Newport PR50 Series User manual

Compact High-Speed
Rotation Stages
PR50 Se ies
USER’SMANUAL
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EDH0176En1051 — 12/18 ii
PR50 Se ies Compact High-Speed Rotation Stages
Warranty
Newpor Corpora ion warran s his produc o be free from defec s in
ma erial and workmanship for a period of 1 year from he da e of
shipmen . If found o be defec ive during he warran y period, he produc
will ei her be repaired or replaced a Newpor ’s discre ion.
To exercise his warran y, wri e or call your local Newpor represen a ive,
or con ac Newpor headquar ers in Irvine, California. You will be given
promp assis ance and re urn ins ruc ions. Send he ins rumen ,
ranspor a ion prepaid, o he indica ed service facili y. Repairs will be
made and he ins rumen re urned, ranspor a ion prepaid. Repaired
produc s are warran ed for he balance of he original warran y period, or
a leas 90 days.
Limitation of Warranty
This warran y does no apply o defec s resul ing from modifica ion or
misuse of any produc or par .
This warrant is in lieu of all other warranties, expressed or implied,
including an implied warrant of merchantabilit or fitness for a
particular use. Newport Corporation shall not be liable for an indirect,
special, or consequential damages.
b Newport Corporation, Irvine, CA. All rights reserved.
Original instructions.
No part of this document ma be reproduced or copied without the prior
written approval of Newport Corporation. This document is provided for
information onl , and product specifications are subject to change without
notice. An change will be reflected in future publishings.
CAUTION
Warran y does no apply o damages resul ing from:
• Incorrec usage:
– Load on he s age grea er han maximum specified load.
– Carriage speed higher han specified speed.
–Improper grounding.
¬ Connec ors mus be properly secured.
¬ When he load on he s age represen s an elec rical risk, i mus
be connec ed o ground.
– Excessive or improper can ilever loads.
• Modifica ion of he s age or any par hereof.
CAUTION
Please ret rn eq ipment in
the original (or eq ivalent)
packing.
Yo will be responsible for
damage inc rred from
inadeq ate packaging if the
original packaging is not
sed.
© 2018

iii EDH0176En1051 — 12/18
PR50 Se ies Compact High-Speed Rotation Stages
Table of Contents
Warranty .................................................................................................................ii
EC Declaration of Conformity...............................................................................v
Definitions and Symbols.......................................................................................vi
Warnings ...............................................................................................................vii
Caution .................................................................................................................viii
1.0 — Introduction.................................................................................1
2.0 — Description ...................................................................................2
2.1 Design Details ............................................................................................2
3.0 — Characteristics............................................................................3
3.1 Definitions..................................................................................................3
3.2 Mechanical Specifications .......................................................................4
3.3 Load Specification Definitions.................................................................4
3.4 Load Characteristics and Stiffness .........................................................4
3.5 Stage Weights ............................................................................................5
4.0 — Drives and Motors ....................................................................5
4.1 Stepper Drive Version ..............................................................................5
4.2 DC-Motor Drive Version ...........................................................................6
5.5 Mechanical Zero........................................................................................7
5.6 Feedback Signal osition ( R50CC Only) ..............................................7
4.5 inouts........................................................................................................8
5.0 — Connection to Newport Controllers................................9
5.1 Warnings on Controllers ..........................................................................9
5.2 Connection...............................................................................................10
5.3 Cables .......................................................................................................10
6.0 — Connection to Non-Newport Electronics ....................12
6.1 Connections.............................................................................................12
7.0 — Dimensions.................................................................................13
8.0 — Accessory: EQ45 Bracket....................................................13

EDH0176En1051 — 12/18 iv
PR50 Se ies Compact High-Speed Rotation Stages
9.0 — Maintenance ..............................................................................14
9.1 Maintenance ............................................................................................14
9.2 Repair .......................................................................................................14
9.3 Calibration ...............................................................................................14
Service Form .........................................................................................................15

v EDH0176En1051 — 12/18
PR50 Se ies Compact High-Speed Rotation Stages
PR50 Series
EU Declaration of Conformity
following Annex II-1A
of Directive 2006/42/EC on machinery
The manufacturer:
MICRO-CONTROLE Spectra-Physics,
9, rue du bois sauvage
F-91055 Evry FRANCE
Hereby declares that the machinery:
yDescription: " PR50 "
yFunction: Compact High-Speed Rotation Stages
yModels: PR50CC/PP
– the technical file of which was compiled by:
Mr Hervé LE COINTE , Quality Director,
MICRO-CONTROLE Spectra-Physics, Zone Industrielle - B.P.29
F-45340 Beaune La Rolande France
– complies with all the relevant provisions of the Directive 2006/42/EC on machinery.
– complies with all the relevant provisions of the Directive 2014/30/EU relating to electro-
magnetic compatibility.
– complies with all the relevant provisions of the Directive 2011/65/EU relating to RoHS2.
– was designed and built in accordance with the following harmonised standards:
yNF EN 61326-1:2013 « Electrical equipment for measurement, control and
laboratory use – EMC requirements – Part 1: General requirements »
yNF EN 55011:2010/A1:2011 Class A
– was designed and built in accordance with the following other standards:
yNF EN 61000-4-2
yNF EN 61000-4-3
yNF EN 61000-4-4
yNF EN 61000-4-5
yNF EN 61000-4-6
ORIGINAL DECLARATION
Done in Beaune La Rolande on 16 May 2017
Hervé LE COINTE
Quality Director
DC1-EN rev:A
EC Declaration of Conformity

EDH0176En1051 — 12/18 vi
PR50 Se ies Compact High-Speed Rotation Stages
Definitions and Symbols
The following erms and symbols are used in his documen a ion and also
appear on he produc where safe y-rela ed issues occur.
General Warning or Caution
The exclama ion symbol may appear in warning and cau ion ables in his
documen . This symbol designa es an area where personal injury or
damage o he equipmen is possible.
The following are defini ions of he Warnings, Cau ions and No es ha may
be used in his manual o call a en ion o impor an informa ion regarding
personal safe y, safe y and preserva ion of he equipmen , or impor an
ips.
WAR N I N G
Warning indicate a potentially dangerou ituation which can re ult in
bodily harm or death.
CAUTION
Caution indicate a potentially hazardou ituation which can re ult in
damage to product or equipment.
NOTE
Note indicate additional information that mu t be con idered by the
u er or operator.
European Union CE Mark
The presence of he CE Mark on Newpor Corpora ion equipmen means
ha i has been designed, es ed and cer ified as complying wi h all
applicable European Union (CE) regula ions and recommenda ions.
Warning and Caution
ATTENTION
Thi tage i a Cla A device. In a re idential environment, thi device
can cau e electromagnetic interference. In thi ca e, uitable mea ure
mu t be taken by the u er.

vii EDH0176En1051 — 12/18
PR50 Se ies Compact High-Speed Rotation Stages
Warnings
WARNING
The motion of objects of all types carries potential risks for operators.
Ensure the protection of operators by prohibiting access to the dangerous
area and by informing the personnel of the potential risks involved.
WAR N I N G
D n t use this stage when its m t r is emitting sm ke r is unusually
h t t the t uch r is emitting any unusual d r r n ise r is in any
ther abn rmal state.
St p using the stage immediately, switch ff the m t r p wer and then
disc nnect the electr nics p wer supply.
After checking that sm ke is n l nger being emitted c ntact y ur
Newp rt service facility and request repairs. Never attempt t repair the
stage y urself as this can be danger us.
WAR N I N G
Make sure that this stage is n t exp sed t m isture and that liquid d es
n t get int the stage.
Nevertheless, if any liquid has entered the stage, switch ff the m t r
p wer and then disc nnect the electr nics fr m p wer supply.
C ntact y ur Newp rt service facility and request repairs.
WAR N I N G
D n t insert r dr p bjects int this stage, this may cause an electric
sh ck, r l ck the drive.
D n t use this stage if any f reign bjects have entered the stage.
Switch ff the m t r p wer and then disc nnect the electr nics p wer
supply.
C ntact y ur Newp rt service facility f r repairs.
WAR N I N G
D n t place this stage in unstable l cati ns such as n a w bbly table r
sl ping surface, where it may fall r tip ver and cause injury.
If this stage has been dr pped r the case has been damaged, switch ff
the m t r p wer and then disc nnect the electr nics p wer supply.
C ntact y ur Newp rt service facility and request repairs.
WAR N I N G
D n t attempt t m dify this stage; this may cause an electric sh ck r
d wngrade its perf rmance.
WAR N I N G
D n t exceed the usable depth indicated n the m unting h les (see
secti n “Dimensi ns”). L nger screws can damage the mechanics r
cause a sh rt-circuit.

EDH0176En1051 — 12/18 viii
PR50 Se ies Compact High-Speed Rotation Stages
Caution
CAUTION
Due to its very low profile, the R50 stage contains pressure sensitive
components. For usage at a pressure level below 0.25 bar, please contact
our sales department.
CAUTION
Do not place this stage in a hostile environment such as X-Rays, har
UV,… or in any vacuum environment.
CAUTION
Do not place this stage in a location affecte by ust, oil fumes, steam or
high humi ity. This may cause an electric shock.
CAUTION
Do not leave this stage in places subject to extremely high temperatures
or low temperatures. This may cause an electric shock.
• Operating temperature: +10 to +35 °C
• Storage temperature: -10 to +40 °C (in its original packaging)
CAUTION
Do not move this stage if its motor power is on.
Make sure that the cable to the electronics is isconnecte before
moving the stage. Failure to o so may amage the cable an cause an
electrical shock.
CAUTION
Be careful that the stage is not bumpe when it is being carrie . This
may cause it to malfunction.
CAUTION
When han ling this stage, always unplug the equipment from the power
source for safety.
CAUTION
When the carriage is in its en -of-run position, it is strongly recommen e
not to go beyon this point as this may amage the stage mechanism.
CAUTION
Contact your Newport service facility to request cleaning an
specification control every year.

1 EDH0176En1051 — 12/18
PR50 Se ies Compact High-Speed Rotation Stages
Compact High-Speed Rotation Stages
PR50 Se ies
1.0 —Introduction
This manual provides operating instructions for the rotation stage that
you have purchased in the R50 Series:
REMARK
Due to its very low profile, the R50 stage contains pressure sensitive
components. For usage at a pressure level below 0.25 bar.
PR50 rotation stage.
RECOMMENDATION
We recommend you read carefully the chapter “Connection to
electronics” before using the R50 rotation stage.
PR50 rotation stage and its 2 retaining rings.
• R50 • R50CC

EDH0176En1051 — 12/18 2
PR50 Se ies Compact High-Speed Rotation Stages
2.0 —Description
The R50 Series low profile rotation stages are designed to rotate up to
1in. diameter optical components, such as polarizers, wave plates, or
wedges. The small size (only 60 mm width x 110 mm length x 21 mm
height) allows use in confined spaces such as laser cavities, disk texturing
machines, or manufacturing areas for optical components.
Similar to our higher-resolution rotation stages SR50, the R50 stages fea-
ture a low-profile, lightweight design based on an aluminum body construc-
tion with preloaded ball bearings. The motor is folded inside the outer
body providing a small footprint.
The R50 stages are a cost-efficient alternative to the SR50 for applications
that do not require the high-resolution and precision of the SR50, or for
applications that could benefit from higher speeds up to 20 °/s. The stages
feature angular resolution of 0.01°, which may be achieved with either DC-
Servo or open-loop stepper motors in half-step mode. The stages are
equipped with a hardware origin and allow for continuous rotation of 360°.
For optimal performance, we recommend the use of our motion con-
trollers.
The R50 rotation stages are equipped with a 3-meter cable for connection
to our motion controllers.
2.1 Design Details
Base Material Aluminum
Bearings Ball bearings
Drive Mechanism Ground worm gear
Worm Gear Ratio 1:63
Reduction Gear 11.8642:1
Feedback R50CC: Motor mounted rotary encoder, 48 pts/rev
R50 : Open-loop, no encoder
Origin Optical
Motor R50CC: DC servo motor UE17CC
R50 : 2-phase stepper motor UE16 SC, 1 Full step = 0.002°
Cable 3 m

3 EDH0176En1051 — 12/18
PR50 Se ies Compact High-Speed Rotation Stages
3.0 —Characteristics
3.1 Definitions
Specificatio s of our products are established i refere ce to ISO 230
sta dard part II “Determi atio of accuracy a d repeatability of
positio i g umerically co trolled axes”.
This sta dard gives the defi itio of positio u certai ty which depe ds
o the 3 followi g parameters:
Absolute Accuracy
Differe ce betwee ideal positio a d real positio .
Accuracy
Differe ce betwee ideal positio a d real positio after the compe satio
of li ear errors.
Li ear errors i clude: cosi e errors, i accuracy of screw or li ear scale
pitch, a gular deviatio at the measuri g poi t (Abbe error) a d thermal
expa sio effects. All Newport motio electro ics ca compe sate for
li ear errors.
The relatio betwee absolute accuracy a d o -axis accuracy is as follows:
Absolute Accuracy = Accuracy + Correction Factor xTravel
Repeatability
Ability of a system to achieve a comma ded positio over ma y attempts.
Reversal Value (Hysteresis)
Differe ce betwee actual positio values obtai ed for a give target
positio whe approached from opposite directio s.
Minimum Incremental Motion (MIM or Sensitivity)
The smallest i creme t of motio a device is capable of deliveri g
co siste tly a d reliably.
Resolution
The smallest i creme t that a motio device ca theoretically move
a d/or detect. Resolutio is ot achievable, whereas MIM, is the real
output of a motio system.
Eccentricity
Displacement of the geometric center of a rotation stage from the rotation
axis in the plane defined by bearings.
Wobble
Tilt of rotation axis during rotation of a stage, measured on a reference
surface.
The testing of accuracy, repeatability, and reversal error are made
systematically with test e uipment in controlled environment (20 ±1 °C).
A linear cycle with 21 data points on the travel and 4 cycles in each
direction gives a total of 168 points.
G

EDH0176En1051 — 12/18 4
PR50 Se ies Compact High-Speed Rotation Stages
3.2 Mechanical Specifications
CAUTION
To reach specifications stated, stages must be fixed on a plane surface
with a flatness of 5 µm.
3.3 Load Specification Definitions
Normal Load Capacity (Cz)
Maximum load a rotation stage can move while maintaining specifications.
This value is given with speed and acceleration specified for each rotation
stage, and with a load perpendicular to bearings.
Off-Centered Load (Q)
Maximum cantilever-load a rotation stage can move: Q ≤Cz ÷ (1 + D/a)
D: Cantilever distance.
a: Construction parameter
3.4 Load Characteristics and Stiffness
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Travel Range (°) 360 continuous
Minimum Incremental Motion (°) 0.02
Uni-directional Repeatability, Typical (°) ±0.005
Bidirectional Repeatability, Typical (1) (°) ±0.030
Absolute, Typical (1) (°) ±0.025
Maximum Speed (2) (°/s) 20
Wobble (1) (µrad) 100 or ±50
MTBF (h) 10,000
1)For the defi itio of Typical a d Guara teed specificatio s see “Motio Basics Termi ology & Sta dards” Tutorial
at www. ewport.com
2) Max. speed with SMC100PP: 8 °/s for PR50PP.
Guaranteed and Typical Specifications
Guaranteed maximum performance values are verified per Newport's A167
metrology test procedure. For more information, please consult the
metrology tutorial section in the Newport catalog or at www.newport.com
PR50CC PR50PP
Cz, Normal centered load capacity (N) 10
Ka, Transversal Stiffness (µrad/Nm) 100
Mz, Nominal Torque (Nm) 0.1
Q, Off-center load (N) Q ≤Cz ÷ (1 + D/22)
Where D = Cantilever distance (mm)
kα
Z
Q
D
Cz
X
Mz

5 EDH0176En1051 — 12/18
PR50 Se ies Compact High-Speed Rotation Stages
3.5 Stage Weights
The weights indicated into the below table is the value for the rotation
stage with its cable installed.
The weight variation between drive units is not very significant.
4.0 —Drives and Motors
4.1 Stepper Drive Version
Stepper-motor-driven stages are offered in one half-step drive version:
R50 .
Half-Step Drive
Is used for stepper motors, when 1 pulse emitted by electronic
corresponds to theoretical physical motion of 1/2 of a full step of the
motor.
Stepper Motor erformance Specifications and Characteristics
NOTES
• The stepper motor does not use an encoder.
• The real resolution for R50 rotation stages is 0.0100341°.
Weight [lb (kg)]
R50 0.88 (0.4)
Resolution Speed Angle y Step RMS Current Resistance Inductance
(°) (°/s) (°) per Phase (A) (Ω) (mH)
PR50PP 0.01 20 15 0.25 (1) 12.5 5.5
0.18 (2)
1) 1 phase at o ce: 0.25 A.
2) 2 phases at o ce: 0.18 A by phase.

EDH0176En1051 — 12/18 6
PR50 Se ies Compact High-Speed Rotation Stages
Command Signals for the Stepper Motor
4.2 DC-Motor Drive Version
One DC-motor-driven configuration is available: R50CC.
DC-Motor erformance Specifications and Characteristics
NOTE
The real resolution for R50CC rotation stages is 0.0100341°.
Command Signals for the DC-Motors
In the above drawings, + Motor signal is referred to – Motor signal.
➀When the stage moves in + Direction, the + Motor voltage is higher than
– Motor voltage.
➁When the stage moves in – Direction, the + Motor voltage is lower than
– Motor voltage.
Phase 1a
1
Phase 2a
Phase 1b
Phase 2b
Direction – MOTION
2345 6 7 8
Direction +
Direction +
Resolution Speed Nominal Max RMS Max. Peak Resistance Inductance Tachometer
(°) (°/s) Voltage (V) Current (A) Current (A) (Ω) (mH) Const. (V/krpm)
PR50CC 0.01 20 12 0.15 0.3 24 0.75 –
+V
+Motor
– Motor –V
MOTION Direction +
MOTIONDirection –
Direction +

7 EDH0176En1051 — 12/18
PR50 Se ies Compact High-Speed Rotation Stages
5.5 Mechanical Zero
Mechanical Zero is a 5 V open collector type.
Mechanical Zero repeatability is <0.01°.
CAUTION
“Mechanical Zero” is an active signal and should not be connected to any
other source.
5.6 Feedback Signal osition ( R50CC Only)
The incremental sensor consists of an optical scale and an encoder head.
When the carriage moves, the encoder head generates square signals in
quadrature and sends to pins #19, #20, #23 and #24 of the SUB-D25
connector.
“Encoder” are “differential pair” (type RS-422) type output signals. Using
these signals permits a high immunity to noise. Emission circuits generally
used by Newport are 26LS31 or MC3487. Reception circuits to use are
26LS32 or MC3486.
Direction +
0
1
Mechanical
Zero
180 ±5 180 ±5
MOTION Direction +
Pin #21
Pin #22
NEWPORT
STAGE
USER
Output Signals
Encoder Phase B
Encoder Phase B
Encoders
& Sensors
Power Supply
+5 V 5%
150 mA max.
0 V
Pin #24
Pin #20
Encoder Phase A
Encoder Phase A
Pin #23
Pin #19
Pin #25
Pin #15
}
0
1
Encoder
Phase A
0
1
Encoder
Phase A
1234
0
1
Encoder
Phase B
0
1
Encoder
Phase B
Direction – MOTION Direction +
Direction +

EDH0176En1051 — 12/18 8
PR50 Se ies Compact High-Speed Rotation Stages
4.5 inouts
The pinout diagrams for the R50 stages SUB-D25M connector are shown
below.
PR50CC
1 N.C.
2 N.C.
3 N.C.
4 N.C.
5 + Motor
6 + Motor
7 – Motor
8 – Motor
9 N.C.
10 N.C.
11 N.C.
12 N.C.
13 Mechanical Zero
14 Ground
15 N.C.
16 0 V
17 Do not connect
18 Do not connect
19 Encoder Phase A
20 Encoder Phase B
21 +5 V
22 0 V
23 Encoder Phase /A
24 Encoder Phase /B
25 N.C.
PR50PP
1 Phase 1a
2 N.C.
3 Phase 1
4 N.C.
5 Phase 2a
6 N.C.
7 Phase 2
8 N.C.
9 N.C.
10 N.C.
11 N.C.
12 N.C.
13 Mechanical Zero
14 Ground
15 N.C.
16 0 V
17 Do not connect
18 Do not connect
19 N.C.
20 N.C.
21 +5 V
22 0 V
23 N.C.
24 N.C.
25 N.C.
13
25
141

9 EDH0176En1051 — 12/18
PR50 Se ies Compact High-Speed Rotation Stages
5.0 —Connection to Newport Controllers
5.1 Warnings on Controllers
Controllers are intended for use by qualified personnel who recognize
shock hazards and are familiar with safety precautions required to avoid
possible injury. Read the controller user’s manual carefully before
operating the instrument and pay attention to all written warnings and
cautions.
WAR N I N G
Disconnect t e power plug under t e following circumstances:
• If t e power cord or any attac ed cables are frayed or damaged in
any way.
• If t e power plug is damaged in any way.
• If t e unit is exposed to rain, excessive moisture, or liquids are spilled
on t e unit.
• If t e unit as been dropped or t e case is damaged.
• If you suspect service or repair is required.
• W enever you clean t e electronics unit.
CAUTION
To protect t e unit from damage, be sure to:
• Keep all air vents free of dirt and dust.
• Keep all liquids away from t e unit.
• Do not expose t e unit to excessive moisture (85% umidity).
• Read t is manual before using t e unit for t e first time.
WAR N I N G
All attac ment plug receptacles in t e vicinity of t is unit are to be of
t e grounding type and properly polarized.
Contact your electrician to c eck your receptacles.
WAR N I N G
T is product is equipped wit a 3-wire grounding type plug.
Any interruption of t e grounding connection can create an electric
s ock azard.
If you are unable to insert t e plug into your wall plug receptacle,
contact your electrician to perform t e necessary alterations to ensure
t at t e green (green-yellow) wire is attac ed to eart ground.
WAR N I N G
T is product operates wit voltages t at can be let al.
Pus ing objects of any kind into cabinet slots or oles, or spilling any
liquid on t e product, may touc azardous voltage points or s ort out
parts.

EDH0176En1051 — 12/18 10
PR50 Se ies Compact High-Speed Rotation Stages
5.2 Connection
There is a label on every stage indicating its part and serial numbers.
WARNING
Always turn the controller's power OFF before connecting to a stage.
NOTE
These stages are ES compatible. Enhanced System erformance is
Newport's exclusive technology that enables Newport ES motion
controllers to recognize the connected Newport ES stage and upload
the stage parameters. This ensures that the user can operate the motion
system quickly and safely.
5.3 Cables
The R50 stages are delivered with a 3-meter cable. This cable is equipped
with a SUB-D25M connector for direct connection to Newport Controllers.
BENDING
STATIC CABLE: ≥.94 (24)
CABLE IN MOTION: ≥2.76 (70)
ø.24
(6)
LOCKING
KNOBS
2.28 (58)
DISCONNECTED
CABLE
CONNECTOR STAGE
SUB-D25 CONNECTOR SHOWN
DIMENSIONS IN INCHES (AND MILLIMETERS)
WAR N I N G
This cab e is shie ded correct y. For a correct operation, make sure to
ock connectors (ground continuity provided by the cab e).
For applicatio s where the cable attached to your stage is ot adequate,
Newport offers lo ger le gth cables desig ed to e sure the i tegrity of
your positio i g applicatio .
These cables are specially shielded a d termi ated with Newport’s sta dard
SUB-D25 co ectors. They are available i 5-m (MMCABLE-5)or 7-m
(MMCABLE-7) le gths.

11 EDH0176En1051 — 12/18
PR50 Se ies Compact High-Speed Rotation Stages
CABLE
CONNECTOR STAGE
LOCKING
KNOBS
BENDING
STATIC CABLE: ≥1.97 (50)
CABLE IN MOTION: ≥4.72 (120)
2.60 (66)
DISCONNECTED
ø.39
(10.6)
SUB-D25 CONNECTOR SHOWN
DIMENSIONS IN INCHES (AND MILLIMETERS)
WAR N I N G
Keep the motor cab es at a safe distance from other e ectrica cab es in
your environment to avoid potentia cross ta k.
For cable le gths i excess of 3 meters, we recomme d the MMCABLE-REG
to e sure a high quality, regulated 5 V supply to the stages.
This regulator is available as a optio . Please ote that for best efficie cy,
this regulator should be attached to the stage to re-adjust the 5 V comi g
from the co troller through the lo g cable.
2.1
(54)
2.4 (62)
25-PIN SUB-D
MALE
25-PIN SUB-D
FEMALE
DIMENSIONS IN INCHES
(AND MILLIMETERS)

EDH0176En1051 — 12/18 12
PR50 Se ies Compact High-Speed Rotation Stages
6.0 —Connection to Non-Newport Electronics
6.1 Connections
WARNING
Newport is not responsible for malfunction or damage of XXXX stages
when used with non-Newport controllers.
WARNING
Newport guarantees “”compliance of R50 stages only if used with
Newport cables and controllers.
It is the customer’s responsibility to modify the cable and take care of
sensor signal connections, when using the stage with non-Newport
controllers.
End-of-Runs and Mechanical Zero are open collector type with a 5.6 V
protective Zener diode.
Iinmax.: 16 mA
V max.: 5.25 V
NEWPORT
STAGE
5.6 V
This manual suits for next models
2
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