Oerlikon Leybold Vacuum TRIVAC NT16 User manual

TRIVAC NT16 / NT25
Rotary Vane Vacuum Pump
Operating Instructions 130002780_002_A0
®
In the case of an attached explosion hazard rated motor (category 3 i/o), the information
provided in the enclosed Operating Instructions for the electric motor must be observed!
Part Numbers
140 220
140 221
140 222
140 223
140 224
140 225
140 226
140 227
140 231
140 232
140 233
140 234
140 235
140 241
140 330
140 331
140 332
140 333
140 334
140 335
140 336
140 337
140 338
140 339
140 340
140 341
140 346
140 347

Important Safety Information 5
ATEX Directive and Flammable Gases Dilution 8
TRIVAC B ATEX - Categories 3 i and 3 i/o Vacuum Pump 9
1 Description 13
1.1 Design and Function 15
1.1.1 Operating Agents 17
1.2 Supplied Equipment 18
1.3 Technical Data 19
1.3.1 Motor Related Data 20
1.4 Ordering Data 22
1.5 Accessories 23
2 Transportation and Storage 24
3 Installation 25
3.1 Placement 25
3.2 Conforming Utilization 26
3.3 Connection to the System 28
3.4 Electrical Connections 30
4 Operation 32
4.1 ATEX Directive and Flammable Gases Dilution 32
4.2 Media Compatibility 33
4.3 Start Up 33
4.4 Operation 34
4.4.1 Pumping of Non-Condensable Gases and Vapours 34
4.4.2 Pumping of Condensable Gases and Vapours 34
4.4.3 Operating Temperature 35
4.5 Shutdown 35
Contents
2
Page

5 Maintenance 37
5.1 Oerlikon Leybold Vacuum Service 37
5.2 Maintenance Plan (Recommendation) 38
5.3 Checking the Oil 39
5.4 Oil Change 40
5.5 Cleaning the Inlet Screen 42
5.6 Checking the Coupling 42
5.7 Replacing the Outer Shaft Seal 42
6 Troubleshooting 45
7 Wearing and Original Parts 47
8 Waste Disposal 48
EC Declaration of Conformity 49
EC Manufacturer’s Declaration 50
Contents
3
130002780_002_A0 - 12/2008 - © Oerlikon Leybold Vacuum
Page

4130002780_002_A0 - 12/2008 - © Oerlikon Leybold Vacuum
Safety Information
We strongly recommend that you read and observe the information provi-
ded in these Operating Instructions before installing and commissioning
the TRIVAC NT with care so as to ensure optimum operation of the pump
right from the start.
The icon indicates procedures in these Operating Instructions that must
be strictly observed to prevent hazards to persons.
High electrical voltages! When touching parts at high-voltage there is the
risk of suffering severe injury by an electric shock!
Covers which are marked with this icon must only be removed by trained
electricians after having reliably disconnected the electric power source.
Indicates procedures that must strictly be observed to prevent damage to,
or destruction of the equipment.
Emphasises additional application information and other useful information
provided within these Operating Instructions.
The Oerlikon Leybold Vacuum TRIVAC NT 16 has been designed for safe
and efficient operation when used properly and in accordance with these
Operating Instructions. It is the responsibility of the user to carefully read
and strictly observe all safety precautions described in this section and
throughout the Operating Instructions. The TRIVAC must only be ope-
rated in the proper condition and under the conditions described in
the Operating Instructions.It must be operated and maintained by
trained personnel only. Consult local, state, and national agencies regard-
ing specific requirements and regulations. Address any further safety, ope-
ration and/or maintenance questions to your nearest Oerlikon Leybold
Vacuum office.
Figures
The references to diagrams, e.g. (4/1/2) consist of Chapter No., consecutive
Fig. No. within the chapter and the Item No. in the figurein that order.
We reserve the right to modify the design and the specified data. The illustra-
tions arenot binding.
Caution
Warning
Note
Warning

5
130002780_002_A0 - 12/2008 - © Oerlikon Leybold Vacuum
Important Safety Information
Failure to observe the following precautions could result in serious
personal injury!
■Before beginning with any maintenance or service work on the TRIVAC
NT, disconnect the pump from all power supplies (lockout/tagout).
■Do not operate the pump with any of the covers removed. Serious injury
may result.
■If exhaust gases must be collected or contained, do not allow the exhaust
line to become pressurised.
■Make sure that the gas flow from the exhaust port is not blocked or
restricted in any way.
■Only those pumps which are equipped with an Atex certified motor are
suited for operation in explosion hazard areas.
■The standard version of the TRIVAC NT is not suited for operation in
explosion hazard areas.
■Before starting up for the first time, the motor circuit must be equipped
with a suitable protective motor switch. Please take note of the informati-
on in these Operating Instructions and on the electric motor (wiring dia-
gram).
■When pumping toxic, chemical, radioactive and corrosive gases as well as
pyrophorous substances, the operating company is under the obligation
to comply with the national and international safety regulations and guide-
lines. Regarding the suitability of the TRIVAC NT pumps for special appli-
cations in which such gases, respectively substances shall be pumped,
Oerlikon Leybold Vacuum should be consulted first.
■The TRIVAC NT pumps including the accessories are fundamentally not
suited for pumping of combustible and explosive gases or vapours.
Mixtures of substances may, regarding the fire and explosion risk be criti-
cal or uncritical. The operating company is under the commitment to ana-
lyse this and rate the hazardpotential accordingly so as to therefrom deri-
ve the necessarysafety measures which must be introduced.
■If ignitable or pyrophorous substances are present in the equipment you
must ensure that:
■no air can enter into the equipment,
■the system is leak-tight,
■by means of purging with inertgas (for example through a nitrogen
purge) all ignitable gases or vapours which enter into the pump through
the pump’s inlet are diluted and/or by means of an inert gas purge the
concentration of ignitable gases in the pump and in the exhaust gas line is
reduced to less than a quarter of the lower explosion limit published for
the respective gases.
Safety Information
Warning

6130002780_002_A0 - 12/2008 - © Oerlikon Leybold Vacuum
■Avoid exposing any part of the human body to the vacuum.
■Never operate the TRIVAC NT without a connected intake line or without
fitting a blank flange.
■The location at which the TRIVAC NT (including its accessories) is ope-
rated should be such that angles over 10° from the vertical are avoided.
■The location of the TRIVAC NT should be such that all controls are easily
accessible.
■Under certain ambient conditions the TRIVAC NT may attain a tempera-
ture of over 70 °C (158 °F). There then exists the danger of receiving
burns. Note the symbols on the pump pointing to the hazards, and in the
case of a hot pump wear the required protective clothing.
■All work on the pumps “at operating state temperature“ shall only be done
while wearing protective gloves. Always let the pump cool down before
any servicing and maintenance work.
■The noise level produced by the TRIVAC NT is 54 dB(A) max.
Suitable hearing protection measures must be introduced.
■Before pumping oxygen (or other highly reactive gases) at concentrations
exceeding the concentration in the atmosphere(> 21 % for oxygen) it will
be necessary to use a special pump. Such a pump will have to be modi-
fied and de-greased, and an inert special lubricant (like PFPE) must be
used.
■Before operating the TRIVAC NT check first compatibility with the pumped
media so as to avoid hazardous conditions during operation right from the
start. Observe all applicable safety standards and regulations.
■After a mains power failurethe pump will run up automatically again. This
also applies in the case of an emergency shutdown. In order to prevent
the pump from running up automatically again, the pump must be inte-
grated within a control arrangement such that it can only be switched on
manually again after the mains power has returned.
■When operating the pumps at gas throughput, it is urgently recommen-
ded to connect an exhaust filter or use a suitable exhaust line. Here, the
exhaust line must slope down and away from the pump.
■When moving the TRIVAC NT always use the allowed means. A lifting eye
is provided as standardon the pump.
■The pump when filled with oil must only be moved in its vertical position.
Spilled oil involves the risk of falling.
■PFPE:During thermal decomposition at temperatures over 290 °C toxic
and corrosive gases are released. When handling PFPE keep it way from
open fires. Do not smoke in the work area.
■DOT 4:When swallowing the operating agent there is the danger of being
poisoned.
■DOT pumps are not suited for operation in explosion hazard areas or for
pumping explosive substances.
Safety Information
Warning

Failure to observe the following precautions could result in damage to
the pump.
■Do not allow the ingestion of small objects (screws, nuts, washers, pieces
of wire, etc.) through the inlet port. Always use the inlet screen which is
supplied with every pump.
■Do n
no ot tuse the pump for applications that produce abrasive or adhesive
powders or condensable vapours that can leave adhesive or high viscosi-
ty deposits. Please contact our Sales or Service offices to select a suit-
able separator. Also please contact our Sales or Service when planning to
pump vapours other than water vapour.
■This pump is suited for pumping water vapour within the specified water
vapour tolerance limits.
■Avoid vapours that can condense into liquids upon compression inside
the pump, if these substances exceed the vapour tolerance of the pump.
■Before pumping vapours, the TRIVAC NT should have attained its opera-
ting temperature. The pump will have attained its operating temperature
about 30 minutes after starting the pump. During this time the pump
should be separated from the process, by a valve in the intake line, for
example.
■In the case of wet processes we recommend the installation of liquid
separators upstream and downstream of the pump as well as the use of
the gas ballast.
■The exhaust line should be laid so that it slopes down and away from the
pump so as to prevent condensate from backstreaming into the pump.
■The entry of particles and fluids must be avoided under all circumstances.
■Reactive or aggressive substances in the pump chamber may impair the
operating oil or modify it. In addition, such substances may be incompa-
tible with the materials of the pump (Viton, grey cast iron, aluminium,
steel, resins, glass etc.).
■Corrosion, deposits and cracking of oil within the pump are not allowed.
■Normal amounts of humidity within the range of the pump’s vapour tole-
rance will not significantly affect pump performance (when the gas ballast
is active).
■In the case of custom pumps (with part numbers deviating from those
stated in the EC Declaration of Conformity) please note the information
provided in the supplementary sheets.
■If mineral oil, PFPE and DOT come into contact they will emulsify. That’s
why the pumps must only be run with the type of lubricant specified for
the pump.
■Please note the change as to the ATEX temperature class in the case of
PFPE pumps. Suitability is restricted to T3 (gases and vapours with an
ignition temperature of over 200 °C).
Safety Information
7
130002780_002_A0 - 12/2008 - © Oerlikon Leybold Vacuum
Caution

ATEX DIRECTIVE AND FLAMMABLE GASES DILUTION
The TRIVAC NT 16 and 25 Atex Category 3 pumps are designed according
to the requirements of Directive 94/9/EEC Group II, Category 3.
Depending on the respective catalogue number, these pumps are suited for
use under Atex category 3 conditions .
Never use a pump certified for Category 3 internal in an external potentially
explosive atmosphere, as the pump is not designed with respect to potential
ignition sources outside.
In the case of a potential external explosive atmosphere, use only pumps
certified for the ignition category 3 inside and outside.
During normal operation there is no potential source of ignition inside and
outside the pump but, according to the 94/9/EC directive, a rare malfunction
may occur with potential sources of ignition.
In normal operation, even if the pump is designed for flammable gases, the
operation procedure must ensure that the gases are not within their explosion
limits.
When flammable gases are pumped, the following safety measures must be
enforced:
■Prevent any atmospheric air from entering into the pump.
■Use an inert gas to dilute the flammable gas being pumped; the concen-
tration of flammable gas must not exceed 25% to 30% of the lower
explosion limit.
ATEX
8130002780_002_A0 - 12/2008 - © Oerlikon Leybold Vacuum

TRIVAC B ATEX - Categories 3 i and 3 i/o Vacuum Pump
Operating Instructions for Operation in Explosion Hazard Areas
The vacuum pumps from the line TRIVAC B Category 3 have been designed
and manufactured especially for the purpose of fulfilling the requirements of
Equipment Group II, Category 3 of the “ATEX Directive” (Directive 94/9/EG)
for conforming utilisation of equipment and protection systems in explosion
hazard areas”.
Classification and Marking of the Pump
In the case of the standard TRIVAC B the inside, i.e. the process gas side of
the pump fulfils the basic safety requirements of the EU Directive 94/9/EG.
The pump is supplied with an electric motor which is not ATEX certified and
has for this reason been marked as follows:
II (i) 3G IIC T4 (50 Hz / 60 Hz) X
This pump is not suited for being installed in explosion hazard areas.
Pumps where the inside and the outside of the pump fulfil the basic safety
requirements of the Directive, are supplied with an ATEX certified motor and
have been marked as follows:
II (i) 3G IIC T4 (50 Hz / 60 Hz) X
II (o) 3G IIC T3 (50 Hz / 60 Hz) X
Please note the change as to the ATEX temperature class in the case of
PFPE pumps. Suitability is restricted to T3 (gases and vapours with an
ignition temperature of over 200 °C).
Explanation of the Symbols
II Equipment Group II applies to all equipment for use in areas which can
be endangered by an explosive atmosphere except in underground
mining operations and their related above ground systems which can
be endangered by mine gas and/or combustible dust.
(i)/(o) Specifies the category/conditions according to which the inside (i) (i.e.
sections of the equipment in contact with the process gas flow) and
the outside (o) of the equipment are classified provided these differ.
3Category 3 comprises equipment which is designed such that it can
be operated in agreement with the characteristic quantities (operating
parameters) specified by the manufacturer and which ensure a normal
level of protection. Equipment belonging to this category is intended
for use in areas where it needs not to be expected that an explosive
atmosphere occurs due to gases, vapours and mists but, in case such
an atmosphere should occur in spite of this then according to all pro-
bability only rarely and briefly. Equipment belonging to this category
ensures during normal operation the required degree of safety.
ATEX
9
130002780_002_A0 - 12/2008 - © Oerlikon Leybold Vacuum
Note the ATEX temperature
class!

GFor areas with an explosive atmosphere caused by gases, vapours or
mists in the air.
The pump is not suited for utilisation in dusty areas.
IIA, IIB or
IIC Explosion Groups: these are subdivisions for equipment belonging to
Group II which is employed in connection with some protection types.
This subdivision is based on the concept of the maximum permitted
gap and the minimum ignition current of the explosive mixture. Refer to
Annex A of the European Standard EN 50014. (EN 50014 electrical
apparatus for potentially explosive atmospheres — General require-
ments.
Equipment marked with IIB is suited for applications which require
equipment with the marking IIA. Correspondingly equipment marked
with IIC is suited for applications which require equipment belonging to
Exploding Group IIA or IIB.
T3, T4 Temperature class: classification of operating means depending on
their maximum surface temperature, in agreement with the following
table:
Temperature class Maximum surface
temperature (°C)
T1 450
T2 300
T3 200
T4 135
T5 100
T6 85
Pumps belonging to temperature class T4 (with 50 Hz electric motors)
must only be operated with gases or vapours which exhibit an ignition
temperature of over 135° C.
Pumps belonging to temperature class T3 (with 60 Hz electric motors)
must only be operated with gases or vapours which exhibit an ignition
temperature of over 200° C.
The temperature class and the actual maximum surface temperature
of the equipment includes a safety margin with respect to the minimum
ignition temperature of the potentially explosive atmosphere as deman-
ded by EN 13463-1.
50 Hz
60 Hz Frequency of the electric motor – at a higher frequency the pump will
run faster and produce a higher surface temperature.
TaPermissible ambient temperature for operating the pump
12 °C < Ta < 40 °C.
XSpecial operating conditions need to be complied with! The special
conditions and notes provided in the Operating Instructions apply.
ATEX
10 130002780_002_A0 - 12/2008 - © Oerlikon Leybold Vacuum