ULTRA TEC ULTRAPOL Advance User manual

ULTRAPOL
Advance
(3250.1)
Lapping and Polishing Machine
User Manual
(3255.1)
Issue 2.3
(Updated June, 2017)
1025 E Chestnut Ave
Santa Ana, CA 92701
Toll Free (US) 1 877 542 0609
Tel: [phone] Fax: [phone]
e-mail: [email protected]
www.ultratecusa.com

**Note: System shown above is complete with the Ultracollimator system.

The information in this document is subject to change without notice. The authors assume no responsibility for any
error that may appear.
Regulatory Agency Certification
The Ultrapol Advance (Part Number ) has been tested and certified to meet the guidelines of 21 CFR 1040.10 and
1040.11 for CDRH Compliance.
The Ultrapol Advance is a Class IIIa laser autocollimator assisted device that incorporates a number of CDRH
mandated safety features, including but not limited to an emission indicator and chassis interlocks to bring the
manufacturer into compliance with U.S. government regulations.

TABLE OF CONTENTS Page
I. INTRODUCTION .......................................................................................................................................- 1 -
A. Scope of Use...............................................................................................................................................- 1 -
B. Parts List –What’s included ......................................................................................................................- 1 -
C. Power Supply .............................................................................................................................................- 1 -
D. Specifications .............................................................................................................................................- 1 -
E. Labels and Warnings..................................................................................................................................- 2 -
F. Suggested Services / supplies.....................................................................................................................- 3 -
G. Optional Services / supplies .......................................................................................................................- 3 -
II. INSTALLATION AND OVERVIEW........................................................................................................- 4 -
A. Installing Ultrapol Advance .......................................................................................................................- 4 -
B. Operating the Ultrapol Advance Safely......................................................................................................- 7 -
C. Overview of Functions...............................................................................................................................- 8 -
D. Operator Controls/Features ......................................................................................................................- 11 -
E. Work holders and Accessories .................................................................................................................- 12 -
III. CALIBRATION.........................................................................................................................................- 15 -
A. Mechanical Alignment .............................................................................................................................- 15 -
B. Optical Alignment (Ultracollimator)........................................................................................................- 19 -
IV. PREPARATION FOR FLAT POLISHING............................................................................................- 19 -
A. Mounting a Bare Die Sample ...................................................................................................................- 19 -
B. Aligning Sample for Parallel Polishing with the Ultracollimator............................................................- 20 -
C. Load Control ............................................................................................................................................- 21 -
D. Correcting for Observed Tilt during polishing.........................................................................................- 22 -
V. APPLICATIONS .......................................................................................................................................- 23 -
A. Topside Delayering of Single Die IC’s ....................................................................................................- 23 -
B. Backside Preparation................................................................................................................................- 23 -
C. Cross-sectioning of Die / Packages..........................................................................................................- 25 -
D. Other Lapping & Polishing Applications.................................................................................................- 25 -
VI. PREVENTATIVE MAINTENANCE ......................................................................................................- 26 -
A. Clean Up...................................................................................................................................................- 26 -
B. Flushing the recirculation pump...............................................................................................................- 26 -
C. Reconditioning the Polyurethane Lap (6208.9)........................................................................................- 27 -
VII. ACCESSORIES, CONSUMABLES & SPARES....................................................................................- 28 -
APPENDICES.......................................................................................................................................................- 31 -
Appendix A –Timer Manual.............................................................................................................................- 32 -
Appendix B –CE Certification..........................................................................................................................- 35 -
Appendix C –Wiring Diagram..........................................................................................................................- 36 -

- 1 -
I. INTRODUCTION
A. Scope of Use
ULTRAPOL advance is a self-contained lapping and polishing machine capable of preparing wide range of
materials and sample types for subsequent use in various forms of microscopy, production and R&D.
B. Parts List –What’s included
Part #
Description
Main Hardware
3250.1
Ultrapol Advance Unit (110-240V)
3255.1
User Manual
5259.1
Power Cord
Accessories
(Included)
2239.1
8” Aluminum platen
3230.1
Slurry tray
3275.1
Accessories case includes below
3260.1
Mechanical alignment indicator
3281.1
Set of loading weights 100g, 200g (2), 500g
3278.1
Squeegee
6170.1
Quick release plate 1mm hole
6170.2
Quick release plate 2mm hole
6377.U
Allen wrench set 7/64” w/ handle, 7/64” and 9/64”
**Optional Features
Ultracollimator
System
6183.UL
Ultracollimator unit
5259.1
Power Cord
6135.1
Metal optical flat
6158.AD
Recirculating Pump
C. Power Supply
The Ultrapol Advance has one power supply:
Input 110-220VAC 10A 50/60Hz
Output 120VAC 1A
D. Specifications
Part Number: 3250.1
Dimensions: 22 x 22x 15.5 in3
Weight: Approximately 90 lbs.
The Ultrapol Advance is used for flat lapping/polishing of materials and/or semiconductor devices.
One laser at 660nm adjustable power output up to 5mW internally.
CDRH Class IIIa with interlocks.

- 2 -
DANGER
MAX RADIANT POWER <3mW
WAVELENGTH 660nm
LASER RADIATION
DO NOT STARE INTO BEAM OR
VIEW WITH OPTICAL INSTRUMENTS
CLASS IIIa LASER PRODUCT
E. Labels and Warnings
Center for Devices and Radiological Health (CDRH) –
The United States Food and Drug Administration’s Center for Devices and Radiological Health (CDRH) is
the agency responsible for enforcing federal regulations regarding radiation-emitting devices in the U.S.
Because laser light is a form of radiation, it is monitored by CDRH, and we at Ultra Tec Manufacturing,
Inc. have an obligation to the government, to ourselves and most importantly, to our customers to ensure
that our products adhere to these regulations. Protecting consumers and complying with federal guidelines
are our top priorities.
The code of the Federal Regulations (CFR) is the set of government guidelines set forth by CDRH that
manufacturers of various products must follow. Specifically, guidelines 21 CFR 1040.10 and 1040.11
detail the standards that all laser products must meet. To comply with Federal regulations, all laser system
manufacturers must ensure that their products contain mandated safety features, register their products with
CDRH, and properly label each device with its respective warning data.
Laser products are regulated by CDRH based on the level of radiation emitted at a particular wavelength.
They are grouped into specific classes according to their maximum emission level.
Per requirements of various federal and multinational regulatory agencies all labels and warnings displayed
on or in the ASAP-1 are documented herein.
Certification and Identification:
Located on the rear panel
Class IIIa Laser:
Located on the face of the Ultracollimator LCD box just
below the Beam On/Off switch.
MODEL: Ultrapol Advance
SERIAL: 39945
LOCATION/DATE OF MFG:
Santa Ana, CA
October 2008
__________________________
CERTIFICATION: This product
complies with 21 CFR 1040.10
AND 1040.11
___________________
Ultra Tec Mfg., Inc.
1025 E. Chestnut Ave.
Santa Ana, CA 92701

- 3 -
AVOID EXPOSURE
Laser radiation is emitted
from this aperture
Aperture Warning:
Located on the front of the Ultracollimator LCD Box just below the monitor and perpendicular to the
aperture.
Access Panel and Safety Interlock Warning:
Located on rear panel of the Ultracollimator LCD box.
Located on the Ultracollimator unit housing.
F. Suggested Services / supplies
Strong flat workbench (with 1m x 1m available)
Hot and Cold water available
Lint-free wipes
Acetone
Isopropyl alcohol
Double sided tape
D.I. Water
Q-tips / cotton buds
G. Optional Services / supplies
Ultrasonic Cleaner (with heater)
INFRATEC Infrared microscope
UV Lamp (if using curable epoxies for wafer reinforcement)
DANGER
Laser radiation when open.
AVOID DIRECT EYE EXPOSURE.
DANGER
Laser radiation when open and interlock
defeated.
AVOID DIRECT EYE EXPOSURE

- 4 -
II. INSTALLATION AND OVERVIEW
A. Installing Ultrapol Advance
i. Mechanical
The main hardware is shipped as two items; the Base Unit and the Mast Head assembly.
The Base Unit should be placed on a flat, sturdy bench.
The Mast Head assembly may then be installed on the Base Unit, by use of the ‘base lock lever’
positioned at the rear bottom of the head assembly. The protruding nut and bolt should be inserted into
the wide radius section of the ‘keyhole’ on the top right rear of the base. The head may then be slid to
its ‘zero’ position (the position where Mast head assembly cannot go further forward towards the front
and is parallel with the base plate). At this point the base lock lever may be turned to lock the head
into position.
ii. Coolant
Coolant is an important part of the polishing process. The Solenoid Water Actuation system is
generally used. Feed your water source into the back of the polisher, using the supplied nose piece and
switch the Coolant Switch to the on position on the front panel. Water will begin to pump onto the
polishing surface. Adjust the water pressure with the valve on the side of the faucet.
iii. Drain
The Base needs to be placed for convenient drainage. The drain exits from the rear panel through a
fitting onto which the supplied drain hose is pressed. This drain can be fed into a container (a gallon
plastic container is usually convenient). Alternatively, the feed may be directed into the facility drain,
if faucets are used.

- 5 -
Pump bracket ensures pump remains securely in position.
iv. Electrical
The voltage of the Ultrapol Advance unit is switch able 110/220V unless otherwise stated by means of
a label on the machine. Select the proper input voltage via the selector switch on the back of the base
unit. The electrical power cord should be attached to the machine, and then the opposite end
connected to the 110/220V wall socket. Power for the Mast head assembly is achieved by connection
of the black wire / connector extending from the tool head into the labeled socket on the back of the
Base Unit. Place the black switch, which is right next to the power cord socket on the back of the Base
Unit, to the ON position.
Place bracket over
basin and tighten
screw to fix
position. Place
pump directly
over the bracket as
shown in the
image to the right.
Drain
Power for
Recirculation
Pump
Water
Supply Inlet
Main Power
Receptacle
Voltage
Selector
110V Outlets
(Only plug Ultracollimator
box to these outlets)

- 6 -
v. Ultracollimator Installation**
**If equipped
The Ultracollimator may be shipped in 2 pieces, the
Ultracollimator box and “L” bracket, or in one piece, “L”
bracket already secured to the Ultracollimator box.
1. Attach “L” bracket onto the back of the ULTRAPOL
advance mast using the 4 screws provided for each side.
2. Plug the power of the Ultracollimator box ONLY to the
back of the Base labeled 110V.

- 7 -
B. Operating the Ultrapol Advance Safely
The Ultrapol Advance contains a Class IIIa autocollimator device that incorporates a number of CDRH
mandated safety features, including an emission indicator, aperture stop, and chassis interlocks to bring the
manufacturer into compliance with U.S. government regulations
i. Safety Precautions
All persons who use the Ultrapol Advance or will be in the area where the Ultrapol Advance is in use
should be aware of the potential hazards associated with the equipment.
Observe the following precautions when operating this equipment:
•This device produces visible laser radiation. To prevent injury to your eyes, never look directly
into the laser.
•Intended for use with a work sample in place.
No maintenance is required. Servicing of the Ultrapol Advance must be done by trained personnel
only.
**Note: System shown above is complete with the Ultracollimator system.

- 8 -
C. Overview of Functions
It’s a good idea to familiarize yourself with the Ultrapol Advance for future reference in the instructional
part of this manual.
a
h
k
j
i
g
f
b
c
d
e
Baser Unit
a. Main Power switch
b. Sample rotation On/Off switch and speed knob
c. Sample oscillation On/Off switch and speed knob
d. Timer (Timer Manual Appendix A)
e. Tachometer (Lap RPM)
f. Coolant (water) switch
g. Lap speed knob
h. Pump On/Off switch
i. Lap direction FWD/Off/REV
j. Stop process switch
k. Start/reset process time switch

- 9 -
r
l
m
n
o
q
p
s
t
Mast/Head Assembly
l. Handle for Z direction micro-adjust
m. Locking screw for slippable scale
n. Slippable scale
o. Floating head lock
p. Mast position lock
q. Load control knob
r. Analog dial height indicator
s. Lift lever
t. Tilt/quick release interface
u. Tilt knobs
v. Quick release lock
u
v

- 10 -
Ultracollimator System (Optional feature)
w. LCD Screen menu button
x. Input Video 2
y. Input Video 1
z. LCD Power ON/OFF
aa. Y-axis crosshair adjustment
bb. Beam Brightness
cc. X-axis crosshair adjustment
dd. Beam ON/OFF switch
ee. Ultracollimator shutter/attenuator
ff. Second X-axis crosshair adjustment
gg. Second Y-axis crosshair adjustment
hh. Video 2 Input
w
x
y
z
aa
bb
cc
dd
ee
gg
ff
hh

- 11 -
D. Operator Controls/Features
1. Power ON/OOF switch (a).
2. To stop/reset timer, pressing “Stop” during cycle will turn the lap, rotation and oscillation motion OFF.
3. To adjust cycle time, press the buttons under each digit of the timer to desired cycle time.
4. Pressing the Start button while the timer is Timing will reset the countdown.
5. Laser ON indicator (n) will be illuminated when laser is ON.*
6. Beam intensity can be adjusted with the rotating dial marked “Intensity”.*
7. The top button on the LCD monitor is the power button.*
8. The second button down on the monitor is Video 1 (Ultracollimator mode).*
9. The third button down Video 2 (Vision camera mode).*
10. The crosshairs (in Ultracollimator mode) can be adjusted using the knobs for either the vertical or
horizontal lines.*
*If equipped with the Ultracollimator.
i. Adjusting the Amplitude of Oscillation
The sweep of the oscillation can be increased or decreased by a set screw in a cam on the left side of
the base plate. Use the hex screwdriver provided to turn the set screw either CW to decrease amplitude
or CCW to increase the amplitude. To visually see the set screw you first must turn the oscillation
switch to ON and press the START button. You will notice the cam spin. Use the dial to decrease the
speed of the cam. Once you see the set screw, turn the dial to 0 to stop the cam from spinning, then
you can adjust the amplitude of the sweep.

- 12 -
E. Work holders and Accessories
i. Standard Quick Release Plate (6170.1)
The Standard QR Holder, allows for rapid transfer of sample between polisher and microscope. The plate is
held in position on the machine by means of a cam lock. The alignment channel on the bottom of the holder
means that the plate is mounted at the same rotational position.
ii. SEM Stub Holder (See Order Codes Below)
Hitachi Compatible Holder shown
The Quick Release SEM Stub Holder provides time saving for the user who will be inspecting resultant
delayered or polished surfaces in the SEM. By mounting the sample directly on a compatible stub, several
steps of remounting are avoided.
Optical line of sight

- 13 -
Order Code
SEM Style & Type
6172.H
Hitachi-compatible QR Holder & optical Stub
6175.H
Hitachi Stub only (stainless steel)
6178.H
Hitachi Stub only (aluminum)
6176.1
Hitachi X-sectioning Stub only (aluminum)
6172.P
Philips-compatible (XL30) QR Holder & optical Stub
6175.P
Philips Stub only (stainless steel)
6178.P
Philips Stub only (aluminum)
6172.J
JEOL-compatible (6400) QR Holder & optical Stub
6178.J
JEOL Stub only (aluminum)
6172.F
FEI FIB- compatible QR Holder & optical Stub
6178.F
FEI Stub only (aluminum)
--- Other brand-compatible styles can be made on request
Single Die X-section Stub Holder & Mounting Fixture (6178.1)
>> See section above for details of replacement stubs
X-section Quick Release Vise Holder (6150.1)

- 14 -
iii. Encapsulated Mount Holder
The encapsulated mount holder allows the polishing of samples that have been encapsulated. The
three screws hold the potted samples in place. There are two magnets that hold an optical flat in place
so that the holder can be used with the Ultracollimator. To do so, simply place the optical flat in place
and mount the sample into the holder. Place the holder into the quick release and observe the dot on
the LCD screen. (*Note: The reference dot on the screen is just that, a reference point from which to
begin adjustment of the tilt. The sample that has been potted may not be parallel to the holder.) Adjust
tilt accordingly.
Magnets
Optical Flat

- 15 -
III. CALIBRATION
A. Mechanical Alignment
i. Aligning the base plate to the Aluminum platen.
1. Place a desired lap onto the Advance. Preferably one that does not have any film attached to it.
2. Place the micrometer into the hole on the side of the work holder and tighten the set screw so that
micrometer is fixed in its position.
3. Place the work holder with micrometer attached on the quick release.
4. Turn pump, coolant, oscillation and lap switches to the OFF position.
5. Be sure that the oscillation sweep is closed off all the way so there is no sweep (turning the set screw
CW)
X-plane alignment (3 o’clock and 9 o’clock positions)
6. Turn the rotation switch to ON and dial speed to 1. Press START. Stop the Rotation at the 3
o’clock position
7. Turn the Z-micro adjust dial on top of the head to bring the head down so that the deflection on the
Micrometer reads ‘100.’

- 16 -
8. Rotate the head to the 9 o’clock position and observe the deflection at the two positions for the x-
axis (left and right).
9. If there is a height difference at the 9 o’clock position, adjust with the back screws on the base plate
until there is no difference in height between the two X-axis positions. To adjust, loosen the
tightening screws first, then adjust the set screws to bring the deflection on the micrometer to read
‘100.’
10. Rotate back to the 3 o’clock position. If the deflection is not at ‘100’ adjust the Z micro-adjust on
top of the head to bring the deflection to ‘100’
11. Repeat steps 8-10 until both positions have no height difference.
Y-plane alignment (12 o’clock and 6 o’clock positions)
12. Turn the rotation switch to ON and dial speed to 1. Press START. Stop the Rotation at the 12
o’clock position.
13. Turn the Z-micro adjust dial on top of the head to bring the head down so that the deflection on the
Micrometer reads ‘100.’
14. Rotate the head to the 6 o’clock position and observe the deflection at the two positions for the y-
axis (front and back).
15. If there is a height difference at the 6 o’clock position, adjust with the back screws on the base plate
until there is no difference in height between the two y-axis positions. To adjust, loosen the
X-axis Tightening Screws
X-axis Set Screws
Y-axis Set Screws
Y-axis Tightening
Screws