Pfeiffer Vacuum TPH 1201 U P User manual

Turbomolecular Pumps
For Up-side Down Installation
PT 0126 BE/F (0703)
TPH 1201 U P
TPH 1201 U P C
Betriebsanleitung • Operating Instructions
Translation of the Original Operating Instructions

2
Index
Page Page
1. Safety Instructions .......................... 3
1.1. For Your Orientation ......................................... 3
1.2. Pictogram Definitions ....................................... 3
2 Understanding The Pumps............. 4
2.1. Main Features................................................... 4
Proper Use........................................................ 4
Improper Use.................................................... 5
2.2. Differences Between The Pump Types............ 5
2.3. Scope Of Delivery............................................. 5
3. Installation ....................................... 6
3.1. Preparations For Installation ............................. 6
3.2. Connecting The High Vacuum Side .................. 6
3.3. Connecting The Fore-Vacuum Side .................. 8
3.4. Connecting The Cooling Unit ............................ 9
3.5. Connecting The Electronic Drive Unit TC 750 10
3.6. Installing The Power Supply ........................... 10
3.7. Installing The Cover Plate For The TC 750...... 11
3.8. Connecting The Venting Valve........................ 12
3.9. Connecting The Sealing Gas Valve ................. 12
3.10. Connecting The Remote Control Unit............. 13
3.11. Connecting The Serial Interface RS 485 ......... 14
Connection...................................................... 14
Connecting The RS 485 .................................. 14
3.12. Connections Diagram ..................................... 15
4. Operations...................................... 16
4.1. Filling In The Lubricant.................................... 16
4.2. Before Switching ON...................................... 16
4.3. Switching ON.................................................. 17
4.4. Gas Type Dependent Operations ................... 17
Operation with cooling
water temperature ≠ 25°C ...............................18
4.5. Circulatory Lubrication .................................... 19
4.6. Switching OFF And Venting............................ 19
4.7. Shutting Down For Longer Periods ................ 19
4.8. Operations With The DCU 001/DCU 600
or HPU 001 ..................................................... 19
4.9. Operations With The Remote Control Unit..... 20
Venting Release (Optional) ............................. 20
Motor, Turbopump ......................................... 20
Heating/Reset ................................................ 20
Standby........................................................... 20
Pumping Station ............................................ 20
Rotation Speed Setting Operations
Via Input PWM ............................................... 20
Switching Outputs .......................................... 20
5. Monitoring Operations.................. 21
5.1. Operations Display Via LED ............................ 21
5.2. Turbopump Temperature Monitoring ............. 21
6. What To Do In Case
Of Breakdowns?............................ 22
7. Service............................................ 23
8. Maintenance/Replacement .......... 24
8.1. Replacing The Lubricant ................................. 24
8.2. Cleaning The Lubricant Pump......................... 25
8.3. Replacing The Lubricant Pump ....................... 25
8.4. Replacing The Electronic Drive Unit TC 750 ... 25
9. Technical Data ................................ 26
9.1. Dimensions Diagram ...................................... 27
10. Spare Parts ..................................... 29
11. Accessories .................................... 30
11.1. Lubricant ......................................................... 30
Declaration of Contamination.............31
Manufacturer´s Declaration .. (last page)
PPlleeaasseennoottee::Current operating instructions are available via
www.pfeiffer-vacuum.net
For information about certifications, if applicable, please see
the signet on the pump or:
☞www.tuvdotcom.com
☞TUVdotCOM-ID 0000021320

3
Warning, danger of personal injury.
Caution, danger of damage to the pump or to
the system.
Warning, danger of injury from rotating parts.
Please note, attention to particulary important
information on the product, handling the
product or to a particular part of the
documentation.
☞
PLEASE NOTE
WARNING
CAUTION
WARNING
☞Read and follow all instructions in this manual.
☞Inform yourself regarding:
– Hazards which can be caused by the pump;
– Hazards which can be caused by your system.
– Hazards which can be caused by the media being
pumped.
☞Avoid exposing any part of the body to vacuum.
☞Observe the safety and accident prevention regulations.
☞Regularly check that all accident prevention measures are
being complied with.
☞Do not operate the turbopump with open high vacuum
flange.
☞Do not carry out any unauthorised conversions or alterati-
ons to the turbopump with TC 750.
☞When returning the turbopump observe the shipping
instructions.
☞The turbopump must be anchored in accordance with the
installation instructions (see Section 3.).
☞Do not disconnect the plug between the TC 750 and acces-
sory components during operations.
☞Disconnect the voltage supply to the TC 750 before
opening the turbopump.
☞When working on the turbopump, the high vacuum flange
should only be opened once the rotor is at rest.
☞When using sealing gas, the pressure in the hose connec-
tion should be limited to 2 bar via the overpressure valve.
☞If a heater is in use temperatures of up to 120 °C can arise
in the area of the high vacuum flange. Take care to avoid
burns!
☞During operations temperatures of up to 65 °C can arise in
the lower part of the turbopump. Take care to avoid burns!
☞Keep leads and cables well away from hot surfaces
(> 70 °C).
☞Operate the turbopump with TC 750 only in conjunction
with the relevant power supply (accessory).
☞The unit has been accredited protection class IP 30. When
the unit is operated in environments which require other
protection classes, the necessary measures must be
taken. When the turbopump is water cooled the enclosed
cover plate for the TC 750 must be installed by an electrical
specialist, in order to attain protection class IP 54.
☞The mains connection must be subject to a safe
connection to the PE (protection class 1).
☞If the turbopump and the TC 750 are operated separately
(only permissible with the agreement of the manufacturer)
the turbopump must be connected to the PE.
☞The turbopump and the TC 750 must only be disconnected
from each other when the turbopump is completely at rest
and the TC 750 has been disconnected from the power
supply.
☞The cause of any operating voltage leakage to earth (red
LED flashes) must be eliminated to avoid the danger of an
electric shock.
☞The housing screws do not loosen, pull tight, remove or
replace, since otherwise the guarantee for the security of
the turbopump expires.
Modifications reserved.
1. Safety Instructions
1.1. For Your Orientation
Instruction in the text
➡Working instruction: here, you have to do something.
Symbols used
The following symbols are used throughout in illustrations:
High vacuum flange
Fore-vacuum flange
Venting connection
Cooling water connection
Electric connection
Sealing gas connection
Abbreviations used
DCU = Display and operating unit
HPU = Display and operating unit
TC = Electronic drive unit, turbopump
TPS = Power supply
Position numbers
The same pump and accessory parts have the same position
numbers in all illustrations.
1.2. Pictogram Definitions

4
2.1. Main Features
Turbopumps TPH 1201 U P/U P C with the TC 750 form a
complete unit. Voltage is supplied by power supply (see
Section 11. Accessories).
On delivery, the pumps have been set up for
operations in remote mode. Remote plug 8d
should therefore be disconnected from the
TC 750 if operations with the DCU 001/DCU 600
or HPU 001 are required.
CAUTION
Cooling
Standard: Water cooling
Integrated protective measures against excess temperatures:
The Electronic Drive Unit TC 750 reduces
the rotor rotation speed.
Bearings
High vacuum side: Wear free permanent magnetic bearing.
Fore-vacuum side: Oil circulatory lubricated ball bearing
with ceramic balls.
2. Understanding The Pumps
The turbopumps must nnoottbe transported when
filled with lubricant.
When being fitted into or dismantled from a
system, turbopumps may only be positioned as
shown in Section 3.2. Other positions can cause
the pumps to be contaminated with lubricant.
Ambient conditions
The turbomolecular pump needs to be installed in compliance
with the following ambient conditions:
Installation location: protected against the weather
(rooms within buildings)
Temperature: +5 °C to +40 °C
Relative humidity
of the air: max. 80 % at T ≤31 °C
up to max. 50% at T ≤40 °C
Air pressure: 77 kPa - 106 kPa
Installation altitude: 2000 m max.
Pollution degree: 2
Overvoltage category: II
Connection voltage: 140 VDC ±5%
Proper Use
– The Turbomolecular Pumps TPH 1201 U P and
TPH 1201 U P C may only be used for the purpose of gene-
rating vacuum.
– The Turbomolecular Pumps TPH 1201 U P C (please see
the type plate) are designed to pump corrosive gases and
vapours. Where corrosive gas processes are involved, gas
bonding and particles which can damage the surfaces of
the pump can be produced. The motor and bearing
compartments have to be protected with sealing gas.
– The turbopumps may only be used to pump those media
against which they are chemically resistant. For other
media the operator is required to qualify the pumps for the
processes involved.
– If the process produces dust, the maintenance intervals
must be specified accordingly and sealing gas must be
used.
– If the pump is to be operated with more than 50% of the
permissible gas load then sealing gas should be used to
ensure rotor cooling.
– The turbopump must be connected to a backing pump in
accordance with Section 3.3..
– Only Pfeiffer Vacuum power supplies may be used to
operate the TC 750. The use of other power supplies requi-
res the prior agreement of the manufacturer and equalisa-
tion with the valid specification.
– Without the cover plate for the TC 750 the pumps may only
be operated providing the ambient conditions in complian-
ce with Protection Type IP 30 are observed.
CAUTION
Turbomolecular Pump TPH 1201 U P / U P C
1 High vacuum flange
2 Fore-vacuum flange
4 Venting screw
8 Electronic Drive Unit TC 750
8d Remote plug
9 Locking screw sealing gas connection
9
8
2
4
8d
1

5
Improper Use
The following is regarded, inter alia, as improper:
– The pumping of explosive gases.
– Operating the pumps in areas where there is a danger of
explosion.
– Operating the pumps in areas there is a danger of
radioactivity.
– The pumping of gases and vapours which attack the
materials of the pumps.
– The pumping of corrosive gases without sealing gas.
– The pumping of condensating vapours.
– Operations involving impermissibly high levels of gas
loads.
– Operations with impermissibly high fore-vacuum pressure.
– Operations with improper gas modes.
– Operations involving too high levels of heat radiation
power (see Section 9. ”Technical Data”).
– Venting with rates higher than in Section 4.6. stated.
– Operating the pump without the cover plate for the TC 750
in environments which require a protection class superior
to IP 30.
– Installation of the pumps in systems where the turbomole-
cular pumps are subjected to impact-like stress and vibra-
tions or the effect of periodically occurring forces.
– The use of other power supplies or accessories which are
not named in this manual or which have not been agreed
by the manufacturer.
– The connection to power supplies with earthing of a direct
voltage pole.
The turbomolecular pumps and flange connections must not
be used to tread on when climbing onto the system.
Improper use will cause all claims for liability and guarantees
to be forfeited.
FFeeaattuurreeTTPPHH11220011UUPP//TTPPHH11220011UUPPCC
High vacuum flange ISO-K / ISO-F
High vacuum seal Elastomer seal
Attainable final < 1 · 10-7 mbar
pressure
2.2. Differences Between The Pump Types
TPH 1201 U P Standard version
TPH 1201 U P C Corrosive gas processes version
Abbreviations on the type plate of the pump
TPH 1201
Suffix ”UU“: Upside down version of the turbomolecular
pump
Suffix ”PP“: Purge gas connection for the prevention of
the ingress of aggressive gases into the
motor and bearing area
Suffix”CC“: Surface protection for passive protection
of the pump
2.3. Scope Of Delivery
The turbopump scope of delivery includes:
– Lubricant F3 (40 ml) with filling syringe,
– cover plate for the TC 750 to fulfilled the conditions for
protection class IP 54 (please see Section 3.7.),
– protective covering for the high vacuum flange and the
fore-vacuum flange.
The fastening parts at the high vacuum flange
are not sufficient for the attachment of the
turbopump at a recipient (please refer to
Section. 3. Installation).
CAUTION

6
3. Installation
3.1. Preparations For Installation
Do not carry out any unauthorised conversions
or alterations to the turbopump.
In case the rotor blocks suddenly, torque levels
up to 99880000NNmmcan occur which need to be
absorbed by the system and the high vacuum
flange.
The turbopumps must not be transported when
filled with lubricant.
– Pumps must be filled with lubricant befor being operated
(see Section 4.1.).
– If the turbopump is to be operated with the DCU 001 or
HPU 001, the remote plug 8d (please see Section 2.1.) on
the TC 750 should be disconnected and then proceed in
accordance with the corresponding operating instructions.
– The maximum permissible rotor temperature of the pump is
120 °C. If the vacuum chamber or parts in the vacuum
chamber are heated, the values stated in the technical
data relating to the level of heat which may be radiated
into the pump must not be exceeded. If necessary, suitable
shielding must be fitted in the vacuum chamber before the
turbopump (constructional suggestions available on
request).
– The temperature of the high vacuum flange must not
exceed 120 °C.
– Only remove the blank flange from the high and fore-vacu-
um side immediately before connection.
– Where magnetic fields of > 6 mT are involved suitable
shielding must be provided (available on request).
– If the pump is baked out, the heating sleeve and the body
of the pump must be insulated to prevent burns from
accidental contact.
– Floor mounting of the turbomolecular pump is admissible
after consulting the manufacturer.
The person responsible for commissioning must
ensure that the installation is carried out in
accordance with the legal regulations and the
pertinent industrial standards.
☞
PLEASE NOTE
CAUTION
WARNING
WARNING
3.2. Connecting The High Vacuum Side
The utmost cleanliness must be observed
when fitting all high vacuum parts. Unclean
components prolong the pumping time.
All installations units for the flange must be
with installation grease-free, dust free and
drying.
Use a Pfeiffer Vacuum splinter shield or protective screen
The use of a Pfeiffer Vacuum splinter shield or protective
screen in the high vacuum flange protects the turbopump
against foreign bodies coming from the vacuum chamber but
does reduce the volume flow rate as followed:
☞
PLEASE NOTE
Connecting via a Pfeiffer Vacuum vibration compensator
The high vacuum side can be flanged onto the vacuum cham-
ber either directly or via a Pfeiffer Vacuum vibration compen-
sator (see Section 11. Accessories).
When using a Pfeiffer Vacuum vibration compensator,
suitable securing needs to be introduced capable of
absorbing the energy of the rotor should it suddenly block,
since the vibration compensator itself alone cannot absorb
the occurring forces. Please consult the manufacturer.
The maximum permissible temperature at the
vibration compensator is 100 °C.
Installing the high vacuum flange
– In case the rotor blocks suddenly, torque levels up to
99880000NNmmcan occur which need to be absorbed by the
system and the high vacuum flange.
– For installing the turbomolecular pumps to the high
vacuum flange, the components listed in the following
mmuussttbe used exclusively. Otherwise the turbomolecular
pump may twist or tear off.
The components for installing the tuebopumps are special
designs from Pfeiffer Vacuum
– The minimum strength of 170 N/mm2of the flange material
needs to be observed.
CAUTION
Reduced volume flow rate [[%%]]
N2He H2
Splinter shield 23 10 6
Protective screen 6 3 2

7
A
D or E B
C
Bracket crew
A ISO-K flange
B Bracket screw
C Centering ring, coated
D Splinter shield
E Protective screen
Installation is done as follows:
To reliably prevent the pump from twisting if
the rotor suddenly blocks, it is absolutely prohi-
bited to secure a pump with an ISO-K flange on
a vacuum chamber with an ISO-F flange or vice
versa. Both flanges mmuussttbbeeof the same type.
Installation with different flange types is
carried out at the user's own risk. Pfeiffer
Vacuum shall assume no liability whatsoever
for any damage or injuries resulting from this
kind of attachment.
ISO-K to an ISO-K flange
The components for installation are enclosed in the
appropriate set of mounting material (see sec. 11.
Accessories).
WARNING
➡See that the sealing surface is not damaged.
➡Flange the turbopump according to the drawing and the
component parts in your set of mounting material. Use 1188
bracket screws.
➡Tighten the clamps crosswise in three steps.
Tightening torque: 5 Nm, 15 Nm, 25 ±2 Nm
➡See that the sealing surface is not damaged.
➡Flange the turbopump according to the drawing and the
component parts in your set of mounting material. Use 1122
screws.
➡For a flange material having a strength of > 270 N/mm2and
with a blind hole the hexagon screw 1,5 d must be
screwed in. The hexagon screws must be tightened
crosswise in three steps.
Tightening torque: 10 Nm, 20 Nm, 38 ±3 Nm
B
A
D oder/or E
1.5d
C
Hexagon srew with blind hole
A ISO-F flange
B Hexagon screw with flange
C Centering ring, coated
D Splinter shield
E Protective screen
B
A
C
D oder/or E
2.5d
Stud screw with blind hole
A ISO-F flange
B Stud screw with nut1)
C Centering ring, coated
D Splinter shield
E Protective screen
1) Nut with flange.
➡See that the sealing surface is not damaged.
➡Flange the turbopump according to the drawing and the
component parts in your set of mounting material. Use 1122
screws and 1122nuts.
➡For a flange material having a strength of 170-270 N/mm2
and a screw-in flange, the stud screw 2,5 d must be
screwed in. The nuts must be tightened crosswise in three
steps.
Tightening torque: 10 Nm, 20 Nm, 38 ±3 Nm
ISO-F to an ISO-F flange
For installing there exist three variants. The components for
installation are enclosed in the appropriate set of mounting
material (see sec. 11. Accessories).
VVaarriiaanntt11--HHeexxaaggoonnssccrreewwwwiitthhbblliinnddhhoollee
1) Nut with flange.
➡See that the sealing surface is not damaged.
➡Flange the turbopump according to the drawing and the
component parts in your set of mounting material. Use 1122
screws and 2244nuts.
➡For a flange material having a strength of > 170 N/mm2and
a stud screw with clearance hole, the nuts must be
tightened crosswise in three steps.
Tightening torque: 10 Nm, 20 Nm, 38 ±3 Nm
Directly Flanging The Pump
The turbopump can be flanged onto the vacuum chamber
vertically (upside down) up to an angle of 90° maximum.
The fore-vacuum flange must always point
downwards.
CAUTION
B
A
C
D oder/or E
Stud screw and clearance hole
A ISO-F flange
B Stud screw with two nuts1)
C Centering ring, coated
D Splinter shield
E Protective screen
Variant 3 - Stud screw and clearance hole
Variant 2 - Stud screw with blind hole

8
The maximum loading capacity of the high vacu-
um flange is 2000 N (equivalent to 200 kg).
Asymmetric loading on the high vacuum flange
must be avoided.
When operating, a turbopump which has been
installed in the upside down position must not be
tilted by more than 3° in the opposite direction to
the fore-vacuum flange otherwise lubricant is
not secured.
CAUTION
CAUTION
TC 600
TC 600
TC 600
TC 600
90˚
Permissible installation positions for the turbopump
11 Vacuum chamber
11
11
≤ 3˚
Upside down installation position
11 Vacuum chamber
Horizontal installation position of the turbopump
The fore-vacuum flange of the turbopump must be aligned
vertical downwards, otherwise the turbopump could become
dirty and the lubricating pump not properly function. The
deviation of the fore-vacuum flange from the perpendicular
must not exceed the following values (view onto the fore-
vacuum side):
Clockwise: 8° max.
Counter-clockwise : 15° max.
No forces from the piping system must be
allowed to act on the pump where turbopumps
are anchored.
Suspend or support all pipes to the turbopump.
3.3. Connecting The Fore-Vacuum Side
Backing pump: Fore-vacuum pressure please see
Section 9. Technical Data
Recommendation: Dry backing pumps or rotary vane
vacuum pumps from the Pfeiffer Vacuum
range.
Connecting the backing pump
All connections of the fore-vacuum line: With the usual small
flange components or screwed hoses.
Be sure to conduct away the exhaust gases
from the backing pump. Do not reduce the free
cross section of the fore-vacuum flange with
following components.
The exhausted process gases and vapours can
represent a health hazard and can also be envi-
ronmentally damaging.
Comply with all the gas manufacturer's safety
instructions.
Check the seal of the fore-vacuum line before
commissioning.
WARNING
CAUTION
CAUTION
8˚ max. 15˚ max
H
VV VV VV
Horizontal installation position of the turbopump
11 Vacuum chamber
11

9
➡With rigid pipe connections: Fit a bellows in the
connecting line to reduce vibration.
➡The fore-vacuum lines should be designed so that they will
not breake in the event of rotation of the pump at the high
vacuum flange.
➡The electrical connection of the backing pump is made via
a relay box (see Section 11. Accessories) whose control
line is connected to ”FV PUMP” on the TC 750.
Please refer to Operating Instructions PT 0030 BN for details
on the relay box, backing pump and its installation.
3.4. Connecting The Cooling Unit
The Turbopumps TPH 1201 U P / U P C have been designed to
be water cooled as standard.
(cooling water connection please refer to Section
9.1. Dimensions Diagram)
When the turbopump is water cooled the enclo-
sed cover plate for the TC 750 must be installed
by an electrical specialist, in order to attain
protection class IP 54 (please see Section 3.7.).
Water Cooling
The cooling water can be drawn either
– from the cooling water mains, or
– from Recycled Water Cooling Unit TZK (please see Section
11. Accessories) in closed circuit.
Cooling from the cooling water mains
To prevent deposits collecting in the pump the cooling water
must be filtered.
Minimum cooling water requirements:
Mechanically clean, optically clear, no turbidity, no sediment,
chemically neutral, temperature >dew point.
CAUTION
Oxygen content: max. 4 mg/kg
Chloride content: max. 100 mg/kg
Carbonate hardness: max. 10 ° dH
Consumption of potassium
permanganate: max. 10 mg/kg
Carbon dioxide: Undetectable
Ammonia: Undetectable
pH-value: 7 – 9
Max. fore-line over pressure: max. 6 bar
Connection to the cooling water mains
➡Fit the dirt trap (see Section 11. Accessories) in the supply
line.
➡Connect the supply line with hose clips onto one of the two
cooling water connections.
➡Connect the return line to the other cooling water connec-
tion of the turbopump.
➡Tighten cooling water connection to a torque of 10 Nm.
➡Tighten all hose clips and check for firm seating of the
hoses.
3
33
31
32
TC 750
Cooling from the cooling water mains
3 Cooling water connection
31 Supply line
32 Return line
33 Dirt trap
Cooling with the Recycled Water Cooling Unit TZK
(Accessory)
Connection
Dirt traps are not permissible in the lines.
All other steps as for connecting to the cooling water mains.
3
31
32
35
TZK
TC 750
Cooling with Recycled Water Cooling Unit TZK
3 Cooling water connection
31 Supply line
32 Return line
35 Recycled Water Cooling Unit TZK

10
3.5. Connecting The Electronic
Drive Unit TC 750
The turbopump and the Electronic Drive Unit
TC 750 are connected and together form a
single unit. The connecting cable 8a has to be
ordered separately in the required length (see
Section 11. Accessories).
➡Unscrew screw with tooth lock 8c from the TC 750 (above
the connection X4)1).
➡Plug the plug X4 on connecting cable 8a into the
connection X4 on the TC 750 and screw in screw 8b.
➡Secure plug X4 on the TC 750 with a screw and
tooth lock 8c1).
➡Connect plug X2 on connecting cable 8a with power
supply TPS 600/DCU 600 (see Section 11. Accessories) on
connection X2.
➡Using screws and toothlock 8c (two pieces, included
with the cable consigment) secure plug X2 to power
supply 1051).
Once operations voltage has been supplied, the
TC 750 performs a self test on the supply voltage.
The supply voltage for the turbomolecularpumps
is 140 VDC ± 5% in accordance with EN 60 742.
If the turbopump is to be operated with the Display and
Operating Unit DCU 001, DCU 600 or HPU 001, the remote plug
8d on the TC 750 should be disconnected and then proceed in
accordance with the relevant Operating Instructions.
1) only with cable PM 051 843 -T (please see Section 11.)
CAUTION
☞
PLEASE NOTE
X4
8
8a X2
8c
X4
8b
8c
105
S1 X1 X2
8d
Connecting the TC 750 with Power Supply TPS 600/DCU 600
X1 Mains connection
X2 Connection, Power Supply TPS 600
X4 Connection TC 750
S1 ON/OFF switch
8 Electronic Drive Unit TC 750
8a Connecting cable, TC 750 – TPS/DCU
8b Screw
8c Screw with tooth lock (2 Pieces)
8d Remote plug
105 Power Supply TPS 600
3.6 Installing The Power Supply
Voltage may only be supplied with the Pfeiffer
Vacuum power supplies (please see Section 11.
Accessories).
The use of other power supplies requires the
prior agreement of the manufacturer and
equalization with the valid specification (power
supply specifications available on request).
Operations with TPS 600/DCU 600 only possible
in the connection voltage range 185-265 VAC.
For operations in the connected voltage range
90 - 132 VAC please refer to Operating Instruc-
tions ”Pumping Operations With The DCU”,
PM 0547 BN.
Please refer to Operating Instructions PM 0521 BN for details
on Power Supply TPS 600.
The mains connection must be freely
accessible at all times.
CAUTION
☞
PLEASE NOTE
CAUTION

11
3.7. Installing The Cover Plate For The TC
750
The turbomolecular pump with integrated Electronic Drive
Unit TC 750 has an IP 30 protection class rating.
When the turbopump is water cooled the enclosed cover
plate for the TC 750 mmuussttbe installed by an electrical specia-
list, in order to attain protection class IP 54.
Before installing the cover plate, the Electronic
Drive Unit TC 750 must be disconnected from
the power supply. The speed of the
turbomolecular pump must be 0 Hz.
Before beginning with any installation work
involving the cover plate for the Electronic
Drive Unit TC 750, the remote plug 8d (see
Section 3.5.) must be removed.
When using the remote plug, the cover of the
remote plug must be unscrewed from the
remote plug.
➡First the cable clamp must be removed from the TC 750.
➡Thereafter unscrew the 3 cylinder head screws with slot
(M3) from the TC 750.
➡Stick on the enclosed sealing to the bottom section 107a.
➡Bolt the bottom section 107a to the TC 750 with the
hexagon socket screws 107b (3 pieces). The sealing
surface must rest against the TC 750.
➡Insert the O-ring 107c into the bottom section.
☞
PLEASE NOTE
WARNING
TC 750
8
Dichtung/
Sealing 107a
107b
107c
➡First pull the corresponding cables through the inserts with
screwed cable glands and the cover 107d and insert the
cables at the TC 750.
In case the pump is operated using the remote control, the
remote control unit must be connected in accordance with
Section 3.10 and the wiring diagram (Section 3.12).
Installing the bottom section
8 Electronic Drive Unit TC 750
107a Bottom section
107b Hexagon socket screw (3 pieces)
107c O-ring
The cable arrangement is as follows:
– Accessories (venting valve, backing pump) in PG 16 with
flat cable (single or dual)
– Interface cable RS 485 in PG 16; for cable Ø 6
– Connecting cable for remote control etc. in insert E 153/8
or E 153/11.
➡Thereafter screw the cover 107d to the bottom section
107a with the screws 107e (6 pieces).
Particularly ensure that the O-ring 107c is properly seated!
PG 16; for
cable Ø6
Blank
disc
Screw
fitting
PG 16 for
flat cable, single
PG 16 for
flat cable, dual
(scope of delivery
2 pieces)
Insert
(scope of delivery
1 piece E 153/8
1 piece E 153/11)
Inserts and Screw fittings
➡Firmly tighten the screwed cable glands at the cover 107d.
If a cable feedthrough remains unoccupied, a
blank disc must be inserted instead of the
cable.
After installing the cover plate, the requirements of protection
class IP 54 are fulfilled. The turbomolecular pump may then
be operated once more.
☞
PLEASE NOTE
TC 750
8107a 107d 107e
107c
Installing the cover
8 Electronic Drive Unit TC 750
107a Bottom section
107c O-ring
107d Cover
107e Screw (6 pieces)

12
3.9. Connecting The Sealing Gas Valve
For protection pruposes the turbopumpe should be operated
with sealing gas, particularly where corrosive and dusty
processes are involved.
Even in non-corrosive processes, from 50% of the maximum
gas load sealing gas should be used to ensure rotor cooling.
Connection is made via the sealing gas valve 66 (please see
Section 11. Accessories).
3.8. Connecting The Venting Valve
The venting valve (see Section 11. Accessories) provides
automatic venting in the event of a power failure and
switching off.
Fitting the venting valve
➡Unscrew the venting screw 4 (see Section 2.1.) from the
venting connection of the turbopump.
➡Screw in venting valve 42 with seal (USIT ring) on
hexagonal SW 14.
Electrical connection
➡Plug control lead 42a into the connection ”VENT“ of the
TC 750 (8) on the turbopump.
Release for venting is executed via remote plug pin 2 (pre-set
on delivery, please see Section 4.9.)
The venting mode of the venting valve is selected via the
DCU/HPU or Serial Interface RS 485.
The maximum pressure at the venting valve is
1.5 bar absolute.
Please refer to Operating Instructions PM 0507 BN for details
on Venting Valve TVF 005.
CAUTION
VENT
8d
8
42a
42a
42b
42
Connecting the venting valve
8 Electronic Drive Unit TC 750
8d Remote plug
42 Venting valve
42a Connector plug venting valve/TC 750
42b Plug
66 66a
15
9
Connecting the sealing gas valve
9 Locking screw sealing gas connection
15 Seal
66 Sealing gas valve
66a Seal
Please refer to Operating Instructions PM 0229 BN for details
on installing the sealing gas valve and adjusting the sealing
gas flow.

13
3.10. Connecting The Remote Control
Unit
Remote control options for various functions are provided
with the connection ”REMOTE” on the TC 750 via the 15 pole
D-Sub connector. Shielded cable must be used. Shielding is
on the plug side of the TC 750 connected to the TC 750 casing.
The inputs 2 - 6 are activated by connecting them to the + 24V
on pin 1 (active high) (please see Section 3.12. Connections
Diagram).
Pin Arrangement And Remote Plug Functions
(please see following table)
1
8
9
15
Pin occupancy remote plug
PPiinnooccccuuppaannccyyaannddrreemmootteepplluuggffuunnccttiioonnss
PPiinnnnrr..IInnppuuttooppeenn((llooww))IInnppuuttcclloosseedd((hhiigghh))oonn++2244VV((ppiinn11))
1 +24 V
2 venting blocked (see Section 3.8.) venting released (see Section 3.8.)
3 motor, turbopump off motor, turbopump on:
the turbopump is driven, current flows through the motor coils
4 pumping station off pumping station on:
the turbopump is driven, backing pump is started via the relay box
5 heating off heating on:
the heating is switched on once the rotation speed switchpoint is attained and off
when the rotation speed switchpoint is unattained
optional: Sealing gas valve off1) optional: Sealing gas valve on1)
5 reset:
by supplying a pulse (T < 2s) with an amplitude of 24 V a malfunction
acknowledgement can be processed
6 standby off standby on:
pump is accelerated to 66% of its nominal rotation speed
7 rotation speed setting mode off the rotation speed can be changed by feeding a PWM signal to this pin or
via Serial Interface RS 485 (see Section 4.9. ”Rotation Speed Setting Mode”)
8OOuuttppuutt((llooww))OOuuttppuutt((hhiigghh))
rotation speed switchpoint not attained rotation speed switchpoint attained;
output can be loaded with 24 V/50 mA
9OOuuttppuutt((llooww))OOuuttppuutt((hhiigghh))
Collective malfunction message malfunction-free operations;
output can be loaded with 24 V/50 mA
10 Mass (ground) ____________
11 Contact
Output 1: Switchpoint attained contact 2) between pin 11 and pin 12 closed
if the turbopump is above the rotation speed switchpoint
12 Contact
Output 1: Switchpoint attained
13 Contact
Output 2: Collective malfunction message contact 2) between pin 13 and pin 14 open in the event of a collective malfunction
14 Contact
Output 2: Collective malfunction message
15 Analog output rotation speed proportional output voltage 0 - 10 VDC =
0 - 100 % * fend/load R ≥ 10 kΩ
1) The option must be set via the Serial Interface RS 485
(see Operating Instructions PM 0547 BN, Pumping operations with DCU)
2) The following technical data is applicable for the contacts: U max = 50 VDC
I max = 1 A
When connecting supply voltage, the turbopump
is started.
OOnnddeelliivveerryy::
PPiinn11,,PPiinn22,,PPiinn33aannddPPiinn44aarreebbrriiddggeeddiinntthhee
mmaattiinnggpplluugg.
CAUTION

14
3.11. Connecting The Serial Interface
RS 485
An external operating component DCU 001/DCU 600 oorr
HPU 001 oorr– using a level converter – an external computer
can be connected via the connection ”RS 485” on the TC 750
with the use of a shielded 8 pole modular connecting cable
contained with the delivery.
PIN Arrangement
1 not connected
2 +24V output (≤210 mA loading
capacity)
3 not connected
4 not connected
5 RS 485: D+ (DO / RI)
6 Gnd
7 RS 485: D- (DO / RI)
8 not connected
RS 485
1 ... 8
RT
RT
Level Converter
TC
PC
TC
5:D+, 7:D-
The electrical connections are internally optically decoupled.
Description Value
Serial Interface Type: RS 485
Baud rate: 9600 baud
Data file word length: 8 bit
Parity: no (no parity)
Start bits: 1
Stop bits: 1..2
(View from the
plug side of the
TC 750)
All units connected to the bus must have differing serial
interface addresses (parameter 797).
The group address of the TC 750 is 960.
Only safety low voltages (SELV) may be
connected to Serial Interface RS 485 .
All switched on remote functions have priority over the serial
interface functions.
Please refer to the separate Operating Instruc-
tions PM 0488 BN for more detailed
information on operations via Serial Interface
RS 485 and its electronic data.
Profibus DP Gateway TIC 250 is available (see Section 11.
Accessories) for connecting an Electronic Drive Unit TC 750
to a Profibus DP.
Please refer to the respective Operating Instructions
PM 0599 BN for detailed information on the operation of the
TIC 250.
☞
PLEASE NOTE
WARNING
It is possible to connect an RS 232 (e.g. PC) via
a level converter (please see Section 11.
Accessories).
Connecting The RS 485
Connecting to a fixed bus system:
➡Connect all units with D+ (pin 5/RS 485) and
D- (pin7/RS 485) to the bus.
➡The bus must be completed at both ends.
The connections should be made in accordance with the
specification of the Serial Interface RS 485.
☞
PLEASE NOTE
The serial interface is galvanically and safely separated from
the maximum supply voltage from the TC 750.
Connection
DCU 001
without power supply
PC
external
computer
DCU 600
with power supply
or
or
TC 750
HPU 001
RS 485 RS 232
level converter
RS 485
RS 485
RS 485
RS 485
Connecting the Serial Interface RS 485

15
TC 600
TC 750
X4
1
1
2
2
3
3
4
n.c.
Mains input
power supply
(90 - 132 /
185 - 265) VAC
TPS XXX/DCU XXX
X2
Protection conducter (PE)
Supply voltage, TC
GND
PE GY/YE
Br
Bl
1
2
3
4
5
6
FAN
Fan
M
Relay box
FV PUMP
1
2
3
4
5
6
L
N
PE
PE
N
L'
Pumping station (Imax = 16 A)
Mains input, pumping station
115/208/230 VAC
Connection, pumping station
VENT
1
2
3
4
5
6
Venting valve
TVF 005
HEAT/TMS
1
2
3
4
5
6
Relay box
Heating
Mains input, heating
115/208/230 VAC
HEATING
L
N
PE
PE
N
L'
REMOTE
1
2
3
4
5
6
+24 VDC*/max. 50 mA
Venting release
Motor TMP
Pumping station
Heating / Reset (opt. sealing gas)
Standby
PWM on (touch relation 25 - 75 %)
Switching output 1 (24 VDC / max. 50 mA)
Switching output 2 (24 VDC / max. 50 mA)
GND*
Contact current:
max. 6 mA / contact
7
8
9
10
12
13
14
15
11
Contact output 1: Switch point attaind
Contact output 2: Collective malfunction
Analog output 0-10 VDC
RS 485
1
2
3
4
5
6
7
8
1
2
3
4
5
6
7
8
n.c.
+24 VDC* / max. 200 mA (supply voltage, DCU)
n.c.
n.c.
n.c.
RS 485+/ (DO/RI)
GND* (mass connection, DCU)
RS 485- / (DO/RI)
3.12. Connections Diagram

16
4. Operations
4.1. Filling In The Lubricant
Turbopumps must be filled with lubricant before
being operated.
If possible fill in the lubricant in the fitting
position of the turbopump.
Pumps are designed to operate with Lubricant “F3”,
contained with the delivery 40 ml (see type plate).
If “F3” is heated above 300 °C, toxic vapours
which can harm the airways are given off. Do
not allow “F3” to come into contact with tobac-
co products (danger of poisoning when ignited).
The precautions necessary in the handling of
chemicals must be observed.
Filling in the lubricant
➡Unscrew lubricant filler screw 71 and, using the syringe
provided, inject approximately 40 ml of lubricant.
Where the set-up position is vertical or
horizontal the maximum lubricant level in the
sight glass is the lower edge of lubricant filler
screw 71.
☞
PLEASE NOTE
WARNING
CAUTION
4.2. Before Switching ON
Sections 4.2 to 4.6. refer only to operating the pump in its
condition on delivery, without the DCU/HPU operating unit.
The bridges ”venting release”, ”motor, TMP ON” and
”pumping station ON” are fitted in the remote control plug.
Please refer to Section 4.8. regarding the switching on with
the Display And Operating Unit DCU/HPU.
Turbopump rotors rotate at high speed. When
the high vacuum flange is open there is a
danger of injury and of damage to the pump
caused by objects falling into the pump.
Therefore never operate the pump with open
high vacuum flange!
Take care when pumping hazardous gases and
observe the safety precautions of the gas
manufacturer!
➡With sealing gas: Open the sealing gas supply.
➡Open cooling water supply and check flow.
➡Plug connecting cable 8a (see Section 11. Accessories)
into the TC 750 and connect with Power Unit TPS 600 on X2
(please see Section 3.5.).
The following pre-settings have been
programmed:
– Start-up time 11 min
– Rotation speed switchpoint 80%
– Automatic venting 50%
These settings can only be altered via Serial Interface RS 485
(DCU, HPU or PC); please refer to the respective operating
instructions.
☞
PLEASE NOTE
WARNING
WARNING
➡Screw back in lubricant filler screw 71 with the O-ring 75.
It is essential to ensure that the lubricating
pump is not over-filled with lubricant.
Overfilling will cause the excess lubricant to be
secreted from the hole for the lubricant filler
screw 71.
If necessary, dismantle the lubricating pump
from the pump and fill up with lubricant (see
Section 8.3.).
CAUTION
75
A
73 72 71
Filling in the lubricant
A Syringe
71 Lubricant filler screw
72 Lubricant drain screw
73 Sight glass
75 O-ring

17
When the unit is switched on for the first time
or after a lubricant change the contact to the
lubricating pump can open as a result of the
degassification of the lubricant. In such cases,
as for other malfunctions, the electronic drive
unit shuts down the turbopump.
➡The turbopump must be re-started with switch S1 on the
power supply.
☞
PLEASE NOTE
4.4. Gas Type Dependent Operations
Where high level gas loads and rotation speeds are involved,
the resulting friction subjects the rotor to the effect of great
heat. To avoid over-heating, a power rotation speed
characteristic line is implemented in the TC 750; this ensures
that where maximum gas loads are involved, the pump will
operate at any rotation speed without the danger of damage
arising. This power rotation speed characteristic line applies
only to operations with a cooling water temperature of 25 °C
and a cooling water flow rate of 100 l/h.
The maximum power is dependent on the type of gas. Two
characteristic lines are available for any type of gas in order
to fully exploit the power potential of the pump:
– Gas mode “0" for gases with molecular mass ≥40 as, for
example, Argon;
– Gas mode “1" for all lighter gases.
Works setting: Gas mode “0”
➡Set the applicable gas mode on the TC 750 via the DCU or
HPU (please refer to the respective operating
Instructions).
Pumping gases with molecular mass ≥40 with
the incorrect gas mode can cause damage to
the pump. When pumping noble gases heavier
then Argon ist can come to the destruction of
the pump. Please contact the manufacturer
before using such gases.
For the vertex of the power characteristic line please refer to
Section 9. Technical Data.
Maximum power is applied when the pump starts in order to
limit the time required. Once the set rotation speed is
attained, switching to the selected power characteristic line
is automatic.
If the gas dependent maximum power is exceeded, the
rotation speed is reduced until equilibrium between the
permissible power and gas friction is attained. The power
limitation serves to protect the pump against thermal over-
loading. In order to avoid rotation speed fluctuations it is
recommended to set, in rotation speed setting mode, the
equilibrium frequency or a somewhat lower frequency.
WARNING
Power
Frequency
DB
C
A
D-C = Gas mode «0»
B-A = Gas mode «1»
Run u
fnom
Gas type characteristic line
4.3. Switching ON
➡Switch on the turbopump with switch S1 on the power
supply.
– Once the self test has been successfully completed on the
TC 750 (duration approximately 30 seconds), both the
turbopump and the backing pump (if connected) begin
operating.
F1
Rear panel, TPS 600
S1 ON/OFF switch
X1 Mains connection
X2 Connection TC 750
F1 Fuse
F2 Fuse
S1 F2 X1 X2

18
0
10
20
30
40
50
60
70
80
90
100
110
0 0,3 0,4 0,5 0,6 0,7 0,8 0,9 1,0 1,1 1,2 1,3 1,4 1,5 1,6
0
1000
2000
3000
4000
5000
6000
0,2
≤ 25 ˚C Cooling water temperature
Gas throughput
[mbar l/s]
Fore vacuum pressure [mbar]
Gas throughput
[sccm]
Cooling water flow rate 100 l/h
0
5
10
15
20
25
30
35
40
0,2 0,3 0,4 0,5 0,6 0,7 0,8 0,9 1 1,1 1,2 1,3 1,4 1,5 1,6
0
500
1000
1500
2000
≤ 25 ˚C Cooling water temperature
0
Gas throughput [mbar l/s]
Fore vacuum pressure [mbar]
Gas throughput [sccm]
Cooling water flow rate 100 l/h
Gas type characteristics lines “Gas Mode 0”
Gas type characteristics lines “Gas Mode 1”
Operation with cooling water
temperature ≠≠25°C
As the automatic power reduction is designed for a cooling
water temperature of 25 °C, at higher temperatures you must
adjust the power yourself. If the cooling water temperature is
to high for the current power, the rotor can overheat and
being damaged that way. A cooling water temperature < 25
°C has no influence – the pump acts as with a cooling water
temperature of 25 °C.
To reduce power, either the gas throughput or the fore vacu-
um pressure has to be changed.
➡Specify one of the values. Draw a straight line to the gas
type characteristics line of the cooling water temperature
used.
➡Read off the other value from the adequate axis.
Example how to adjust the power:
1. The gas throughput is 12 mbar l/s, the Gas Mode is “0”, the
cooling water temperature is 35 °C.
2. The fore vacuum pressure has to be ≤0,3 mbar.
0
5
10
15
20
25
30
35
40
0,2 0,3 0,4 0,5 0,6 0,7 0,8 0,9 1 1,1 1,2 1,3 1,4 1,5 1,6
0
500
1000
1500
2000
Gas throughput [mbar l/s]
Gas throughput [sccm]
Fore vacuum pressure [mbar]
≤ 25 ˚C Cooling water temperature
0
Gas Mode "0"
1.
2.
Example how to adjust the power
The following gas type characteristics lines enable you to
adjust the power properly. At a cooling water temperature
between 25 °C and 35 °C you have to draw your own gas type
characteristics line.

19
4.5. Circulatory Lubrication
The ball bearing on the fore-vacuum side is supplied with
lubricant via the lubricating pump.
The circulation of the lubricant is monitored via a switching
contact. If there is insufficient lubricant, the electronic drive
unit switches off the turbopump. Monitoring is active only
from 60% of the final rotation speed.
If, at a rotation speed of > 60% of the final rotation speed (for
example through the degassification of the lubricant), the
contact opens for ≥2 minutes, the electronic drive unit
assumes a lubricant deficiency and switches off the
turbopump.
In rotation speed setting mode with set speed
below 60% of the rated rotation speed the
pump is first accelerated to 60% and then adju-
sted to the selected rotation speed.
➡Check the filling level of the lubricant.
➡Re-start the turbopump with switch S1 on the power
supply.
4.6. Switching OFF And Venting
To avoid contamination occurring when switching off, the
pump should be vented before shut-down.
➡Switch off both turbopump and backing pump on the
power supply at the same time with switch S1.
Where corrosive gas processes are involved, the sealing
gas supply should be shut off at the earliest after
approximately 10 minutes and both turbo pump and
backing pump switched off with switch S1.
➡Venting
There are three possibilities to vent turbopump:
–MMaannuuaallvveennttiinnggwith the use of the venting screw
(status on delivery).
–VVeennttiinnggwwiitthhtthheeVVeennttiinnggVVaallvveeTTVVFF000055((sseeeeSSeeccttiioonn1111..))
which is selectable via the remote control (please
see Section 4.9.), or via the DCU or HPU (please refer to
the respective operating instructions.
–VVeennttiinnggiinnttwwoo
ssttaaggeesswhen the vacuum chamber
should be vented as quickly as possible.
First stage: venting with a pressure increase rate of
15 mbar/s for 20 seconds.
Second stage: venting with an optionally large venting
valve.
The valve cross-section for a venting rate of 15 mbar/s
must be compatible with the size of the vacuum chamber.
Where small vacuum chambers are involved, the Pfeiffer
Vacuum Venting Valve TVF 005 can be used for first stage
venting.
➡Shut off water supply.
☞
PLEASE NOTE
4.7. Shutting Down For Longer Periods
Vacuum pumps are sometimes used to pump
aggressive or hazardous gases. There is a
danger of personal injury resulting from coming
into contact with process gases. Before
removing a turbopump from the system, first:
– Vent the turbopump with a neutral gas or dry air.
– Ensure that there is no residual process gas in the system
nor in the feeder lines.
If the turbopump is to be shut down for more than a year:
➡Remove turbopump from the system.
➡Change the lubricant (see Section 8.1.).
➡Close the high vacuum flange and evacuate the turbopump
via the fore-vacuum flange.
➡Vent turbopump via the venting connection with nitrogen
or dry air.
➡Close fore-vacuum and venting connection by blank
flanging.
➡Place the pump vertically on the high vacuum flange.
➡The pump must be stored in buildings within a temperature
range of -25 °C to +55 °C.
➡In rooms with moist or aggressive atmospheres, the turbo-
pump must be air-sealed in a plastic bag together with a
bag of desiccant.
If the pump has been shut down for 44yyeeaarrssa
bearing change must be carried out (please get
in touch with Pfeiffer Vacuum Service).
Usability of the F3 lubricant is 4 years without
operation.
4.8. Operations With The DCU 001/
DCU 600 or HPU 001
Operations with the DCU 001, DCU 600 or HPU 001 should be
carried out in accordance with the relevant Operating
Instructions:
– PM 0477 BN (DCU description),
– PM 0547 BN (Operating the pump with the DCU),
– PT 0101 BN (Display and Operating Unit HPU 001).
Operations with the DCU 001, DCU 600 and
HPU 001, the remote plug 8d (see Section 10.)
on the TC 750 should be disconnected.
☞
PLEASE NOTE
☞
PLEASE NOTE
WARNING

20
Standby
The pump can be operated optionally at 66% of its nominal
rotation speed (standby ON) or at its nominal rotation speed
(standby OFF).
Pumping Station
Any connected pumping station components are started up
(e.g. backing pump, venting valve, air cooling) and with simul-
taneous activation of the input ”motor, turbopump” the turbo-
pump is set in operation once the self test has been
successfully completed (duration approximately 30 seconds).
Rotation Speed Setting Operations
Via Input PWM
The supply of pulse width modulated signals (PWM) with a
ground frequency of 100 Hz ±20% with an amplitude of
maximum 24 V and a touch ratio of 25-75% enables the
rotation speed to be set in the range from 20-100% of the
nominal rotation speed. The recommended rotation speed is
50-100%.
4.9. Operations With The Remote Control
Unit
Remote control operations can be performed via the connec-
tion with the designation “REMOTE” on the TC 750.
The connection is via a 15 pole D-Sub connector.
Pin arrangement and remote plug functions please see table
under Section 3.10..
Inputs 2-6 are activated if they are connected with the +24 V
on pin 1 (active high).
OOnnddeelliivveerryytthheerreeiissaabbrriiddggeebbeettwweeeennPPiinn11,,
PPiinn22,,PPiinn33aannddPPiinn44oonntthheeTTCC775500mmaattiinnggpplluugg..
WWhheennooppeerraattiioonnssvvoollttaaggeeiissssuupppplliieeddaannddaa
ssuucccceessssffuullllyyccoommpplleetteedd..
TC 750 self-test the turbopump and any
connected backing pump will be started.
Venting Release (Optional)
AAuuttoommaattiiccvveennttiinngg
(works setting on the remote plug pin 2 high):
CAUTION
If no signal is present the pump runs up to its final rotation
speed.
Available as accessories:
– A PWM adapter box for rotation speed setting operations
for the turbopump.
Switching Outputs
Switching outputs 1 and 2 can be loaded with a maximum
24 V / 50 mA per output. The following functions are assigned
to the switching outputs:
SSwwiittcchhiinnggoouuttppuutt11::Active high when the rotation speed
switchpoint is attained. The switchpoint
for the turbopump is set at 80% of the
nominal rotation speed. It can be used,
for example, for a message ”pump
ready to operate”.
SSwwiittcchhiinnggoouuttppuutt22::Active low with a malfunction -
collective malfunction message
(see Section 6.)
The connection of a relay is made between pin 10 (mass) and
the respective switching output pin 8 or pin 9 (see Section
3.12. Connections Diagram).
T
0
U20%*f 100%*fend
max. +33V
min. +13V
max. +7V
min. -33V
TT
PWM
*25% *75%
T
= 10ms (1±20%)
f=100Hz (1±20%)
end
PWM
PWM
PWM
1) When mains power is restored the venting process is interrupted.
Venting OFF
(works setting on remote plug pin 2 low):
Venting does not take place.
Other venting modes:
Other venting modes can be selected via the DCU or HPU.
Motor, Turbopump
When the pumping station is switched on and once the self
test has been successfully completed (duration approxi-
mately 30 seconds), the turbopump is set in operation.
During operations, the turbopump can be switched on and off
while the pumping station is switched on.
Thereby the turbopump will not be vented.
Heating/Reset
Heating (optional)
Once the rotation speed switchpoint is attained the heating
unit is switched on; when the rotation speed switchpoint is
fallen below the heating unit is switched off.
Reset
The heating input has two functions (please see Section 3.10.,
point 5 ”Reset”).
VVeennttiinnggSSwwiittcchhooffffMMaaiinnssppoowweerrffaaiilluurree11))
ffrreeqquueennccyytthheeppuummppiinnggssttaattiioonn
< 315 Hz venting valve opens venting valve opens on attain-
(correspond to 50% for 3600 s (1 h, ment of the venting frequency
of the final rotation works setting) and closes on attainment
speed) of approximately 15% of
the final rotation speed