Pfeiffer Vacuum ATH 3200 MT User manual

OPERATING INSTRUCTIONS
EN
Translation of the Original
ATH 2800 M/MT - ATH 3200 M/MT
Magnetically levitated turbopump

Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
2/56

Table of contents
1 About this manual 7
1.1 Validity 7
1.1.1 Applicable documents 7
1.1.2 Products concerned 7
1.2 Conventions 7
1.2.1 Pictographs 7
1.2.2 Target group 7
1.2.3 Instructions in the text 7
1.2.4 Labels 8
1.2.5 Abbreviations 9
2 Safety 10
2.1 General safety information 10
2.2 Safety instructions 10
2.3 Safety instructions relating to flammable/pyrophoric materials 12
2.4 Precautions 13
2.5 Intended use 14
2.6 Misuse 14
3 Transportation and Storage 15
3.1 Receipt of the product 15
3.2 Handling the pump 15
3.3 Storage 16
4 Product description 17
4.1 Product identification 17
4.1.1 Scope of delivery 17
4.1.2 Product applications 17
4.2 Human/Machine Interface 18
5 Installation 19
5.1 Equipment installation conditions 19
5.1.1 Installation specifications 19
5.1.2 Securing the equipment and the frame 21
5.2 Positioning the pump 21
5.3 Connecting to the pumping line 23
5.3.1 Pump inlet connection 24
5.3.2 Pump exhaust connection 24
5.4 Connecting the water circuit 25
5.4.1 Procedure for assembling connectors 25
5.4.2 Connecting the pump to the water circuit 26
5.5 Nitrogen circuit connection 26
5.6 Connection of the air inlet solenoid valve 28
5.7 Check that the installation is leak tight 29
5.8 Electrical connection 29
5.8.1 Customer electrical installation protection 30
6 Operation 32
6.1 Preliminary precautions for use 32
6.2 Starting the pump 32
6.2.1 Powering on 32
6.2.2 Pumping start-up 33
6.2.3 Restarting the pump after an emergency equipment stop 33
6.3 Shutting down the pump 34
6.3.1 Pumping shutdown 34
6.3.2 Powering off 35
6.3.3 Prolonged stoppage 35
Table of contents
3/56

6.4 Operation monitoring 35
7 Maintenance 36
7.1 Maintenance safety instructions 36
7.2 Maintenance frequency 37
7.3 On-site maintenance 38
7.4 Exchange procedure by a replacement product 38
7.4.1 Disconnecting the pump from the installation 38
7.4.2 Draining the water circuit 39
7.4.3 Preparing the pump for shipping 39
8 Decommissioning 41
8.1 Shutting down for longer periods 41
8.2 Recommissioning 41
8.3 Disposal 41
9 Service solutions by Pfeiffer Vacuum 42
10 Accessories 44
11 Spare parts 45
12 Technical data and dimensions 46
12.1 General 46
12.2 Technical characteristics 46
12.3 Environmental characteristics 47
12.4 Cooling water characteristics 48
12.5 Nitrogen characteristics 48
12.6 Electrical characteristics 49
12.7 Dimensions and weight 49
UK Declaration of Conformity 53
EC Declaration of Conformity 54
Table of contents
4/56

List of tables
Tbl. 1: Loads exerted on the equipment 21
Tbl. 2: Securing the high vacuum flange (inlet flange) 21
Tbl. 3: Conversion table: Pressure units 46
Tbl. 4: Conversion table: Units for gas throughput 46
Tbl. 5: Environmental characteristics 48
Tbl. 6: Cooling water characteristics 48
Tbl. 7: Nitrogen characteristics 48
Tbl. 8: Electrical characteristics of the pump 49
Tbl. 9: Electrical characteristics of the customer’s network 49
List of tables
5/56

List of figures
Fig. 1: Description of an ATH 2800 MT pump 18
Fig. 2: Description of an ATH 3200 M pump 18
Fig. 3: Mechanical connection of the pump to the equipment 19
Fig. 4: Graph of the loads exerted on the equipment - ATH 2800 M-MT / 3200 M-
MT
20
Fig. 5: Installing the pump horizontally 22
Fig. 6: Installing the pump inlet facing up 23
Fig. 7: Connection to the water-cooling circuit 26
Fig. 8: Purge flow diagram 27
Fig. 9: ATH 2800 M dimensions 49
Fig. 10: ATH 2800 MT dimensions 49
Fig. 11: ATH 3200 M dimensions 50
Fig. 12: ATH 3200 MT dimensions 50
Fig. 13: Dimensions of Purge solenoid valve 51
Fig. 14: Dimensions of Air inlet solenoid valve 51
Fig. 15: Dimensions of water valve 52
List of figures
6/56

1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
These operating instructions are a customer document of Pfeiffer Vacuum. The operating instructions
describe the functions of the named product and provide the most important information for the safe use
of the device. The description is written in accordance with the valid directives. The information in these
operating instructions refers to the product's current development status. The document shall remain
valid provided that the customer does not make any changes to the product.
1.1.1 Applicable documents
Document Part number
Operating instructions for Magpower 129056
Declaration of conformity included with these operating instructions
1.1.2 Products concerned
This document applies to products with the following part numbers:
Part Number Description
U264xxxx
U266xxxx
ATH 2800 M pumps for clean applications
U664xxxx
U666xxxx
ATH 2800 MT pumps for heavy-duty applications
U2DAxxxx
U2C6xxxx
ATH 3200 M pumps for clean applications
U6C6xxxx ATH 3200 MT pumps for heavy-duty applications
1.2 Conventions
1.2.1 Pictographs
Pictographs used in the document indicate useful information.
Note
Tip
1.2.2 Target group
This user manual is intended for all persons in charge of transport, installation, commissioning/decom-
missioning, use, maintenance or storage of the product.
The work described in this document must only be carried out by persons with suitable technical training
(specialized staff) or persons who have undergone Pfeiffer Vacuum training.
1.2.3 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
About this manual
7/56

Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.2.4 Labels
PURGE Purge circuit connection
PUMP EXHAUST Pump exhaust
WATER MAX Pr 7 bar/101 psi Maximum water circuit pressure
WATER Water circuit connection
Functional grounding connection
LOCK
Locking the connector before using the pump. Do not disconnect
before the pump has stopped
Direction of rotation of the pump rotor
85kg 25000rpm; M:35Vrms 834Hz 17,5A
U2662100
AHY1847 ATH2800M
2018
Product rating plate (example)
This label indicates that certain internal components carry an
electric charge and can cause electric shock if touched: be-
fore working on the pump, always either disconnect it, or lock
out/tag out the installation breaker in the appropriate manner.
This label indicates that the product should not be handled
manually due to its weight and that appropriate handling devi-
ces should always be used.
Don’t remove the pump
connector when the pump is
running
This label means that the user must lock the connector before
using the pump. Do not disconnect before the pump has stop-
ped.
DO NOT TOUCH WHEN
THE PUMP IS RUNNING
This label warns users about the risk of crushing or cutting
due to moving parts: keep a safe distance and/or keep your
hands away from the moving parts.
SEE MANUAL BEFORE USE
Any person responsible for installation or operation of the
product must first refer to the operating manual.
The product comes with a sheet of labels including other
language versions. The installer must stick these labels
to the most appropriate and visible place on the pump to
warn the operator about potential hazards:
About this manual
8/56

This label warns users that they risk being injured if their
hands come into contact with a hot surface: protective gloves
must be worn at all times when working on the pump.
Exposure may result in severe injury or death.
Preventive maintenance must be done by trained
personnel only.
This label warns users about pumped process gases that can
be dangerous or toxic and lead to severe injury or death. It
specifies that only trained personnel should perform preven-
tive maintenance operations.
1.2.5 Abbreviations
AMB Active magnetic bearings
EMC Electromagnetic compatibility
Exh. Exhaust
EMS Emergency Machine Stop
HHR Hand Held Remote
IN Inlet flange
LEL Lower Explosive Limit
MPump version without temperature management system (no TMS)
MT Pump version equipped with a temperature management system (TMS)
Magpower Electronic drive unit (box)
OBC Electronic drive unit mounted to an active magnetic bearing turbopump
TMS Temperature Management System
About this manual
9/56

2 Safety
2.1 General safety information
The following 4 risk levels and 1 information level are taken into account in this document.
DANGER
Immediately pending danger
Indicates an immediately pending danger that will result in death or serious injury if not observed.
►Instructions to avoid the danger situation
WARNING
Potential pending danger
Indicates a pending danger that could result in death or serious injury if not observed.
►Instructions to avoid the danger situation
CAUTION
Potential pending danger
Indicates a pending danger that could result in minor injuries if not observed.
►Instructions to avoid the danger situation
NOTICE
Danger of damage to property
Is used to highlight actions that are not associated with personal injury.
►Instructions to avoid damage to property
Notes, tips or examples indicate important information about the product or about this docu-
ment.
2.2 Safety instructions
All safety instructions in this document are based on the results of the risk assessment carried out in
accordance with Machinery Directive 2006/42/EC Annex I and EN ISO 12100 Section 5. Where applica-
ble, all life cycle phases of the product were taken into account.
WARNING
Risk of crushing when the product is slung
Given the heaviness of the product, there is a risk of crushing during handling operations involving
lifting devices. Under no circumstances shall the manufacturer be liable if the following instructions
are not followed:
►Only qualified staff trained in handling heavy objects are authorized to handle the product.
►The lifting devices provided must be used and the procedures set out in this document must be
followed.
Safety
10/56

WARNING
Risk of electric shock due to non-compliant electrical installations
This product uses mains voltage for its power supply. Non-compliant electrical installations or installa-
tions not done to professional standards may endanger the user’s life.
►Only qualified technicians trained in the relevant electrical safety and EMC regulations are au-
thorized to work on the electrical installation.
►This product must not be modified or converted arbitrarily.
►Check that the product is properly connected to the equipment’s or pumping installation’s emer-
gency stop circuit.
WARNING
Danger of electrocution by contact during maintenance or overhaul
There is an electric shock hazard in case of contact with a product powered on and not electrically
isolated.
►Before carrying out any work, set the main switch to O.
►Disconnect the power cable from the mains.
►Secure the installation correctly by tagging and locking (LO/TO) the system to prevent uninten-
tional re-engagement.
WARNING
Risk of serious injury caused by the separation of the pump when the rotor is blocked
If the pump is not secured properly and the rotor suddenly becomes blocked, the turbomolecular
pump will detach from the equipment: the energy released could launch the entire pump or pieces of
the pump across the room. This could cause severe, possibly fatal, injuries as well as serious proper-
ty damage.
►Strictly comply with the installation instructions described in this manual. Pfeiffer Vacuum will be
released from any warranty and liability for non-compliance with installation instructions.
►Only use approved original parts from Pfeiffer Vacuum for connection to the equipment (see ac-
cessories).
WARNING
Risk of poisoning when process gases are present in the atmosphere
The manufacturer has no control over the types of gases used with the pump. Process gases are of-
ten toxic, flammable, corrosive, explosive and/or otherwise reactive. There is a risk of serious or fatal
injury if these gases are allowed to escape freely into the atmosphere.
►Apply the relevant safety instructions in accordance with local regulation. This information is
available from the operator’s safety department.
►Always connect the turbomolecular pump’s exhaust to a backing pump compatible with
process gases: the backing pump’s exhaust is connected to the installation’s dangerous gas ex-
traction system
►Regularly check that there are no leaks where the pump connects to the exhaust pipework.
WARNING
Risk of injury in case of contact with pressurized nitrogen
The product uses pressurized nitrogen as a flushing gas. Non-compliant installations or installations
not done to professional standards may endanger the user’s life.
►Install a manual valve on the circuit at a distance of 3 m from the product, so that the nitrogen
supply can be locked out.
►Observe the recommended supply pressure.
►Always lock out and disconnect the nitrogen circuit before working on the product.
►When carrying out maintenance, secure the installation properly by locating and locking out the
pressurized nitrogen circuit to prevent it from being re-engaged by accident (LO/TO Lock
Out/Tag Out procedure).
►Regularly check the condition of the pipework and supply circuit connections.
Safety
11/56

WARNING
Risk of injury in case of contact with pressurized water
The product uses pressurized water as a cooling fluid. Non-compliant installations or installations not
done to professional standards may endanger the user’s life.
►Install a manual valve on the circuit at a distance of 3 m from the product, so that the water sup-
ply can be locked out.
►Observe the recommended pressure and pressure differences.
►Always lock out and disconnect the water circuit before working on the product.
►When carrying out maintenance, secure the installation properly by locating and locking out the
pressurized water circuit to prevent it from being re-engaged by accident (LO/TO Lock Out/Tag
Out procedure).
►Regularly check the condition of the pipework and supply circuit connections.
WARNING
Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum flange
With the high vacuum flange open, access to sharp-edged parts is possible. A manual rotation of the
rotor increases the danger situation. There is the risk of cuts, up to the separation of body parts (e.g.
fingertips). There is a risk of hair and loose clothing being drawn in. Objects falling in destroy the tur-
bopump during subsequent operation.
►Only remove the original protective covers immediately prior to connecting the high vacuum
flange.
►Do not reach into the high vacuum connection.
►Wear protective gloves during installation.
►Do not start the turbopump with open vacuum connections.
►Always carry out the mechanical installation before electrical connection.
►Prevent access to the high vacuum connection of the turbopump from the operator side (e.g.
open vacuum chamber).
WARNING
Risk of burns in case of contact with hot surfaces
For the operator's safety, the products are designed to avoid thermal risk. Depending on the applica-
tion, the conditions of use generate high temperatures which require extra caution from users (surfa-
ces > 65 °C).
►Pay attention to the marking of hot surfaces indicated by safety labels.
►Wait for the product to fully cool down before working on it.
►Protective gloves must be worn in accordance with standard EN ISO 21420.
2.3 Safety instructions relating to flammable/pyrophoric materials
It is the user and/or integrator who is/are solely responsible for the safety of the pump installation, the
equipment and the gas exhaust extraction system. The user and/or the integrator is responsible for the
application which uses the product.
Pumping pyrophoric or flammable gases may be hazardous. The user and/or integrator must comply
with the safety instructions below and conduct a risk assessment.
DANGER
Danger of death by explosion or fire related to pyrophoric/flammable gases
Semiconductor, photovoltaic panel, flat panel display and industrial processes may use pyrophoric or
flammable gases. When mixed with oxidizing agents, these gases can spontaneously combust (pyro-
phoric gases) or combust when ignited as a result of an unintended chemical reaction (flammable
gases). In the worst case scenario, this could start a fire or set off an explosion causing metal parts to
be ejected and serious injury to nearby persons.
►Conduct a risk assessment to assess the dangers before installing the pump.
►Install safety systems that comply with the requirements of the EN 50495 standard.
Safety
12/56

The risk assessment must take into account the pumped gases, by-products, and all components mak-
ing up the installation. The following situations are hazardous and must be avoided at all cost:
●Flammable or pyrophoric gas concentrations in the flammable range.
●Flammable or pyrophoric gas concentrations above the flammable range (a leak could potentially
cause the concentration to drop down into the flammable range).
●Insufficient dilution.
●An accumulation of reactive solids in the exhaust.
●Exposure of chemically-reduced species or reducing agents to oxidizing agents.
The following general safety recommendations must be applied:
●Ensure leak-tightness throughout system.
●Do not allow oxidizing agents (air, other gases, etc.) to mix with flammable/pyrophoric gases. 1)
●Ensure that the oxidizing agent concentration does not exceed 60% of the maximum permissible
concentration of the oxidizing agent gas (MOC) 2), mainly when the dilution is not sufficiently high
to reach 25% of the LEL.
●Perform a nitrogen gas purge prior to carrying out maintenance on the pumping line (inlet side,
pump and exhaust lines).
●Regularly clean away reactive by-products such as silicon dust from the exhaust line to prevent
clogging and/or explosion.
For further details on the safety instructions relating to flammable and pyrophoric gases, contact our
service center.
Affix labels to the pump to identify the hazards inherent in all the above applications (flammability, ex-
plosion, toxicity, corrosion, etc.) and comply with the SEMI S1 requirements. This information must be
added to the equipment operating instructions intended for end users.
2.4 Precautions
Duty to provide information on potential dangers
The product holder or user is obliged to make all operating personnel aware of dangers
posed by this product.
Every person who is involved in the installation, operation or maintenance of the product
must read, understand and adhere to the safety-related parts of this document.
Infringement of conformity due to modifications to the product
The Declaration of Conformity from the manufacturer is no longer valid if the operator
changes the original product or installs additional equipment.
●Following the installation into a system, the operator is required to check and re-evalu-
ate the conformity of the overall system in the context of the relevant European Direc-
tives, before commissioning that system.
Only qualified personnel trained in safety regulations (EMC, electrical safety, chemical pollution) are au-
thorized to carry out the installation and maintenance described in this manual. Our service centers can
provide the necessary training.
►Secure the pump in strict compliance with the installation requirements.
►Do not expose any part of the human body to the vacuum.
►Follow the safety and accident prevention requirements.
►Regularly check compliance with all precautionary measures.
►Do not remove the blanking plates sealing the inlet and exhaust ports if the product is not con-
nected to the pumping line.
►Do not operate the product unless the inlet and exhaust are connected to a vacuum and exhaust
pumping line.
►Before working on the inlet flange, wait until the rotor is immobilized.
►Keep pipes and cables well away from hot surfaces (> 70°C).
1) Reference NFPA 69-2019, § 8.3.1 chap.8 Deflagration prevention by combustible concentration reduction.
2) Reference NFPA 69-2019, § 7.7.2.5 chap.7 Deflagration prevention by oxydant concentration reduction.
Safety
13/56

2.5 Intended use
●The vacuum pump should only be used to generate a vacuum while pumping gases.
●The turbomolecular pump must be combined with an appropriate backing pump.
●The vacuum pump must be integrated into industrial equipment.
●The pump must operate with a Magpower electronic drive unit.
●The MT Version pump can be used to pump condensable fluids as long as condensation does not
occur in the pump.
When the pump is integrated into industrial equipment, it becomes a pumping component: the
integrator of this component must provide the operator with all safety measures, notably for hot
surface risks.
2.6 Misuse
Misuse of the product will render the warranty and any claims void. Any use, whether intended or not,
that diverges from the uses already mentioned will be treated as non-compliant; this includes but is not
limited to:
●Pumping reactive fluids
●Pumping of corrosive or explosive media
●Pumping liquids
●Pumping of solids
●Pumping dust particles
●Pumping of media with risk of condensables (M version)
●Operation with improper high gas throughput
●Operation with improper high fore-vacuum pressure
●Operation with improper high levels of radiated heat input
●Venting with improper high venting rates
●Using accessories or spare parts not mentioned in these operating instructions
●Using the pump in potentially explosive areas
●Using the vacuum pump to generate pressure
●Operation in areas with ionizing radiation
●Operation in improper high magnetic fields
●Use of the devices in systems in which impact-like stress and vibrations or periodic forces affect
the devices
Safety
14/56

3 Transportation and Storage
3.1 Receipt of the product
Condition of the delivery
●Check that the product has not been damaged during transport.
●If the product is damaged, take the necessary measures with the carrier and notify the
manufacturer.
►Keep the product in its original packaging so it stays as clean as it was when dispatched by us.
Only unpack the product once it has arrived at the location where it will be used.
►Keep the blanking plates in place on the inlet, exhaust and purge ports while the product is not
connected to the pumping line.
Keep the packaging (recyclable materials) in case the product needs to be transported or
stored.
3.2 Handling the pump
WARNING
Risk of crushing when the product is slung
Given the heaviness of the product, there is a risk of crushing during handling operations involving
lifting devices. Under no circumstances shall the manufacturer be liable if the following instructions
are not followed:
►Only qualified staff trained in handling heavy objects are authorized to handle the product.
►The lifting devices provided must be used and the procedures set out in this document must be
followed.
WARNING
Risk of crushing due to product tilting
Even though compliance with EU safety rules is guaranteed, all necessary precautions should be tak-
en when handling and installing the product until the pump has been integrated into the equip-
ment.
►Do not place the pump on an inclined plane.
►Do not push the pump sideways.
►Always secure the pump until it has been integrated into the equipment (mounting holes in the
inlet flange).
Transportation and Storage
15/56

1
2
1. Strap
2. Lifting ring
Handling the pump using a hoist
When handling the pump, a lifting device appropriate for the weight of the product must be used.
The weight and center of gravity vary depending on the model (see chapter “Dimensions”).
1. Use the lifting rings installed on the product or electronic drive unit (where applicable).
2. Use a lifting sling with several arms with a minimum length of 500 mm
3. Secure the pump using lifting rings and hoist it.
4. Always transport the turbomolecular pump in an upright position.
Handle the pump with inlet facing up
When handling the pump “inlet facing up”, an appropriate handling device as well as mounting acces-
sories must be used.
1. Affix the pump to the handling device using the 2 M10 holes at the rear of the pump and hoist it.
2. Always transport the turbomolecular pump in an upright position.
3.3 Storage
Storing a new pump
►Keep the pump wrapped in its protective envelope.
►Always leave the inlet, the exhaust and purge blanking plates in place.
►Store the pump in line with the permitted storage temperatures (see chapter "Environmental con-
ditions").
►Store the pump in a clean, dry and non-contaminated area, for a maximum period of 1 year.
Storage after use
►To store a pump that has been used, (see chapter “Shutting down for longer periods”).
Transportation and Storage
16/56

4 Product description
4.1 Product identification
To correctly identify the product when communicating with our service center, always have the informa-
tion from the product rating plate available (see chapter "Labels").
4.1.1 Scope of delivery
●1 magnetically levitated turbomolecular pump
●1 splinter shield (in the pump inlet flange)
●2 lifting rings installed on the pump
●1 sheet of safety labels
●1 operating instructions
and, depending on the ordering guide, the following components are present:
●1 copper gasket
●1 purge solenoid valve
●1 purge flow reduction device
●1 set of screws and bolts
●1 air inlet solenoid valve
The hand-held remote control (HHR) is not included in the order. To order, see chapter “Ac-
cessories”.
4.1.2 Product applications
The pump manufacturer has developed a range of reliable, high performance magnetically levitated tur-
bopumps with active magnetic bearings (AMB) and compression stages. They are specially adapted for
coating and dry-etching plasma processes, for glass coating as well as for R&D applications. These
pumps are equipped with an deported electronic drive unit.
These pumps are characterized by their resistance to corrosion, robustness, high gas throughput at
high operating pressure and lack of maintenance requirements.
For more detailed information on specific applications, please contact us.
Rotation speed
The magnetically levitated pump rotation speed can be selected and set between a minimum speed and
the nominal speed. This makes it possible to optimize pumping characteristics according to each appli-
cation (for example, high pressure pumping). A distinction is made between the following speeds:
●Selected rotation speed (= Stand-by speed) between minimum speed and the nominal rotation
speed
●Nominal rotation speed set in the factory
M version pump
Standard version is suitable for the most of clean applications. This pump version has no temperature
management system (no TMS).
MT version pump
This MT version is recommended for any application where high temperature for the pump and gases
are demanded in order to minimize the condensation in the pump. This pump version is equipped with a
temperature management system (TMS). The temperature management is controlled via the integrated
electronic drive unit.
Product description
17/56

4.2 Human/Machine Interface
1
3
6
2
5
4
Fig. 1: Description of an ATH 2800 MT pump
1 Splinter shield 4 WATER IN connection
2 Inlet flange (high vacuum) 5 Exhaust flange (PUMP EXHAUST)
3 Neutral gas purge 6 Heater band connector
6
4
5
1
3
2
Fig. 2: Description of an ATH 3200 M pump
1 Splinter shield 4 WATER IN connection
2 Inlet flange (high vacuum) 5 WATER OUT connection
3 Neutral gas purge 6 Exhaust flange (PUMP EXHAUST)
Product description
18/56

5 Installation
The installation of the turbopump and its fastening is of outstanding importance. The rotor of the turbo-
pump revolves at very high speed. In practice it is not possible to exclude the risk of the rotor touching
the stator (e.g. due to the penetration of foreign bodies into the high vacuum connection). The kinetic
energy released acts on the housing and on the anchoring of the turbopump within fractions of a sec-
ond.
Comprehensive tests and calculations conforming to ISO 27892 confirm the safety of the turbopump
both against crashes (destruction of the rotor blades) and against bursting (breakage of the rotor shaft).
The experimental and theoretical results are expressed in safety measures and recommendations for
the correct and safe fastening of the turbopump.
5.1 Equipment installation conditions
WARNING
Risk of serious injury caused by the separation of the pump when the rotor is blocked
If the pump is not secured properly and the rotor suddenly becomes blocked, the turbomolecular
pump will detach from the equipment: the energy released could launch the entire pump or pieces of
the pump across the room. This could cause severe, possibly fatal, injuries as well as serious proper-
ty damage.
►Strictly comply with the installation instructions described in this manual. Pfeiffer Vacuum will be
released from any warranty and liability for non-compliance with installation instructions.
►Only use approved original parts from Pfeiffer Vacuum for connection to the equipment (see ac-
cessories).
The equipment frame on which the pump is installed must be sufficiently rigid to absorb the kinetic ener-
gy if the rotor blocks suddenly. For this, take into account:
●The maximum loads to calculate the attachment devices.
●The inlet flange dimensions.
●The quality and number of screws.
●The type of connection between the pump inlet and the chamber to be pumped.
When the pump is connected according to the manufacturer’s recommendations, in case of overpres-
sure resulting from an incident, the pump enclosure can withstand maximum static pressure of
11 · 103 hPa for 1 minute.
5.1.1 Installation specifications
Turbo
1
2
3
Fig. 3: Mechanical connection of the pump to the equipment
1 Vacuum chamber 3 Frame
2 Equipment Secure anchor point
Installation
19/56

Description of a sudden blocking scenario
The kinetic energy of the rotor has to be absorbed by the installation if the pump blocks suddenly. The
maximum resulting loads have been measured on a test bench by simulating the worst-case turbo
pump blockage with a rotor split in two with the pump rotating at nominal speed. The impact of the rotor
parts creates the following transient loads.
Axial force (A)
The rotor parts can be ejected out of the pump inlet flange and can hit the valve plate or any other part
of the system. If this is placed close to the turbo pump and if it has high stiffness, the impact can create
a high axial force on the installation. Such axial force has not been observed on a standard pendulum
valve, or when there is a free space greater than 100 mm.
Bending moment (B)
The impact of the rotor parts on the housing will create a radial force on the housing. This radial force
will create a bending moment on the system as a function of the distance to the pump.
Torque (C)
The deceleration of the rotor parts creates a torque value on the pump housing, which is transmitted to
the system. The maximum values of the axial force and the bending moment occur at approximately the
same time. A delay of up to several ms has been observed for the maximum torque value.
B
C
A
1
2
60
50
40
30
20
10 100
200
300
400
500
600
700
800
0 0
0 2 4 6 8
Axial force - kN
Torque – Bending moment kN·m
Time ms
C
B
A
Fig. 4: Graph of the loads exerted on the equipment - ATH 2800 M-MT / 3200 M-MT
1 Turbopump 2 Pendulum valve
Characteristics Unit ATH 2800 M/MT ATH 3200 M/MT
Nominal speed min-1 25000 25000
Energy kJ 166 166
Torque (C) Max. kN·m 58 58
Duration ms 3 3
Delay ms 3 3
Bending moment (B) Max. kN·m 40 40
Duration ms 2 2
Delay ms 0 0
1) Maximum axial force occurs when pump inlet is blocked by the rigid parts. There is no load on the
equipment in case of limited stiffness, e.g. with a valve.
Installation
20/56