CyberOptics WaferSense APS User manual

CyberOptics
Semiconductor
WaferSense®
APS
User’s Guide

ii
General
Information
WaferSense Wafer and Link
Changes or modifications not expressly approved by CyberOptics Semiconductor, Inc., may
void your authority to operate the WaferSense APS.
The radio contained in the WaferSense APS meets all the applicable FCC requirements for RF
Safety. While in operation, the FCC requires users and nearby persons to maintain a minimum
separation distance of 20 cm (8 inches) or farther from the WaferSense APS.
The WaferSense APS Wafer and Link have been tested and found to comply with the limits
for a Class B digital device, pursuant to Part 15 of the FCC Rules. These limits are designed
to provide reasonable protection against harmful interference in a residential installation. This
equipment generates, uses and can radiate radio frequency energy and, if not installed and used
in accordance with the instructions, may cause harmful interference to radio communications.
However, there is no guarantee that interference will not occur in a particular installation. If
this equipment does cause harmful interference to radio or television reception, which can be
determined by turning the equipment off and on, the user is encouraged to try to correct the
interference by one or more of the following measures:
• Reorient or relocate the receiving antenna.
• Increase the separation between the equipment and receiver.
• Connect the equipment into an outlet on a circuit different from that to which the
receiver is connected.
• Consult the dealer or an experienced radio/TV technician for help.
This device complies with part 15 of the FCC Rules. Operation is subject to the following two conditions: (1)
This device may not cause harmful interference, and (2) this device must accept any interference received, including
interference that may cause undesired operation.

iii
Laser
The WaferSense APS is a Class 1 laser-based instrument. The laser is completely enclosed.
During normal operation you will not be exposed to laser radiation.
Hazard Symbols
The meaning of the hazard symbol appearing on the equipment is as follows:
Symbol Nature of Hazard
Attention, consult accompanying documents.
WARNING
The use of controls, adjustments, or procedures other than those specified in this manual
may result in exposure to hazardous optical radiation.

iv
WaferSense Technical Support
Technical support is available from CyberOptics.
WaferSense is a registered trademark, and ParticleView, and ParticleReview are trademarks, of
CyberOptics Corporation.
Third-party brands and names are the property of their respective owners.
Copyright © 2018, CyberOptics Corporation. All rights reserved.
P/N 8017931 Rev. F
E-mail: [email protected]
For information about CyberOptics’ offices
and global support network, please visit
www.cyberoptics.com.

iv
Table of
Contents
General Information ..................................................... ii
Chapter 1
Introduction ....................................................................................1.1
Chapter 2
Installing Your APS ....................................................................... 2.1
Installing the WaferSense APS Software .......................................2.2
Installing the Wireless Link ...........................................................2.5
Checking Communications Between the Link and the Wafer ......2.6
Registering Your APS Wafer for Calibration Service .................... 2.7
Running the ParticleView Application .......................................... 2.8
Technical Support ....................................................................... 2.10
Chapter 3
Using Your APS ............................................................................. 3.1
Opening and Closing the Charging Case ...................................... 3.2
Using the APS Wafer Buttons and Status Lights .......................... 3.3
Making a Simple Particle Measurement Run ...............................3.4
Setting the Purge and Measurement Times ..................................3.7
Monitoring for Excessive Particle Levels ......................................3.8
Recording the Particle Measurements .........................................3.11
Placing Marks in a Log File .................................................................. 3.12
Including User-Specified Information in the Log File .................... 3.13
Log File Directory Location ................................................................ 3.14
Log File Names ...................................................................................... 3.14
Importing Log Files Into Other Applications .................................. 3.15
Changing the Log File Directory ........................................................ 3.16

Table of Contents
v
Configuring the Display .............................................................. 3.17
Selecting the Particle Size to Graph..................................................... 3.17
Displaying Particle Density or Frequency ..........................................3.17
Changing the Vertical Scale................................................................... 3.18
Changing the Horizontal Scale ............................................................ 3.19
Changing the Averaging Interval ......................................................... 3.19
Changing Colors in ParticleView ........................................................ 3.20
Printing the ParticleView Window .............................................. 3.23
Monitoring the Operating Temperature ..................................... 3.24
Using the Rechargeable Battery .................................................. 3.25
Monitoring the Battery Level .............................................................. 3.25
Charging the Battery ............................................................................. 3.25
Monitoring the Wireless Connection to the
APS Wafer .................................................................................... 3.27
Monitoring the Pressure, Laser, Fan, and Coincidence ............. 3.28
Reporting APS System Events ..................................................... 3.29
Low Battery ............................................................................................3.29
Laser Failure ............................................................................................3.29
Low Pressure Environment..................................................................3.30
Changing the Pairing Between the APS Wafer and Link ........... 3.31
Saving Your Settings .................................................................... 3.32
Loading Settings from a File ................................................................ 3.32
Chapter 4
Viewing Log Files .......................................................................... 4.1
Running ParticleReview ................................................................4.2
Using the Playback Controls ......................................................... 4.4
Working with Marks ......................................................................4.6
Finding Marks in a File ........................................................................... 4.6
Adding Marks to a File ........................................................................... 4.7
Editing Existing Marks ........................................................................... 4.8
Monitoring for Excessive Particle Levels .....................................4.9
Reviewing Go/No-Go Thresholds .................................................... 4.10
Reviewing Coincidence ................................................................4.11
Changing Log Files ..................................................................... 4.12
Configuring the Display .............................................................. 4.13
Reviewing Numeric Measurements .....................................................4.13
Reviewing Graphs and Resetting Parameters .................................... 4.14
Changing Colors in ParticleReview .................................................... 4.15
Displaying User-Specified Information from the Log File ......... 4.18

Table of Contents
vi
Printing the ParticleReview Window .......................................... 4.19
Chapter 5
Maintaining Your APS ................................................................... 5.1
Annual Factory Calibration and Battery Replacement ................. 5.3
Battery Use and Disposal ..............................................................5.4
Chapter 6
Specifications ................................................................................. 6.1
System Requirements .................................................................... 6.1
Product Components ..................................................................... 6.1
APS Hardware ............................................................................... 6.1
Environmental ......................................................................................... 6.1
Power and Range...................................................................................... 6.1
Laser ........................................................................................................... 6.2
General Characteristics ........................................................................... 6.2

vii
List of
Illustrations
Figure 1.1: WaferSense APS Label.........................................................1.iii
Chapter 1
Figure 1.1: WaferSense APS Controls and Indicators ............................ 1.2
Chapter 2
Figure 2.1: The InstallShield Wizard ......................................................2.2
Figure 2.2: Final Software InstallShield Screen .....................................2.3
Figure 2.3: Link Device Install Wizard .................................................. 2.4
Figure 2.4: Final Link InstallShield Screen ............................................2.4
Figure 2.5: Starting the ParticleView Application................................ 2.8
Figure 2.6: Calibration Registration Dialog ..........................................2.9
Figure 2.7: The About ParticleView Dialog ......................................... 2.10
Figure 2.8: The About your APS Wafer Dialog .................................... 2.10
Chapter 3
Figure 3.1: Opening the Charging Case .................................................3.2
Figure 3.2: Making a Simple Measurement Run ...................................3.4
Figure 3.3: Reading the ParticleView Display ....................................... 3.5
Figure 3.4: Setting the Purge and Measurement Times ........................3.7
Figure 3.5: Go/No-Go Indicators ..........................................................3.8
Figure 3.6: Setting the Go/No-Go Thresholds ......................................3.9
Figure 3.7: Set Go/No-Go Threshold Dialog ........................................3.9
Figure 3.8: Recording Particle Measurement Data ..............................3.11
Figure 3.9: Adding a Mark ................................................................... 3.12
Figure 3.10: Annotating a Mark ............................................................ 3.12
Figure 3.11: Set Station Information Dialog ......................................... 3.13
Figure 3.12: Default Log File Names ................................................... 3.14
Figure 3.13: Specifying a Log File Name Prefix .................................. 3.14
Figure 3.14: Recording Comma-Delimited Files ................................. 3.15
Figure 3.15: Layout of Comma-Delimited File ................................... 3.16
Figure 3.16: Selecting the Particle Size for the Graph .......................... 3.17
Figure 3.17: Displaying Particle Density or Frequency ....................... 3.18
Figure 3.18: Vertical Scale .................................................................... 3.18
Figure 3.19: Horizontal Scale ............................................................... 3.19

List of Illustrations
viii
Figure 3.20: Horizontal Scale............................................................... 3.20
Figure 3.21: The Color Palette .............................................................. 3.21
Figure 3.22: The Custom Colors Palette .............................................. 3.22
Figure 3.23: Temperature Monitoring Gauge ...................................... 3.24
Figure 3.24: Battery Monitor ................................................................ 3.25
Figure 3.25: Contact Points for Charging the Battery ......................... 3.26
Figure 3.26: Wireless Connection Monitor .......................................... 3.27
Figure 3.27: Pressure, Laser, Fan, and Coincidence Status ................. 3.28
Chapter 4
Figure 4.1: Running the ParticleReview Application .............................4.2
Figure 4.2: Opening a Log File ..............................................................4.3
Figure 4.3: Playback Controls ................................................................ 4.4
Figure 4.4: Finding Marks ......................................................................4.6
Figure 4.5: Marks and Annotations ........................................................4.7
Figure 4.6: Editing Marks ......................................................................4.8
Figure 4.7: Annotating Marks ................................................................4.8
Figure 4.8: Go State Indicator ................................................................4.9
Figure 4.9: No-Go State Indicator .........................................................4.9
Figure 4.10: Setting the Go/No-Go Thresholds .................................. 4.10
Figure 4.11: Configuring the Go/No-Go Thresholds .......................... 4.10
Figure 4.12: Coincidence Status ............................................................4.11
Figure 4.13: Selecting a Log File .......................................................... 4.12
Figure 4.14: Numeric Display .............................................................. 4.13
Figure 4.15: Selecting Graph Parameters ............................................. 4.14
Figure 4.16: Menu of Graph Display Elements ................................... 4.15
Figure 4.17: The Color Palette .............................................................. 4.16
Figure 4.18: The Custom Colors Palette .............................................. 4.17
Figure 4.19: Station Information Dialog .............................................. 4.18
Chapter 5
Figure 5.1: The About your APS Wafer Dialog ...................................... 5.3
Figure 5.2: APS Wafer Calibration Status Dialog .................................. 5.4
Chapter 6
Figure 6.1: WaferSense APS Dimension Drawing ................................. 6.2

1.1
Chapter 1
Introduction
The CyberOptics Semiconductor WaferSense®Airborne Particle Sensor (APS) measures
airborne particles inside semiconductor process equipment. The ParticleView™ software
application makes it easy to view particle measurements in real-time. The large display and
wireless link let you place the computer at a convenient distance from the APS wafer. The APS
operates at pressures 0.4 to 1.6 ATM.
Figure 1.1 on page 1.2 shows the APS controls and indicators.
APS consists of the following components:
•APS wafer. The APS is designed with a wafer-like form factor, so it can fit in most
wafer-handling equipment. The wafer is also vacuum compatible, although it needs a
minimum of 0.4 ATM pressure to operate.
•ParticleView and ParticleReview™software. The ParticleView software
application monitors the particle measurements and other status information in
real time. ParticleReview lets you play back log files recorded in ParticleView. Both
applications run on most personal computers that use the Microsoft Windows
operating system.
•Wireless link. The software communicates with the APS wafer by using a Bluetooth
wireless link that attaches to a USB port on a personal computer.
•Charging case. The APS wafer is powered by an internal rechargeable battery, which
you recharge by placing the APS wafer into the charging case.
•Carrying case. The carrying case makes it easy to take your complete APS system
with you in the plant or on the road.

Chapter 1. Introduction
1.2
The APS controls are visible on the outside of the device as shown below.
Figure 1.1: WaferSense APS Controls and Indicators
The following chapter provides instructions for installing your APS system.
On/Off switch
Connect status
Charging
indicator
Charging tabs
Charging
complete
indicator
New pair switch
Fan intake
Exhaust

2.1
Chapter 2
Installing Your APS
This chapter describes the procedures you need to perform to install your APS system and get
it ready for use. For best results, perform the procedures in the order they are presented in this
chapter:
• Installing the APS WaferSense software
• Installing the wireless link on the USB port
• Checking communications between the link and the APS wafer
• Activating your software
• Registering your APS wafer
• Running the ParticleView application
Caution
Dropping the APS wafer or hitting it against a hard object can bend, break, or chip the
housing; damage the internal components; or knock the APS wafer out of calibration.
While it is not as fragile as an actual silicon wafer, handle the APS wafer with care, as you
would any precision instrument. If the APS wafer is damaged or in need of calibration,
see Chapter 5, “Maintaining Your APS.”
Caution
The APS wafer is thicker than a standard silicon wafer so use extreme care to assure that
the wafer has proper clearances when being transported through the tool. For example,
when you use the wafer in a tool for the first time, move the APS wafer through the tool
in manual mode, visually verifying all clearances. Even when clearances are sufficient for
safe APS pass-through, if the robot end-effector is taught too high, you risk crashing and
damaging the APS wafer.

Chapter 2. Installing Your APS
2.2
Installing the WaferSense APS Software
To install and run the WaferSense APS software ParticleView and ParticleReview, your
computer must have the following:
• Windows XP, or Windows Vista and Windows 7 (32-bit or 64-bit) operating systems
• One free high-power USB 1.1 or USB 2.0 port
To install the WaferSense APS software, do not plug in the link before you start. The software
must be installed first using the following steps:
1. Log on using an account with Administrator privileges.
2. Insert the WaferSense APS Installation Disk into the CD drive.
The InstallShield Wizard starts automatically, as shown in Figure2.1. If the wizard doesn’t
start automatically, use Windows Explorer to view the contents of the CD and doubleclick
the setup.exe program.
Figure 2.1: The InstallShield Wizard
3. Follow the instructions provided by the wizard to install the software.

Chapter 2. Installing Your APS
2.3
4. After you complete the instructions for all of the wizard screens, click Finish.
Figure 2.2: Final Software InstallShield Screen
By default, the Setup program installs the ParticleView and ParticleReview applications in a new
program group called WaferSense APS. Setup also installs an online copy of this user’s guide,
which is available from the ParticleView and ParticleReview Help menus and in the WaferSense
APS program group in the Windows Start menu.
Note
Before running the software for the first time, allow the Link Device Installer to
run, and install a wireless link as described in the following procedures. If you start
the software before connecting a link, the following error message appears:
ftd2xx.dll not found.

Chapter 2. Installing Your APS
2.4
5. The WaferSense Link Device Installer starts automatically.
Figure 2.3: Link Device Install Wizard
6. Click Next > and the wizard automatically completes the link installation.
Figure 2.4: Final Link InstallShield Screen

Chapter 2. Installing Your APS
2.5
Installing the Wireless Link
Before starting the wireless link installation, complete “Installing the WaferSense APS Software,”
on page2.2.
To install the wireless link:
1. Turn on your computer.
2. Locate an unused, high-power USB port on your computer. The APS wireless link
module requires a high-power USB port, such as the built-in ports on your computer and
ports on USB hubs that have power cords. Unpowered USB hubs will not work.
3. The USB cable provided with your APS system has a different plug on each end. Locate
the end with the plug that matches the USB port on your computer and plug the cable
into the port.
4. Plug the other end of the cable into the link module.
Windows automatically finds the drivers installed during the Link Device Installer in
Figure 2.3and Figure 2.4 on page 2.4.
The Power light on the module turns on indicating that the module is getting power from
the USB port. Ignore the Pair Status and Connection Status lights for now.

Chapter 2. Installing Your APS
2.6
Checking Communications Between the Link and the Wafer
To complete the installation, verify that the APS wafer and link can communicate:
1. The APS wafer operates from an internal rechargeable battery. Before using the APS
wafer for the first time, charge it for two hours. For information on checking the charge
on the battery and the procedure for recharging, see “Using the Rechargeable Battery,” on
page 3.25.
2. Remove the APS wafer from the charging case (see “Opening and Closing the Charging
Case,” on page3.2) and press the ON OFF button to turn on the APS wafer. The ON
light on the APS wafer turns on.
Note: Press the ON OFF button with the end of your finger covering the entire button.
Touching the button with only the tip of your finger may not provide enough surface area
to trigger the button. Do not forcibly press the APS wafer’s buttons.
3. Verify that the Pair Status lights on both the APS wafer and link module are on. The
APS wafer and link module in your kit were paired at the factory and will operate with
only that particular link module. If either light is not on, your APS wafer and link might
not be paired with each other. To reset the pairing, see “Changing the Pairing Between the
APS Wafer andLink,” on page 3.31.
4. Immediately after turning on the APS wafer, the Connection Status lights on the APS
wafer and link will blink slowly. After a few seconds the APS wafer and link will connect
and both lights will be on and no longer blinking. If the lights continue to blink, see
“Monitoring the Wireless Connection to the APS Wafer,” on page3.27.
5. After starting the ParticleView application (see “Running the ParticleView Application,”
on page 2.10), you can verify the connection to the APS wafer by comparing the serial
number printed on the APS wafer to the serial number shown in the About your APS
Wafer dialog, which is available in the ParticleView application by choosing the Help >
About your APS Wafer menu item. If the ParticleView application is not running, the
APS wafer turns off automatically after 30 minutes.
This completes the installation of your APS system.

Chapter 2. Installing Your APS
2.7
Registering Your APS Wafer for Calibration Service
To maintain optimum performance, every twelve months you should have your APS wafer calibrated
and the battery replaced. These services can be performed only at the factory.
To help you keep track of the next service date so you can schedule this service when it is
convenient, register your WaferSense APS wafer with the factory. When you start the
ParticleView application (see “Running the ParticleView Application,” on page2.10), it
prompts you to register your APS wafer for calibration. You can also register your APS wafer in
any of the following ways:
• On the Internet: http://cyberoptics.com/semiconductor_categories/ws-registration.html
• By sending an e-mail message containing the model, serial number, and contact
information to: [e-mail]

Chapter 2. Installing Your APS
2.8
Running the ParticleView Application
To start the ParticleView application:
1. From the Windows Start > Programs menu, choose WaferSense APS > ParticleView.
The ParticleView application starts, as shown in Figure2.5. Initializing communications
usually takes less than a second. For information on using ParticleView, see Chapter 3,
“Using Your APS.” If you haven’t registered your APS wafer, ParticleView also displays the
Calibration Registration dialog. To complete the registration, proceed to the next step.
Figure 2.5: Starting the ParticleView Application

Chapter 2. Installing Your APS
2.9
2. If ParticleView displays the WaferSense APS Calibration Registration dialog, as shown in
Figure 2.6, you haven’t registered your APS wafer. Follow the instructions in the dialog to
complete the registration.
Figure 2.6: Calibration Registration Dialog
The ParticleReview application is described in Chapter 4, “Viewing Log Files.”