HELIX Compressor 9600 Manual

HELIX TECHNOLOGY CORPORATION
http://www.helixtechnology.com
©2007 Helix Technology Corporation Pub. No. 8040437, Rev. 104, 06/12/2007 ECO No.18068 Printed in USA
9600 (High Voltage) Compressor Installation,
Operation, and Maintenance Instructions

©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 iii
The information in this document is believed to be accurate and reliable. However,
Helix Technology Corporation, cannot accept any financial or other responsibilities that may
result from the use of this information. No warranties are granted or extended by this
document.
Helix Technology Corporation reserves the right to change any or all information contained
herein without prior written notice. Revisions may be issued at the time of such changes
and/or deletions.
Any duplication of this manual or any of its parts without expressed written permission from
Helix Technology Corporation is strictly prohibited.
Any correspondence regarding this document should be forwarded to:
Helix Technology Corporation
Mansfield Corporate Center
Nine Hampshire Street
Mansfield, Massachusetts 02048-9171 U.S.A.
Telephone: [phone]
FAX: [phone]
The following Helix Technology Corporation trademarks and service marks may appear in
this document:
All other trademarks or registered trademarks are the property of their respective holders.
Conductron®Convectron®Cryodyne®Cryogem®
Cryogenerator®Cryo-Torr®CTI-Cryogenics®FastRegen™
GOLDLink®Granville-Phillips®GUTS®Helix®
Helix Technology..
Your Vacuum ConnectionSM Micro-Ion®Mini-Convectron®Mini-Ion™
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Stabil-Ion®ThinLine™ TurboPlus®TrueBlueSM
Vacuum AssuranceSM

©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 v
Table of Contents
Table of Contents
Figures
Tables
Safety Conventions
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-1
Signal Word Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-1
Safety Shape Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-2
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-2
Section 1 - 9600 Compressor Description
General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Compressor Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
System Documentation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
CTI-CRYOGENICS Helium Refrigeration System . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Electrical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Cooling Water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
Component Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
System Circuit Breaker . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Elapsed Time Meter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Control Circuit Breaker . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Power ON Indicator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Gas Charge Flared Fitting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Helium Pressure Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Power Inlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Return Gas Coupling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Cooling Water IN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Cooling Water OUT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Cryopump Electrical Outlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Compressor Remote Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11
Supply Gas Coupling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

vi Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation
Multiple On-Board Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
Multiple Cryo-Torr Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13
Section 2 - Unpacking and Inspection
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Shipping Carton Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Removal from Shipping Carton . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Compressor Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Helium "OFF" Condition Pressure Verification . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Shipping Carton Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Section 3 - Installation
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Supply and Return Water Line Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Hard Water Lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Flexible Water Lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Electrical Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Phase Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
Connecting/Disconnecting Helium Flex Lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
Connecting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
Disconnecting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
Single On-Board Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
Multiple On-Board Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
Helium Line Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
Power Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
Multiple Cryo-Torr Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
Helium Line Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
Power Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
Section 4 - Operation
Adjusting System Helium Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
"OFF" Condition Helium System Pressure Verification . . . . . . . . . . . . . . . . . . . . . 4-1
Compressor Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Replacement of Helium Circuit Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Section 5 - Maintenance
Scheduled Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
Suggested Maintenance Equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
Adsorber Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
Adjusting System Helium Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5

©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 vii
Reducing Helium Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5
Increasing Helium Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
Adding Helium . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
Appendix A - Customer Support Information
Customer Support Center Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1
Guaranteed Up-Time Support (GUTS®) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1
Product Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1
E-mail . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1
Appendix B - Flow Diagram
Appendix C - Troubleshooting Procedures
Troubleshooting the Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-1
Technical Inquiries . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-1
Appendix D - Schematic
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D-1
Index

viii Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation

©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ix
Figures
Figure 1-1: 9600 Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Figure 1-2: 9600 Compressor Dimensions. . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Figure 1-3: Water Flow Rate versus Pressure Drop . . . . . . . . . . . . . . . . . . . . . 1-6
Figure 1-4: 9600 Compressor Rear View Component Locations. . . . . . . . . . . 1-8
Figure 1-5: 9600 Compressor Connected to Multiple On-Board Cryopumps 1-12
Figure 1-6: 9600 Compressor Connected to Multiple Cryo-Torr Cryopumps 1-13
Figure 3-1:9600 Compressor Installation Flowchart . . . . . . . . . . . . . . . . . . . . 3-2
Figure 3-2: 9600 Compressor Circuit Breaker Terminals (Cover Removed) . 3-5
Figure 3-3:Connecting/Disconnecting Helium Flex Line Couplings. . . . . . . . 3-8
Figure 3-4: Single On-Board Cryopump Connections . . . . . . . . . . . . . . . . . . . 3-9
Figure 3-5: Single Cryo-Torr Cryopump Installation. . . . . . . . . . . . . . . . . . . 3-10
Figure 3-6: Recommended Multiple On-Board Cryopump or Waterpump Installation
(Splitter Box located at Process Tool) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
Figure 3-7: Alternative Multiple On-Board Cryopump or Waterpump Installation
(Splitter Box located at Compressor) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
Figure 3-8: Multiple Cryo-Torr Cryopump Installation . . . . . . . . . . . . . . . . . 3-15
Figure 3-9: Multiple Cryo-Torr Cryopump Installation . . . . . . . . . . . . . . . . . 3-16
Figure 5-1: Disconnecting Self Sealing Couplings. . . . . . . . . . . . . . . . . . . . . . 5-2
Figure 5-2: Adsorber Location in 9600 Compressor (Rear Panel Removed). . 5-4
Figure 5-3: Helium Pressure Control Components. . . . . . . . . . . . . . . . . . . . . . 5-5
Figure B-1: 9600 Compressor Flow Diagram P/N 8135001 Rev. A . . . . . . . . B-2
Figure D-1: 9600 High Voltage Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . D-4

x Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation

©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 xi
Tables
Table 1-1:Compressor Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Table 1-2:Electrical Input Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Table 1-3:Cooling Water Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Table 1-4:General Compressor Operating Specifications . . . . . . . . . . . . . 1-7
Table 1-5:Cryopump Electrical Outlet Pin Assignments . . . . . . . . . . . . . 1-11
Table 1-6:Compressor Remote Connector Pin Assignments . . . . . . . . . . 1-11
Table 4-1:9600 Compressor Helium ("OFF" Condition) Charge. . . . . . . . 4-1
Table 5-1:Suggested Maintenance Equipment . . . . . . . . . . . . . . . . . . . . . . 5-1
Table C-1:Compressor Troubleshooting Procedures . . . . . . . . . . . . . . . . . C-2
Table D-1:Basic Control Assembly Legend. . . . . . . . . . . . . . . . . . . . . . . . D-1
Table D-2:On-Board/Cryo Electrical Module P/N 8135127G002 Legend D-2
Table D-3:On-Board Output Module P/N 8135148G001 Legend . . . . . . . D-3

xii Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation

©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 S-1
Safety Conventions
Introduction
Follow all safety precautions during installation, normal operation, and when
servicing CTI-Cryogenics products.
This chapter explains the safety conventions used throughout this manual.
CTI-Cryogenics uses a specific format for cautions and warnings, which includes
standard signal words and safety shapes.
See also the Customer Support appendix or call your local Customer Support
Center for assistance.
Signal Word Descriptions
All cautions and warnings contain signal words, which call attention to safety
messages and designate the degree of hazard seriousness. The following table
shows the signal words and their meanings that may be used in this document.
Term Example Definition
CAUTION
A signal word accompanied by a safety shape
that indicates a potentially hazardous situation
or unsafe practice.
If not avoided, the action may result in minor
or moderate personal injury or equipment
damage. A CAUTION is highlighted in
yellow.
CAUTION
A signal word that indicates a situation or
unsafe practice, which if not avoided may
result in equipment damage. A CAUTION is
highlighted in yellow.
WARNING
A signal word accompanied by a safety shape
that indicates indicates a potentially hazardous
situation.
If not avoided, the action may result in serious
injury or death. A WARNING is highlighted
in orange.

Safety Shape Descriptions
S-2 Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation
Safety Shape Descriptions
All cautions and warnings contain safety shapes, which have specific safety
meanings. The following table shows some of the safety shapes used in this
document and their meanings.
References
For more information about safety standards, see the following documents:
• ISO 7010: 2003(E), Graphic symbols - Safety colours and safety
signs - Safety signs used in workplaces and public areas
• ISO 3864-1: 2002(E), Graphic symbols - Safety colours and safety
signs - Part 1: Design principles for safety signs in workplaces and
public areas
Example Term Shape Definition
General Warning Indicates a general hazard. Details about this
hazard appear in the safety notice explanation.
High Voltage Indicates a high voltage hazard.
Hot Surface Indicates a surface is hot enough to cause
discomfort or a burn.

©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 1-1
Section 1 - 9600 Compressor Description
General
This manual provides the information required to install, operate, and
maintain the CTI-CRYOGENICS 9600 Compressor.
NOTE: All personnel with installation, operation, and maintenance
responsibilities should become familiar with the contents of both the 9600
Compressor Installation, Operation, Maintenance, and appropriate
cryopump manuals to ensure safe, high quality, and reliable system
performance.
Compressor Configurations
The 9600 Compressor supports either On-Board or Cryo-Torr Cryopumps.
For multiple cryopump installations, an On-Board Splitter Box or Cryo-
Torr Interface can be used for cold head power distribution that reduces
total cable requirements as shown in Figure 1-5 and Figure 1-6.
System Documentation
The manuals for a system cover two basic components: the cryopump and
the Compressor. A manual is shipped with each system component to
provide information for installation and operation of that component. A
loose-leaf binder with index tab separators is also provided so you can
compile a complete set of tabulated manuals.
CTI-CRYOGENICS Helium Refrigeration System
The operation of CTI-CRYOGENICS’ cryopumps is based upon a closed
loop helium expansion cycle. The system is made up of two major
CAUTION
Refer to “Appendix A - Customer Support Information” to contact the
local Customer Support Center for information on connecting 9600
Compressors to a manifold with other CTI-CRYOGENICS
compressors.

CTI-CRYOGENICS Helium Refrigeration System
1-2 Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation
components: the cryopump, which contains the cold head, and the helium
Compressor which compresses the helium gas.
Refrigeration is produced in the cryopump cold head through periodic
expansion of high pressure helium in a regenerative process. The high
pressure helium is provided by the Compressor. Low pressure helium
returning from the cold head is compressed into the necessary high
pressure to be returned to the cold head. The energy required to compress
the helium is rejected as heat through the cooling water.
High pressure room temperature helium is transferred to the cold head
through the supply lines. After expansion, low pressure helium is returned
to the Compressor (at or near room temperature) to repeat the cycle in a
closed loop fashion. Large separation distances can be accommodated
between the Compressor and the cryopump.
In the Compressor, helium is compressed using a highly reliable oil
lubricated commercial Compressor. Helium purification takes place via
several stages of oil removal. The final stage of purification is performed
with a replaceable adsorber cartridge. In order to maintain peak efficiency,
the adsorber must be replaced every three years. The 9600 Compressor is
shown in Figure 1-1.

©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 1-3
Figure 1-1: 9600 Compressor
9600
COMPRESSOR
COMPRESSOR
9600

Specifications
1-4 Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation
Specifications
Dimensions
The dimensions of the Compressor are shown in Figure 1-2.
Figure 1-2: 9600 Compressor Dimensions
19.52 in.
(496 mm) 21.50 in.
(546 mm) 1.28
(32mm)
23.36 in.
(593 mm)
3.18 in.
(81 mm)
14.4 in.
(366 mm)
CAUTION
Do not place a weight greater than 75 lbs. (34Kg) on top of the
Compressor.

©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 1-5
Weight
The weight of the Compressor is listed in Table 1-1.
Electrical
The electrical specifications of the Compressor are listed in Table 1-2.
Cooling Water
The water used to cool the Compressor must meet the specifications shown
in Table 1-3 for proper system operation.
Table 1-1: Compressor Weight
Weight lbs./kg
267/121kg
Table 1-2: Electrical Input Specifications
Parameter Value
Operating Voltage Range/Frequency 342-457V/50 Hz
342-506V/60 Hz
Phase 3
Nominal Input Power 5.5 KW/60 Hz
5KW/50 Hz
Nominal Power Factor 0.85
Rated FL/LR* Current 8/40
Minimum Electrical Service 15 Amps
*FL/LR = Full Load/Locked Rotor
Table 1-3: Cooling Water Specifications
Parameter Value
Maximum Inlet Temperature 90°F (32°C)
Minimum Inlet Temperature 50°F (10°C)
Flow Rate 2.75 ±1.25 gpm (10.4 ± 4.7 lpm)
NOTE: Water conditioning may be required for applications not meeting these requirements.

Specifications
1-6 Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 ©2007 Helix Technology Corporation
Figure 1-3: Water Flow Rate versus Pressure Drop
General
The information in Table 1-4 provides general Compressor operating
specifications.
Pressure Drop (inlet-to-outlet) See Figure 1-3
Maximum Inlet Pressure 100 psi (6.9 bars)
Alkalinity 6.0 - 8.0 pH
Calcium Carbonate < 75 ppm
Table 1-3: Cooling Water Specifications (Continued)
Parameter Value
NOTE: Water conditioning may be required for applications not meeting these requirements.
4.00
3.50
3.00
2.50
2.00
1.50
1.00
0.50
1357911
WATER FLOW RATE (GPM)
WATER PRESSURE DROP (PSID)
ACCEPTABLE
OPERATING
LINE
.07 .49
.21 .35 .63 .7715.2
13.3
11.40
9.50
7.60
5.70
3.80
1.90
WATER FLOW RATE (LPM)
WATER PRESSURE DROP (Bars)
NOTE: Figure 1-3 defines the water flow rate through the Compressor as a function of the pressure drop from
water inlet to water outlet. You must provide the correct pressure drop in your water supply system to ensure that
the water flow condition meets the requirements specified in Table 1
-
3.