entegris INTELLIGEN MV Guide

Installation and use manual
INTELLIGEN® MV DISPENSE SYSTEM
CRITICAL MATERIALS HANDLING

INTELLIGEN MV DISPENSE SYSTEM
ENTEGRIS, INC. INSTALLATION AND USE MANUAL P/N P92500 REV. A 1
Table of Contents
Overview .............................................................. 2
Liability Ownership ................................................ 2
General Manual Notes ....................................... 2
Changes to the Manual .......................................... 2
Intended Audience .................................................. 2
Intended Use/Scope ............................................... 2
Safety .................................................................. 3
Handling .................................................................. 4
Chemical Leaks ....................................................... 4
Specifications ..................................................... 6
Compatibility ...................................................... 7
System Overview ................................................. 8
Appearance .............................................................. 9
Two-state Technology
Operating Principle ................................................ 9
Quick Filter Changeout ......................................... 9
Installation ....................................................... 11
Handling ................................................................ 11
Facility Requirements .......................................... 11
Tools and Materials .............................................. 11
Install the Pump ................................................... 12
Install the Filter ................................................... 12
Storage ................................................................... 13
MMI Software ................................................... 14
Installing Software ............................................... 14
Connect Tab ........................................................... 15
System Tab ............................................................ 16
Priming Tab ........................................................... 17
Status Tab .............................................................. 20
Alarms Tab ............................................................ 22
Recipe Tab ............................................................. 23
Recharge Tab ......................................................... 24
Utility Tab .............................................................. 24
Info Tab .................................................................. 24
Self Test Tab .......................................................... 24
Profiling Tab .......................................................... 24
Confirmation Tab .................................................. 26
Maintenance ..................................................... 31
Changing the Filter .............................................. 31
Flushing the System ............................................. 32
Updating the Firmware ....................................... 33
Troubleshooting .............................................. 34
Appendix: Priming Recipe Information ......... 36
Guidelines for Priming a New Filter .................. 36
Priming Settings ................................................... 36
Priming Sequence Examples .............................. 37
Manufacturing Information ............................ 39
System Relocation Notice .................................... 39
Spare Parts ............................................................ 39
Technical Support ................................................ 39
Terms and Conditions of Sale ......................... 39
Product Warranties ......................................... 39
Repair Service ....................................................... 39

INTELLIGEN MV DISPENSE SYSTEM
2 INSTALLATION AND USE MANUAL P/N P92500 REV. A ENTEGRIS, INC.
Overview
Entegris, Inc. provides the enclosed product
manual for your information.
Prior to using this manual, the user should verify
with the product manufacturer that the user has
the most recent copy of the product manual.
This manual is owned by Entegris, Inc., an affiliated
company or its suppliers and title shall not pass to
you as a result of your use of the manual.
Liability Ownership
Read the following carefully before continuing:
In no event shall Entegris or its suppliers be liable
for any damages whatsoever (including, without
limitation, damages for loss of business profits,
business interruption, loss of business information
or any pecuniary loss) arising out of the use of or
inability to use this manual, even if Entegris has
been advised of the possibility of such damages.
General Manual Notes
Changes to the Manual
The manufacturer reserves the right to make
changes to the product covered in this manual
to improve performance, reliability or manufac-
turability.
Although every effort has been made to ensure
accuracy of the information contained in this man-
ual, the manufacturer assumes no responsibility
for inadvertent errors. Contents of the manual are
subject to change without notice.
Intended Audience
This manual is intended for technicians involved in
semiconductor manufacturing, and assumes that
each individual is familiar with the proper handling
of photochemicals and other potentially hazardous
materials. Users must also be familiar with install-
ing and using software on a computer running the
Windows®operating system.
Intended Use/Scope
This manual is intended to be used by experienced
technicians for the planning, installation, and oper-
ation of the described pump system. This manual
contains basic safety information and contains basic
safety information for the installation and use of
the pump system. This manual covers the pump
system only.
WARNING! Mishandling products exposed
to a hazardous substance may result in death
or serious injury. Always follow the recom-
mendations and guidelines provided by the
chemical suppliers and manufacturers. Always
wear appropriate personal protection equip-
ment as required for the chemicals in use.
Refer to the Material Safety Data Sheets
(MSDS) for each chemical.
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INTELLIGEN MV DISPENSE SYSTEM
ENTEGRIS, INC. INSTALLATION AND USE MANUAL P/N P92500 REV. A 3
Safety
DANGER! Failure to follow these safety
instructions may lead to fire, electric shock,
chemical exposure, or other injuries, or
damage to property. Read all safety
information before usage.
Supplier Registration for Safety Updates
The manufacturer requests that you notify us
of your equipment installation, usage and status
and provide appropriate contact information so
that we may advise you with any safety alerts and
information regarding your system. Please register
your usage with your local service center.
Contacting the Supplier with Emergency
Health Issues
Please contact the manufacturer with any
emergency safety and health concerns.
WARNING! Safety is designed into every
product. When followed, these minimum
guidelines provide an acceptable level of
safety for operating and maintaining the
system, but are not a substitute for deter-
mining internal safety procedures.
Failure to comply with the safety precautions
or warnings indicated in this manual violates
the safety standards that form a part of the
intended use of this equipment. The manufac-
turer assumes no liability for the user’s failure
to comply with these requirements.
WARNING! Use of controls, adjustments
or procedures other than those specified in
this manual without consulting a competent
safety professional may result in exposure to
potential hazards. Always follow established
industrial safety practices when operating
the equipment.
CAUTION! End of life statement.
De-commissioning of the system, or
any part of the system shall be in a
manner that is consistent with appro-
priate regulations and guidelines.
WARNING! Chemicals are not supplied
with this equipment. Refer to the chemical
suppliers’ MSDS for specific health and
safety information.
WARNING! POTENTIAL CHEMICAL LEAK!
Use one set of o-rings only. Check that the
filter has o-rings or the manifold has o-rings.
NEVER use o-rings on both the filter and the
manifold or the system may leak chemical.
WARNING! PINCH HAZARD! Keep
fingers clear of jaw mechanism
to prevent personal injury.
WARNING! PINCH HAZARD! Pump weight in
excess of 5 kg (17 lb). Use care in lifting and
carrying the pump to prevent personal injury.
WARNING! Wear chemical-resistant garments
and eye protection while changing the filter
and during start-up. Use additional personal
protective equipment (PPE) as directed by
facility safety personnel, the MSDS or chemical
safety guidelines.
CAUTION! Only technically qualified
personnel should install the equipment.
CAUTION! DO NOT use this equipment in any
manner not specified by the manufacturer.
If the equipment is used in a manner other
than as specified in this document, the safety
protections may be impaired.
CAUTION! Fittings and components damage
easily: handle all components with extreme
care. DO NOT scratch or over-tighten any
component.
CAUTION! EQUIPMENT DAMAGE HAZARD!
Turn off power before connecting or
disconnecting any cable to the device,
or damage may occur.
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INTELLIGEN MV DISPENSE SYSTEM
4 INSTALLATION AND USE MANUAL P/N P92500 REV. A ENTEGRIS, INC.
Handling
Each dispense system is manufactured with strict
assembly, test, and inspection processes to ensure
high-quality assembly and protection from unin-
tended chemical release. As with all chemical
handling systems, the dispense system has chemical
connection points which must be handled with
care, including:
• Fluid ports on the top surface
• Filter fittings
The pump mechanism has additional connecting
points:
• Pressure sensor ports on the back (under the
top cover)
• Between valve plate (front) and pump block
• Pump diaphragm mechanism in the pump block
A potential for chemical leak can occur at the above
cited points. Use care to ensure that o-rings are
either on the filter or on the manifold, never on
both, or the system will leak. Refer to filter installa-
tion instructions in this manual.
Do not loosen any screws on the mechanism unless
specifically directed to do so by an Entegris service
engineer. Handle the dispense system with care to
prevent damage to any fluid handling point.
Additional points of critical assembly and perfor-
mance include pneumatic tubings, pressure and
vacuum connecting points, and solenoid manifold
tubes (inside bottom cover or backplane). Use
care to prevent any damage to the unit which
could result in chemical leakage.
Chemical Leaks
In the event of a suspected or confirmed chemical
leak from the pump or in the vicinity of the pump,
please follow the instructions below:
1.Determine chemical currently in use with pump.
2.Obtain Material Safety Data Sheet.
a. Determine if any incompatible materials may
come in contact with the leaking material.
b. Isolate incompatibles with barriers including
spill containment, closing valves, and remov-
ing the chemical supply if it is safe to do so.
c. Identify appropriate chemical protection
equipment requirements including gloves,
face and eye protection and chemical protec-
tive clothing to prevent exposure to or
contact with chemicals.
d. Determine if the chemical has permissible
exposure limits or short term exposure limits:
– Identify limits requiring respiratory
protection.
– Ensure that appropriate monitoring
devices are available to measure air levels.
3.Only employees properly trained to clean up
spills of hazardous materials should conduct
clean up activities. Consult local authorities
or identified hazardous materials emergency
response agencies or contractors for assistance
if the facility does not have trained employees
for spill cleanup or containment.
4.Ensure adequate monitoring and protective
equipment is available for cleanup of hazardous
materials.
5.Obtain supplies for cleanup and containment
compatible with the chemical.
6.Obtain compatible containers to collect spilled
material and cleanup materials.
7.Ensure adequate ventilation is provided before
opening cabinet or equipment where a buildup
of vapors could occur. If flammable material is
in use:
a. Monitor area for flammable levels with
appropriate monitoring devices.
b. Isolate all power sources or potential
sources of sparks.
c. Use intrinsically safe tools and monitoring
equipment.

INTELLIGEN MV DISPENSE SYSTEM
ENTEGRIS, INC. INSTALLATION AND USE MANUAL P/N P92500 REV. A 5
8.Isolate pump from power sources to prevent
fluids from flowing through unit during cleanup
of leak or spill.
a. Use appropriate lockout/tagout out
procedures to de-energize unit.
b. De-energize all areas of unit that may be
in contact with spilled or leaking material.
c. When disconnecting nitrogen and/or any
pressurized gas, wear appropriate Personal
Protective Equipment (PPE) including gloves,
then close the facility gas supply to prevent
gas release when disconnecting lines.
9.If spilled material is within equipment, wipe
all surfaces carefully with wipes appropriate
for the chemical.
10. If material is contained in the tubing or the
pump, provide collection container under
the lines or pump during removal to collect
chemical and prevent additional spills.
11. Decontaminate surfaces with appropriate
decontamination materials per recommendation
of chemical manufacturer.
12. Contain cleanup materials and contaminated
debris and equipment.
13. Dispose of materials in accordance with local,
state and national regulatory requirements.
14. Provide any required service to the equipment
and verify all spilled material is collected or
cleaned from surfaces.
15. Replace any equipment and secure lines in
accordance with normal maintenance and
service requirements.
16. Confirm air levels are safe.
17. Return equipment to service per standard
procedures.

INTELLIGEN MV DISPENSE SYSTEM
6 INSTALLATION AND USE MANUAL P/N P92500 REV. A ENTEGRIS, INC.
Specifications
Dispense
performance:
Volume 0.1 –10.0 mL in 0.001 mL increments
Rate 0.1 – 3.0 mL/sec in 0.001 mL/sec increments
Repeatability <0.02 mL 3 sigma
Viscosity range* 100 – 300 cP
Maximum dispense pressure** 0.40 MPa (60 psi)
Recharge
performance:
Fill rate, filtration rate,
vent rate, purge rate
0.1 – 3.0 mL/sec in 0.01 mL/sec increments
Vent frequency Auto-venting or 1 –10,000 dispense cycles
Mechanical: Wetted surfaces Modified PTFE, PTFE, Kalrez®
Connection type Insert style, Super Pillar®, Super 300 Type Pillar or Flowell™ 60 series
Filter Impact® 2 V2 (OF style)
Inlet, outlet and vent tubing OD 6.35 mm (0.25”) or 6.0 mm (0.24”)
ID 3.97 mm (0.15628”) or 4.0 mm (0.16”)
Gas Inlet gas type Regulated N2or CDA
Inlet gas pressure 448 kPa – 469 kPa (65 psi – 68 psi)
Vacuum -68 kPa (20 in -Hg min.)
Dimensions: Height 242.6 mm (9.55")
Width 60.7 mm (2.39")
Depth 235.0 mm (9.25")
Weight: Approx. 5 kg (11 lb)
Electrical: Current rating 1.25A
Input voltage (system) 24 VDC ±10%
Serial communication Specifications are dependent on interface module use
Parallel communication Triggers and acknowledgments
Certifications: See provided documentation.
Environment: Indoor use only
Altitude below 2000 m (2187.22 yd)
Ambient temperature 5°C – 40°C (41°F –104°F)
Maximum relative humidity 80% for temperatures up to 31°C (88°F) decreasing linearly to
50% relative humidity at 40°C (104°F)
Mains supply fluctuations from 22 – 26 VDC
Transient overvoltages of overvoltage category II
Pollution degree 2
*Depends on tool configuration. Contact applications support for detailed window of operation.
**Maximum pressure is a limit on the Window of Operation. Actual volumes and rates may be restricted to comply with the pressure
limits for a given viscosity, tubing diameter, tubing length and tubing height.

INTELLIGEN MV DISPENSE SYSTEM
ENTEGRIS, INC. INSTALLATION AND USE MANUAL P/N P92500 REV. A 7
Acetone
Adamantane (tricyclodecane)
n-Amyl acetate
Anisole (Methyl phenyl ether,
Methoxybenzene)
2-Butoxyethanol (ethylene glycol
monobutyl ether, butyl cellosolve)
n-Butyl acetate
Butyl alcohol
Butyl cyclohexane
Butyl ether (Dibutyl ether)
Cyclopentanone
Cyclohexanone
Developer (Positive, 0.26N TMAH)
Diacetone alcohol
DI water
Dichloromethane
(methylene chloride)
Diethyl maleate
DIGLYME
(Diethylene glycol dimethyl ether)
Dimethyl acetamide
Dimethyl cyclohexane
Dimethyl maleate
Dimethyl sulfoxide
1,3-Dioxolane
(glycol methylene ether)
EEP (Ethyl 3-ethoxypropionate)
ECA, EEA, EGMEA (Cellosolve acetate)
Ethanone (2,2-dimethoxy-1,2-diphe-
nyl, dimethoxy phenylacetophenone)
Ethyl acetate
Ethyl acetyl acetate
(ethyl acetoacetate)
Ethyl alcohol
Ethyl benzene
Ethyl cyclohexane
Ethyl lactate
Ethyl malonate (diethyl malonate,
malonic ester)
Ethyl pyruvate
Gamma butyrolactone
2- Heptone (methyl amyl ketone)
Hexane
2-Hexanone (methyl butyl ketone,
propylacetone)
HMDS (Hexamethyldisilazane)
Hexamethyldisiloxane
1,6-hexanediol diacrylate
2-hydroxy-2-methylpropiophenone
IPA (Isopropyl alcohol, 2-Propanol)
Isoamyl acetate
Isobutyl ketone (2,6-Dimethyl-4-
heptanone,
diisopropylacetone)
MCA (methyl cellosolve acetate,
2-Methoxyethyl acetate)
Mesitylene (1,3,5 trimethylbenzene)
Methyl acetate (methyl acetic ester)
Methyl alcohol
Methyl ethyl ketone (2-Butanone)
2-Methoxy-1-propanol
(monopropylene glycol methyl ether)
MIBK (Methyl isobutyl ketone,
4-Methyl-2-pentanone)
Mineral oil
Mineral spirits
MMP (Methyl 3-methoxypropionate)
Morpholine
NMP (N-methyl pyrrolidinone)
Octamethyltrisiloxane
Orthodichlorobenzene
(1,2-Dichlorobenzene)
2- Pentanone (methyl propyl ketone)
Petroleum spirits (Petroleum Ether)
PGE (Propylene glycol monoethyl
ether, 1-ethoxy-2propanol)
PGME (Propylene glycol monomethyl
ether, 1 methoxy-2-propanol)
PGMEA (Propylene glycol
monomethyl ether acetate,
1-Methoxy-2-propyl acetate)
PGPE (Propylene glycol propyl ether,
1-propoxy-2-propanol)
2-Propenamide
(N,N-dimethylacrylamide)
2-Propenoic acid
Propyl alcohol
Tetrahydrofuran
Trichloroethylene
2.5% TMAH (Tetramethyl ammonium
hydroxide) in DI water
Toluene
Xylene
Compatibility
The IntelliGen®dispense system has been optimized for the dispense of photoresists and other
photochemicals. The system is uniquely designed to deliver highly accurate dispenses even at very
low volumes with high repeatability.
The internal wettable surfaces of the dispense system are PTFE, modified PTFE and Kalrez.
The following is a partial list of compatible solvents. Please contact technical support for compatibility
of a specific solvent that is not included in the list.

INTELLIGEN MV DISPENSE SYSTEM
8 INSTALLATION AND USE MANUAL P/N P92500 REV. A ENTEGRIS, INC.
Communications/
power cable
Vacuum
inlet
Pressure
inlet
Fluid
inlet
Vent
Fluid
outlet
228.2 mm (8.98”)
2×5.5 mm (0.22”)
1.3 mm
(0.05”)
9.8 mm
(0.39”)
60.7 mm
(2.39”)
235.0 mm (9.25”)
242.5 mm
(9.55”)
38.0 mm
(1.50”)
60.7 mm
(2.39”)
232.0 mm
(9.14”)
242.6 mm
(9.55”)
Front View Side View Rear View
System Overview
Appearance
Note: Refer to installation drawings provided with system.

INTELLIGEN MV DISPENSE SYSTEM
ENTEGRIS, INC. INSTALLATION AND USE MANUAL P/N P92500 REV. A 9
Two-stage Technology Operating Principle
The IntelliGen dispense system uses a proven, unique two-stage design to operate dispense and
filtration functions independently. Filtration occurs at a reduced rate, which prevents microbubble
formation and maximizes filter performance.
The system uses two motors (one for fill, one for dispense), and advanced fluid paths to deliver extreme
repeatability at dispense rates down to 0.1 mL/sec. During normal operation, the dispense system cycles
through the dispense/fill, filtration, vent, purge, fill/ready and ready states.
1. READY State
• The inlet, external outlet, vent and purge
valves are closed.
• The isolate and barrier valves remain open
for a time to allow the system to reach ambient
pressure, then the valves close.
• The dispense chamber is full of fluid and is
ready to dispense.
2. DISPENSE and FILL State
• The external valve opens as the dispense
motor pushes fluid through the outlet and
onto the wafer.
• The dispense rate and volume are motor-
controlled and independent of the fill and
filtration rate.
• Simultaneously during dispense, the inlet valve
can open and begin filling the inlet chamber.
3. FILTRATION State
• The isolation and barrier valves open and the
fill motor pushes fluid through the filter and
into the dispense chamber, as the dispense
motor retracts.
• At the programmed filtration rate, the dispense
chamber fills with filtered fluid.
4. VENT State
• The barrier valve closes and the vent valve opens.
• The fill motor pushes fluid and bubbles upstream
of the filter membrane through the vent port.
5. PURGE State
• The barrier valve closes as the purge valve
opens and the dispense motor pushes fluid out
of the dispense chamber to the inlet source.
This step ensures that the dispense fluid
contains no bubbles.
6. READY/FILL State
• The dispense chamber is full of fluid and
ready to dispense.
Quick Filter Changeout
Patented Connectology®allows start-to-finish filter
change in under a minute. No tools are required, no
photochemicals to clean up and there is minimal
personnel exposure to potentially hazardous volatile
organic compounds (VOCs). Additionally, the dis-
pense systems use a patented two-stage technology
which provides rapid priming of the filter, resulting
in significant chemical savings.
Dispense/FillFiltrationPurge Fill/Ready Ready
Vent
(optional)

INTELLIGEN MV DISPENSE SYSTEM
10 INSTALLATION AND USE MANUAL P/N P92500 REV. A ENTEGRIS, INC.
The following diagram shows the absolute mini-
mum required clearances for filter replacement.
The filter can be placed into the service area, then
slid into the manifold. This feature allows easy
installation into tight areas with drip trays, etc.
below the equipment.
CAUTION! DRIP HAZARD! If the pump has
been installed with minimum changeout
space, use appropriate wipes, caps, and/or
other materials to prevent spilling of fluid
from the filter during changeout.
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267.3 mm (10.52”)
1.3 mm
(0.05”)
7.4 mm
(0.29”)

INTELLIGEN MV DISPENSE SYSTEM
ENTEGRIS, INC. INSTALLATION AND USE MANUAL P/N P92500 REV. A 11
Installation
This section covers the site requirements, tools and
equipment to install the system. Technical support
is available for all installation types.
NOTE: All components are shipped in pro-
tective packaging to prevent damage during
transport. If damage is found, please file a
damage claim with the transportation carrier
and contact customer support immediately.
CAUTION! Avoid particulate contamination.
Do not unwrap any cleanroom-packaged item
until immediately before installation.
WARNING! Only technically qualified
personnel should install the system.
Wear chemical-resistant garments and
eye protection. Chemicals are not supplied
with this equipment. Obtain a chemical
MSDS for each chemical used with the
system and follow all safety requirements.
CAUTION! Fittings and components damage
easily; handle them with extreme care.
Do not scratch or over-tighten any part.
Handling
Use care when lifting and carrying the pump. The
pump weighs in excess of 5 kg (11 lb), has blunt
edges, and can cause pinch or other personal injury.
WARNING! PINCH HAZARD! Pump weight in
excess of 5 kg (11 lb). Use care in lifting and
carrying the pump to prevent personal injury.
Facility Requirements
• Filtered N2or CDA, 551 kPa (80 psig)
• Vacuum >20 in Hg
• 24 VAC input power
WARNING! Installation location must provide
adequate exhaust ventilation and monitoring.
The installation location should incorporate
secondary containment and spill detection.
Facility must have appropriate alarm and
shutdown procedures for the chemicals in use.
Tools and Materials
Verify all system facility hookups including liquid
and power supplies. The following tools and materi-
als are required:
• Inlet/outlet tubing appropriately sized for the sys-
tem and compatible with the fluid in use
• Tube cutter
• Adjustable wrench
• Electrical power cable
• Tie wraps
• Cleanroom wipes
• Pillar insertion tool/fixture
• Flaring tools
• Mounting hardware
• Impact 2 V2 (OF style)
(sold separately)
• External stop/suckback valve
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INTELLIGEN MV DISPENSE SYSTEM
12 INSTALLATION AND USE MANUAL P/N P92500 REV. A ENTEGRIS, INC.
Install the Pump
Step 1: Preparation
1. Use the dimensional drawings as a reference
for dimensions and locations.
2. Leave appropriate space around the system
to perform any connections, maintenance
or troubleshooting. Clearance space can be
shared space with other equipment.
3. Verify all system facility hookups including
liquid and power supplies. Refer to system
specifications.
Step 2: Unpack and Position the System
Allow space to make fluid fitting connections and
power and other cable connections. Please consult
customer support with any installation questions.
1. Remove the outer protective bags in your change
room. Wipe the inner bags according
to your cleanroom procedures.
2. Bring the system components to the installation
location. Remove the inner bags.
3. Leave enough clearance around the system to
allow service access. Refer to system dimensional
drawings on previous pages.
Step 3: Connect Electrical Supply Cable
1. Connect power/communications cable. Contact
Entegris for any pinout or connection details.
Step 4: Connect N2and Vacuum Supplies
1. Connect filtered and regulated N2or CDA
supply to the inlet connection. Do not turn
on the supply at this time.
2. Connect vacuum supply to the vacuum
connector. Rating is >20 in Hg.
Step 5: Install the Filter
The dispense system cannot operate without a
filter or a flushing shell installed.
WARNING! POTENTIAL CHEMICAL HAZARD!
Obtain the chemical supplier’s MSDS sheets
for specific health and safety information.
WARNING! Wear chemical-resistant garments
and eye protection at all times when working
on or near the fluid system. Obtain the chemi-
cal supplier’s MSDS for each chemical in use
for specific health and safety information.
NOTE: UPE filter membrane does not require
pre-wetting for use with most photochemicals.
Consult a technical support representative for
additional information on filter selection and
compatibility.
1. Wear protective personal protection equipment.
2. Pull down the tab on the lever until it clears
the catch (shown with filter installed for
reference).
3. Raise the lever to open the filter manifold.
4. Verify that only ONE set of o-rings is used.
WARNING! POTENTIAL CHEMICAL LEAK!
Use one set of o-rings only. Check that the
filter has o-rings. NEVER use o-rings on both
the filter and the manifold or the system may
leak.
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INTELLIGEN MV DISPENSE SYSTEM
ENTEGRIS, INC. INSTALLATION AND USE MANUAL P/N P92500 REV. A 13
5. Slide in a new filter.
WARNING! PINCH HAZARD! Keep
fingers clear of jaw mechanism
to prevent personal injury.
6. Keep your fingers CLEAR of the jaws, then
lower the lever until the tab clicks into place
on the filter.
Step 6: Connect Fluid Lines
Minimize tubing lengths whenever possible and
maximize fluid tubing size wherever practical to
further reduce pressure drop through the tubing.
Use the shortest tube length practical, while
providing adequate service loops.
As a general rule, minimize the distance between
the source liquid and the system and between the
system and the point-of-dispense.
CAUTION! DRIP HAZARD! Do not over-tighten
fittings. Excessive force will damage the
internal seals. Tighten the fittings by hand;
then use a small adjustable wrench to tighten
for the final 1⁄4turn.
1. Insert Pillar sleeve and tube assembly into the
fluid fitting adapter.
2. Hand tighten Pillar nut.
3. Use a 13 mm wrench to hold the fluid fitting
adapter from turning when tightening the
Pillar nut, sleeve and tube assembly.
This is only to hold, Not to turn it.
4. While holding the fluid fitting adapter with
the 13 mm wrench tighten the Pillar nut
using a 16 mm wrench to the specified Pillar
recommended specifications.
CAUTION! Tightening the union nut:
Refer to Super Type Pillar Fitting
Instruction Manual No. 048L-1.
Refer to the standard Super 300 Type Pillar or
Flowell manufacturer’s installation instructions
for the making of other fitting connections.
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INTELLIGEN MV DISPENSE SYSTEM
14 INSTALLATION AND USE MANUAL P/N P92500 REV. A ENTEGRIS, INC.
Storage
Short-term “Wet” Storage
A wet pump should be left in auto-recirculation
mode to recirculate fluid and avoid problems
related to stagnant chemical.
Long-term “Dry” Storage
For long-term storage, the pump should be flushed
and cleaned prior to performing a shut-down. See
the Flushing the System section of this manual.
MMI Software
The new and improved user-friendly MMI
(Man-Machine Interface) Software provides
more information at the point of dispense for
better control of the dispense.
New features include:
• A pressure sensor on the fill side of the dispense
pump to better understand what is occurring
during the fill stage. This allows better recharge
control and also provides an indication of when
filter replacement is necessary. • An improved
dispense confirmation page with additional tests
to determine the changes that occur between dis-
penses with the ability to
compare dispenses and the referenced dispense
assigned to the recipe number.
• An improved profiling page that allows side-by-
side comparisons between last dispense profile,
any saved dispense profile, or any referenced
dispense profile (accessed from the Confirma-
tion page) for four traces: dispense pressure,
dispense motor position, fill pressure, and fill
motor position.
• A self-test page with tests designed to evaluate
the status of the dispense pump.
• An improved alarms page that allows the user
to search and sort alarms history to determine
changes to the system. Every header column
can be sorted.
• An information page that allows the user to
assign names for fab, tool, coater, resist, or fluid.
This page also is a quick reference pump infor-
mation page.
• A mouse-over feature that provides a brief
description, the minimum and maximum limits,
and the default value.
• The ability to record pump information in
real time and save to csv file.
Installing Software
To program the pump, you must establish commu-
nications with a host computer, laptop or similar
system, using the supplied software.
To install the software and establish communica-
tions with the dispense system:
1. Verify that a filter has been installed in the
pump.
2. Connect the cables as appropriate for your
configuration, as covered in the Installation
section of this manual.
3. Verify that power is being supplied to the
dispense system.
4. Install the MMI software into a separate
directory on your computer, then double-click on
the *.exe file to start the program.

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Connect Tab
The Connect tab establishes the connection between the dispense pump and the MMI software.
1. Enter the Server, Port, and Comm information.
• The exact COM port will depend on the specific computer connection and system setup.
2. Enter the Address, or click “Scan” to search for pump connections.
• Each IntelliGen MV system can be assigned a unique address from 1 to 63.
3. Click “Connect” to connect to the pump.
• The Connect tab will record all previous connections with the latest connection at the top.
4. A Time Synchronization screen may appear. Read the instructions displayed to synchronize the time
stamps between the computer and the dispense system.
When communications have been established, the MMI display will come alive with realtime dispense.

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System Tab
The System tab provides variables relating to the system management of the pump.
Variables can be changed from the default values to optimize the dispense system.
Use the mouse-over feature to obtain more information on displayed variables.

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Priming Tab
The Priming tab provides the ability to purge the dispense pump and system of air using a “priming
sequence” of steps.
• Use “Loading a Sequence from a Saved File” to load an existing priming sequence.
• Use “Creating a Sequence” to create a new priming sequence.
Samples of priming sequences are provided in Appendix 1.
Loading a Sequence from a Saved File
A priming sequence can be loaded from a previously created sequence:
1. Click on the Menu logo.
2. Select File.
3. Select Import.
4. Select Priming.
5. Select number to be assigned.
6. Select priming file to be downloaded.
7. Press Open.
8. Press Start to being priming.

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Creating a Sequence
A priming sequence can be created with multiple steps to provide the most efficient sequence
for a specific fluid type and viscosity:
1. Under “Type” select a type of priming.
2. Under “Count” enter how many times the type of priming is to be performed.
3. For each step type, rates can be changed based on application needs.
4. Continue adding types and counts that will purge the system of air.
5. Press Apply.
6. Press Start to begin priming.
7. Priming sequence can be saved by clicking on the menu logo. Select file, select save,
select number, assign name of the priming sequence, press save.

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Priming
When in use, the Priming tab is divided into three sections:
• In the top section, pump status and priming step is displayed.
• In the middle section, an estimated time of completion and countdown is displayed.
• In the priming field, finished steps are highlighted in light blue, the current step is highlighted in dark
blue and unfinished steps remain in gray.