Pfeiffer Vacuum HiPace 700 Plus User manual

OPERATING INSTRUCTIONS
EN
Translation of the Original
HIPACE 700 PLUS
Turbopump

Dear Customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to
support you by its performance, its perfect operation and without interfering your individual
application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a
comprehensive and complete range of top-quality products and first-class service. With this
expertise, we have acquired a multitude of skills contributing to an efficient and secure
implementation of our product.
Knowing that our product must not interfere with your actual work, we are convinced that our
product offers you the solution that supports you in the effective and trouble-free execution of
your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
2/62

Table of contents
1 About this manual 7
1.1 Validity 7
1.1.1 Related documents 7
1.1.2 Variants 7
1.2 Target group 7
1.3 Conventions 7
1.3.1 Instructions in the text 7
1.3.2 Pictographs 8
1.3.3 Stickers on product 8
1.3.4 Abbreviations 9
1.4 Trademark proof 9
2 Safety 10
2.1 General safety information 10
2.2 Safety instructions 10
2.3 Safety precautions 14
2.4 Limits of use of product 15
2.5 Proper use 15
2.6 Foreseeable improper use 15
2.7 Personnel qualification 16
2.7.1 Ensuring personnel qualification 16
2.7.2 Personnel qualification for maintenance and repair 16
2.7.3 Advanced training with Pfeiffer Vacuum 17
3 Product description 18
3.1 Function 18
3.1.1 Cooling 18
3.1.2 Rotor bearing 18
3.1.3 Drive 18
3.2 Identifying the product 19
3.2.1 Product types 19
3.2.2 Product features 19
3.3 Shipment 19
4 Transportation and Storage 20
4.1 Transport 20
4.2 Storage 20
5 Installation 21
5.1 Preparatory work 21
5.2 Fastening turbopump to bottom part 21
5.3 Connecting the high vacuum side 22
5.3.1 Designing the counter flange 22
5.3.2 Considering earthquake protection 23
5.3.3 Using a splinter shield or protective screen 23
5.3.4 Using the vibration compensator 24
5.3.5 Mounting orientations 24
5.3.6 Attaching ISO-K flange onto ISO-K 24
5.3.7 Attaching ISO-K flange to ISO-F 25
5.3.8 Attaching ISO-F flange to ISO-F 26
5.3.9 Attaching CF flange to CF-F 27
5.4 Connecting the fore-vacuum side 29
5.5 Cooling water connection 30
5.6 Connecting accessories 32
5.7 Connecting the electrical supply 32
5.7.1 Grounding the turbopump 33
Table of contents
3/62

5.7.2 Establishing electric connection 33
6 Operation 35
6.1 Commissioning 35
6.2 Operating modes 36
6.2.1 Operating without operating unit 36
6.2.2 Operation via multi-function connection "remote" 36
6.2.3 Operation via connection "E74" 36
6.2.4 Operation via Pfeiffer Vacuum control unit 36
6.2.5 Operation via field bus 36
6.3 Switching on the turbopump 37
6.4 Operation monitoring 37
6.4.1 Operating mode display via LED 37
6.4.2 Temperature monitoring 38
6.5 Switching off and venting 38
6.5.1 Switching off 38
6.5.2 Venting 38
7 Maintenance 40
7.1 General maintenance information 40
7.2 Maintenance intervals and responsibilities 40
7.3 Replacing operating fluid reservoir 41
7.3.1 Removing operating fluid reservoir 41
7.3.2 Assembling operating fluid reservoir 42
7.4 Replacing electronic drive unit 43
7.4.1 Removing electronic drive unit 44
7.4.2 Installing the electronic drive unit 45
7.4.3 Confirming speed specification 45
8 Decommissioning 46
8.1 Shutting down for longer periods 46
8.2 Recommissioning 46
9 Recycling and disposal 47
9.1 General disposal information 47
9.2 Dispose of turbopumps 47
10 Malfunctions 48
11 Service solutions by Pfeiffer Vacuum 50
12 Spare parts HiPace 700 Plus 52
13 Accessories 53
13.1 Accessory information 53
13.2 Ordering accessories 53
14 Technical data and dimensions 56
14.1 General 56
14.2 Technical data 56
14.3 Substances in contact with the media 58
14.4 Dimensions 58
EC Declaration of Conformity 60
UK Declaration of Conformity 61
Table of contents
4/62

List of tables
Tbl. 1: Abbreviations used in this document 9
Tbl. 2: Permissible ambient conditions 15
Tbl. 3: Product designation of Pfeiffer Vacuum HiPace turbopumps 19
Tbl. 4: Turbopump features 19
Tbl. 5: Requirements for fastening the turbopumps to the bottom part 22
Tbl. 6: Requirements for the dimensioning of the customers high vacuum connec-
tion
23
Tbl. 7: Reduction of the pumping speed when using a splinter shield or protective
screen
23
Tbl. 8: Requirements on the cooling water composition 31
Tbl. 9: Requirements on the cooling water connection 31
Tbl. 10: Pre-set accessory connections to electronic drive unit TC 400 32
Tbl. 11: Factory setting of the electronic drive unit when delivered 35
Tbl. 12: Behavior and meaning of the LEDs on the electronic drive unit 38
Tbl. 13: Factory settings for delayed venting in turbopumps 39
Tbl. 14: Characteristic nominal rotation speeds of the turbopumps 45
Tbl. 15: Troubleshooting turbopumps 49
Tbl. 16: Available spare parts 52
Tbl. 17: HiPace 700 accessories 55
Tbl. 18: Conversion table: Pressure units 56
Tbl. 19: Conversion table: Units for gas throughput 56
Tbl. 20: Technical data for HiPace 700 Plus 58
Tbl. 21: Materials that make contact with the process media 58
List of tables
5/62

List of figures
Fig. 1: Position of the stickers on the product 8
Fig. 2: HiPace 700 Plus design 18
Fig. 3: Example: Safety connections 23
Fig. 4: Recommended alignment when using oil-sealed backing pumps 24
Fig. 5: Flange connection ISO-K to ISO-F, bracket screws 25
Fig. 6: Flange connection ISO-K to ISO-F, hexagon head screw and tapped hole 25
Fig. 7: Flange connection ISO-K to ISO-F, stud screw and tapped hole 26
Fig. 8: Flange connection ISO-K to ISO-F, stud screw and through hole 26
Fig. 9: Flange connection ISO-F, hexagon head screw and tapped hole 27
Fig. 10: Flange connection ISO-F, stud screw and tapped hole 27
Fig. 11: Flange connection ISO-F, stud screw and through hole 27
Fig. 12: Flange connection CF-F, hexagon head screw and through hole 28
Fig. 13: Flange connection CF-F, stud screw and tapped hole 28
Fig. 14: Flange connection CF-F, stud screw and through hole 29
Fig. 15: Example of fore-vacuum connection on HiPace 700 30
Fig. 16: Connecting the cooling water supply 31
Fig. 17: Example: Connecting the grounding cable 33
Fig. 18: Connecting electronic drive unit to power supply pack 34
Fig. 19: Removing operating fluid reservoir 42
Fig. 20: Assembling operating fluid reservoir 43
Fig. 21: Removal of electronic drive unit TC 400 44
Fig. 22: Installation of electronic drive unit TC 400 45
Fig. 23: Spare parts HiPace 700 Plus 52
Fig. 24: HiPace 700 Plus | TC 400 | DN 160 ISO-K 58
Fig. 25: HiPace 700 Plus | TC 400 | DN 160 CF-F 59
Fig. 26: HiPace 700 Plus | TC 400 | DN 160 ISO-F 59
List of figures
6/62

1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de-
scribe the functions of the named product and provide the most important information for the safe use of
the device. The description is written in accordance with the valid directives. The information in this op-
erating instructions refers to the product's current development status. The document shall remain valid
provided that the customer does not make any changes to the product.
1.1.1 Related documents
Document Number
Operating instructions, Electronic drive unit TC 400. standard PT 0203 BN
Operating instructions, Electronic drive unit TC 400 PB, profibus PT 0244 BN
Operating instructions, Electronic drive unit TC 400 E74, according to
Semi E74
PT 0302 BN
Operating instructions, Electronic drive unit TC 400 DN, DeviceNet PT 0352 BN
Operating instructions, Electronic drive unit TC 400 EC, EtherCat PT 0452 BN
Declaration of conformity A component of these in-
structions
Current documents are available from the Pfeiffer Vacuum Download Center.
1.1.2 Variants
●HiPace 700 Plus, DN 160 ISO-K, TC 400
●HiPace 700 Plus, DN 160 CF-F, TC 400
●HiPace 700 Plus, DN 160 ISO-F, TC 400
1.2 Target group
These operating instructions are aimed at all persons performing the following activities on the product:
●Transportation
●Setup (Installation)
●Usage and operation
●Decommissioning
●Maintenance and cleaning
●Storage or disposal
The work described in this document is only permitted to be performed by persons with the appropriate
technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-
uum.
1.3 Conventions
1.3.1 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
About this manual
7/62

Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.3.2 Pictographs
Pictographs used in the document indicate useful information.
Note
Tip
1.3.3 Stickers on product
This section describes all the stickers on the product along with their meanings.
Oil
S/N
Mod.
HiPace 700 Plus
PM PXX XXX
- - - - - - - -
P/N
n, f
Mass
PM XXX XXX -T
49200 1/min, 820 Hz
1X.X kg
D-35614 Asslar
C US
TÜV Rheinland
Berliner Str. 43
UL / CSA 61010-1
Type 12
IP54
Made in Germany 2023/03
Rating plate (example)
The rating plate of the turbopump is located on the lower part
of the vacuum pump.
Rating plate of the electronic drive unit
The rating plate of the electronic drive unit is located on its out-
side next to the LEDs
Operating instructions note
This sticker indicates that this operating instructions must be
read before performing any tasks.
Protection class
This sticker describes protection class 1 for the product. The
positioning indicates the position for the ground connection.
warranty seal
Warranty seal
The product is sealed ex factory. Damaging or removing a war-
ranty seal results in loss of the warranty.
3
4
2
1
Fig. 1: Position of the stickers on the product
1 Operating instructions note 3 Information regarding ground connection
2 Warranty seal 4 Rating plate of the turbopump
About this manual
8/62

1.3.4 Abbreviations
Abbreviation Meaning in this document
CF Flange: Metal-sealed connector in accordance with ISO 3669
dDiameter value (in mm)
DC Direct current
DN Nominal diameter as size description
fRotation speed value of a vacuum pump (frequency, in rpm or Hz)
HHigh compression
HPU Handheld Programming Unit. Aid for control and monitoring of pump parameters
HV High vacuum flange, high vacuum side
ISO Flange: Connection in accordance with ISO 1609 and ISO 2861
LED Light emitting diode
PE Protective earth (earthed conductor)
[P:xxx] Electronic drive unit control parameters. Printed in bold as a three-digit number in
square brackets. Frequently displayed in conjunction with a short description.
Example: [P:312] software version
remote 26-pole D-Sub connecting socket on the turbopump electronic drive unit
WAF Width Across Flats
TTemperature (in °C)
TC Turbopump electronic drive unit (turbo controller)
TPS Voltage supply (turbo power supply)
VV Fore-vacuum flange, fore-vacuum connection
Tbl. 1: Abbreviations used in this document
1.4 Trademark proof
●DeviceNet® is a registered trademark of Open DeviceNet Vendor Association Inc.
●Profibus® is a registered trademark of Profibus Nutzerorganisation e.V.
●EtherCAT® is a trademark and patented technology, licensed by Beckhoff Automation GmbH,
Germany.
About this manual
9/62

2 Safety
2.1 General safety information
The following 4 risk levels and 1 information level are taken into account in this document.
DANGER
Immediately pending danger
Indicates an immediately pending danger that will result in death or serious injury if not observed.
►Instructions to avoid the danger situation
WARNING
Potential pending danger
Indicates a pending danger that could result in death or serious injury if not observed.
►Instructions to avoid the danger situation
CAUTION
Potential pending danger
Indicates a pending danger that could result in minor injuries if not observed.
►Instructions to avoid the danger situation
NOTICE
Danger of damage to property
Is used to highlight actions that are not associated with personal injury.
►Instructions to avoid damage to property
Notes, tips or examples indicate important information about the product or about this docu-
ment.
2.2 Safety instructions
All safety instructions in this document are based on the results of the risk assessment carried out in
accordance with Machinery Directive 2006/42/EC Annex I and EN ISO 12100 Section 5. Where applica-
ble, all life cycle phases of the product were taken into account.
Risks during transport
WARNING
Danger of serious injury due to falling objects
Due to falling objects there is a risk of injuries to limbs through to broken bones.
►Take particular care and pay special attention when transporting products manually.
►Do not stack the products.
►Wear protective equipment, e.g. safety shoes.
Safety
10/62

Risks during installation
DANGER
Danger to life from electric shock
Power supply packs that are not specified or are not approved will lead to severe injury to death.
►Make sure that the power supply pack meets the requirements for double isolation between
mains input voltage and output voltage, in accordance with IEC 61010-1 IEC 60950-1 and
IEC 62368-1.
►Make sure that the power supply pack meets the requirements in accordance with IEC 61010-1
IEC 60950-1 and IEC 62368-1.
►Where possible, use original power supply packs or only power supply packs that correspond
with the applicable safety regulations.
WARNING
Risk of danger to life through missing mains disconnection device
The vacuum pump and electronic drive unit are not equipped with a mains disconnection device
(mains switch).
►Install a mains disconnection device according to SEMI-S2.
►Install a circuit breaker with an interruption rating of at least 10,000 A.
WARNING
Risk of injury due to incorrect installation
Dangerous situations may arise from unsafe or incorrect installation.
►Do not carry out your own conversions or modifications on the unit.
►Ensure the integration into an Emergency Off safety circuit.
WARNING
Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum flange
With the high vacuum flange open, access to sharp-edged parts is possible. A manual rotation of the
rotor increases the danger situation. There is the risk of cuts, up to the separation of body parts (e.g.
fingertips). There is a risk of hair and loose clothing being drawn in. Objects falling in destroy the tur-
bopump during subsequent operation.
►Only remove the original protective covers immediately prior to connecting the high vacuum
flange.
►Do not reach into the high vacuum connection.
►Wear protective gloves during installation.
►Do not start the turbopump with open vacuum connections.
►Always carry out the mechanical installation before electrical connection.
►Prevent access to the high vacuum connection of the turbopump from the operator side (e.g.
open vacuum chamber).
WARNING
Danger to life from poisoning where toxic process media leak from damaged connections
Sudden twisting of the turbopump in the event of a fault causes fittings to accelerate. There is the risk
of damaging on-site connections (e.g., fore-vacuum line) and resulting leaks. This results in leakage
of process media. In processes involving toxic media, there is a risk of injury and danger to life due to
poisoning.
►Keep masses connected to the turbopump as low as possible.
►Use flexible lines to connect to the turbopump where necessary.
Safety
11/62

WARNING
Risk of injury caused by the turbopump breaking away with the vibration compensator in the
event of a malfunction
Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892.
When using a vibration compensator, this will probably lead to the turbopump being sheared off in
use. The energy that this would release could throw the entire turbopump or shattered pieces from its
interior through the surrounding space. Potentially dangerous gases can escape. There is a risk of
very serious injuries, including death, and extensive property damage.
►Take suitable safety precautions on-site for the compensation of the occurring torques.
►Before installing a vibration compensator, you must first of all contact Pfeiffer Vacuum.
WARNING
Danger of cut injuries from unexpected start up.
The use of mating plugs of the electronic drive unit (accessories) enables the automatic run-up of the
vacuum pump as soon the power is turned on. Attaching mating plugs before or during the installa-
tion leads to the movement of parts hence the risk of cut injuries by sharp-edged in the exposed high
vacuum flange.
►Only connect mating plugs after the mechanical installation.
►Only switch on the vacuum pump immediately prior to operation.
Risks during operation
WARNING
Risk of burns on hot surfaces when using additional equipment for heating during operation
The use of additional equipment for heating the vacuum pump or for optimizing the process gener-
ates very high temperatures on surfaces that can be touched. There is a risk of burning.
►If necessary, set up a contact guard.
►If necessary, apply the warning stickers provided for this at the danger points.
►Ensure adequate cooling down before working on the vacuum pump or in its vicinity.
►Wear protective equipment, e.g., gloves.
WARNING
Risk of serious injury in the event of vacuum pump destruction due to over pressure
Gas entry with very high over pressure results in destruction of the vacuum pump. There is a risk of
serious injury due to ejected objects.
►Never exceed the permissible 1500 hPa (absolute) inlet pressure on the suction side or the vent-
ing and sealing gas connection.
►Make sure that high, process-related over pressures cannot directly enter the vacuum pump.
CAUTION
Risk of injuries due to contact with vacuum when venting
While venting the vacuum pump there is a risk of minor injuries due to the direct contact of body parts
with the vacuum, e.g. hematomas.
►Do not fully unscrew the venting screw out of the housing during venting.
►Keep a distance from automatic venting device, such as venting valves.
Safety
12/62

Risks during maintenance, decommissioning and disposal
WARNING
Danger to life from electric shock during maintenance and service work
The device is only completely de-energized when the mains plug has been disconnected and the tur-
bopump is at a standstill. There is a danger to life from electric shock when making contact with live
components.
►Before performing all work, switch off the main switch.
►Wait until the turbopump comes to a standstill (rotation speed f = 0).
►Remove the mains plug from the device.
►Secure the device against unintentional restarting.
WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work,
there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub-
stances causes environmental damage.
►Take suitable safety precautions and prevent health hazards or environmental pollution by toxic
process media.
►Decontaminate affected parts before carrying out maintenance work.
►Wear protective equipment.
WARNING
Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum connec-
tion
Incorrect handling of the turbopump before maintenance work results in hazardous situations with
risk of injury. There is a risk of cuts from accessing sharp-edged, rotating parts when removing the
turbopump.
►Wait until the turbopump comes to a standstill (rotation speed f = 0).
►Switch the turbopump off properly.
►Secure the turbopump against re-start.
►Seal open connections immediately following removal, using the original protective cover.
WARNING
Risk of poisoning from contact with harmful substances
The operating fluid reservoir and parts of the turbopump may contain toxic substances from pumped
media.
►Decontaminate affected parts before carrying out maintenance work.
►Prevent health hazards or environmental impacts with adequate safety precautions.
►Observe the operating fluid safety data sheet.
►Dispose of the operating fluid reservoir according to applicable regulations.
Risks in the event of malfunctions
WARNING
Danger to life from electric shock in the event of a fault
In the event of a fault, devices connected to the mains may be live. There is a danger to life from
electric shock when making contact with live components.
►Always keep the mains connection freely accessible so you can disconnect it at any time.
Safety
13/62

WARNING
Danger to life from the turbopump breaking away in the event of a fault
Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892. If the
turbopump is not properly secured, it can shear off. The energy that this would release could throw
the entire turbopump or shattered pieces from its interior through the surrounding space. Potentially
dangerous gases can escape. There is a risk of very serious injuries, including death, and extensive
property damage.
►Follow the installation instructions for this turbopump.
►Observe the requirements regarding stability and design of the counter flange.
►Use only original accessories or fixing material approved by Pfeiffer Vacuum for the installation.
WARNING
Danger to life from poisoning where toxic process media leak from damaged connections
Sudden twisting of the turbopump in the event of a fault causes fittings to accelerate. There is the risk
of damaging on-site connections (e.g., fore-vacuum line) and resulting leaks. This results in leakage
of process media. In processes involving toxic media, there is a risk of injury and danger to life due to
poisoning.
►Keep masses connected to the turbopump as low as possible.
►Use flexible lines to connect to the turbopump where necessary.
WARNING
Risk of injury caused by the turbopump breaking away with the vibration compensator in the
event of a malfunction
Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892.
When using a vibration compensator, this will probably lead to the turbopump being sheared off in
use. The energy that this would release could throw the entire turbopump or shattered pieces from its
interior through the surrounding space. Potentially dangerous gases can escape. There is a risk of
very serious injuries, including death, and extensive property damage.
►Take suitable safety precautions on-site for the compensation of the occurring torques.
►Before installing a vibration compensator, you must first of all contact Pfeiffer Vacuum.
2.3 Safety precautions
Duty to provide information on potential dangers
The product holder or user is obliged to make all operating personnel aware of dangers
posed by this product.
Every person who is involved in the installation, operation or maintenance of the product
must read, understand and adhere to the safety-related parts of this document.
Infringement of conformity due to modifications to the product
The Declaration of Conformity from the manufacturer is no longer valid if the operator
changes the original product or installs additional equipment.
●Following the installation into a system, the operator is required to check and re-evalu-
ate the conformity of the overall system in the context of the relevant European Direc-
tives, before commissioning that system.
General safety precautions when handling the product
►Observe all applicable safety and accident prevention regulations.
►Check that all safety measures are observed at regular intervals.
►Do not expose body parts to the vacuum.
►Always ensure a secure connection to the earthed conductor (PE).
►Never disconnect plug connections during operation.
►Observe the above shutdown procedures.
►Before working on the high vacuum connection, wait until the rotor has stopped completely (rota-
tion speed f = 0).
Safety
14/62

►Never put the device into operation with the high vacuum connection open.
►Keep lines and cables away from hot surfaces (> 70°C).
►Never fill or operate the unit with cleaning agents or cleaning agent residues.
►Do not carry out your own conversions or modifications on the unit.
►Observe the unit protection class prior to installation or operation in other environments.
2.4 Limits of use of product
Installation location Weatherproof (internal space)
Air pressure 530 hPa to 1060 hPa
Installation altitude Max. 5000 m
Rel. air humidity max. 80%, at T < 31°C,
up to max. 50% at T < 40°C
Protection class III
Overvoltage category II
Permissible protection degree IP54
Type 12 according to UL 50E
Degree of pollution 2
Ambient temperature 5°C to 35°C with air cooling
5°C to 40°C with water cooling
Permissible surrounding magnetic field 6 mT
Maximum irradiated thermal output 4.2 W
Maximum permissible rotor temperature of the turbopump 90 ℃
Maximum permissible bakeout temperature at the high vacuum
flange
120 ℃
Tbl. 2: Permissible ambient conditions
Notes on ambient conditions
The specified permissible ambient temperatures apply to operation of the turbopump at
maximum permissible backing pressure or at maximum gas throughput, depending on the
cooling type. The turbopump is intrinsically safe thanks to redundant temperature monitor-
ing.
●The reduction in backing pressure or gas throughput permits operation of the turbo-
pump at higher ambient temperatures.
●If the maximum permissible operating temperature of the turbopump is exceeded, the
electronic drive unit first reduces the drive output and then switches it off where neces-
sary.
2.5 Proper use
►Use the turbopump only for generating vacuum.
►Use the turbopump only in combination with a suitable backing pump that can deliver up to the
required maximum fore-vacuum pressure.
►Use the turbopump only in closed indoor areas.
►Use the turbopump only for the evacuation of dry and inert gases.
2.6 Foreseeable improper use
Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the
purpose of the product, whether intentional or unintentional, is regarded as improper use; in particular:
●Establishing the voltage supply without correct installation
●Installing with non-specified fastening material
●Pumping explosive media
●Pumping of corrosive media
●Pumping of condensing vapors
Safety
15/62

●Pumping of fluids
●Pumping of dust
●Operating with impermissible high gas throughput
●Operating with impermissible high fore-vacuum pressure
●Operation with excessive irradiated heat output
●Operating in impermissible high magnetic fields
●Operating in an incorrect gas mode
●Venting with impermissible high venting rates
●Using for pressure generation
●Using in areas with ionizing radiation
●Operating in potentially explosive areas
●Using in systems in which sporadic loads and vibrations or periodic forces act on the device
●Causing of hazardous operating conditions by a presetting on the electronic drive unit that is con-
trary to the process
●Using of accessories or spare parts that are not listed in these instructions
2.7 Personnel qualification
The work described in this document may only be carried out by persons who have appropriate profes-
sional qualifications and the necessary experience or who have completed the necessary training as
provided by Pfeiffer Vacuum.
Training people
1. Train the technical personnel on the product.
2. Only let personnel to be trained work with and on the product when under the supervision of
trained personnel.
3. Only allow trained technical personnel to work with the product.
4. Before starting work, make sure that the commissioned personnel have read and understood
these operating instructions and all applicable documents, in particular the safety, maintenance
and repair information.
2.7.1 Ensuring personnel qualification
Specialist for mechanical work
Only a trained specialist may carry out mechanical work. Within the meaning of this document, special-
ists are people responsible for construction, mechanical installation, troubleshooting and maintenance
of the product, and who have the following qualifications:
●Qualification in the mechanical field in accordance with nationally applicable regulations
●Knowledge of this documentation
Specialist for electrotechnical work
Only a trained electrician may carry out electrical engineering work. Within the meaning of this docu-
ment, electricians are people responsible for electrical installation, commissioning, troubleshooting, and
maintenance of the product, and who have the following qualifications:
●Qualification in the electrical engineering field in accordance with nationally applicable regulations
●Knowledge of this documentation
In addition, these individuals must be familiar with applicable safety regulations and laws, as well as the
other standards, guidelines, and laws referred to in this documentation. The above individuals must
have an explicitly granted operational authorization to commission, program, configure, mark, and earth
devices, systems, and circuits in accordance with safety technology standards.
Trained individuals
Only adequately trained individuals may carry out all works in other transport, storage, operation and
disposal fields. Such training must ensure that individuals are capable of carrying out the required activi-
ties and work steps safely and properly.
2.7.2 Personnel qualification for maintenance and repair
Advanced training courses
Pfeiffer Vacuum offers advanced training courses to maintenance levels 2 and 3.
Safety
16/62

Adequately trained individuals are:
●Maintenance level 1
─Customer (trained specialist)
●Maintenance level 2
─Customer with technical education
─Pfeiffer Vacuum service technician
●Maintenance level 3
─Customer with Pfeiffer Vacuum service training
─Pfeiffer Vacuum service technician
2.7.3 Advanced training with Pfeiffer Vacuum
For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive range of
courses and technical trainings.
For more information, please contact Pfeiffer Vacuum technical training.
Safety
17/62

3 Product description
3.1 Function
The turbopump forms a compact unit with the electronic drive unit. The Pfeiffer Vacuum power supply
packs are used for voltage supply.
The properties designation "Plus" designates turbopumps with particularly low-vibration action and a
low magnetic stray field.
1 2 3 4
56789101112
13 14 15 16
Fig. 2: HiPace 700 Plus design
1 Electronic drive unit TC 400 9 Venting screw
2 Ground terminal 10 Connection coupling for cooling water
3 Pump housing, stainless steel 11 Protective cap for the fore vacuum connection
4 Turbo rotor 12 Connecting plug for voltage supply DCin
5 High vacuum connection, DN 160 CF-F 13 Connection panel of the electronic drive unit
6 Fore-vacuum connection, DN 25 ISO-KF 14 Pump housing, aluminum
7 LED operating mode display 15 Sealing gas connection
8 Pump bottom part 16 Protective cap for the high vacuum connection
3.1.1 Cooling
●Water cooling
●Air cooling (optional)
The electronic drive unit automatically regulates the drive power down in the event of excessive temper-
atures.
3.1.2 Rotor bearing
Hybrid-bearing turbopump
●High vacuum side: wear-free permanent magnetic bearing
●Fore-vacuum side: ball bearing with ceramic balls
Permanent lubrication of the rotor bearing on the fore-vacuum side is ensured by an operating fluid res-
ervoir.
3.1.3 Drive
●Electronic drive unit TC 400
─Operating voltage 24 V DC
●Electronic drive unit TC 400
─Operating voltage 48 V DC
Product description
18/62

3.2 Identifying the product
►To ensure clear identification of the product when communicating with Pfeiffer Vacuum, always
keep all of the information on the rating plate to hand.
►Learn about certifications through test seals on the product or at www.certipedia.com with compa-
ny ID no. 000021320.
3.2.1 Product types
The product designation of Pfeiffer Vacuum turbopumps from the HiPace series is composed of the
family name, the size (which is based on the pumping speed of the vacuum pump) and, if required, an
additional feature description.
Family Size/model Property, attribute, feature
HiPace 10 to 2800 none = Standard version
mini = Compact version
U = Overhead version
C = Corrosive gas version
P = Process
M = Active magnetic bearing
T = Temperature management
Plus = Low vibration, low magnetic field
E = High efficiency
H = High compression
I = Ion implantation
Tbl. 3: Product designation of Pfeiffer Vacuum HiPace turbopumps
3.2.2 Product features
Feature Version
HV flange DN 160 ISO-K DN 160 ISO-F DN 160 CF-F
Flange material Aluminium Aluminium Stainless steel
Tbl. 4: Turbopump features
3.3 Shipment
●Turbopump with electronic drive unit
●Protective cover for the high vacuum connection
●Protective cover for the fore-vacuum connection
●Mating plug for the "remote" connection to the TC 400 (type-dependent)
●Mating plug for the "E74" connection to the TC 400 (type-dependent)
●Operating instructions
Product description
19/62

4 Transportation and Storage
4.1 Transport
WARNING
Danger of serious injury due to falling objects
Due to falling objects there is a risk of injuries to limbs through to broken bones.
►Take particular care and pay special attention when transporting products manually.
►Do not stack the products.
►Wear protective equipment, e.g. safety shoes.
Recommendation
Pfeiffer Vacuum recommends keeping the transport packaging and original protective cov-
er.
Safe transport of the product
►Transport the turbopump only within the permissible temperature limits.
►Observe weight specified on the rating plate.
►Where possible, always transport or ship the turbopump in its original packaging.
►Always carry the turbopump with both hands.
►Remove the protective cover only immediately prior to installation.
4.2 Storage
We recommend
Pfeiffer Vacuum recommends storing the products in their original transport packaging.
Storing the turbopump
1. Seal all flange openings with the original protective caps.
2. Seal all other connections (e.g. venting connection) with the corresponding original parts.
3. Store the turbopump only indoors within the permissible temperature limits.
4. In rooms with humid or aggressive atmospheres: Hermetically seal the turbopump together with a
drying agent in a plastic bag.
Transportation and Storage
20/62