ULTRA TEC ULTRAPOL Advance User manual

ULTRAPOL
Advance
(3250.1)
Lapping and Polishing Machine
User Manual
(3255.1)
Issue 2.3
(Updated June, 2017)
1025 E Chestnut Ave
Santa Ana, CA 92701
Toll Free (US) 1 877 542 0609
Tel: [phone] Fax: [phone]
e-mail: [email protected]
www.ultratecusa.com

**Note: System shown above is complete with the Ultracollimator system.

The information in this document is subject to change without notice. The authors assume no responsibility for any
error that may appear.
Regulatory Agency Certification
The Ultrapol Advance (Part Number ) has been tested and certified to meet the guidelines of 21 CFR 1040.10 and
1040.11 for CDRH Compliance.
The Ultrapol Advance is a Class IIIa laser autocollimator assisted device that incorporates a number of CDRH
mandated safety features, including but not limited to an emission indicator and chassis interlocks to bring the
manufacturer into compliance with U.S. government regulations.

TABLE OF CONTENTS Page
I. INTRODUCTION .......................................................................................................................................- 1 -
A. Scope of Use...............................................................................................................................................- 1 -
B. Parts List –What’s included ......................................................................................................................- 1 -
C. Power Supply .............................................................................................................................................- 1 -
D. Specifications .............................................................................................................................................- 1 -
E. Labels and Warnings..................................................................................................................................- 2 -
F. Suggested Services / supplies.....................................................................................................................- 3 -
G. Optional Services / supplies .......................................................................................................................- 3 -
II. INSTALLATION AND OVERVIEW........................................................................................................- 4 -
A. Installing Ultrapol Advance .......................................................................................................................- 4 -
B. Operating the Ultrapol Advance Safely......................................................................................................- 7 -
C. Overview of Functions...............................................................................................................................- 8 -
D. Operator Controls/Features ......................................................................................................................- 11 -
E. Work holders and Accessories .................................................................................................................- 12 -
III. CALIBRATION.........................................................................................................................................- 15 -
A. Mechanical Alignment .............................................................................................................................- 15 -
B. Optical Alignment (Ultracollimator)........................................................................................................- 19 -
IV. PREPARATION FOR FLAT POLISHING............................................................................................- 19 -
A. Mounting a Bare Die Sample ...................................................................................................................- 19 -
B. Aligning Sample for Parallel Polishing with the Ultracollimator............................................................- 20 -
C. Load Control ............................................................................................................................................- 21 -
D. Correcting for Observed Tilt during polishing.........................................................................................- 22 -
V. APPLICATIONS .......................................................................................................................................- 23 -
A. Topside Delayering of Single Die IC’s ....................................................................................................- 23 -
B. Backside Preparation................................................................................................................................- 23 -
C. Cross-sectioning of Die / Packages..........................................................................................................- 25 -
D. Other Lapping & Polishing Applications.................................................................................................- 25 -
VI. PREVENTATIVE MAINTENANCE ......................................................................................................- 26 -
A. Clean Up...................................................................................................................................................- 26 -
B. Flushing the recirculation pump...............................................................................................................- 26 -
C. Reconditioning the Polyurethane Lap (6208.9)........................................................................................- 27 -
VII. ACCESSORIES, CONSUMABLES & SPARES....................................................................................- 28 -
APPENDICES.......................................................................................................................................................- 31 -
Appendix A –Timer Manual.............................................................................................................................- 32 -
Appendix B –CE Certification..........................................................................................................................- 35 -
Appendix C –Wiring Diagram..........................................................................................................................- 36 -

- 1 -
I. INTRODUCTION
A. Scope of Use
ULTRAPOL advance is a self-contained lapping and polishing machine capable of preparing wide range of
materials and sample types for subsequent use in various forms of microscopy, production and R&D.
B. Parts List –What’s included
Part #
Description
Main Hardware
3250.1
Ultrapol Advance Unit (110-240V)
3255.1
User Manual
5259.1
Power Cord
Accessories
(Included)
2239.1
8” Aluminum platen
3230.1
Slurry tray
3275.1
Accessories case includes below
3260.1
Mechanical alignment indicator
3281.1
Set of loading weights 100g, 200g (2), 500g
3278.1
Squeegee
6170.1
Quick release plate 1mm hole
6170.2
Quick release plate 2mm hole
6377.U
Allen wrench set 7/64” w/ handle, 7/64” and 9/64”
**Optional Features
Ultracollimator
System
6183.UL
Ultracollimator unit
5259.1
Power Cord
6135.1
Metal optical flat
6158.AD
Recirculating Pump
C. Power Supply
The Ultrapol Advance has one power supply:
Input 110-220VAC 10A 50/60Hz
Output 120VAC 1A
D. Specifications
Part Number: 3250.1
Dimensions: 22 x 22x 15.5 in3
Weight: Approximately 90 lbs.
The Ultrapol Advance is used for flat lapping/polishing of materials and/or semiconductor devices.
One laser at 660nm adjustable power output up to 5mW internally.
CDRH Class IIIa with interlocks.

- 2 -
DANGER
MAX RADIANT POWER <3mW
WAVELENGTH 660nm
LASER RADIATION
DO NOT STARE INTO BEAM OR
VIEW WITH OPTICAL INSTRUMENTS
CLASS IIIa LASER PRODUCT
E. Labels and Warnings
Center for Devices and Radiological Health (CDRH) –
The United States Food and Drug Administration’s Center for Devices and Radiological Health (CDRH) is
the agency responsible for enforcing federal regulations regarding radiation-emitting devices in the U.S.
Because laser light is a form of radiation, it is monitored by CDRH, and we at Ultra Tec Manufacturing,
Inc. have an obligation to the government, to ourselves and most importantly, to our customers to ensure
that our products adhere to these regulations. Protecting consumers and complying with federal guidelines
are our top priorities.
The code of the Federal Regulations (CFR) is the set of government guidelines set forth by CDRH that
manufacturers of various products must follow. Specifically, guidelines 21 CFR 1040.10 and 1040.11
detail the standards that all laser products must meet. To comply with Federal regulations, all laser system
manufacturers must ensure that their products contain mandated safety features, register their products with
CDRH, and properly label each device with its respective warning data.
Laser products are regulated by CDRH based on the level of radiation emitted at a particular wavelength.
They are grouped into specific classes according to their maximum emission level.
Per requirements of various federal and multinational regulatory agencies all labels and warnings displayed
on or in the ASAP-1 are documented herein.
Certification and Identification:
Located on the rear panel
Class IIIa Laser:
Located on the face of the Ultracollimator LCD box just
below the Beam On/Off switch.
MODEL: Ultrapol Advance
SERIAL: 39945
LOCATION/DATE OF MFG:
Santa Ana, CA
October 2008
__________________________
CERTIFICATION: This product
complies with 21 CFR 1040.10
AND 1040.11
___________________
Ultra Tec Mfg., Inc.
1025 E. Chestnut Ave.
Santa Ana, CA 92701

- 3 -
AVOID EXPOSURE
Laser radiation is emitted
from this aperture
Aperture Warning:
Located on the front of the Ultracollimator LCD Box just below the monitor and perpendicular to the
aperture.
Access Panel and Safety Interlock Warning:
Located on rear panel of the Ultracollimator LCD box.
Located on the Ultracollimator unit housing.
F. Suggested Services / supplies
Strong flat workbench (with 1m x 1m available)
Hot and Cold water available
Lint-free wipes
Acetone
Isopropyl alcohol
Double sided tape
D.I. Water
Q-tips / cotton buds
G. Optional Services / supplies
Ultrasonic Cleaner (with heater)
INFRATEC Infrared microscope
UV Lamp (if using curable epoxies for wafer reinforcement)
DANGER
Laser radiation when open.
AVOID DIRECT EYE EXPOSURE.
DANGER
Laser radiation when open and interlock
defeated.
AVOID DIRECT EYE EXPOSURE

- 4 -
II. INSTALLATION AND OVERVIEW
A. Installing Ultrapol Advance
i. Mechanical
The main hardware is shipped as two items; the Base Unit and the Mast Head assembly.
The Base Unit should be placed on a flat, sturdy bench.
The Mast Head assembly may then be installed on the Base Unit, by use of the ‘base lock lever’
positioned at the rear bottom of the head assembly. The protruding nut and bolt should be inserted into
the wide radius section of the ‘keyhole’ on the top right rear of the base. The head may then be slid to
its ‘zero’ position (the position where Mast head assembly cannot go further forward towards the front
and is parallel with the base plate). At this point the base lock lever may be turned to lock the head
into position.
ii. Coolant
Coolant is an important part of the polishing process. The Solenoid Water Actuation system is
generally used. Feed your water source into the back of the polisher, using the supplied nose piece and
switch the Coolant Switch to the on position on the front panel. Water will begin to pump onto the
polishing surface. Adjust the water pressure with the valve on the side of the faucet.
iii. Drain
The Base needs to be placed for convenient drainage. The drain exits from the rear panel through a
fitting onto which the supplied drain hose is pressed. This drain can be fed into a container (a gallon
plastic container is usually convenient). Alternatively, the feed may be directed into the facility drain,
if faucets are used.

- 5 -
Pump bracket ensures pump remains securely in position.
iv. Electrical
The voltage of the Ultrapol Advance unit is switch able 110/220V unless otherwise stated by means of
a label on the machine. Select the proper input voltage via the selector switch on the back of the base
unit. The electrical power cord should be attached to the machine, and then the opposite end
connected to the 110/220V wall socket. Power for the Mast head assembly is achieved by connection
of the black wire / connector extending from the tool head into the labeled socket on the back of the
Base Unit. Place the black switch, which is right next to the power cord socket on the back of the Base
Unit, to the ON position.
Place bracket over
basin and tighten
screw to fix
position. Place
pump directly
over the bracket as
shown in the
image to the right.
Drain
Power for
Recirculation
Pump
Water
Supply Inlet
Main Power
Receptacle
Voltage
Selector
110V Outlets
(Only plug Ultracollimator
box to these outlets)

- 6 -
v. Ultracollimator Installation**
**If equipped
The Ultracollimator may be shipped in 2 pieces, the
Ultracollimator box and “L” bracket, or in one piece, “L”
bracket already secured to the Ultracollimator box.
1. Attach “L” bracket onto the back of the ULTRAPOL
advance mast using the 4 screws provided for each side.
2. Plug the power of the Ultracollimator box ONLY to the
back of the Base labeled 110V.