
Contents
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 3
CONTENTS
1BASIC SAFETY INSTRUCTIONS..................................................................................5
1.1 Laser safety.....................................................................................................................5
1.2 Laser shutter....................................................................................................................5
1.3 Signs................................................................................................................................6
1.4 Classification of laser devices.........................................................................................7
1.5 Laser area .......................................................................................................................8
1.6 Special hazards caused by mirrors made of beryllium ...................................................9
1.7 Special hazards caused by lenses made of zinc selenide..............................................9
2BASIC INFORMATION.................................................................................................10
2.1 Introduction....................................................................................................................10
2.2 Intended use..................................................................................................................10
2.3 Package contents..........................................................................................................10
2.4 Module overview ...........................................................................................................11
2.5 Warranty........................................................................................................................12
2.6 Manufacturer .................................................................................................................12
2.7 Customer Service..........................................................................................................12
2.8 Status LED of the linear translator module ...................................................................13
2.8.1 Analog linear translator modules...................................................................................13
2.8.2 Digital linear translator modules....................................................................................13
2.9 Status LEDs of the deflection unit.................................................................................14
2.9.1 Analog deflection units..................................................................................................14
2.9.2 Digital deflection units ...................................................................................................14
3TECHNICAL DATA.......................................................................................................15
3.1 Rating plate code ..........................................................................................................15
3.1.1 Deflection Unit...............................................................................................................16
3.1.2 Linear Translator Module ..............................................................................................17
3.1.3 Linear Translator Module (FOCUSSHIFTER)...............................................................17
3.2 Conformity with directives .............................................................................................18
4FUNCTIONAL DESCRIPTION .....................................................................................19
4.1 Laser beam subsystem.................................................................................................19
4.2 Functional principle of analog subsystems ...................................................................20
4.3 Functional principle of digital subsystems.....................................................................21
4.4 Protection window .........................................................................................................26
4.5 F-Theta lens ..................................................................................................................27
4.6 Interfaces of the linear translator module......................................................................28
4.6.1 Analog input...................................................................................................................28
4.6.2 Digital input....................................................................................................................29
4.6.3 Power supply.................................................................................................................30
4.6.4 Stepper motor interface.................................................................................................31
4.6.5 Digital output..................................................................................................................32
4.7 Interfaces of the deflection unit .....................................................................................33
4.7.1 Analog input...................................................................................................................33
4.7.2 Power supply.................................................................................................................34
4.7.3 Digital interface..............................................................................................................35
5INSTALLATION............................................................................................................36
5.1 Installing the linear translator module ...........................................................................37
5.2 Requirements to the cooling water................................................................................37
5.3 Requirements to the cooling air.....................................................................................37