Pfeiffer Vacuum A3P Series User manual

Operating instructions
Operating instructions
Translated from original version
Translated from original version
A3P SERIES
Dry pumps for medium duty applications
EN
EN

GB 02862 - Edition 04 - April 12
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A3-P Series dry pumps
Welcome
Applications
P version : for light and medium process.
Feature
Compact design.
Low noise level.
Low vibration level.
Robust and established technology.
High pumping speed (equivalent to pump and blower), in a compact
design.
Advanced monitoring functions.
Benefits
Easy to integrate.
Clean room compatibility.
Highest reliability.
Low operating cost.
Failure of circuit protection.
Special feature
Standby purge (option).
Standby power / high speed option.
Semi S2-0706 standard compatible (option).
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Dear Customer,
You have just purchased an
Adixen dry pump. We thank
you and are proud to include
you as one of our customers.
This product has benefited
from adixen Vacuum
Products’s many years of
experience in semiconductor
processes and dry pumping.
For optimum performance
and to obtain full satisfaction
from this equipment, we
recommend that you study
this operating manual before
any intervention on your
pump, in particular, the
chapter on installation and
start up.
adixen Vacuum Products - Operating instructions - A3P Series

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A3-P Series dry pumps
GB 02862 - Edition 04 - April 12
Copyright/Intellectual property:
The use of adixen products are subject to copyright and
intellectual property rights in force in any jurisdiction.
All rights reserved, including copying this document in whole
or any part without prior written authorization from adixen
Vacuum Products.
Specifications and information are subject to change without
notice by from adixen Vacuum Products.
This product complies with the requirements of European Directives,
listed in the Declaration of Conformity contained in G 100 of this
operating instructions
adixen Vacuum Products - Operating instructions - A3P Series

GB 02863 - Edition 07 - Oct 13
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MANUAL P/N: 112241
EDITION : 07 - November 2013 General contents
Operating instructions - A3P Series
English original version
Chapter A INTRODUCTION
A 10 Operating principle
A 20 Description
A 30 Monitoring system
A 40 Technical characteristics
A 50 Accessories
A 60 Options
Chapter B START UP
B 00 Safety instructions
B 01 A3P Series - Hook-up requirements
B 10 Unpacking / Handling / Storage
B 20 Positioning the pump in the pumping installation
B 30 Connection to the cooling circuit
B 40 Inert gas purge connection (N2connection)
B 50 Electrical connection
B 51 Checking the direction of rotation at initial pump start-up (for A603P
pump only)
B 60 Connection to the pumping circuit
B 70 Remote control plug connection
B 80 Safety plug connection
B 90 User plug connection
B 100 EMO plug connection (on A603P / A1003P pump models)
B 110 RS 232 or RS 485 link wiring
B 120 Removable handle (accessory) installation
Chapter C OPERATION
C 00 Safety recommendations for harsh processes
C 10 Operating modes
C 20 Monitoring system parameters
C 25 Safety management
C 40 Operating mode with hand held display module (accessory)
C 41 Start up of the monitoring system
C 42 Monitoring system function table
C 43 Starting mode definition «Hand held display module»
C 44 Saving and loading of pump configuration
C 45 Monitoring system setting for transport
C 70 Use of the inlet isolation valve (accessory)
C 90 Use of the serial link
Chapter D TROUBLESHOOTING
D 00 Safety instruction related to maintenance
D 10 First level of maintenance
D 20 Fault message number table
D 30 Diagnosis and troubleshooting
Chapter E MAINTENANCE INSTRUCTIONS
E 10 Standard repair exchange
E 11 Preliminary precautions
E 12 Draining of the water cooling circuit
E 14 Disconnecting the pump from the installation
E 15 Shipping procedure
E 20 Increase the maintenence parameters
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General contents
Operating instructions - A3P Series
GB 02863 - Edition 07 - Oct 13
MANUAL P/N: 112241
EDITION : 07 - November 2013
English original version
Chapter F MAINTENANCE COMPONENTS
F 00 Spare parts - Instruction of use
F 10 Spare part list
Chapter G ANNEXES
G 100 Declaration of coformity
G 101 Semi certificate
G 110 A103 - Electrical schematic
G 120 A603 - Electrical schematic
G 130 A1003 - Electrical schematic
G 170 Electronic cabinet
G 200 Service
Indicates a potentially hazardous situation which, if not avoided, could
result in moderate or minor injury. It may also be used to alert against
unsafe practices.
Indicates a potentially hazardous situation which, if not avoided, could
result in death or severe injury.
Indicates an imminently hazardous situation that, if not avoided, will result
in death or severe injury (extreme situations).
Indicates a potentially hazardous situation which, if not avoided, could
result in property damage.
adixen Vacuum Products - Operating instructions - A3P Series

GB 02864 - Edition 02 - June 08
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Introduction
Operating Manual - A3P Series
Detailed contents
A
A 10 Operating principle
A 20 Description
A 30 Monitoring system
A 40 Technical characteristics
A 50 Accessories
A 60 Options
adixen Vacuum Products - Operating instructions - A3P Series

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A 10
Operating principle
Designed to minimize
by-product deposition
The equipment is designed to minimize potential by-product
deposition:
By limiting the internal volumes containing gas.
By injecting N2purge on each pump stage to dilute the process
gas.
By regulating the pump temperature to limit gas condensation.
By integrating the silencer inside the pump body to reduce by-
product deposition.
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Multi-stage roots
principle
A3-P Range pump functional block consists of 6 Roots type pumping
stages.
The two rotors rotate without touching each other.
%XHAUSTSTAGE 4RANSFERSTAGE 4RANSFERSTAGE 4RANSFERSTAGE
%XHAUST
4RANSFERSTAGE )NLETSTAGE
  
)NLET
Tightness with
environment
The pump is fitted with ball bearings lubricated with fluorinated
grease.
An overpressure zone is created around the bearing by injecting a
neutral gas.
The pressurization and the seals prevent pumped gases and powders
from migrating towards the bearings.
Neutral gas purging of the bearings is imperative.
Tightness at low pressure
side
Tightness at high pressure
side
The bearings are lubricated by oil splashing.
The tightness is achieved with a deflector and a seal.
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A 10
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Operating principle
Tightness at motor side
(center hump)
The vacuum tightness is ensured by the motor design (hermetically
sealed).
This system provides total safety regarding leaks outside the pump and
requires no maintenance.
Tightness at shutdown The pump is fitted with an antisuckback valve in the pump exhaust pipe,
preventing the exhaust being sucked back.
The pump in a
pumping installation
!02ANGE
2OUGH
VACUUM
!TMOSPHERIC
PRESSURE
0ROCESS
CHAMBER
(IGH
VACUUM
)NLET
PRESSURE
2OUGHINGVACUUM
PUMPING
(IGHVACUUM
PUMPING
%XHAUST
adixen Vacuum Products - Operating instructions - A3P Series

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A 20
Description
Description The A3-P Range is composed of the following pumping systems:
A103P pump,
A603P, A1003P pumping group, composed of an A103P functional
block combined with a Roots.
These pumping systems are fully integrated in a compact and enclosed
frame which includes:
The control panel located on the front panel.
The facilities panel located on the rear panel (except inlet port
located on the top for A603P, A1003P pumps).
The electrical interface panel located on the rear panel.
The pumping systems include an intelligent monitoring system.
A hand held display module can be connected to the front or rear
panel to display and program the pump parameters.
A remote control connector (dry contacts / 50 pins plug) located on
the electrical interface panel allows pump control and communication
with the process tool.
A RS 232/485 connector located on the electrical interface panel
allows pump control and communication with the process tool by
means of the serial link protocol.
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Interfaces
.PRESSUREREGULATOR
#ONTROLPANEL
&RONTPANEL
%MERGENCYSTOP
/./&&MAINSWITCH
,IGHTINDICATORS
(ANDHELDDISPLAY
MODULECONNECTOR
&ACILITIESPANEL
%LECTRICALINTERFACE
2EARPANEL
)NLETPORT
-AINPOWER
%XHAUSTPORT
7ATER/54
-ASSPIN
7ATER).
%NCLOSURESENSOR
2EMOTECONTROL
CONNECTOR
5SERCONNECTOR
.).
%NCLOSUREEXHAUST
PORT
23CONNECTOR
23
CONNECTOR
(ANDHELDDISPLAY
MODULECONNECTOR
A103P pump
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GB 02866 - Edition 03 - April 12
Description
A603P / A1003P pump
#ONTROLPANEL
&RONTPANEL
%MERGENCYSTOP
/./&&MAINSWITCH
,IGHTINDICATORS
(ANDHELDDISPLAY
MODULECONNECTOR
&ACILITIESPANEL
%LECTRICALINTERFACE
2EARPANEL
2EMOTECONTROL
CONNECTOR
5SERCONNECTOR
)NLETPORT
)SOLATINGVALVE
CONNECTOR
-AINPOWER
IFHARDWIRE
%XHAUSTPORT .).
7ATER/54
%NCLOSUREEXHAUST
PORT
7ATER).
%-/CONNECTOR
23CONNECTOR
23
CONNECTOR
(ANDHELDDISPLAY
MODULECONNECTOR
%NCLOSURESENSOR
-AINPOWER
IFPLUG
-ASSPIN
.PRESSUREREGULATOR
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Description
Internal equipment of
the pumps
The A3-P Range pumping systems are designed for medium processes,
so they are equipped with:
Nitrogen injection and water cooling circuit optimized to avoid
deposition and condensation,
Temperature regulation device.
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A103P cooling circuit
(principle schematic)
7ATERINLET
)3 43 4343 43 %3
-OTOR
-ONITORING %LECTRICALBOX

!NTISUCKBACKVALVE
7ATEROUTLET
%XHAUST
)NLET
&UNCTIONALBLOCK


1 : Water flow switch (warning)
2 : Water solenoid valve
3 : Pump temperature sensor (warning and hazard)
4 : Motor temperature switch (warning and hazard)
IS : Inlet stage
TS : Transfer stage
ES : Exhaust stage
A603P/A1003P cooling
circuit
(principle schematic)
7ATERINLET
)NLET
)3 43 4343 43 %3
-ONITORING
%LECTRICALBOX

!NTISUCKBACKVALVE
7ATEROUTLET
%XHAUST
&UNCTIONALBLOCK
2OOTS
-OTOR



1 : Water flow switch (warning)
2 : Water solenoid valve
3 : Pump temperature sensor (warning and hazard)
4 : Motor temperature switch (warning and hazard)
5 : Roots temperature switch (warning and hazard)
IS : Inlet stage
TS : Transfer stage
ES : Exhaust stage
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GB 02866 - Edition 03 - April 12
Description
N2purge circuit
(principle schematic)
)NLET
)3 43 4343 43 %3
-ONITORING %LECTRICALBOX

!NTISUCKBACKVALVE
%XHAUST
&UNCTIONALBLOCK
)NERTSGAS


      

 -OTOR
6 : Pressure regulator
7 : N2flow switch (hazard) (Semi configuration)
8 : N2valve
9 : Flow sensor (warning and hazard)
10 : Inert gas purge nozzles
11 : Pressure sensor (warning and hazard)
12 : Pressure switch (hazard) (Semi configuration)
IS : Inlet stage
TS : Transfer stage
ES : Exhaust stage
adixen Vacuum Products - Operating instructions - A3P Series

GB 02867 - Edition 02 - November 07
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A 30
Monitoring system
Description Each A3-P Range pump includes an intelligent monitoring system.
23CONNECTORS
2EMOTECONTROLCONNECTOR
-AINS
%LECTRICAL%LECTRONICCABINET
LIGHTINDICATORS
(ANDHELDDISPLAYMODULECONNECTOR
-OTOR
(ANDHELDDISPLAYMODULECONNECTOR
!CTUATORS 3ENSORS #ONVERTER
VALVES
Electrical cabinet The electrical cabinet is located at the top of the machine.
It is linked with the main power supply, pump motor and electronic
cabinet.
Electronic cabinet The electronic cabinet is located at the top of the machine.
It ensures the pump automatic operation and controls all sensors.
It is linked to the light indicators.
It allows to exchange data with the hand held display module (accessory)
and ensures interface with the Adixen supervisor network.
Monitoring can be interfaced with the main production equipments.
'REENLIGHT
9ELLOWLIGHT
2EDLIGHT
Hand held display module
accessory
The hand held display module accessory can be connected either at the
front or at the rear side of the pump.
It ensures a friendly access to the pump operating settings as well as the
display of pump status during operation.
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GB 02867 - Edition 02 - November 07
Monitoring system
Monitoring system
characteristics
Microprocessor controlled.
Parameters and messages are displayed on the hand-held display
module accessory.
Saving of the last ten warnings and hazards.
RS 232 / 485 - (Network links).
Note : the monitoring system can be interfaced with the process tool via the remote
control connector or RS 232 / 485 connectors.
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Main functions Pump temperature monitoring and control.
Exhaust pressure monitoring.
N2flow monitoring.
Maintenance time control.
Hardwire safety sensor control.
Power consumption.
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adixen Vacuum Products - Operating instructions - A3P Series

GB 02868 - Edition 06 - Oct 13
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A 40
Technical characteristics
Characteristics Units A103P A603P A1003P
Peak Pumping speed
(50/60Hz) m3/h cfm
l/mn
120/120
70/70
2000/2000
480/600
282/350
8000/10000
900/900
530/530
15000/15000
Typical ultimate pressure
(without N2purge) (50/60 Hz) hPa mtorr 6.5 10-3/6.5 10-3
5/5 5 10-4/3 10-4 4.10-1/2 10-1 3 10-4/3 10-4 2 10-1/2 10-1
Typical ultimate pressure
(with 20 slm N2purge) (50/60 Hz) hPa mtorr 2.6 10-2/2.6 10-2
20/20 2 10-3/1 10-3 1.5 /7.5 10-1 1 10-3/1 10-3 7.5 10-1/7.5 10-1
Max. continuous inlet flow slm 50 25
Supply voltage (1)(4)
Low voltage
High voltage
V200/230V - 3 phases - 50/60Hz
380/440V - 3 phases - 50/60Hz
Power consumption at ultimate
pressure (without purge) kW 1 1.3 to 1.6
Noise level (2) dbA < 58 < 65
N2Flowrate range slm 15 to 60
Ambient temperature °C 5 to 40
Water flow l/h 100 mini
Water temperature °C 10 to 25
Gear box fluid capacity (3)
oil type : A 113 cm3 cc 100 100 (A103P) +
700 (Roots)
Weight lbs
Kg 275.6 125 595.2 270
Inlet flange ISO-K DN50 DN100
Exhaust flange ISO-
KF DN25
Secondary exhaust port mm Ø50
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Technical characteristics
(1) According to CE regulations, A3-P Range pumps can withstand a transient supply voltage variation of ±10%.
(2) The acoustic pressure is measured on a pump whose temperature has been stabilized. The pump is on a table one meter
from the ground. There are 5 microphones (4 arround the pump, 1 above) which are placed one meter from the ground
and one meter from the pump.
(3) Oil charge is filled at factory. Do not modify the oil level. A 113 Material safety data sheet is available on request.
(4) For Semi hardwire option, the Short Circuit Current Rate (SCCR) of the pump is rated of 5kA.
Characteristics Units A103P A603P A1003P
Environmental conditions:
Use of the product
Altitude
Ambient operating temperature
Maximum relative humidity
Transient overvoltage
Pollution degree
indoor use
up to 2000m
5 to 40 °C (41 to 104 °F)
80 % for temp. up to 31°C (87 °F)
decreasing linearly to 50 % at 40 °C (104 °F)
category II
rate 2
adixen Vacuum Products - Operating instructions - A3P Series

GB 02868 - Edition 06 - Oct 13
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Technical characteristics
Dimensions and
interfacing
A103P pump
&RONTVIEW ,EFTVIEW2IGHTVIEW
"OTTOMVIEW
adixen Vacuum Products - Operating instructions - A3P Series

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GB 02868 - Edition 06 - Oct 13
Technical characteristics
Dimensions and
interfacing
A603P / A1003P pumps
&RONTVIEW
,EFTVIEW
2IGHTVIEW
"OTTOMVIEW
adixen Vacuum Products - Operating instructions - A3P Series

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Technical characteristics
Seismic tie down
dimensions
&RONTVIEW
"OTTOMVIEW
" #
!
A103P A603P / A1003P
Amm 325 683
inch 12.79 26.89
Bmm 233.5 233.5
inch 9.19 9.19
Cmm 385 385
inch 15.16 15.16
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GB 02868 - Edition 06 - Oct 13
Technical characteristics
Gravity center and
weight distribution
Top view
Front view
Foot
Foot
Foot
Foot
A103P A603P / A1003P
mm inch mm inch
Gravity center
X145 5.71 153 6.02
Y345 13.58 361 14.21
Z153 6.02 312 12.28
Kg lbs Kg lbs
Weight 125 275.6 270 595.2
Gravity center
147 103.6 89 196.2
241 90.4 87 191.8
317 37.5 418 105.8
320 44.1 46 101.4
adixen Vacuum Products - Operating instructions - A3P Series