Pfeiffer Vacuum Adixen A3H Series User manual

Operating instructions
Operating instructions
Original
Original
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A3H Series
Multistage Roots dry pump
EN
EN

G 03874 - Edition 04 - August 12
1/2
Multistage Roots dry pump
APPLICATIONS:
• H version : for harsh processes.
AVANTAGES:
Reduced volume and foot-print – Low operating cost –
High performance (pumping speed and ultimate pressure) –
Excellent behavior in harsh environments – Easy integration –
Advanced monitoring functions (Stand-by position to reduce N2
consumption, power failure protection).
SPECIAL FEATURES:
Multi-stage Roots technology – Water-cooled multi-voltage motors –
adixen Network compatible.
Dear Customer,
you have just purchased
an adixen dry pump.
We thank you and are
proud to include you in
our customers.
This product has benefited
from adixen Vacuum
Product’s many years
of experience in
“semi-conductor” processes
and dry pumping.
For optimum
performance and to
obtain full satisfaction
from this equipment,
we recommend that you
study this manual before
any intervention on your
pump, in particular, the
chapter on installation
and start up.
The pumps must not be operated in an area with risk of explosion.
Consult the nearest support service to study a solution.
This product is designed to gererate vacuum by pumping on gases, but no
liquids neither solids. It is dedicated for running in industrial environments.
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Multistage Roots dry pump
G 03874 - Edition 04 - August 12
Copyright/Intellectual property:
The use of adixen products are subject to copyright and
intellectual property rights in force in any jurisdiction. All rights
reserved, including copying this document in whole or any
part without prior written authorization from adixen Vacuum
Products.
Specifications, pictures and informations are subject to change
without notice by adixen Vacuum Products.
This product complies with the requirements of European Directives,
listed in the Declaration of Conformity available in section G 100.
adixen Vacuum Products - A3H Series Operating instructions

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MANUAL REFERENCE:114515
EDITION:06 - AUGUST 2012
Contents
Operating instructions – A3H Series
English original version
Chapter A INTRODUCTION
A 010 - Dry pump operational principle
A 020 - A3H Series dry pump range
A 030 - M4 monitoring system
A 040 - Technical characteristics
A 050 - Accessories
Chapter B START UP
B 000 - Safety instructions
B 001 - Hook-up requirements
B 010 - Unpacking / Handling / Storage
B 020 - Positioning the pump in the pumping installation
B 025 - Filling the machine oil housings
B 030 - Connection to the cooling circuit
B 040 - Inert gas purge connection (N2 connection)
B 050 - Electrical connection
B 051 - Checking the direction of rotation at initial pump start-up
B 060 - Connection to the pumping circuit
B 070 - J14 Remote control plug connection
B 100 - Emergency stop plug connection
B 110 - RS 232 or RS 485 link wiring
Chapter C OPERATION
C 000 - Safety recommendations for harsh processes
C 010 - Operating modes
C 020 - M4 monitoring system parameters
C 040 - Operating mode with HHR
C 041 - Start-up of the M4 monitoring system
C 042 - M4 monitoring system function table
C 043 - Use of the M4 monitoring system for pumping operation
C 044 - Saving and remote loading of pump configuration (with HHR)
C 045 - M4 monitoring setting for transport
C 050 - Water flowrate on A803H model
C 060 - Use of the «power failure protection»
C 070 - Use of the Inlet isolation valve (accessory)
C 080 - Use the bellows heater
C 090 - Use of the serial link (M5 monitoring).
Chapter D MAINTENANCE
D 000 - Safety instruction related to maintenance
D 010 - First level of maintenance
D 030 - Diagnosis and troubleshooting
D 400 - Pump or Roots does not start
D 500 - The pump is running and then is showing a warning or fault message
D 600 - The pump is running but the performances are not correct
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Contents
Operating instructions – A3H Series
G 03875- Edition 06- August 12
MANUAL REFERENCE:114515
EDITION:06 - AUGUST 2012
English original version
Chapter E MAINTENANCE INSTRUCTIONS
E 010 - Exchange standard repair
E 011 - Safety instructions for pump relocation
E 012 - Draining of the water cooling circuit
E 013 - Saving and loading of the pump configuration
E 014 - Disconnecting the pump from the installation
E 015 - Conditioning the pump for shipping
E 020 - Increase of the maintenance parameters
Chapter F MAINTENANCE COMPONENTS
F 000 - Spare parts - Instructions of use
F 010 - Delivered accessories (spare parts)
Chapter G APPENDIX
G 100 - Declaration of conformity
G 110 - A3H Series electrical schematic
G 200 - Declaration of contamination
Indicates an imminently hazardous situation that, if not avoided, will
result in death or severe injury (extreme situations).
Indicates a potentially hazardous situation which, if not avoided, could
result in death or severe injury.
Indicates a potentially hazardous situation which, if not avoided, could
result in property damage.
Indicates a potentially hazardous situation which, if not avoided, could
result in moderate or minor injury. It may also be used to alert against
unsafe practices.
adixen Vacuum Products - A3H Series Operating instructions

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Labelling
Operating instructions – A3H Series
Indicates an imminently hazardous situation that, if not avoided, will
result in death or severe injury (extreme situations).
Indicates a potentially hazardous situation which, if not avoided, could
result in death or severe injury.
Indicates a potentially hazardous situation which, if not avoided, could
result in property damage.
Indicates a potentially hazardous situation which, if not avoided, could
result in moderate or minor injury. It may also be used to alert against
unsafe practices.
Before switching on the product, study the operating manual and make sure you follow the safety
instructions . You can recognise these by the ‘Caution’, ‘Warning’ and ‘Danger’ symbols.
Good practice tips and manufacturer’s recommendations are in a blue box.
The performance and operational safety of this product are guaranteed provided it is used normally in the
operating conditions defined in this manual.
It is the customer’s task to:
– train operators to use the product if they do not speak the language the manual is written in,
– ensure operators know the safe practices to apply when using the product,
– keep this operating instruction manual and all ather documents complete and accessible to personnel at
all times,
– make protective equipment available for the operator,
– assign responsibilities, specific duties according to the qualification level: only skilled and trained
operator can work on the product for installation, first start up and maintenance authorized by the
manufacturer,
– ensure that the following points are observed and monitored:
• compliance with the applicable standards and directives of the country in which the product is being
operated,
• safety regulations governing the handling of hazardous substances,
• safety accidents-prevention regulations,
• product is used only as intended.
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Labelling
Operating instructions – A3H Series
G 04795 - Edition 01 - July 12
Symbols Symbols / Marking Description
Caution: possible risk, read the operator
instructions
Warning: electrical shock hazard
Compulsory: wear gloves
Compulsory: used a breathing mask
Compulsory: wear protective glasses
Earth connection
Power White indicator light: pump is powered
Running Green indicator light: pump is running
Warning Yellow indicator light: in case of alert
Alarm Red indicator light: in case of fault
HHR Hand held remote connection
WATER IN Cooling circuit connection
PRESSURE MAX
101 PSI (7 bars) Cooling circuit maximum pressure
WATER OUT Output water connection
NITROGEN Inert gas purge connection
EXHAUST Pump exhaust connection
Manufacturer label
(example)
adixen Vacuum Products
F - 74009 Annecy
N° Type
200
Volt
Electrical schematic diagram reference:
kA
10
10
10
10
60Hz50Hz60Hz50Hz
Full-Load
current
Ampere
Ampere
rating
of largest
motor
Short circuit
interrrupting
capacity
230/240
400/415
460/480
THREE PHASES
Ed.
▲
▲
APXXXXXX
S9113-5
A803H 12
27 27 15.6 15.6
25 25 15.8 15.6
20 20 9.1 8.1
20 20 9.1 8.1
adixen Vacuum Products - A3H Series Operating instructions

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Labelling
Operating instructions – A3H Series
Pump labels
Located on the covers of the pump, this label warns the user against
possible risk of injury due to any hand contact with hot surfaces.
It states that protective gloves should be used before performing any
intervention.
HOT SURFACE
Contact with pump bodies may cause burn.
Switch off and wait until pumps cooled
before servicing.
WARNING
Located on the upper cover, this label informs the user, that moving
parts present inside the pump could cause personal injury, like
crushing or cutting. The user must keep all body parts away from
moving parts.
MOVING PARTS PRESENT
Moving parts can crush and cut.
Keep hands or feet away from moving parts.
WARNING
Located on the upper cover, this label indicates that due to its heavy
weight, the product should not be handled manually, but always
through appropriate handling devices.
WARNING
HEAVY OBJET
Can cause muscle strain or back injury.
Use lifting aids and proper lifting techniques
when removing or replacing.
Located on the upper cover, this label warns
the user against pumped process gas that could
be dangerous and toxic and could cause severe
injuries or death. It specifies that any preventive
maintenance operation can only be performed
by trained personnel.
WARNING
FLAMMABLE, CORROSIVE AND TOXIC
CHEMICALS LOCATED WITHIN THE ENCLOSURE
Exposure may result in severe injury or death.
Preventive maintenance must be done by trained
personnel only.
Located on the upper covers, this label indicates that some of the
internal parts are energized and could cause electrical shocks in case
of contact. It advizes to disconnect the pump before any intervention
or to properly lock-out and tag-out the equipment breaker before
any intervention on the pump.
WARNING
HAZARDOUS VOLTAGE
Switch off the pump and
disconnect the main power cable
before opening the power box cover.
WARNING
Leakage current may be greater than 3.5 mA
Earth connection is essential before
connecting supply.
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Labelling
Operating instructions – A3H Series
G 04795 - Edition 01 - July 12
WARNING
HEAVYOBJET
Cancause muscle strain or back injury.
Uselifting aids and proper lifting techniques
whenremoving or replacing.
WARNING
FLAMMABLE,CORROSIVE ANDTOXIC
CHEMICALSLOCATED WITHIN THE ENCLOSURE
Exposuremay result insevere injury or death.
Preventivemaintenance mustbe doneby trained
personnelonly.
HOT SURFACE
Contactwith pump bodies may cause bu
Switchoff and wait until pumps cool
beforeservicing.
WARNING
HOT SURFACE
Contactwith pumpbodies maycause burn.
Switchoffandwait until pumps cooled
beforeservicing.
WARNING
MOVING PARTSPRESENT
Movingpartscancrushandcut.
Keephandsorfeet awayfrommovingparts.
WARNING
WARNING
HAZARDOUS VOLTAGE
Switchoffthepumpand
disconnectthemainpowercable
beforeopeningthepowerboxcover.
WARNING
Leakagecurrentmaybegreaterthan3.5mA
Earthconnectionisessentialbefore
connectingsupply.
WARNING
HAZARDOUSVOLTAGE
Switchoff thepump and
disconnectthemain power cable
beforeopening the power box cover.
WARNING
Leakagecurrent may be greater than 3.5 mA
Earthconnection is essential before
connectingsupply.
WARNING
HAZARDOUS VOLTAGE
Switch off the pump and
disconnect the main power cable
before opening the power box cover.
WARNING
Leakage current may be greater than 3.5 mA
Earth connection is essential before
connecting supply.
HOT SURFACE
Contact with pump bodies may cause burn.
Switch off and wait until pumps cooled
before servicing.
WARNING
WARNING
HEAVY OBJET
Can cause muscle strain or back injury.
Use lifting aids and proper lifting techniques
when removing or replacing.
WARNING
FLAMMABLE, CORROSIVE AND TOXIC
CHEMICALS LOCATED WITHIN THE ENCLOSURE
Exposure may result in severe injury or death.
Preventive maintenance must be done by trained
personnel only.
MOVING PARTS PRESENT
Moving parts can crush and cut.
Keep hands or feet away from moving parts.
WARNING
HOT SURFACE
Contactwith pumpbodies maycause burn.
Switchoffandwait until pumps cooled
beforeservicing.
WARNING
MOVING PARTSPRESENT
Movingparts cancrush and cut.
Keephandsorfeet awayfrom moving parts.
WARNING
Pump labels
location
adixen Vacuum Products - A3H Series Operating instructions

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Introduction
Operating instructions – A3H Series
A
A 010 Dry pump operational principle
A 020 A3H Series dry pump range
A 030 M4 monitoring system
A 040 Technical characteristics
A 050 Accessories
adixen Vacuum Products - A3H Series Operating instructions

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A 10
Dry pump operational principle
Designed to
minimize potentiel
residues
The equipment is designed to minimize potential residue deposits:
by limiting the internal volumes that contain gas,
by injecting N2 purge on each pump stage to dilute the process
gas,
by regulating the pump temperature and adjusting it to each
process in order to limit gas condensation.
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Multi-stage Roots
principle
The Dry pump consists of 5 Roots type stages.
The two rotors rotate without touching each other.
The three stages on the low pressure side are called “LP stages” and
the two stages on the high pressure side are called “HP stages”.
LP 1 LP 2 LP 3 HP 4 HP 5
Inlet
Exhaust tube
Water
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A 10
Dry pump operational principle
G 03877 - Edition 04 - July 12
Tightness with
environment
The pump is fitted with ball bearings lubricated with fluorinated
grease.
An overpressure zone is created around the bearing by injecting a
neutral gas. The pressurization and the seals prevent pumped gases
from migrating towards the bearings.
Neutral gas purging for the bearings is imperative for
corrosive processes.
The bearings are lubricated by oil splashing.
The oil sump is sealed from stage HP5by a trap and a deflector.
The vacuum tightness is ensured by the motor design.
This system provides total safety regarding leaks outside the pump
and requires no maintenance.
The pump is fitted with an antisuckback valve in the exhaust tube,
that prevents the exhaust gases being sucked back (specific versions
are delivered without antisuckback valve, refer to ordering guide).
Tightness at low
pressure side
Tightness at motor side
(shaft passage)
Tightness at high
pressure side
Tightness at shutdown
The pump in
a pumping
installation
Process
chamber
INLET
PRESSURE
ATMOSPHERIC
PRESSURE
High
pumping
A3H pump
HIGH
VACUUM
ROUGH
VACUUM
ATMOSPHERE
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A 20
A3H Series dry pump range
A3H series is a range of dry pumps dedicated to the harshest
applications of the semi-conductor industry.
The range includes 4 compact pumping systems, integrated into
covered frame including FB203 roughing pump, roots blower
(except for A203H model) and monitoring :
A203H
A803H
A1503H
A1803H.
Main key features of A3H range are robustness, high inlet flows
capability, and optimized thermal management.
Thermal management models : three versions are available.
STD version: STanDard version for most of the applications (all
models).
EHT version: Extended High Temperature (A1503H and A1803H).
This configuration is recommended for all applications requiring the
pump and gas temperature to be as high as possible to avoid any
by-product condensation inside the pump.
Please contact the manufacturer for process recommendations.
ELT version: Extended Low Temperature (A803H, A1503H and
A1803H)
This configuration is recommended for all applications requiring the
pump and gas temperature to be as low as possible to avoid any by-
product deposition inside the pump.
Please contact the manufacturer for process recommendations.
Pumps STD EHT ELT
A203H yes no no
A803H yes no yes
A1503H yes yes yes
A1803H yes yes yes
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Model’s description
A803H
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A 20
A3H Series dry pump range
G 03878 - Edition 04 - August 12
Large volume version : two models are available*.
- A203H large volume model
- A1803H large volume model.
These versions are used for specific applications requiring the
pumping of a chamber volume of 1m3to 50m3.
Available on A203H and A1803H models, this version features
additional frequency converter on the dry pump.
*other versions are available: please contact the manufacturer for more information.
Each pump model is also equipped with the latest innovative
solutions to withstand the harshest environment.
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A 20
A3H Series dry pump range
Interfaces
Hand-held remote
control
Emergency stop button
Exhaust
Mains switch
Remote control connector
Configuration switch
Coding wheel
Hand-held remote
control connector
RS 232/485 connector
RS 485 connector
Mains
power supply
Facilities
(water + gas)
Electrical interface
panel
J14
S1
S2
J4
J6
J7
Inlet
Front Panel
Rear panel
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A 20
A3H Series dry pump range
G 03878 - Edition 04 - August 12
Internal equipment
of the pumps
The dry pumps include a cooling circuit and an inert gas purge
circuit.
Water outlet
Exhaust
Water inlet
Water
flowmeter
M4
A203
Inlet
Water
valve
Anti-suckback valve
Silencer
Roots
TP
TC
A803H Principle schematic
TLP, THP : Temperature sensor of pump (alert, alarm and setpoint)
Tc : Temperature sensor of motor (alarm)
- - - - - : for ELT version only.
Cooling circuits
A203H Principle schematic
Water inlet
Water outlet
Exhaust
Water valve
Water
flowmeter
M4
FB203
Inlet
THP
Anti-suckback valve
Silencer
TLP
TC
adixen Vacuum Products - A3H Series Operating instructions

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A 20
A3H Series dry pump range
Exhaust
FB203
Inlet
Anti-suckback valve Silencer
Roots
Standby
valve
Stop
valve
Pressure
regulator
Manometer
Mass
flowmeter
Calibrated
jets
Anti-suckback
valves
Pressure
sensor
N2 Inlet
M4
HP HP LP LP LP
N2purge circuit
Principle schematic
Water inlet
Water outlet
Exhaust
Water flowmeter
Water
valve
FB203
Inlet
Silencer
Anti-suckback valve
Frequency converter
Roots 1803
THP
TC1
TC2
Frequency
converter
TLP
TLP, THP : Temperature sensor of pump (alert, alarm and setpoint)
Tc : Temperature sensor of motor (alarm)
- - - - - : for ELT version only.
Cooling circuits (con’t)
A1503H - A1803H Principle
schematic
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A 30
M4 monitoring system
Principle Each A3H Series pump includes an intelligent monitoring system.
Description Electrical cabinet
It is located at the rear of the
machine.
It is linked with main power
supply, Dry pump/Roots motors
and electronic cabinet.
Electronic cabinet
It ensures the pump automatic operation and controls all sensors
and valves.
It is linked to the display panel and emergency stop button.
It allows to exchange data with the hand-held remote and ensures
the interface with the supervision network.
M4 monitoring can be interfaced with the main production
equipment.
Hand-held remote
It ensures Man-Machine
interface.
It can be used either from the
front or the rear of the pump
and allows the access at all
operation parameters.
Power box
Electrical
cabinet
Hand-held
remote
Electronic
cabinet
Red indicator light ”fault”
Yellow indicator light ”warning”
Green indicator light ”running”
Emergency stop
HHR (Hand Held Remote)
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A 30
M4 monitoring system
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M4 monitoring
characteristics
Main functions Motor protection.
Power failure protection.
N2purge monitoring.
Pump(s) temperature monitoring and control.
Thermostatic control of the pump (temperature and water flow)
Exhaust pressure monitoring.
Maintenance time control.
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Supervision Network
Remote control connector
OEM interface
Mains
Emergency
stop output
Roots motor
FB203 motor
Actuators
(valves)
Sensors
Electronic
cabinet
HHR Alternative connection
HHR
Alternative connection
Electrical
cabinet
Microprocessor controlled.
Parameters and messages are displayed on the hand-held remote
control.
Memorization of the last ten warnings and hazards.
RS 232 - RS 485 - Network links.
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A 40
Technical characteristics
Characteristics Units A203H A203H
Large Volume A803H A1503H A1803H A1803H
Large
Peak pumping speed (50/60 Hz)
m3/h 130 / 160 - / 160 600 / 700 1100 / 1200 1650 / 1700 - / 1200
cfm 75 / 95 - / 95 350 / 412 647 / 706 970 / 1000 - / 706
l/mn 2167 / 2667 - / 2667 10000 / 1667 18333 / 20000 27500 / 28333 - / 20000
Typical ultimate pressure
(no N2 purge) (50/60 Hz)
hPa 6 · 10-2 / 2 · 10-2 - / 2 · 10-2 1 · 10-3 / 5 · 10-4 1 · 10-3 / 5 · 10-4 - / 5 · 10-4
torr 4.5 · 10-2 / 1.5 · 10-2 - / 1.5 · 10-2 7.5 · 10-4 / 3.7 · 10-4 7.5 · 10-4 / 3.7 · 10-4 - / 3.7 · 10-4
Typical ultimate pressure
(50 slm N2 purge) (50/60 Hz)
hPa 5 · 10-1 / 1 · 10-1 - / 1x· 10-1 1 · 10-2 / 5 · 10-3 - / 5 · 10-3
torr 3.7 · 10-1 / 7.5 · 10-2 - / 7.5· 10-2 7.5 · 10-3 / 3.7 · 10-3 - / 3.7 · 10-3
Maximum ultimate pressure
(no purge) 50/60 Hz
hPa 9 · 10-2 / 5 · 10-2 - / 5 · 10-2 3 · 10-3 / 9 · 10-4 - / 9 · 10-4
torr 6 · 10-2 / 3.7 · 10-2 - / 3.7 · 10-2 2.2 · 10-3 / 6.7 · 10-4 - / 6.7 · 10-4
Maximum ultimate pressure
(50 slm purge) 50/60 Hz
hPa 7 · 10-1 / 2 · 10-1 - / 2 · 10-1 2 · 10-2 / 9 · 10-3 - / 9 · 10-3
torr 5.2 · 10-1 / 1.5 · 10-1 - / 1.5 · 10-1 1.5 · 10-2 / 6.7 · 10-3 - / 6.7 · 10-4
Maximum continuous inlet flow slm 150 150 100 100 70 100*
Power supply (1) V 200/230 V - 380/460 V - 3 phases - 50/60 Hz
Power consumption at ultimate
pressure
(50/60 Hz)
kW 1.8 / 2 - / 2 2.2 / 2.4 3.2 / 3.4 2.6 / 2.8 - / 2.6
Power consumption at max. inlet
flow kW 3.5 3.5 4.5 5.5 6.5 7
Full load current at 200 V / 230 V
A
See B01
Full load current at 380 V / 460 V See B01
Maximum exhaust overpressure
hPa 1200
900
torr
Typical cooling water flow
l/mn 2 to 4 2.5 to 5
gal/mn 0.52 to 1.05 0.66 to 1.32
N2 purge flow SLM 20 to 120
Gear box fluid capacity : Dry
pump l
0.35
Gear box fluid capacity : Roots - - 0.7 1.55 1.55 1.55
Inlet flange ISO-K
DN50 DN50 DN100 DN100 DN100/DN160
Exhaust flange ISO-KF DN 40
Dimension (l x w x h)
mm See drawings on pages 2, 3, 4 and 5
inch See drawings on pages 2, 3, 4 and 5
Weight
kg 265 265 385 545
lbs 584 584 848 1200
Maximum sound level (2) dB (A) < 65 < 65 < 68 < 69
Maximum volume m31501 1 50
(1) According to CE regulations, A3H Series can withstand a supply voltage variation of ± 10 %.
(2) Measured at 1 m length and 1.6 m height according to ISO 9614-2 standard.
* Requires reduced Roots rotational speed
adixen Vacuum Products - A3H Series Operating instructions