CyberOptics WaferSense APS User manual

CyberOptics
Semiconductor
WaferSense®
APS
User’s Guide

ii
General
Information
WaferSense Wafer and Link
Changes or modifications not expressly approved by CyberOptics Semiconductor, Inc., may
void your authority to operate the WaferSense APS.
The radio contained in the WaferSense APS meets all the applicable FCC requirements for RF
Safety. While in operation, the FCC requires users and nearby persons to maintain a minimum
separation distance of 20 cm (8 inches) or farther from the WaferSense APS.
The WaferSense APS Wafer and Link have been tested and found to comply with the limits
for a Class B digital device, pursuant to Part 15 of the FCC Rules. These limits are designed
to provide reasonable protection against harmful interference in a residential installation. This
equipment generates, uses and can radiate radio frequency energy and, if not installed and used
in accordance with the instructions, may cause harmful interference to radio communications.
However, there is no guarantee that interference will not occur in a particular installation. If
this equipment does cause harmful interference to radio or television reception, which can be
determined by turning the equipment off and on, the user is encouraged to try to correct the
interference by one or more of the following measures:
• Reorient or relocate the receiving antenna.
• Increase the separation between the equipment and receiver.
• Connect the equipment into an outlet on a circuit different from that to which the
receiver is connected.
• Consult the dealer or an experienced radio/TV technician for help.
This device complies with part 15 of the FCC Rules. Operation is subject to the following two conditions: (1)
This device may not cause harmful interference, and (2) this device must accept any interference received, including
interference that may cause undesired operation.

iii
Laser
The WaferSense APS is a Class 1 laser-based instrument. The laser is completely enclosed.
During normal operation you will not be exposed to laser radiation.
Hazard Symbols
The meaning of the hazard symbol appearing on the equipment is as follows:
Symbol Nature of Hazard
Attention, consult accompanying documents.
WARNING
The use of controls, adjustments, or procedures other than those specified in this manual
may result in exposure to hazardous optical radiation.

iv
WaferSense Technical Support
Technical support is available from CyberOptics.
WaferSense is a registered trademark, and ParticleView, and ParticleReview are trademarks, of
CyberOptics Corporation.
Third-party brands and names are the property of their respective owners.
Copyright © 2018, CyberOptics Corporation. All rights reserved.
P/N 8017931 Rev. F
E-mail: [email protected]
For information about CyberOptics’ offices
and global support network, please visit
www.cyberoptics.com.

iv
Table of
Contents
General Information ..................................................... ii
Chapter 1
Introduction ....................................................................................1.1
Chapter 2
Installing Your APS ....................................................................... 2.1
Installing the WaferSense APS Software .......................................2.2
Installing the Wireless Link ...........................................................2.5
Checking Communications Between the Link and the Wafer ......2.6
Registering Your APS Wafer for Calibration Service .................... 2.7
Running the ParticleView Application .......................................... 2.8
Technical Support ....................................................................... 2.10
Chapter 3
Using Your APS ............................................................................. 3.1
Opening and Closing the Charging Case ...................................... 3.2
Using the APS Wafer Buttons and Status Lights .......................... 3.3
Making a Simple Particle Measurement Run ...............................3.4
Setting the Purge and Measurement Times ..................................3.7
Monitoring for Excessive Particle Levels ......................................3.8
Recording the Particle Measurements .........................................3.11
Placing Marks in a Log File .................................................................. 3.12
Including User-Specified Information in the Log File .................... 3.13
Log File Directory Location ................................................................ 3.14
Log File Names ...................................................................................... 3.14
Importing Log Files Into Other Applications .................................. 3.15
Changing the Log File Directory ........................................................ 3.16

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v
Configuring the Display .............................................................. 3.17
Selecting the Particle Size to Graph..................................................... 3.17
Displaying Particle Density or Frequency ..........................................3.17
Changing the Vertical Scale................................................................... 3.18
Changing the Horizontal Scale ............................................................ 3.19
Changing the Averaging Interval ......................................................... 3.19
Changing Colors in ParticleView ........................................................ 3.20
Printing the ParticleView Window .............................................. 3.23
Monitoring the Operating Temperature ..................................... 3.24
Using the Rechargeable Battery .................................................. 3.25
Monitoring the Battery Level .............................................................. 3.25
Charging the Battery ............................................................................. 3.25
Monitoring the Wireless Connection to the
APS Wafer .................................................................................... 3.27
Monitoring the Pressure, Laser, Fan, and Coincidence ............. 3.28
Reporting APS System Events ..................................................... 3.29
Low Battery ............................................................................................3.29
Laser Failure ............................................................................................3.29
Low Pressure Environment..................................................................3.30
Changing the Pairing Between the APS Wafer and Link ........... 3.31
Saving Your Settings .................................................................... 3.32
Loading Settings from a File ................................................................ 3.32
Chapter 4
Viewing Log Files .......................................................................... 4.1
Running ParticleReview ................................................................4.2
Using the Playback Controls ......................................................... 4.4
Working with Marks ......................................................................4.6
Finding Marks in a File ........................................................................... 4.6
Adding Marks to a File ........................................................................... 4.7
Editing Existing Marks ........................................................................... 4.8
Monitoring for Excessive Particle Levels .....................................4.9
Reviewing Go/No-Go Thresholds .................................................... 4.10
Reviewing Coincidence ................................................................4.11
Changing Log Files ..................................................................... 4.12
Configuring the Display .............................................................. 4.13
Reviewing Numeric Measurements .....................................................4.13
Reviewing Graphs and Resetting Parameters .................................... 4.14
Changing Colors in ParticleReview .................................................... 4.15
Displaying User-Specified Information from the Log File ......... 4.18

Table of Contents
vi
Printing the ParticleReview Window .......................................... 4.19
Chapter 5
Maintaining Your APS ................................................................... 5.1
Annual Factory Calibration and Battery Replacement ................. 5.3
Battery Use and Disposal ..............................................................5.4
Chapter 6
Specifications ................................................................................. 6.1
System Requirements .................................................................... 6.1
Product Components ..................................................................... 6.1
APS Hardware ............................................................................... 6.1
Environmental ......................................................................................... 6.1
Power and Range...................................................................................... 6.1
Laser ........................................................................................................... 6.2
General Characteristics ........................................................................... 6.2

vii
List of
Illustrations
Figure 1.1: WaferSense APS Label.........................................................1.iii
Chapter 1
Figure 1.1: WaferSense APS Controls and Indicators ............................ 1.2
Chapter 2
Figure 2.1: The InstallShield Wizard ......................................................2.2
Figure 2.2: Final Software InstallShield Screen .....................................2.3
Figure 2.3: Link Device Install Wizard .................................................. 2.4
Figure 2.4: Final Link InstallShield Screen ............................................2.4
Figure 2.5: Starting the ParticleView Application................................ 2.8
Figure 2.6: Calibration Registration Dialog ..........................................2.9
Figure 2.7: The About ParticleView Dialog ......................................... 2.10
Figure 2.8: The About your APS Wafer Dialog .................................... 2.10
Chapter 3
Figure 3.1: Opening the Charging Case .................................................3.2
Figure 3.2: Making a Simple Measurement Run ...................................3.4
Figure 3.3: Reading the ParticleView Display ....................................... 3.5
Figure 3.4: Setting the Purge and Measurement Times ........................3.7
Figure 3.5: Go/No-Go Indicators ..........................................................3.8
Figure 3.6: Setting the Go/No-Go Thresholds ......................................3.9
Figure 3.7: Set Go/No-Go Threshold Dialog ........................................3.9
Figure 3.8: Recording Particle Measurement Data ..............................3.11
Figure 3.9: Adding a Mark ................................................................... 3.12
Figure 3.10: Annotating a Mark ............................................................ 3.12
Figure 3.11: Set Station Information Dialog ......................................... 3.13
Figure 3.12: Default Log File Names ................................................... 3.14
Figure 3.13: Specifying a Log File Name Prefix .................................. 3.14
Figure 3.14: Recording Comma-Delimited Files ................................. 3.15
Figure 3.15: Layout of Comma-Delimited File ................................... 3.16
Figure 3.16: Selecting the Particle Size for the Graph .......................... 3.17
Figure 3.17: Displaying Particle Density or Frequency ....................... 3.18
Figure 3.18: Vertical Scale .................................................................... 3.18
Figure 3.19: Horizontal Scale ............................................................... 3.19

List of Illustrations
viii
Figure 3.20: Horizontal Scale............................................................... 3.20
Figure 3.21: The Color Palette .............................................................. 3.21
Figure 3.22: The Custom Colors Palette .............................................. 3.22
Figure 3.23: Temperature Monitoring Gauge ...................................... 3.24
Figure 3.24: Battery Monitor ................................................................ 3.25
Figure 3.25: Contact Points for Charging the Battery ......................... 3.26
Figure 3.26: Wireless Connection Monitor .......................................... 3.27
Figure 3.27: Pressure, Laser, Fan, and Coincidence Status ................. 3.28
Chapter 4
Figure 4.1: Running the ParticleReview Application .............................4.2
Figure 4.2: Opening a Log File ..............................................................4.3
Figure 4.3: Playback Controls ................................................................ 4.4
Figure 4.4: Finding Marks ......................................................................4.6
Figure 4.5: Marks and Annotations ........................................................4.7
Figure 4.6: Editing Marks ......................................................................4.8
Figure 4.7: Annotating Marks ................................................................4.8
Figure 4.8: Go State Indicator ................................................................4.9
Figure 4.9: No-Go State Indicator .........................................................4.9
Figure 4.10: Setting the Go/No-Go Thresholds .................................. 4.10
Figure 4.11: Configuring the Go/No-Go Thresholds .......................... 4.10
Figure 4.12: Coincidence Status ............................................................4.11
Figure 4.13: Selecting a Log File .......................................................... 4.12
Figure 4.14: Numeric Display .............................................................. 4.13
Figure 4.15: Selecting Graph Parameters ............................................. 4.14
Figure 4.16: Menu of Graph Display Elements ................................... 4.15
Figure 4.17: The Color Palette .............................................................. 4.16
Figure 4.18: The Custom Colors Palette .............................................. 4.17
Figure 4.19: Station Information Dialog .............................................. 4.18
Chapter 5
Figure 5.1: The About your APS Wafer Dialog ...................................... 5.3
Figure 5.2: APS Wafer Calibration Status Dialog .................................. 5.4
Chapter 6
Figure 6.1: WaferSense APS Dimension Drawing ................................. 6.2

1.1
Chapter 1
Introduction
The CyberOptics Semiconductor WaferSense®Airborne Particle Sensor (APS) measures
airborne particles inside semiconductor process equipment. The ParticleView™ software
application makes it easy to view particle measurements in real-time. The large display and
wireless link let you place the computer at a convenient distance from the APS wafer. The APS
operates at pressures 0.4 to 1.6 ATM.
Figure 1.1 on page 1.2 shows the APS controls and indicators.
APS consists of the following components:
•APS wafer. The APS is designed with a wafer-like form factor, so it can fit in most
wafer-handling equipment. The wafer is also vacuum compatible, although it needs a
minimum of 0.4 ATM pressure to operate.
•ParticleView and ParticleReview™software. The ParticleView software
application monitors the particle measurements and other status information in
real time. ParticleReview lets you play back log files recorded in ParticleView. Both
applications run on most personal computers that use the Microsoft Windows
operating system.
•Wireless link. The software communicates with the APS wafer by using a Bluetooth
wireless link that attaches to a USB port on a personal computer.
•Charging case. The APS wafer is powered by an internal rechargeable battery, which
you recharge by placing the APS wafer into the charging case.
•Carrying case. The carrying case makes it easy to take your complete APS system
with you in the plant or on the road.