Oerlikon Leybold Vacuum PENNINGVAC PTR 90 User manual

PENNINGVAC
PTR 90
Operating Manual GA09313_0202
Part Numbers
230 070
230 071
230 072

General Information
2GA09313_0202 – (2008-02) – ¤Oerlikon Leybold Vacuum
Product Identification
In all communications with Oerlikon Leybold Vacuum, please specify the infor-
mation given on the product nameplate. For convenient reference copy that in-
formation into the space provided below:
Oerlikon Leybold Vacuum, D-50968 Köln
Type:
No:
F-No:
VW
Validity
This document applies to products with catalog numbers:
230 070 (DN 25 ISO-KF)
230 071 (DN 40 ISO-KF)
230 072 (DN 40 CF-F)
The catalog number (No) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document corres-
pond to transmitters with the vacuum connection DN 25 ISO-KF. They apply to
transmitters with other vacuum connections by analogy.
We reserve the right to make technical changes without prior notice.
All dimensions in mm.
Intended Use
The PENNINGVAC Transmitter PTR 90 has been designed for vacuum measure-
ment in the pressure range of 5×10-9 … 1000 mbar.
The transmitter must not be used for measuring flammable or combustible gases
which react in air.
It can be operated in connection with an Oerlikon Leybold Vacuum gauge
controller CENTER ONE, CENTER TWO or CENTER THREE, or with another
controller.
Functional Principle
Over the whole measuring range, the measuring signal is output as a logarithm of
the pressure.
The transmitter consists of two separate measurement systems (Pirani and cold
cathode system) the signals of which are combined in such a way that one
measurement signal is output. The Pirani measurement circuit is always on.

Contents
GA09313_0202 – (2008-02) – ¤Oerlikon Leybold Vacuum 3
Contents
Product Identification 2
Validity 2
Intended Use 2
Functional Principle 2
1Safety 4
1.1 Symbols Used 4
1.2 Personnel Qualifications 4
1.3 General Safety Instructions 4
1.4 Liability and Warranty 5
2Technical Data 6
3Installation 9
3.1 Vacuum Connection 9
3.1.1 Removing the Magnet Unit (Only for Transmitters With CF Flange) 11
3.2 Electrical Connection 12
3.2.1 Use With an Oerlikon Leybold Vacuum Controller 12
3.2.2 Use With Another Control Device 12
4Operation 13
4.1 Principle, Measuring Behavior 13
5Deinstallation 15
6Maintenance 16
6.1 Adjusting the Transmitter 16
6.2 Cleaning the Transmitter, Replacing Parts 18
6.2.1 Disassembling the Transmitter 18
6.2.2 Cleaning the Transmitter 19
6.2.3 Reassembling the Transmitter 20
6.3 Troubleshooting 22
7Accessories 23
8Spare Parts 23
9Returning the Product 24
10 Disposal 25
Appendix 26
A: Relationship Between Measuring Signal and Pressure 26
B: Gas Type Dependence 28
Declaration of Contamination 30
For cross-references within this document, the symbol (→XY) is used.

Safety
4GA09313_0202 – (2008-02) – ¤Oerlikon Leybold Vacuum
1 Safety
1.1 Symbols
Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or
minor equipment damage.
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.
1.3 General Safety Instructions
•Adhere to the applicable regulations and take the necessary precautions for the
process media used.
Consider possible reactions between the materials (→7) and the process
media.
Consider possible reactions (e.g. explosion) of the process media due to the
heat generated by the product.
•Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document.
•Before beginning to work, find out whether any vacuum components are conta-
minated. Adhere to the relevant regulations and take the necessary precautions
when handling contaminated parts.
DANGER
DANGER: magnetic fields
Strong magnetic fields can disturb electronic devices like heart pace-
makers or impair their function.
Maintain a safety distance of 10 cm between the magnet and the
heart pacemaker or prevent the influence of strong magnetic fields by
antimagnetic shielding.
Communicate the safety instructions to all other users.

Safety
GA09313_0202 – (2008-02) – ¤Oerlikon Leybold Vacuum 5
1.4 Liability and Warranty
Oerlikon Leybold Vacuum assumes no liability and the warranty becomes null and
void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.) on the product
•use the product with accessories not listed in the product documentation.
The end-user assumes the responsibility in conjunction with the process media
used.
Transmitter failures due to contamination, as well as expendable parts (filament),
are not covered by the warranty.

Technical Data
6GA09313_0202 – (2008-02) – ¤Oerlikon Leybold Vacuum
2 Technical Data
Measurement range (Air, N2) 5×10-9 … 1000 mbar
Accuracy (N2) ≈±30%
in the range 1×10-8 … 100 mbar
Repeatability ≈±5%
in the range1×10-8 … 100 mbar
Gas type dependence →28
Output signal (measuring signal)
Voltage range 0 … +10.5 V
Measurement range 1.82 … 8.6 V
Voltage vs. pressure logarithmic , 0.6 V / decade (→26)
Error signal <0.5 V no supply
>9.5 V Pirani sensor defective
(filament
rupture)
Output impedance 2×10 Ω
Minimum loaded impedance 10 kΩ, short-circuit proof
Response time (pressure dependent)
p > 10-6 mbar
p = 10-8 mbar
<10 ms
≈1000 ms
Identification transmitter 85 kΩ, referenced to supply common
Status pin 6
p > 10-2 mbar
Pirani-only mode
Low = 0 V
p < 10-2 mbar
Cold cathode not ignited
Pirani-only mode
Low = 0 V
p < 10-2 mbar
Cold cathode ignited
Combined Pirani / cold cathode
mode
High = 15 … 30 VDC
LED High voltage on (LED on)
Supply
DANGER
The transmitter may only be connected to power supplies, instruments
or control devices that conform to the requirements of a grounded
extra-low voltage (SELV-E according to EN 61010). The connection to
the transmitter has to be fused 1).
Voltage at the transmitter 15 … 30 VDC (ripple ≤1 Vpp)
Power consumption ≤2 W
Fuse 1) ≤1 AT
The minimum voltage of the power supply unit must be increased proportionally to
the length of the sensor cable.
Voltage at the supply unit with maxi-
mum cable length
16 … 30 VDC (ripple ≤1 Vpp)
1) Oerlikon Leybold Vacuum controllers fulfill these requirements.

Technical Data
GA09313_0202 – (2008-02) – ¤Oerlikon Leybold Vacuum 7
Adjustment
Potentiometer <HV> adjustment under 10-4 mbar
Potentiometer <ATM> adjustment at atmospheric pressure
Electrical connection FCC68 socket, 8 poles
Sensor cable 8 poles, shielded
Line length ≤50 m (8×0.14 mm²)
Operating voltage ≤3.3 kV
Operating current ≤500 μA
Grounding concept →("Electrical Connection")
Vacuum connection – measuring
common
connected via 10 kΩ
(max. voltage differential with respect to
safety ±50 V
accuracy ±10 V)
Supply common – signal common conducted separately
Materials exposed to vacuum
Vacuum connection
Measurement chamber
Feedthrough isolation
Internal seals
Anode
Ignition aid
Pirani measurement tube
Pirani filament
stainless steel
stainless steel
ceramic
FPM
Mo
stainless steel
Ni, Au
W
Mounting orientation any
Internal volume ≈20 cm³
Pressure ≤10 bar (absolute),
limited to inert gases
Temperatures
Operation +5 … +55 °C
Bakeout +150 °C
(without electronics and magnetic
shielding)
Pirani filament +120 °C
Storage -40 °C … +65 °C
Relative humidity ≤80% at temperatures ≤+31°C
decreasing to 50% at +40°C
Use indoors only
altitude up to 2000 m
Type of protection IP40

Technical Data
8GA09313_0202 – (2008-02) – ¤Oerlikon Leybold Vacuum
Dimensions [mm]
110
18
ø 63.5
28 55
DN 25 ISO-KF
60
75
116
18.5
24
ø 63.5
28 55
DN 40 CF-F DN 40 ISO-KF
110,5
60
75
Weight
230 070
230 071
230 072
≈700 g
≈720 g
≈980 g

Installation
GA09313_0202 – (2008-02) – ¤Oerlikon Leybold Vacuum 9
3 Installation
3.1 Vacuum
Connection
DANGER
DANGER: overpressure in the vacuum system >1 bar
Injury caused by released parts and harm caused by escaping process
gases can result if clamps are opened while the vacuum system is
pressurized.
Do not open any clamps while the vacuum system is pressurized. Use
the type of clamps which are suited to overpressure.
DANGER
DANGER: overpressure in the vacuum system >2.5 bar
KF flange connections with elastomer seals (e.g. O-rings) cannot with-
stand such pressures. Process media can thus leak and possibly
damage your health.
Use O-rings provided with an outer centering ring.
DANGER
DANGER: protective ground
Products that are not professionally connected to ground can be
extremely hazardous in the event of a fault.
The transmitter must be electrically connected to the grounded
vacuum chamber. The connection must conform to the requirements
of protective connection according to EN 61010:
•CF connections fulfill this requirement.
•For transmitters with KF connections, use a conductive metallic
clamping ring.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with one's bare hands increases
the desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.

Installation
10 GA09313_0202 – (2008-02) – ¤Oerlikon Leybold Vacuum
WARNING
WARNING: electric arcing
Helium may cause electric arcing with detrimental effects on the
electronics of the product.
Before performing any tightness tests put the product out of operation
and remove the electronics unit.
The transmitter may be mounted in any orientation. To keep conden-
sates and particles from getting into the measuring chamber preferably
choose a horizontal to upright position and possibly use a seal with a
centering ring and filter.
If adjustment should be possible after the transmitter has been installed,
be sure to install it so that potentiometers <HV> and <ATM> can be
accessed with a screwdriver (→"Adjusting the Transmitter").
Procedure
Remove the protective lid and install the product at the vacuum system.
When making a CF flange connection, it can be advantageous to temporarily
remove the electronics and the magnet unit (→11).
or
Protective lid
Clamp
Seal with centering ring
Seal with centering
ring and filter
Keep the protective lid.

Installation
GA09313_0202 – (2008-02) – ¤Oerlikon Leybold Vacuum 11
3.1.1 Removing the Magnet Unit
(Only for Transmitters With CF Flange)
Tools required
•Allen wrench AF 1.5
•Open-end wrench AF 7
Procedure
3
1
2
4
7
Protective lid
a) Unfasten the hexagon socket set screw (1) on the side of the electronics unit
(2).
b) Remove the electronics unit without twisting it.
c) Unfasten the hexagon head screw (3) on the magnet unit (4) and remove the
magnet unit.
The magnetic force and the tendency to tilt make it difficult to
separate the magnet unit and the measuring chamber (7).
d) Make the flange connection between the transmitter and the vacuum system.
e) Remount the magnet unit and lock it with the hexagon head screw (3).
f) Carefully mount the electronics unit (2). (Make sure the pin of the Pirani ele-
ment is properly plugged into the corresponding hole of the electronics unit.)
g) Push the electronics unit up to the mechanical stop and lock it with the hexagon
socket set screw (1).

Installation
12 GA09313_0202 – (2008-02) – ¤Oerlikon Leybold Vacuum
3.2 Electrical Connection
Precondition
Make sure the vacuum connection is properly made (→"Vacuum Connection").
3.2.1 Use With an Oerlikon Leybold Vacuum Controller
Connect the transmitter to the controller using a sensor cable.
3.2.2 Use With Another Control Device
nMake a sensor cable according to the following diagram.
Electrical connection
Pin 1 Supply (15 … 30 VDC)
Pin 2 Supply common
Pin 3 Signal output
(measuring signal)
Pin 4 Identification
Pin 5 Signal common
Pin 6 Status
Pin 7, 8 n.c.
8 poles FCC-68
1
8
10
10
Ident
3
5
4
1
2
–
+
–
+
6
10 k
Signal
oConnect the transmitter to the controller using the sensor cable.

Operation
GA09313_0202 – (2008-02) – ¤Oerlikon Leybold Vacuum 13
4 Operation
As soon as the required supply voltage is applied, the measuring signal is available
between pins 3 and 5. (→26 for the relationship between the measuring signal
and the pressure).
Allow for a stabilizing time of approx. 10 min. Once the transmitter has been
switched on, permanently leave it on irrespective of the pressure.
4.1 Principle, Measuring Behavior
The transmitter consists of two separate measurement systems (Pirani and cold
cathode system) the signals of which are combined in such a way that one
measurement signal is output.
The optimum measuring configuration for the particular pressure range, in which
measurement is performed, is used:
10-4 mbar
10-2 mbar
1000 mbar
5×10-9 mbar
Cald cathode Pirani
•The Pirani measuring circuit is always on.
•The cold cathode measuring circuit is controlled by the Pirani circuit and is
activated only at pressures <1×10-2 mbar.
The status output (pin 6) indicates the current status of the transmitter.
Pressure Green lamp on
the transmitter
Operating mode Pin 6
p >1×10-2 mbar
Pirani-only mode Low = 0 V
p <1×10-2 mbar
Cold cathode not
ignited
Pirani-only mode
Low = 0 V
p <1×10-2 mbar
Cold cathode ignited
Combined Pirani / cold
cathode mode
High = 15 … 30 VDC
As long as the cold cathode measuring circuit has not ignited, the measuring value
of the Pirani is output as measuring signal (if p < 5×10-4 mbar, "Pirani underrange"
is displayed).
Gas type dependence
The measuring signal depends on the type of gas being measured. The curves are
accurate for N2, O2, dry air and CO. They can be mathematically converted for
other gases (→28).
If you are using an Oerlikon Leybold Vacuum controller, you can enter a calibration
factor to correct the pressure reading (→of that controller).
Ignition delay
When cold cathode measuring systems are activated, an ignition delay occurs. The
delay time increases at low pressures and is typically:
10-5 mbar 1 second
10-7 mbar 20 seconds
5×10-9 mbar 2 minutes

Operation
14 GA09313_0202 – (2008-02) – ¤Oerlikon Leybold Vacuum
As long as the cold cathode measuring circuit has not yet ignited, the measured
value of the Pirani is output as measuring signal ("Pirani underrange" is displayed
for pressures <5×10-4 mbar). The status output (pin 6, low) indicates the Pirani-only
mode.
If the transmitter is activated at a pressure p < 3×10-9, the transmitter
cannot recognize whether the cold cathode system has ignited. It indi-
cates "Pirani underrange".
Once flanged on, permanently leave the transmitter in the operating
mode irrespective of the pressure range. Like this, the ignition delay of
the cold cathode measuring circuit is always negligible (<1 s), and
thermal stabilizing effects are minimized.
Contamination
Transmitter failures due to contamination, as well as expendable parts
(filament), are not covered by the warranty.
Transmitter contamination is influenced by the process media used as well as by
any present or new contaminants and their respective partial pressures. Contin-
uous operation in the range of 10-4 mbar … 10-2 mbar can cause severe conta-
mination as well as reduced up-time and maintenance cycles. With constantly low
pressures (p <1×10-6 mbar), the transmitter can be operated for more than one
year without cleaning (cleaning the transmitter →18).
Contamination of the transmitter generally causes a deviation of the measured
values:
•In the high pressure range (1×10-3 mbar … 0.1 mbar), the pressure reading is
too high (contamination of the Pirani element). Readjustment of the Pirani
measuring system →16.
•In the low pressure range (p < 1×10-3 mbar), the pressure reading is usually too
low (contamination of the cold cathode system). In case of severe contamina-
tion, instabilities can occur (layers of the measuring chamber peel off). Conta-
mination due to insulation layers can even lead to a complete failure of the
discharge ("Underrange" is displayed).
Contamination can to a certain extent be reduced by:
•geometric protection measures (e.g. screenings, elbows) for particles that
spread rectilinearly
•mounting the flange of the transmitter at a place where the partial pressure of
the pollutants is particularly low.
Special precautions are required for vapors deposited under plasma (of the cold
cathode measuring system). It may even be necessary to temporarily switch of the
transmitter while such vapors occur.

Deinstallation
GA09313_0202 – (2008-02) – ¤Oerlikon Leybold Vacuum 15
5 Deinstallation
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contami-
nated. Adhere to the relevant regulations and take the necessary
precautions when handling contaminated parts.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with one's bare hands increases
the desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
Procedure
nVent the vacuum system.
oPut the transmitter out of operation and unplug the sensor cable.
pRemove the transmitter from the vacuum system and place the protective
lid.
When deinstalling a CF flange connection, it can be advanta-
geous to temporarily remove the electronics and the magnet unit
(→11).
Protective lid

Maintenance
16 GA09313_0202 – (2008-02) – ¤Oerlikon Leybold Vacuum
6 Maintenance
Transmitter failures due to contamination, as well as expendable parts
(filament), are not covered by the warranty.
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contami-
nated. Adhere to the relevant regulations and take the necessary
precautions when handling contaminated parts.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with one's bare hands increases
the desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
6.1 Adjusting the Transmitter
The transmitter is factory-calibrated. If used under different climatic conditions,
through extreme temperatures, aging or contamination, and after exchanging the
sensor, the characteristic curve can be offset and readjustment may become
necessary.
The cold cathode measurement circuit, which is dominant for low pressures
(<1×10-3 mbar), is factory-calibrated. By way of contrast, the Pirani measurement
circuit can be adjusted. Any adjustment has a negligible effect on the pressure
range between approx. 10-2 mbar and 102mbar.
Tools required
•Screw driver No. 1.5 mm
•Cylindrical pin ø≈3 mm
Procedure
nIf you are using a seal with centering ring and filter, check that they are
clean or replace them if necessary (→"Deinstallation").
oActivate the transmitter (if possible, in the position, in which it will be used
later on).
pEvacuate it to p << 10-4 mbar, and then wait 10 minutes.

Maintenance
GA09313_0202 – (2008-02) – ¤Oerlikon Leybold Vacuum 17
qTurn the nameplate counter-clockwise until the mechanical stop is reached.
r
While depressing the tactile switch with a cylindrical pin (ø ≈3 mm) ), adjust
the <HV> potentiometer by means of a 1.5 mm screwdriver …
… to 4.20 V or … to 5×10-4 mbar.
After that, turn the potentiometer
counter-clockwise by 1/3 of a turn.
sVent the transmitter with air or nitrogen to atmospheric pressure, and wait at
least 10 minutes.
tTurn the nameplate clockwise until the mechanical stop is reached.
u
Using the 1.5 mm screwdriver, adjust the <ATM> potentiometer …
… to 8.60 V or … to 1×103mbar.
vTurn the nameplate back to its original position (it catches).

Maintenance
18 GA09313_0202 – (2008-02) – ¤Oerlikon Leybold Vacuum
6.2 Cleaning the Transmitter, Replacing Parts
DANGER
DANGER: cleaning agents
Cleaning agents can be detrimental to health and environment.
Adhere to the relevant regulations and take the necessary precautions
when handling and disposing of cleaning agents.
We recommend replacing the Pirani element when cleaning the trans-
mitter.
Tools / material required
•Allen wrench AF 1.5
•Allen wrench AF 3
•Open-end wrench AF 7
•Pliers for circlip
•Polishing cloth (400 grain) or Scotch-Brite
•Tweezers
•Cleaning alcohol
•Mounting tool for ignition aid
•Ignition aid
•Pirani element (13) incl. FPM seal (13a)
•FPM seal (11) for anode feedthrough
6.2.1 Disassembling the Transmitter
6
3
2
4
1
5
7
13
13a
8
8a
9
10
11
12
10a
nRemove the transmitter from the vacuum system (→15).

Maintenance
GA09313_0202 – (2008-02) – ¤Oerlikon Leybold Vacuum 19
oUnfasten the hexagon socket set screw (1) on the side of the electronics
unit (2).
pRemove the electronics unit without twisting it.
The cover of the electronics unit cannot be removed.
qUnfasten the hexagon head screw (3) on the magnet unit (4) and remove
the magnet unit.
The magnetic force and the tendency to tilt make it difficult to
separate the magnet unit and the measuring chamber (7).
rRemove the circlip (5) and the polarity insert (6) from the measuring
chamber.
sRemove the three hexagon socket screws (8) incl. lock washers (8a) on the
back of the measuring chamber.
tCarefully remove the following parts in this order (without exerting stress on
the Pirani element (13)): pressure piece (9), complete anode (10), FPM seal
(11) incl. support ring (12), Pirani element (13) incl. FPM seal (13a).
The parts can now be cleaned or replaced individually.
6.2.2 Cleaning the Transmitter
Cleaning the measuring chamber and the polarity insert
nUsing a polishing cloth rub the inside walls of the measuring chamber and
the polarity insert to a bright finish.
The sealing surfaces must only be worked concentrically.
oRinse the measuring chamber and the polarity insert with cleaning alcohol.
pAllow both to dry.
Cleaning or replacing the anode
nRemove the used ignition aid (10a) with pliers.
oUsing a polishing cloth rub the anode pin to a bright finish.
Do not bend the anode. Do not carry out mechanical work on the
ceramic part.
pRinse the anode with cleaning alcohol.
qAllow the anode to dry.

Maintenance
20 GA09313_0202 – (2008-02) – ¤Oerlikon Leybold Vacuum
rInsert a new ignition aid (10a) into the mounting tool.
sCarefully press the anode (clean or new)
centered and parallel to the tool axis into the
ignition aid and insert it to a depth of approx.
15 mm. The final positioning is established
after the anode is installed.
Ignition aid
Mounting tool
Anode
Cleaning the Pirani element
nRemove the FPM seal (13a) from the Pirani element (13).
oFill the Pirani measuring tube with cleaning alcohol and let it work.
pPour the alcohol out of the tube.
qDry the tube (e.g. with a blow dryer <150 °C).
rSlide a new FPM seal over the Pirani element and insert it into the corre-
sponding groove.
sReinstall the Pirani element (→section 6.2.3).
Replacing the Pirani element
If it is severely contaminated or defective.
nSlide a new FPM seal (13a) over the Pirani element (13) and insert it into
the corresponding groove.
oMount the Pirani element (→section 6.2.3).
6.2.3 Reassembling the Transmitter
nInsert the FPM seal (11) with the support ring (12) centered into the
measuring chamber (7). The sealing surface, seal, and ceramic part must
be clean.
oCarefully insert the anode (10) incl. ignition aid (10a) into the measuring
chamber.
pInsert the Pirani element (13) with the FPM seal (13a) slid over it into the
corresponding bore hole.
qCarefully place the pressure piece (9) on the measuring chamber and
tighten them with the three hexagon socket screws (8) incl. lock washers
(8a) uniformly until the stop position is reached.
rPosition the ignition aid (10a) by pushing the mounting tool over the anode
pin until the mechanical stop is reached.