Pfeiffer Vacuum ATH 3200 MT User manual

OPERATING INSTRUCTIONS
EN
Translation of the Original
ATH 2800 M/MT - ATH 3200 M/MT
Magnetically levitated turbopump

Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
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Table of contents
1 About this manual 7
1.1 Validity 7
1.1.1 Applicable documents 7
1.1.2 Products concerned 7
1.2 Conventions 7
1.2.1 Pictographs 7
1.2.2 Target group 7
1.2.3 Instructions in the text 7
1.2.4 Labels 8
1.2.5 Abbreviations 9
2 Safety 10
2.1 General safety information 10
2.2 Safety instructions 10
2.3 Safety instructions relating to flammable/pyrophoric materials 12
2.4 Precautions 13
2.5 Intended use 14
2.6 Misuse 14
3 Transportation and Storage 15
3.1 Receipt of the product 15
3.2 Handling the pump 15
3.3 Storage 16
4 Product description 17
4.1 Product identification 17
4.1.1 Scope of delivery 17
4.1.2 Product applications 17
4.2 Human/Machine Interface 18
5 Installation 19
5.1 Equipment installation conditions 19
5.1.1 Installation specifications 19
5.1.2 Securing the equipment and the frame 21
5.2 Positioning the pump 21
5.3 Connecting to the pumping line 23
5.3.1 Pump inlet connection 24
5.3.2 Pump exhaust connection 24
5.4 Connecting the water circuit 25
5.4.1 Procedure for assembling connectors 25
5.4.2 Connecting the pump to the water circuit 26
5.5 Nitrogen circuit connection 26
5.6 Connection of the air inlet solenoid valve 28
5.7 Check that the installation is leak tight 29
5.8 Electrical connection 29
5.8.1 Customer electrical installation protection 30
6 Operation 32
6.1 Preliminary precautions for use 32
6.2 Starting the pump 32
6.2.1 Powering on 32
6.2.2 Pumping start-up 33
6.2.3 Restarting the pump after an emergency equipment stop 33
6.3 Shutting down the pump 34
6.3.1 Pumping shutdown 34
6.3.2 Powering off 35
6.3.3 Prolonged stoppage 35
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6.4 Operation monitoring 35
7 Maintenance 36
7.1 Maintenance safety instructions 36
7.2 Maintenance frequency 37
7.3 On-site maintenance 38
7.4 Exchange procedure by a replacement product 38
7.4.1 Disconnecting the pump from the installation 38
7.4.2 Draining the water circuit 39
7.4.3 Preparing the pump for shipping 39
8 Decommissioning 41
8.1 Shutting down for longer periods 41
8.2 Recommissioning 41
8.3 Disposal 41
9 Service solutions by Pfeiffer Vacuum 42
10 Accessories 44
11 Spare parts 45
12 Technical data and dimensions 46
12.1 General 46
12.2 Technical characteristics 46
12.3 Environmental characteristics 47
12.4 Cooling water characteristics 48
12.5 Nitrogen characteristics 48
12.6 Electrical characteristics 49
12.7 Dimensions and weight 49
UK Declaration of Conformity 53
EC Declaration of Conformity 54
Table of contents
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List of tables
Tbl. 1: Loads exerted on the equipment 21
Tbl. 2: Securing the high vacuum flange (inlet flange) 21
Tbl. 3: Conversion table: Pressure units 46
Tbl. 4: Conversion table: Units for gas throughput 46
Tbl. 5: Environmental characteristics 48
Tbl. 6: Cooling water characteristics 48
Tbl. 7: Nitrogen characteristics 48
Tbl. 8: Electrical characteristics of the pump 49
Tbl. 9: Electrical characteristics of the customer’s network 49
List of tables
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List of figures
Fig. 1: Description of an ATH 2800 MT pump 18
Fig. 2: Description of an ATH 3200 M pump 18
Fig. 3: Mechanical connection of the pump to the equipment 19
Fig. 4: Graph of the loads exerted on the equipment - ATH 2800 M-MT / 3200 M-
MT
20
Fig. 5: Installing the pump horizontally 22
Fig. 6: Installing the pump inlet facing up 23
Fig. 7: Connection to the water-cooling circuit 26
Fig. 8: Purge flow diagram 27
Fig. 9: ATH 2800 M dimensions 49
Fig. 10: ATH 2800 MT dimensions 49
Fig. 11: ATH 3200 M dimensions 50
Fig. 12: ATH 3200 MT dimensions 50
Fig. 13: Dimensions of Purge solenoid valve 51
Fig. 14: Dimensions of Air inlet solenoid valve 51
Fig. 15: Dimensions of water valve 52
List of figures
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1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
These operating instructions are a customer document of Pfeiffer Vacuum. The operating instructions
describe the functions of the named product and provide the most important information for the safe use
of the device. The description is written in accordance with the valid directives. The information in these
operating instructions refers to the product's current development status. The document shall remain
valid provided that the customer does not make any changes to the product.
1.1.1 Applicable documents
Document Part number
Operating instructions for Magpower 129056
Declaration of conformity included with these operating instructions
1.1.2 Products concerned
This document applies to products with the following part numbers:
Part Number Description
U264xxxx
U266xxxx
ATH 2800 M pumps for clean applications
U664xxxx
U666xxxx
ATH 2800 MT pumps for heavy-duty applications
U2DAxxxx
U2C6xxxx
ATH 3200 M pumps for clean applications
U6C6xxxx ATH 3200 MT pumps for heavy-duty applications
1.2 Conventions
1.2.1 Pictographs
Pictographs used in the document indicate useful information.
Note
Tip
1.2.2 Target group
This user manual is intended for all persons in charge of transport, installation, commissioning/decom-
missioning, use, maintenance or storage of the product.
The work described in this document must only be carried out by persons with suitable technical training
(specialized staff) or persons who have undergone Pfeiffer Vacuum training.
1.2.3 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
About this manual
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Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.2.4 Labels
PURGE Purge circuit connection
PUMP EXHAUST Pump exhaust
WATER MAX Pr 7 bar/101 psi Maximum water circuit pressure
WATER Water circuit connection
Functional grounding connection
LOCK
Locking the connector before using the pump. Do not disconnect
before the pump has stopped
Direction of rotation of the pump rotor
85kg 25000rpm; M:35Vrms 834Hz 17,5A
U2662100
AHY1847 ATH2800M
2018
Product rating plate (example)
This label indicates that certain internal components carry an
electric charge and can cause electric shock if touched: be-
fore working on the pump, always either disconnect it, or lock
out/tag out the installation breaker in the appropriate manner.
This label indicates that the product should not be handled
manually due to its weight and that appropriate handling devi-
ces should always be used.
Don’t remove the pump
connector when the pump is
running
This label means that the user must lock the connector before
using the pump. Do not disconnect before the pump has stop-
ped.
DO NOT TOUCH WHEN
THE PUMP IS RUNNING
This label warns users about the risk of crushing or cutting
due to moving parts: keep a safe distance and/or keep your
hands away from the moving parts.
SEE MANUAL BEFORE USE
Any person responsible for installation or operation of the
product must first refer to the operating manual.
The product comes with a sheet of labels including other
language versions. The installer must stick these labels
to the most appropriate and visible place on the pump to
warn the operator about potential hazards:
About this manual
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This label warns users that they risk being injured if their
hands come into contact with a hot surface: protective gloves
must be worn at all times when working on the pump.
Exposure may result in severe injury or death.
Preventive maintenance must be done by trained
personnel only.
This label warns users about pumped process gases that can
be dangerous or toxic and lead to severe injury or death. It
specifies that only trained personnel should perform preven-
tive maintenance operations.
1.2.5 Abbreviations
AMB Active magnetic bearings
EMC Electromagnetic compatibility
Exh. Exhaust
EMS Emergency Machine Stop
HHR Hand Held Remote
IN Inlet flange
LEL Lower Explosive Limit
MPump version without temperature management system (no TMS)
MT Pump version equipped with a temperature management system (TMS)
Magpower Electronic drive unit (box)
OBC Electronic drive unit mounted to an active magnetic bearing turbopump
TMS Temperature Management System
About this manual
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2 Safety
2.1 General safety information
The following 4 risk levels and 1 information level are taken into account in this document.
DANGER
Immediately pending danger
Indicates an immediately pending danger that will result in death or serious injury if not observed.
►Instructions to avoid the danger situation
WARNING
Potential pending danger
Indicates a pending danger that could result in death or serious injury if not observed.
►Instructions to avoid the danger situation
CAUTION
Potential pending danger
Indicates a pending danger that could result in minor injuries if not observed.
►Instructions to avoid the danger situation
NOTICE
Danger of damage to property
Is used to highlight actions that are not associated with personal injury.
►Instructions to avoid damage to property
Notes, tips or examples indicate important information about the product or about this docu-
ment.
2.2 Safety instructions
All safety instructions in this document are based on the results of the risk assessment carried out in
accordance with Machinery Directive 2006/42/EC Annex I and EN ISO 12100 Section 5. Where applica-
ble, all life cycle phases of the product were taken into account.
WARNING
Risk of crushing when the product is slung
Given the heaviness of the product, there is a risk of crushing during handling operations involving
lifting devices. Under no circumstances shall the manufacturer be liable if the following instructions
are not followed:
►Only qualified staff trained in handling heavy objects are authorized to handle the product.
►The lifting devices provided must be used and the procedures set out in this document must be
followed.
Safety
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