Micronix MP-21 Series User manual

S e r i e s
Reference Manual
Linear Actuator
MP-21

MP-21
Linear Actuator
Reference Manual
Rev 3.07
MICRONIX USA, LLC
Tel: [phone]
Fax: [phone]
Email: [email protected]
http://micronixusa.com

MP-21 Linear Actuator
Rev: 3.07
1
Reference Manual
MICRONIX USA,LLC
www.micronixusa.com
Contents
1. Introduction 2
1.1 Product Description 2
1.2 Recommended Controllers 2
1.3 Technical Data 3
1.4 Load Characteristics 3
2. Model Configurations 4
2.1 MP-21 Order Numbers 4
3. Preparing to Install the MP-21 5
3.1 Installation Preparation 5
3.2 Package Contents 5
4. Installing the MP-21 6
4.1 MP-21 12 mm & 25 mm Installation 6
5. Connecting the MP-21 Linear Actuator 7
5.1 Atmospheric Environments 7
5.2 Vacuum Environments 7
5.2.1 Handling and Preparation 7
5.2.2 Installation & Wiring Diagram 7
6. Dimensions 9
6.1 MP-21 12 mm 9
6.2 MP-21 25 mm 9
7. Supplementary Information 10
7.1 Maintenance 10
7.2 Units and Conventions 10
A. Appendix 11
A.1 Stepper Motor 11
A.1.1 Motor Pinout & Cable 11
A.1.2 Stepper Motor Specifications 11
A.2 Limit Switches 12
A.2.1 Electrical Specification 12
A.2.2 Limit Switch Schematic 12
A.2.3 Direction of Motion 12
A.3 Vacuum Wiring Diagram 13
A.3.1 Straight Through 9-Pin Feed Through 13

MP-21 Linear Actuator
Rev: 3.07
2
Reference Manual
MICRONIX USA,LLC
www.micronixusa.com
1. Introduction
1.1 Product Description
The MP-21 Linear actuator is designed for applications with very limited space
conditions, due to its compact size and travel range of up to 25 mm. Typical
applications include actuation of manual drive stages and mirror mounts. Precise
positioning is achieved through use of a stepper motor and limit switch.
Aluminum construction provides for a rigid housing while reducing weight. The
MP-21 is ideally suited for motorization of micro-meter replacement on manual
stages or mirror mounts. Versions capable of operation in vacuum (10-6 mbar) are
available.
Features:
▪Travel range of 12 and 25 mm
▪Maximum speed 5 mm/sec
▪Integrated mechanical limit switch
▪Maximum force of 20 N
1.2 Recommended Controllers
The following controllers are available from MICRONIX USA:
▪MMC-200
Motor
Plunger
Locking Nut
Front Mount
Limit Switch Housing

MP-21 Linear Actuator
Rev: 3.07
3
Reference Manual
MICRONIX USA,LLC
www.micronixusa.com
1.3 Technical Data
Motor
SM-001
Pitch (mm)
0.5
Speed Max. (mm/sec)
5
Resolution Calculated (μm)
2.5 (Full Step)
Resolution Typical (μm)
0.1
Bi-directional Repeatability (μm)
± 0.5
Uni-directional Repeatability (μm)
0.4
1.4 Load Characteristics
Load Characteristics
Fx(N)
Fy(N)
Fz(N)
Mx(Nm)
My(Nm)
Mz(Nm)
kαx
[μrad/Nm]
kαy
[μrad/Nm]
SM-001
20
0
0
-
-
-
-
-

MP-21 Linear Actuator
Rev: 3.07
4
Reference Manual
MICRONIX USA,LLC
www.micronixusa.com
2. Model Configurations
2.1 MP-21 Order Numbers
Contact MICRONIX USA for custom versions and stacking configurations.
Order No. MP-21-
1
0
1
SM-001 1
12 mm 1
25 mm 2
Optional Encoder 0
Mechanical 1
Atmospheric 0
High Vacuum, 10-6 mbar 6

MP-21 Linear Actuator
Rev: 3.07
5
Reference Manual
MICRONIX USA,LLC
www.micronixusa.com
3. Preparing to Install the MP-21
3.1 Installation Preparation
The actuator is calibrated and guaranteed to be within specification at 20°C
±5°C. Be sure to use the actuator under the following conditions:
▪Mount to a clean and flat surface which is free of debris, burrs or dings
▪An indoor atmosphere free of corrosive gases, excessive dust, and
condensation
▪Temperature range of 0-40°C
▪Relative humidity between 20-80%
▪Locate away from water, heat, and electrical noise
3.2 Package Contents
If product is damaged or there are missing components, contact MICRONIX USA
immediately. Do not discard product packaging in case of return shipment.
Package Should Contain:
▪MP-21 Linear Actuator
▪Locking Nut & Wrench
▪Reference Manual
▪Any other previously agreed upon components such as a controller and
cable

MP-21 Linear Actuator
Rev: 3.07
6
Reference Manual
MICRONIX USA,LLC
www.micronixusa.com
4. Installing the MP-21
4.1 MP-21 12 mm & 25 mm Installation
The MP-21 can be installed to motorize manual drives, mirror mounts or other
applications. While installing, hold the MP-21 by the front mount to avoid
applying torque to the housing. The MP-21 is designed for axial loading; do not
apply radial loads to the plunger. When preparing the stage for vacuum
environments, take the necessary precautions (such as wearing gloves, clean
room and clothing, etc.) when handling the stage as to avoid any
contaminants.
3. Tighten Locking Nut
using supplied wrench
Customer Supplied
Mounting Surface
1. Unscrew Locking
Nut from MP-21
Requires:
1x MP-21 Linear Actuator
1x Locking Nut
1x Locking Nut Wrench
2. Insert MP-21 into
Mounting Surface
Locking Nut

MP-21 Linear Actuator
Rev: 3.07
7
Reference Manual
MICRONIX USA,LLC
www.micronixusa.com
5. Connecting the MP-21 Linear Actuator
5.1 Atmospheric Environments
For controller information refer to the appropriate MMC controller manual.
Connecting the MP-21 Linear Actuator in only requires that the D-sub 9 Pin male
Motor Cable be connected to a compatible controller. No other cables or
components are required.
5.2 Vacuum Environments
5.2.1 Handling and Preparation
When preparing the actuator for vacuum environments, take the necessary
precautions (such as wearing gloves, clean room, clothing, etc.) when handling
the precision mechanical device as to avoid any contaminants. Maximum Bake-
out temperature is 100°C. MICRONIX USA can supply the actuator with a
vacuum compatible 9-pin female PEEK connector.
5.2.2 Installation & Wiring Diagram
Connecting the MP-21 in a vacuum chamber requires the use of a feed through
connector at the vacuum chamber wall. The vacuum compatible MP-21 will be
supplied with wiring for a straight through feed through, not a cross over gender
changer. MICRONIX USA supplies test connectors that simulate the vacuum feed
through to allow for functionality testing prior to installation in a vacuum
chamber. For details regarding the pin-out and feed through specifications see
the Appendix section A.3.

MP-21 Linear Actuator
Rev: 3.07
8
Reference Manual
MICRONIX USA,LLC
www.micronixusa.com
Temporary test
connectors are
standard. Requires
customer supplied
feed through
connector