELPHY Plus
The ELPHY Plus is a 19in. advance rack-based system to reduce
electronic noise. Apart from the interface signals the ELPHY
Quantum provides, the ELPHY Plus also has:
•A SCSI interface to the PC;
•X Y beam shift inputs;
•Video out to a monitor (BAS out);
There are also additional manual controls and visual indicators:

2.1 Overview
9
•A switch for inverting the SEM external control signal;
•A switch for inverting the beam blank control signal;
•A toggle switch to reset the hardware;
•Two LED bar displays to indicate the beam position;
•LED to indicate beam blank signal;
•LED to indicate SEM external control signal;
•Power button and indicator.
Figure 2
Front and rear panels of
the ELPHY Plus.
Output
Dac
X
Input
Shift
X
YY
Beam Blank
OUT
SEM
Extern
OUT
SCSI
IN
VIDEO IN BAS OUT
I/O
RS-232
POWER
Elphy Plus
Power
Reset SEM
Mode
Beam
Y-Deflection X-Deflection

2 ELPHY Plus and ELPHY Quantum Hardware Guide
10
2.1.4 Electronic Beam Blanker Control Unit
The beam blanker control unit consists of a high voltage power supply
and associated control electronics. It accepts a TTL signal from the
ELPHY Quantum or ELPHY Plus to switch the high voltage on or
off. Typical output of the high voltage is 200 volts. The high voltage
is applied to the beam blanker hardware plates to deflect the electron
beam.
Zeiss FEG SEM systems will be supplied with a 19in. rack system.
This unit has 8kV input and output and requires installation by Zeiss.
2.1.5 Beam Blanker Hardware
The beam blanker hardware is install on the SEM column by either
Raith or the SEM manufacture. Further information should be
obtained from the SEM manufacture if installed by them.
Basic hardware consists of two parallel plates, one connected to
ground and the other to the high voltage. Some systems have
mechanical adjustment for positioning the plates concentric to the
electron beam.
Figure 3
Beam blanker schematic.
+ V
e-
Spray Aperture
V applied
Filament
V off
Electrons entering the beam
blanker will be deflected when a
voltage +V is applied. A spray
aperture further down the
column prevents the electrons
from reaching the surface of the
sample.
When V=0 the electrons are
allowed to pass through the
spray aperture and therefore to
reach the sample surface.
2.1.6 Universal Sample Holder
The universal sample holder is a convenient way to mount small chip
size samples. A simple clamping system holds the sample in place.
There is room to have several samples and a calibration sample, e.g.
Chessy. An inbuilt Faraday cup enables the user to measure the total

2.1 Overview
11
beam current at the specimen surface. The holder is provided with a
base to match the users SEM stub mount.
Figure 4
Universal Sample
Holder.
Figure 5
Principle of the Faraday
Cup.
e-
Picoammeter
Electrons entering the Faraday
cup strike the internal surface.
Some are absorbed; some will
cause secondary emission. The
secondary emission electrons
will be absorbed when they do
not have sufficient energy to
cause further secondary emission
events.
The cup is sufficiently deep to
prevent lose of electrons from
the small aperture.
A Picoammeter measures the
absorbed current.
2.1.7 Picoammeter
Either a portable battery powered meter, or a high end Keithley meter
can be supplied. A BNC cable is provided to connect to the SEM
absorbed current output on the stage. If a Keithley has been supplied,
then a GPIB interface board may also be present in the PC. The GPIB
board is an option.
Sample clamp
Faraday Cup

2 ELPHY Plus and ELPHY Quantum Hardware Guide
12
2.1.8 Motorized Stage Control
Most modern SEM’s will have a motorized stage. Control can be via
RS-232, TCP/IP, or sometimes GPIB. Some SEM stages can be retro
fitted with motors and a suitable control unit, e.g. from Deben.
2.2 Connection Overview
The following section illustrates the basic connections needed for an
attachment system.
The basic connection requirement are: X Y DAC output of the pattern
generator to the SEM external scan interface; and the video input from
a detector on the SEM, usually the SEI signal. Optional connections
include:
•Control to switch the SEM to external scan mode;
•TTL signal to the beam blanker electronics;
•RS-232 for SEM computer control;
•TCP/IP for SEM computer control;
•RS-232 for Stage control.
The ELPHY Plus must have a SCSI terminator installed if no other
devices are connected to the SCSI chain.

2.2 Connection Overview
13
2.2.1 ELPHY Quantum
Figure 6
Typical ELPHY
Quantum connection
diagram.
X DAC Output
TTL Beam Blank Output
Y DAC Output
Video Input
External mode SEM Switch
SEM Interface
Beam Blanker Electronics
Quantum Card
RS-232 SEM Control
TCP/IP SEM Control
RS-232 Stage Control Stage Interface
PC Options

2 ELPHY Plus and ELPHY Quantum Hardware Guide
14
2.2.2 ELPHY Plus
Figure 7
Typical ELPHY Plus
connection diagram.
2.3 General Installation Considerations
2.3.1 Power Supply
All systems are supplied with a power distribution board. The PC,
monitor, ELPHY Plus, Beam Blanker Electronics, Stage controller,
Picoammeter, when supplied should all be plugged into the
distribution board. The power for the board should be taken from the
X DAC Output
TTL Beam Blank Output
Y DAC Output
Video Input
External mode SEM Switch
SEM Interface
Beam Blanker Electronics
Elphy Plus
RS-232 SEM Control
TCP/IP SEM Control
RS-232 Stage Control Stage Interface
PC, and Options
SCSI To PC SCSI Card

2.3 General Installation Considerations
15
same line supply as the SEM to ensure the same earth ground. If
necessary, a second ground wire to the SEM ground point may be
installed.
Taking power from a separate supply may result in earth ground
loops. If possible, take the supply from the SEM utility power output.
Check the line power supply voltage matches before connecting to the
SEM utility output and switching on.
2.3.2 Cables
The cables should be tidy and routed away from any mains or heavy
current carrying cables.
2.3.3 Electronic equipment
Electronic equipment can sometimes interfere with the SEM column.
Therefore, if a Keithley Picoammeter for example has been supplied,
position the meter away from the SEM column.
2.3.4 Systems with EDX Option
Some SEM installations will have an EDX option installed. In such a
case there may be a switch box, which will switch between the X Y
output of the ELPHY Quantum or ELPHY Plus and the X Y output of
EDX system. The video signal may also be switched.

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