HNP Mikrosysteme mzr-7265 User manual

Operating manual for micro annular gear pumps
mzr-7265
HNP Mikrosysteme GmbH
Bleicherufer 25
D-19053 Schwerin (Germany)
Telephone: [phone]
Telefax: +49 385/52190-333
E-mail: [e-mail]
http://www.hnp-mikrosysteme.de
Last update: March 2019

Impressum
Original instructions
Copyright
HNP Mikrosysteme GmbH
Bleicherufer 25
D-19053 Schwerin
All rights, including translation, reserved.
Without prior explicit written permission of HNP Mikrosysteme GmbH no part
of this manual may be, copied, reproduced or processed.
This manual has been prepared with care. HNP Mikrosysteme does assume no
liability for any errors in this manual and resulting consequences. Likewise, no
liability is assumed direct or subsequent damages arising from an incorrect use
of the devices.
While using micro annular gear pumps, the relevant standards regarding the
specifications of this manual have to be followed.
Subject to change without notice.

Contents Operating manual mzr-7265
Last update: March 2019 Technical data subject to change without prior notice! i
Contents
1General Information 1
1.1 Application scope of the pumps 1
1.2 Product information 1
1.3 Measurements 2
1.4 Flow chart 2
1.5 Technical data of the micro annular gear pumps 3
1.6 Technical data of the drive 4
2Safety instructions 6
2.1 Safety symbols in this operating manual 6
2.2 Staff qualification and training 6
2.3 Safety-conscious work 7
2.4 Safety instructions for the operator 7
2.5 Safety instructions for maintenance, check and
assembly of the pump 7
2.6 Unauthorized pump conversions and spare part
manufacture 8
2.7 Improper modes of operation 8
2.8 General safety instructions 8
3Transport and intermediate storage 9
3.1 Shipment of the pumps and protection measures 9
3.2 Transport 9
3.3 Intermediate storage 9
4Description of the pump 10
4.1 Principle of the micro annular gear pumps 10
4.2 Micro annular gear pump 12
4.3 Construction materials 12
4.4 Liquid supply 12
5Optional modules 13
5.1 By-pass module (optional) 14
6System integration 16
6.1 Checkup before the first assembly 16
6.2 Mounting of the micro annular gear pump 16
6.3 General instructions for the assembly of the liquid
supply network 16
6.4 Filter selection and use 17
6.5 Assembly of the tubing and piping system 18
6.6 Connection of the micro annular gear pump to the
power supply 19
6.6.1 Startup with potentiometer 21
6.6.2 Startup with external 0-10 V signal 22
6.6.3 Startup with an external 0(4)-20 mA current signal 23

Contents Operating manual mzr-7265
ii Technical data subject to change without prior notice! Last update: March 2019
6.6.4Startup with external potentiometer 25
6.6.5 Startup with the RS-232 interface 26
6.6.6 Startup of the pump units with network mode (NET1
Command) 27
7Start Up / Shut Down 29
7.1 Preparing for operation 29
7.2 Startup of the micro annular gear pump 29
7.3 Flushing procedure after use 30
7.4 Shutdown of the micro annular gear pump 32
7.4.1 Conservation 34
7.4.2 Dismantling of the system 36
7.5 Trouble shooting 36
7.6 Return of the micro annular gear pump to the
manufacturer 37
8Software »mzr-pump controller« 38
9Software »Motion Manager« 40
9.1 Direct drive control 40
9.2 Programming of the control 42
9.3 Transfer of a mcl file to the drive 42
10 Accessories for microfluidic systems 45
11 Non-liability clause 45
12 Problems and their removal 46
13 EC Directive 49
13.1 Electromagnetic Compatibility (EMC) 51
13.1.1 EMC Directive and Standards 51
13.1.2 Information on use as intended 52
14 Declarations of conformity 54
15 Service, maintenance and warranty 59
16 Contact person 60
17 Legal information 61
18 Safety information for the return of already
employed micro annular gear pumps and
components 62
18.1 General information 62
18.2 Declaration of media in contact with the micro
annular gear pump 62
18.3 Shipment 62

Contents Operating manual mzr-7265
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19 Declaration of media in contact with the micro
annular gear pump and its components 63
20 Appendix 65

1General Information Operation manual mzr-7265
Last update: November 2016 Technical data subject to change without prior notice! 1
1General Information
This operation manual contains basic instructions to be followed during
integration, operation and maintenance of the mzr®micro annular gear pump.
For this reason it is necessary to read it carefully before any handling of the
device. The present manual should always be kept at the operation site of the
micro annular gear pump.
In case assistance is needed, please indicate the pump type visible on the
housing.
1.1 Application scope of the pumps
The micro annular gear pump mzr-7265 described in this manual is suitable for
continuous delivery of water, watery solutions, solvents, methanol and
varnishes as well as many other liquids.
!
If you intend to handle any aggressive, poisonous or radioactive liquids, you
must conform to safety measures as according to the regulations in force. Any
project concerning handling of corrosive liquids should be previously discussed
with the pump manufacturer.
!
The micro annular gear pumps should not be used for "invasive" medical
applications, in which the liquid having had contact with the pump is re-
introduced to the body.
!
Micro annular gear pumps exclusively are provided for use in the industrial
area. A private use is excluded.
!
The micro annular gear pumps must not be used in aircrafts and spacecrafts
or other vehicles without prior consent of the manufacturer.
!
The data concerning resistance of the pumps to manipulated liquids is
elaborated according to the best of HNP Mikrosysteme's knowledge.
However, operating parameters varying from one application case to another,
no warranty for this information can be given.
!
The information given in this manual does not release the customer from
personal obligation to check the integrity, correct choice and suitability of the
pump for the intended use. The use of the micro annular gear pumps should
be conform with technical norms and regulations in force.
If you wish to receive more information than comprised in this manual please
contact directly HNP Mikrosysteme.
1.2 Product information
This manual is valid for the micro annular gear pump mzr-7265 manufactured
by HNP Mikrosysteme GmbH, Bleicherufer 25, D-19053 Schwerin, Germany.
The bottom line of this manual shows issue and date of issue of the manual.

1General Information Operation manual mzr-7265
2Technical data subject to change without prior notice! Last update: March 2019
1.3 Measurements
The pump is available in one version liquid connector. figure 1 shows this
version with manifold assembly.
figure 1 Measurement in configuration with manifold assembly
1.4 Flow chart
Liquid water Liquid oil
0
50
100
150
200
250
300
0 3 6 9 12 15
Volumenstrom Q [ml/min]
Differenzdruck p [bar]
6000
5000
4000
3000
2000
1000
Drehzahl n [U/min]
Viskosität 1 mPas
Medium Wasser
0
50
100
150
200
250
300
0 3 6 9 12 15
Volumenstrom Q [ml/min]
Differenzdruck p [bar]
6000
5000
4000
3000
2000
1000
Drehzahl n [U/min]
Viskosität 16 mPas
Medium Öl
figure 2 Flow charts mzr-7265

1General Information Operation manual mzr-7265
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1.5 Technical data of the micro annular gear pumps
mzr-7265
Technical data
Displacement volume 48 µl
Housing length without fluid connections
80 mm
Diameter 32 mm
Weight 390 g
Housing material stainless steel 316L (1.4404), epoxy resin adhesive
Fluid connector material stainless steel 316L (1.4404)
Rotor material tungsten carbide (WC-Ni)
Shaft material tungsten carbide (WC-Ni)
Bearing material tungsten carbide (WC-Ni), AL2O3
Magnet coating material gold
Static sealing
FKM
Performance parameters
Min. flow rate Q 0,048 ml/min*
Max. flow rate Q (at 6000 rpm) 288 ml/min
Min. dosage volume 5 µl
Max. system pressure 15 bar (218 psi) (inlet pressure+differential
pressure)
Differential pressure range
0 – 15 bar (218 psi)
Viscosity 0.3 – 500 mPas
Dosage precision CV
1 %
Liquid temperature -15 … +60 °C
Ambient temperature -20 … +65 °C
Storage temperature
+5 … +40 °C
Pulsation of flow (theoretical value) 6 %
NPSHR value
0.5 m
*) Values are specified for oil with viscosity 16 mPas. Differing specifications on request
**) Customized solutions on request.
table 1 Technical data of the micro annular gear pump mzr-7265
Warning The material properties of a liquid (e.g. viscosity, lubricating property, particle
content, corrosiveness) impacts the technical data and the lifetime of pumps.
Under appropriate conditions the characteristic values may be increased or
decreased.
Warning If you intend to operate the pump out of the range of the above given
specification, please consult the manufacturer. Modifications may be
necessary to ensure successful operation. Otherwise the pump or the system
may be damaged seriously.

1General Information Operation manual mzr-7265
4Technical data subject to change without prior notice! Last update: March 2019
1.6 Technical data of the drive
The micro annular gear pump mzr-7265 is driven by electronically
commutated, brushless motors with integrated control. The control unit is
composed of a 16-bit microcontroller and power electronics.It enables to
adjust both speed and position of the motor. The motor is highly dynamic and
suitable for dosing tasks performed by the micro annular gear pump. With the
internal control unit it is possible to manage lower RPM ranges down to
1 RPM. CDs or diskettes containing software running under Windows®which
permits to set the parameters, as well as to program and control the pump are
included in the package. The package contains also a user-friendly terminal box
and a null-modem cable for an easy connection to the serial port of a PC.
Performance characteristics of the motor
Nominal voltage UB24 VDC
Supply voltage 12 – 30 V
Residual ripple
≤2 %
Max. continuous current 1,2 A
Max. peak current
2,9 A
Power 21 W
Max. continuous torque 20 mNm
Counts per turn
3000*
Speed range 1 – 6000 rpm
Input No. 1 (speed input)
0 – 10 V
Resistance input No. 1 18 kΩ
Fault output (input No. 2) Open collector max. UB/ 30 mA
no error: switched to GND
programmed as an input: low 0...0.5 V /
high 4 V...UB
Digital input No. 3 low 0...0.5 V / high 4...30 V
Serial port RS-232
Protection class
IP 44
Connection cable length 1 m
table 2 Technical data for the m otor unit
!
Electrostatic discharges at the terminals of the motor control can lead to the
destruction of the electronics.
The ESD protection measures in the operating instructions of the motor
control must be observed.
Connecting the DC voltage with the correct polarity, otherwise the electronics
will be destroyed.

1General Information Operation manual mzr-7265
Last update: November 2016 Technical data subject to change without prior notice! 5
Wire
Description
blue GND
pink +24 V
brown Analog input
white Fault output
gray
Analog GND
yellow RS-232 RXD
green RS-232 TXD
red Digital input
table 3 Pin configuration of the motor
pin
plug / socket
Description
1 GND
3
5
2
4
1
7
68
2
analog input
3 +24 V
4 fault out
5 analog GND
6 RS-232 RxD
7
RS-232 TxD
8 digital Input 3
table 4 Pin configuration of the optional lengthening cable
!
Electrostatic discharges at the connection pin assignment of the ribbon cable
can result in irreparable damage to the motor.
While connecting the DC voltage pay attention to the correct polarity,
otherwise electronics may be damaged.

2Safety instructions Operation manual mzr-7265
6Technical data subject to change without prior notice! Last update: March 2019
2Safety instructions
Please comply not only with the general safety instructions listed below, but
also with specific safety instructions mentioned in the following chapters.
2.1 Safety symbols in this operating manual
Non respect of the safety instructions marked with the following signs
represents danger to people:
Danger symbol High voltage symbol
!
Safety symbol according to
DIN 4844 – W9
Safety symbol according to
DIN 4844 – W8
Non compliance with the safety instructions marked with the following sign
represents a risk of damage to the micro annular gear pump:
Warning
Operating instructions machined directly on the pump such as the indication of
liquid input and output should be followed and kept in a clearly readable
condition.
2.2 Staff qualification and training
The staff operating, servicing, inspecting and assembling the pumps must
evidence the appropriate qualification for these works. Areas of responsibility
and competence as well as monitoring of the staff must be precisely regulated
by the operator in charge. If the personnel do not have the necessary
knowledge, they must be trained and instructed accordingly. If necessary, this
can be implemented by the supplier or the manufacturer on behalf of the
operator. Furthermore, the operator in charge must ensure that the content of
the present manual has been fully understood by the personnel.

2Safety instructions Operation manual mzr-7265
Last update: November 2016 Technical data subject to change without prior notice! 7
2.3 Safety-conscious work
The safety instructions listed in this operating manual, applicable national
regulations concerning accident prevention as well as internal work, operation
and safety regulations of the operator must be complied with.
2.4 Safety instructions for the operator
The surface temperature of the motor under full load may exceed 60°C. If
needed, this surface should be protected on site against contact in order to
avoid skin burns.
The drive should be protected against dust, water vapor condensation,
humidity, splash water, aggressive gases and liquids. Please provide for an
adequate air ventilation and thus cooling of the motor.
The micro annular gear pump mzr-7265 must not be used in areas exposed to
explosion risks or in proximity of inflammable gases and vapors.
Possible leaks of dangerous liquids (for example from the shaft sealing) should
be guided away in a way not to represent any danger for the personnel and
the environment. The pump should be regularly checked for possible leakage.
All legal requirements in this matter should be complied with.
Take care that all risks resulting from the electric energy are excluded. For
details please refer to the instructions provided by the authorities in charge or
your power supplier.
Warning Please insure, that the totality of the liquid supply system such as tubes, hoses,
filters etc. are free from dust or dirt particles. Impurities such as metal swarf,
plastic or glass splinters may impair or damage the pump leading to its failure.
Warning Please, operate the pump with a filter featuring 10 µm or smaller pores. It will
protect the pump.
2.5 Safety instructions for maintenance, check and assembly of the pump
As a rule all maintenance work on the device should be performed when it is
at a standstill. The turning-off procedure described in this manual must be
followed. Pumps delivering liquids hazardous to health must be
decontaminated. Immediately after the work had been completed all safety
equipment and protection measures should be applied.
Before starting the operation, please take notice of the instructions listed in the
chapter 7.
Warning Should a malfunction of the mzr-pump occur, do not dismantle the pump on
your own but contact one of HNP Mikrosysteme service staff for professional
assistance.

2Safety instructions Operation manual mzr-7265
8Technical data subject to change without prior notice! Last update: March 2019
2.6 Unauthorized pump conversions and spare part manufacture
Conversions or modification to the device are only permitted with prior
consent of the manufacturer. Original spare parts and accessories authorized
by the manufacturer ensure safety. The use of other parts will annul the
liability of the pump manufacturer for any resulting consequences.
2.7 Improper modes of operation
The safety of operation of the delivered device can only be insured by correct
use, as described in chapter 1. The limit values given in this manual must not
be exceeded in any case.
2.8 General safety instructions
Please observe the following safety instructions
!
The pump may operate at high pressures. For this reason please use only the
delivered accessories and ensure that the employed fittings and tubing have
been prescribed and approved for these pressures.
!
In order to decrease the pressure, provide the system with a pressure control
valve directing the excess liquid to the storage tank or back to the suction
side. In the case of blockage of the pressure side the operating pressure can
multiply, this can lead to the damage of downstream components.
!
At a standstill, the liquid may flow through the pump in the direction of falling
pressure. In order to avoid this unwanted movement, please integrate non-
return valves (see accessories). This applies also to elevated liquid containers.
!
Protect the micro annular gear pump and the electric drive against strokes and
shocks.
!
Under normal working conditions the shaft sealing rings integrated in the
pump prevent the liquid from leaking out of the device. The micro annual
gear pumps are "technically leak-proof" however not "hermetically sealed"
which means it may occur that gases or liquids enter to or escape from the
pump.
The allowed electrical parameters of the drive must not be exceeded. In
particular an incorrect polarity setting of the supply voltage may lead to
damage of the control unit.
Warning Please insure, that the totality of the liquid supply accessories such as tubes,
hoses, filters etc. are absolutely free from dust or dirt particles. Impurities such
as metal swarf, plastic or glass splinters may impair or damage the pump
leading to its failure.
Warning Please, operate the pump with a filter featuring 10 µm or smaller pores. It will
protect the pump.
While connecting the DC voltage pay attention to the correct polarity,
otherwise electronics may be damaged.

3Transport and intermediate storage Operation manual mzr-7265
Last update: November 2016 Technical data subject to change without prior notice! 9
3Transport and intermediate storage
3.1 Shipment of the pumps and protection measures
The pumps leaving the factory are secured against corrosion and shocks. The
inlets and outlets of the pumps are protected with plastic plugs in order to
prevent any foreign bodies from penetrating into the device.
3.2 Transport
In order to avoid any transport-related damage, the package must be
protected against shocks. HNP Mikrosysteme guarantees that all goods leave
the factory in the best condition. Any noticed damage should be reported to
the concerned forwarding agent, authorized dealer or to HNP Mikrosysteme
as manufacturer.
3.3 Intermediate storage
Following points concerning pump storage should be observed:
−necessary conservation procedure (see also chapter 7.4.1)
−the protective caps must be put on
−the pump should not be stored in humid places
−for storage temperature - refer to chapter 1.5 of the present manual

4Description of the pump Operation manual mzr-7265
10 Technical data subject to change without prior notice! Last update: March 2019
4Description of the pump
4.1 Principle of the micro annular gear pumps
Micro annular gear pumps are positive displacement pumps. They contain two
rotors bearing slightly eccentrically to each other; an externally toothed internal
rotor and an annular, internally toothed external rotor (see figure 3). Due to
their cycloid indenting, the rotors remain interlocked at any time, forming
during rotation a system of several sealed pumping chambers. As the rotors
revolve around their offset axis, the pumping chambers increase on the
induction (suction) side and simultaneously decrease on the delivery side of the
pump (see figure 4). A homogenous flow is generated between the kidney-like
inlet and outlet.
internal
rotor
external
rotor
delivery sideinduction side
inlet outlet
figure 3 Principle of the micro annular gear pump
figure 4 Operating principle of the micro annular gear pump
Reciprocating and rotary pumps have a direct allocation to the fed amount of
the displacement volume Vg of the pump and its actuator’s number of
revolutions n. The displacement volume describes the volume, which is
theoretically fed with each revolution. The coherence of the flow rate referring
to the formula (= volumetric flow rate) Qof the pump is:
nVQ gVol ⋅⋅=
η
The volumetric efficiency
η
Vol describes the coherence of the actual flow rate
from the theoretical resulting value. Differences occur according to leaking, as
the sealing on the inside of the pump is done over a gap. The volumetric

4Description of the pump Operation manual mzr-7265
Last update: November 2016 Technical data subject to change without prior notice! 11
efficiency is dependent on the media and the pressure against which it has to
be fed.
Example: The pump mzr-7265 feeds with its displacement volume of 48 µl
with 3000 RPM and a volumetric efficiency of 100 % referring to the above-
mentioned formula the flow rate of 36 ml/min. The following table shows the
volumetric displacement in dependence to the number of revolutions (
η
Vol =
100 %).
mzr-7265
Speed
[rpm]
Q [ml/min] Q [ml/h]
500
24
1440
1000 48 2880
2000 96 5760
3000 144 8640
4000 192 11520
5000
240
14400
6000 288 17280
table 5 Theoretical flow rate of the micro annular gear pumps
The pressure, which the pump has to generate, is given by the construction of
the fluidic system and the results of the hydrostatic pressure and the hydraulic
resistants (given by tubes, contractions etc.).
The viscosity of the pumping liquid has an important influence on the
volumetric efficiency. The volumetric efficiency increases with higher viscosity
according to the smaller disengagement through the gaps of the pump.
Cavitation is an effect, which can reduce the volumetric efficiency from in a
specific ceiling speed. With increasing viscosity (e.g.> 500 mPas), this ceiling
speed is lower. This is the result of the media specified underflow of the steam
pressure in the induction port of the pump, in which gases are building up in
the pump.
The specific feature of the mzr-pumps is their highly precise design, as well as
the guarantee of high accumulator pressure and high accuracy in flow rate and
dosage. Therefore, space width and transverse space width of the rotors as
well as the interspace to the adjacent case parts lie in the range of just a few
micrometers. This precession is at the same time the criteria to achieve a
volumetric efficiency in the range of approx. 100 %.

4Description of the pump Operation manual mzr-7265
12 Technical data subject to change without prior notice! Last update: March 2019
4.2 Micro annular gear pump
The micro annular gear pump consists of the micro annular gear pump head,
the motor and the connection cable with connector.
4.3 Construction materials
Wetted parts Materials
Pump housing
stainless steel 316L (1.4404), epoxy resin adhesive
Fluid connector stainless steel 316L (1.4404),
Rotor material tungsten carbide Ni-based
Shaft material
tungsten carbide Ni-based
Bearing material tungsten carbide (WC-Ni), AL2O3
Static sealing FKM,
optional: EPDM, FFKM
table 6 Construction materials of the wetted parts mzr-7265
!
The resistance of the wetted parts shall be checked prior to the operation by
the operator and ensure.
The resistance of the construction materials to the delivered liquids should be
verified by the operator for each individual application. Pumps handling non-
lubricating liquids have shorter service lives.
4.4 Liquid supply
The micro annular gear pump head is available in a connection option.
Manifold assembly
The micro annular gear pump head has a flange at its end.
The suction port is marked with the letter "S", the pressure port with the letter
"D". An arrow on the front of the pump displays the corresponding direction
of rotation of the shaft.
To protect against dirt are in the delivery of a pump caps on the fluid ports.

5Optional modules Operation manual mzr-7265
Last update: November 2016 Technical data subject to change without prior notice! 13
5Optional modules
The spectrum of applications of the magnetic hermetic micro annular gear
pump series may be expanded by using different additional modules. The
modules allow for special dosage tasks, which could otherwise not be
accomplished with a standard pump version. The modules may be combined
with each other and with almost all available pump heads and motor versions.
−By-pass module for the delivery of minimal constant flow rates down to the
nanoliter range (see chapter 5.1)
Due to specific requirements of each application the configuration of a given
pump version should be discussed with the technical service. Additional
customized modules may be designed on demand.

5Optional modules Operation manual mzr-7265
14 Technical data subject to change without prior notice! Last update: March 2019
5.1 By-pass module (optional)
The by-pass module allows constant minimal volume dosage with flow rates in
the nanoliter range. The technology is based on the division of flow generated
by the micro annular gear pump, according to the relationship of fluidic
resistance of two predefined capillaries. The micro annular gear pump
generates a master circulation from which a side dosage current is derived.
This micro flow capillary allows to obtain flow rates starting at 1 µl/h. The
minimal and the maximal flow rate may differ by a factor of 1000 (dynamic
factor). In order to determine the lower flow rate limit, both capillaries need to
be carefully configured. It is possible to obtain flow rates between 1 and
10,000 µl/h.
The by-pass module assures dosage of minimal amounts of liquids at a very
high constancy of flow and a pressure-resistant flow rate.
figure 5 The by-pass module example with mzr-2521
Performance parameters
Operating flow rate range 1 – 10,000 µl/h
Differential pressure range 0 – 3 bar
Max. applied inlet pressure 1 bar
Pulsation <1 %
Operating temperature
-20 … +60 °C
Viscosity range 0.5 – 100 mPas
Fluid connections Liquid intake: tube or hose, OD 1/8“
Master capillary: tube, OD 1/8“ (return line to the tank)
Side current capillary: tube, OD 1/16“ (dosage capillary)
Wetted parts stainless steel 316L, PEEK
Measurements

approx. 32 x 25 mm (by-pass module without pump)
Weight approx. 140 g (by-pass module without pump)
table 7 Technical data of the by-pass module