HELIX CTI-CRYOGENICS CRYO-TORR 100 User guide

CTI-CRYOGENICS
HELIX TECHNOLOGY CORPORATION
CRYO-TORR® 100, 7, 8 and 8F
HIGH-VACUUM PUMPS
(USED WITH 8300™ OR SC (AIR) COMPRESSOR)
Installation, Operation
and Servicing Instructions
MB040240
Rev. A (9/91)
Revised September 1991
Copyright © 1991, Helix Technology Corporation.
Printed in U.S.A.
3750
-------~--~.-"-_=~==~~.,__-___:c~~~=:~---==_=cc::_:
266 SECOND AVENUE POST OFFICE BOX 9171 WALTHAM, MA 02254-9171 [phone]

Manual Contents
This manual provides installation, operation and
servicing instructions by major system component
(cryopump, compressor,
and controller) to simplify
getting the world's finest high·vacuum
pump into
operation quickly and efficiently, meeting its designed
capabilities.
Technical Inquiries
en·CRYOGENICS has a world wide system of
customer supportcenters available
to answer technical
questions, or
to assist you with installation, operation
and maintenance ofyour product. All customer support
centers
have "rapid response" capabilities providing
24·hour technical support. In the Continental U.S.A.
and Canada you may call toll free for assistance 24
HOURSA DAY, 7DAYSA WEEK.
U,S. AND CANADA
DIAL TOLL FREE: 1·8oo·FOR·GUTS
367·4887
EasWm
en·CRYOGENICS
266 Second Avenue
Waltham, Massachusetts 02254·9171, U.S.A.
Telephone (617) 622·5000
Telecopier/Fax (617) 622·5222
Western
en·CRYOGENICS
3350 Montgomery Drive
Santa Clara, California 95054, U.S.A.
Telephone (408) 727·8077
Telecopier/Fax (408) 988·6630
EUROPE
Germany
en·CRYOGENICS, GmbH
Haasstrasse 15
D·61oo Darmstadt
Germany
Tel: 49·6151·86377
Fax: 49·6151·891635
ii
EI:lloo:
CTI·CRYOGENICS, SA
4, rue Rene Raze1
Saclay
F· 91892 ORSAY CEDEX
France
Tel: 311·6985·3900
Fax: 311·6985·3725
England
en·CRYOGENICS,Ltd.
Unit 4,
Avenue Two
Station Lane Industrial Estate
Witney,
Oxford OX8 6YD
England
Tel: 44·993·776436
Fax: 44·993·772067
FAR EAST
llII2Wl
Daido Sanso K.K.
6·40 2·cho, Chikko Shinmachi
Sakai City
Osaka Pref.
592 JAPAN
Tel: 81·722-44·3011
Fax: 81·722·44·8135
K=I
Zeus Company, Ltd.
4th Floor, Zeus Bldg.,
512·8, Dogok·Dong, Sucho·ku
Seoul,
Korea
Mailing Address: Youngdong P.O. Box 992
Seoul, Korea
Tel: 82·2·577·3181/6
Fax: 82·2·576·3199
Your high· vacuum equipment is designed and
manufactured to ensure a minimum of maintenance.
However, should your unit require service or if you need
technical assistance, contact the nearestcustomer
support center.
Have the following information
available
when placing the call so we may assist you
quickly.
• Equipment Type • Product Application
• Product Serial No. • Hours ofOperation
• Product Part No. • Specific Problem Area

eTl-CRYOGENICS
--- ~- --- ----
HELIX TECHNOLOGY CORPORATION
-- ---- -------~- - - - - ----- -- -----,-"""-
SAFETY CONSIDERATIONS
Your Cryo·Torr"' High Vacuum Pump has been engineered to provide extremety safe and dependable operalion when properly
used. Certain safely considerations need to be observed during the normal use of your vacuum pump equipmenl. Warning blocks
within the Manual text pinpoint these specific safety considerations. Warnings are delined as hazards or unsafe practices which could
result in severe injury or loss of life.
IAWARNINGI
TOXtC, CORROSIVE OR OANGEROUS GASES present in a cryopump could
cause severe injury upon contacl.
1. Always vent such gases to a safe location, using an inert purge gas.
2. Clearly identify such gases on containers used to store or ship equipment after such
exposure.
FLAMMABLE OR EXPLOSIVE GASES present in a cryopump could cause severe injury if igniled.
1. Always venl such gases to a safe location, using an inert purge gas.
2. Do nol install a hot·filament Iype vacuum gauge on the cryopump side of the roughing
valve; it could be an ignition source of flammable gases in the pump.
3. Cryopumping oxygen/ozone requires special precautions and frequent regeneration. Ozone
may be present as a by·product of oxygen processes.
HIGH VOLTAGE is present within the system and can cause severe injury from electric
shock.
1. Disconnect the system from all power sources before making electrical connections be·
tween system components and also belore pertorming Troubleshooting and Maintenance
procedures.
HIGH GAS PRESSURE is present within the system and can cause severe injury from propelled
particles or parts.
1. Do not modify or remove the pressure relief valves, either on the cryopump or within the
helium compressor.
2. Always depressurize the adsorber to atmospheric pressure before disposing of il.
3. Always bleed the helium charge down to atmospheric pressure before servicing or
disassembling the self·sealing gas half·couplings.
BEFORE INSTALLING, OPERATING OR SERVICING EQUIPMENT,
READ THIS MANUAL WHICH CONTAINS IMPORTANT SAFETY INFORMATION.
r r
iii

7
CRYOPUMP OXYGEN PROCEDURES
_I
AWARNING
COMBUSTION SUPPORTED BY OXYGEN IN THE PUMP COULO CAUSE
SEVERE INJURY. WHEN OXYGEN IS USED AS A PROCESS GAS, SPECIAL
PRECAUTIONS DESCRIBED IN THE TEXT BELOW SHOULD BE TAKEN.
When oxygen is used as a process gas, the following precautions should be taken.
1. Follow all cryopump operaling instructions including:
en-CRYOGENICS
• Insure that there are no sources of ignition (e.g., hot filament vacuum gauges) on the cryopump side of the high vac valve
operating during the warming or venling of the pump.
• Perform inert gas purge regenerations at flow rates recommended for cryopumps.
2. Regenerate as frequently as praclical to minimize the amount of oxidizer present in the cryopump.
3. It is standard practice in the vacuum industry that any system exposed to richer·than·air oxygen levels should be prepared for
oxygen servICe per the manufacturer's recommendations, including use of oxygen service lubricating oils in roughing pumps.
~I
AWARNING
EXPLOSION OCCURING FROM OZONE IN THE PUMP COULD CAUSE
SEVERE INJURY. OZONE CAN BE PRESENT AS A BY·PRODUCT OF I
OXYGEN PROCESSES. IF OZONE IS PRESENT, SPECIAL PRECAUTIONS
DESCRIBED IN THE TEXT BELOW MUST BE TAKEN.
Ozone may be unknowingly produced in an ionizing process (e.g., sputtering, etching, glow discharge). Explosive conditions may
exist if ozone is present, especially during warming of the cryopump. Signs of ozone's presence are:
1. Crackling/popping sounds (as in electrical arcing) occurring within the first few minutes of regeneration,
2. Gas venting from the cryopump during regeneration may have a pungent smell, similar to that present in an arc welding opera·
tion or after an electrical storm.
NOTE: A change in process may increase the amount of ozone present.
If ozone is present, the following precautions must be taken.
1. All of the above oxygen precautions must be followed. The required regeneration frequency is dependent upon flow
and process conditions. Daily regeneration may be required. Call CTf.CRYOGENICS for assistance.
2. Reduce the oxygen mixture to the lowest level the process will allow.
iv

v/vi
eTi-CRYOGENICS
-- ---------------~---------- ..
Hiux TECHf-!C?!P~~£~~_~ORATI<2_~
Contents
Section
1. Introduction
2.
Inspection
3.
Quick Installation and
Startup
4.
Installation
5.
Operation
6.
Regeneration
7.
Maintenance Procedures
Appendices
A. Troubleshooting Procedures
B. Illustrated Parts Breakdown
C. Accessories List for Cryo-Torr
High-Vacuum Pumps
D. Conversion of Hydrogen-
Vapor-Pressure Gauge
Readings to Temperature
a

)
Illustrations
1.1 Typical Cryo- Torr® High-Vacuum
Pumping System
(Cryo- Torr 8 Cryopump and
8300™ Compressor shown) ........... viii
1.2 Cutaway views of
Cryo-Torr Cryopumps. . . • . . . . . . . . . .
1-2
3.1 Block diagram for
system installation. . . . . . . . . . • • . . . . 3-2
3.2
Cryopump interconnection ...•..•.... 3-3
4.1 Multiplecryopump installation with
8300™ Compressorpowered
by 8002'"Controller. . . . . . . • . . ..... 4-4
B.1 Exploded view of Cryo- Torr 100
Cryopump .••.......•......•.. B-3
B.2 Explodedview ofCryo-Torr 7
Cryopump. • . . . • . . . . . . . . . . . . . .
B-5
B.3 Explodedview ofCryo-Torr 8
Cryopump. . . . • . . . . . . . . . . • . . . .
B-7
B.4 Exploded view ofCryo-Torr 8F
Cryopump. . . . . . . . . . . . . . . . . . .• B-9
vii
CTI-CRY()(jENICS
Tables
1.1 Cryopump Specifications. . . . . . . • . . .. 1-2
3.1 Summary ofProcedures for
Quick Installation and Startup. . . . . . . .. 3-1
5.1 Typical Pressure Variations During
Cooldown and Normal Operation. . . . . .. 5-2
A.l Troubleshooting the Cryopump . . . . . . .• A-3
LfoTf-- & ~g- 3'7J I
f;roa k-,
OX -. 3'"C;;? ~ Y6?j'l)
(

® HELIUM
INSTALLATION CRYO-TORR 8 FILTRATION
TOOL KIT CRYOPUMP CARTRIDGE
INSTALLATION,
OPERATION
CON NECTING
PIPI NG
8001
CONTROLLER}
COLD HEAD
POWER CABLE
AND SERVICING
INSTRUCTIONS
CONTROLLER/COMPRESSOR
POWER CABLE
QI-c:B-YOGENICS
~_~_~-'-~_J~c_~~_Q~9,~y ___ c_q~_~Q~_~T~9~
8300
COMPRESSOR
COMPRESSOR
LOW VOLTAGE
CONTROL CABLE
Figure 1.1 Typical Cryo-Torr<ll> High-Vacuum Pumping System
(Cryo-Torr 8 Cryopump and 8300™ Compressor shown)
viii

ai-CRYOGENICS
HELIX TECHNOLOGY CORPORATION
Section 1:
Introduction
1.1 General ........................... 1·1
1.2 Installation, Operation and Servicing
Instructions . . . . . . . . . . . . . . . . . . . . . . . . 1·1
1.1
General
This manual provides instructions for installing,
operating
and servicing the Cryo- Torr® 100, 7, 8 and 8F
Cryopumps. If you are installing or operating a high-
vacuum system you should also have available the
Model SC Compressoror 8300
T>I Compressor
and the
manuals listed below that apply to your particular system.
MANUAL REQUIRED
SYSTEM 8300
MODELSC
COMPONENT COMPRESSOR COMPRESSOR
Cryo-Torr 100,7, M8040240
M8040240
8 and 8F High-
Vacuum Pump
83OO
T>I
M8040242
------
Compressor
ModelSC
-----.
M8040243
Compressor
8001 "'/8002'"
M8040241
------
Controller
The
manuals cover two basic components: The
cryopump, compressor,
and the controller where
applicable.
Each manual presents infonnation for
installation, operation and servicing of that component.
Amanual is shipped with each system component
(cryopump, compressor,
and controller).
I-I
When you purchase a system, you will receive the three
manuals necessary for
system installation, plus a loose-
leafbinder with index tab separators allowing you to
compile acomplete indexed system notebook.
The Cryo-TorrHigh-Vacuum Pump System, shown in
Figure 1.1, provides fast, clean pumping ofall gases in
the 10-
3
to 10-
10
torr range. It operates on the principle
that
gases can be condensed and held at extremely low
vapor pressure, achieving high speeds and throughputs at
the cryogenic temperatures of the operating cryopump.
The cryopump is a reliable rugged unit that requires a
minimum of servicing. The cryopump exposes no
moving parts, operating fluids, or backing pumps to the
working vacuum; the possibility ofcontamination is
eliminated.
Figure
1.2 shows cutaway views of the cryopumps. The
CT-8F cryopump is virtually identical in operation to the
CT-8 and is ofa flat pump design that offers a dimen-
sional alternative when vertical space is limited. The
CT-SF cryopump is available with gas and electrical
connectors facing
in either a left or right direction to
match your piping and electrical interface.
1.2 Installation, Operation and
Servicing Instructions
Installation, Operation and Servicing Instructions for
your Cryo-Torr vacuum pump provide complete and
easily accessible information. All personnel with
installation, operation, and servicing responsibilities
should
become familiar with the contents of these
instructions to ensure safe, reliable, and efficient
cryopump performance.

Ui
15K CONOHISING
ARRAY
VACUUM
VESSEL
15K CRYO-
AOSOR81NG ARRAY
80K RADIATION
SHIELO
COlO~HEAO
CYLINDER
PRESSURE
RELIEF
VALliE
(HIOOEN)
STANOPIPE
FILTER
GAS flOW FROM USER'S
VACUUM SYSTEM INTO
INLET OF CRYOPUMP
I I I j j
CT·100
GAS FLOW FROM USER'S
VACUU'" SYSTEM INTO
INLET Of CRYOPUMP
IHIHIH
CT-8
80K CONDENSING
ARRAY
MOUNTlNG flANGE
PURGE FITTING
ACCESSORY PORT
CONNECTION
TEMPERATURE
SENSOR CONNECTOR
PRESSURE
RELIEF VALVE
~ MO'","" FLANGE
15K ARRAY
80K RADIATION
SHIELO
~-"':UU'VESSEL
REGENERATION
PURGE fiTTING
COLO-HEAD
CYLiNOER
ORIVE-UNIT
ACCESSORY
PORT
CONNECTION
15K CONOENSING
ANO CRYO-
ADSORBING ARRAY
1
CfI-CRYCXJENICS
HELIX TECHNOLOGY CORPORATION
GAS fLOW FROM USER'S
VACUUM SYSTEM INTO
INLET OF CRYOPUMP
MQUNTING flANGE
CONDENSING
ARRAY
L_-- VACUUM VESSEL
'1.,-+---80K RADIATION
SHiElD
COLO-HEAD
CYLINDER
~~. -~- ORIIIE UNIT
ACCESSORY HELIUM-
iPO'::R::T'~-CTIOH ,/a~~~~~~~~ ~~~~~fh~t~t-- US SUPPLY
C, CONNECTOR
•,
FI LTER
CT·7
G~S HOl FRail uSE~'S
\~(UW SlSI[~ I~TO
I~~ET Of CH10Pl!~?
CRi~E-u~lr
OISPl~CER A$SEIIBLl
CT-8F
HELlUM-
GAS RETURN
CONNECTOR
RELIEF VALVE
&OK 'O\CHSI~~
MRlY
&OK Pll'lAT!C~ SHIELD
~ACUUU ,ESSEL
T[~P£~~IUP£ S[~SO'!
{0~NE:Cl0R
~CCESSQRl POR'
CO~~ECTlO~
PRESsu.q[ RWEF
~Al~E
HrUUI!-GAS SU;>;>lY
CO!.HtlOR
HE~IUY-GAS HTUR~
{O~~ECIOR
UI'
/.\ r
Figure 1.2 Cutaway views of Cryo·Torr Cryopumps
l\
V'
1-2

eTi-CRYOGENICS
HELIX -TEC'H'NOLOGY CORPORATION
----- ----------,-,---------------- ----,-,,-------
) Table
1.1 Cryopump Specifications
WEIGHT (APPROXIMATE)
SHIPPING
WEIGHT
CRYOPUMP LBS KG LBS
KG
CT-IOO 22 10 30 11
CT-7
25 11 32 14.5
CT-S 45
20
50
23
CT-SF 42 20 47
21
PUMPING SPEEDS (LITER/SECOND)
CRYOPUMP WATER AIR
HYDROGEN ARGON
CT-IOO
1,000 350 4S0
285
CT-7
3,600 1,000 1,000 S50
CT-S
4,000 1,500 2,500
1,200
)
CT-SF 4,000
1,500 2,200 1,200
CROSSOVER (MAXIMUM GAS BURST)
CRYOPUMP TORR-LITERS
CT-IOO
40
CT-7
50
CT-S 150
CT-SF 150
CONDENSABLE GASES CAPACITY
(ARGON, NITROGEN, OXYGEN, ETC,)
CRYOPUMP STANDARD LITERS TORR-LITERS
CT-IOO 90
6S,400
CT-7
350 266,000
CT-S
1,000
760,000
CT-SF
1,000
760,000
1-3

J
CTI-CRYCXJENICS
-,,---- ------~-- - - -,,- --- - ------
Table 1.1 Cryopump Specifications (Cont.)
Capacity: HYDROGEN GAS CAPACITY
HYDROGEN PARTIAL STANDARD TORR·
CRYOPUMP PRESSURE (TORR) LITERS LITERS
CT-IOO
5 x 10-
8 1
7ffJ
CT-IOO
5 x 10-6
2 1,520
CT-7
5 x 10-
8 2
1,520
CT-7
5 x 10-6
4 3,040
CT-8
5 x 10,8
6 4,560
CT-8
5 x 10-6
12 9,120
CT-8F 5 x
10,8
4 3,040
CT-8F 5 x
10-6
8 6,080
ARGON THROUGHPUT (MAXIMUM)
TORR·LITERS!
CRYOPUMP SCCIMINUTE SECOND
CT-IOO
75
0,95
CT-7
75 0.95
CT-8
700 8.9
Interface connections CT-8F 700
8.9
Helium supply and reJum piping
10 ft. (3 m) each with 1/2-inch self-sealing couplings. (Longer lengths, elbows and tees available.)
Cold-headpower cable
10 ft. (3 m). (Longer lengths available.)
Temperature sensor
(a) Hydrogen-vapor-pressuregauge
(b) Diode temperature sensor connector mates with Amphenol PIN 48-J6R-1O-55/48-23-4 I
Accessory port connection (Roughing)
Supplied by CTI
NW-25 ISO-KFflange
(with clamp and blank flange)
Regeneration purge fitting
Supplied
by CTI
Parker CPI ULTRASEAL SIZE 6
(with plug
and nut)
Mok:
The cryopump may be operated in any position.
1-4

en-CRYOGENICS
Ii
HELIX TECHNOLOGY CORPORATION
-----~-----------------~~ --- - - --,-----
Table 1.1 Cryopump Specifications (Cant.)
Interface dimensions:
Note: The dimensions present below are basic interfacing dimensions required for cryopump installation. If additional
dimensions are required, contact your sales representative or the Order Processing Department to obtain an interface
drawing for your particular cryopump.
DIMENSIONS
A B C D E
CRYOPUMP (lnJmm) (lnJmm) (lnJmm) (lnJmm) (inJmm)
cr-100
(MET.SEAL) 12.9 (328) 9.4 (240) 6 (152) 3.9 (99) 10(256)
(ISO) 12.8 (323) 9.3 (235) 5.12 (130) 3.9 (99) 10 (256)
cr-7
(ISO) 13.25 (337) 9 (229) 9.5 (130) 7.9 (200) 11.8 (300)
(ANSI) 13.25 (337) 9 (229) 11 (279) 7.9 (200) 12.6(320)
(UHV) 13.25 (337) 9 (229) 10 (254) 7.9(200) 12(307)
cr-8
(ANSI) 20.7 (526) 13.8 (351) 11 (279) 8 (203) 14.5 (370)
(MET.SEAL) 20.7 (526) 13.8 (351) 10 (254) 8 (203) 14.5 (370)
(UHV) 20.7 (526) 13.8 (351) 10 (254) 8 (203) 14.5 (370)
(ISO) 20.7 (526)
13.8 (351) 9.5 (240) 8 (203) 14.5 (370)
cr-SF
(ANSI) 22.6 (574) 15.8 (402)
11 (279) 8 (203) 14.5 (370)
(ISO) 21.8 (555) 15 (381) 9.5 (240) 8 (203) 14.5 (370)
+Nore: CT·8F depth dimensions is 7.1 in. (179.6 mm) approximate
CT-7
I:
®
®
'I
TIT
®©@
li
-rea;
CT·8F CT-8
1-5/1-6

)
ai-CRYOGENICS
HELIX TECHNOLOGY CORPORATION
--- -- ------- -- - - ----~~----
Section 2:
Inspection
2.1 Packaging of the System.
2.2 The Cryopump. . . . . . .
2.1 Packaging of the System
A Cryo-Torr High-Vacuum Pump System is packaged
in three orfour separate cartons, depending upon
whether an 8300 or Model SC Compressor is used.
Listed below are the contents ofeach carton, as they
relate to these two compressor applications. Note that
an Installation, Operation, and Servicing Manual is
included in cartons for the high-vacuum pump,
compressor and controller; each
manual covers the
componentpackaged in that carton.
When installing a
Cryo- Torr High-Vacuum Pump
System,
CTI recommends that as you unpack a
component;
you then perform an inspection and the
necessary tasks for system installation for the component
according
to the manual (included with the component).
Final system installation
and operation will beperformed
following procedures
in the cryopump manual
(M8040240).
2.2 The Cryopump
2-1
2-1
On receipt, remove the cryopump from its shipping
carton and inspect
the cryopump for evidcnce of
damage. Report any damage to the shipper at once.
Also, retain the shipping cartons for use in storage or
return shipment.
Inspect
the cryopump for damage by examining the
following:
1. Overall exterior.
2. Mounting flange and its sealing surfaces after
removing the protective cover.
3. Louver assembly of the 80K condensing array.
Replace
the protective cover.
For Your Information--
If you are already familiar with the details ofcryo-
pump installation, proceed directly to Section 3 so
your cryopump can be made operational quickly. If
not, proceed to Section 4 for detailed installation
procedures.
COMPRESSOR USED
CARTON
MANUAL
LABEL 8300
MODEL SC (AIR) NO.
CRYO-TORR@
Cryopump Cryopump
M8040240
Compressor
8300 Compressor
~ .. -M8040241
----- SC (Air) Compressor M8040243
Accessories
MaintenanceTool Kit Maintenance Tool Kit
and Accessories, and Accessories
.. _-
PIN 80320400013 PIN 80320400004
Controller 8001 or 8002
.~ .. -M8040241
Controller
2-1/2-2

Section 3:
Quick Installation
and Startup
crl-CRYoc.ENICS
HELIX TECHNOLOGY CORPORATION
Many Users are already familiar with the details of
cryopump, controller, and compressor installation, and
basic operation. This section presents the installation
and startup steps
in summary form so that the cryopump
can
be made operational quickly. Table 3.1, and Figure
3.1, presentsummary procedures for quick installation
and startup. Each step in the table is followed by a
reference to the location in the Manual where detailed
information is given.
This Section
is merely designed to get your system
"running". No attempt is made here to present detailed
procedures for installing and operating your system.
Detailed information is covered in Section 4 and
Section
5.
Table 3.1 Summary of Procedures for Quick Installation and Startup
REFER TO REFERENCE
STEP PROCEDURE (See Figures 3.1 and 3.2) FOR DETAILS
ACAUTION
1.
DO NOT connect the controller or cryopump
to its power source until all connections have
been made between the components of the
high-vacuum system.
2.
The switch(es) on the front of the controller
or compressor must be in the OFF position
before making any and all electrical connections.
1. Mount the cryopump to the vacuum system.
Section 4.1, page 4··1
2. Connect roughing system, purge gas system and vent pipe to Section 4.2, thru 4.4
cryopump.
pages 4-1 and 4-2
3. Connect the helium-gas supply and return lines between the Section 4.5, page 4-2
cryopump and the compressor.
4.
Electrically connect the compressor and controller. (ModeI8300
Section 4.6, page 4-3
Compressor)
a. Connect compressor control cable between controller and
compressor.
b. Connect controller to compressor power cable.
5.
Connect cold-head power cable from the cryopump to the
Section 4.6, page 4-3
controller or compressor.
6. Connect the controller or compressor main power cable to the
Section 4.6, page 4-3
power source.
YOUR SYSTEM IS NOW READY FOR OPERATION.
7.
Start the system by using the system power ON/OFF switch.
Section 5.3, page 5-2
(On SC Compressor also turn on the cold head switch.)
3-1

ai-CRYOGENICS
UNPACK AND
UNPACK AND
UNPACK AND
UNPACK AND
INSPECT
INSPECT
INSPECT
INSPECT
CRYOPUMP
COMPRESSOR
TOOLKIT
CONTROLLER
AND
CARTON A CARTONB
ACCESSORIES
CARTOND
CARTONC
INSTALLCRYOPUMP
TO VACUUM SYSTEM:
-CONNECTVENTPIPE
-CONNECTROUGHPUMP
- CONNECT PURGE GAS
CONNECTCRYOPUMPTO
COMPRESSOR:
- CONNECT HELIUM-GAS
RETURN AND SUPPLY LINES
- CHECK HELIUM PRESSURE
1
8300 COMPRESSOR SC COMPRESSOR
ELECTRICAL CONNECTION OF
ELECTRICAL CONNECTION OF
COMPRESSOR, CONTROLLER AND
COMPRESSOR AND CRYOPUMP:
CRYOPUMP:
-CONNECT
COLD HEAD CABLE
- CONNECT COMPRESSOR POWER
FROM COMPRESSOR TO COLD
CABLE TO CONTROLLER AND
HEAD
COMPRESSOR
-
CONNECT COMPRESSOR INPUT
- CONNECT COMPRESSOR CON-
POWER CABLE TO MAIN POWER
TROL CABLE TO CONTROLLER
SOURCE
AND COMPRESSOR
- CONNECT COLD HEAD POWER
CABLE FROM CONTROLLER TO
COLD HEAD
- CONNECT CONTROLLER INPUT
POWER CABLE TO MAIN POWER
SOURCE
I 1
START
SYSTEM
Figure 3.1 Block diagram for system installation
3-2

)
)
TO COLO HEAD
.v==_ POWER CONNECTOR
TO INPUT
POWER
OUTLET
SC COM PRESSOR
8001/8002
CONTROLLER
_ HELIUM-GAS RETURN LINE
(FROM COLO HEAD)
_
HELIUM-GAS SUPPLY LINE
(TO COLO HEAD)
TO INPUT
POWER
OUTLET ___ ~rt~35~~~~~r=~
REMOTE I
_ TO COLO HEAD
POWER CONNECTOR
CABLE I
CONNECTOR <:) I
~~gCLE~O~llLY) gg~f~6[SOR
COMPRESSOR _f--,i::J\\\:-"/~:::C~~IBLE
POWER
CABLE
CARTRIDGE
(MAY BE
REMOTELY
LOCATED)
CONTROLLER
--'---'-SIDE MOUNTED
(OPTIONAL)
ROUGHING
VALVE
PURGE
VALVE
-CRYOGENICS
HELIX TECHNOLOGY CORPORATION
USER'S
VACUUM
CHAMBER
CRYOPUMP
HELIUM-GAS ====~~~=d~~i-~2:
_ RETURN LINE _
(FROM COLO HEAD) COIINECT(lR
IJ
IN OUT
WATER
8300 COMPRESSOR
HELIUM - GAS
_ SUPPLY LINE _ ====::::r
(TO COLO HEAD)
ELECTRICAL
POWER FROM
CONTROLLER /
COMPRESSOR
Figure 3.2 Cryopump interconnection
3-3/3-4