HNP Mikrosysteme mzr-2965 User manual

Operating manual for micro annular gear pumps
mzr-2965, mzr-4665
HNP Mikrosysteme GmbH
Bleicherufer 25
D-19053 Schwerin (Germany)
Telephone: [phone]
Telefax: +49 385/52190-333
E-mail: [e-mail]
http://www.hnp-mikrosysteme.de
Last update: August 2019

Impressum
Original instructions
Copyright
HNP Mikrosysteme GmbH
Bleicherufer 25
D-19053 Schwerin
All rights, including translation, reserved.
Without prior explicit written permission of HNP Mikrosysteme GmbH no part
of this manual may be, copied, reproduced or processed.
This manual has been prepared with care. HNP Mikrosysteme does assume no
liability for any errors in this manual and resulting consequences. Likewise, no
liability is assumed direct or subsequent damages arising from an incorrect use
of the devices.
While using micro annular gear pumps, the relevant standards regarding the
specifications of this manual have to be followed.
Subject to change without notice.

Contents Operating manual mzr-2965, mzr-4665
Last update: August 2019 Technical data subject to change without prior notice! i
Contents
1General Information 1
1.1 Application scope of the pumps 1
1.2 Product information 2
1.3 Measurements 2
1.4 Flow chart 3
1.5 Technical data of the micro annular gear pumps 4
1.6 Technical data of the drive 5
1.6.1 Pin assignment with connector 6
1.6.2 Pin configuration in housing version 7
2Safety instructions 8
2.1 Safety symbols in this operating manual 8
2.2 Staff qualification and training 8
2.3 Safety-conscious work 8
2.4 Safety instructions for the operator 9
2.5 Safety instructions for maintenance, check and
assembly of the pump 9
2.6 Unauthorized pump conversions and spare part
manufacture 9
2.7 Improper modes of operation 10
2.8 General safety instructions 10
3Transport and intermediate storage 11
3.1 Shipment of the pumps and protection measures 11
3.2 Transport 11
3.3 Intermediate storage 11
4Description of the pump 12
4.1 Principle of the Micro annular gear pumps 12
4.2 Micro annular gear pump 14
4.3 Materials and liquids 15
4.4 Liquid supply 15
5Optional modules 16
5.1 By-pass module (optional) 18
6System integration 20
6.1 Checkup before the first assembly 20
6.2 Mounting of the micro annular gear pump 20
6.3 General instructions for the assembly of the liquid
supply network 21
6.4 Filter selection and use 22
6.5 Connection of the micro annular gear pump to the
power supply 23
6.5.1 Startup with potentiometer 25
6.5.2 Startup with external 0-10 V signal 26

Contents Operating manual mzr-2965, mzr-4665
ii Technical data subject to change without prior notice! Last update: August 2019
6.5.3 Startup with an external 0(4)-20 mA current signal 27
6.5.4 Startup with external potentiometer 29
6.5.5 Startup with the RS-232 interface 30
6.5.6 Startup of the pump units with network mode (NET1
Command) 31
7Start Up / Shut Down 33
7.1 Preparing for operation 33
7.2 Startup of the micro annular gear pump 33
7.3 Flushing procedure after use 33
7.4 Shutdown of the micro annular gear pump 36
7.4.1 Conservation 38
7.4.2 Dismantling of the system 39
7.5 Trouble shooting 40
7.6 Return of the micro annular gear pump to the
manufacturer 40
8Software »mzr-pump controller« 41
9Software »Motion Manager« 43
9.1 Direct drive control 43
9.2 Programming of the control 45
9.3 Transfer of a mcl file to the drive 45
10 Accessories for microfluidic systems 48
11 Non-liability clause 48
12 Problems and their removal 49
13 EC Directive 52
13.1 Electromagnetic Compatibility (EMC) 53
13.1.1 EMC Directive and Standards 53
13.1.2 Information on use as intended 54
14 Declarations of conformity 55
15 Service, maintenance and warranty 61
16 Contact person 62
17 Legal information 63
18 Safety information for the return of already
employed micro annular gear pumps and
components 64
18.1 General information 64
18.2 Declaration of media in contact with the micro
annular gear pump 64
18.3 Shipment 64

Contents Operating manual mzr-2965, mzr-4665
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19 Declaration of media in contact with the micro
annular gear pump and its components 65
20 Appendix 66

1 General Information Operation manual mzr-2965, mzr-4665
Last update: August 2019 Technical data subject to change without prior notice! 1
1General Information
This operation manual contains basic instructions to be followed during
integration, operation and maintenance of the mzr®micro annular gear pump.
For this reason it is necessary to read it carefully before any handling of the
device. The present manual should always be kept at the operation site of the
micro annular gear pump.
In case assistance is needed, please indicate the pump type visible on the
housing.
1.1 Application scope of the pumps
The micro annular gear pumps mzr-2965 and mzr-4665 described in this
manual are suitable for continuous delivery of water, watery solutions, solvents,
methanol and varnishes as well as many other liquids.
!
If you intend to handle any aggressive, poisonous or radioactive liquids, you
must conform to safety measures as according to the regulations in force. Any
project concerning handling of corrosive liquids should be previously discussed
with the pump manufacturer.
!
The micro annular gear pumps should not be used for "invasive" medical
applications, in which the liquid having had contact with the pump is re-
introduced to the body.
!
Micro annular gear pumps exclusively are provided for use in the industrial
area. A private use is excluded.
!
The micro annular gear pumps must not be used in aircrafts and spacecrafts or
other vehicles without prior consent of the manufacturer.
!
The data concerning resistance of the pumps to manipulated liquids is
elaborated according to the best of HNP Mikrosysteme's knowledge. However,
operating parameters varying from one application case to another, no
warranty for this information can be given.
!
The information given in this manual does not release the customer from
personal obligation to check the integrity, correct choice and suitability of the
pump for the intended use. The use of the micro annular gear pumps should
be conform with technical norms and regulations in force.
If you wish to receive more information than comprised in this manual please
contact directly HNP Mikrosysteme.

1 General Information Operation manual mzr-2965, mzr-4665
2Technical data subject to change without prior notice! Last update: August 2019
1.2 Product information
This manual is valid for the micro annular gear pumps mzr-2965 and mzr-4665
manufactured by HNP Mikrosysteme GmbH, Bleicherufer 25,
D-19053 Schwerin, Germany.
The bottom line of this manual shows issue and date of issue of the manual.
1.3 Measurements
The pumps are available in two version featuring different liquid connectors.
figure 1 shows the version with Ø 2 mm slip fittings on which flexible tubes
with internal diameter < 2 mm are stuck. figure 2 shows the version with a
manifold assembly, which is screwed and to a preadapted support.
.
figure 1 Measurement in configuration slip fittings OD 2 mm
figure 2 Measurement in configuration with the manifold assembly M2.1

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1.4 Flow chart
Liquid water Liquid oil
0
5
10
15
20
0 1 23
Differential pressure [bar]
Flow rate [ml/min]
6000
5000
4000
3000
2000
1000
Speed [rpm]
Viscosity 1 mPas
Liquid water
0
5
10
15
20
0 1 2 3
Differential pressure [bar]
Flow rate [ml/min]
6000
5000
4000
3000
2000
1000
Speed [rpm]
Viscosity 16 mPas
Liquid oil
figure 3 Flow charts mzr-2965
Liquid water Liquid oil
0
10
20
30
40
50
60
70
80
012345
Differential pressure [bar]
Flow rate [ml/min]
6000
5000
4000
3000
2000
1000
Speed [rpm]
Viscosity 1 mPas
Liquid water
0
10
20
30
40
50
60
70
80
0 1 2 3 4 5
Differential pressure [bar]
Flow rate [ml/min]
6000
5000
4000
3000
2000
1000
Speed [rpm]
Viscosity 16 mPas
Liquid oil
figure 4 Flow charts mzr-4665

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4Technical data subject to change without prior notice! Last update: August 2019
1.5 Technical data of the micro annular gear pumps
mzr-2965 mzr-4665
Technical data
Displacement volume 3 µl 12 µl
Housing length with fluid connections Ø 2 mm 69 mm
Housing length with fluid connections M2.1 62 mm
Diameter 22 mm
Weight approx. 120 g
Internal volume - µl
Housing material stainless steel 316L (1.4404), epoxy resin adhesive
Fluid connector material stainless steel 316L (1.4404), Titan Grade 5
Rotor material tungsten carbide (WC-Ni)
Shaft material tungsten carbide (WC-Ni)
Magnet coating material gold
Bearing material ceramics, Al2O3
Static sealing FKM
optional EPDM, FFKM (Perfluorelastomer)
Performance parameters
Min. flow rate Q 0,03 ml/min 0,12 ml/min
Max. flow rate Q (at 6000 rpm) 18 ml/min 72 ml/min
Min. dosage volume 10 µl 20 µl
Max. system pressure 6 bar (87 psi) (inlet pressure+differential pressure)
Differential pressure range 0 – 3 bar (43,5 psi) 0 – 5 bar (72,5 psi)
Viscosity 0.3 – 500 mPas
Dosage precision CV 1 %
Liquid temperature -15 … +60 °C
Ambient temperature -15 … +60 °C
Storage temperature +5 … 40 °C
Pulsation of flow (theoretical value) 6 %
NPSHR value 0.5 m
*) Values are specified for oil with viscosity 16 mPas. Differing specifications on request
**) Customized solutions on request.
table 1 Technical data of the micro annular gear pumps mzr-2965 and mzr-4665
Warning The material properties of a liquid (e.g. viscosity, lubricating property, particle
content, corrosiveness) impacts the technical data and the lifetime of pumps.
Under appropriate conditions the characteristic values may be increased or
decreased.
Warning If you intend to operate the pump out of the range of the above given
specification, please consult the manufacturer. Modifications may be necessary
to ensure successful operation. Otherwise the pump or the system may be
damaged seriously.

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1.6 Technical data of the drive
The micro annular gear pumps mzr-2965 and mzr-4665 are provided with a
canned motor with integrated motion controller. The motor uses a high
dynamic of the micro annular gear pump. With the internal control unit it is
possible to manage lower RPM ranges down to 10 RPM. The connection of the
motor to a control unit is simple.
Dimensions
diameter 22 mm
length 49 mm
Data of capacity
Max. voltage 24 VDC (5 - 30 VDC)
Max. permanent torque 5 mNm
Output power 6.4 W
No-Load speed by 10 V 2500 U/min
max. permanent current 300 mA
Terminal resistor 12.4 Ω
Rotor inductance 0.440 mH
RPM speed range 10 – 6.000 U/min
Temperature range -15 ÷ +60 °C
table 2 Technical data of the motor
!
Electrostatic discharges at the connection pin assignment of the ribbon cable
can result in irreparable damage to the motor.
While connecting the DC voltage pay attention to the correct polarity,
otherwise electronics may be damaged.
The delivery of the micro annular gear pump is in standard with connector for
flat ribbon cable or a power cable (round cable).

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6Technical data subject to change without prior notice! Last update: August 2019
1.6.1 Pin assignment with connector
Pin Motor Function Pin Stecker
1 3.In Digital input 3 8
2 24 VDC Power supply +24 VDC (5 – 30 VDC) 9
3 GND GND 10
4 AnIn Analog input 11
5 AGND Analog GND 12
6 Fault Fault output 13
7 RxD RS-232 RXD 14
8 TxD RS-232 TXD 15
Tabelle 1 Pin configuration S-G05
figure 5 Pin configuration of the motor cable
!
Electrostatic discharges at the connection pin assignment of the ribbon cable
can result in irreparable damage to the motor.
While connecting the DC voltage pay attention to the correct polarity,
otherwise electronics may be damaged.

1 General Information Operation manual mzr-2965, mzr-4665
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1.6.2 Pin configuration in housing version
figure 6 View housing version
Pinout
Plug / socket
Description
1 Digital input
2
+24 V
3 GND
4 Analog input
5 Analog GND
6 Fault output
7 RS-232 RxD
8 RS-232 TxD
table 3 Pin assignment on delivery with 8-pin M12 plug
Pinout
Plug / socket
Description Cable colors
according DIN 47100
(old)
Cable colors
according DIN EN 60947-5-2
(new)
1 Digital input WH (white) BN (brown)
2 +24 V BN (brown) WH (white)
3 GND GN (green) BU (blue)
4 Analog input YE (yellow) BK (black)
5 Analog GND GY (grey) GY (grey)
6 Fault output PK (pink) PK (pink)
7 RS-232 RxD BU (blue) VT (violet)
8 RS-232 TxD RD (red) OG (orange)
table 4 Cable colors of the connection cable
!
For media temperatures greater than 60 °C, a separate active air cooling
of the
protective housing must be provided!

2 Safety instructions Operation manual mzr-2965, mzr-4665
8Technical data subject to change without prior notice! Last update: August 2019
2Safety instructions
Please comply not only with the general safety instructions listed below, but
also with specific safety instructions mentioned in the following chapters.
2.1 Safety symbols in this operating manual
Non respect of the safety instructions marked with the following signs
represents danger to people:
Danger symbol High voltage symbol
!
Safety symbol according to
DIN 4844 – W9
Safety symbol according to
DIN 4844 – W8
Non compliance with the safety instructions marked with the following sign
represents a risk of damage to the micro annular gear pump:
Warning
Operating instructions machined directly on the pump such as the indication of
liquid input and output should be followed and kept in a clearly readable
condition.
2.2 Staff qualification and training
The staff operating, servicing, inspecting and assembling the pumps must
evidence the appropriate qualification for these works. Areas of responsibility
and competence as well as monitoring of the staff must be precisely regulated
by the operator in charge. If the personnel do not have the necessary
knowledge, they must be trained and instructed accordingly. If necessary, this
can be implemented by the supplier or the manufacturer on behalf of the
operator. Furthermore, the operator in charge must ensure that the content of
the present manual has been fully understood by the personnel.
2.3 Safety-conscious work
The safety instructions listed in this operating manual, applicable national
regulations concerning accident prevention as well as internal work, operation
and safety regulations of the operator must be complied with.

2 Safety instructions Operation manual mzr-2965, mzr-4665
Last update: August 2019 Technical data subject to change without prior notice! 9
2.4 Safety instructions for the operator
The surface temperature of the motor under full load may exceed 60°C. If
needed, this surface should be protected on site against contact in order to
avoid skin burns.
The drive should be protected against dust, water vapor condensation,
humidity, splash water, aggressive gases and liquids. Please provide for an
adequate air ventilation and thus cooling of the motor.
The micro annular gear pump mzr-4665 must not be used in areas exposed to
explosion risks or in proximity of inflammable gases and vapors.
Possible leaks of dangerous liquids (for example from the shaft sealing) should
be guided away in a way not to represent any danger for the personnel and the
environment. The pump should be regularly checked for possible leakage. All
legal requirements in this matter should be complied with.
Take care that all risks resulting from the electric energy are excluded. For
details please refer to the instructions provided by the authorities in charge or
your power supplier.
Warning Please insure, that the totality of the liquid supply system such as tubes, hoses,
filters etc. are free from dust or dirt particles. Impurities such as metal swarf,
plastic or glass splinters may impair or damage the pump leading to its failure.
Warning Please, operate the pump with a filter featuring 10 µm or smaller pores. It will
protect the pump.
2.5 Safety instructions for maintenance, check and assembly of the pump
As a rule all maintenance work on the device should be performed when it is at
a standstill. The turning-off procedure described in this manual must be
followed. Pumps delivering liquids hazardous to health must be
decontaminated. Immediately after the work had been completed all safety
equipment and protection measures should be applied.
Before starting the operation, please take notice of the instructions listed in the
chapter 6.5.
Warning Should a malfunction of the mzr-pump occur, do not dismantle the pump on
your own but contact one of HNP Mikrosysteme service staff for professional
assistance.
2.6 Unauthorized pump conversions and spare part manufacture
Conversions or modification to the device are only permitted with prior consent
of the manufacturer. Original spare parts and accessories authorized by the
manufacturer ensure safety. The use of other parts will annul the liability of the
pump manufacturer for any resulting consequences.

2 Safety instructions Operation manual mzr-2965, mzr-4665
10 Technical data subject to change without prior notice! Last update: August 2019
2.7 Improper modes of operation
The safety of operation of the delivered device can only be insured by correct
use, as described in chapter 1. The limit values given in this manual must not be
exceeded in any case.
2.8 General safety instructions
Please observe the following safety instructions
!
The pump may operate at high pressures. For this reason please use only the
delivered accessories and ensure that the employed fittings and tubing have
been prescribed and approved for these pressures.
!
In order to decrease the pressure, provide the system with a pressure control
valve directing the excess liquid to the storage tank or back to the suction side.
In the case of blockage of the pressure side the operating pressure can
multiply, this can lead to the damage of downstream components.
!
At a standstill, the liquid may flow through the pump in the direction of falling
pressure. In order to avoid this unwanted movement, please integrate non-
return valves (see accessories). This applies also to elevated liquid containers.
!
Protect the micro annular gear pump and the electric drive against strokes and
shocks.
!
Under normal working conditions the shaft sealing rings integrated in the
pump prevent the liquid from leaking out of the device. The micro annual gear
pumps are "technically leak-proof" however not "hermetically sealed" which
means it may occur that gases or liquids enter to or escape from the pump.
The allowed electrical parameters of the drive must not be exceeded. In
particular an incorrect polarity setting of the supply voltage may lead to
damage of the control unit.
Warning Please insure, that the totality of the liquid supply accessories such as tubes,
hoses, filters etc. are absolutely free from dust or dirt particles. Impurities such
as metal swarf, plastic or glass splinters may impair or damage the pump
leading to its failure.
Warning Please, operate the pump with a filter featuring 10 µm or smaller pores. It will
protect the pump.
While connecting the DC voltage pay attention to the correct polarity,
otherwise electronics may be damaged.

3 Transport and intermediate storage Operation manual mzr-2965, mzr-4665
Last update: August 2019 Technical data subject to change without prior notice! 11
3Transport and intermediate storage
3.1 Shipment of the pumps and protection measures
The pumps leaving the factory are secured against corrosion and shocks. The
inlets and outlets of the pumps are protected with plastic plugs in order to
prevent any foreign bodies from penetrating into the device.
3.2 Transport
In order to avoid any transport-related damage, the package must be protected
against shocks. HNP Mikrosysteme guarantees that all goods leave the factory
in the best condition. Any noticed damage should be reported to the
concerned forwarding agent, authorized dealer or to HNP Mikrosysteme
as manufacturer.
3.3 Intermediate storage
Following points concerning pump storage should be observed:
−necessary conservation procedure (see also chapter 7.4.1)
−the protective caps must be put on
−the pump should not be stored in humid places
−for storage temperature - refer to chapter 1.5 of the present manual

4 Description of the pump Operation manual mzr-2965, mzr-4665
12 Technical data subject to change without prior notice! Last update: August 2019
4Description of the pump
4.1 Principle of the Micro annular gear pumps
Micro annular gear pumps are positive displacement pumps. They contain two
rotors bearing slightly eccentrically to each other; an externally toothed internal
rotor and an annular, internally toothed external rotor (see figure 7). Due to
their cycloid indenting, the rotors remain interlocked at any time, forming
during rotation a system of several sealed pumping chambers. As the rotors
revolve around their offset axis, the pumping chambers increase on the
induction (suction) side and simultaneously decrease on the delivery side of the
pump (see figure 8). A homogenous flow is generated between the kidney-like
inlet and outlet.
internal
rotor
external
rotor
delivery sideinduction side
inlet outlet
figure 7 Principle of the micro annular gear pump
figure 8 Operating principle of the micro annular gear pump
Reciprocating and rotary pumps have a direct allocation to the fed amount of
the displacement volume Vg of the pump and its actuator’s number of
revolutions n. The displacement volume describes the volume, which is
theoretically fed with each revolution. The coherence of the flow rate referring
to the formula (= volumetric flow rate) Qof the pump is:
nVQ gVol ⋅⋅=
η
The volumetric efficiency
η
Vol describes the coherence of the actual flow rate
from the theoretical resulting value. Differences occur according to leaking, as
the sealing on the inside of the pump is done over a gap. The volumetric

4 Description of the pump Operation manual mzr-2965, mzr-4665
Last update: August 2019 Technical data subject to change without prior notice! 13
efficiency is dependent on the media and the pressure against which it has to
be fed.
Example: The pump mzr-4665 feeds with its displacement volume of 12 µl with
3000 RPM and a volumetric efficiency of 100 % referring to the above-
mentioned formula the flow rate of 36 ml/min. The following table shows the
volumetric displacement in dependence to the number of revolutions (
η
Vol =
100 %).
mzr-2965 mzr-4665
Speed
[rpm]
Q [ml/min] Q [ml/h] Q [ml/min] Q [ml/h]
500 1,5 90 6 360
1000 3 180 12 720
2000 6 360 24 1440
3000 9 540 36 2160
4000 12 720 72 2880
5000 15 900 60 3600
6000 18 1080 72 4320
table 5 Theoretical flow rate of the micro annular gear pumps
The pressure, which the pump has to generate, is given by the construction of
the fluidic system and the results of the hydrostatic pressure and the hydraulic
resistants (given by tubes, contractions etc.).
The viscosity of the pumping liquid has an important influence on the
volumetric efficiency. The volumetric efficiency increases with higher viscosity
according to the smaller disengagement through the gaps of the pump.
Cavitation is an effect, which can reduce the volumetric efficiency from in a
specific ceiling speed. With increasing viscosity (e.g.> 500 mPas), this ceiling
speed is lower. This is the result of the media specified underflow of the steam
pressure in the induction port of the pump, in which gases are building up in
the pump.
The specific feature of the mzr-pumps is their highly precise design, as well as
the guarantee of high accumulator pressure and high accuracy in flow rate and
dosage. Therefore, space width and transverse space width of the rotors as well
as the interspace to the adjacent case parts lie in the range of just a few
micrometers. This precession is at the same time the criteria to achieve a
volumetric efficiency in the range of approx. 100 %.
The micro annular gear pump head has an inscription on the front side (see
figure 9). The induction connection is marked with the letter »S«, the pressure
connection with the letter »D«. An arrow on the front side of the pump
indicates the inherent turning direction of the shaft.

4 Description of the pump Operation manual mzr-2965, mzr-4665
14 Technical data subject to change without prior notice! Last update: August 2019
liquid inlet
(suction side)
liquid outlet
(pressure side)
figure 9 Indication of the turning direction and fluidic connections on the front of the micro annular gear pump
4.2 Micro annular gear pump
The micro annular gear pumps mzr-2965 and mzr-4665 is provided with an
actuator equipped with a canned motor. The motor works high dynamically
and is recommended for dosage operation of the micro annular gear pump.
With this control unit it is possible to manage lower RPM ranges down to
10 RPM. For operating, it is recommended to use a power source of 24 V (with
a power rating of 2,5 A).
figure 10 Measures of the micro annular gear pump
The mzr-micro annular gear pump consists of the micro annular gear pump
head, the coupling unit and an actuator. The pump head is equipped with two
fluidic connectors bore holes and a shaft for actuation of the rotors. The
coupling unit serves as connection between the pump head and the actuator as
well as to mount the micro annular gear pump.
The actuators used may be protected against dust, condensing moisture,
humidity, splashing, aggressive gases and liquids. Ensure sufficient ventilation
and therefore cooling of the motors.
The preferred position to assemble the micro annular gear pump is horizontal.
To avoid intruding fluids you may lay the pump under the actuator in vertical
operation.
The mechanical assembly of the pump may not be done over the fluidic
connectors or the motor.