Harmonic Drive FHA - C mini Series User manual

AC Servo Actuator
FHA - C mini Series
+
Mitsubishi Electric AC servo amplifier
"MELSERVO-J4" SSCNET Ⅲ /H communication compatible
Manual
ISO14001
ISO9001

Introduction
Introduction
Thank you very much for your purchasing our FHA-Cmini series servo actuator.
Wrong handling or use of this product may result in unexpected accidents or shorter life of the product.
Read this document carefully and use the product correctly so that the product can be used safely for
many years.
Product specifications are subject to change without notice for improvement purposes.
Keep this manual in a convenient location and refer to it whenever necessary in operating or
maintaining the units.
The end user of the actuator should have a copy of this manual.

1
SAFETY GUIDE
To use this actuator safely and correctly, be sure to read SAFETY GUIDE and other parts of this
document carefully and fully understand the information provided herein before using the driver.
NOTATION
Important safety information you must note is provided herein. Be sure to observe these instructions.
Indicates a potentially hazardous situation, which, if not avoided, could result
in death or serious personal injury.
Indicates a potentially hazardous situation, which, if not avoided, may result in
minor or moderate personal injury and/or damage to the equipment.
Indicates what should be performed or avoided to prevent non-operation or
malfunction of the product or negative effects on its performance or function.
LIMITATION OF APPLICATIONS
The equipment listed in this document may not be used for the applications listed below:
･Space equipment
･Aircraft, aeronautic equipment
･Nuclear equipment
･Household apparatus
･Vacuum equipment
･Automobile, automotive parts
･Amusement equipment, sport equipment, game machines
･Machine or devices acting directly on the human body
･Instruments or devices to transport or carry people
･Apparatus or devices used in special environments
If the above list includes your intending application for our products, please consult us.
Safety measures are essential to prevent accidents resulting
in death, injury or damage of the equipment due to
malfunction or faulty operation.
WARNING
CAUTION
CAUTION

SAFETY GUIDE
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SAFETY NOTE
CAUTIONS FOR ACTUATORS AT APPLICATION DESIGNING
Always use under followings conditions:
The actuator is designed to be used indoors. Observe the following
conditions:
・Ambient temperature: 0℃to 40℃
・Ambient humidity: 20% to 80%RH (Non-condensation)
・Vibration: Max 24.5 m/S
2
・Impact: Max 294 m/S
2
・No contamination by water, oil
・No corrosive or explosive gas
Follow exactly the instructions in the relating manuals to
install the actuator in the equipment.
・Ensure exact alignment of motor shaft center and corresponding
center in the application.
・Failure to observe this caution may lead to vibration, resulting in
damage of output elements.
・Electrostatic discharge may destroy encoder elements, therefore, we
recommend that installation be performed under the environment
where the relative humidity is 40 to 70 % RH.
CAUTION FOR ACTUATORS IN OPERATIONS
Never connect cables directly to a power supply socket.
・Each actuator must be operated with a proper amplifier.
・Do not directly apply a commercial power supply. Failure to observe
this caution may damage the actuator, resulting in fire.
Do not subject the actuator to impacts and shocks.
・Do not use a hammer during installation as an encoder is directly
connected to the actuator.
・Hitting the actuator may damage the encoder, causing uncontrollable
or faulty operation.
Avoid handling of actuators by cables.
・Failure to observe this caution may damage the wiring, causing
uncontrollable or faulty operation.
Keep limited torques of the actuator.
・Keep limited torques of the actuator.
・Be aware, that if arms attached to output element hits by accident an
solid, the output element may be uncontrollable.
CAUTION
WARNING
CAUTION

SAFETY GUIDE
3
ITEMS YOU SHOULD NOTE WHEN USING THE SERVO AMPLIFIER
Read the "MR-J4-_B (1)-RJ920J" Product Specifications (No.BCN-B72000-230)
and "MR-J4W2-0303B-MX940J" Product Specifications (No.BCN-B72000-227) and
ensure safe operation.
Before using this product, be sure to read the "MELSERVO-J4 SERIES AC
SERVO SAFETY GUIDE" which comes together with the servo amplifier.
CAUTION IN OPERATIONS
Before performing operations, set and check the parameters.
・Be sure to set correct values for the parameters listed in Chapter 3 of
this manual.
・Setting incorrect values for the parameters may cause insufficient
torque or overcurrent that may lead to actuator burnout, resulting in
injury or fire.
WARNING

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Structure of this document
Chapter 1 Outlines Outlines of product models, specifications, external drawings, etc.,
are explained.
Chapter 2 Selection guidelines Selection guidelines for the FHA-C mini series actuator are explained
in this chapter.
Chapter 3 Installation This chapter explains the procedure for installing the FHA-C mini
series actuator.
Chapter 4 Option This chapter explains options (extension cables).
Appendix How to calculate unit conversions and inertia moments are explained
in this chapter.

5
Contents
SAFETY GUIDE ..................................................................................................... 1
NOTATION ............................................................................................................... 1
LIMITATION OF APPLICATIONS............................................................................. 1
SAFETY NOTE ........................................................................................................ 2
Structure of this document...................................................................................... 4
Contents ................................................................................................................. 5
Chapter 1 Outlines
1-1 Outlines .........................................................................................................1-1
Main features ........................................................................................................1-1
1-2 Model............................................................................................................. 1-2
1-3 Actuator - Amplifier Combinations..................................................................1-3
1-4 Specifications ................................................................................................1-4
Input voltage 100VAC/200VAC specification........................................................1-4
Input voltage: 24VDC specification .......................................................................1-5
1-5 External drawing............................................................................................1-6
Side-leading cables (standard specification).........................................................1-6
Side-leading rear cables (option specification) ....................................................... 1-7
1-6 Mechanical accuracy.....................................................................................1-8
1-7 Uni-directional positional accuracy ................................................................1-9
1-8 Encoder resolution ......................................................................................1-10
1-9 Rigidity......................................................................................................... 1-11
Moment stiffness................................................................................................. 1-11
Rotation direction torsional stiffness ...................................................................1-12
1-10 Rotation direction....................................................................................... 1-13
1-11 Shock resistance .......................................................................................1-13
1-12 Resistance to vibration .............................................................................. 1-13
1-13 Operable range .........................................................................................1-14
1-14 Cable specifications...................................................................................1-20
Chapter 2 Selection guidelines
2-1 Connecting power cables ..............................................................................2-1
2-2 Change in moment of inertia of load..............................................................2-2
2-3 Verifying and examining load weights............................................................ 2-3
2-4 Examining operating status ...........................................................................2-7

Contents
6
Examining actuator rotation speed........................................................................2-7
Calculating and examining load inertia moment ...................................................2-7
Load torque calculation.........................................................................................2-8
Acceleration time and deceleration time ...............................................................2-9
Duty cycles..........................................................................................................2-10
Duty factor graphs............................................................................................... 2-11
Examining effective torque and average rotation speed ..................................... 2-13
Overload detection time ......................................................................................2-14
Chapter 3 Installation
3-1 Receiving inspection...................................................................................... 3-1
3-2 Notices on handling....................................................................................... 3-2
3-3 Installation location and installation ...............................................................3-3
Environment of installation location.......................................................................3-3
Installation.............................................................................................................3-3
3-4 Initial settings for amplifier .............................................................................3-5
3-5 PL09: Magnetic pole detection level setting................................................... 3-6
Chapter 4 Option
4-1 Extension cable .............................................................................................4-1
Appedix
Apx-1 Unit conversion .....................................................................................Apx-1
Apx-2 Calculating inertia moment....................................................................Apx-3
Formula of mass and inertia moment................................................................Apx-3

1
Outlines
Outlines of product models, specifications, external drawings, etc., are explained in this
chapter.
1-1 Outlines··········································································· 1-1
1-2 Model ············································································· 1-2
1-3 Actuator - Amplifier Combinations ········································· 1-3
1-4 Specifications ··································································· 1-4
1-5 External drawing ······························································· 1-6
1-6 Mechanical accuracy·························································· 1-8
1-7 Uni-directional positional accuracy ········································ 1-9
1-8 Encoder resolution··························································· 1-10
1-9 Rigidity···········································································1-11
1-10 Rotation direction ···························································· 1-13
1-11 Shock resistance ····························································· 1-13
1-12 Resistance to vibration······················································ 1-13
1-13 Operable range······························································· 1-14
1-14 Cable specifications ························································· 1-20
Chapter

1-1 Outlines
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Outlines
1-1 Outlines
The FHA-C mini series are AC servo actuators that provide high torque and highly accurate rotary
operation. AC Servo Actuator models are comprised of a thin speed reducer HarmonicDrive®for
precision control (model No. 8 through 14) combined with an ultra-flat AC servo motor.
The first feature of the FHA-C mini series actuators is their shape. The body is thinner and more
compact than those of any models that have been produced by the industry so far. The second feature
is its hollow structure.
A through-hole is provided at the center of the actuator, through which wirings, air pipes, and even
laser beams can be passed to supply power and give/receive signals to moving parts of machines and
devices.
Actuators, whose combined servo amplifier option code is J, are combined with Mitsubishi Electric
MR-J4-B(1)-RJ920J or MR-J4W2-0303B-MX940J series servo amplifiers. The SSCNETⅢ/H network
controls operation of the FHA-C mini series actuators correctly and precisely.
FHA-C mini series actuators play an important role in driving various factory automation (FA)
equipment, such as robot joints and alignment mechanisms for semi-conductor and LCD panel
manufacturing devices.
Main features
Slim line body
The FHA-C mini series actuator is the union of a thin type speed reducer HarmonicDrive®for
precision control and a flat AC servo motor. The length from the mounting flange face to the
actuator end is 1/3 or less of our previous AC Servo Actuator models. The compact size allows
much smaller machines and devices to be designed.
Hollow structure
A through-hole is provided at the center of the actuator, through which wirings, air pipes, and
even laser beams can be passed to supply power and give/receive signals to moving parts of
machines and devices. This feature simplifies the structure of machines and devices.
High torque
The thin type speed reducer HarmonicDrive®for precision control allows the FHA-C mini series
actuator to have a much higher output torque per external drawing than direct drive motors.
High positional accuracy
The FHA-C mini series actuators provide uni-directional positional accuracy of up to 90 seconds
(FHA-11C and 14C, with 50 and 100 reduction ratios) as well as an actuator resolution of
800,000p/rev.
High torsional stiffness
Uses the high stiffness, HarmonicDrive®CSF series.

1-2 Model
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1-2 Model
Model names for the FHA-C mini series actuators and how to read the symbols are explained below.
*1: The encoder line connectors may only be used for option J actuators.
*2: The model No. of actuators with 24 VDC (E) input power supply is always 8.
FHA-8 C-30-D200-C □J □
Model: AC Servo Actuator
FHA-C mini series
Model No.: 8, 11, 14
Version symbol
Reduction ratio of the HarmonicDrive
®
30: 1/30
50: 1/50
100: 1/100
With connector (standard specification)*1
Encoder type and resolution
D200
14-wire incremental
encoder 2,000 p/rev
Input power supply
None: 100VAC, 200V specification
E: 24VDC specification*2
Cable lead-out direction
None : Lateral (standard specification)
K : Rear (option specification)
Combined servo amplifier
J : Actuators driven with Mitsubishi
Electric servo amplifiers

1-3 Actuator - Amplifier Combinations
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Outlines
1-3 Actuator - Amplifier Combinations
When the connected amplifier option is J, the actuator is used in combination with a Mitsubishi Electric servo
amplifier.
Actuator
series
Model
No.
Input
voltage
(V)
Encoder type
Combined amplifier
SSCNET
Ⅲ
/H type
FHA-C mini
8 AC200
Incremental
MR-J4-10B-RJ920J
11 AC200
14 AC200 MR-J4-20B-RJ920J
8 AC100 MR-J4-10B1-RJ920J
11 AC100
14 AC100 MR-J4-20B1-RJ920J
8 DC24
Incremental
MR-J4W2-0303B6-MX940J
11 DC24 Not set
14 DC24
When the actuator is used for the first time, it is necessary to setup the combined actuator in the servo
amplifier. For details, refer to "3-4 Initial settings for amplifier" (P3-5).

1-4 Specifications
1-4
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1-4 Specifications
Input voltage 100VAC/200VAC specification
The specifications for the FHA-C mini series actuators with 100VAC/200VAC input voltages are as follows.
Model
Item
FHA-8C
FHA-11C
FHA-14C
30
50
100
30
50
100
30
50
100
Maximum torque Note 2 N･m
1.8
3.3
4.8
4.5
8.3
11
9.0
18
28
kgf
･
m
0.18
0.34
0.49
0.46
0.85
1.1
0.92
1.8
2.9
Allowable continuous torque
Note 2, Note 5
N
･
m
0.75
1.5
2
1.8
2.9
4.2
3.5
4.7
6.8
kgf･m
0.08
0.15
0.2
0.18
0.3
0.43
0.36
0.48
0.69
Maximum rotational speed
r/min
193
116
58
193
116
58
193
116
58
Torque constant N･m/A 3.9 6.7 14 3.8 6.6 13 4.2 7.2 15
kgf･m/A 0.40 0.68 1.4 0.39 0.67 1.4 0.43 0.74 1.5
Maximum current Note 2 A 0.61 0.64 0.48 1.5 1.6 1.1 2.9 3.2 2.4
Allowable continuous current
Note 2
A 0.31 0.34 0.26 0.74 0.69 0.54 1.27 1.06 0.85
Input power supply
(amplifier)
V AC200(3 phase/single phase), AC100(single phase)
MEF constant
Note 6 V/(r/min) 0.48 0.80 1.6 0.48 0.80 1.6 0.52 0.86 1.70
Phase resistance Ω(20℃) 14 3.7 1.4
Phase inductance
mH
5.7
3.2
1.8
Inertia moment (GD2/4)
(J)
kg･m
2
0.0026 0.0074 0.029 0.0060 0.017 0.067 0.018 0.050 0.20
kgf･cm･s
2
0.0270 0.0750 0.30 0.0610 0.170 0.680 0.180 0.510 2.00
Reduction ratio 30 50 100 30 50 100 30 50 100
Permissible moment load
N
･
m
15
40
75
kgf
･
m
1.5
4.1
7.7
Moment stiffness N･m/rad
2 x 104
4 x 104
8 x 104
kgf･m/rad
0.2 x 104
0.4 x 104
0.8 x 104
Encoding format
Incremental encoder
Encoder resolution Note 4 pls/rev
2,000 ［ 8,000 ］
Actuator resolution Note 4
pls/rev
［ 240,000
］
［ 400,000
］
［ 800,000
］
［ 240,000
］
［ 400,000
］
［ 800,000
］
［ 240,000
］
［ 400,000
］
［ 800,000
］
Uni-directional positional
accuracy
Sec.
(angle)
150 120 120 120 90 90 120 90 90
Mass kg
0.40
0.62
1.2
Protection structure
Totally enclosed self-cooled type
Environmental conditions
Operating temperature: 0 to 40°C /Storage temperature: -20 to 60°C
Operating humidity/storage humidity: 20 to 80% RH (no condensation)
Resistance to vibration: 24.5 m/s2(frequency 10 to 400 Hz)
Shock resistance: 294 m/s2
No dust, metal powder, corrosive gas, inflammable gas, or oil mist.
To be used indoors, no direct sunlight.
Altitude: less than 1,000 m above sea level
Motor insulation
Insulation resistance: 100 MΩ or more (by 500VDC insulation tester)
Dielectric strength: 1,500VAC/1 min
Insulation class: B
Safety standard compliance
CE marking
Mounting direction
Can be installed in any direction
Note 1: The table above shows the values for the output shaft.
Note 2: The values obtained when combined with an MR-J4-**B-RJ920J servo amplifier.
Note 3: All values shown are typical values.
Note 4: The values in brackets are resolution obtained when combined with an amplifier and multiplied by 4.
Note 5: Value with saturated temperature rise when installed on the following aluminum radiation plate.
FHA-8/11C: 150×150×6 [mm]
FHA-14C: 200×200×6 [mm]
Note 6: Value with 3× phase induced voltage.

1-4 Specifications
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Outlines
Input voltage: 24VDC specification
The specifications for FHA-C mini series actuators with a 24VDC input voltage are as follows.
Model
Item
FHA-8C
30
50
100
Maximum torque Note 2 N･m
1.8
3.3
4.8
kgf･m
0.18
0.34
0.49
Allowable continuous torque
Note 2, Note 5
N
･
m
0.75
1.5
2
kgf
･
m
0.08
0.15
0.2
Maximum rotational speed
r/min
193
116
58
Torque constant N･m/A 0.8 1.3 2.7
kgf･m/A 0.08 0.13 0.28
Maximum current Note 2 A 3.0 3.3 2.4
Allowable continuous current
Note 2 A 1.6 1.7 1.3
Input power supply (amplifier)
V
DC24V
MEF constant
Note 6 V/(r/min) 0.10 0.16 0.32
Phase resistance Ω(20℃) 0.54
Phase inductance
mH
0.22
Inertia moment (GD2/4)
(J)
kg･m
2
0.0026 0.0074 0.029
kgf･cm･s
2
0.0270 0.0750 0.30
Reduction ratio 30 50 100
Permissible moment load
N･m
15
kgf･m
1.5
Moment stiffness N･m/rad
2 x 104
kgf･m/rad
0.2 x 104
Encoding format
Incremental encoder
Encoder resolution Note 4 pls/rev
2,000 ［ 8,000 ］
Actuator resolution Note 4 pls/rev
［ 240,000 ］ ［ 400,000 ］ ［ 800,000 ］
Uni-directional positional accuracy Sec. (angle)
150
120
120
Mass
kg
0.40
Protection structure
Totally enclosed self-cooled type
Environmental conditions
Operating temperature: 0 to 40°C /Storage temperature: -20 to
60°C
Operating humidity/storage humidity: 20 to 80% RH (no
condensation)
Resistance to vibration: 24.5 m/s2(frequency 10 to 400 Hz)
Shock resistance: 294 m/s2
No dust, metal powder, corrosive gas, inflammable gas, or oil
mist.
To be used indoors, no direct sunlight.
Altitude: less than 1,000 m above sea level
Motor insulation
Insulation resistance: 100 MΩ or more (by 500VDC insulation
tester)
Dielectric strength: 500VAC/1 min
Insulation class: B
Safety standard compliance
CE marking
Mounting direction
Can be installed in any direction
Note 1: The table above shows the values for the output shaft.
Note 2: The values obtained when combined with an MR-J4W2-0303B-MX940J servo amplifier (driven using an
ideal sine wave).
Note 3: All values shown are typical values.
Note 4: The values in brackets are resolution obtained when combined with an amplifier and multiplied by 4.
Note 5: Value with saturated temperature rise when installed on a 150 × 150 × 6 [mm] aluminum radiation plate.
Note 6: Value with 3× phase induced voltage.

1-5 External drawing
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1-5 External drawing
The external drawings of FHA-C mini series actuators are shown below.
Side-leading cables (standard specification)
FHA-8C-xx-D200-CJ／FHA-8C-xx-D200-CEJ
Unit: mm (third angle projection)
FHA-11C-xx-D200-CJ
FHA-14C-xx-D200-CJ
Hollow shaft
inside diameter
Hollow shaft
inside diameter
Hollow shaft
inside diameter
Cable pullout (common specification)

1-5 External drawing
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Side-leading rear cables (option specification)
Unit: mm (third gle projection)
FHA-14C-xx-D200-CJK
FHA-11C-xx-D200-CJK
FHA-8C-xx-D200-CJK／FHA-8C-xx-D200-CEJK
Hollow shaft
inside diameter
Cable pullout (common specification)
Hollow shaft
inside diameter

1-6 Mechanical accuracy
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1-6 Mechanical accuracy
The mechanical accuracies of the output shaft and mounting flange are shown below for FHA-C mini
series actuators.
Mechanical accuracy
Accuracy items
FHA-8C
FHA-11C
FHA-14C
1. Output shaft
surface runout
0.010
2. Deflection of
output shaft
0.010
3. Parallelism
between the
output shaft end
mounted surface
0.040
4. Concentricity
between the
output shaft and
fitting part
0.040
Note: All values are T.I.R. (Total Indicator Reading).
The measuring for the values are as follows:
1Output shaft surface runout
The dial gauge on the fixed part measures the axial
runout (maximum runout width) of the outermost
periphery of output shaft of the output rotary unit per
revolution.
2Deflection of output shaft
The dial gauge on the fixed part measures the radial
runout (maximum runout width) of output shaft of the
output rotary unit per revolution.
3Parallelism between the output shaft end mounted surface
The dial gauge on the output rotary unit measures the
axial runout (maximum runout width) of the outermost
periphery of the mounting surface (both on the output
shaft side and opposite side) of the output rotary unit
per revolution.
4Concentricity between the output shaft and fitting part
The dial gauge on the output rotary unit measures the
radial runout (maximum runout width) of the fitting part
of the output rotary unit per revolution.
A
4
2
A
B
1
3
B
(2)
(1)
(3)
(4)
Unit: mm

1-7 Uni-directional positional accuracy
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1-7 Uni-directional positional accuracy
The uni-directional positional accuracy means the maximum positional difference between the actual
rotated angle from the datum position and its theoretical rotational angle in 1 revolution when series of
positionings are performed in the same rotation direction.
(refer to JIS B-6201-1987.)
FHA-C mini series actuators house speed reducer HarmonicDrive®for precision control, so the
positioning error of the motor shaft is compressed to 1/30, 1/50 or 1/100 by the gearing. The actual
angle transmission error of the speed reducer determines the uni-directional positional accuracy.
Therefore, the measurement value of the angle transmission error of the speed reducer is expressed
as the uni-directional positioning accuracy of the FHA-C mini series.
The uni-directional positional accuracy is shown in the table below:
Model
Item
FHA-8C
FHA-11C
FHA-14C
-30
-50
-100
-30
-50
-100
-30
-50
-100
Uni-directional
positional accuracy
Sec.
(angle)
150 120 120 120 90 90 120 90 90
Datum position
Actual stop position
Theoretical stop position
Positioning error

1-8 Encoder resolution
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1-8 Encoder resolution
The motors of the FHA-C mini series actuators are equipped with an incremental encoder of 2,000
pulses per revolution. The motor output speed is reduced to 1/30, 1/50 or 1/100 using the speed
reducer HarmonicDrive®for precision control. Accordingly, the resolution per a single revolution is 30,
50 or 100 times. In addition, the resolution is electrically multiplied by 4 when an actuator is combined
with a dedicated servo amplifier.
The resolution of the output shaft at each reduction ratio is shown in the table below.
Incremental encoder (D200)
Model
Item
FHA-8C-**-D200
FHA-11C-**-D200
FHA-14C-**-D200
-30
-50
-100
Reduction ratio
30
50
100
Actuator resolution
(when combined with
a dedicated servo
amplifier)
pls/rev 240,000 400,000 800,000
Resolvable angle per
pulse
Sec. 5.40 3.24 1.62

1-9 Rigidity
1-11
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Outlines
1-9 Rigidity
Moment stiffness
The moment stiffness refers to the torsional stiffness when a moment load is applied to the output
shaft of the actuator (shown below).
For example, when a load is applied to the end of an arm attached on the actuator output shaft, the
face of the output shaft tilts in proportion to the moment load (shown below). The moment stiffness is
expressed as the tensional moment/angle.
Model
Item
FHA-8C FHA-11C FHA-14C
Moment stiffness
N·m/rad
2 x 104
4 x 104
8 x 104
kgf·m/rad
0.2 x 104
0.4 x 104
0.8 x 104
kgf·m/arc min
0.59
1.2
2.4
Do not apply torque or load to the hollow shaft (sleeve).
The hollow shaft (sleeve) is adhered to the output rotary shaft. When a load is applied
to the hollow shaft (sleeve), delamination may occur on the output shaft and hollow
shaft (sleeve).
Do not apply or use any torque, moment load or thrust load directly to the hollow shaft
(sleeve).
Load
Gradient
CAUTION
Output shaft
Sleeve