Pfeiffer HiPace 300 User manual

Translation of the original instructions
Operating Instructions
EN
PT 0200 BEN/C (1008)
HiPace 300
Turbopump

2
Table of contents
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.2 Protective equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.3 Proper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.4 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3 Transport and storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.1 Transport . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.2 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
4 Product description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
4.1 Product identification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
4.2 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
4.3 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10
5 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11
5.1 Set-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11
5.2 Preparatory work. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11
5.3 Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11
5.4 Connections to the turbopump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .15
6 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
6.1 Commissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
6.2 Operation modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
6.3 Function description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
6.4 Monitoring of the operation conditions. . . . . . . . . . . . . . . . . . . . . . . . . . . 24
6.5 Switching off and venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
7 Maintenance / replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
7.1 Maintenance intervals and responsibilities . . . . . . . . . . . . . . . . . . . . . . . . 25
7.2 Replacing the operating fluid reservoir . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
7.3 Replacing the electronic drive unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
8 Decommissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
8.1 Shutting down for longer periods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
8.2 Re-starting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
8.3 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
9.1 Rectifying malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
10 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
11 Spare parts HiPace 300 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
12 Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
12.1 HiPace 300, 24 V DC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
12.2 Differences at HiPace 300, 48 V DC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
13 Technical data and dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
13.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
13.2 HiPace 300, 24 V DC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
13.3 Differences at HiPace 300, 48 V DC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
13.4 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
Declaration of conformity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37

3
About this manual
1 About this manual
1.1 Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the func-
tioning of the designated product and provides the most important information for
safe use of the unit. The description follows applicable EU guidelines. All informa-
tion provided in this operating manual refer to the current state of the product's de-
velopment. The documentation remains valid as long as the customer does not
make any changes to the product.
Up-to-date operating instructions can also be downloaded from
www.pfeiffer-vacuum.net.
Applicable docu-
ments
*also available via www.pfeiffer-vacuum.net
For information about other certifications, if applicable, please see the signet on
the product or:
• www.tuvdotcom.com
• TUVdotCOM-ID 0000021320
1.2 Conventions
Safety instructions The safety instructions in Pfeiffer Vacuum operating manuals are the result of risk
evaluations and hazard analyses and are oriented on international certification
standards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844.
In this document, the following hazard levels and information are considered:
HiPace 300 Operating instructions
Operating instructions "Electronic drive unit TC 400" PT 0203 BN*
Declaration of conformity Part of this document
DANGER
Immediate danger
Death or very severe injuries can occur.
WARNING
Possible danger
Injuries or severe property damages can occur.
CAUTION
Possible danger
Injuries or property damages can occur.
NOTE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.

4
About this manual
Pictograph
definitions
Instructions in the
text
Work instruction: here you have to do something.
Abbreviations used DCU:Display and operating unit
HPU:Handheld programming unit
TC:Electronic drive unit for turbopump
TPS:Mains pack
Symbols used The following symbols are used consistently throughout the diagrams:
High vacuum flange
Fore-vacuum flange
Electric connection
Cooling water connection
Venting connection
Sealing gas connection
Prohibition of an action or activity in connection with a
source of danger, the disregarding of which may result in
serious accidents.
Warning of a displayed source of danger in connection
with operation of the unit or equipment.
Command to perform an action or task associated with a
source of danger, the disregarding of which may result in
serious accidents.
H
VV
F
SG

5
Safety
2Safety
2.1 Safety precautions
• Do not expose any body parts to the vacuum.
• Observe all safety and accident prevention regulations.
• Regularly check the proper observance off all safety measures.
•Power supply: The turbopump power supply must apply to the requirements of
double insulation between mains input voltage and operating voltage according
to the regulations of IEC 61010 and IEC 60950. Therefore Pfeiffer Vacuum recom-
mends to use exclusively original-power packs and -accessories. Only in this
case Pfeiffer Vacuum is able to guarantee the compliance of the European and
North American guidelines.
• A safe connection to the protective earthing conductor (PE) is recommended
(protection class III).
• Do not loosen any plug connection during operations.
• Wait for the rotor to reach standstill before peforming work on the high vacuum
flange.
NOTE
Duty to inform
Each person involved in the installation, operation or maintenance of the vacuum pump
must read and observe the safety-related parts of these operating instructions.
The operator is obligated to make operating personnel aware of dangers originating
from the vacuum pump, the pumped medium and the entire system.
NOTE
Installation and operation of accessories
Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The in-
stallation, operation and maintenance of connected devices are described in detail in
the operating instructions of the individual components.
For information on order numbers of components, see "Accessories".
Use original accessory parts only.
NOTE
Checking the safety system against excess rotation speed
To provide the functioning of the integrated safety system for avoiding excess rotation
speed, the pump must run-up from the standstill at least once a year.
Switch off the pump and await the complete standstill (rotation speed = 0 Hz).
Run-up the pump according to this operating instructions.
WARNING
Danger - Electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Consult Pfeiffer Vacuum for special requirements.
WARNING
Danger of electric shock
In case of defect, the parts connected to the power supply are under voltage.
Always keep the mains connection freely accessible so you can disconnect it at any
time.

6
Safety
• Keep leads and cables well away from hot surfaces (> 70 °C).
• Never fill or operate turbopump with cleaning agent.
• Do not operate the turbopump with open high vacuum flange.
• Do not carry out any unauthorized modifications or conversions to the pump.
• When returning the turbopump observe the shipping instructions.
2.2 Protective equipment
Determined situations concerning the handling of vacuum pumps require wearing
of personal protective equipment. The owner, respectively the employer are obli-
gated to provide adequate equipment to any operating persons.
2.3 Proper use
• The vacuum pump may only be used to generate a vacuum.
• Only operate the turbopump with an approved backing pump.
DANGER
Danger to health by hazardous substances during maintenance or installation
Depending on the process vacuum pumps, components or operating fluids can be con-
taminated by toxic, reatcive or radioactive substances.
Wear adequate protective equipment during maintenance and repairs or in case of
reinstallation.
kg
WARNING
Risk of injury through falling objects
When transporting vacuum pumps by hand, there is a danger through loads slipping and
falling down.
Carry small and mid-size vacuum pumps two-handed.
Carry vacuum pumps > 20 kg by a suitable lifting device.
Wear safety shoes with steel toe cap according to directive EN 347.
CAUTION
Risk of injury through hot surfaces
Vacuum pumps can become hot during operation.
Allow the pump to cool before maintenance and repairs.
If necessary wear protective gloves according to directive EN 420.
CAUTION
Risk of injury through sharp edges
Rotor and stator disks of turbopumps have very sharp edges.
Before any working wait for the complete standstill of the pump.
Do not reach in the high vacuum flange.
If necessary wear protective gloves according directive EN 420.
NOTE
CE conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifies
the original product or installs additional components.
Following installation into a plant and before commissioning, the operator must
check the entire system for compliance with the valid EU directives and reassess it
accordingly.

7
Safety
2.4 Improper use
Improper use will cause all claims for liability and warranties to be forfeited. Im-
proper use is deemed to be all use for purposes deviating from those mentioned
above, especially:
• Pumping of corrosive or explosive media.
• Pumping of condensing vapors.
• Pumping of liquids.
• Pumping of dusts.
• Operation with improper high gas throughput.
• Operation with improper high fore-vacuum pressures.
• Operation with improper gas mode.
• Operation with improper high levels of insulated heat input.
• Venting with improper high venting rates.
• Use of the vacuum pump to generate pressure.
• The operation of the devices in potentially radioactive areas.
• Operation in potentially explosive areas.
• The operation of the devices in systems where the turbopumps are subjected to
impact-like stress and vibrations or the effect of periodically occurring forces.
• The use of accessories, which are not named in this manual.
warranty seal
NOTE
Closure seal
The product is sealed at the factory. Damaging or removal of a closure seal leads to the
loss of liability and warranty entitlements.
Do not open the product within its warranty period!
For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-
um Service.

8
Transport and storage
3 Transport and storage
3.1 Transport
Reuse the transport container. Vacuum pumps should be transported or shipped
in the original packing only.
Only remove the protective covers from the high vacuum and the fore-vacuum
side immediately before connection.
Keep the original protective covers.
Always transport the turbopump in an upright position.
3.2 Storage
Close the flange openings by using the original protective covers.
Close further connection ports by using the corresponding protective covers.
Store the pump only indoors at temperatures between -25 °C and +55 °C.
In rooms with moist or aggressive atmospheres, the pump must be airproof
shrink-wrapped in a plastic bag together with a bag of desiccant.

9
Product description
4 Product description
4.1 Product identification
Pump types The product designations of Pfeiffer vacuum turbomolecular pumps are self-ex-
planatory and permit conclusions about the different versions. The product desig-
nation consists of a family designation (1), the size (2), which is oriented on the
pumping speed, and if applicable the additional properties (3) of the pump.
HiPace(1) 300(2) (3)
Pump features
To correctly identify the product when communicating with Pfeiffer Vacuum, al-
ways have the information from the rating plate available.
Fig. 1: Example for a rating plate
Variants • HiPace 300 with TC 400 and 24 VDC ± 5 %
• HiPace 300 with TC 400 and 48 VDC ± 5 %
Scope of delivery • Turbopump with electronic drive unit
• Mating plug for the connection "remote"on the TC 400.
• Protective cover for the high vacuum and the fore-vacuum flange
• Operating instructions
4.2 Function
The turbopump HiPace 300 forms a complete unit together with the electronic
drive unit TC 400. For the voltage supply only Pfeiffer Vacuum power supplies may
be used (e.g.TPS or DCU).
1. Family designation 2. Model designation 3. Property designation
HiPace 300 = Model designation of
the pump related to its
pumping speed class
none = Standard version
U= Upside-down installation orientation
C= Corrosive gas version
P= Process
M= Active magnetic bearing
T= Temperature management system
Characteristics HiPace 300
HV flange DN 100 ISO-K DN 100 ISO-F DN 100 CF-F
Flange material Aluminium Aluminium Stainless steel
Mod.:
Mod.-No.:
Ser. No.:
Oil:
S(N2):
n,f:
Made in Germany 2007/07
HiPace 300
DN 100 ISO-K, 3P
PM P03 900
---
260 l/s
60000 1/min, 1000 Hz
Mass: 6.7 kg
D-35614 Asslar

10
Product description
Fig. 2: View of HiPace 300 with TC 400
Cooling • Water cooling
• Air cooling (optional)
In the case of excess temperature the electronic drive unit reduces the drive power
automatically. Depending on the application and the HiPace different cooling vari-
ants are selectable.
Rotor bearing Hybrid bearing TurboDrag pump
• High vacuum side: maintenance-free permanent magnetic bearing.
• Fore-vacuum side: ceramic ball bearing.
Drive Electronic drive unit TC 400
4.3 Range of application
The pump HiPace 300 must be installed and operated under the following ambient
conditions:
4 High vacuum flange
8 Electronic drive unit TC 400
14 Cooling water connection
16 Sealing gas connection
17 Venting connection
20 Fore-vacuum flange
4
14
20
8
17
16
F
H
SG
Installation location weather protected (indoors)
Protection category IP 54
Protection class III
Temperature +5 °C to +35 °C with air cooling
+5 °C to +40 °C with water cooling
Relative humidity max. 80 %, at T ≤31 °C, up to max. 50% at T ≤40 °C
Atmospheric pressure 77 kPa - 106 kPa
Installation altitude 2000 m max.
Degree of pollution 2
Permissible surr. magnetic field ≤5.5 mT
Overvoltage category II
Connection voltage TC, depending
on the variants
24 VDC ±5%
48 VDC ±5%

11
Installation
5 Installation
5.1 Set-up
When installing the pump, observe the following conditions:
• The ambient conditions specified for the area of use.
• When using a casing heating and a water cooling unit the temperature of the
connected flange of the vacuum chamber must not exceed 120 °C.
• The pump may be fastened to the floor only after consultation with Pfeiffer Vac-
uum.
• It is not allowed to operate the device in systems where impact-like stresses and
vibrations or periodically forces occur.
5.2 Preparatory work
Ensure sufficient cooling for the turbopump.
Where magnetic fields > 5.5 mT are involved, a suitable shielding must be used.
Check installation location and consult Pfeiffer Vacuum if needed!
The maximum permissible rotor temperature for the turbopump is 90 °C. If high
temperatures arise for process reasons, the radiated heat input must not exceed
2.4 W. Install suitable screening sheets, if necessary (design information on re-
quest).
5.3 Assembly
• Ensure the greatest possible cleanliness when installing any high vacuum parts.
Unclean components prolong the pump-down time.
• All flange components must be grease-free, dust-free and dry at installation.
• The operating fluid reservoir is already installed and filled for the turbopump
HiPace 300.
Earthquake safety An earthquake can result in contact with the safety bearings. All forces occuring
hereby are safely absorbed by the properly installed flange connections.
The vacuum chamber must be secured by the customer against shifting and tip-
ping.
DANGER
Danger from the turbopump being torn-off
In case of sudden blocking of the rotor, torques of up to 2000 Nm can occur, which can
lead with incorrect attachment to tearing the turbopump off. The energy released there-
by can hurl the entire pump or fragments from their inside around the area. This can
cause severest injuries (possibly resulting in death) and large property damage.
Precisely follow installation instructions.
Only use Pfeiffer Vacuum original components (accessories) for installation.
NOTE
Installation and operation of accessories
Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The in-
stallation, operation and maintenance of connected devices are described in detail in
the operating instructions of the individual components.
For information on order numbers of components, see "Accessories".
Use original accessory parts only.

12
Installation
Use of a splinter
shield or protection
screen
The installation of a Pfeiffer Vacuum centering ring with splinter shield or protec-
tion screen in the high vacuum flange protects the turbopump against foreign bod-
ies coming from the chamber. The volume flow rate is reduced.
Vibration damper
Mounting orientation When using dry backing pumps Pfeiffer Vacuum HiPace pumps are designed for in-
stallation in any orientation.
Support pipes in front of the vacuum pump or remove them. No force from the
pipe system may be exerted on the fixed pump.
To avoid contamination via the fore-vacuum line when using oil-sealed backing
pumps the fore-vacuum flange should always point vertically downward (± 25°).
The maximum axial loading capacity of the high vacuum flange is 500 N (equals
50 kg). A one-sided load on the high vacuum flange is not permitted.
Fig. 3: Example: How to secure against shifting and tipping by external tremors
SC SC
SC
SC SC
SC = Safety Connection
Vacuum chamber
Reduced pumping speed in %
H2He N2Ar
Splinter shield DN 100 5 7 24 24
Protection screen DN 100 2 2 10 8
DANGER
Danger from the turbopump and vibration dumper being torn-off
In case of sudden blocking of the rotor, an applied vibration dumper cannot compensate
any of the occurring forces. There is a danger of the turbopump being torn-off and there-
by resulting severest injuries and property damages. Applicable safeguards must be
taken to compensate possible occurring torques.
Definetely consult with Pfeiffer Vacuum.
Do not exceed the max. permissible temperature at the vibration dumper (100° C).
Fig. 4: Recommended orientation of the fore-vacuum flange
25° max
VV
VV

13
Installation
Installing the high
vacuum flange
If the rotor is suddenly blocked, the torques arising from the system and the high
vacuum flange must be absorbed. Only the components designated as accessory
can be used to fasten the turbo pumps to the high vacuum flange. The components
for installing the turbo pumps are special designs of Pfeiffer Vacuum. Observe the
minimum strength of 170 N/mm2 for the flange material.
Installation of ISO-K
flange with ISO-K
flange
For the installation of the flange connections the following components are avail-
able:
• The valid mounting kit of the Pfeiffer Vacuum accessories programme.
• A protection screen or splinter shield can optionally be used.
Mind that the sealing surfaces are not damaged.
Connect the flanges according to the drawing and with the component parts of
the mounting kit.
Use the required number of 6claw clamps.
Tighten the claw clamps crosswise in three steps.
Tightening torque: 5, 15, 25 ±2 Nm
Installation of ISO-F
with ISO-F flange
The connection types for installation of ISO-F to ISO-F flange are "hex screw and
blind hole", "stud screw and blind hole" as well as "stud screw and through hole".
The following elements are required:
• The valid mounting kit of the Pfeiffer Vacuum accessories programme.
• A protection screen or splinter shield can optionally be used.
DANGER
Danger to life - impermissible fastening
Twisting or tearing-off is possible in case the rotor is suddenly blocked due to the fas-
tening of pumps on a vacuum chamber with different flange variants.
The combination of different flange types is impermissible in any case.
Pfeiffer Vacuum will not accept any liability for all damages resulting from impermis-
sible fastening.
NOTE
Observe shape tolerances for the counter flange!
Unevennesses of the customer supplied counter flange can lead to warping of the
pump casing despite proper fastening. Leakiness and negative running characteristics
can be the result.
Do not exceed an evenness of max. 0.05 mm for the whole surface.
NOTE
Mounting of ISO flanges
If the rotor suddenly blocks the connection of high vacuum flanges of types ISO-KF or
ISO-K can lead to twisting despite proper installation.
• The tighness of the high vacuum flange is not at risk thereby.

14
Installation
Hexagon screw and blind hole
Mind that the sealing surfaces are not damaged.
Connect the flanges according to the drawing and with the component parts of
the mounting kit.
Use the required number of 8hex screws with washer.
For a flange material with a strength of > 270 N/mm2screw in the hex screw 1.5 d
into the blind hole.
Tighten the hex screws crosswise in three steps.
Tightening torque DN 100: 5, 12, 22 ± 2 Nm
Stud screw and blind hole
Mind that the sealing surfaces are not damaged.
Connect the flanges according to the drawing and with the component parts of
the mounting kit.
Use the required number of 8stud screws and nuts.
For a flange material with a strength of 170 - 270 N/mm2screw in the hex screw
2.5 d into the blind hole.
Tighten the nuts crosswise in three steps.
Tightening torque DN 100: 5, 12, 22 ± 2 Nm
Stud screw and through hole
Mind that the sealing surfaces are not damaged.
Connect the flanges according to the drawing and with the component parts of
the mounting kit.
Use the required number of 8stud screws and nuts.
Tighten the nuts crosswise in three steps.
Tightening torque DN 100: 5, 12, 22 ± 2 Nm
Installation of CF-
flanges
The connection types for installation of CF to CF flange are "stud screw and blind
hole" as well as "hex screw and through hole". The following elements are re-
quired:
• The valid mounting kit of the Pfeiffer Vacuum accessories programme.
• A copper seal
• A protection screen or splinter shield can optionally be used.
1.5d
2.5d
NOTE
Preservation of sealing capacity
Observe the following to preserve sealing capacity:
Touch seals only with gloves.
Make sure sealing lips are undamaged.

15
Installation
Stud screw and blind hole
If used: Insert protective screen or splinter shield with the clamping lugs down-
ward into the high vacuum flange of the turbopump.
Place the seal exactly in the hollow.
Connect the flange using 16 stud screws (M8) with washers and nuts and tighten
circularly with a torque of 22 ± 2 Nm. After this, check the torque, since flowing
of the sealing material may make it necessary to tighten the screws.
Hexagon screw and through hole
If used: Insert protective screen or splinter shield with the clamping lugs down-
ward into the high vacuum flange of the turbopump.
Place the seal exactly in the hollow.
Connect the flange using 16 hex screws (M8) with washers and nuts and tighten
circularly with a torque of 22 ± 2 Nm. After this, check the torque, since flowing
of the sealing material may make it necessary to tighten the screws.
5.4 Connections to the turbopump
Electronic drive unit Turbopumps with integrated electronic drive unit are designed for various applica-
tions. Therefore different connection panels are available for the TC 1200.
• TC 400 in standard version
• TC 400 PB for Profibus linking
• TC 400 E74 in dependence on specification SEMI E74
• TC 400 DN for DeviceNet linking
Detailed description for function, configuration and operation with the respective
connection panel are given in the specific operating instructions for the electronic
drive unit.
Connecting the
power supply
For voltage supply of the electronic drive unit TC 400, only use original power sup-
plies (e.g. TPS 310 or DCU 310). Use of other power supplies only after consultation
with Pfeiffer Vacuum. Connecting cables are available from the Pfeiffer Vacuum ac-
cessory programme.
Make sure that the turbopump has the correct supply voltage.
WARNING
Danger of electric shock
In case of defect, the parts connected to the power supply are under voltage.
Always keep the mains connection freely accessible so you can disconnect it at any
time.
HiPace VDC Drive unit Power supply Power supply with DCU
HiPace 300 24 TC 400 TPS 310/311 DCU 310
HiPace 300 48 TC 400 TPS 400/401 DCU 400

16
Installation
Switch off switch S1 on the mains pack (position "0").
Insert the connection cable with the socket in the connection "DC in" on the elec-
tronic drive unit and close the bayonet lock.
Insert the connection cable with the plug in the connection "DC out" on the pow-
er supply and close the bayonet lock.
Remote plug The shipment includes a mating plug for the 26-pin connection with the designa-
tion "remote" on the TC 400. The mating plug bridges the following connections
with the supply voltage (Pin 1), allowing the turbopump to operate without an ad-
ditional operating unit or remote control:
• Pin 2, Enable venting "on"
• Pin 3, Motor pump "on"
• Pin 4, Pumping station "on"
• Pin 14, Remote access request
Place and fix the mating plug on the connection "remote" on the TC 400.
Accessory connection Up to 4 accessories can be connected to the electronic drive unit TC 400. M12 sock-
ets with the designation "accessory" are available for this purpose. The accessory
connections have been preconfigured at the factory. If the units listed below are
connected with the preconfigured connection, they are immediately ready for op-
eration according to the factory settings. It is possible to connect other accessories;
to do so, settings must be made on the electronic drive unit.
To connect two units to one accessory connection, use the appropriate Y-Con-
nector from the Pfeiffer Vacuum range of accessories.
Connect the adapter to the appropriate red-coded connection on the TC 400.
Settings can be made via the interfaces of the TC 400 (remote, RS485, Profibus
or DeviceNet).
Overview of factory preset accessory connections on the TC 400
Fig. 5: Conneting the TC 400 to a power supply pack using a Pfeiffer Vacuum cable
DC out
S1
TPS / DCU Electronic-
drive unit
DC in
PM 061 352 -T
CAUTION
Automatic start
After bridging the contacts Pin 1, 3, 4, 14 on the connection "remote" or using the mat-
ing plug supplied and setting up the supply voltage, the turbopump will run up immedi-
ately.
Switch on the mains supply on the turbo pump immediately before operation.
12
12
Y-Connector
for Accessories
Accessory connection Connection with Y-connector Preset accessory
Accessory A1 Acc. A to Y-1 Air cooling unit
Accessory A2 Acc. A to Y-2 Backing pump
Accessory B1 Acc. B to Y-1 Venting valve
Accessory B2 Acc. B to Y-2 Casing heating unit

17
Installation
Connecting the fore-
vacuum side
Recommendation: As backing pump, use a dry-compressing vacuum pump or a
rotary vane pump from the Pfeiffer Vacuum programme. The backing pump must
generate a vacuum pressure of ≤ 5 mbar.
With rigid pipe connections: Install bellows for attenuation of vibrations in the
connection line.
Connect the fore-vacuum line with small-flange components or threaded hose
couplings. Do not narrow the free cross section of the fore-vacuum flange!
The backing pump is connected electrically via a relay box.
Plug in and fix the accessory’s control lead to the corresponding accessory con-
nection port on the TC 400.
Default for the backing pump is "accessory A2".
Establish the mains supply for the relay box according to the accessory operat-
ing instructions.
– Observe the valid supply voltage of the backing pump.
WARNING
Damage to health due to poisonous gases
Process gases can damage health and contaminate the environment.
Safely lead away the gas emission from the backing pump!
Observe all safety recommendations of the gas producer.
Fig. 6: Connecting the backing pump
20 Fore-vacuum connection
20a Backing pump
20b Backing pump relay box
20.1 Centering ring
20.2 Clamping ring
V
20b
20a
20.2
20.1
20
NOTE
Design of the fore-vacuum connection regarding sudden twisting of the pump
If the rotor suddenly blocks the connection of high vacuum flanges of types ISO-KF or
ISO-K can lead to twisting despite proper installation.
Keep masses small, which can be installed directly to the pump.
First connect flexible line elements directly to the turbopump, if necessary.

18
Installation
Air cooling As an option, turbopumps with the electronic drive unit TC 400 may be operated
with air cooling up to an ambient temperature of +35 °C.
Fix the Pfeiffer Vacuum air cooling unit to the holes of the turbopump using two
screws.
Plug in and fix the accessory’s control lead to the corresponding accessory con-
nection port on the TC 400.
Default for air cooling is "accessory A1".
Venting valve The Pfeiffer Vacuum venting valve is used for automatic venting in case of shut-
down or power failure.
The permissible connection pressure is max. 1.5 bar absolute.
Unscrew the venting screw with seal ring from the venting connection.
Screw in the venting valve with seal ring.
Plug in and fix the accessory’s control lead to the corresponding accessory con-
nection port on the TC 400.
Default for the venting valve is "accessory B1".
If neccessary install a venting gas supply (e.g. inert gas) to the intake (G 1/8") of
the solenoid valve.
Fig. 7: Connecting the air cooling
3 Pump lower part
3a Air cooling unit
3b Allen head screw
3c Counter sunk screw
3
3a
3b
3c
Fig. 8: Connecting the venting valve
18 Seal ring 17 Venting screw 17a Venting valve
F
17
17a
18

19
Installation
Heating jacket The turbopump and vacuum chamber can be heated to reach the final pressure
more quickly. Use of a heating jacket is only permissible for pumps with the high
vacuum flange in stainless steel design. The heating duration depends on the de-
gree of contamination as well as the final pressure to be reached and should be at
least 4 hours.
• When using a casing heating and a water cooling unit the temperature of the
connected flange of the vacuum chamber must not exceed 120 °C.
• The maximum permissible rotor temperature for the turbopump is 90 °C. If high
temperatures arise for process reasons, the radiated heat input must not exceed
2.4 W. Install suitable screening sheets, if necessary (design information on re-
quest).
Bend open the outer heating jacket on the tensioning strap and place it
sidewards on to the cylindrical segment of the pump casing.
– Do not bend the heating straps!
– The heating jacket must seat completely on the casing segment.
Fix the heating jacket with the fixing screw on the casing.
– Observe the tightening torque for the fixing screw!
Tightening torques for fixing screws of heating jackets
Plug in and fix the accessory’s control lead to the corresponding accessory con-
nection port on the TC 400.
CAUTION
Dangerous excess temperatures
Process-related high temperatures can result in impermissible excess temperatures
and thus damage to the turbopump.
Always use water cooling when a casing heating is used or when the pump is con-
nected to a heated vacuum chamber.
WARNING
Danger of burns
High temperatures arise when the turbopump or vacuum chamber are baked out. As a
result, there is a danger of burns from touching hot parts, even after the casing heating
is switched off!
Thermally insulate heating jacket, pump housing and vacuum chamber, if possible
during installation.
Do not touch heating jacket, pump casing and vacuum chamber during bake out.
Fig. 9: Connecting the heating jacket
4 Pump casing
4a Heating jacket
4b Fixing screw
4c Heating relay box
4d Warning sticker
Fixing screw Tightening torque
in cold condition
Tightening torque
during the heating-up
Singular retightening af-
ter the cooling down
M5 6 Nm 7 Nm 7 Nm
M6 11 Nm 12 Nm 12 Nm
H
4a
4d
4b
2x
4c
4

20
Installation
Default for the casing heating is "accessory B2".
Establish the mains supply for the relay box according to the accessory operat-
ing instructions.
Sealing gas connec-
tion
The turbopump must be operated with sealing gas to protect it, such as in the case
of unclean processes or high gas throughput. The supply is made via a sealing gas
valve or alternatively via a sealing gas throttle without control. The activation of
the control valve for the sealing gas connection is not pre-installed in the electronic
drive unit and has to be configured via their interfaces.
The permissible connection pressure is max. 1.5 bar absolute.
• When operating the pump with more than 50 % of the maximum gas through-
put, sealing gas must be used to ensure rotor cooling.
• The sealing gas flow rate amounts 12-15 sccm for the HiPace 300.
Sealing gas supply without control valve
Unscrew the locking screw with seal ring out of the sealing gas connection.
Screw the sealing gas throttle with sealing ring into the sealing gas connection.
Sealing gas supply with control valve
Unscrew the locking screw with seal ring out of the sealing gas connection.
Screw the sealing gas valve with seal ring into the sealing gas connection.
Insert the control cable of the accessory into a free accessory connector on the
TC 400 and tighten.
Make the settings and control via the interfaces of the electronic drive unit.
Fig. 10: Connecting the sealing gas throttle
18 Seal ring 16 Locking screw 16b Sealing gas throttle
Fig. 11: Connecting the sealing gas valve
18 Seal ring 16 Locking screw 16a Sealing gas valve
SG
3a
16
16b
18
SG
3a
16
16a
18