Oerlikon Leybold Vacuum TURBOLAB 80 User manual

TURBOLAB 80
Turbomolecular pump system with dry
compressing backing pump
Operating Instructions GA501591_002_A2
Material number
501591Vxxx

Contents
GA501591_002_A2 – 08/2010 – © Oerlikon Leybold Vacuum 2
1Description 3
1.1 Ordering Information 3
1.2 Supplied Equipment 3
1.2.1 Pump System Components 3
1.2.2 Accessories 3
1.3 Technical Data 4
2Connections 4
2.1 Conforming Utilisation 5
3Operation 6
3.1 Electrical Connection 6
3.2 Switching the System on 7
3.3 Changing the Default Settings of the System 7
3.3.1 Selecting the HV Gauge Head 8
3.3.2 Selecting the Forevacuum Gauge Head 9
3.3.3 Selecting the Language 9
3.4 Commissioning the System 10
3.4.1 Changing the Display Settings 11
3.4.2 Pressure History 11
3.4.3 Operating Hours 11
3.4.4 Venting Valve 12
3.4.5 Pressure Units 13
3.5 Shutting the System Down 13
3.6 Operating Information 13
4Spare Parts 14
5Options 14

Description
GA501591_002_A2 – 08/2010 – © Oerlikon Leybold Vacuum 3
1 Description
Described in these Operating Instructions is the equipment and operation of
the turbomolecular pump system TURBOLAB 80.
1.1 Ordering Information
TURBOLAB 80, DN63ISO-K 501591V1xyz*
TURBOLAB 80, DN63CF 501591V2xyz*
*xyz indicate the precise version of the system together with the possible options.
1.2 Supplied Equipment
TURBOLAB 80
Mains cord 230V/1ph/50Hz
Operating Instructions for the pump system
Operating Instructions for the turbomolecular pump
Inlet screen for the turbomolecular pump
1.2.1 Pump System Components
xTurbomolecular pump SL80
xFrequency converter TURBO.DRIVE 400
x24 V DC power supply unit
xDiaphragm pump
xControl unit
1.2.2 Accessories
Optional accessories for the pump systems are:
xHigh vacuum gauge ITR90
xHigh vacuum gauge PTR90
xForevacuum gauge TTR91
xVenting valve

Description
GA501591_002_A2 – 08/2010 – © Oerlikon Leybold Vacuum 4
1.3 Technical Data
Pumping speed for N2 60 l/s
Attainable ultimate pressure range 10-7 mbar *
Run-up time for the turbomolecular pump 1.5 minutes
Pumping speed of the diaphragm pump 0.7 m³/h
Ultimate pressure of the diaphragm pump 3 mbar
Mains voltages 100-240V, 1ph,
50-60Hz
Main fuses (at the main switch) 10 A
Dimensions 255 x 355 x 355 mm
Ambient conditions
Temperature 0 – 35°C
Humidity 5 – 95%,
non-condensing
Weight 14.5kg
* At ambient temperature 20°C.
2 Connections
Never expose any parts of the body to the vacuum.
The turbomolecular pump must be firmly attached using
bolts.
If the pump is not affixed adequately, parts from inside the
pump may come loose and fly around should the pump
seize.
Never operate the pump system without having flanged it to
the vacuum chamber first in the course of a benchtop test,
for example.
Operate the pump system only off the mains voltage which
has been specified on the nameplate.

Description
GA501591_002_A2 – 08/2010 – © Oerlikon Leybold Vacuum 5
After a mains power failure in the pump may run up automatically as soon as
the mains power returns.
If the pump has been pumping hazardous gases before, then introduce
suitable precautions before opening the intake or exhaust connections.
If necessary, wear protection gloves, breathing protection or protective
clothing and work under a fume hood.
The turbomolecular pump system is not suited for pumping of dusty,
aggressive or corrosive media.
The turbomolecular pump system must only be uninstalled when not in
operation.
Accelerating forces must be avoided or reduced to such a level that the rotor
unit is not excited by vibrations. In critical applications consult our application
department first.
The pump must be only opened by persons duly authorised by Leybold.
2.1 Conforming Utilisation
Vacuum pump systems as described in the catalogue are not suited for
pumping of:
oxygen at levels exceeding the concentration present in the
atmosphere,
hazardous gases,
easily flammable, explosive or toxic gases,
extremely aggressive or corrosive media
liquids
or solid materials.
The operator is responsible for assessing the danger potential of the process
media which as to their composition differ from the normal atmosphere.

3 Operation
3.1 Electrical Connection
Warning
Risk of suffering injury!
During all connection work deenergise mains power lines
(lockout/tag out). The electrical connections must only be
prepared by a trained electrician as, for example, in accordance
with EN 50110-1.
The mains connection of the pump system can be found on the right at the
bottom on the rear of the pump system. There also the main switch can be
found. The main fuse is located behind a cover panel on the main switch.
Main switch
Mains connection
Connection
for the high
vacuum
gauge
Fuses for the
turbomolecular pump,
forepump and control
unit

Description
GA501591_002_A2 – 08/2010 – © Oerlikon Leybold Vacuum 7
3.2 Switching the System on
The TURBOLAB 80 is switched on through the main switch on the rear of
the housing.
After switching on, the display will indicate: Self-Test Passed
After a few seconds the display changes to the welcome screen
By pressing the pushbutton within 15 seconds, the default settings of the
system can be changed, see Chapter 3.3.
3.3 Changing the Default Settings of the System
Welcome screen
Depending on which high vacuum gauge and which forevacuum gauge has
been connected to the TURBOLAB 80 the software must be set up
accordingly. This is done through the default settings.
In order to enter the mode of the default settings, the pushbutton must
be pressed within 10 seconds.
Then it is possible to select one after the other the type of high vacuum
gauge, the type of forevacuum gauge and the language.
After the 10 seconds have elapsed without operating the pushbutton the
display automatically changes to the operating display mode. In order to
redisplay the welcome screen and enter the mode of the default settings, the
pump system must be switched off and on again at its main switch.
Display/change the
default settings

Description
GA501591_002_A2 – 08/2010 – © Oerlikon Leybold Vacuum 8
3.3.1 Selecting the HV Gauge Head
After having pressed the pushbutton in the welcome screen (see
Chapter 3.3) the display will indicate the enabled settings for the high
vacuum measurement.
Example:
Depending on how the TURBOLAB 80 has been equipped on delivery, the
following will be indicated:
For systems without a gauge head HV-MESSUNG OHNE
For systems with an ITR90: HV-MESSUNG ITR90
For systems with a PTR90: HV-MESSUNG PTR90
In order to change the setting, the ENTER pushbutton must be pressed.
Thereafter the bottom area with the information on the high vacuum gauge
(OHNE / ITR90 / PTR90) is displayed with a black background.
Through the pushbuttons and a different setting can be selected.
Possible settings:
xOHNE (no high vacuum gauge)
xITR90
xPTR90
By pressing the ENTER pushbutton once more the setting is enabled.
HV – MESSUNG
OHNE
ENTER pushbutton
Pushbuttons for selecting the possible parameters

Description
GA501591_002_A2 – 08/2010 – © Oerlikon Leybold Vacuum 9
3.3.2 Selecting the Forevacuum Gauge Head
By pressing the pushbutton the display will indicate the enabled settings
for the forevacuum measurement.
Example:
Depending on how the TURBOLAB 80 has been equipped on delivery, the
following will be indicated:
For systems without a gauge head: VV-MESSUNG OHNE
For systems with a TTR91: VV-MESSUNG TTR91
In order to change the setting, the ENTER pushbutton must be pressed.
Thereafter the bottom area with the information on the forevacuum gauge
(OHNE / TTR91) is displayed with a black background.
Through the pushbuttons and a different setting can be selected.
Possible settings:
xOHNE (no forevacuum gauge head)
xTTR91
By pressing the ENTER pushbutton once more the setting is enabled.
3.3.3 Selecting the Language
When pressing the pushbutton once more the display will indicate the
currently enabled language.
Example:
Upon delivery of the TURBOLAB 80 the language has been set to German.
In order to change the setting, the ENTER pushbutton must be pressed.
Thereafter the bottom area with the information on the language (Deutsch /
Italiano / Francaise / English) is displayed with a black background.
Through the pushbuttons and a different setting can be selected.
VV – MESSUNG
OHNE
SPRACHE
Deutsch

Description
GA501591_002_A2 – 08/2010 – © Oerlikon Leybold Vacuum 10
Possible settings:
xDeutsch
xItaliano
xFrancaise
xEnglish
By pressing the ENTER pushbutton once more the setting is enabled.
After pressing the pushbutton once more, the welcome screen will be
displayed again which after approximately 10 seconds automatically
changes to the operating mode display.
3.4 Commissioning the System
After the display has switched over to the operating mode display the
following is indicated.
If no high vacuum or forevacuum gauge has been selected, then nothing will
be displayed in the corresponding field.
Through the pushbutton next to “ON” the pump system can be started.
The display will then change to “OFF“ and the operating status will indicate
“VV EIN”.
As soon as the factory default cut-in pressure of 20 mbar has been attained,
the turbomolecular pump will start automatically and the operating display
will change to “TMP HOCHLAUF”.
After run-up has completed, the operating status “HV ERREICHT” will be
displayed.
Optional driving
High vacuum
p
ressure
Forevacuum pump
Display change through the
pushbuttons and
Current drawn and
frequency of the
turbomolecular pump
Operating
status