Raith ELPHY Quantum User manual

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Hardware Operation Manual
ELPHY Quantum and ELPHY Plus

Product: ELPHY Quantum and ELPHY Plus
Document number: 07-8-9911-101-1.00
Date generated: Thursday, August 16, 2007
Statement All information in this document has been carefully prepared and are
believed to be accurate and complete. If doubts exist about any detail
or additional information is necessary, please inquire Raith GmbH or
their accredited representative.
Copyright © 2007 by Raith GmbH. All rights reserved.
Trademarks
Microsoft, Windows,
and Windows 2000,
Windows XP
are the registered trademarks of Microsoft,
Inc.
AutoCAD, DXF are the registered trademarks of Autodesk,
Inc.
GDSII is the registered trademark of Calma GE.
Addresses
Raith GmbH Tel.: [phone] – 0
Hauert 18 Fax.: [phone] – 5
44227 Dortmund WWW: www.raith.com
Germany Email: [email protected]m
Raith USA, Inc. Tel.: [phone]
2805 Veterans Hwy Fax.: [phone]
Suite 23 WWW: www.raith.com
Ronkonkoma, New York Email: [email protected]

1 Introduction 5
1.1 Using this manual 5
1.2 Notes, cautions, and warnings 5
1.3 Navigating through the manuals 6
2 ELPHY Plus and ELPHY Quantum Hardware
Guide 7
2.1 Overview 7
2.2 Connection Overview 12
2.3 General Installation Considerations 14

5
1 Introduction
1.1 Using this manual 5
1.2 Notes, cautions, and warnings 5
1.3 Navigating through the manuals 6
1.1 Using this manual
Make sure that you use the system correctly by reading the operation
manual before usage carefully.
Keep the operation manual on hand to read it whenever necessary.
Contact directly Raith or your local representative whenever you are
uncertain about operating your system.
1.2 Notes, cautions, and warnings
Stickers on the left column provide you with the following messages:
A note emphasizes information requiring special attention.
A caution message appears when special handling is necessary to
prevent product damage.
A dedicated warning message appears when special handling is
necessary to prevent personal injury or death.
The same stickers are displayed at the instrument. Should any of the
stickers be missing please notify Raith. Raith will send a replacement.

1 Introduction
6
1.3 Navigating through the manuals
This manual provides information about
• safety and handling procedure for system and personal safety,
• startup, standby, shutdown, and bakeout procedures
Information on the task-oriented operation of the system as well as the
user interface is given in separate documents.
You can read the manual from beginning to end. This is highly
recommended but rarely done. Be sure to read the safety remarks.

7
2 ELPHY Plus and ELPHY Quantum
Hardware Guide
2.1 Overview 7
2.2 Connection Overview 12
2.3 General Installation Considerations 14
The following guide describes the basic components of the ELPHY
Plus and the ELPHY Quantum attachment systems.
2.1 Overview
A system consists of the following:
•A high end PC computer system with software;
•PCI pattern generator card or one electronics 19'' rack;
•Interface cables.
Options include:
•Beam blanker electronic control unit;
•Beam blanker hardware for the SEM column;
•Universal sample holder;
•Picoammeter;
•Motorized stage controller.
2.1.1 PC System
A high end PC system is supplied with the system. The ELPHY Plus
will have a PCI SCSI card installed for communication with the
pattern generator. The ELPHY Quantum will have PCI pattern
generator installed. The PC may have a GPIB (IEEE-488) interface
card for communication with a Keithley Picoammeter. An additional
network card is installed for communication with certain SEM
models. An onboard network interface can be used for connection to
an in-house LAN.

2 ELPHY Plus and ELPHY Quantum Hardware Guide
8
2.1.2 ELPHY Quantum
The ELPHY Quantum is a full length PCI multi layer card. The card
requires one PCI slot and two access slots at the rear of the PC.
The PCI card provides the following interface:
•X DAC scan output;
•Y DAC scan output;
•TTL level beam blank control signal output;
•Video input from the SEM;
•TTL level SEM external control switching signal;
•IO port for Raith use.
The input and output levels are factory set to match the users SEM.
Figure 1
ELPHY Quantum
board connections
at the rear of the
PC.
TTL BEAM BLANK
Y DAC OUTPUT
X DAC OUTPUT
VIDEO IN EXTERNAL/INTERNAL
I/O-PORT
2.1.3 ELPHY Plus
The ELPHY Plus is a 19in. advance rack-based system to reduce
electronic noise. Apart from the interface signals the ELPHY
Quantum provides, the ELPHY Plus also has:
•A SCSI interface to the PC;
•X Y beam shift inputs;
•Video out to a monitor (BAS out);
There are also additional manual controls and visual indicators:

2.1 Overview
9
•A switch for inverting the SEM external control signal;
•A switch for inverting the beam blank control signal;
•A toggle switch to reset the hardware;
•Two LED bar displays to indicate the beam position;
•LED to indicate beam blank signal;
•LED to indicate SEM external control signal;
•Power button and indicator.
Figure 2
Front and rear panels of
the ELPHY Plus.
Output
Dac
X
Input
Shift
X
YY
Beam Blank
OUT
SEM
Extern
OUT
SCSI
IN
VIDEO IN BAS OUT
I/O
RS-232
POWER
Elphy Plus
Power
Reset SEM
Mode
Beam
Y-Deflection X-Deflection