Pfeiffer HiPace 400 User manual

PT 0210 BEN/G (1604)
OPERATING INSTRUCTIONS EN
Translation of the original instructions
HIPACE 400
Turbopump

Table of contents
2
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.1.1 Applicable documents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2.1 Safety instructions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2.2 Pictographs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.2.3 Instructions in the text . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.2.4 Abbreviations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.2.5 Symbols used . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.2 Protective equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.3 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.4 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3 Transport and storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
3.1 Transport. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
3.2 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
4 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
4.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
4.1.1 Pump types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
4.1.2 Pump features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
4.1.3 Variants . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
4.1.4 Scope of delivery. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
4.2 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
4.2.1 Cooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
4.2.2 Rotor bearing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
4.2.3 Drive . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
4.3 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
5.1 Preparatory work. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
5.2 Set-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
5.2.1 Earthquake safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
5.2.2 Use of a splinter shield or protection screen . . . . . . . . . . . . . . . . . 14
5.2.3 Vibration damper. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
5.3 Mounting orientation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
5.4 Connecting the high vacuum side. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
5.4.1 Installation of ISO-K flange with ISO-K flange . . . . . . . . . . . . . . . 16
5.4.2 Installation of ISO-K flange with ISO-F flange. . . . . . . . . . . . . . . . 17
5.4.3 Installation of ISO-F with ISO-F flange . . . . . . . . . . . . . . . . . . . . . 18
5.4.4 Installation of CF- flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
5.5 Connecting the fore-vacuum side . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
5.6 Connections to the turbopump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
5.6.1 Electronic drive unit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
5.6.2 Earthing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
5.6.3 Power and electrical supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
5.6.4 Remote plug . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
5.7 Accessory connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
5.7.1 Air cooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
5.7.2 Venting valve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
5.7.3 Sealing gas connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
5.7.4 Heating jacket . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
5.7.5 Water cooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26

Table of contents
3
6 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
6.1 Commissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
6.2 Operation modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
6.3 Function description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
6.3.1 Operation without operating unit . . . . . . . . . . . . . . . . . . . . . . . . . . 28
6.3.2 Operation via "remote" connection . . . . . . . . . . . . . . . . . . . . . . . . 28
6.3.3 Operation with DCU or HPU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
6.3.4 Operation via fieldbus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
6.4 Monitoring of the operation conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
6.4.1 Temperature monitoring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
6.4.2 Operation display via LED. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
6.5 Switching off and venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
6.5.1 Switching off . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
6.5.2 Venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
7 Maintenance / replacement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
7.1 Maintenance intervals and responsibilities . . . . . . . . . . . . . . . . . . . . . . . . 30
7.2 Replacing the operating fluid reservoir . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
7.3 Replacing the electronic drive unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
7.3.1 Rotation speed set value. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
8 Decommissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
8.1 Shutting down for longer periods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
8.2 Re-starting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
8.3 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
9.1 Rectifying malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
10 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
11 Spare parts HiPace 400. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
12 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
12.1 HiPace 400, 48 V DC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
12.2 Differences at HiPace 400, 24 V DC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
13 Technical data and dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
13.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
13.2 HiPace 400, 48 V DC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
13.3 Differences at HiPace 400, 24 V DC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
13.4 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42

4
About this manual
1 About this manual
1.1 Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning
of the designated product and provides the most important information for safe use of
the unit. The description follows applicable EU guidelines. All information provided in this
operating manual refers to the current state of the product's development. The documen-
tation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from
www.pfeiffer-vacuum.com.
1.1.1 Applicable documents
*also available via www.pfeiffer-vacuum.com
1.2 Conventions
1.2.1 Safety instructions
The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification stan-
dards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this
document, the following hazard levels and information are considered:
HiPace 400, depending on the model Operating instructions
Operating instructions "Electronic drive unit TC 400", standard PT 0203 BN*
Operating instructions "Electronic drive unit TC 400 PB", Profibus PT 0244 BN*
Operating instructions "Electronic drive unit TC 400 E74", acc. Semi E74 PT 0302 BN*
Operating instructions "Electronic drive unit TC 400 DN", DeviceNet PT 0352 BN*
Operating instructions "Electronic drive unit TC 400 EC", EtherCAT PT 0452 BN*
Declaration of conformity Part of this document
DANGER
Imminent danger
Indicates an imminent hazardous situation that will result in death or serious injury.
WARNING
Possibly imminent danger
Indicates an imminent hazardous situation that can result in death or serious injury.
CAUTION
Possibly imminent danger
Indicates an imminent hazardous situation that can result in minor or moderate injury.
NOTICE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.

About this manual
5
1.2.2 Pictographs
1.2.3 Instructions in the text
Work instruction: here you have to do something.
1.2.4 Abbreviations
DCU: Display Control Unit
HPU: Handheld Programming Unit
TC: Electronic drive unit for turbopump
TPS: Mains pack
1.2.5 Symbols used
The following symbols are used consistently throughout the diagrams:
High vacuum flange
Fore-vacuum flange
Vacuum flange of the backing pump
Exhaust flange of the backing pump
Electrical connection
Sealing gas connection
Venting connection
Cooling water connection
Prohibition of an action to avoid any risk of accidents, the disregarding
of which may result in serious accidents
Warning of a displayed source of danger in connection with operation of
the unit or equipment
Command to perform an action or task associated with a source of dan-
ger, the disregarding of which may result in serious accidents
Important information about the product or this document
V

6
Safety
2Safety
2.1 Safety precautions
●Do not expose any body parts to the vacuum.
●Observe all safety and accident prevention regulations.
●Regularly check the proper observance of all safety measures.
●Power supply: The turbopump power supply must apply to the requirements of dou-
ble insulation between mains input voltage and operating voltage according to the reg-
ulations of IEC 61010 and IEC 60950. Therefore Pfeiffer Vacuum recommends to use
exclusively original-power packs and -accessories. Only in this case Pfeiffer Vacuum
is able to guarantee the compliance of the European and North American guidelines.
●A safe connection to the protective earthing conductor (PE) is recommended (protec-
tion class III).
Duty to inform
Each person involved in the installation, operation or maintenance of the vacuum pump
must read and observe the safety-related parts of these operating instructions.
The operator is obligated to make operating personnel aware of dangers originating
from the vacuum pump, the pumped medium and the entire system.
Installation and operation of accessories
Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The in-
stallation, operation and maintenance of connected devices are described in detail in
the operating instructions of the individual components.
For information on order numbers of components, see "Accessories".
Use original accessory parts only.
NOTICE
Checking the safety system against excess rotation speed
To provide the functioning of the integrated safety system for avoiding excess rotation
speed, the pump must run-up from the standstill at least once a year.
Switch off the pump and await the complete standstill (rotation speed = 0 Hz).
Run-up the pump according to this operating instructions.
WARNING
Danger of unsafe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Consult Pfeiffer Vacuum for special requirements.
WARNING
Danger due to lack of power disconnection device
Pump and electronic drive unit are not equipped with a power disconnection device. In-
stallation of a user-supplied power disconnection device in accordance with SEMI-S2.
Fit a circuit breaker with an interruption rating of min. 10,000 A.
WARNING
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so you can disconnect it at any
time.

Safety
7
●Do not loosen any plug connection during operations.
●Wait for the rotor to reach standstill before peforming work on the high vacuum flange.
●Keep leads and cables well away from hot surfaces (> 70 °C).
●Never fill or operate turbopump with cleaning agent.
●Do not operate the turbopump with open high vacuum flange.
●Do not carry out any unauthorized modifications or conversions to the pump.
●When returning the turbopump observe the shipping instructions.
2.2 Protective equipment
Determined situations concerning the handling of vacuum pumps require wearing of per-
sonal protective equipment. The owner, respectively the employer are obligated to pro-
vide an adequate equipment to any operating persons.
2.3 Proper use
DANGER
Danger to health by hazardous substances during maintenance or installation
Depending on the process vacuum pumps, components or operating fluids can be con-
taminated by toxic, reactive or radioactive substances.
Wear adequate protective equipment during maintenance and repairs or in case of
reinstallation.
kg
WARNING
Risk of injury through falling objects
When transporting vacuum pumps by hand, there is a danger through loads slipping and
falling down.
Carry small and mid-size vacuum pumps two-handed.
Carry vacuum pumps > 20 kg by a suitable lifting device.
Wear safety shoes with steel toe cap according to directive EN 347.
CAUTION
Risk of injury through hot surfaces
Vacuum pumps can become hot during operation.
Allow the pump to cool before maintenance and repairs.
If necessary wear protective gloves according to EN 420.
CAUTION
Risk of injury through sharp edges
Rotor and stator disks of turbopumps have very sharp edges.
Before any working wait for the complete standstill of the pump.
Do not reach in the high vacuum flange.
If necessary wear protective gloves according to EN 420.
NOTICE
EC conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifies
the original product or installs additional components.
Following installation into a plant and before commissioning, the operator must check
the entire system for compliance with the valid EU directives and reassess it accord-
ingly.

8
Safety
●The vacuum pump may only be used to generate a vacuum.
●Only operate the turbopump with an approved backing pump.
2.4 Improper use
Improper use will cause all claims for liability and warranties to be forfeited. Improper use
is defined as usage for purposes deviating from those mentioned above, especially:
●installation of the pump with unspecified mounting material
●pumping of corrosive or explosive media
●pumping of condensing vapors
●pumping of liquids
●pumping of dusts
●operation with improper high gas throughput
●operation with improper high fore-vacuum pressures
●operation with improper gas mode
●operation with improper high levels of insulated heat input
●operation in improper high magnetic fields
●venting with improper high venting rates
●use of the vacuum pump to generate pressure
●operation of the devices in areas with ionizing radiation
●operation in potentially explosive areas
●use of the devices in systems in which impact-like stress and vibrations or periodic
forces affect the devices
●use of accessories or spare parts, which are not named in this manual
warranty seal
Closure seal
The product is sealed at the factory. Damaging or removal of a closure seal leads to the
loss of liability and warranty entitlements.
Do not open the product within its warranty period!
For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-
um Service.

Transport and storage
9
3 Transport and storage
3.1 Transport
Reuse the transport container of the vacuum pump.
– Transport or ship vacuum pumps in the original packing preferably.
Only remove the protective covers from the high vacuum and the fore-vacuum side
immediately before connection.
Keep the original protective covers.
Always transport the turbopump in its upright position.
3.2 Storage
Close the flange openings by using the original protective covers.
Close further connection ports by using the corresponding protective covers.
Store the pump only indoors at temperatures between -25 °C and +55 °C.
In rooms with moist or aggressive atmospheres, the pump must be airproof shrink-
wrapped in a plastic bag together with a bag of desiccant.

10
Product description
4 Product description
4.1 Product identification
4.1.1 Pump types
The product designation consists of a family designation (1), the size (2), which is orient-
ed on the pumping speed, and if applicable the additional properties (3) of the pump.
HiPace(1) 400(2) (3)
4.1.2 Pump features
This product has been tested to the requirements of CAN/CSA-C22.2 No. 61010-1, sec-
ond edition, including Amendment 1, or a later version of the same standard incorporat-
ing the same level of testing requirements.
For information about other certifications, if applicable, please see the signet on the prod-
uct or:
●www.tuvdotcom.com
●TUVdotCOM-ID 0000021320
To correctly identify the product when communicating with Pfeiffer Vacuum, always have
the information from the rating plate available.
Fig. 1: Example for a rating plate
4.1.3 Variants
●HiPace 400 with TC 400 and 24 V DC ± 5 %
●HiPace 400 with TC 400 and 48 V DC ± 5 %
4.1.4 Scope of delivery
●Turbopump with electronic drive unit
●Mating plug for the connection "remote" on the TC 400 (type dependent)
●Mating plug for the connection "E74" on the TC 400 (type dependent)
●Protective cover for the high vacuum flange and the fore-vacuum flange
●Operating instructions
1. Family designation 2. Model designation 3. Property designation
HiPace 400 = Model designation of
the pump related to its pump-
ing speed class
none = Standard version
U= Upside-down installation orientation
C= Corrosive gas version
P= Process
M= Active magnetic bearing
T= Temperature management system
E= High Efficiency
H= High Compression
I= Ion implantation
Characteristics HiPace 400
HV flange DN 160 ISO-K DN 160 ISO-F DN 160 CF-F
Flange material Aluminium Aluminium Stainless steel
Mod.:
M.-No.:
Ser. -No.:
Oil:
S(N
2
):
n,f:
Made in Germany
HiPace 300
DN 100 ISO-K, 3P
PM P03 900
---
260 l/s
60000 1/min, 1000 Hz
Weight: 6.7 kg
D-35614 Asslar

Product description
11
4.2 Function
The turbopump HiPace 400 forms a complete unit together with the electronic drive unit
TC 400. For the voltage supply only Pfeiffer Vacuum power supplies may be used
(e.g.TPS or DCU).
4.2.1 Cooling
●Water cooling
●Air cooling (optional)
In the case of excess temperature the electronic drive unit reduces the drive power au-
tomatically. Depending on the application and the HiPace different cooling variants are
selectable.
4.2.2 Rotor bearing
Hybrid bearing TurboDrag pump
●High vacuum side: maintenance-free permanent magnetic bearing
●Fore-vacuum side: ceramic ball bearing
4.2.3 Drive
Electronic drive unit TC 400
Fig. 2: View of HiPace 400 with TC 400
3 Pump lower part
4 Pump casing
8 Electronic drive unit TC 400
14 Cooling water connection
16 Sealing gas connection
17 Venting connection
20 Fore-vacuum connec-
tion
remote 20
17
163 14
4
8

12
Product description
4.3 Range of application
The pump HiPace 400 must be installed and operated under the following ambient con-
ditions:
Installation location weather protected (indoors)
Protection category IP 54
Protection class III
Temperature +5 °C to +35 °C with air cooling
+5 °C to +40 °C with water cooling
Relative humidity max. 80 %, at T 31 °C, up to max. 50% at T 40 °C
Atmospheric pressure 750 hPa - 1060 hPa
Installation altitude 2000 m max.
Degree of pollution 2
Permissible surr. magnetic field 6 mT
Overvoltage category II
Connection voltage TC, depending on
the variants
24 V DC ±5%
48 V DC ±5%
Remarks to ambient conditions
The specified permissible ambient temperatures apply to operation of the turbopump at
maximum permissible fore-vacuum pressure or at maximum gas throughput depending
on the cooling method. The turbopump is intrinsically safe by a redundant temperature
monitoring.
●By reducing the fore-vacuum pressure or gas throughput, the turbopump can be op-
erated at higher ambient temperatures.
●If the maximum permissible operating temperature of the turbopump is exceeded, the
electronic drive unit reduces drive power first and switches off then, if necessary.

Installation
13
5 Installation
5.1 Preparatory work
When installing the pump, observe the following conditions:
●the ambient conditions specified for the range of application
●When using a casing heating and a water cooling unit the temperature of the connect-
ed flange of the vacuum chamber must not exceed 120 °C.
●The pump may be fastened to the floor only after consultation with Pfeiffer Vacuum.
●It is not allowed to operate the device in systems where impact-like stresses and vi-
brations or periodically forces occur.
Ensure sufficient cooling for the turbopump.
Where magnetic fields > 6 mT are involved, a suitable shielding must be used. Check
installation location and consult Pfeiffer Vacuum if needed!
The maximum permissible rotor temperature for the turbopump is 90 °C. If high tem-
peratures arise for process reasons, the radiated heat input must not exceed 4.2 W.
Install suitable screening sheets, if necessary (design information on request).
5.2 Set-up
●Ensure the greatest possible cleanliness when installing any high vacuum parts. Un-
clean components prolong the pump-down time.
●All flange components must be grease-free, dust-free and dry at installation.
●The operating fluid reservoir is already installed and filled for the turbopump HiPace
400.
WARNING
Danger from the turbopump being ripped off
If the rotor is suddenly blocked, torques of up to 4200 Nm could occur, which could
cause the turbopump to be ripped off if it is not properly affixed. The energy that this
would release could throw the entire pump or pieces from its interior through the room.
That would cause severe, possibly fatal, injuries as well as serious property damage.
Carefully follow the installation instructions in this handbook.
Only use approved original parts from Pfeiffer Vacuum (Accessories) for the installa-
tion.
Installation and operation of accessories
Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The in-
stallation, operation and maintenance of connected devices are described in detail in
the operating instructions of the individual components.
For information on order numbers of components, see "Accessories".
Use original accessory parts only.

14
Installation
5.2.1 Earthquake safety
An earthquake can result in contact with the safety bearings. All forces occuring hereby
are safely absorbed by the properly installed flange connections.
Secure the vacuum chamber against shifting and tipping on customers side.
5.2.2 Use of a splinter shield or protection screen
Pfeiffer Vacuum centering rings with splinter shield or protection screen in the high vac-
uum flange protect the turbopump against foreign bodies coming from the chamber.
Thus, the pumping speed of the pump is reduced.
5.2.3 Vibration damper
Fig. 3: Example: How to secure against shifting and tipping by external tremors
= Safety connection, implementation each by the customer
VACUUM CHAMBER
Reduced volume flow rate in %
H2He N2Ar
Splinter shield DN 100 4 7 19 22
Protection screen DN 100 2 1 5 5
WARNING
Danger from the turbopump and vibration damper being torn-off
In case of sudden blocking of the rotor, an applied vibration damper cannot compensate
any of the occurring forces. There is a danger of the turbopump being torn-off and there-
by resulting severest injuries and property damages. Applicable safeguards must be
taken to compensate possible occurring torques.
Definitely consult with Pfeiffer Vacuum.
Do not exceed the max. permissible temperature at the vibration damper (100 °C).

Installation
15
5.3 Mounting orientation
When using dry backing pumps, Pfeiffer Vacuum HiPace pumps are designed for instal-
lation in any orientation.
Support pipes in front of the vacuum pump or remove them. No force from the pipe
system may be exerted on the fixed pump.
To avoid contamination via the fore-vacuum line when using oil-sealed backing pumps
the fore-vacuum flange should always point vertically downward (± 25°).
Fig. 4: Recommended orientation of the fore-vacuum flange
The maximum axial loading capacity of the high vacuum flange is 1000 N (equals
100 kg). A one-sided load on the high vacuum flange is not permitted.
25° max
VV
VV

16
Installation
5.4 Connecting the high vacuum side
If the rotor is suddenly blocked, the torques arising from the system and the high vacuum
flange must be absorbed. Only the components listed in the following can be used to fas-
ten the turbopumps to the high vacuum flange. The installation elements for turbopumps
are special designs by Pfeiffer Vacuum. In all operating conditions, the tensile strength
of the flange material must be at least 170 N/mm2.
Secure the vacuum chamber against shifting and tipping on customers side.
5.4.1 Installation of ISO-K flange with ISO-K flange
For the installation the following components are exclusively authorized:
●the valid mounting kit of the Pfeiffer Vacuum accessories programme
●mounting materials including protection screen or splinter shield are optionally avail-
able
Mind that the sealing surfaces are not damaged.
1) Connect the flanges according to the drawing and with the component parts of the
mounting kit.
2) Use the required number of 16 claw clamps.
3) Tighten the claw clamps crosswise in three steps.
4) Tightening torque: 5, 15, 25 ±2 Nm
DANGER
Danger to life - impermissible fastening
Twisting or tearing-off is possible in case the rotor is suddenly blocked due to the fas-
tening of pumps on a vacuum chamber with different flange variants.
Use only the correct mounting kit from Pfeiffer Vacuum.
Pfeiffer Vacuum will not accept any liability for all damages resulting from impermis-
sible fastening.
NOTICE
Observe shape tolerances for the counter flange
Unevennesses of the customer supplied counter flange can lead to warping of the pump
casing despite proper fastening. Leakiness and negative running characteristics can be
the result.
Do not exceed an evenness of max. 0.05 mm for the whole surface.
Mounting of ISO flanges
If the rotor suddenly blocks the connection of high vacuum flanges of types ISO-KF or
ISO-K can lead to twisting despite proper installation.
●The tightness of the high vacuum flange is not at risk thereby.

Installation
17
5.4.2 Installation of ISO-K flange with ISO-F flange
The connection types for installation of ISO-K to ISO-F flange are "hex screw and thread-
ed hole," "stud screw and threaded hole," and "stud screw and through hole".
For the installation the following components are exclusively authorized:
●the valid mounting kit of the Pfeiffer Vacuum accessories programme
●mounting materials including protection screen or splinter shield are optionally avail-
able
Hexagon screw and threaded hole
Mind that the sealing surfaces are not damaged.
1) Put the collar flange over the high vacuum flange of the turbopump.
2) Insert the retaining ring into the groove of the high vacuum flange.
3) Fasten the turbo pump with collar flange and centering ring to the counter flange as
shown in the graphic.
4) Use the required number of 8hex screws with washer.
5) Screw hex screws 1.5 x d into the threaded holes.
– The tensile strength of the flange material must be at least 270 N/mm2in all oper-
ating conditions.
6) Tighten the hex screws crosswise in three steps.
7) Tightening torque DN 160: 5, 10, 16 ± 1 Nm
Stud screw and threaded hole
Mind that the sealing surfaces are not damaged.
1) Use the required number of 8stud screws and nuts.
2) Screw in the stud screws with the shorter threaded end 2.5 x d in the bore holes on
the counter flange.
3) Put the collar flange over the high vacuum flange of the turbopump.
4) Insert the retaining ring into the groove of the high vacuum flange.
5) Fasten the turbo pump with collar flange and centering ring to the counter flange as
shown in the graphic.
6) Tighten the nuts crosswise in three steps.
7) Tightening torque DN 160: 5, 10, 16 ± 1 Nm
Stud screw and through hole
Mind that the sealing surfaces are not damaged.
1) Put the collar flange over the high vacuum flange of the turbopump.
2) Insert the retaining ring into the groove of the high vacuum flange.
3) Fasten the turbo pump with collar flange and centering ring to the counter flange as
shown in the graphic.
4) Use the required number of 8stud screws and nuts.
5) Tighten the nuts crosswise in three steps.
6) Tightening torque DN 160: 5, 10, 16 ± 1 Nm
1.5xd
2.5xd

18
Installation
5.4.3 Installation of ISO-F with ISO-F flange
The connection types for installation of ISO-F to ISO-F flange are "hex screw and thread-
ed hole," "stud screw and threaded hole," and "stud screw and through hole".
For the installation the following components are exclusively authorized:
●the valid mounting kit of the Pfeiffer Vacuum accessories programme
●mounting materials including protection screen or splinter shield are optionally avail-
able
Hexagon screw and threaded hole
Mind that the sealing surfaces are not damaged.
1) Connect the flanges according to the drawing and with the component parts of the
mounting kit.
2) Use the required number of 8hex screws with washer.
3) Screw hex screws 1.5 x d into the threaded holes.
– The tensile strength of the flange material must be at least 270 N/mm2in all oper-
ating conditions.
4) Tighten the hex screws crosswise in three steps.
5) Tightening torque DN 160: 10, 20, 38 ± 3 Nm
Stud screw and threaded hole
Mind that the sealing surfaces are not damaged.
1) Use the required number of 8stud screws and nuts.
2) Screw in the stud screws with the shorter threaded end 2.5 x d in the bore holes on
the counter flange.
3) Connect the flanges according to the drawing and with the component parts of the
mounting kit.
4) Tighten the nuts crosswise in three steps.
5) Tightening torque DN 160: 10, 20, 38 ± 3 Nm
Stud screw and through hole
Mind that the sealing surfaces are not damaged.
1) Connect the flanges according to the drawing and with the component parts of the
mounting kit.
2) Use the required number of 8stud screws and nuts.
3) Tighten the nuts crosswise in three steps.
4) Tightening torque DN 160: 10, 20, 38 ± 3 Nm
1.5xd
2.5xd

Installation
19
5.4.4 Installation of CF- flanges
The connection types for installation of CF to CF flange are "hexagon screw and through
hole", "stud screw and threaded hole" as well as "stud screw and through hole".
●the valid mounting kit of the Pfeiffer Vacuum accessories programme
●A copper seal
●protection screen or splinter shield are optionally
Hexagon screw and through hole
1) If used: Insert protective screen or splinter shield with the clamping lugs downward
into the high vacuum flange of the turbopump.
2) Place the seal exactly in the hollow.
3) Connect the flanges using 16 hexagon-head screws (M8) with washers and bolts.
4) Tighten the screw connections circularly.
5) Tightening torque: 22 ± 2 Nm
6) After this, check the torque, since flowing of the sealing material may make it neces-
sary to tighten the screws again.
Stud screw and threaded hole
1) Screw in the stud screws (16 pieces, M8) with the shorter threaded end into the
threaded holes of the counter flange.
2) If used: Insert protective screen or splinter shield with the clamping lugs downward
into the high vacuum flange of the turbopump.
3) Place the seal exactly in the hollow.
4) Connect the flanges using washers and nuts.
5) Tighten the screw connections circularly.
6) Tightening torque: 22 ± 2 Nm
7) After this, check the torque, since flowing of the sealing material may make it neces-
sary to tighten the screws again.
Stud screw and through hole
1) If used: Insert protective screen or splinter shield with the clamping lugs downward
into the high vacuum flange of the turbopump.
2) Place the seal exactly in the hollow.
3) Connect the flanges using 16 hexagon-head screws (M8) with washers and bolts.
4) Tighten the screw connections circularly.
5) Tightening torque: 22 ± 2 Nm
6) After this, check the torque, since flowing of the sealing material may make it neces-
sary to tighten the screws again.
NOTICE
Assembly of CF flanges!
Loss of sealing capability due to a lack of cleanliness when handling the sealing and CF
flange.
Assemble the sealing dry and oil-free.
Always wear gloves when handling the components.
Do not damage the surfaces and cutting edges.

20
Installation
5.5 Connecting the fore-vacuum side
Recommendation: As backing pump, use a suitable vacuum pump from the Pfeiffer
Vacuum programme.
With rigid pipe connections: Install bellows for attenuation of vibrations in the connec-
tion line.
Connect the fore-vacuum line with small-flange components or threaded hose cou-
plings. Do not narrow the free cross section of the fore-vacuum flange!
The backing pump is connected electrically via a relay box.
For connection and operation of the backing pump see its operating instructions.
WARNING
Damage to health due to poisonous gases
Process gases can damage health and contaminate the environment.
Safely lead away the gas emission from the backing pump!
Observe all safety recommendations of the gas producer.
Fig. 5: Connecting the backing pump
20 Fore-vacuum connection
20a Backing pump
20.1 Centering ring
20.2 Clamping ring
20.3 Vacuum components
20 20.1 20.2 20.3
20a
NOTICE
Design of the fore-vacuum connection regarding sudden twisting of the pump
If the rotor suddenly blocks the connection of high vacuum flanges of types ISO-KF or
ISO-K can lead to twisting despite proper installation.
Keep masses small, which can be installed directly to the pump.
Connect flexible line elements directly to the turbopump, if necessary.
Backing pump control
Backing pump control via electronic drive unit of the turbopump is possible using a relay
box or respective connection cables of the accessory programme.
Refer to the operating instructions of the respective accessory.